JP2007038394A5 - - Google Patents

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Publication number
JP2007038394A5
JP2007038394A5 JP2006166440A JP2006166440A JP2007038394A5 JP 2007038394 A5 JP2007038394 A5 JP 2007038394A5 JP 2006166440 A JP2006166440 A JP 2006166440A JP 2006166440 A JP2006166440 A JP 2006166440A JP 2007038394 A5 JP2007038394 A5 JP 2007038394A5
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JP
Japan
Prior art keywords
layer
insulating substrate
frame
forming
microstructure
Prior art date
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Granted
Application number
JP2006166440A
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English (en)
Japanese (ja)
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JP2007038394A (ja
JP4587320B2 (ja
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Application filed filed Critical
Priority to JP2006166440A priority Critical patent/JP4587320B2/ja
Priority claimed from JP2006166440A external-priority patent/JP4587320B2/ja
Publication of JP2007038394A publication Critical patent/JP2007038394A/ja
Publication of JP2007038394A5 publication Critical patent/JP2007038394A5/ja
Application granted granted Critical
Publication of JP4587320B2 publication Critical patent/JP4587320B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006166440A 2005-06-30 2006-06-15 微小構造体、マイクロマシン、およびこれらの作製方法 Expired - Fee Related JP4587320B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006166440A JP4587320B2 (ja) 2005-06-30 2006-06-15 微小構造体、マイクロマシン、およびこれらの作製方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005193154 2005-06-30
JP2006166440A JP4587320B2 (ja) 2005-06-30 2006-06-15 微小構造体、マイクロマシン、およびこれらの作製方法

Publications (3)

Publication Number Publication Date
JP2007038394A JP2007038394A (ja) 2007-02-15
JP2007038394A5 true JP2007038394A5 (enrdf_load_stackoverflow) 2007-04-05
JP4587320B2 JP4587320B2 (ja) 2010-11-24

Family

ID=37796834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006166440A Expired - Fee Related JP4587320B2 (ja) 2005-06-30 2006-06-15 微小構造体、マイクロマシン、およびこれらの作製方法

Country Status (1)

Country Link
JP (1) JP4587320B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7999335B2 (en) * 2007-12-05 2011-08-16 Semiconductor Energy Laboratory Co., Ltd. Micromachine and method for manufacturing the same
JP6341959B2 (ja) 2016-05-27 2018-06-13 浜松ホトニクス株式会社 ファブリペロー干渉フィルタの製造方法
TWI717519B (zh) 2016-05-27 2021-02-01 日商濱松赫德尼古斯股份有限公司 法布立-培若干涉濾光器之製造方法
CN118091929A (zh) * 2016-08-24 2024-05-28 浜松光子学株式会社 法布里-珀罗干涉滤光器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5808331A (en) * 1995-09-05 1998-09-15 Motorola, Inc. Monolithic semiconductor device having a microstructure and a transistor
JP3975574B2 (ja) * 1998-09-09 2007-09-12 株式会社デンソー モノリシックマイクロ波集積回路の製造方法
JP2002174721A (ja) * 2000-12-06 2002-06-21 Yokogawa Electric Corp ファブリペローフィルタ
JP2002214548A (ja) * 2001-01-15 2002-07-31 Sony Corp 三次元構造体およびその製造方法
JP2002214549A (ja) * 2001-01-18 2002-07-31 Ricoh Co Ltd 光変調装置及びその光変調装置の製造方法並びにその光変調装置を具備する画像形成装置及びその光変調装置を具備する画像投影表示装置
JP2003340795A (ja) * 2002-05-20 2003-12-02 Sony Corp 静電駆動型ｍｅｍｓ素子とその製造方法、光学ｍｅｍｓ素子、光変調素子、ｇｌｖデバイス及びレーザディスプレイ
US7653371B2 (en) * 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit

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