JP2007027088A - フィールドエミッタの陰極及びその製造方法、並びに平面光源 - Google Patents
フィールドエミッタの陰極及びその製造方法、並びに平面光源 Download PDFInfo
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- JP2007027088A JP2007027088A JP2006081591A JP2006081591A JP2007027088A JP 2007027088 A JP2007027088 A JP 2007027088A JP 2006081591 A JP2006081591 A JP 2006081591A JP 2006081591 A JP2006081591 A JP 2006081591A JP 2007027088 A JP2007027088 A JP 2007027088A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 39
- 239000002041 carbon nanotube Substances 0.000 claims description 38
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 38
- 239000011521 glass Substances 0.000 claims description 17
- 238000002844 melting Methods 0.000 claims description 16
- 239000002923 metal particle Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 11
- 230000008018 melting Effects 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 8
- 150000007530 organic bases Chemical class 0.000 claims description 6
- 238000005245 sintering Methods 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 6
- 238000007789 sealing Methods 0.000 description 4
- 238000002156 mixing Methods 0.000 description 3
- 229910000986 non-evaporable getter Inorganic materials 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 239000004014 plasticizer Substances 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 102000029749 Microtubule Human genes 0.000 description 1
- 108091022875 Microtubule Proteins 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005352 clarification Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 210000004688 microtubule Anatomy 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J63/00—Cathode-ray or electron-stream lamps
- H01J63/06—Lamps with luminescent screen excited by the ray or stream
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30469—Carbon nanotubes (CNTs)
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- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Cold Cathode And The Manufacture (AREA)
Abstract
【解決手段】本発明に係るフィールドエミッタの陰極は、陰極導電層と、該陰極導電層に形成した電子放出層と、を含む。本発明に係る平面光源は、前記フィールドエミッタの陰極と、陽極と、を含む。本発明はフィールドエミッタの陰極の製造方法も提供する。
【選択図】図3
Description
「Helical Microtubules of Graphitic Carbon」、Nature、S.Iijima、1991年、第354巻、第56頁
図1及び図2を参照して、本実施例に係るフィールドエミッタの陰極214は、陰極導電層207及び電子放出層206を有する。
本発明の実施例2に、前記実施例1に係るフィールドエミッタの陰極214の製造方法を提供する。前記フィールドエミッタの陰極214の製造方法は、前記陰極導電層207を準備する段階と、前記カーボンナノチューブ211、低融点ガラス212、導電性の金属粒子213及び有機基材を混合させてペーストを形成する段階と、前記ペーストを前記陰極導電層207に塗布して前記電子放出層206を形成する段階と、前記電子放出層206を形成した前記陰極導電層207を乾燥させて焼結するように加工を行う段階と、を含む。
図3を参照して、本実施例に係る平面光源20は、陰極基板208と、フィールドエミッタの陰極214と、陽極基板201と、陽極215と、密封部205と、を含む。
201 陰極基板
202 陽極導電層
203 蛍光層
204 アルミ膜
205 密封部
206 電子放出層
207 陰極導電層
208 陰極基板
209 支持棒
210 非蒸発型ゲッターポンプ
211 カーボンナノチューブ
212 ガラス
213 導電の金属粒子
214 フィールドエミッタの陰極
215 陽極
Claims (8)
- 陰極導電層と、該陰極導電層に形成した電子放出層と、を含むフィールドエミッタの陰極において、
前記電子放出層は、カーボンナノチューブ、低融点のガラス、導電性の金属粒子を有することを特徴とするフィールドエミッタの陰極。 - 前記導電性の金属粒子は、ITO又は銀からなることを特徴とする、請求項1に記載のフィールドエミッタの陰極。
- 前記カーボンナノチューブの長さは5〜15μmに設定されることを特徴とする、請求項1に記載のフィールドエミッタの陰極。
- 陰極導電層を準備する段階と、
カーボンナノチューブ、導電の金属粒子、低融点のガラス、有機基材をペーストに形成する段階と、
前記ペーストを前記陰極導電層に塗布して電子放出層を形成した後、乾燥させて焼結するように加工を行う段階と、
を含むことを特徴とするフィールドエミッタの陰極の製造方法。 - 前記乾燥及び焼結加工を行った後、前記電子放出層に対して研磨加工することを特徴とする、請求項4に記載のフィールドエミッタの陰極の製造方法。
- 前記ペーストは、5〜15wt%のカーボンナノチューブと、10〜20wt%の導電性金属粒子と、5wt%の低融点のガラスと、60〜80wt%の有機基材と、からなることを特徴とする、請求項4に記載のフィールドエミッタの陰極の製造方法。
- 前記カーボンナノチューブの長さは5〜15μmに設定されることを特徴とする、請求項4又は6に記載のフィールドエミッタの陰極の製造方法。
- 請求項1〜3の何れか一項に記載のフィールドエミッタの陰極と、
陽極導電層及び該陽極導電層に形成した蛍光層を有し、前記蛍光層が前記電子放出層に対向して設置された陽極と、を含むことを特徴とする平面光源。
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CN200510036029.6A CN100583349C (zh) | 2005-07-15 | 2005-07-15 | 场发射阴极、其制造方法及平板型光源 |
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JP4481948B2 JP4481948B2 (ja) | 2010-06-16 |
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Cited By (4)
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US8733339B2 (en) | 2008-04-18 | 2014-05-27 | Tsinghua University | Solar collector and solar heating system using same |
US9010315B2 (en) | 2008-04-11 | 2015-04-21 | Tsinghua University | Solar collector based on carbon nanotubes and solar heating system using the same |
JP2016018779A (ja) * | 2014-07-10 | 2016-02-01 | ツィンファ ユニバーシティ | 電界放出陰極素子及び電界放出装置 |
US9263660B2 (en) | 2009-02-20 | 2016-02-16 | Tsinghua University | Generator |
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CN101192493B (zh) * | 2006-11-22 | 2011-02-02 | 鸿富锦精密工业(深圳)有限公司 | 阳极装置及其制造方法 |
CN101266180A (zh) * | 2007-03-16 | 2008-09-17 | 清华大学 | 电离规 |
CN101285960B (zh) * | 2007-04-13 | 2012-03-14 | 清华大学 | 场发射背光源 |
CN101303955B (zh) | 2007-05-09 | 2010-05-26 | 清华大学 | 离子源组件 |
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CN101303960B (zh) * | 2007-05-11 | 2012-03-14 | 清华大学 | 场发射背光源 |
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US6537427B1 (en) * | 1999-02-04 | 2003-03-25 | Micron Technology, Inc. | Deposition of smooth aluminum films |
JP4323679B2 (ja) * | 2000-05-08 | 2009-09-02 | キヤノン株式会社 | 電子源形成用基板及び画像表示装置 |
EP1315191B1 (en) * | 2001-11-23 | 2007-08-22 | Samsung SDI Co. Ltd. | Composite for paste including carbon nanotubes, electron emitting device using the same, and manufacturing method thereof |
JP2004178891A (ja) | 2002-11-26 | 2004-06-24 | Mitsubishi Electric Corp | 電子放出型発光素子の製造方法 |
KR100879293B1 (ko) * | 2002-12-26 | 2009-01-19 | 삼성에스디아이 주식회사 | 다층 구조로 형성된 전자 방출원을 구비한 전계 방출표시장치 |
JP2004253201A (ja) | 2003-02-19 | 2004-09-09 | Nitta Ind Corp | 電界放出型冷陰極およびその製造方法 |
JP4851704B2 (ja) | 2003-10-24 | 2012-01-11 | 太陽ホールディングス株式会社 | カーボンナノチューブのパターン形成方法およびそのパターン形成物 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9010315B2 (en) | 2008-04-11 | 2015-04-21 | Tsinghua University | Solar collector based on carbon nanotubes and solar heating system using the same |
US8733339B2 (en) | 2008-04-18 | 2014-05-27 | Tsinghua University | Solar collector and solar heating system using same |
US9263660B2 (en) | 2009-02-20 | 2016-02-16 | Tsinghua University | Generator |
JP2016018779A (ja) * | 2014-07-10 | 2016-02-01 | ツィンファ ユニバーシティ | 電界放出陰極素子及び電界放出装置 |
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US20070051965A1 (en) | 2007-03-08 |
CN1897204A (zh) | 2007-01-17 |
CN100583349C (zh) | 2010-01-20 |
US7728504B2 (en) | 2010-06-01 |
JP4481948B2 (ja) | 2010-06-16 |
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