JP2007012426A - Organic el display panel, its manufacturing and inspection methods - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an organic EL display panel as well as its manufacturing and inspection methods which can simply measure the overall accuracy in the manufacturing process of the organic EL display panel, including the measurements of any shifts in mounting position of each part material on an organic EL device substrate or any shifts in joint position of the organic EL device substrate and sealing substrate. <P>SOLUTION: The organic EL display panel incorporates, on its substrate, an organic EL device substrate 2 on which a positive electrode, an insulating layer, a barrier rib, an organic light-emitting layer, and a negative electrode, are formed; a sealing substrate 3 attached in opposite to the organic EL device substrate 2; and a sealing material 4 which is attached on the periphery of the sealing substrate 3 for sealing the organic EL device substrate 2 and the sealing substrate 3. The organic EL device substrate 2 is provided with a scale 13 on the outside of the EL device display area. The scale 13 is formed together with any of the part materials in the manufacturing process of the organic EL device substrate 2. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an organic EL display panel having a scale, a manufacturing method thereof, and an inspection method.

With the recent rapid technological development in the information and communication field, flat panel displays, especially organic EL (Electro Luminescence) display panels, are highly expected as next-generation display devices.
An organic EL display panel is a sealing material in which an organic EL element substrate having an organic light emitting layer sandwiched between electrodes and a sealing substrate facing the organic EL element substrate are disposed on the outer periphery of the sealing substrate It is sealed with.
In the organic EL element, when a voltage is applied between the electrodes, holes from the anode and electrons from the cathode are injected into the organic EL layer to recombine, and are included in the organic EL layer by the energy generated at that time. The molecule of the organic light emitting compound is excited. The energy when the molecules excited in this way return to the ground state is emitted as light, causing a light emission phenomenon. The organic EL element is a self-luminous element utilizing this light emission phenomenon, and is excellent in terms of high-speed response, visibility, brightness, and the like. Furthermore, since a backlight required for a liquid crystal display panel is not required, power consumption is low, and it is advantageous for thinning the panel.

  On the other hand, the organic EL display panel is required to precisely control the formation of each member on the organic EL element substrate or the bonding between the organic EL element substrate and the sealing substrate in the manufacturing process. If these are deficient, the image quality may be impaired. In particular, it is known that an organic light emitting layer formed on an organic EL element substrate causes characteristic deterioration due to moisture that has entered the panel, resulting in a decrease in luminance, a reduction in pixels, a decrease in the life of an organic EL display panel, and the like. Yes.

  Therefore, when bonding the organic EL element substrate and the sealing substrate, as a method of suppressing the displacement of the bonding position, an alignment mark is provided on the outer periphery of the organic EL element substrate and the sealing substrate, and the organic EL element substrate and the sealing substrate are sealed. A method of performing bonding with a stop substrate while performing alignment using a CCD camera on the basis of the alignment mark is disclosed (see Patent Document 1).

  On the other hand, in the manufacture of an organic EL display panel, not only the steps are precisely performed as described above, but also the deviation width of the formation position of each member on the organic EL element substrate, or between the organic EL element substrate and the sealing substrate. It is also necessary to confirm the displacement width of the joining position and improve the manufacturing process based on these data.

Therefore, conventionally, regarding the deviation width of the formation position of each member on the organic EL element substrate, after taking an enlarged photograph of each member using an optical microscope or the like, a measure obtained by magnifying the same magnification as this photograph is taken. A method of measuring using a microscope having a length measuring function or the like is employed.
JP 2005-71646 A

However, the method using the measure or the method using a microscope having a length measuring function has problems such as low work efficiency and requiring special equipment.
Further, even the method described in Patent Document 1 has a problem that the accuracy of alignment is not sufficient and the displacement width of the joining position cannot be measured.

  The present invention has been made in view of the above-described problems, and includes organic EL display such as a shift in the formation position of each member on the organic EL element substrate or a shift in the bonding position between the organic EL element substrate and the sealing substrate. It is an object of the present invention to provide an organic EL display panel that can easily measure the accuracy of a panel manufacturing process, a manufacturing method thereof, and an inspection method.

To solve the above problem,
The invention according to claim 1 is an organic EL element substrate in which an anode electrode, an insulating layer, a partition wall, an organic light emitting layer, and a cathode electrode are formed on a substrate, a sealing substrate facing the organic EL element substrate, An organic EL display panel provided on an outer peripheral portion of a sealing substrate and provided with a sealing material that joins the organic EL element substrate and the sealing substrate, the organic EL element substrate being an EL element display An organic EL comprising a scale outside the region, the scale being two scales orthogonal to each other, and one of the two scales being parallel to the partition wall It is a display panel.

  In the invention according to claim 2, the scale is arranged from a sealed space surrounded by the organic EL element substrate, the sealing substrate, and the sealing material to an edge of the organic EL element substrate. The organic EL display panel according to claim 1.

  The invention according to claim 3 is the organic EL display panel according to claim 1 or 2, wherein the scale is made of the same material as any of the anode electrode, the cathode electrode and the insulating layer. .

  Invention of Claim 4 is a manufacturing method of the organic electroluminescent display panel as described in any one of Claims 1-3, Comprising: A scale is formed out of the electroluminescent element display area on an organic electroluminescent element substrate. It is a manufacturing method of the organic electroluminescence display panel characterized by having a process.

  According to a fifth aspect of the present invention, in any of the steps of forming the anode electrode, the insulating layer, and the cathode electrode, the scale is simultaneously formed. It is.

  Invention of Claim 6 confirms the precision of an organic electroluminescence display panel manufacturing process using the scale provided in the organic electroluminescence display panel as described in any one of Claims 1-3, It is characterized by the above-mentioned. This is an inspection method for an organic EL display panel.

  According to the present invention, it is possible to easily measure the accuracy of the manufacturing process of the organic EL display panel, such as a shift in the formation position of each member on the organic EL element substrate or a shift in the bonding position between the organic EL element substrate and the sealing substrate. By improving the process conditions based on the obtained measurement result information, a high-quality organic EL display panel can be efficiently manufactured. Further, when implementing the present invention, no special equipment or the like is necessary, and it can be carried out easily. Therefore, an organic EL display panel excellent in cost can be manufactured.

Hereinafter, an example of an organic EL display panel according to an embodiment of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic cross-sectional view showing an example of an organic EL display panel 1 according to the present embodiment.
An organic EL display panel 1 includes an organic EL element substrate 2, a sealing substrate 3 facing the organic EL element substrate 2, a sealing material 4 for sealing the organic EL elements by bonding these substrates, and an organic EL element substrate 2, a water catching material 5 provided in a sealed space formed by the sealing substrate 3 and the sealing material 4.

  The organic EL element substrate 2 is made of a transparent glass substrate having a thickness of 0.4 to 1.1 mm, and a transparent anode electrode 30 such as ITO is formed thereon. The lower side 10 of the organic EL element substrate 2 corresponds to a so-called viewing side.

  On the anode electrode 30, organic light emitting layers 7, 7... Which are self-luminous sources, cathode electrodes 8, 8... Made of a metal material such as aluminum, insulating layers 6, 6. .. and partition walls 9, 9... Made of novolak resin or the like are formed, and an electric current can be applied by sandwiching the organic light emitting layer 7 between the anode electrode 30 and the cathode electrode 8.

  The sealing substrate 3 is made of glass, acrylic resin, or the like, and is provided so as to cover the organic EL element substrate 2. Further, the shape of the sealing substrate 3 is such that a convex portion is provided on the outer peripheral portion of the substrate on the flat plate, and this convex portion is joined to the organic EL element substrate 2 via the sealing material 4. As a result, the organic EL element is sealed.

  The sealing material 4 is made of an ultraviolet curable resin such as epoxy or acrylic. Among these, a resin having low water permeability is preferable from the viewpoint of preventing moisture from entering from the outside.

A water catching material 5 is provided over the entire surface of the sealing substrate 3 surrounded by the convex portions. The water catching material 5 may be provided not on the entire surface of the sealing substrate 3 surrounded by the convex portions but on a part thereof. However, in order to increase the water catching efficiency in the panel, it is preferably provided over the entire surface. .
The water catching material is obtained by mixing a substance having a water catching function in a viscous solvent. Examples of the substance having a water catching function include a physical adsorption type such as zeolite, alumina, silica gel, and molecular sieve. And chemisorption types such as calcium oxide, barium oxide, magnesium oxide, sodium sulfate, calcium sulfate, and titanium sulfate.

The water catching material 5 can be applied and provided on the surface surrounded by the convex portions of the sealing substrate 3 using a dispenser or the like in a nitrogen atmosphere or a vacuum in which moisture intrusion is blocked. The coating amount is preferably 0.01 to 0.5 mm ³ / mm ² . Moreover, it is preferable to apply | coat to the film form of thickness 10-300 micrometers from a viewpoint of enlarging a surface area and improving water capture efficiency.

FIG. 2 is a schematic plan view of the organic EL display panel 1 shown in FIG. 1 as viewed from the sealing substrate side 11.
Reference numeral 13 is a scale provided on the organic EL element substrate 2, and includes an X-axis scale 13a and a Y-axis scale 13b in the coordinate axes shown in FIG. Here, the scale 13 is simplified and displayed as a line. In the manufacturing process of the organic EL element substrate 2, after forming a film by vapor deposition or sputtering, in any process of forming a member by photolithography and etching, the scale 13 is simultaneously formed using the same material as these members. . Specifically, for example, in any of the steps of forming the anode electrode 30, the insulating layer 6, and the cathode electrode 8, they are formed simultaneously with these members.

When the sealing substrate 3 is colored and it is difficult to read the scale 13 from the sealing substrate side 11, or there is a cathode electrode 8 or wiring near the position where the scale 13 is formed, and the scale 13 is formed with an electrode material. If this is not possible, the scale 13 may be formed when the anode electrode 30 or the insulating layer 6 is formed.
Thus, in the present invention, the scale 13 can be formed at the same time as each member in the manufacturing process of the organic EL display panel 1, and therefore can be easily performed without requiring special equipment. .

The scale 13 is provided at one of the four corners of the organic EL display panel 1. That is, two are provided so as to be orthogonal to each other in the X-axis direction and the Y-axis direction outside the element display area from the cutting position 12 of the organic EL display panel 1, both of which are within the sealed space. It is stretched. The cutting position 12 is an edge of the organic EL element substrate 2 in the organic EL display panel. Moreover, it is made to be parallel to the outermost partition wall 9 in the panel. By providing in this way, as described later, each member on the organic EL element substrate 2 is set with the partition wall 9 as a reference position. The displacement of the position or the displacement of the bonding position between the organic EL element substrate 2 and the sealing substrate 3 can be easily measured.
Here, although the scale 13 is shown as an example provided at one of the four corners of the organic EL display panel 1, the number is not limited to this and may be provided at two or more of the four corners.

Next, a method for manufacturing the organic EL display panel 1 according to the present embodiment will be described below by taking as an example a method in which the scale 13 is simultaneously formed when the anode electrode 30 is formed. In addition, this invention is not limited to the method shown below at all.
First, a method for manufacturing the organic EL element substrate 2 will be described.
On the glass substrate, ITO, which is an anode electrode material, is deposited by vapor deposition or sputtering to a film thickness of about 150 nm. Subsequently, an ITO pattern is formed by photolithography and etching. This ITO pattern becomes the anode electrode 30. Etching may be either wet etching or dry etching.

  At this time, the scale 13 is simultaneously formed. The scale 13 is provided so as to extend from the cutting position 12 of the organic EL display panel 1 toward the opposing cutting position, and at this time, it is necessary to provide the scale 13 outside the element display area. The scale 13 is preferably provided so as to be parallel to the outermost wall in the panel among the partition walls 9 described later. The same applies to the case where the scale 13 is formed in another process.

Next, an auxiliary wiring material is deposited on the anode electrode 30. As the auxiliary wiring material, a low resistance metal such as Al, Al alloy, Ag, and Ag alloy is used, and the film is formed by vapor deposition or sputtering. Subsequently, the formed auxiliary wiring material is patterned by photolithography and etching to form an auxiliary wiring pattern. A signal is transmitted to the anode electrode 30 or the cathode electrode 8 by this auxiliary wiring (not shown).
The formation of the anode electrode 30 and the auxiliary wiring is not limited to this. For example, after the anode electrode material and the auxiliary wiring material are sequentially formed on the glass substrate, the auxiliary wiring material and the anode electrode material are sequentially patterned. You may form by the method to do.

Subsequently, the insulating layer 6 is formed. After spin-coating a photosensitive polyimide resin on a glass substrate on which auxiliary wiring has been formed, the insulating layer 6 is patterned and cured by a photolithography process so that a portion corresponding to the organic light emitting layer 7 is opened. Form.
The scale 13 can be formed simultaneously with the formation of the insulating layer 6 instead of the formation of the anode electrode 30.

  On the other hand, when the insulating layer 6 is formed, a contact hole (not shown) between the cathode electrode 8 and the auxiliary wiring is also formed. For example, the opening is preferably formed so as to have a size of about 300 μm × 300 μm, and the contact hole between the cathode electrode 8 and the auxiliary wiring is about 200 μm × 200 μm.

Next, the partition wall 9 is formed. A photosensitive novolac resin is spin-coated on a glass substrate on which the insulating layer 6 has been formed, and then patterned by a photolithography process to cause photoreaction, thereby forming the partition walls 9.
Moreover, it is preferable to form the partition 9 so that it may become a strip | belt-shaped reverse trapezoid type. By doing in this way, the cathode electrode 8 is not formed in the lower part vicinity of the partition 9, but it can isolate | separate cathodes. In order to mold the partition wall 9 into a strip-like inverted trapezoidal shape, for example, it is preferable to use a negative type photosensitive resin. When a negative type photosensitive resin is used, the light reaction is less likely to proceed in the deeper part when light is irradiated from above, so that it is easy to mold the partition wall 9 into an inverted trapezoidal shape. Moreover, it can also shape | mold by changing exposure time, the liquid temperature of etching, and time. At the same time as forming the partition walls 9, the outermost partition wall is formed in a frame shape outside the EL element display region. The outermost partition wall prevents cathode wiring from being short-circuited outside the EL element display area.

  Subsequently, the organic light emitting layer 7 is formed in the opening of the insulating layer 6 by vapor deposition. The organic light emitting layer 7 includes an interface layer, a hole transport layer, a light emitting layer, an electron injection layer, and the like (not shown), and is obtained by sequentially depositing these.

Further, after the cathode electrode material is deposited or sputtered on the organic light emitting layer 7, the cathode electrode 8 is formed by patterning in a photolithography process.
As the cathode electrode material, Al is often used, but in addition, for example, an alkali metal such as Li, Ag, Ca, Mg, Y, In, or an alloy containing these can also be used.
The scale 13 can be formed simultaneously with the formation of the cathode electrode 8 instead of the formation of the anode electrode 30 or the insulating layer 6.
Thus, the organic EL element substrate 2 is completed.

Next, a method for manufacturing the sealing substrate 3 will be described.
In order to form a convex portion that is a bonded portion with the organic EL element substrate 2 on the outer peripheral portion on the glass substrate, the surface of the glass substrate other than the portion corresponding to the convex portion is dug by etching or sandblasting. Thus, the glass substrate surface enclosed by the convex part formed becomes the water catching material storage part for arrange | positioning the water catching material 5. FIG.
And the water catching material 5 is arrange | positioned to this water catching material storage part after convex part formation.

  Next, using the dispenser, the sealing material 4 is applied with a predetermined width along the vicinity of the center in the longitudinal direction of the convex surface. Thereby, the sealing substrate 3 is manufactured.

  The organic EL element substrate 2 and the sealing substrate 3 obtained as described above are joined, the organic EL element is sealed, and the organic EL display panel 1 is obtained. The organic EL element substrate 2 and the sealing substrate 3 are joined by exposing and polymerizing the sealing material 4 by irradiating ultraviolet rays.

Usually, a plurality of organic EL display panels are formed on the same substrate to produce an organic EL display substrate, and then cut at predetermined positions to obtain a plurality of organic EL display panels. Similarly, in the present invention, after the organic EL display substrate 20 as shown in FIG. 3 is manufactured, the substrate 20 is cut at the cutting position 12 to obtain a plurality of organic EL display panels 1.
Since each scale 13 is provided so that one end thereof coincides with the cutting position 12, the deviation of the cutting position can also be measured.

  By observing the organic EL display panel 1 of the present invention from the sealing substrate side 11 using the scale 13, the displacement width of the arrangement position of each member such as the anode electrode 30, the insulating layer 6 and the cathode electrode 8 can be reduced. In addition, it is possible to confirm the deviation width of the bonding position between the organic EL element substrate 2 and the sealing substrate 3. Further, although the scale 13 is provided outside the element display area, a part of the scale 13 extends into the panel and is provided so as to be parallel to the outermost partition wall 9. These deviation widths can be easily confirmed by reading each member arrangement position or joining position with reference position as a reference position. And the precision of each process in manufacture of the organic electroluminescence display panel 1 can be confirmed by measuring these shift | offset | difference widths.

Furthermore, the protruding width of the sealing material 4 at the bonding position between the organic EL element substrate 2 and the sealing substrate 3 can be measured using the scale 13. 4A is an enlarged view of the bonding position between the organic EL element substrate 2 and the sealing substrate 3 in the schematic cross-sectional view of the organic EL display panel 1 shown in FIG. 1, and FIG. FIG. 2 is an enlarged view of the scale 13 and the region including the bonding position between the organic EL element substrate 2 and the sealing substrate 3 in the schematic plan view shown in FIG. Here, reference numeral 14 is a bonding position between the organic EL element substrate 2 and the sealing substrate 3, and reference numeral 40 is the sealing material 4 protruding from the bonding position 14.
In addition, it is preferable to provide the scale 13 so that the space | interval may be 0.005-0.1 mm.

  When the organic EL element substrate 2 and the sealing substrate 3 are bonded, a part of the sealing material 4 applied to the convex portions of the sealing substrate 3 due to the bonding pressure is as shown in FIG. , And protrudes from the joining position 14 to become a protruding portion 40. At this time, as shown in FIG. 4B, by measuring the width of the protruding portion 40 using the scale 13, it is possible to confirm the accuracy such as the coating amount or the coating speed of the sealing material 4.

On the other hand, when the water catching material 5 provided on the sealing substrate 3 is not cured, the solvent may be separated from a part thereof under the influence of the storage temperature or vibration. The solvent is stored in the panel. The amount of the separated solvent can also be measured using the scale 13.
As shown in FIG. 5, when the organic EL display panel 1 is set up in the vertical direction with the corner where the scale 13 is provided facing downward, and the separated solvent in the panel is collected in the lower part of the panel, the scales 13a and 13b By reading the value, the amount of the separated solvent can be easily confirmed. Thereby, when preparing the water catching material 5, the mixing ratio of the substance having a water catching function and the solvent or the amount of the water catching material 5 can be managed. In FIG. 5, the joining position 14, the protruding portion 40, and the partition wall 9 are omitted.

  As described above, by analyzing these measurement data and improving the manufacturing process of the organic EL display panel 1, the high-quality organic EL display panel 1 can be stably manufactured.

Hereinafter, the present invention will be described in more detail with reference to specific examples. In addition, this invention is not limited to the Example shown below at all.
Example 1
Using the scale 13 formed when the anode electrode 30 was formed, the arrangement positions of the insulating layer 6, the partition wall 9, the organic light emitting layer 7, and the cathode electrode 8 of the organic EL element substrate 2 were confirmed. The specific procedure is as follows.
As shown in FIG. 2, when the anode electrode 30 was formed, two graduations 13 perpendicular to each other were provided at one of the four corners of the glass substrate. Then, according to the manufacturing method, an organic EL display substrate 20 including a plurality of organic EL display panels 1 as shown in FIG. 3 was manufactured.
For one organic EL display panel 1 in the display substrate 20, the scale 13 is used with the insulating layer 6, the partition wall 9, the organic light emitting layer 7, and the cathode electrode 8 being disposed at the outermost partition wall 9 as a reference position. Measured.
Next, the same measurement was performed on other organic EL display panels 1 in the same display substrate 20. By this measurement, the displacement of the arrangement position of each member with respect to the two directions in the plane (X-axis and Y-axis directions) and the rotation direction in the plane was confirmed.
Furthermore, the above measurements were performed also on the organic EL display panels of other organic EL display substrates.

  In this way, each member formation in the manufacturing process of the organic EL element substrate is made by comparing the displacement of the arrangement position of each member between the lots of the organic EL display substrate and between the panels in one organic EL display substrate. The accuracy of the process could be easily confirmed without using a special device.

(Example 2)
For the organic EL display panel 1 manufactured in Example 1, the bonding position between the organic EL element substrate 2 and the sealing substrate 3 was confirmed. The specific procedure is as follows.
With respect to one organic EL display panel 1 in the organic EL display substrate 20, as shown in FIG. 4B, the joint position 14 was measured using the scale 13 and the outermost partition wall 9 as a reference position.
Next, the same measurement was performed on other organic EL display panels 1 in the same display substrate 20. By this measurement, the displacement of the joining position 14 in two directions in the plane (X-axis and Y-axis directions) and the rotational direction in the plane was confirmed.
Furthermore, the above measurements were performed also on the organic EL display panels of other organic EL display substrates.

  As described above, by comparing the displacement of the bonding position 14 between lots of organic EL display substrates and between panels in one organic EL display substrate, the organic EL element sealing in the manufacturing process of the organic EL element substrate is performed. The accuracy of the stopping process could be easily confirmed without using a special device.

(Example 3)
For the organic EL display panel 1 manufactured in Example 1, the protruding width of the sealing material 4 at the bonding position between the organic EL element substrate 2 and the sealing substrate 3 was measured. The specific procedure is as follows.
First, for one organic EL display panel 1 in the organic EL display substrate 20, the width of the protruding portion 40 was measured using the scale 13.
Next, the same measurement is performed on the other organic EL display panels 1 in the same display substrate 20, and the above measurement is performed on the organic EL display panels of the other organic EL display substrates. went.

  Thus, by comparing the width of the protruding portion 40 of the sealing material 4 between lots of organic EL display substrates and between panels in one organic EL display substrate, the seal in the manufacturing process of the organic EL element substrate is achieved. The application accuracy of the material 4 could be easily confirmed without using a special device.

Example 4
For the organic EL display panel 1 manufactured in Example 1, the amount of the separation solvent in the panel was measured. The specific procedure is as follows.
As shown in FIG. 5, the organic EL display panel 1 is set up in the vertical direction with the angle at which the scale 13 is provided facing downward, and is inclined so as to form an angle of about 45 degrees with the horizontal plane. Was collected at the bottom of the panel. And the position of the liquid level was read from the values of the scales 13a and 13b.
Next, the same measurement is performed on the other organic EL display panels 1 in the same display substrate 20, and the above measurement is performed on the organic EL display panels of the other organic EL display substrates. went.

  As described above, the amount of the separation solvent in the panel is compared between lots of the organic EL display substrates and between the panels in one organic EL display substrate. It was confirmed that the coating accuracy, that is, the mixing ratio between the substance having a water capturing function and the solvent, or the amount of the water capturing material 5 can be easily managed without using a special device.

  As described above, the organic EL display panel having a scale obtained by the manufacturing method of the present invention can confirm the accuracy of the manufacturing process more easily than in the past. Further, the scale can be easily formed simultaneously in the manufacturing process.

  By improving the manufacturing process of the organic EL display panel according to the present invention, a high-quality organic EL display panel can be obtained, and no special equipment is required in implementing the present invention. Since it can be carried out easily, it is possible to supply an organic EL display panel that is excellent in cost.

It is a schematic sectional drawing which shows an example of the organic electroluminescent display panel of this invention. It is a schematic plan view which shows an example of the organic electroluminescence display panel of this invention. It is a schematic plan view which shows an example of the organic EL display substrate containing the organic EL display panel of this invention. It is an enlarged view which shows an example of the organic electroluminescent display panel of this invention. It is an enlarged view which shows an example of the organic electroluminescent display panel of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Organic EL display panel, 2 ... Organic EL element substrate, 3 ... Sealing substrate, 4 ... Sealing material, 6 ... Insulating layer, 7 ... Organic light emitting layer, 8 * ..Cathode electrode, 9 ... partition wall, 13 ... scale, 30 ... anode electrode

Claims (6)

An organic EL element substrate in which an anode electrode, an insulating layer, a partition wall, an organic light emitting layer and a cathode electrode are formed on the substrate;
A sealing substrate facing the organic EL element substrate;
An organic EL display panel comprising a sealing material disposed on an outer peripheral portion of the sealing substrate and joining the organic EL element substrate and the sealing substrate,
The organic EL element substrate is provided with a scale outside the EL element display area, the scale is two scales orthogonal to each other, and one scale among the two scales is the partition wall. An organic EL display panel characterized by being parallel to each other.   The scale is arranged from a sealed space surrounded by the organic EL element substrate, the sealing substrate, and the sealing material to an edge of the organic EL element substrate. The organic EL display panel described.   The organic EL display panel according to claim 1, wherein the scale is made of the same material as any of the anode electrode, the cathode electrode, and the insulating layer. It is a manufacturing method of the organic electroluminescence display panel according to any one of claims 1 to 3,
An organic EL display panel manufacturing method comprising a step of forming a scale outside an EL element display region on an organic EL element substrate.   5. The method of manufacturing an organic EL display panel according to claim 4, wherein the scale is formed at the same time in any of the steps of forming the anode electrode, the insulating layer, and the cathode electrode. An inspection method for an organic EL display panel, wherein the accuracy of the organic EL display panel manufacturing process is confirmed using the scale provided on the organic EL display panel according to claim 1.

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