JP2015121456A - Lighting test device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lighting test device that can maintain positional immobility in a lighting test even when the size of a light emitting element is reduced.SOLUTION: A lighting test device 1 moves a holding part 21 holding a light emitting element W to a lighting test position. At the lighting test position, a probe pin is inserted into a through-hole of the holding part 21 from the lower part of the holding part 21, and the probe pin is brought into contact with the light emitting element W on the holding part 21. Further, at the lighting test position, the light emitting element W on the holding part 21 is held from side surfaces by a clump part, and static frictional force for resisting the contact load of the probe pin is applied to the light emitting element W. Then, a light receiving device positioned above the holding part 21 receives light emitted from the light emitting element W.

Description

  The present invention relates to a lighting test apparatus that performs a lighting test on a light emitting element such as an LED.

  An electronic component incorporated in an electronic device goes through various test processes on a conveyance path during the manufacturing process. A test apparatus is responsible for transporting and testing the electronic components. The test apparatus intermittently moves the suction nozzle that holds the electronic component along the transport path. The test process is set at each stop position of the suction nozzle. For example, a camera for inspecting the appearance of the electronic component is installed at a stop position where the suction nozzle is located. Further, for example, a probe that contacts an electrode of the electronic component is arranged at another stop position of the suction nozzle in order to inspect the electrical characteristics of the electronic component.

  In order to obtain an accurate analysis result of the electrical characteristics, the probe and the electrode surface must be aligned and fixed during the test, and the electronic component to the probe to ensure that the probe and the electrode surface are in contact. Must be pressed with a constant load. The test device holds the electronic component at the tip of the suction nozzle, moves the electronic component along the transport path, lowers the suction nozzle toward the probe at the probe installation position, and probes the electronic component with the suction nozzle. Is pressed against.

  This test apparatus may handle a light emitting element as an electronic component. The light emitting element has a thin plate-like outer shape, and two opposed flat surfaces are divided into an electrode surface and a light emitting surface. The light emitting element undergoes a lighting test instead of or in addition to the inspection of the electrical characteristics during the manufacturing process. The test device that performs the lighting test supplies a power to the light emitting element by bringing a pin-shaped probe into contact with the electrode surface, detects light emission of the light emitting surface with the light receiving element, analyzes the optical characteristics of the light emitting element from the light reception result, A non-defective product of the light emitting element is determined from the analysis result.

  In order to obtain an accurate analysis result of the optical characteristics of the light emitting element as well, the probe and the electrode surface are securely aligned and fixed during the test, and the probe and the electrode surface are in contact with each other. On the other hand, it is necessary to push the light emitting element with a constant load. However, as in the case of electronic components other than light emitting elements, the method of pushing the light emitting element with the suction nozzle hides one plane of the light emitting element with the suction nozzle, so it is not suitable for detecting energization or light emission, and accurate analysis of optical characteristics. There are difficulties.

  Therefore, in the lighting test apparatus, a means for positioning the electronic component and the probe is prepared separately in place of the suction nozzle, and after the suction nozzle is quickly retracted, the positioning of the electronic component and the probe is performed by the positioning means. It was.

  The positioning means is a physical means that comes into contact with the light emitting element. This positioning means is devised so as not to hinder the detection of energization or light emission. That is, the positioning means presses the blank portion of the light emitting element, usually the edge portion on the plane of the light emitting element so as not to block the electrode arranged on the electrode surface or the light emitting body arranged on the light emitting surface (for example, , See Patent Document 1). Thereby, the light emitter or the electrode of the light emitting element is opened, and the light receiving process or the energizing process can be performed.

  Retracting the suction nozzle until the probe or the light receiving element can be interposed between the suction nozzle and the light emitting element may be inferior in terms of the transport efficiency of the light emitting element. Therefore, in the method of transporting while holding the light emitting element with the suction nozzle, a measurement base on which the light emitting element is placed outside the transport path is prepared. Then, the light emitting element is once detached from the conveyance path and placed on the measurement base where the suction nozzle does not exist, and the light emitting element is pressed to the base plane side by positioning means arranged to face the measurement base. There is no suction nozzle on the base plane, and the degree of freedom of arrangement of the probe or the light receiving element is increased.

  Further, as a method for transporting light emitting elements, there is also a method in which pockets are formed side by side along a concentric circle on the surface of an axially rotating disk table, and the light emitting elements are housed in the pockets for rotational transport. In this transport method, if at least the pocket portion of the disk table is formed of sapphire glass having a transparent bottom, a light receiving element or an optical path for guiding light to the light receiving element is arranged under the disk table, and light can be detected. In this transport method, it is not necessary to separate the light emitting element from the transport path for the lighting test (see Patent Document 1).

  However, in the transport method using the disk table, the shape and size of the pocket are fixed to one type, and the versatility for various sizes of light emitting devices is lost. Is hard to say. In addition, when receiving light through a transparent sapphire glass, it is necessary to correct the change in optical characteristics caused by passing through the sapphire glass, and individual preparation according to the light emitting element of the correction data is easy. It's hard to say. Therefore, although this method is not excluded, the conveyance method using the suction nozzle is the best even if the lighting test of the light emitting element is assumed.

JP 2005-233663 A

  By the way, in recent years, miniaturization of light emitting elements has progressed, and light emitting elements of, for example, 0603 size are appearing. This minute light emitting element has a considerably small margin with which the positioning means abuts. Therefore, the difficulty of pressing down the light emitting element is increasing by applying a certain load to the light emitting element using the margin.

  The difficulty of pressing down directly leads to a decrease in reliability with respect to the positioning of the light emitting element and the probe, and consequently decreases the reliability of the lighting test. In other words, misalignment is likely to occur, and energization failure may occur frequently. Further, even if energization is successful, only a part of the light emitting element is lifted, so that the amount of light received by the light receiving element is changed, and there is a possibility that a serious divergence may occur between the optical characteristics indicated by the analysis result and the actual one.

  The present invention has been proposed in order to solve the above-described difficulty in pressing down a light emitting element, and provides a lighting test apparatus capable of maintaining a good position immobility in a lighting test even when the size of the light emitting element is reduced. The purpose is to do.

A lighting test apparatus for solving the above problems is a lighting test apparatus for testing optical characteristics of a light emitting element, a measurement base on which the light emitting element is placed, a probe provided on the measurement base side, A light receiving means located above the measurement base;
Clamping means for sandwiching the light emitting element on the measurement base from the side surface and applying a static frictional force against the contact load between the light emitting element and the probe to the light emitting element is provided.

  The probe extends from below the measurement base toward the measurement base, and the measurement base has a through hole, and the probe is driven by inserting the probe into the through hole and contacting a light emitting element on the measurement base. Means may be provided.

  The suction base is further provided with a suction nozzle that is embedded in the measurement base and has an opening in the measurement base and sucks a light emitting element mounted on the measurement base, and the suction nozzle counteracts the contact load. May be assisted by suction force.

  The clamp means may sandwich the light emitting element so as to apply the static frictional force obtained by subtracting the suction force from the contact load to the light emitting element.

  In the lighting test, the measurement base is moved from the lower position of the lighting test toward the position to position the light emitting element at the position, and the probe driving unit is configured to move the probe to the measurement base. You may make it the movement period penetrated at least partially overlap with the movement period of the said measurement base.

  The light emitting element is taken out from one supply unit and transferred to the other storage unit, and further provided with a transport path for arranging the lighting test position on the path, and the transport path holds one surface of the light emitting element. A holding means that is not in contact with the other surface, and a conveying means that moves the holding means along the conveyance path and stops the holding means at the position of the lighting test. The probe may have the through-hole through which the light-emitting element is held as the measurement base at the lighting test position.

  The suction nozzle may be embedded in the holding means and open to the one surface, and the holding means may hold the light emitting element by sucking the light emitting element while moving on the transport path. .

  The conveying means includes a plurality of the holding means arranged around a rotation axis so that the one surface on which the light emitting element is placed is always directed outward, and the conveyance means intermittently rotates at a predetermined angle around the rotation axis. It may be a rotary table.

  The position of the lighting test is located radially outward of the rotary table with respect to one of the stop positions of the holding means accompanying the intermittent rotation, and the light receiving means is further positioned than the position of the lighting test. A forward / backward drive means for moving the holding means forward so as to position the light emitting element at the position of the lighting test, which is located radially outward, wherein the probe driving means has a rotational center of the rotary table rather than the holding means; Located on the side, the probe may have an axis toward the lighting test position.

  The transport path is formed by arranging a plurality of the rotary tables adjacent to each other on the same plane with the rotation axes in parallel so that they do not overlap each other, with the light emitting surface of the light emitting element facing outward in the table radial direction. The lighting test position may be set in one of the rotary tables to be conveyed.

  According to the present invention, in order to maintain the position of the light emitting element, a certain load is applied to the light emitting element from the side by the clamping means, so that even a small light emitting element can be positioned satisfactorily, and the accuracy of the optical characteristics can be achieved. High analysis can be realized.

It is a front view which shows schematic structure of the lighting test apparatus which concerns on this embodiment. It is a side view of the upper part of the rotary table of the second stage of the lighting test device, showing the configuration arranged at the lighting test position. It is a top view which shows the adsorption | suction surface of a holding | maintenance part. It is a top view of a clamp device. It is a figure which shows operation | movement of a lighting test apparatus. It is a schematic diagram which shows operation | movement of the 1st process of a lighting test. It is a schematic diagram which shows the 2nd process of a lighting test. It is a schematic diagram which shows the relationship between the 1st process of a lighting test, and a 2nd process. It is a schematic diagram which shows the 3rd process of a lighting test. It is a schematic diagram which shows the return process from a lighting test.

  Hereinafter, embodiments of a lighting test apparatus according to the present invention will be described in detail with reference to the drawings.

(Constitution)
FIG. 1 is a front view showing a schematic configuration of a lighting test apparatus 1 according to the present embodiment. The lighting test apparatus 1 includes a supply unit 7a that is a transfer source of the light emitting element W, a main transport path 11 of the light emitting element W, and a storage unit 7b that is a transfer destination of the light emitting element W. The lighting test apparatus 1 takes out the light emitting element W from the supply unit 7a, transports the light emitting element W along the main transport path 11, and mounts it on the housing unit 7b. A lighting test position 14 of the light emitting element W exists on the main transport path 11.

  At the lighting test position 14, the lighting test apparatus 1 analyzes whether or not the light emitting element W is turned on and optical characteristics such as luminance and wavelength. The lighting test apparatus 1 mounts the light emitting element W in the housing unit 7b or discharges the light emitting element W to the discharge container according to the analysis result of the lighting test. The lighting test apparatus 1 has a discharge path 16 branched from the main transport path 11, and the discharge container 9 is provided in the discharge path 16.

  The light emitting element W is a semiconductor light emitting element such as an LED incorporated in an electronic device, and emits visible light or invisible light when supplied with power. The light emitting element W is a thin plate-like chip, and two opposing flat surfaces are divided into an electrode surface and a light emitting surface. Both the anode electrode and the cathode electrode are formed on the electrode surface, and the light emitting surface emits light to the outside. The size of the light emitting element W is not limited, but the size is 0603 (0.6 mm × 0.3 mm), 0402 (0.4 mm × 0.2 mm), thinness 0.1 to 0.3 mm, etc. Including microchips.

  The supply unit 7a is a device that moves the light emitting element W to the take-out position. The supply unit 7a is, for example, an XY stage, a parts feeder, or a wafer holder. The XY stage has a flat tray in which the light emitting elements W are arranged in a two-dimensional array, and moves the tray in a two-dimensional direction in which the plane of the flat plate expands. The parts feeder moves the inserted individual light emitting elements W to the take-out position by aligning and conveying them. The ring holder holds a wafer ring in which the light emitting elements W are bonded in a two-dimensional array, and moves the wafer ring in a two-dimensional direction in which the ring surface expands.

  The accommodation unit 7b is a device that moves the placement location of the light emitting element W to the planned accommodation position. For example, an XY stage, a ring holder, and a taping unit that sequentially feeds a tape on which a pocket for accommodating the light emitting element W is formed.

  The supply unit 7a and the accommodation unit 7b of this embodiment are ring holders. In the supply unit 7a, the light emitting element W is attached to the surface of the wafer ring, the electrode surface side is attached to the surface of the wafer ring, and the light emitting surface side is outside, and is arranged on the surface of the wafer ring.

  The main transport path 11 is configured by connecting a plurality of rotary tables. In the present embodiment, the lighting test apparatus 1 includes three rotary tables 2a, 2b, and 2c. The rotary tables 2a, 2b, and 2c have a rotation surface that is perpendicular to the installation surface of the lighting test apparatus 1, the rotation surfaces are arranged on the same vertical surface, the rotation axes are parallel, and do not overlap each other. As shown in FIG. The three rotary tables 2a, 2b, and 2c are disposed between the supply unit 7a and the accommodation unit 7b. The first-stage rotary table 2a located at one end is connected to the supply unit 7a, and the third-stage rotary table 2c located at the other end is connected to the storage unit 7b. Starting from the supply unit 7a, passes through the upper semicircles of the rotary tables 2a, 2b, and 2c, and reaches the storage unit 7b.

  Each rotary table 2a, 2b, 2c has a plurality of arms extending radially from the center of the table along the same plane. Each arm is arranged at a circumferentially equidistant position. In this embodiment, each rotary table 2a, 2b, 2c has eight arms, and each arm extends radially at an interval of 45 degrees.

  Each of the rotary tables 2a, 2b, 2c is supported by a motor shaft that passes through the radial center of the arm and is orthogonal to the radial surface of the arm, and is intermittently rotated by a constant angle by a motor (not shown) in the same direction. That is, the rotation surface is a plane on which the arm extends, and the rotation axis coincides with the motor axis. Each pitch angle at which the rotary tables 2a, 2b, and 2c rotate intermittently includes 360 degrees. For example, the rotary tables 2a, 2b, and 2c having eight arms rotate intermittently by 45 degrees each.

  Each arm is provided with a holding portion 21 that holds and removes the light emitting element W at the tip. The holding part 21 is a block body having an adsorption surface 22 orthogonal to the radial direction of the rotary tables 2a, 2b, 2c on the outer side in the table radial direction. The holding unit 21 attracts the light emitting element W by the attracting surface 22 and separates the light emitting element W by releasing the attracting force.

  Each rotary table 2a, 2b, 2c opposes each holding | maintenance part 21 with both adjacent rotary tables 2a, 2b, or 2c at the intermittent stop angle of each one place. That is, for each rotary table 2a, 2b, 2c, one of the intermittent stop angles is an angle through which a line segment connecting both centers of the adjacent rotary tables 2a, 2b, or 2c passes. Hereinafter, the intermittent stop angle at which the holding portion 21 faces is referred to as a delivery angle.

  While being held by the holding unit 21, the light emitting element W moves so as to follow the upper half of the outer periphery of the rotary tables 2a, 2b, and 2c along with the intermittent rotation of the rotary tables 2a, 2b, and 2c. At the delivery angle between the adjacent rotary tables 2a, 2b, or 2c, the holding units 21 facing each other exchange the light emitting element W. If the supply unit 7a side is the front stage side and the housing unit 7b side is the rear stage side, the holding section 21 of the rear stage rotary table 2b or 2c attracts the light emitting element W, and the front stage rotary table 2a or 2b is held. The part 21 separates the light emitting element W.

  As a result, the lighting test apparatus 1 supplies the light emitting element W with the rotary table 2a as the front stage of the main transport path 11, the rotary table 2b as the middle stage of the main transport path 11, and the rotary table 2c as the rear stage of the main transport path 11. To the storage unit 7b.

  The lighting test apparatus 1 includes the triple rotary tables 2a, 2b, and 2c because the light emitting element W is adhered to the wafer ring held by the supply unit 7a with the electrode surface side as the adhesion surface. For this reason, the electrode surface is held by the holding unit 21 to create a situation in which the light emitting surface faces the outside of the table. In addition, the light emitting element W is attached to the wafer ring of the housing unit 7b using the electrode surface as the attaching surface. This is for wearing. Therefore, depending on which surface of the light emitting element W is adhered to the wafer ring in the supply unit 7a, or which surface of the light emitting element W is adhered to the wafer ring in the housing unit 7b, the rotary tables 2a, 2b, The number of 2c can be varied by a single number or by two or more.

  In the lighting test apparatus 1, the position correction position 15 is set over the two stop angles immediately before the transfer angle with the rotary table 2b in the first-stage rotary table 2a that is in front of the main transport path 11. The lighting test position 14 is set on the downstream side of the position correction position 15, and in this embodiment, the vertex position of the second-stage rotary table 2 b that bears the middle stage of the main transport path 11 is set as the lighting test position 14. Has been. That is, the apex position of the second-stage rotary table 2b is also adjusted to be one of the intermittent stop angles.

  In the position correction position 15, the contact accuracy between the electrode and the probe in the lighting test position 14 is improved. In this position correction position 15, the stop angle two before the delivery angle with the rotary table 2b is the shift detection position 15a, and the stop angle immediately before is the shift correction position 15b.

  An imaging camera 81 is installed outside the table radius at the displacement detection position 15a, and the imaging camera 81 images the light emitting element W that stops at the position 15a. The deviation of the orientation angle of the light emitting element W and the shift amount in the vertical and horizontal directions are calculated from the image obtained by imaging. An XYθ stage 82 in which a suction port for holding the light emitting element W is formed is disposed at the misalignment correction position 15b. The XYθ stage 82 moves in the XY direction and rotates θ so as to eliminate the deviation of the orientation angle and the shift amount in the vertical and horizontal directions while holding the light emitting element W at the suction port.

  As shown in FIG. 2, with respect to the lighting test position 14, the lighting test apparatus 1 includes an energization device 3 that moves the probe pins 31 a and 31 b to contact the light emitting element W to the apex position of the second-stage rotary table 2 b. The clamp device 4 that does not move the positional relationship between the light emitting element W and the probe pins 31a and 31b, and the light receiving device 5 that receives the light of the light emitting element W are provided. In addition, the lighting test device 1 includes an advance / retreat drive device 6 that advances and retracts the holding unit 21 toward the lighting test position 14 at the apex position.

  The light receiving device 5 is installed on the opposite side of the top of the rotary table 2b with the lighting test position 14 in between. The light receiving device 5 is a sensor such as a CCD or CMOS using a photodiode, for example. The light receiving device 5 is connected to a computer for analyzing optical characteristics from the received light data through a signal line, and outputs analog or digital received light data obtained as a result of the received light to the computer.

  The holding unit 21 is attached to the tip of the arm via the slide shaft 25. The holding portion 21 includes a suction side overhang portion 21a protruding from the arm on the front side of the rotary table 2b, and a biasing side overhang portion 21b protruding from the arm to the back side of the rotary table 2b. In the suction side overhang portion 21 a, the suction surface 22 of the light emitting element W is set on the surface outside the table radius, and an opening of the suction nozzle 23 is formed on the suction surface 22.

  The suction nozzle 23 is a hollow cylindrical portion embedded in the block body of the holding portion 21 and opened at the tip of the nozzle, and the inside of the nozzle communicates with a pneumatic circuit of a vacuum generator via a tube. The holding unit 21 adsorbs the light emitting element W on the adsorption surface 22 when negative pressure is generated by the vacuum generator, and releases the light emitting element W when vacuum breaks or positive pressure is generated.

  The arm is formed with a flange 20 bent at a right angle from the arm. The flange 20 is provided with a sleeve hole 20a extending in the radial direction of the rotary table 2b. The slide shaft 25 is slidably attached to the arm through the sleeve hole 20a. That is, the holding portion 21 is supported by the slide shaft 25 and advances outward from the rotation center along the radial direction of the rotary table 2b, and retreats from the outer side to the rotation center along the radial direction of the rotary table 2b. It is possible.

  The components of the advance / retreat drive device 6 are roughly classified into an advance mechanism and a reverse mechanism. When the holding unit 21 stops at the stop angle corresponding to the lighting test position 14, a rotary motor 61, a cam 62, and a rod 63 that constitute an advance mechanism of the advance / retreat drive device 6 are directly below the urging side overhang portion 21b. Is provided. The rod 63 extends toward the top position of the table along the radial direction of the rotary table 2b, and is supported so as to be slidable in the axial direction. The center of the cam 62 is pivotally supported by the rotation shaft of the rotary motor 61, and the peripheral edge of one surface is dug down to draw a curved surface in a partial section. That is, the height of the peripheral edge gradually decreases from the flat section, and the height gradually increases from the lowest point to return to the flat.

  The rod 63 is a cam follower that abuts on the periphery of the surface of the cam 62 and advances outward from the center of rotation of the rotary table 2b in accordance with the change in height of the periphery, and from the outside along the radial direction of the rotary table 2b. Retreat to the center of rotation. The tip of the rod 63, that is, the outer end of the rotary table 2b faces the urging-side overhang 21b. The rod contacts the urging side overhang portion 21b of the holding portion 21 in the advancement process, and pushes the holding portion 21 toward the lighting test position 14 via the urging side overhang portion 21b in the further advancement process.

  The slide shaft 25 is fixed with a compression spring 64 connected to the arm. As the holding shaft 21 moves into the lighting test position 14, the slide shaft 25 moves, so that the compression spring 64 stores an urging force in the extending direction. The compression spring 64 is a retraction mechanism of the advance / retreat drive device 6. When the contact position of the rod 63 with respect to the cam 62 starts to descend the bulging section, the advancement output of the holding portion 21 to the lighting test position 14 is released, and the urging force of the compression spring 64 is exhibited. That is, the slide shaft 25 is returned to the table rotation center direction, and the holding unit 21 moves backward from the lighting test position 14.

  As shown in FIGS. 2 and 3, in addition to the suction nozzle 23, two through holes 24 a and 24 b are formed in the holding portion 21. The through holes 24a and 24b are formed around the suction nozzle 23 and penetrate the block body along the radial direction of the rotary table 2b. The energization device 3 includes two probe pins 31a and 31b on the anode side and the cathode side. The probe pins 31a and 31b are long and thin bars having conductivity and flexibility. The probe pins 31a and 31b extend in parallel to each other and have an axis line from the rotation center side of the rotary table 2b toward the lighting test position 14 side. At the lighting test position 14, the probe pins 31 a and 31 b are inserted into the through holes 24 a and 24 b of the holding portion 21 from the back side of the suction surface 22 and reach the suction surface 22.

  The tips of the probe pins 31a and 31b should be flexible so that they slightly protrude from the suction surface 22 when the holding portion 21 reaches the lighting test position 14. However, when the probe pins 31a and 31b are in contact with the light emitting element W, it is preferable to provide a certain degree of flexibility so that the light emitting element W is bent without being lifted.

  In the energization device 3, the probe pins 31 a and 31 b are held by the sleeve body 32, the bending is suppressed by the guide block 33, and the traveling direction is restricted. The probe pins 31 a and 31 b advance toward the lighting test position 14 when the sleeve body 32 is pushed up toward the lighting test position 14.

  The sleeve body 32 has a cylindrical cam follower 32a having an axis orthogonal to the rotation surface of the rotary table 2b at the lower part. The cam follower 32a is in contact with the peripheral surface of the cam 32b. The cam 32b is connected to the motor shaft of the motor 32c, and the cam shaft is orthogonal to the rotation surface of the rotary table 2b. The peripheral surface of the cam 32b is a cam surface. The cam surface has a wide diameter section.

  When the cam follower 32a is driven in the wide diameter section of the cam 32b as the motor 32c rotates, the sleeve body 32 is entirely pushed up toward the lighting test position 14, and the probe pins 31a and 31b also move toward the lighting test position 14. To do. Then, the probe pins 31 a and 31 b are inserted into the through holes 24 a and 24 b of the holding unit 21, and the probe pins 31 a and 31 b reach the suction surface 22 of the holding unit 21.

  A compression spring 32 d is fixed to the upper portion of the sleeve body 32. When the sleeve body 32 is pushed up to the lighting test position 14, the compression spring 32d is compressed and accumulates in the extension direction. Therefore, when the moving force to the sleeve body 32 via the cam 32b and the cam follower 32a is released by driving the motor 32c, the compression spring 32d is released to return the sleeve body 32 to the original state, and follow the probe pin 31a. , 31b are extracted from the through holes 24a, 24b.

  As shown in FIGS. 2 and 4, the clamp device 4 includes two clamp portions 41 a and 41 b that sandwich the lighting test position 14 from two opposing directions orthogonal to a tangent line passing through the apex of the rotary table 2 b. The clamp portions 41a and 41b are plates thicker than the light emitting element W, and the plate side faces the lighting test position 14. The clamp portions 41a and 41b move so as to approach and separate from each other around the lighting test position 14.

  That is, the clamp portions 41a and 41b are supported by the corresponding support blocks 42a and 42b, respectively. The support blocks 42a and 42b extend in parallel to a direction orthogonal to the rotation surface of the rotary table 2b. Both the support blocks 42 a and 42 b are connected by a tension spring 43. The tension spring 43 is urged in a direction to reduce the distance between the clamp portions 41a and 41b.

  Cam followers 44a and 44b are attached to the support blocks 42a and 42b, respectively. The cam followers 44 a and 44 b abut on a common cam plate 45 whose center is pivotally supported by the rotation shaft of the motor 46, and follow the rotation of the cam plate 45. The cam plate 45 is a disk having a rotating surface parallel to the rotary table 2b, and the circumferential surface is a cam surface and is positioned between both the cam followers 44a and 44b. The cam surface of the cam plate 45 is formed by alternately forming two narrow diameter sections and two wide diameter sections. The narrow diameter sections are formed at positions 180 degrees away from the cam plate 45, and the wide diameter sections are formed at positions 180 degrees away from the cam plate 45.

  The narrow-diameter section is a substantially circular section where the radius of the cam plate 45 is substantially the same. The outline includes manufacturing errors. The wide-diameter section has the same shape, and has a curved surface shape so that it gradually increases from one end of the section and gradually decreases toward the other end of the section at the apex.

  In the clamp device 4, when the cam followers 44a and 44b are in contact with the wide diameter section of the cam plate 45, the distance from the center of the cam plate 45 to the cam followers 44a and 44b is increased. Therefore, the clamp parts 41a and 41b are linked via the support blocks 42a and 42b along with the outward movement of the cam followers 44a and 44b, and are separated from both sides of the lighting test position 14.

  On the other hand, in the clamp device 4, when the cam followers 44 a and 44 b are in contact with the narrow diameter section of the cam plate 45, the force that pushes and expands the clamp portions 41 a and 41 b by the cam plate 45 is released. Therefore, the clamp portions 41 a and 41 b approach the lighting test position 14 from both sides by the urging force of the tension spring 43.

(Operation)
The operation of the lighting test apparatus 1 is as follows. In the lighting test apparatus 1, the supply unit 7a is disposed at the right end, and the accommodation unit 7b is disposed at the left end. The rotary tables 2a, 2b, and 2c rotate counterclockwise, and the main transport path of the light emitting element W is a path that connects the upper half circles of the three machines in a single stroke. It is assumed that the discharge path 16 is set on the lower half circle side of the rotary table 2b from the transfer angle of the rotary tables 2b and 2c. And as shown in FIG. 5, the intermittent stop angle which passes until the light emitting element W is transferred from the supply unit 7a to the accommodation unit 7b is named in order from the first. In the rotary table 2b, it is assumed that the next pitch of the ninth stop angle corresponding to the delivery angle with the rotary table 2c is the 14th stop angle, and the discharge container 9 is installed at the 14th stop angle.

  First, at the first stop angle, the holding unit 21 takes out the light emitting element W from the supply unit 7a. The rotary table 2a includes the advance / retreat drive device 6 at the first stop angle. The holding unit 21 advances toward the accommodation unit 7b upon receiving the driving force of the advance / retreat drive device 6 at the first stop angle. On the other hand, the supply unit 7a made of a ring holder pushes one of the light emitting elements W toward the holding portion 21 with a protruding pin. The holding unit 21 brings the suction surface 22 into contact with the electrode surface of the light emitting element W, and sucks and holds the light emitting element W with the suction nozzle 23.

  After the light emitting element W is held by the holding unit 21, it is moved intermittently by two pitches from the first stop angle, and moved to the third stop angle that is the apex of the first-stage rotary table 2a. The third stop angle is the displacement detection position 15a, and the imaging camera 81 is arranged. The imaging camera 81 captures the light emitting element W and outputs image data to a computer (not shown). Then, the deviation of the orientation angle of the light emitting element W and the shift amount in the vertical and horizontal directions are calculated by image analysis by a computer.

  After the image analysis, the holding unit 21 holding the light emitting element W intermittently moves by one pitch from the third stop angle and moves to the fourth stop angle. An XYθ stage 82 is disposed at the fourth stop angle. The XYθ stage 82 temporarily receives the light emitting element W, and moves and rotates in a direction to eliminate the deviation of the orientation angle and the vertical and horizontal shift amounts. By this position correction processing, the position is corrected in advance so that the light emitting element W exists at an appropriate position when the lighting test position 14 is reached.

  After the position correction, the holding unit 21 that holds the light emitting element W intermittently moves by one pitch from the fourth stop angle, and moves to the fifth stop angle. The fifth stop angle is a delivery angle with the second-stage rotary table 2b. The second-stage rotary table 2b rotates intermittently by one pitch in synchronization with the timing when the light emitting element W moves to the fifth stop angle, and moves one of the holding portions 21 to the fifth stop angle. .

  The second-stage rotary table 2b includes an advance / retreat driving device 6 at a transfer angle with the rotary pickup 2a. The holding unit 21 of the second-stage rotary table 2b advances toward the light emitting element W held by the first-stage rotary table 2a by the advance / retreat driving device 6. The holding unit 21 of the first-stage rotary table 2a disengages the light emitting element W, and the holding unit 21 of the second-stage rotary table 2b simultaneously holds the light emitting element W by suction of the suction nozzle. The light emitting element W is mounted with the electrode surface side sucked against the suction surface 22 of the holding portion 21 of the second-stage rotary table 2b, and the light emitting surface is directed outward in the table radial direction.

  After the delivery of the light emitting element W, when the rotary table 2b rotates by two pitches, the holding unit 21 holding the light emitting element W moves to the apex position of the rotary table 2b which is the seventh stop angle. A lighting test position 14 exists at the seventh stop angle. At the seventh stop angle, as shown in FIG. 6, the holding portion 21 is pushed up by the advance / retreat drive device 6 and rises toward the lighting test position 14. The light emitting element W placed on the suction surface 22 of the holding part 21 reaches the lighting test position 14 facing both the clamp parts 41 a and 41 b of the clamp device 4.

  As shown in FIG. 7, the energizing device 3 pushes up the probe pins 31 a and 31 b, inserts the probe pins 31 a and 31 b into the through holes 24 a and 24 b of the holding unit 21, and causes the probe pins 31 a and 31 b to reach the suction surface 22. . As shown in FIG. 8, it is desirable that the probe pin 31a, 31b is inserted into the through holes 24a, 24b at a timing when the holding portion 21 continues to rise. That is, the moving period of the holding unit 21 and the moving period of the probe pins 31a and 31b are at least partially overlapped. This is because the probe pins 31a and 31b are inserted into the through holes 24a and 24b, and the relative speed (V2-V1 in the figure) when moving in the through holes 24a and 24b is decreased. However, the probe pins 31a and 31b are started to be pushed up after the raising of the holding portion 21 is finished, or the probe pins 31a and 31b are brought into the through holes 24a and 24b after the raising of the holding portion 21 is finished. Also good.

  As shown in FIG. 9, the clamp device 4 moves the clamp portions 41 a and 41 b so that the clamp portions 41 a and 41 b are brought into contact with the side surfaces of the light-emitting element W when the light-emitting element W reaches the lighting test position 14. Then, the light emitting element W is sandwiched after a certain load is applied to the side surface thereof. When the probe pins 31a and 31b come into contact with the electrode surfaces, the light emitting element W emits light, and the light receiving device 5 receives the light to start analysis.

  During the lighting test, the holding unit 21 maintains the suction of the light emitting element W by the suction nozzle 23. The suction force by the holding part 21 is F1, the vertical frictional force of the light emitting element W generated by the clamp parts 41a and 41b sandwiching the side surface of the light emitting element W is F2, and the probe pins 31a and 31b are applied to the light emitting element W. The contact load due to contact is defined as F3. At this time, the load on the light emitting element W of the clamp portions 41a and 41b is adjusted in advance so that the sum of the suction force F1 and the static friction force F2 is equal to the contact load F3 or the sum slightly exceeds the contact load.

  When the lighting test is completed, as shown in FIG. 10, the clamp portions 41a and 41b are expanded to the original, and the probe pins 31a and 31b and the holding portion 21 are retracted to their original positions. Returning to FIG. 5, the rotary table 2b further rotates intermittently by two pitches. Then, the holding part 21 holding the light emitting element W moves to the ninth stop angle. The ninth stop angle is a delivery angle with the third-stage rotary table 2c. Here, if the light emitting element W is determined to be non-defective as a result of the lighting test, the light emitting element W is transferred between the second-stage rotary table 2b and the third-stage rotary table 2c.

  The third-stage rotary table 2c includes an advance / retreat driving device 6 at the delivery angle. The holding unit 21 of the third-stage rotary table 2c moves forward toward the light emitting element W held by the second-stage rotary table 2b by the advance / retreat driving device 6. The holding unit 21 of the second-stage rotary table 2 b separates the light emitting element W, and at the same time, the holding unit 21 of the third-stage rotary table 2 c holds the light emitting element W by suction of the suction nozzle 23. The light emitting element W is sucked with the light emitting surface side directed toward the suction surface 22 of the holding portion 21 of the third-stage rotary table 2b, and the electrode surface is directed outward in the table radial direction.

  When the third-stage rotary table 2c rotates four pitches after the delivery is completed, the holding unit 21 holding the non-defective light emitting element W stops at the thirteenth stop angle. The thirteenth stop angle is a delivery angle with the accommodation unit 7b. The rotary table 2c includes an advance / retreat drive device 6 at the 13th stop angle. At the thirteenth stop angle, the holding unit 21 is advanced toward the housing unit 7b by the advance / retreat driving device 6, and the light emitting element W is attached to the wafer ring held by the housing unit 7b, and the light emitting element W is detached. . While the light emitting element W is transported by the rotary table 2c, the electrode surface is directed outward in the radial direction of the table, so that the electrode surface is adhered to the wafer ring in the housing unit 7b.

  On the other hand, when it is determined as defective in the lighting test, the light-emitting element W is not delivered at the delivery angle that is the ninth stop angle, and moves to the 14th stop angle of the rotary table 2b by the rotation of the next pitch. . The 14th stop angle is the discharge position. The holding unit 21 separates the light emitting element W by vacuum break or atmospheric break, and accommodates the light emitting element W in the discharge container 9 provided immediately below.

(Function and effect)
As described above, the lighting test apparatus 1 moves the holding unit 21 that holds the light emitting element W to the lighting test position 14. At the lighting test position 14, the probe pins 31 a and 31 b are inserted into the through hole of the holding part 21 from below the holding part 21, and the probe pins 31 a and 31 b are brought into contact with the light emitting element W on the holding part 21. That is, the holding unit 21 serves as a measurement base for the light emitting element W at the lighting test position 14. In the lighting test position 14, the light emitting element W on the holding part 21 is further sandwiched from the side surfaces by the clamp parts 41a and 41b, and a static frictional force for resisting the contact load of the probe pins 31a and 31b is given to the light emitting element W. . Then, a lighting test is performed while the static frictional force is continuously applied and the holding unit 21 is fixed, and the light receiving device positioned above the holding unit 21 receives light emitted from the light emitting element W.

  As described above, in this lighting test apparatus 1, a constant load is applied to the light emitting element W from the side surfaces by the clamp portions 41a and 41b in order to make the position of the light emitting element W immovable. Therefore, the light emitting surface of the light emitting element W is not hidden by the positioning means. Further, the positioning accuracy is not lowered by trying to suppress the margin of the light emitting element W with the positioning means. Therefore, the lighting test apparatus 1 can achieve a good position immobilization even with a minute light emitting element W with little margin, and can realize an analysis with high accuracy of optical characteristics.

  The method of applying a constant load to the light emitting element W from the side surface by the clamp portions 41a and 41b is not restricted by the transport method of the light emitting element W, and can be applied to various transport methods as long as the side surface of the light emitting element W is exposed. is there. For example, the light emitting element W may be detached once outside the main transport path 11 and the lighting test may be performed outside the main transport path 11. In addition, on the outer periphery of the disk table or the turret table having a radial arm, one surface of the light emitting element W is held, and a non-contact holding portion 21 is installed on the other surface. And it is good to intermittently rotate a disk table or a turret table, and to install the clamp apparatus 4 and the light-receiving device 3 in the 1 stop position of the holding | maintenance part 21. FIG. When the holder 21 is not used as a measurement base, a probe can be formed in advance on a separately prepared measurement base.

  In the lighting test apparatus 1, the holding unit 21 is provided with the suction nozzle 23, the suction nozzle 23 is opened on the suction surface 33 of the holding unit 21, and the light emitting element W is sucked during the lighting test of the light emitting element W. Suction was performed by the nozzle 23. The suction force of the suction nozzle 23 even acts as a force to counter the contact load of the probe pins 31a and 31b with respect to the light emitting element W. That is, the static friction force generated by the clamp portions 41a and 41b can be assisted by the suction force.

  If the total force obtained by adding the attraction force to the static friction force is equal to or surpassing the contact load of the probe pins 31a and 31b, the light emitting element W can be maintained in a good position immobility. In other words, it is sufficient for the clamp portions 41a and 41b to apply to the light emitting element W a static friction force corresponding to the remaining amount obtained by subtracting the suction force from the contact load. Then, with the assistance of the suction nozzle 23, the clamp portions 41a and 41b can sandwich the light emitting element W with a small load.

  Here, applying a load from both side surfaces of the light emitting element W concentrates stress near the center of the chip or at the boundary between the electrode and the housing. On the other hand, the light emitting element W is thinned with the miniaturization of the size. Therefore, the clamping by the clamp parts 41a and 41b makes the light emitting element W easily broken such as cracks. On the other hand, if the load applied to the light emitting element W by the clamp portions 41a and 41b can be reduced as in the lighting test apparatus 1, the stress concentration on the light emitting element W can be reduced, and the risk of destruction of the light emitting element W may be reduced.

  The suction nozzle 23 is generally used in a method of holding and transporting one surface of the light emitting element W by the holding unit 21. In the lighting test apparatus 1, the holding unit 21 is not retracted during the lighting test, but is actively used as a measurement base. Therefore, it is not necessary to set the lighting test position 14 outside the main transport path 11, and the apparatus can be made compact, the apparatus can be reduced in cost, and the production efficiency of the light emitting element W can be improved.

  Further, positively using the holding unit 21 as a measurement base can continue to enjoy the advantage that the holding unit 21 holds only one surface of the light emitting element W and is not in contact with the other surface. That is, even if the light emitting elements W of various sizes are continuously manufactured in a small lot and in small quantities, it is not necessary to change the mechanical configuration of the lighting test apparatus 1 and is highly versatile.

  However, in general, in view of the fact that the suction nozzle 23 is formed in the holding portion 21 in order to hold the light emitting element W, the holding portion 21 is formed of a transparent member such as sapphire glass. It is difficult to arrange the light receiving device 3 below. On the other hand, if the probe pins 31a and 31b having a diameter of only 0.2 mm are to be inserted into the holding portion 21 that moves in the main transport path 11, the probe pins 31a and 31b are connected to the edges of the through holes 24a and 24b or the inside thereof. There is also a risk that the contact may occur and damage such as deformation may be caused by the contact impact. If the insertion speed of the probe pins 31a and 31b is decreased in order to reduce the contact impact, the productivity of the light emitting element W decreases.

  Therefore, in the lighting test apparatus 1, as a countermeasure against damage to the probe pins 31a and 31b, the movement period in which the probe pins 31a and 31b penetrate the holding part 21 and the movement period of the holding part 21 are at least partially overlapped. According to this, the relative speed of the probe pin and the holding part 21 is lowered. For this reason, even if the probe pins 31a and 31b contact the edges and inner surfaces of the through holes 24a and 24b, the contact impact force can be reduced. Therefore, in this lighting test apparatus 1, the reliability can be dramatically improved as compared with the method of actively using the holding unit 21 as a measurement base.

(Other embodiments)
Although the embodiments of the present invention have been described above, various omissions, replacements, and changes can be made without departing from the scope of the invention. And this embodiment and its deformation | transformation are included in the invention described in the claim, and its equivalent range while being included in the range and summary of invention.

  For example, in each intermittent stop angle, in addition to the lighting test position 14 and the position correction position 15, a position for process processing such as appearance inspection, adhesive application, electrical property inspection, temperature adjustment such as heating or cooling, marking, and other various processes. Can be provided.

  The position correction mechanism at the position correction position 15 can also be replaced with other known mechanisms. For example, a taper-shaped pocket portion that narrows in the depth direction is provided at the misalignment correction position 15b, and the position and orientation of the light-emitting element W are changed by the tapered surface of the pocket portion in the process of inserting the light-emitting element W into the pocket portion. You may make it correct. In this case, it is not necessary to provide the displacement detection position 15a, and the imaging camera 81 can be eliminated.

  As for the holding unit 21, any one of an electrostatic attraction method, a Bernoulli chuck method, or a mechanical chucking mechanism may be applied as long as one of the two opposing side surfaces of the light emitting element W is exposed during the holding. You can also.

  In addition, as for the drive transmission mechanism used in the lighting test apparatus 1, other known mechanisms can be applied. For example, depending on the installation mode of the motor 32c in the advancing / retreating driving apparatus 6 that advances and retracts the holding portion 21, a cam can be used. 32a can also be a cylindrical cam.

  Further, in the present embodiment, the holding unit 21 moves toward the lighting test position 14. This is to prevent the clamp portions 41a and 41b from obstructing the conveyance of the light emitting element W. However, if the holding portion 21 and the clamp portions 41a and 41b are relatively moved, the clamp portions 41a and 41b do not hinder the conveyance of the light emitting element W. For example, the clamp parts 41 a and 41 b may be movable toward the holding part 21. Alternatively, after the clamp portions 41a and 41b have advanced so as to sandwich the lighting test position 14, the clamp portions 41a and 41b may be moved in an L shape so as to reduce the distance between the clamp portions 41a and 41b. In these methods, there is no need to move the holding unit 21 back and forth.

  Moreover, since the contact load itself can be reduced by forming the probe pins 31a and 31b with a flexible material, the load applied by the clamp portions 41a and 41b can be reduced accordingly.

  Further, it goes without saying that the lighting test apparatus 1 can be applied to the light emitting element W in which the electrodes are arranged on the side surfaces.

DESCRIPTION OF SYMBOLS 1 Lighting test apparatus 11 Main conveyance path | route 12 Delivery angle 13 Delivery angle 14 Lighting test position 15 Position correction position 15a Misalignment detection position 15b Misalignment correction position 16 Discharge path 2a Rotary table 2b Rotary table 2c Rotary table 20 Flange 20a Sleeve hole 21 Holding part 21a Suction side overhang portion 21b Energizing side overhang portion 22 Suction surface 23 Suction nozzle 24a Through hole 24b Through hole 25 Slide shaft 3 Current supply device 31a Probe pin 31b Probe pin 32 Sleeve body 32a Cam 32b Cam follower 32c Motor 32d Compression spring 33 Guide block 4 Clamping device 41a Clamping part 41b Clamping part 42a Supporting block 42b Supporting block 43 Tension spring 44a Cam follower 44b Muforoa 45 cam plate 46 motor 5 receiving device 6 advancing drive unit 61 rotates the motor 62 the cam 63 rod 64 compression spring 7a supplying unit 7b accommodating unit 81 imaging camera 82 XY.theta. Stage 9 dispensing container W light emitting element

Lighting test apparatus for solving the problems as described above, takes out the light-emitting element from the supply unit tests the optical characteristics of the light-emitting element, a lighting test apparatus to pass a light-emitting element in the housing unit, a circumferential direction A rotary table that takes out the light emitting element from the supply unit while holding it intermittently rotating at a predetermined angle, conveys the light emitting element in the radially outward direction, and passes the light emitting element to the housing unit, and the circumference of the rotary table A plurality of measurement bases that bulge above or below the plane of the rotary table and hold the light emitting element on the radially outer surface of the rotary table, and a stop position of the measurement base that accompanies the intermittent rotation For one, the position of the lighting test located radially outward of the rotary table and the position of the light emitting element in the lighting test Advancing and retreating drive means for advancing the measurement base so as to be positioned on the surface, a probe extending along the radial direction from the center side of the rotary table toward the measurement base bulging from the rotary table, and the probe a probe driving means for contacting the light emitting element on the measuring base is inserted to the measuring base, sandwich the light-emitting element on the measuring base from the side, the static friction force to resist the contact load between the light emitting element and the probe further comprising a clamping means for providing a light emission element, a light receiving means further located radially outward of the position of the lighting test, characterized by.

A plurality of the rotary tables are provided so as not to overlap each other , the rotary tables are arranged adjacent to each other on the same plane with parallel rotation axes, and transport the light emitting surfaces of the light emitting elements outward in the table radial direction. The lighting test position may be set as one of the above.

A lighting test apparatus for solving the above problems is a lighting test apparatus that takes out a light emitting element from a supply unit, tests the optical characteristics of the light emitting element, and passes the light emitting element to a housing unit. A rotary table that takes out the light emitting element from the supply unit while holding it intermittently rotating at a predetermined angle, conveys the light emitting element in the radially outward direction, and passes the light emitting element to the housing unit, and the circumference of the rotary table A plurality of attached to the rotary table, holding the light emitting element on the radially outer surface of the rotary table during the conveyance, and a direction orthogonal to the direction in which the surface holding the light emitting element faces or above the plane of the rotary table or a measurement-based bulging planar downwardly, for one of the measuring base stop position due to the intermittent rotation of the rotary table A lighting test position located radially outward, an advancing / retreating drive means for advancing the measurement base so that a light emitting element is positioned at the lighting test position, and toward the measurement base bulged from the rotary table A probe extending along the radial direction from the center side of the rotary table, probe driving means for inserting the probe into the measurement base and contacting the light emitting element on the measurement base, and the light emitting element on the measurement base from the side sandwiched in, e Preparations and clamping means for applying a static friction force to resist the contact load between the light emitting element and the probe to a light-emitting element, a light receiving means further located radially outward of the position of the lighting test In the lighting test, the measurement base is directed to the position from below the lighting test position. The light-emitting element is moved to the position, and the probe driving means at least partially overlaps the movement period for penetrating the probe through the measurement base with the movement period of the measurement base, and the measurement base is moving forward. And inserting the probe into the measurement base .

Claims (10)

A lighting test device for testing optical characteristics of a light emitting element,
A measurement base on which the light emitting element is mounted;
A probe provided on the measurement base side;
A light receiving means located above the measurement base;
Clamp means that sandwiches the light emitting element on the measurement base from the side surface and applies a static frictional force to the light emitting element to resist the contact load between the light emitting element and the probe;
Providing
Lighting test equipment characterized by. The probe extends from below the measurement base toward the measurement base;
The measurement base has a through hole;
Probe driving means for inserting the probe into the through-hole and bringing it into contact with a light emitting element on the measurement base;
The lighting test apparatus according to claim 1. A suction nozzle that is embedded in the measurement base and has an opening in the measurement base, and sucks a light emitting element placed on the measurement base;
The suction nozzle assists the static frictional force against the contact load with a suction force;
The lighting test device according to claim 1 or 2. The clamping means sandwiches the light emitting element so as to give the static frictional force obtained by subtracting the suction force from the contact load to the light emitting element;
The lighting test apparatus according to claim 3. The measurement base is
During the lighting test, moving from the lower position of the lighting test toward the position, the light emitting element is positioned at the position,
The probe driving means at least partially overlaps a movement period for penetrating the probe through the measurement base with a movement period of the measurement base;
The lighting test device according to any one of claims 1 to 4, wherein A light emitting element is taken out from one supply unit and transferred to the other storage unit, and further provided with a conveyance path for arranging the lighting test position on the path,
The transport path is
Holding means for holding one surface of the light emitting element and not contacting the other surface;
A transport unit that moves the holding unit along the transport path and stops the holding unit at the position of the lighting test;
With
The holding means has the through hole through which the probe passes, and maintains the light emitting element as the measurement base at the position of the lighting test;
The lighting test apparatus according to any one of claims 1 to 5. The suction nozzle is embedded in the holding means and opens on the one surface,
The holding means holds the light emitting element by sucking the suction nozzle while moving on the transport path;
The lighting test apparatus according to claim 6. The conveying means is
A plurality or a plurality of rotary tables in which a plurality of the holding means are arranged around a rotation axis so that the one surface on which the light emitting element is placed is always facing outward, and intermittently rotate by a predetermined angle around the rotation axis; ,
The lighting test device according to claim 6 or 7, characterized in that. The lighting test position is located radially outward of the rotary table with respect to one of the stop positions of the holding means accompanying the intermittent rotation,
The light receiving means is located further radially outward than the position of the lighting test,
Advancing / retreating driving means for advancing the holding means to position the light emitting element at the position of the lighting test,
The probe driving means is located closer to the rotation center of the rotary table than the holding means,
The probe has an axis toward the position of the lighting test;
The lighting test apparatus according to claim 8. The transport path is formed by arranging a plurality of the rotary tables adjacent to each other on the same plane in parallel with the rotation axis so as not to overlap each other.
The position of the lighting test is set on one of the rotary tables that conveys the light emitting surface of the light emitting element outward in the radial direction of the table;
The lighting test apparatus according to claim 8 or 9, characterized in that.

Images