JP2007007813A - Rotary table carrying equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide rotary table carrying equipment provided with a function for detecting overload applied to a workpiece such as a semiconductor chip with excellent reliability by a simple means. <P>SOLUTION: Each displacement display means 11 connecting a switch member 11a and a light emitting diode 11b in series is installed in each of a plurality working heads 2 provided in a rotary table 1. The displacement display means 11 are connected in parallel with a DC power source 12 on the rotary table 1. When various works are performed by sucking a semiconductor chip 10 by a suction member 3 to be a displacement member provided in each of the working head 2, the suction member 3 is displaced according to load applied from the suction member 3 to the semiconductor chip 10. When the displacement amount exceeds a preset value, it is regarded that overload is applied to the semiconductor chip 10, the application of the overload is detected by the displacement display means 11 and a lighting display is performed. The lighting display is detected by a displacement detection means 13 installed at a prescribed work position P to obtain an overload detection signal. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a rotary table transport facility that holds a workpiece such as a semiconductor chip and intermittently transports it to a plurality of work positions in order.

  2. Description of the Related Art A rotary table transfer facility used in a semiconductor manufacturing facility is equipped with a plurality of work heads at equal intervals around the upper surface of a horizontal rotary table. Each of the plurality of work heads is provided with a suction member (suction collet, pickup, etc.) that vacuum-sucks one semiconductor chip. The suction member is a displacement member that is displaced in the axial direction with respect to the work head. The rotary table intermittently rotates in one direction at intervals of the work heads, and intermittently conveys the work heads sequentially to a plurality of work positions arranged around the rotary table. Each work position is a position for supplying one semiconductor chip to the suction member of the work head from the outside, and a position for measuring characteristics by bringing a probe into contact with the electrode of the semiconductor chip held on the suction member of the work head from the outside. Etc.

  4 and 5 show a semiconductor manufacturing facility using two horizontal turntables 1a and 1b. One first rotary table 1a has work heads 2a at 12 equidistant positions on the periphery of the upper surface. Displacement members 3a for detachably holding a semiconductor chip (not shown) as one work are installed in each of the 12 heads 2a. The other second rotary table 1b has work heads 2b at 16 equidistant positions on the periphery of the upper surface, and suction members (displacement members) 3b that vacuum-suck one semiconductor chip are installed on each work head 2b. The The displacement member 3a of the first rotary table a is a left / right opening / closing chuck claw that chucks one semiconductor chip from the left and right, for example. A claw opening / closing mechanism 4a for uniquely opening / closing all the plurality of displacement members 3a is installed at the center of the upper surface of the first turntable 1a. The suction member 3b of the second turntable 1b is a shaft-like suction collet having a vacuum suction port at the lower end, and moves up and down relative to the second turntable 1b to perform various operations described later. A vacuum piping system 4b for independently performing a vacuum suction operation on all the plurality of suction members 3b is installed at the center of the upper surface of the second turntable 1b.

  As for both rotary tables 1a and 1b, a part of peripheral part cross | intersects in the one workpiece delivery position P. FIG. When one work head 2a of the first rotary table 1a is intermittently transported to the workpiece transfer position P, one work head 2b of the second rotary table 1a is intermittently transported immediately above the work head 2a. The semiconductor chip is transferred between them. When the first rotary table 1a rotates intermittently at the arrangement interval of the work heads 2a and one work head 2a is intermittently transported to the workpiece delivery position P, the displacement member 3a of the work head 2a is displaced to move the semiconductor chip. Easy to leave. At the same time, the suction member 3b of the work head 2b of the second rotary table 1b at the workpiece transfer position P is displaced up and down once to take out the semiconductor chip from the displacement member 3a of the first rotary table 1a by vacuum suction. When the delivery of one semiconductor chip is completed at the workpiece delivery position John P, both rotary tables 1a and 1b rotate intermittently to perform the next workpiece delivery operation, and at each work position other than the workpiece delivery position. Each specific task is performed.

  For example, when the second turntable 1b receives one semiconductor chip from the first turntable 1a, the second turntable 1b rotates intermittently and intermittently conveys the work head 2b that has received the semiconductor chip to the subsequent characteristic measurement position. At this characteristic measurement position, a characteristic measurement socket having a plurality of measuring elements corresponding to the semiconductor chip is installed, and when the work head 2b is intermittently conveyed to the characteristic measurement position, the suction member 3b moves up and down once. Then, the semiconductor chip vacuum-sucked to the lower end of the suction member 3b is pressed against the socket, and the characteristics of the semiconductor chip are measured. The semiconductor chip whose characteristics have been measured is taken out from the socket by the suction member 3b and intermittently conveyed to the next subsequent work position.

When the semiconductor chip is intermittently conveyed to various work positions by intermittent rotation of the rotary table as described above, the semiconductor chip may be subjected to excessive mechanical damage (overload) depending on the work position. When a slight load is applied to a semiconductor chip, the semiconductor chip is likely to be damaged due to malfunction even though it is not apparently damaged. Therefore, for example, in the second rotary table 1b, the suction member 3b is disposed on the work head 2b via a spring material, and when the suction member 3b sucks the semiconductor chip, or the sucked semiconductor chip is used as a characteristic measurement socket. When the pressure is applied to the semiconductor chip, the load applied to the semiconductor chip is absorbed and reduced by the spring material. Further, when the semiconductor chip adsorbed by the adsorbing member 3b is pressed against a socket or a mount substrate, the contact pressure applied to the adsorbing member 3b in the axial direction is detected by a pressure sensor, and the adsorbing member 3b presses the semiconductor chip without overload. Such control is performed (see, for example, Patent Document 1).
Japanese Patent Application Laid-Open No. 08-124947 (FIG. 1)

  Depending on the work contents such as when the adsorbing member 3b adsorbs the semiconductor chip or when the adsorbed semiconductor chip is pressed against the characteristic measuring socket, the semiconductor chip may be overloaded and may be seriously damaged. For example, in the rotary table transport facility of FIG. 4, there may be a case where two semiconductor chips to be delivered overlap each other during the operation of delivering one semiconductor chip at the workpiece delivery position P. Axial displacement amount when the suction member 3b of the second turntable 1b sucks two overlapping semiconductor chips, and axial displacement amount when the suction member 3b normally sucks one semiconductor chip Differ depending on the thickness of one semiconductor chip. Corresponding to this difference in displacement, when two semiconductor chips with the two adsorbing members 3b are adsorbed, an overload exceeding a prescribed value may be applied to the two. In order to increase the production efficiency of semiconductor manufacturing, the rotary table is rotated at a high speed. However, the higher the rotation speed, the greater the inertial force applied to the work head and displacement member, and this inertial force overloads the semiconductor chip during workpiece transfer. May take. Furthermore, when the characteristics are measured by pressing the semiconductor chip against the characteristic measuring socket, the semiconductor chip may be pressed too strongly against the socket, and the semiconductor chip may be overloaded.

  As described above, when an overload is applied to the semiconductor chip, there is a high probability that the inside is damaged and becomes a defective product, or a defective product in the future. Therefore, the load applied to the semiconductor chip through the suction member at the desired work position around the turntable is detected, and if it is determined that an overload exceeding a predetermined value is applied to the semiconductor chip, the semiconductor chip is excluded as a defective product. To be done. In the case of the rotary table transport facility of FIG. 4, a pressure sensor that detects the amount of axial displacement when the suction member 3b operates at the work position is connected to the suction member 3b of the second rotary table 1b. When the adsorbing member 3b adsorbs the semiconductor chip, or when the adsorbed semiconductor chip is pressed against a characteristic measurement socket or the like, the displacement amount of the adsorbing member 3b is detected by a pressure sensor. A load cell or a strain gauge is applied to the pressure sensor. If the displacement detected by the pressure sensor is equal to or greater than a predetermined value set in advance, it is determined that the semiconductor chip has been overloaded, and an overload detection signal is transmitted to the transport equipment control device or the like.

  The second turntable 1b has a power supply wiring system that supplies power to the pressure sensors of the plurality of work heads 2b, and a signal wiring system that transmits detection signals of the pressure sensors of the work heads 2b to an external transport equipment control device or the like. Installed. In such a rotary table transport facility, since the second rotary table 1b rotates intermittently in a fixed direction, rotary electrical contacts such as slip rings arranged concentrically on the rotary table 1b are used in the wiring system. . A rotary electric contact such as a slip ring has a complicated structure and is expensive, and there is a problem that a durability period is significantly shortened in a high-speed rotating operation facility. In addition, the rotary electrical contact and the vacuum piping system 4b on the rotary table 1b interfere with each other, which makes it difficult to design both.

  In the case of the rotary table transport facility of FIG. 4, a special sensor, such as a photoelectric sensor, that detects the displacement amount when the suction member 3b operates at a specific work position along the periphery of the second rotary table 1b in a non-contact manner. Sensors can be installed. In this case, since the photoelectric sensor is wired to an external transfer equipment control device or the like, a power supply wiring system such as a slip ring for detecting an overload and a signal wiring system are not necessary for the second rotary table 1b. However, there is an error in the displacement amount of the suction member 3b in each of the 16 work heads 2b of the second rotary table 1b, and it is difficult to accurately detect the displacement amount by clearing this displacement error. Even if a highly accurate and expensive photoelectric sensor is used, the detection error increases corresponding to the variation in displacement error of 16 heads, and there is a problem of lack of reliability.

  The present invention has been made in view of such circumstances, and the object of the present invention is to enable rotation of a rotary table to detect a variety of work contents at a work head and a work position with simple means with high reliability. It is to provide a table transport facility.

  The present invention relates to a rotary table transport facility that intermittently transports a plurality of work heads arranged at equal intervals around a rotary table to a plurality of work positions along the rotary table peripheral part by intermittently rotating the rotary table. Whether or not the displacement amount of the displacement member when the work head is displaced at the work position and the work head is displaceably disposed on the work head is greater than a specified value. Displacement display means for detecting and displaying, and a displacement detection means disposed at a selected work position among a plurality of work positions, and detecting a display of the displacement display means to perform a switch operation of conduction or non-conduction. The above-described object is achieved with the configuration including the above.

  Here, the rotary table is a horizontal circular table, and has 12 heads, 16 heads, and a plurality of work heads at equal intervals in the peripheral part. The work head has a displacing member such as a suction member and a chuck claw that detachably holds a workpiece such as a semiconductor chip so as to be displaceable in a fixed direction. The displacement member of each work head is displaced in order to perform a work with a specific content at a specific work position. The displacement amount of the displacement member differs depending on the work contents (normal and abnormal, appropriate and inappropriate) performed at the work position, and the displacement display means detects and displays the presence or absence of the change in the displacement amount. The displacement display means is a switch, a pressure sensor, or the like that detects the displacement amount of the displacement member. Depending on whether or not the displacement amount of the displacement member is a specified value or more, two types of work contents are detected and displayed in two types. The two types of display are detected by the displacement detection means. Whether or not the displacement member of the work head has been displaced properly, whether the displacement member is working properly while holding the workpiece, whether or not the workpiece is overloaded, or whether or not the workpiece is deformed, exceeds the default value Two kinds of work contents, such as whether the work contents to be deformed are appropriate or not, are displayed on the displacement display means. The two types of display are detected in a non-contact or contact manner by the displacement detection means arranged at the work position, and information on the two types of work contents is output to an external transfer facility control device or the like.

  Specifically, in the present invention, a work target work is detachably held by a displacement member that is displaceably disposed on each of a plurality of work heads arranged at equal intervals around the rotary table, and the rotary table is rotated intermittently. In a rotary table transport facility that sequentially and intermittently transports a workpiece held by a displacement member to a plurality of work positions along the periphery of the rotary table, the work is performed at the work position. A displacement display means for detecting and displaying whether or not the load applied to the workpiece is equal to or greater than a specified value from the displacement of the displacement member, and a displacement display means arranged at a selected work position among the plurality of work positions Displacement detecting means for detecting the display and performing a switch operation of conduction or non-conduction.

  Here, the workpiece is a semiconductor chip, a small high-precision mechanical component, or the like that is easily damaged by the load (load) that is received when the work is held by the displacement member or when the work is held by the displacement member and the characteristics are measured. Such as chemical products. A displacement member that detachably holds the workpiece on each of the plurality of work heads is installed so as to be displaced so as to be displaced when holding the workpiece. The displacement member corresponds to the type of workpiece, and an adsorption member that vacuum-sucks the workpiece and a chuck claw that chucks the workpiece from the top and bottom or from the left and right can be applied. The plurality of work positions in the periphery of the rotary table include a workpiece transfer position, a workpiece characteristic measurement position, a workpiece appearance inspection position, a workpiece strength test position, and the like. When the displacement member receives a workpiece at an arbitrary work position, the displacement member is displaced according to the load applied to the workpiece, and the displacement display means detects and displays this displacement amount. The displacement display means displays two types of whether or not the workpiece has been subjected to an overload exceeding the specified value. A switch member using a spring contact or a pressure sensor such as a load cell can be applied, and the former switch member has a structure. Is desirable because of its simplicity and low cost. As the two kinds of display of the displacement display means, an optical display such as a point light source lighting display and an extinction display, or a mechanical display such as a protruding display and a retracting display of a protruding and retracting object is effective. The displacement detection means is installed at a selected specific work position such as a workpiece transfer position or a workpiece characteristic measurement position where the workpiece is likely to be overloaded. This displacement detection means can be applied with a photoelectric sensor that reads and displays light when the displacement display means optically displays, and detects the display with mechanical fluctuations when the displacement display means displays mechanically. Proximity switch and limit switch can be applied.

  By providing the displacement display means on each work head of the rotary table, the workpiece overload detection accuracy at the work position is high and stable. In addition, by detecting the displacement display means with the displacement detection means placed at the work position, wiring for the workpiece overload detection signal becomes unnecessary on the rotary table, and equipment such as a vacuum piping system installed on the rotary table is provided. The design becomes easier.

  Further, in the present invention, the displacement display means of each work head includes a switch member that switches between conducting and non-conducting when the displacement member performs a specific work, and a switch member connected in series to the switch member. A structure having a light source that is turned on or off by a switch operation of the member can be employed. As the switch member, one having a simple structure using a spring contact and stable operation can be applied. As the light source connected in series with the switch member, a point light source such as a light emitting diode or miniature bulb is desirable for installation in a narrow space in the working head.

  In the present invention, a DC power source that applies a common DC voltage to the series circuit of the switch member and the light source of each of the plurality of work heads can be disposed on the rotary table. This DC power supply is a rechargeable battery, and among these, a solar battery can be charged at all times without wiring, which is desirable in practice.

  The direct current power source here is installed at an arbitrary fixed position in the center of the rotary table, and is wired as a common power source for a series circuit of switch members and light sources of a plurality of work heads around the rotary table. This wiring can be a fixed wiring form that does not use a rotary electrical contact such as a slip ring, and can be wired using the empty space of the vacuum piping system on the rotary table. Since this fixed wiring rotates integrally with the rotary table, continuous rotation in one direction of the rotary table and high-speed rotation are facilitated, and the durability period is not shortened even at high-speed rotation.

  In the present invention described above, the displacement member of each work head is structured to be a suction member that vacuum-sucks the work, and the vacuum piping system that pipes the suction member of each work head and the vacuum pump is installed on the rotary table. can do. In this case, as described above, the design of the vacuum piping system on the rotary table can be easily performed without being disturbed by the wiring of the DC power supply system.

  According to the rotary table transport facility of the present invention, the displacement display means for detecting and displaying the displacement amount of the displacement member that works by holding a work, etc. is provided on all the work heads of the rotary table, and the displacement display is provided. By detecting the display of the means by the display detection means installed at the work position outside the rotary table, the detection accuracy of work contents such as work overload detection at each work head can be made high and stable. The work head displacement display means includes a simple and inexpensive switch member such as a spring contact for detecting two kinds of contents such as whether the work contents of the work head are normal or appropriate, and clear and clear Therefore, an inexpensive and simple power-saving circuit can be used, and a commercially available battery can be used as a common DC power source for the displacement display means of all the work heads. A rotary table transfer facility that is advantageous in terms of investment can be provided. In addition, expensive slip rings and other wiring for picking up signals such as overload detection signals are not required on the rotary table, so it is installed on the rotary table, especially when a displacement member that vacuum-sucks the workpiece is provided on the work head. The vacuum piping system can be designed without being obstructed by the wiring system using the slip ring, the degree of freedom in designing the rotary table is increased, and the cost of the rotary table transport facility can be easily reduced.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS.

  FIG. 1 shows an outline of an embodiment applied to a rotary table transfer facility which is the semiconductor manufacturing facility of FIGS. 4 and 5. FIG. 1 shows a part of the first turntable 1a with a chain line, and the second turntable 1b with a solid line. Each of the 16 working heads 2b of the second rotary table 1b includes a suction member 3b which is a shaft-like displacement member as shown in FIG. One suction member 3b is disposed in one work head 2b so as to be displaced vertically in the axial direction. The suction member 3b has a vacuum suction port at the lower end, and moves up and down appropriately to hold one work, for example, the semiconductor chip 10 by vacuum suction. When the semiconductor chip 10 is transferred between the rotary tables 1a and 1b at the workpiece transfer position P where the first rotary table 1a and the second rotary table 1b cross each other, the rotary tables 1a and 1b are intermittent in a fixed direction. Rotate. The second rotary table 1b is intermittently rotated to intermittently convey the semiconductor chip 10 received at the workpiece transfer position P to the subsequent work positions P,. The suction member 3b holding the semiconductor chip 10 moves up and down as necessary at the subsequent work positions P,... To perform operations such as measuring the characteristics of the semiconductor chip 10. Each of the work positions P,... Includes a position where the semiconductor chip 10 is only held and no specific work is performed, and an empty position where the semiconductor chip 10 is discharged and not held.

  Hereinafter, the second rotary table 1b is simply referred to as a rotary table 1 as necessary, the work head 2b of the rotary table 1 is referred to as a work head 2, and the suction member 3b is referred to as a suction member 3. The rotary table 1 is a horizontal circular table, and 16 work heads 2 are installed at equal intervals around the upper surface. Each work head 2 has the same structure. A rotary drive shaft (not shown) is connected to the center of the rotary table 1 and rotates intermittently at intervals of 16 heads. A vacuum piping system 4 piped to the suction member 3 of each work head 2 is installed at the center of the upper surface of the turntable 1. When the outline of the vacuum piping system 4 is shown in FIG. 3, the vacuum piping system 4 includes a common vacuum pump 15 and an octopus-shaped piping 16 that connects the suction member 3 of each work head 2. A valve system 17 for controlling the vacuum suction operation is connected to the pipe 16 of each adsorption member 3. In the embodiment of FIG. 1, the displacement display means 11 that detects the displacement amount of the suction member 3 during the work on each work head 2 of the rotary table 1 and displays two different types of display, and the displacement display of each work head 2. A common DC power source 12 that applies a common DC voltage to the means 11 is installed on the rotary table 1. Further, in the embodiment of FIG. 1, the displacement detection means 13 for detecting the display of the displacement display means 11 is installed at a fixed position at the selected work position P among the work positions P including the workpiece transfer position P. To do.

  The displacement display means 11 is connected to the switch member 11a in series according to the amount of displacement during the operation of the suction member 3, and is turned on or off by the switch operation of the switch member 11a. A light emitting diode 11b as a light source is provided. As the switch member 11a, a simple and inexpensive structure using a disc spring contact as shown in FIG. 3 is applicable. The adsorbing member 3 has an existing structure in which a plurality of shaft-like parts are combined through a spring material or the like. In this operation, a displacement portion that is displaced in the axial direction by an amount corresponding to the load applied to the semiconductor chip 10 is provided.

  When the adsorbing member 3 adsorbs the semiconductor chip 10 or when the adsorbing member 3 adsorbs the semiconductor chip 10 to perform a specific operation, the adsorbing member 3 is attached to the work head 2 according to the load applied from the adsorbing member 3 to the semiconductor chip 10. To make a relative upward displacement. When an overload exceeding a predetermined value set in advance as a limit value for damaging the semiconductor chip 10 is applied to the semiconductor chip 10, the suction member 3 is displaced beyond a preset displacement amount. The switch member 11a has a spring contact that maintains the contact-off state when the adsorption member 3 is displaced so as not to exceed a specified value. This spring contact operates to turn on the contact when the adsorbing member 3 is displaced beyond a specified value, and self-holds the contact on state.

  A light emitting diode 11b is connected in series to the switch member 11a. A series circuit of the switch member 11 a and the light emitting diode 11 b of each work head 2 is connected in parallel to a common DC power supply 12, and a common DC voltage is applied to each series circuit from the DC power supply 12. The DC power source 12 is a rechargeable battery, and is preferably a solar battery that can be charged with indoor illumination light. The DC power source 12 may be installed in a narrow empty space in the center where the vacuum piping system 4 on the rotary table 1 is installed. When the DC power supply 12 is a solar cell, it is also effective to install it at the apex portion of the vacuum piping system 4. The wiring for connecting the DC power supply 12, the switch member 11 a of each work head 2, and the series circuit of the light emitting diodes 11 b in parallel is installed on the turntable 1 in a fixed wiring form.

  The displacement detection means 13 installed at the work position P is a photoelectric sensor with a built-in light receiving element that detects whether or not the light emitting diode 11b of the displacement display means 11 emits light. The photoelectric sensor 13 is installed at a fixed position where the rotation of the rotary table 1 does not contact the table itself or the work head 2. The work position P where the photoelectric sensor 13 is installed is a workpiece transfer position, a characteristic measurement position, or the like in which the semiconductor chip 10 is easily overloaded, and is an overload inspection position provided as necessary.

  Next, various semiconductor manufacturing operations performed by intermittently rotating the turntable 1 and intermittently transporting the semiconductor chip 10 to each operation position, and the operation procedure of overload detection for the semiconductor chip 10 will be described.

  In FIG. 1, the displacement detection means 13 is provided at the workpiece transfer position P, and a detection display operation is performed to determine whether or not the semiconductor chip 10 is overloaded during the workpiece transfer operation. When the rotary table 1 rotates intermittently and one work head 2 is intermittently transported to the workpiece transfer position P, the suction member 3 of the work head 2 is displaced once in a vertical motion, and thus one semiconductor chip. 10 is adsorbed.

  At this time, if the load applied to the semiconductor chip 10 is less than the predetermined value, the amount of displacement of the suction member 3 is less than the predetermined value, and the switch member 11a of the displacement display means 11 of the work head 2 with the suction member 3 is contacted. The light-emitting diode 11b connected in series with the OFF state is not lit. With this unlit display, the displacement detection means 13 at the workpiece transfer position P does not receive light and does not output an overload detection signal.

  If an overload is applied to the semiconductor chip 10 during the workpiece delivery, the amount of displacement of the suction member 3 exceeds the predetermined value, and the switch member 11a of the displacement display means 11 of the work head 2 with the suction member 3 is turned on. Then, a direct current flows from the direct current power source 12 to the light emitting diodes 11b connected in series thereto, and the light emitting diodes 11b are lit by this conduction. With this lighting display, the displacement detection means 13 at the workpiece transfer position P receives light and outputs an overload detection signal to an external transport equipment control device. The transport equipment control device recognizes that the semiconductor chip 10 at the workpiece transfer position P has been overloaded by the input of the overload detection signal, and outputs a control signal to be finally eliminated to the turntable side.

  If it is determined that the semiconductor chip 10 is not overloaded at the workpiece transfer position P, the semiconductor chip 10 is intermittently moved to the subsequent work position P by the intermittent rotation of the turntable 1 while being sucked by the suction member 3. Be transported. When one work head 2 is intermittently conveyed to the work position P where the displacement detection means 13 is not disposed, the displacement display means 11 of the work head 2 operates to detect and display the displacement of the suction member 3. Since it is known in advance that the amount of displacement of the suction member 3 at such a working position P is less than a predetermined value, and it is a position where it is not necessary to detect an overload, the light emitting diode of the displacement display means 11 11b does not light up.

  For example, when one work head 2 is intermittently conveyed to the characteristic measurement position P where the displacement detection means 13 is installed, the semiconductor chip 10 adsorbed by the adsorption member 3 of the work head 2 is pressed against the characteristic measurement socket. If an overload is applied to the semiconductor chip 10 during this operation, the amount of displacement of the adsorption member 3 exceeds a predetermined value, the switch member 11a of the displacement display means 11 is turned on, the light emitting diode 11b is lit, and this is detected. Means 13 detects.

  Further, the displacement detection means 13 can be installed at the next specific overload inspection position to check the displacement display means 11 and the displacement detection means 13. That is, an arbitrary one or a plurality of positions of a plurality of work positions are set as an overload inspection position. At this overload inspection position, a displacement inspection mechanism for positively displacing the suction member 3 of the work head 2 conveyed to the same position positively and reliably is provided. When one work head 2 is intermittently conveyed to the overload inspection position, the suction member 3 is displaced by a predetermined value or more regardless of the presence or absence of the semiconductor chip 10. At this time, the light emitting diode 11b of the displacement display means 11 is turned on, and the displacement detection means 13 and the displacement detection means 13 determine whether or not the displacement detection means 13 receives the light and outputs an overload detection signal. Check for normality.

  In addition, the rotary table conveyance equipment of the present invention is not limited to the above-described embodiment, and it is needless to say that various modifications can be added. For example, when the displacement display means detects that the load applied to the semiconductor chip is an overload, the light source (light emitting diode) is displayed, but reverse display is also possible. That is, when the load applied to the semiconductor chip by the displacement display means is less than the overload, the light source may be turned on, and when it is detected that the load is overloaded, the light source that has been turned on may be turned off. In the latter case of reverse display, many work heads on the rotary table are lit and displayed with no overload, which can be used for measures against overload in semiconductor chip manufacturing equipment.

  Further, although the light source that is lit and displayed by the DC power source is used for the displacement display means, it is also possible to omit the electrical means and configure the displacement display means only by mechanical means. In this case, as the displacement detection means installed on the working position side, a proximity switch or a limit switch that operates as a switch between conduction and non-conduction by mechanical display of the displacement display means can be used.

It is a top view which shows the outline | summary of the rotary table conveyance equipment which is embodiment. 1 is an equivalent wiring diagram in the facility. 1 is a front view, a wiring diagram and a piping diagram showing an outline of the main part of the facility. It is a side view which shows the outline | summary of a general rotary table conveyance installation. 4 is a schematic plan view of the facility.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Rotary table 2 Work head 3 Displacement member, adsorption member 10 Workpiece, Semiconductor chip 11 Displacement display means 11a Switch member 11b Light source, light emitting diode 12 DC power supply, battery, solar cell 13 Displacement detection means, photoelectric sensor P Work position, work reception Position, characteristic measurement position

Claims (6)

In a rotary table transport facility for intermittently transporting a plurality of work heads arranged at equal intervals in the periphery of the rotary table, in order to intermittently rotate the rotary table and sequentially to a plurality of work positions along the periphery of the rotary table,
Displacement amount of the displacement member when the work head is disposed in each of the plurality of work heads and the work head is displaced at the work position so as to be displaceable on the work head is greater than a specified value. Displacement display means for displaying whether or not,
Displacement detecting means that is disposed at a selected work position among the work positions and detects a display of the displacement display means and performs a switch operation of conduction or non-conduction,
A rotary table transport facility characterized by comprising:   The plurality of work heads work while detachably holding a work target work with the displacement members disposed respectively, and the displacement display means is a displacement when the displacement member works at the work position. 2. The rotary table transport equipment according to claim 1, wherein whether or not a load applied to the workpiece is an overload greater than a specified value is displayed based on a displacement amount of the member.   The displacement display means includes a switch member that performs a conductive / non-conductive switch operation depending on whether or not a displacement amount of the displacement member is greater than or equal to a specified value, and a switch member that is connected in series to the switch member. The rotary table transport facility according to claim 1, further comprising a light source that is turned on or off.   4. The rotary table transport equipment according to claim 3, wherein a DC power source for applying a common DC voltage to a series circuit of the switch member and the light source of each of the plurality of work heads is disposed on the rotary table.   5. The rotary table transfer facility according to claim 4, wherein the DC power source is a rechargeable battery.   The rotary table transport equipment according to claim 1, wherein the displacement member is a suction member that vacuum-sucks the workpiece.

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