JP2007002966A - Fluid bearing device - Google Patents

Fluid bearing device Download PDF

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JP2007002966A
JP2007002966A JP2005186538A JP2005186538A JP2007002966A JP 2007002966 A JP2007002966 A JP 2007002966A JP 2005186538 A JP2005186538 A JP 2005186538A JP 2005186538 A JP2005186538 A JP 2005186538A JP 2007002966 A JP2007002966 A JP 2007002966A
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bearing
peripheral surface
shaft member
electroformed
dynamic pressure
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JP4794922B2 (en
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Isao Komori
功 古森
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NTN Corp
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NTN Corp
NTN Toyo Bearing Co Ltd
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Priority to JP2005186538A priority Critical patent/JP4794922B2/en
Priority to CN2006800008524A priority patent/CN101018955B/en
Priority to US11/660,739 priority patent/US7687951B2/en
Priority to KR1020077029222A priority patent/KR20080022107A/en
Priority to PCT/JP2006/312430 priority patent/WO2007000925A1/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid bearing device having a tilted bearing clearance of high precision at low cost. <P>SOLUTION: The fluid bearing device 1 comprises a shaft member 2, a bearing member 7 with the shaft member 2 inserted in an inner circumference, and a tilted bearing clearance C1 which is formed between an outer circumferential surface of the shaft member 2 and an inner circumferential surface of the bearing member 7, and tilted in the axial direction. The bearing member 7 has an electroforming unit 10 facing the tilted bearing clearance C1 and a mold part 14 which is injection-molded while inserting the electroforming unit 10 therein. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、流体軸受装置に関するものである。流体軸受装置は、軸受隙間に形成した油膜で軸部材を回転自在に支持するものであり、この軸受装置は、情報機器、例えばHDD、FDD等の磁気ディスク装置、CD−ROM、CD−R/RW、DVD−ROM/RAM等の光ディスク装置、MD、MO等の光磁気ディスク装置等に搭載するスピンドルモータ用、レーザビームプリンタ(LBP)などに搭載するポリゴンスキャナモータ用、パーソナルコンピュータ(PC)などに搭載するファンモータ用、あるいは軸流ファンなどの電気機器に搭載する小型モータ用として好適である。   The present invention relates to a hydrodynamic bearing device. A hydrodynamic bearing device is a device that rotatably supports a shaft member with an oil film formed in a bearing gap. This bearing device is a magnetic disk device such as an information device such as an HDD or an FDD, a CD-ROM, a CD-R / For spindle motors mounted on optical disk devices such as RW and DVD-ROM / RAM, magneto-optical disk devices such as MD and MO, for polygon scanner motors mounted on laser beam printers (LBP), personal computers (PC), etc. It is suitable for a fan motor mounted on a motor or a small motor mounted on an electric device such as an axial fan.

上記各種モータには、高回転精度の他、高速化、低コスト化、低騒音化などが求められている。これらの要求性能を決定付ける構成要素の一つに当該モータのスピンドルを支持する軸受があり、近年では、この種の軸受として、上記要求性能に優れた特性を有する流体軸受装置の使用が検討され、あるいは実際に使用されている。   In addition to high rotational accuracy, the various motors are required to have high speed, low cost, low noise, and the like. One of the components that determine these required performances is a bearing that supports the spindle of the motor. In recent years, as this type of bearing, the use of a hydrodynamic bearing device having characteristics excellent in the required performance has been studied. Or actually used.

この種の流体軸受装置は、軸受隙間内の潤滑油に動圧を発生させるための動圧発生部を備えた動圧軸受と、動圧発生部を備えていない、いわゆる真円軸受(軸受断面が真円形状である軸受)とに大別される。   This type of hydrodynamic bearing device includes a hydrodynamic bearing provided with a dynamic pressure generating portion for generating dynamic pressure in the lubricating oil in the bearing clearance, and a so-called perfect bearing (bearing cross section) provided with no dynamic pressure generating portion. Are roughly divided into bearings having a perfect circle shape.

例えば、HDD等のディスク装置に用いられる流体軸受装置の一例として、図16に示す構造を有するものを挙げることができる。この流体軸受装置では、軸部材100の外周面とラジアル軸受隙間を介して対向する軸受部材200の内周面との間に、軸部材100を非接触支持するためのラジアル軸受部400が設けられる。また、軸部材100に設けられたフランジ部110の両端面と、スラスト軸受隙間を介して前記両端面に対向する部材(軸受部材200や蓋部材300)の端面との間に、軸部材をスラスト方向に非接触支持するためのスラスト軸受部500が設けられる。   For example, an example of a hydrodynamic bearing device used for a disk device such as an HDD may be one having the structure shown in FIG. In this hydrodynamic bearing device, a radial bearing portion 400 for supporting the shaft member 100 in a non-contact manner is provided between the outer peripheral surface of the shaft member 100 and the inner peripheral surface of the bearing member 200 facing each other through a radial bearing gap. . Further, the shaft member is thrust between the both end surfaces of the flange portion 110 provided on the shaft member 100 and the end surfaces of the members (the bearing member 200 and the lid member 300) facing the both end surfaces through the thrust bearing gap. A thrust bearing portion 500 for non-contact support in the direction is provided.

ところで、近年、HDD等のディスク装置が組み込まれる情報機器においては、急速に高性能化が図られている一方で、小型・薄型化(コンパクト化)も図られており、流体軸受装置に対するこの種の要求が益々厳しくなっている。しかしながら、上述した流体軸受装置の構造では、ラジアル軸受部と、二つのスラスト軸受部とが軸方向に積み重なった形態であるため、全体的に軸受装置の軸方向寸法が大きく、流体軸受装置のコンパクト化には限界がある。   By the way, in recent years, in information equipment in which a disk device such as an HDD is incorporated, the performance has been improved rapidly, and the size and thickness (compact) have been reduced. The demand for is getting stricter. However, in the structure of the hydrodynamic bearing device described above, since the radial bearing portion and the two thrust bearing portions are stacked in the axial direction, the overall axial size of the bearing device is large and the hydrodynamic bearing device is compact. There is a limit to the conversion.

そこで、例えば、軸部材を円錐台状に形成し、その外周に配した焼結金属製の軸受部材との間に軸方向一方側を大径に、軸方向他方側を小径にした軸受隙間(傾斜軸受隙間)を形成すると共に、軸部材の端面とこれに対向する閉塞部材との間にスラスト軸受隙間を形成したものが開示されている。この構成であれば、図16に示す軸部材100のフランジ部110が不要となるので、その分だけ軸受装置の軸方向寸法をコンパクト化することができる(例えば、特許文献1参照)。
特開2002−276649号公報
Thus, for example, a shaft gap is formed in a truncated cone shape, and a bearing gap (with a large diameter on one side in the axial direction and a small diameter on the other side in the axial direction between the bearing members made of sintered metal disposed on the outer periphery thereof ( An inclined bearing gap is formed, and a thrust bearing gap is formed between the end surface of the shaft member and the closing member facing the shaft member. With this configuration, since the flange portion 110 of the shaft member 100 shown in FIG. 16 is not required, the axial dimension of the bearing device can be made compact accordingly (for example, see Patent Document 1).
JP 2002-276649 A

一般に、流体軸受装置の回転精度をはじめとする軸受性能は、軸受隙間の精度の良否に大きく左右される。上記特許文献1に記載した流体軸受装置では、傾斜状の軸受隙間を形成するために軸部材の外周面や軸受部材の内周面を円錐面状に形成する必要があるが、円錐面を精度良くかつ効率的に加工することは容易ではない。特に、外周面に比べて内周面の加工は一般的に難しいので、軸受部材の円錐状内周面を精度良くかつ低コストに仕上げることは現状の加工技術では困難である。従って、高精度の傾斜軸受隙間を安定的に得ることができず、そのために設計条件等によっては十分な軸受性能を確保できないおそれがある。   In general, the bearing performance including the rotational accuracy of the hydrodynamic bearing device is greatly influenced by the accuracy of the bearing clearance. In the hydrodynamic bearing device described in Patent Document 1, it is necessary to form the outer peripheral surface of the shaft member and the inner peripheral surface of the bearing member in a conical shape in order to form an inclined bearing gap. Good and efficient processing is not easy. In particular, since machining of the inner peripheral surface is generally difficult as compared with the outer peripheral surface, it is difficult to accurately finish the conical inner peripheral surface of the bearing member at a low cost with the current processing technology. Therefore, a highly accurate inclined bearing gap cannot be obtained stably, and there is a possibility that sufficient bearing performance cannot be ensured depending on the design conditions.

そこで、本発明は、高精度の傾斜軸受隙間を備えた流体軸受装置を低コストに提供することを目的とする。   Then, an object of this invention is to provide the hydrodynamic bearing apparatus provided with the highly accurate inclination bearing clearance at low cost.

上記課題を解決するため、本発明にかかる流体軸受装置は、軸部材と、軸部材を内周に挿入した軸受部材と、軸部材の外周面と軸受部材の内周面との間に形成され、軸方向に傾斜した傾斜軸受隙間とを備え、傾斜軸受隙間に形成した油膜で軸部材を回転自在に支持するものであって、軸受部材が、傾斜軸受隙間に面する電鋳部を備え、かつ電鋳部をインサートした射出成形品であることを特徴とするものである。   In order to solve the above problems, a hydrodynamic bearing device according to the present invention is formed between a shaft member, a bearing member in which the shaft member is inserted into an inner periphery, and an outer peripheral surface of the shaft member and an inner peripheral surface of the bearing member. An inclined bearing gap inclined in the axial direction, the shaft member is rotatably supported by an oil film formed in the inclined bearing gap, and the bearing member includes an electroformed portion facing the inclined bearing gap, And it is the injection molded product which inserted the electroformed part, It is characterized by the above-mentioned.

電鋳部は、電鋳加工によりマスター部材表面に析出して形成された金属組織であり、マスター部材との接触面ではマスター部材の表面形状がミクロンオーダーで正確に転写される。従って、マスター部材の外周面を電鋳部の内周面形状に対応した円錐面状に形成し、これに入念な仕上げ加工を施してその精度を十分に高めておけば、従来の加工法では加工が難しい円錐状の内周面を精度良く得ることができる。内周面に比べれば、外周面の高精度加工は一般に容易であるから、マスター部材の外周面を円錐面状に精度良く仕上げることはそれほど難しいことではない。従って、電鋳部を傾斜軸受隙間に面して形成することで、軸方向一方側を大径に、軸方向他方側を小径にした傾斜軸受隙間が精度良くかつ低コストに得られる。   The electroformed part is a metal structure formed by being deposited on the surface of the master member by electroforming, and the surface shape of the master member is accurately transferred on the order of microns on the contact surface with the master member. Therefore, if the outer peripheral surface of the master member is formed in a conical shape corresponding to the inner peripheral surface shape of the electroformed part, and the precision is sufficiently increased by carefully finishing this, the conventional processing method A conical inner peripheral surface that is difficult to process can be obtained with high accuracy. Compared to the inner peripheral surface, high-accuracy machining of the outer peripheral surface is generally easy, so it is not so difficult to finish the outer peripheral surface of the master member into a conical surface with high accuracy. Therefore, by forming the electroformed part so as to face the inclined bearing gap, an inclined bearing gap having a large diameter on one side in the axial direction and a small diameter on the other side in the axial direction can be obtained with high accuracy and low cost.

軸受部材は、上述した電鋳部をインサートした射出成形によって形成される。射出成形であれば低コストに成形することができ、さらには軸受部材を任意形状に成形することができるから、二以上の部材からなる軸受部材を一体化することができる。従って、部品点数の削減を通じてさらなる低コスト化を図ることができる。   The bearing member is formed by injection molding in which the above-described electroformed part is inserted. If it is injection molding, it can be molded at a low cost, and further, since the bearing member can be molded into an arbitrary shape, the bearing member composed of two or more members can be integrated. Therefore, further cost reduction can be achieved by reducing the number of parts.

上記構成において、軸部材の外周面、または軸受部材の電鋳部の何れか一方に、傾斜軸受隙間と対向させて動圧発生部を形成することにより、傾斜軸受隙間に流体動圧を発生させて軸受剛性を向上させることができる。軸受部材の電鋳部に動圧発生部を形成する場合、マスター部材に動圧発生部の形状に対応した型を形成しておけば、上記電鋳加工の特性から、精度の良い動圧発生部が低コストに製作可能となる。軸部材の外周面に動圧発生部を形成する場合、マスター部材の外周面を凹凸のない平滑面状に形成する。このマスター部材を用いて電鋳部を形成し、電鋳部をマスター部材から分離した後、予め外周面に動圧発生部を形成した軸部材を電鋳部の内周面に挿入することにより、軸受装置が組み立てられる。   In the above configuration, the fluid dynamic pressure is generated in the inclined bearing gap by forming the dynamic pressure generating part on the outer peripheral surface of the shaft member or the electroformed part of the bearing member so as to face the inclined bearing gap. The bearing rigidity can be improved. When forming the dynamic pressure generating part in the electroformed part of the bearing member, if the master member is formed with a mold corresponding to the shape of the dynamic pressure generating part, the dynamic pressure can be generated with high accuracy from the above-mentioned electroforming characteristics. The part can be manufactured at low cost. When the dynamic pressure generating portion is formed on the outer peripheral surface of the shaft member, the outer peripheral surface of the master member is formed into a smooth surface without unevenness. By forming an electroformed part using this master member and separating the electroformed part from the master member, a shaft member in which a dynamic pressure generating part is previously formed on the outer peripheral surface is inserted into the inner peripheral surface of the electroformed part. The bearing device is assembled.

動圧発生部としては、傾斜軸受隙間に流体動圧を発生させることができれば特にその形態を問わず、例えばヘリングボーン形状やスパイラル形状に配列された複数の動圧溝、円周方向等間隔に設けられた軸方向溝、あるいは円周方向に設けられた複数の円弧面、調和波形面等を挙げることができる。   The dynamic pressure generating portion is not particularly limited as long as fluid dynamic pressure can be generated in the inclined bearing gap, for example, a plurality of dynamic pressure grooves arranged in a herringbone shape or a spiral shape, and at equal intervals in the circumferential direction. Examples thereof include an axial groove provided, a plurality of circular arc surfaces provided in the circumferential direction, and harmonic wave surfaces.

上記の構成を有する流体軸受装置は、ステータコイルとロータマグネットとを有するモータ、例えば情報機器用のスピンドルモータ等に好ましく使用することができる。   The hydrodynamic bearing device having the above-described configuration can be preferably used for a motor having a stator coil and a rotor magnet, for example, a spindle motor for information equipment.

以上のように、本発明によれば、高精度の傾斜軸受隙間を有する流体軸受装置を低コストに提供することができる。   As described above, according to the present invention, a hydrodynamic bearing device having a highly accurate inclined bearing gap can be provided at low cost.

以下、本発明の実施形態を図面に基づいて説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図1は、本発明の構成を有する流体軸受装置(動圧軸受装置)1を組込んだ情報機器用スピンドルモータの一構成例を概念的に示すものである。この情報機器用スピンドルモータは、HDD等のディスク駆動装置に用いられるもので、軸部材2を回転自在に支持する流体軸受装置1と、軸部材2に取り付けられ、ディスクDを一枚または複数枚保持するディスクハブ9と、半径方向のギャップを介して対向するステータコイル4およびロータマグネット5と、ブラケット6とを備えている。ステータコイル4は、ブラケット6の外周に取り付けられ、ロータマグネット5はディスクハブ9の内周に取り付けられている。ステータコイル4に通電すると、ステータコイル4とロータマグネット5との間に発生する電磁力で、ロータマグネット5が回転し、それに伴って軸部材2およびディスクハブ9が一部材(回転部材3)となって一体に回転する。   FIG. 1 conceptually shows one configuration example of a spindle motor for information equipment incorporating a fluid dynamic bearing device (dynamic pressure bearing device) 1 having the configuration of the present invention. This spindle motor for information equipment is used in a disk drive device such as an HDD. The hydrodynamic bearing device 1 that rotatably supports the shaft member 2 and the shaft member 2 are mounted on one or more disks D. The disk hub 9 to hold | maintain, the stator coil 4 and the rotor magnet 5 which oppose through a gap of radial direction, and the bracket 6 are provided. The stator coil 4 is attached to the outer periphery of the bracket 6, and the rotor magnet 5 is attached to the inner periphery of the disk hub 9. When the stator coil 4 is energized, the rotor magnet 5 is rotated by electromagnetic force generated between the stator coil 4 and the rotor magnet 5, and the shaft member 2 and the disk hub 9 are moved together with the member (rotating member 3). And rotate together.

流体軸受装置1を他の情報機器用スピンドルモータ、例えば光ディスク装置や光磁気ディスク装置のスピンドルモータに使用する場合にはディスクを支持するターンテーブル(図示省略)が、レーザビームプリンタ(LBP)のポリゴンスキャナモータに使用する場合にはポリゴンミラー(図示省略)が、パーソナルコンピュータ(PC)のファンモータに使用する場合にはファン(図示省略)が、それぞれ軸部材2に固定される。   When the hydrodynamic bearing device 1 is used in a spindle motor for other information equipment, for example, a spindle motor of an optical disk device or a magneto-optical disk device, a turntable (not shown) that supports the disk is a polygon of a laser beam printer (LBP). A polygon mirror (not shown) is fixed to the shaft member 2 when used for a scanner motor, and a fan (not shown) is used for a fan motor of a personal computer (PC).

流体軸受装置1は、軸部材2と、軸部材2の外周に配置した軸受部材7と、軸受部材7の一端開口を封口する蓋部材8とを主要な構成要素として備えている。なお、以下説明の便宜上、蓋部材8の側を下側、これとは軸方向反対側を上側として説明を行う。   The hydrodynamic bearing device 1 includes a shaft member 2, a bearing member 7 disposed on the outer periphery of the shaft member 2, and a lid member 8 that seals one end opening of the bearing member 7 as main components. For convenience of explanation, the lid member 8 side is described as the lower side, and the side opposite to the axial direction is described as the upper side.

軸部材2は、必要とされる剛性および耐摩耗性を満足する金属材料、例えばステンレス鋼で形成される。軸部材2は、軸方向の一方側(図示例では上側)を小径に、他方側(図示例では下側)を大径にした円錐台状の円錐部2aと、円錐部2aの上方に設けられ、円錐部2aと一体に形成された円筒状の基部2bとで構成されている。円錐部2aの外周面2a1と下側端面2a2とは凹凸のない平滑面として形成されている。   The shaft member 2 is made of a metal material that satisfies the required rigidity and wear resistance, for example, stainless steel. The shaft member 2 is provided above the conical portion 2a and a truncated cone-shaped conical portion 2a having a small diameter on one side (upper side in the illustrated example) and a large diameter on the other side (lower side in the illustrated example). And a cylindrical base portion 2b formed integrally with the conical portion 2a. The outer peripheral surface 2a1 and the lower end surface 2a2 of the conical portion 2a are formed as smooth surfaces without unevenness.

軸部材2の基部2bには、ディスクハブ9が圧入、圧入接着等適宜の手段で固定されており、一体となった軸部材2とディスクハブ9とで回転部材3を構成する。なお、軸部材2をインサートしてディスクハブ9を射出成形することで、回転部材3を構成することもできる。   A disc hub 9 is fixed to the base portion 2b of the shaft member 2 by appropriate means such as press-fitting and press-fitting adhesion, and the shaft member 2 and the disc hub 9 integrated together constitute a rotating member 3. The rotating member 3 can also be configured by inserting the shaft member 2 and injection molding the disk hub 9.

軸受部材7は、内周面が円錐面状をなす電鋳部10と、電鋳部10の外周を被覆するモールド部14とからなる。モールド部14は、後述のように電鋳部10をインサートした状態で射出成形される。   The bearing member 7 includes an electroformed part 10 having an inner peripheral surface having a conical surface shape and a mold part 14 that covers the outer periphery of the electroformed part 10. The mold part 14 is injection-molded with the electroformed part 10 inserted as will be described later.

軸受部材7の内周面7aは、軸部材2の円錐部2aの外周面形状に対応したテーパ面状に形成される。軸受部材7の内周面7aと軸部材2の円錐部2aの外周面2a1とは互いに母線が平行であり、従って、両面7a,2a1同士は互いに面接触可能である。後述するように、軸部材2の回転に伴い、軸受部材7の内周面7aと軸部材2の円錐部2aの外周面2a1との間には、軸方向上側が小径に、軸方向下側が大径になるよう傾斜させた傾斜軸受隙間C1が上下二箇所に離隔形成される。なお、図示例では、理解の容易化のために傾斜軸受隙間C1の隙間幅を誇張して描いているが、実際には数μm〜十数μm程度である。   The inner peripheral surface 7 a of the bearing member 7 is formed in a tapered surface shape corresponding to the outer peripheral surface shape of the conical portion 2 a of the shaft member 2. The inner peripheral surface 7a of the bearing member 7 and the outer peripheral surface 2a1 of the conical portion 2a of the shaft member 2 are parallel to each other in the generatrix, so that both surfaces 7a and 2a1 can be in surface contact with each other. As will be described later, with the rotation of the shaft member 2, between the inner peripheral surface 7 a of the bearing member 7 and the outer peripheral surface 2 a 1 of the conical portion 2 a of the shaft member 2, the upper side in the axial direction has a smaller diameter and the lower side in the axial direction has Inclined bearing gaps C1 that are inclined so as to have a large diameter are formed at two locations in the vertical direction. In the illustrated example, the gap width of the inclined bearing gap C1 is exaggerated for easy understanding, but in actuality, it is about several μm to several tens of μm.

電鋳部10の内周面には、図2に示すように、傾斜軸受面Aが上下二箇所に離隔形成され、軸部材2の回転時には、この傾斜軸受面Aと対向する領域にそれぞれ傾斜軸受隙間C1が形成される。傾斜軸受面Aにはそれぞれ、傾斜軸受隙間C1に流体動圧を発生させる動圧発生部として、例えばヘリングボーン形状に配列された複数の動圧溝Aaが形成されている。図示例では、二つの傾斜軸受面Aを共通の電鋳部10の内周面に形成した場合を例示しているが、各傾斜軸受面Aを二以上の電鋳部10に個別に形成してもよい。なお、動圧溝形状としては、図示したヘリングボーン形状の他、スパイラル形状等を採用することもできる。   As shown in FIG. 2, the inclined bearing surface A is formed at two upper and lower portions on the inner peripheral surface of the electroformed portion 10, and each of the inclined portions is inclined to a region facing the inclined bearing surface A when the shaft member 2 rotates. A bearing gap C1 is formed. In the inclined bearing surface A, a plurality of dynamic pressure grooves Aa arranged in a herringbone shape, for example, are formed as dynamic pressure generating portions that generate fluid dynamic pressure in the inclined bearing gap C1. In the illustrated example, the case where two inclined bearing surfaces A are formed on the inner peripheral surface of the common electroformed part 10 is illustrated, but each inclined bearing surface A is individually formed on two or more electroformed parts 10. May be. As the dynamic pressure groove shape, a spiral shape or the like can be adopted in addition to the herringbone shape shown in the figure.

蓋部材8は、例えばステンレス鋼や黄銅等の金属材料で円盤状に形成され、軸受部材7の大径側開口部に形成された段部に接着等の手段で固定される。蓋部材8の上側端面8aには、スラスト軸受面Bが形成され、軸部材2の回転時には、このスラスト軸受面Bと対向する領域にスラスト軸受隙間C2が形成される。スラスト軸受面には、スラスト軸受隙間C2に流体動圧を発生させるためのスラスト動圧発生部として、例えば図3に示すようなスパイラル形状に配列した複数の動圧溝Baが形成される。なお、動圧溝形状としては、図示したスパイラル形状の他、ヘリングボーン形状、あるいは放射形状等を採用することもできる。また、動圧溝等の動圧発生部を有するスラスト軸受面Bは、軸部材2の下側端面2a2に形成することもできる。   The lid member 8 is formed in a disc shape with a metal material such as stainless steel or brass, and is fixed to a step formed in the large-diameter side opening of the bearing member 7 by means such as adhesion. A thrust bearing surface B is formed on the upper end surface 8a of the lid member 8, and a thrust bearing gap C2 is formed in a region facing the thrust bearing surface B when the shaft member 2 rotates. For example, a plurality of dynamic pressure grooves Ba arranged in a spiral shape as shown in FIG. 3 are formed on the thrust bearing surface as thrust dynamic pressure generating portions for generating fluid dynamic pressure in the thrust bearing gap C2. As the dynamic pressure groove shape, a herringbone shape, a radial shape, or the like can be employed in addition to the spiral shape shown in the figure. The thrust bearing surface B having a dynamic pressure generating portion such as a dynamic pressure groove can also be formed on the lower end surface 2a2 of the shaft member 2.

図示は省略しているが、軸受部材7の内周面の上端と、これに対向する軸部材2の外周面2a1との間にはシール空間を形成することができる。このシール空間は、例えば軸受装置の内部側を狭くしたテーパ状に形成される。このようにテーパ状に形成することで、潤滑油が毛細管力によって軸受装置の内部側に引き込まれるため、潤滑油の軸受装置外への漏れ出しを防止することが可能となる。シール空間は、温度変化による潤滑油の熱膨張量を吸収できるだけの容積を有し、そのために外気に開放した油面は常時シール空間内に存在する。なお、シール空間は、軸受部材7の上端内周面に固定され、軸受部材とは別体のシール部材の内周面と、これに対向する軸部材の外周面との間に形成してもよい。   Although illustration is omitted, a seal space can be formed between the upper end of the inner peripheral surface of the bearing member 7 and the outer peripheral surface 2a1 of the shaft member 2 opposed to the upper end. For example, the seal space is formed in a tapered shape in which the inner side of the bearing device is narrowed. By forming the tapered shape in this way, the lubricating oil is drawn into the inside of the bearing device by the capillary force, so that it is possible to prevent the lubricating oil from leaking out of the bearing device. The seal space has a volume that can absorb the thermal expansion amount of the lubricating oil due to temperature changes, and therefore the oil level that is open to the outside air always exists in the seal space. The seal space is fixed to the inner peripheral surface of the upper end of the bearing member 7 and may be formed between the inner peripheral surface of the seal member separate from the bearing member and the outer peripheral surface of the shaft member facing the seal member. Good.

以上の構成において、軸受装置の内部空間には潤滑油が充満される。この状態で、軸部材2と軸受部材7とを相対回転させると(本実施形態では軸部材2が回転する)、軸受部材7の内周面の傾斜軸受面Aは、それぞれ軸部材2の外周面2a1と二つの傾斜軸受隙間C1を介して対向する。軸部材2の回転に伴い、各傾斜軸受隙間C1に潤滑油の動圧が発生し、図4に示すように軸部材2に対して水平方向(ラジアル方向)の分力Frと垂直方向下向き(スラスト方向)の分力Ftが作用する。これにより、軸部材2をラジアル方向および一方のスラスト方向に回転自在に非接触支持する第1の傾斜軸受部K1と第2の傾斜軸受部K2とが形成される。   In the above configuration, the lubricating oil is filled in the internal space of the bearing device. In this state, when the shaft member 2 and the bearing member 7 are relatively rotated (in this embodiment, the shaft member 2 is rotated), the inclined bearing surface A on the inner peripheral surface of the bearing member 7 is the outer periphery of the shaft member 2. It faces the surface 2a1 via two inclined bearing gaps C1. As the shaft member 2 rotates, a dynamic pressure of lubricating oil is generated in each inclined bearing gap C1, and as shown in FIG. 4, a horizontal component (radial direction) component force Fr and a vertically downward direction ( A component force Ft in the thrust direction) acts. Thereby, the 1st inclination bearing part K1 and the 2nd inclination bearing part K2 which support the shaft member 2 in a radial direction and one thrust direction so that rotation is possible are formed.

また、軸部材2の回転に伴い、蓋部材8の上側端面8aに形成されたスラスト軸受面Bは、軸部材2の下側端面2a2とスラスト軸受隙間C2を介して対向する。軸部材2の回転に伴い、スラスト軸受隙間C2に潤滑油の動圧が発生し、スラスト軸受隙間C2に形成される潤滑油の油膜によって軸部材2がスラスト方向上向きに回転自在に非接触支持される。これにより、軸部材2を他方のスラスト方向に回転自在に非接触支持するスラスト軸受部Tが形成される。   As the shaft member 2 rotates, the thrust bearing surface B formed on the upper end surface 8a of the lid member 8 faces the lower end surface 2a2 of the shaft member 2 through the thrust bearing gap C2. As the shaft member 2 rotates, dynamic pressure of the lubricating oil is generated in the thrust bearing gap C2, and the shaft member 2 is supported in a non-contact manner so as to be rotatable upward in the thrust direction by the oil film of the lubricating oil formed in the thrust bearing gap C2. The Thereby, the thrust bearing part T which supports the shaft member 2 in a non-contact manner so as to be rotatable in the other thrust direction is formed.

次に、上記軸受部材7の製造工程を以下に説明する。   Next, the manufacturing process of the bearing member 7 will be described below.

図5〜図7は、上記軸受装置における軸受部材7の各製造工程を示すものである。詳述すると、図5(a)はマスター部材12を製作する工程(マスター部材製作工程)、図5(b)はマスター部材12の所要箇所をマスキングする工程(マスキング工程)、図6は電鋳加工により電鋳部材11を形成する工程(電鋳加工工程)、図7は電鋳部材11の電鋳部10を樹脂等でモールドする工程(モールド工程)を示すものである。これらの工程を経た後、電鋳部10とマスター部材12とを分離する工程を経て軸受部材7が製作される。   5-7 shows each manufacturing process of the bearing member 7 in the said bearing apparatus. More specifically, FIG. 5 (a) is a process of manufacturing the master member 12 (master member manufacturing process), FIG. 5 (b) is a process of masking a required portion of the master member 12 (masking process), and FIG. FIG. 7 shows a step (molding step) of molding the electroformed part 10 of the electroformed member 11 with resin or the like. After passing through these steps, the bearing member 7 is manufactured through a step of separating the electroformed part 10 and the master member 12.

図5(a)に示すマスター部材製作工程では、導電性材料、例えば焼入処理を施したステンレス鋼、ニッケルクロム鋼、その他のニッケル合金、あるいはクロム合金等でマスター部材12が形成される。マスター部材12は、これら金属材料以外にも、導電処理(例えば、表面に導電性の被膜を形成する)を施されたセラミック等の非金属材料で形成することもできる。マスター部材12は、円錐台部12aと、円錐台部12aと一体に形成され、円錐台部12aの下端から軸方向に延びる円筒部12bとを備える。円錐台部12aの外周面は、軸受部材7の内周面形状に対応させて、軸方向一方側を小径に、軸方向他方側を大径にしたテーパ面状に形成されている。   In the master member manufacturing process shown in FIG. 5A, the master member 12 is formed of a conductive material, for example, stainless steel, nickel chrome steel, other nickel alloy, chromium alloy or the like that has been subjected to quenching. In addition to these metal materials, the master member 12 can also be formed of a non-metallic material such as a ceramic subjected to a conductive treatment (for example, forming a conductive film on the surface). The master member 12 includes a truncated cone part 12a and a cylindrical part 12b that is formed integrally with the truncated cone part 12a and extends in the axial direction from the lower end of the truncated cone part 12a. The outer peripheral surface of the truncated cone part 12a is formed in a tapered surface shape corresponding to the inner peripheral surface shape of the bearing member 7 and having a small diameter on one side in the axial direction and a large diameter on the other side in the axial direction.

マスター部材12を構成する円錐台部12aの外周面のうち、軸方向の一部領域には、軸受部材7の電鋳部10を成形する成形部N1が形成される。成形部N1は、電鋳部10内周面の凹凸パターンが反転した形状をなし、その軸方向二箇所には、動圧溝Aa間の丘部を成形する凹部Kaの列が円周方向に形成されている。もちろん、凹部Kaの形状は動圧溝パターンに対応させ、スパイラル形状等に形成することもできる。   A molding portion N1 for molding the electroformed portion 10 of the bearing member 7 is formed in a partial region in the axial direction on the outer peripheral surface of the truncated cone portion 12a constituting the master member 12. The forming part N1 has a shape in which the concave / convex pattern on the inner peripheral surface of the electroformed part 10 is reversed, and at two places in the axial direction, there are rows of concave parts Ka for forming the hills between the dynamic pressure grooves Aa in the circumferential direction. Is formed. Of course, the shape of the recess Ka can correspond to the dynamic pressure groove pattern and can be formed in a spiral shape or the like.

図5(b)に示すマスキング工程では、成形部N1を除いてマスター部材12の外表面にマスキング13(散点模様)が施される。マスキング13用の被覆材としては、非導電性、および電解質溶液に対する耐食性を有する既存品が適宜選択使用される。   In the masking step shown in FIG. 5 (b), masking 13 (dot pattern) is applied to the outer surface of the master member 12 except for the molding portion N1. As the covering material for the masking 13, an existing product having non-conductivity and corrosion resistance against the electrolyte solution is appropriately selected and used.

電鋳加工は、NiやCu等の金属イオンを含んだ電解質溶液にマスター部材12を浸漬させた後、マスター部材12に通電して、マスター部材12の外表面のうち、マスキング13が施されていない領域(成形部N1)に目的の金属を析出(電着)させることにより行われる。電解質溶液には、カーボンなどの摺動材、あるいはサッカリン等の応力緩和材を必要に応じて含有させてもよい。電着金属の種類は、動圧軸受の軸受面に求められる硬度、疲れ強さ等の物理的性質や、化学的性質に応じて適宜選択される。   In electroforming, after the master member 12 is immersed in an electrolyte solution containing metal ions such as Ni and Cu, the master member 12 is energized, and the masking 13 is applied to the outer surface of the master member 12. This is performed by depositing (electrodepositing) the target metal in a non-existing region (molded portion N1). If necessary, the electrolyte solution may contain a sliding material such as carbon or a stress relaxation material such as saccharin. The type of electrodeposited metal is appropriately selected according to physical properties such as hardness and fatigue strength required for the bearing surface of the hydrodynamic bearing, and chemical properties.

以上の工程を経ることにより、図6に示すように、マスター部材12の成形部N1に電鋳部10が被着形成され、電鋳部10とマスター部材12が一体になった電鋳部材11が形成される。このとき、電鋳部10の内周面は、マスター部材12の円錐台部12aの外周面形状に対応するテーパ状に形成され、かつマスター部材12に形成された成形部N1の凹凸パターンが転写される。これにより図2に示すように複数の動圧溝Aaを有する二つの傾斜軸受面Aが電鋳部10の内周面に上下に離隔して形成される。なお、電鋳部10の厚みは、これが厚すぎるとマスター部材12からの剥離性が低下し、逆に薄すぎると電鋳部10の耐久性低下につながるので、求められる軸受性能や軸受サイズ、さらには用途等に応じて最適な厚みに設定される。   Through the above steps, as shown in FIG. 6, the electroformed part 10 is formed on the molded part N <b> 1 of the master member 12, and the electroformed part 10 and the master member 12 are integrated. Is formed. At this time, the inner peripheral surface of the electroformed portion 10 is formed in a taper shape corresponding to the outer peripheral surface shape of the truncated cone portion 12a of the master member 12, and the uneven pattern of the molding portion N1 formed on the master member 12 is transferred. Is done. As a result, as shown in FIG. 2, two inclined bearing surfaces A having a plurality of dynamic pressure grooves Aa are formed on the inner peripheral surface of the electroformed portion 10 so as to be separated from each other in the vertical direction. In addition, if the thickness of the electroformed part 10 is too thick, the peelability from the master member 12 is lowered, and conversely, if it is too thin, the durability of the electroformed part 10 is reduced. Furthermore, the optimum thickness is set according to the application.

次に、上記工程を経て形成された電鋳部材11は、軸受部材7をインサート成形するモールド工程に移送される。   Next, the electroformed member 11 formed through the above steps is transferred to a molding step for insert-molding the bearing member 7.

図7は、モールド工程を概念的に示すもので、このモールド工程では、電鋳部材11は、その軸方向を型締め方向(図面上下方向)と平行にして、例えば上型15、および下型16からなる金型内部に供給される。下型16には、マスター部材12を構成する円筒部12bの外径寸法に適合した位置決め穴18が形成され、この位置決め穴18に前工程から移送した電鋳部材11を挿入して電鋳部材11の位置決めがなされる。また、上型15には、位置決め穴18と同軸に、マスター部材12の上端と嵌合可能のガイド穴20が形成されている。   FIG. 7 conceptually shows the molding process. In this molding process, the electroformed member 11 has its axial direction parallel to the mold clamping direction (vertical direction in the drawing), for example, an upper mold 15 and a lower mold. 16 is supplied into the mold. The lower mold 16 is formed with a positioning hole 18 adapted to the outer diameter of the cylindrical portion 12b constituting the master member 12, and the electroformed member 11 transferred from the previous process is inserted into the positioning hole 18 to form an electroformed member. 11 positioning is performed. The upper mold 15 is formed with a guide hole 20 that can be fitted to the upper end of the master member 12 coaxially with the positioning hole 18.

以上の金型において、可動型(本実施形態では上型15)を固定型(本実施形態では下型16)に接近させると、ガイド穴20によってマスター部材12が上型15の所定位置にガイドされ、その後型締めされる。型締め完了後、ゲート19を介してキャビティ17に樹脂材料を射出し、インサート成形を行う。樹脂材料は、射出成形可能な材料であれば使用可能で、例えば、非晶性樹脂として、ポリサルフォン(PSF)、ポリエーテルサルフォン(PES)、ポリフェニルサルフォン(PPSF)、ポリエーテルイミド(PEI)等、結晶性樹脂として、液晶ポリマー(LCP)、ポリエーテルエーテルケトン(PEEK)、ポリブチレンテレフタレート(PBT)、ポリフェニレンサルファイド(PPS)等が使用可能である。樹脂材料には、必要に応じて強化材(繊維状、粉末状等の形態は問わない)や潤滑剤、導電材等の各種充填材が一種または二種以上配合される。   In the above mold, when the movable mold (the upper mold 15 in the present embodiment) is brought close to the fixed mold (the lower mold 16 in the present embodiment), the master member 12 is guided to a predetermined position of the upper mold 15 by the guide holes 20. And then clamped. After completion of the mold clamping, a resin material is injected into the cavity 17 through the gate 19 and insert molding is performed. Any resin material can be used as long as it is an injection moldable material. For example, polysulfone (PSF), polyethersulfone (PES), polyphenylsulfone (PPSF), polyetherimide (PEI) can be used as an amorphous resin. As the crystalline resin, liquid crystal polymer (LCP), polyether ether ketone (PEEK), polybutylene terephthalate (PBT), polyphenylene sulfide (PPS), and the like can be used. The resin material is mixed with one or two or more kinds of fillers such as a reinforcing material (regardless of the form of fiber, powder, etc.), a lubricant, and a conductive material as necessary.

なお、射出する材料としては金属材料も使用可能である。金属材料としては、例えば、マグネシウム合金やアルミニウム合金等の低融点金属材料が使用可能である。この場合、樹脂材料を使用する場合に比べて、強度、耐熱性、または導電性等をより向上させることができる。この他、金属粉とバインダーの混合物で射出成形した後、脱脂・焼結するいわゆるMIM成形を採用することもできる。さらにこの他、射出する材料としてセラミックを使用することもできる。   A metal material can also be used as the material to be injected. As the metal material, for example, a low melting point metal material such as a magnesium alloy or an aluminum alloy can be used. In this case, strength, heat resistance, conductivity, etc. can be further improved as compared with the case of using a resin material. In addition, so-called MIM molding may be employed in which after the injection molding with a mixture of metal powder and binder, degreasing and sintering. In addition, ceramic can also be used as the material to be injected.

インサート成形完了後、成形型を開くとマスター部材12および電鋳部10からなる電鋳部材11と、モールド部14とが一体となった成形品が得られる。   When the mold is opened after the insert molding is completed, a molded product in which the electroformed member 11 including the master member 12 and the electroformed part 10 and the mold part 14 are integrated is obtained.

この成形品は、その後分離工程に移送され、電鋳部10およびモールド部14が一体化したもの(軸受部材7)と、マスター部材12とに分離される。この分離工程では、電鋳部10に蓄積された内部応力を解放することにより、電鋳部10の内周面を拡径させ、マスター部材12の外周面から剥離させる。内部応力の解放は、例えば電鋳部材11あるいは軸受部材7に衝撃を与えることにより、あるいは電鋳部10の内周面とマスター部材12の外周面との間に軸方向の加圧力を付与することにより行われる。内部応力の解放により、電鋳部10の内周面を半径方向に拡径させて、電鋳部10の内周面とマスター部材12の外周面との間に適当な大きさの隙間(動圧溝深さ以上の隙間が望ましい)を形成すれば、電鋳部10の内周面に形成された動圧溝パターンとマスター部材12の外周面に形成された成形部N1との過度の干渉を回避して電鋳部10の内周面からマスター部材12を軸方向にスムーズに引き抜くことができ、これにより成形品を、電鋳部10およびモールド部14からなる軸受部材7と、マスター部材12とに分離することが可能となる。なお、電鋳部10の拡径量は、例えば電鋳部10の肉厚を変えることによって制御することができる。   The molded product is then transferred to a separation step, where it is separated into one in which the electroformed part 10 and the molded part 14 are integrated (bearing member 7) and the master member 12. In this separation step, the internal stress accumulated in the electroformed part 10 is released, so that the inner peripheral surface of the electroformed part 10 is expanded and peeled off from the outer peripheral surface of the master member 12. The internal stress is released, for example, by applying an impact to the electroformed member 11 or the bearing member 7 or applying an axial pressure between the inner peripheral surface of the electroformed portion 10 and the outer peripheral surface of the master member 12. Is done. By releasing the internal stress, the inner peripheral surface of the electroformed part 10 is radially expanded, and a gap (dynamic motion) of an appropriate size is formed between the inner peripheral surface of the electroformed part 10 and the outer peripheral surface of the master member 12. If a gap greater than the depth of the pressure groove is desirable), excessive interference between the dynamic pressure groove pattern formed on the inner peripheral surface of the electroformed portion 10 and the molding portion N1 formed on the outer peripheral surface of the master member 12 Thus, the master member 12 can be smoothly pulled out in the axial direction from the inner peripheral surface of the electroformed part 10, whereby the molded product is obtained as a bearing member 7 including the electroformed part 10 and the mold part 14, and the master member. 12 can be separated. The diameter expansion amount of the electroformed part 10 can be controlled, for example, by changing the thickness of the electroformed part 10.

衝撃の付与だけでは電鋳部10の内周を十分に拡径させることができない場合、電鋳部10とマスター部材12とを加熱又は冷却し、両者間に熱膨張量差を生じさせることによってマスター部材12と軸受部材7とを分離することもできる。   When the inner circumference of the electroformed part 10 cannot be sufficiently expanded only by applying an impact, the electroformed part 10 and the master member 12 are heated or cooled, and a difference in thermal expansion is generated between them. The master member 12 and the bearing member 7 can also be separated.

一方、電鋳部10と分離されたマスター部材12は、繰り返し軸受部材7の製作に使用することができる。   On the other hand, the master member 12 separated from the electroformed part 10 can be repeatedly used for manufacturing the bearing member 7.

なお、電鋳加工の特性上、電鋳部10の外周面は粗面に形成されるため、インサート成形時にはモールド部14を構成する材料が電鋳部外表面の微小な凹凸に入り込み、アンカー効果による強固な固着力が発揮される。さらに、電鋳部10は、軸方向に対して傾斜して形成されているので、少なくとも一方の軸方向へは抜け止めがなされる。従って、耐衝撃性に富む高強度の軸受部材7を提供することが可能となる。   In addition, since the outer peripheral surface of the electroformed part 10 is formed into a rough surface due to the characteristics of electroforming, the material constituting the mold part 14 enters minute irregularities on the outer surface of the electroformed part at the time of insert molding, and the anchor effect. A strong fixing force due to is exhibited. Further, since the electroformed part 10 is formed to be inclined with respect to the axial direction, it is prevented from coming off in at least one axial direction. Therefore, it is possible to provide a high-strength bearing member 7 that is rich in impact resistance.

そして、上記工程を経て形成された軸受部材7の内周に別途製作した軸部材2を挿入し、さらに軸受部材7の大径側開口部を蓋部材8で封口した上で、軸受部材7の内部空間に潤滑油を充満させることにより、図1に示す流体軸受装置1が得られる。   Then, the shaft member 2 separately manufactured is inserted into the inner periphery of the bearing member 7 formed through the above steps, and the large-diameter side opening of the bearing member 7 is sealed with the lid member 8. By filling the internal space with lubricating oil, the hydrodynamic bearing device 1 shown in FIG. 1 is obtained.

上記のとおり、本発明では、軸受部材7を傾斜軸受隙間C1に面する電鋳部10と、当該電鋳部10をインサートして射出成形されたモールド部14とで形成した。電鋳加工の特性から、電鋳部10の内周面形状はマスター部材12の表面形状に倣い、また、電鋳部10の内周面精度はマスター部材12の表面精度に倣う。そのため、マスター部材12を所定形状でかつ所定精度に形成しておけば、電鋳部10の内周面はマスター部材のそれに倣って高精度に形成されるので、従来の加工法では高精度化が困難な円錐面状の内周面を精度良くかつ低コストに形成することができる。これにより、傾斜軸受隙間C1の幅精度を高め、この種の傾斜軸受隙間を有する流体軸受装置の軸受性能を向上させることができる。また、本実施形態のように、動圧溝Aaを有する傾斜軸受面Aを電鋳加工で形成すれば、電鋳加工の特性から動圧溝が高精度に形成可能となるので、この面でも流体軸受装置の軸受性能向上を図ることができる。   As described above, in the present invention, the bearing member 7 is formed by the electroformed portion 10 facing the inclined bearing gap C1 and the mold portion 14 that is injection-molded by inserting the electroformed portion 10. From the characteristics of electroforming, the inner peripheral surface shape of the electroformed portion 10 follows the surface shape of the master member 12, and the inner peripheral surface accuracy of the electroformed portion 10 follows the surface accuracy of the master member 12. Therefore, if the master member 12 is formed in a predetermined shape and with a predetermined accuracy, the inner peripheral surface of the electroformed part 10 is formed with a high accuracy following that of the master member. It is possible to form a conical inner peripheral surface that is difficult to achieve with high accuracy and low cost. Thereby, the width | variety precision of the inclination bearing clearance C1 can be improved, and the bearing performance of the hydrodynamic bearing apparatus which has this kind of inclination bearing clearance can be improved. In addition, if the inclined bearing surface A having the dynamic pressure groove Aa is formed by electroforming as in the present embodiment, the dynamic pressure groove can be formed with high accuracy due to the characteristics of electroforming. The bearing performance of the hydrodynamic bearing device can be improved.

電鋳部10の内周面に動圧溝Aaを形成する方法として、他の方法を採用することもできる。図8は、その一例を示すもので、マスター部材12表面の成形部N1に動圧溝Aa形状に対応した凸状の導電性被膜22を形成して電鋳加工を行い、その後、導電性被膜22を除去して動圧溝Aaを形成するものである。具体的には、まず図8(a)に示すように、マスター部材12の外周面の一部領域に成形部N1を形成し、この成形部N1に動圧溝パターンに対応した凸状の導電性被膜22を形成する。この導電性被膜22は、例えば、マスター部材12の表面に導電性樹脂をインクジェット印刷することにより高精度に形成することができる。次いで、同図(b)に示すように、このマスター部材12を用いて電鋳加工を行い、成形部N1の形状を転写した電鋳部10を形成する。電鋳加工の終了後、上記工程と同様にモールド部14を射出成形し、さらに同図(c)に示すように成形品からマスター部材12を分離する。この際、導電性被膜22は、電鋳部10と共にマスター部材12の表面から剥離させる。その後、同図(d)に示すように、溶剤等を用いて電鋳部10の内周面の導電性被膜22を除去することにより、電鋳部10の内周面に動圧溝Aaを形成した軸受部材7が得られる。   As a method for forming the dynamic pressure groove Aa on the inner peripheral surface of the electroformed part 10, another method can be adopted. FIG. 8 shows an example, and a convex conductive film 22 corresponding to the shape of the dynamic pressure groove Aa is formed on the molding portion N1 on the surface of the master member 12 to perform electroforming, and then the conductive film 22 is formed to form the dynamic pressure groove Aa. Specifically, first, as shown in FIG. 8 (a), a molded part N1 is formed in a partial region of the outer peripheral surface of the master member 12, and the convex conductive material corresponding to the dynamic pressure groove pattern is formed in the molded part N1. The conductive film 22 is formed. For example, the conductive coating 22 can be formed with high accuracy by ink-jet printing a conductive resin on the surface of the master member 12. Next, as shown in FIG. 4B, electroforming is performed using the master member 12 to form the electroformed part 10 to which the shape of the molded part N1 is transferred. After the completion of the electroforming, the mold part 14 is injection-molded in the same manner as the above process, and the master member 12 is separated from the molded product as shown in FIG. At this time, the conductive coating 22 is peeled off from the surface of the master member 12 together with the electroformed part 10. Thereafter, as shown in FIG. 4D, the dynamic pressure groove Aa is formed on the inner peripheral surface of the electroformed portion 10 by removing the conductive coating 22 on the inner peripheral surface of the electroformed portion 10 using a solvent or the like. The formed bearing member 7 is obtained.

以上の説明では、電鋳部10の内周面に動圧溝Aaを有する傾斜軸受面Aを形成する場合を例示したが、動圧溝Aaを有する傾斜軸受面Aは軸部材2の外周面に形成することもできる。この形態の流体軸受装置1は、外周面を凹凸のない平滑面としたマスター部材12を用いて電鋳工程を行い、さらにモールド工程および分離工程を経て、内周面が平滑な軸受部材7を形成すると共に、これとは別に軸部材2の外周面に動圧溝Aaを有する傾斜軸受面Aを形成し、この軸部材2を軸受部材7の内周に挿入することにより組み立てることができる。この場合、軸部材2の外周面の傾斜軸受面Aは、例えば鍛造や転造等の塑性加工の他、エッチング加工、あるいはインクジェット印刷等の手段で形成することができる。   In the above description, the case where the inclined bearing surface A having the dynamic pressure groove Aa is formed on the inner peripheral surface of the electroformed part 10 is illustrated. However, the inclined bearing surface A having the dynamic pressure groove Aa is the outer peripheral surface of the shaft member 2. It can also be formed. The hydrodynamic bearing device 1 of this embodiment performs an electroforming process using the master member 12 whose outer peripheral surface is a smooth surface having no irregularities, and further passes through a molding step and a separation step to obtain a bearing member 7 having a smooth inner peripheral surface. Apart from this, the inclined bearing surface A having the dynamic pressure groove Aa is formed on the outer peripheral surface of the shaft member 2, and the shaft member 2 can be assembled by inserting it into the inner periphery of the bearing member 7. In this case, the inclined bearing surface A on the outer peripheral surface of the shaft member 2 can be formed by means such as etching processing or ink jet printing in addition to plastic processing such as forging and rolling.

また、以上の説明では、上方が小径で下方が大径の傾斜軸受隙間C1を例示しているが、傾斜軸受隙間の傾斜方向をこれとは逆方向、すなわち上方が大径で下方が小径となるよう傾斜させることもできる。   In the above description, the inclined bearing gap C1 having a small diameter on the upper side and a large diameter on the lower side is illustrated. However, the inclination direction of the inclined bearing gap is the opposite direction, that is, the upper diameter is larger and the lower is smaller diameter. It can also be inclined.

図9(a)(b)は、本発明の他の実施形態を示すもので、図1に示す流体軸受装置1を軸方向に二つ並べて設置した構成に相当するものである。   FIGS. 9A and 9B show another embodiment of the present invention, which corresponds to a configuration in which two hydrodynamic bearing devices 1 shown in FIG. 1 are installed side by side in the axial direction.

何れの流体軸受装置1でも、軸部材2は二つの円錐部2a、2aを一体化した形態をなし、かつ軸受部材7は、各円錐部2aの外周面に対向する二つの電鋳部10a、10bと電鋳部10a、10bを一体にモールドするモールド部14とを備えている。軸部材2の回転時には、二つの円錐部2aの外周面と、これに対向する電鋳部10a、10bの内周面との間に傾斜方向を逆にした二種類の傾斜軸受隙間C11、C12が形成され、この傾斜軸受隙間C11、C12に生じる潤滑油の動圧作用で軸部材2がラジアル方向および両スラスト方向で非接触支持される。図9(a)は、二種類の傾斜軸受隙間C11、C12の双方を、傾斜方向の異なる相手側の傾斜軸受隙間との接近側ほど小径となるよう配置した例であり、同図(b)は、これとは逆に相手側の傾斜軸受隙間との接近側ほど大径となるよう配置した例である。   In any hydrodynamic bearing device 1, the shaft member 2 is formed by integrating two conical portions 2a and 2a, and the bearing member 7 includes two electroformed portions 10a opposed to the outer peripheral surface of each conical portion 2a, 10b and a mold part 14 for integrally molding the electroformed parts 10a and 10b. At the time of rotation of the shaft member 2, two types of inclined bearing gaps C11 and C12 having the inclined directions reversed between the outer peripheral surfaces of the two conical portions 2a and the inner peripheral surfaces of the electroformed portions 10a and 10b opposed thereto. The shaft member 2 is supported in a non-contact manner in the radial direction and in both thrust directions by the dynamic pressure action of the lubricating oil generated in the inclined bearing gaps C11 and C12. FIG. 9 (a) is an example in which both of the two types of inclined bearing gaps C11 and C12 are arranged so that the diameter is closer to the side closer to the opposite inclined bearing gap in the inclination direction. In contrast to this, the example is arranged such that the closer to the counterpart inclined bearing gap, the larger the diameter.

なお、何れの流体軸受装置1でも、上下の円錐部2aの外周面と軸受部材7の上下端部の内周面との間にシール空間が形成され、潤滑油の漏れが防止される(軸受部材7とは別体のシール部材でシール空間を形成してもよい)。この場合、蓋部材8は不要となる。また、何れの流体軸受装置1でも、傾斜軸受隙間C11、C12で両方向のスラスト支持力が生じるので、これ以外のスラスト軸受隙間(例えば図1に示す実施形態において、蓋部材8の上側端面8aとこれに対向する軸部材2の下側端面2a2との間に形成したスラスト軸受隙間C1)は不要となる。   In any hydrodynamic bearing device 1, a seal space is formed between the outer peripheral surfaces of the upper and lower conical portions 2a and the inner peripheral surfaces of the upper and lower end portions of the bearing member 7 to prevent leakage of lubricating oil (bearing). The seal space may be formed by a separate seal member from the member 7). In this case, the lid member 8 is not necessary. Further, in any hydrodynamic bearing device 1, since thrust support force in both directions is generated in the inclined bearing gaps C11 and C12, other thrust bearing gaps (for example, in the embodiment shown in FIG. 1, in the embodiment shown in FIG. The thrust bearing gap C1) formed between the lower end surface 2a2 of the shaft member 2 facing this is not necessary.

図9(a)(b)に示す何れの構成においても、図8に準じた方法により、すなわちマスター部材12の外周面に導電性被膜22で成形部N1を形成した後、電鋳加工工程、モールド工程、および分離工程を経ることにより、電鋳部10a、10bの内周面に動圧溝Aaを形成することができる。この場合、マスター部材12と電鋳部10a、10bの分離後は、マスター部材12がそのまま軸部材2として使用される。   9 (a) and 9 (b), in the method according to FIG. 8, that is, after forming the molded part N1 with the conductive coating 22 on the outer peripheral surface of the master member 12, an electroforming process step, By passing through the molding step and the separation step, the dynamic pressure groove Aa can be formed on the inner peripheral surfaces of the electroformed portions 10a and 10b. In this case, the master member 12 is used as it is as the shaft member 2 after separation of the master member 12 and the electroformed portions 10a and 10b.

この他、軸受部材7および軸部材2をそれぞれ軸方向中央部で二分割して、分割体をそれぞれ個別に製作した後、分割体同士を接合一体化することにより図9(a)(b)に示す流体軸受装置1を組み立てることもできる。軸部材2の分割体同士の接合方法としては例えば接着が考えられ、軸受部材7の分割体同士の接合方法としては接着の他、溶着(超音波溶着等)も考えられる。   In addition, the bearing member 7 and the shaft member 2 are each divided into two at the axially central portion, and the divided bodies are individually manufactured, and then the divided bodies are joined and integrated to each other as shown in FIGS. The hydrodynamic bearing device 1 shown in FIG. As a method for joining the divided members of the shaft member 2, for example, adhesion is conceivable. As a method for joining the divided members of the bearing member 7, in addition to adhesion, welding (ultrasonic welding or the like) is also conceivable.

図10は、図9(a)に示す構成において、二つの傾斜軸受隙間C11、C12で生じるポンピング量のアンバランスを解消するため、軸部材2の外周面と軸受部材7の内周面との間の環状隙間のうち、特に軸方向中央部の屈曲部分を、循環路23を介して軸受部材7の外部と連通させたものである。図示は省略するが、図9(b)に示す構成においても同様に循環路23を形成することができる。   FIG. 10 shows the configuration shown in FIG. 9 (a), in order to eliminate the pumping amount imbalance that occurs in the two inclined bearing gaps C11 and C12, between the outer peripheral surface of the shaft member 2 and the inner peripheral surface of the bearing member 7. Among the annular gaps between them, the bent portion in the central portion in the axial direction is communicated with the outside of the bearing member 7 through the circulation path 23. Although illustration is omitted, the circulation path 23 can be similarly formed in the configuration shown in FIG.

以上の説明では、傾斜軸受部K1、K2およびスラスト軸受部Tとして、へリングボーン形状やスパイラル形状の動圧溝により流体動圧を発生させる構成を例示しているが、本発明はこれに限定されるものではない。   In the above description, as the inclined bearing portions K1 and K2 and the thrust bearing portion T, a configuration in which fluid dynamic pressure is generated by a dynamic pressure groove having a herringbone shape or a spiral shape is illustrated, but the present invention is not limited thereto. Is not to be done.

例えば、傾斜軸受部K1、K2として、いわゆる多円弧軸受やステップ軸受、あるいは非真円軸受を採用しても良い。これらの軸受ではそれぞれ、複数の円弧面、軸方向溝、調和波形面が傾斜軸受隙間に動圧を発生させるための動圧発生部となる。これらの動圧発生部は、上記の実施形態同様、軸受部材7の電鋳部に形成されるが、その形成方法は、動圧溝を形成する場合の各工程に準じるので説明を省略する。   For example, so-called multi-arc bearings, step bearings, or non-circular bearings may be employed as the inclined bearing portions K1, K2. In each of these bearings, a plurality of circular arc surfaces, axial grooves, and harmonic waveform surfaces serve as dynamic pressure generating portions for generating dynamic pressure in the inclined bearing gap. These dynamic pressure generating portions are formed in the electroformed portion of the bearing member 7 as in the above-described embodiment. However, the method for forming the dynamic pressure generating portions is the same as that in the case of forming the dynamic pressure grooves, and a description thereof will be omitted.

図11は、傾斜軸受部K1、K2の一方又は双方を多円弧軸受で構成した場合の一例を示している。この例では、軸受部材7の内周面の傾斜軸受面となる領域が、3つの円弧面43で構成されている(いわゆる3円弧軸受)。3つの円弧面43の曲率中心は、それぞれ、軸受部材7(軸部材2)の軸中心Oから等距離オフセットされている。3つの円弧面43で区画される各領域において、傾斜軸受隙間は、円周方向の両方向に対して、それぞれ楔状に漸次縮小したくさび状隙間45である。そのため、軸受部材7と軸部材2とが相対回転すると、その相対回転の方向に応じて、傾斜軸受隙間内の潤滑油がくさび状隙間45の最小隙間側に押し込まれて、その圧力が上昇する。このような潤滑油の動圧作用によって、軸受部材7と軸部材2とが非接触支持される。なお、負圧の発生防止のため、3つの円弧面43相互間の境界部に、分離溝と称される、一段深い軸方向溝を形成しても良い。   FIG. 11 shows an example in which one or both of the inclined bearing portions K1 and K2 are constituted by multi-arc bearings. In this example, the area | region used as the inclined bearing surface of the internal peripheral surface of the bearing member 7 is comprised by the three circular arc surfaces 43 (what is called a 3-arc bearing). The centers of curvature of the three arcuate surfaces 43 are offset by an equal distance from the shaft center O of the bearing member 7 (shaft member 2). In each region defined by the three arcuate surfaces 43, the inclined bearing gap is a wedge-shaped gap 45 that gradually decreases in a wedge shape in both circumferential directions. Therefore, when the bearing member 7 and the shaft member 2 rotate relative to each other, the lubricating oil in the inclined bearing gap is pushed into the minimum gap side of the wedge-shaped gap 45 according to the direction of the relative rotation, and the pressure rises. . The bearing member 7 and the shaft member 2 are supported in a non-contact manner by the dynamic pressure action of the lubricating oil. In order to prevent the occurrence of negative pressure, a deeper axial groove called a separation groove may be formed at the boundary between the three arc surfaces 43.

図12は、傾斜軸受部K1、K2の一方又は双方を多円弧軸受で構成した場合の他の例を示している。この例においても、軸受部材7の内周面の傾斜軸受面Aとなる領域が、3つの円弧面43で構成されているが(いわゆる3円弧軸受)、3つの円弧面43で区画される各領域において、傾斜軸受隙間は、円周方向の一方向に対して、それぞれ楔状に漸次縮小したくさび状隙間45である。このような構成の多円弧軸受は、テーパ軸受と称されることもある。また、3つの円弧面43相互間の境界部に、分離溝44が形成されている。そのため、軸受部材7と軸部材2とが所定方向に相対回転すると、傾斜軸受隙間内の潤滑油がくさび状隙間45の最小隙間側に押し込まれて、その圧力が上昇する。このような潤滑油の動圧作用によって、軸受部材7と軸部材2とが非接触支持される。   FIG. 12 shows another example in which one or both of the inclined bearing portions K1 and K2 are constituted by multi-arc bearings. Also in this example, although the area | region used as the inclined bearing surface A of the internal peripheral surface of the bearing member 7 is comprised by the three circular arc surfaces 43 (what is called three circular arc bearings), each divided by the three circular arc surfaces 43 In the region, the inclined bearing gap is a wedge-shaped gap 45 that gradually decreases in a wedge shape with respect to one direction in the circumferential direction. The multi-arc bearing having such a configuration may be referred to as a taper bearing. A separation groove 44 is formed at the boundary between the three arcuate surfaces 43. Therefore, when the bearing member 7 and the shaft member 2 are relatively rotated in a predetermined direction, the lubricating oil in the inclined bearing gap is pushed into the minimum gap side of the wedge-shaped gap 45 and the pressure rises. The bearing member 7 and the shaft member 2 are supported in a non-contact manner by the dynamic pressure action of the lubricating oil.

図13は、傾斜軸受部K1、K2の一方又は双方を多円弧軸受で構成した場合の他の例を示している。この例では、図12に示す構成において、3つの円弧面43の最小隙間側の所定領域θが、それぞれ、軸受部材7(軸部材2)の軸中心Oを曲率中心とする同心の円弧で構成されている。従って、各所定領域θにおいて、ラジアル軸受隙間(最小隙間)は一定になる。このような構成の多円弧軸受は、テーパ・フラット軸受と称されることもある。   FIG. 13 shows another example in which one or both of the inclined bearing portions K1 and K2 are constituted by multi-arc bearings. In this example, in the configuration shown in FIG. 12, the predetermined regions θ on the minimum gap side of the three circular arc surfaces 43 are each configured by concentric arcs with the axis center O of the bearing member 7 (the shaft member 2) as the center of curvature. Has been. Therefore, in each predetermined area θ, the radial bearing gap (minimum gap) is constant. The multi-arc bearing having such a configuration may be referred to as a tapered flat bearing.

図14は、傾斜軸受部K1、K2の一方又は双方をステップ軸受で構成した場合の一例を示している。この例では、軸受部材7の内周面の傾斜軸受面となる領域に、複数の軸方向溝形状の動圧溝46が円周方向所定間隔に設けられている。   FIG. 14 shows an example in which one or both of the inclined bearing portions K1 and K2 are configured by step bearings. In this example, a plurality of axial groove-shaped dynamic pressure grooves 46 are provided at predetermined intervals in the circumferential direction in a region that becomes an inclined bearing surface on the inner peripheral surface of the bearing member 7.

図15は、傾斜軸受部K1、K2の一方又は双方を非真円軸受で構成した場合の一例を示している。この例では、軸受部材7の傾斜軸受面となる領域が、3つの調和波形面47で構成されている。3つの調和波形面47で区画される各領域において、傾斜軸受隙間は、円周方向の両方向に対して、それぞれくさび状に漸次縮小したくさび状隙間48となる。そのため、軸部材2と軸受部材7とが相対回転すると、その相対回転の方向に応じて、傾斜軸受隙間内の潤滑油がくさび状隙間48の最小隙間側に押し込まれて、その圧力が上昇する。このような潤滑油の動圧作用によって、軸部材2と軸受部材7とが非接触支持される。なお、くさび状隙間48の最小幅hは、偏心がない場合(軸中心O)には次式によって近似的に表される。   FIG. 15 shows an example in which one or both of the inclined bearing portions K1 and K2 are configured by non-round bearings. In this example, the region serving as the inclined bearing surface of the bearing member 7 is composed of three harmonic waveform surfaces 47. In each region defined by the three harmonic wave surfaces 47, the inclined bearing gap becomes a wedge-shaped gap 48 that gradually decreases in a wedge shape in both circumferential directions. Therefore, when the shaft member 2 and the bearing member 7 rotate relative to each other, the lubricating oil in the inclined bearing gap is pushed into the minimum gap side of the wedge-shaped gap 48 according to the direction of the relative rotation, and the pressure rises. . The shaft member 2 and the bearing member 7 are supported in a non-contact manner by the dynamic pressure action of the lubricating oil. The minimum width h of the wedge-shaped gap 48 is approximately expressed by the following equation when there is no eccentricity (axial center O).

h=c+aw・cos(Nw・θ)
但し、上式において、c、aw、Nwは定数で、cは平均軸受半径隙間、awは波の振幅、θは円周方向の位相、Nwは波数を表す(但し、Nw≧2とする。本実施形態ではNw=3である)。なお、図示例では、軸部材2と軸受部材7の軸中心Oを同心としているが、軸部材2を軸中心O’に偏心させて使用することもできる。
h = c + aw · cos (Nw · θ)
In the above equation, c, aw, and Nw are constants, c is an average bearing radius gap, aw is the amplitude of the wave, θ is the phase in the circumferential direction, and Nw is the wave number (where Nw ≧ 2). In this embodiment, Nw = 3). In the illustrated example, the shaft center O of the shaft member 2 and the bearing member 7 is concentric. However, the shaft member 2 can be used by being eccentric to the shaft center O ′.

以上で説明した図11〜図13に示す多円弧軸受は、いわゆる3円弧軸受であるが、これに限らず、いわゆる4円弧軸受、5円弧軸受、さらに6円弧以上の数の円弧面で構成された多円弧軸受を採用しても良い。また、図15に示した非真円軸受は、3つの調和波形面で形成されているが、多円弧軸受同様に、4以上の調和波形面で構成された非真円軸受を採用することもできる。また、図1に示す実施形態において、傾斜軸受部を多円弧軸受やステップ軸受、あるいは非真円軸受で構成する場合、傾斜軸受部K1、K2のように2つの傾斜軸受部を軸方向に離隔して設けた構成とする他、軸受部材7の内周面、あるいは軸部材2の外周面の上下領域に亘って1つの傾斜軸受部を設けた構成としても良い。   The multi-arc bearings shown in FIGS. 11 to 13 described above are so-called three-arc bearings, but are not limited to this, and are constituted by so-called four-arc bearings, five-arc bearings, and more than six arc surfaces. A multi-arc bearing may also be employed. Further, the non-circular bearing shown in FIG. 15 is formed by three harmonic wave surfaces, but a non-circular bearing having four or more harmonic wave surfaces may be adopted as in the multi-arc bearing. it can. In the embodiment shown in FIG. 1, when the inclined bearing portion is constituted by a multi-arc bearing, a step bearing, or a non-circular bearing, the two inclined bearing portions are separated in the axial direction as in the inclined bearing portions K1 and K2. In addition to the above-described configuration, one inclined bearing portion may be provided across the upper and lower regions of the inner peripheral surface of the bearing member 7 or the outer peripheral surface of the shaft member 2.

さらに、スラスト軸受部Tの形態として、スパイラル形状の動圧溝により潤滑油に動圧を発生させる構成を例示したが、スラスト軸受面となる領域に、複数の半径方向溝形状の動圧溝を円周方向所定間隔に設けた、いわゆるステップ軸受、いわゆる波型軸受(ステップ型が波型になったもの)等で構成することもできる(図示省略)。   Furthermore, as an example of the configuration of the thrust bearing portion T, the configuration in which the dynamic pressure is generated in the lubricating oil by the spiral-shaped dynamic pressure groove is illustrated. A so-called step bearing provided at a predetermined interval in the circumferential direction, a so-called corrugated bearing (the corrugated step type), etc. (not shown) can also be used.

また、以上の説明では、傾斜軸受部K1、K2を動圧軸受で構成した場合を例示したが、これ以外の軸受で構成することもできる。例えば、図示は省略するが、軸受部材7(電鋳部10)の内周面を動圧溝や円弧面等を有さない真円状内周面に形成すると共に、この内周面と傾斜軸受隙間を介して対向する軸部材2の外周面2a1を真円状外周面とすることで、いわゆる真円軸受を構成することもできる。   Moreover, although the case where the inclined bearing portions K1 and K2 are configured by dynamic pressure bearings was illustrated in the above description, the tilted bearing portions K1 and K2 may be configured by other bearings. For example, although not shown, the inner peripheral surface of the bearing member 7 (electroformed part 10) is formed into a perfect circular inner peripheral surface that does not have a dynamic pressure groove or an arc surface, and is inclined with respect to the inner peripheral surface. By setting the outer peripheral surface 2a1 of the shaft member 2 opposed through the bearing gap as a perfect circular outer peripheral surface, a so-called perfect circular bearing can be configured.

本発明の構成を有する流体軸受装置を組込んだ情報機器用スピンドルモータの一例を示す断面図である。It is sectional drawing which shows an example of the spindle motor for information devices incorporating the hydrodynamic bearing apparatus which has a structure of this invention. 図1にかかる流体軸受装置の要部拡大断面図である。It is a principal part expanded sectional view of the hydrodynamic bearing apparatus concerning FIG. 蓋部材の上側端面を示す断面図である。It is sectional drawing which shows the upper end surface of a cover member. 傾斜軸受隙間における動圧作用を説明する概略図である。It is the schematic explaining the dynamic pressure action in an inclination bearing clearance gap. (a)図はマスター部材の斜視図、(b)図はマスター部材にマスキングを施した状態を示す斜視図である。(A) A figure is a perspective view of a master member, (b) A figure is a perspective view which shows the state which masked the master member. 電鋳部材の斜視図である。It is a perspective view of an electroformed member. 射出成形金型に電鋳部材を取り付けた状態を示す模式図である。It is a schematic diagram which shows the state which attached the electroformed member to the injection mold. 動圧溝を他の方法で成形する場合の工程を示す断面図である。It is sectional drawing which shows the process in the case of shape | molding a dynamic pressure groove with another method. (a)図は本発明の構成を有する流体軸受装置の第2実施形態を示す断面図、(b)図は本発明の構成を有する流体軸受装置の第3実施形態を示す断面図である。(A) The figure is sectional drawing which shows 2nd Embodiment of the hydrodynamic bearing apparatus which has a structure of this invention, (b) Drawing is sectional drawing which shows 3rd Embodiment of the hydrodynamic bearing apparatus which has the structure of this invention. 上記実施形態において循環路を形成した流体軸受装置を示す断面図である。It is sectional drawing which shows the hydrodynamic bearing apparatus which formed the circulation path in the said embodiment. 傾斜軸受部の他の形態を示す断面図である。It is sectional drawing which shows the other form of an inclination bearing part. 傾斜軸受部の他の形態を示す断面図である。It is sectional drawing which shows the other form of an inclination bearing part. 傾斜軸受部の他の形態を示す断面図である。It is sectional drawing which shows the other form of an inclination bearing part. 傾斜軸受部の他の形態を示す断面図である。It is sectional drawing which shows the other form of an inclination bearing part. 傾斜軸受部の他の形態を示す断面図である。It is sectional drawing which shows the other form of an inclination bearing part. 従来の流体軸受装置の構造を示す概略図である。It is the schematic which shows the structure of the conventional hydrodynamic bearing apparatus.

符号の説明Explanation of symbols

1 流体軸受装置
2 軸部材
4 ステータコイル
5 ロータマグネット
6 ブラケット
7 軸受部材
8 蓋部材
9 ディスクハブ
10 電鋳部
11 電鋳部材
12 マスター部材
13 マスキング
14 モールド部
A 傾斜軸受面
B スラスト軸受面
C1 傾斜軸受隙間
C2 スラスト軸受隙間
Fr (ラジアル方向の)分力
Ft (スラスト方向の)分力
N1 成形部
K1、K2 傾斜軸受部
T スラスト軸受部
DESCRIPTION OF SYMBOLS 1 Fluid dynamic bearing apparatus 2 Shaft member 4 Stator coil 5 Rotor magnet 6 Bracket 7 Bearing member 8 Cover member 9 Disc hub 10 Electroformed part 11 Electroformed member 12 Master member 13 Masking 14 Mold part A Inclined bearing surface B Thrust bearing surface C1 Inclined Bearing clearance C2 Thrust bearing clearance Fr (Radial direction) component force Ft (Thrust direction) component force N1 Molding part K1, K2 Inclined bearing part T Thrust bearing part

Claims (3)

軸部材と、軸部材を内周に挿入した軸受部材と、軸部材の外周面と軸受部材の内周面との間に形成され、軸方向に傾斜した傾斜軸受隙間とを備え、傾斜軸受隙間に形成した油膜で軸部材を回転自在に支持する流体軸受装置において、
軸受部材が、傾斜軸受隙間に面する電鋳部を備え、かつ電鋳部をインサートした射出成形品であることを特徴とする流体軸受装置。
An inclined bearing gap comprising: a shaft member; a bearing member in which the shaft member is inserted into the inner periphery; and an inclined bearing gap formed between the outer peripheral surface of the shaft member and the inner peripheral surface of the bearing member and inclined in the axial direction. In the hydrodynamic bearing device that rotatably supports the shaft member with the oil film formed in
A hydrodynamic bearing device, wherein the bearing member is an injection-molded product having an electroformed part facing an inclined bearing gap and having the electroformed part inserted therein.
軸部材の外周面、または軸受部材の電鋳部のうち何れか一方に、傾斜軸受隙間と対向させて動圧発生部を形成した請求項1記載の流体軸受装置。   The hydrodynamic bearing device according to claim 1, wherein a dynamic pressure generating portion is formed on either the outer peripheral surface of the shaft member or the electroformed portion of the bearing member so as to face the inclined bearing gap. 請求項1又は2の何れかに記載された流体軸受装置と、ステータコイルと、ロータマグネットとを有するモータ。   A motor comprising the hydrodynamic bearing device according to claim 1, a stator coil, and a rotor magnet.
JP2005186538A 2005-06-27 2005-06-27 Hydrodynamic bearing device and motor having the same Expired - Fee Related JP4794922B2 (en)

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CN2006800008524A CN101018955B (en) 2005-06-27 2006-06-21 Fluid bearing device and motor having the same
US11/660,739 US7687951B2 (en) 2005-06-27 2006-06-21 Fluid dynamic bearing device and motor equipped with the same
KR1020077029222A KR20080022107A (en) 2005-06-27 2006-06-21 Fluid bearing device and motor having the same
PCT/JP2006/312430 WO2007000925A1 (en) 2005-06-27 2006-06-21 Fluid bearing device and motor having the same

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CN108150283A (en) * 2016-12-05 2018-06-12 于强 A kind of oil storage type Archimedian screw end face thrust sliding panel
WO2019176586A1 (en) * 2018-03-16 2019-09-19 株式会社シンク・ラボラトリー Current collecting member for cylinder body plating apparatus and plating apparatus

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JP2002276649A (en) * 2001-03-15 2002-09-25 Ntn Corp Dynamic pressure type bearing unit
JP2003056552A (en) * 2001-08-09 2003-02-26 Akutowan:Kk Resin-made bearing part and method for manufacturing the same

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DE102008003952A1 (en) 2007-01-11 2008-07-17 Fuji Electric Device Technology Co. Ltd. Microminiature inverter
US8469596B2 (en) 2007-10-10 2013-06-25 Ntn Corporation Electroformed bearing and method of manufacturing same
JP2009149943A (en) * 2007-12-20 2009-07-09 Ntn Corp Bearing member and method of manufacturing the same

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