JP2007001716A - Device for and method of storing workpiece - Google Patents

Device for and method of storing workpiece Download PDF

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Publication number
JP2007001716A
JP2007001716A JP2005183446A JP2005183446A JP2007001716A JP 2007001716 A JP2007001716 A JP 2007001716A JP 2005183446 A JP2005183446 A JP 2005183446A JP 2005183446 A JP2005183446 A JP 2005183446A JP 2007001716 A JP2007001716 A JP 2007001716A
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Prior art keywords
substrate
side buffer
carry
loading
workpieces
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JP2005183446A
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JP4941627B2 (en
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Yasuyoshi Kitazawa
保良 北澤
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Shinko Electric Co Ltd
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Shinko Electric Co Ltd
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Priority to JP2005183446A priority Critical patent/JP4941627B2/en
Priority to US11/368,622 priority patent/US20070007708A1/en
Priority to PCT/JP2006/312341 priority patent/WO2006137407A1/en
Priority to KR1020077027104A priority patent/KR100934809B1/en
Priority to CNA2006800181072A priority patent/CN101180229A/en
Priority to TW095122286A priority patent/TW200738538A/en
Publication of JP2007001716A publication Critical patent/JP2007001716A/en
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Publication of JP4941627B2 publication Critical patent/JP4941627B2/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Abstract

<P>PROBLEM TO BE SOLVED: To treat a plurality of workpieces efficiently and reduce the stagnation time of the workpieces stored before. <P>SOLUTION: A base board storing device 1 to store base boards W as workpieces has a first base board cassette 10 to store the boards W from above in the sequence as carried in, a carry-out conveyor 3 to carry out the base boards stored in the first base board cassette 10 from below one by one, and a second base board cassette 20 to store the boards W transported by the carry-out conveyor 3 from above one by one. Since the arrangement order of the boards W are reversed when they are transferred from the first base board cassette 10 onto the second 20, carrying-out is conducted first from the board W carried in earlier in such a case the boards W are carried out from the second base board cassette 20. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、複数のワークを順番に収納し、払い出すワーク収納装置、ワーク収納方法に関する。   The present invention relates to a workpiece storage device and a workpiece storage method that sequentially store and dispense a plurality of workpieces.

複数のワークを順番に収納し、搬出する装置としては、例えば、FPD(Flat Panel Display)用の基板を収納する基板収納装置が知られている(例えば、特許文献1参照)。この種の装置では、基板を収納するスロットを上下に配設したカセットと、カセットを昇降させるカセット昇降装置と、カセット内に下方から進入して基板を搬送するローラとを有している。ローラを下側からカセット内に進入させ、基板を搬入したら、基板を上昇させて新しいスロットに基板を搬入する。さらに、複数のカセット同士を移載可能に配置したり(例えば、特許文献2参照)、カセットをローラのある場所に設置する際の処理を容易にするために、カセットの搬送水準よりも低い位置に基板を搬送する水準を設定したりしたものがある(例えば、特許文献2参照)。
特開平11−79388号公報 特開2004−155569号公報 特開2002−167038号公報
As a device for sequentially storing and carrying out a plurality of workpieces, for example, a substrate storage device for storing a substrate for an FPD (Flat Panel Display) is known (see, for example, Patent Document 1). This type of apparatus has a cassette in which slots for storing substrates are arranged up and down, a cassette lifting device for raising and lowering the cassette, and a roller that enters the cassette from below and conveys the substrate. When the roller enters the cassette from the lower side and the substrate is loaded, the substrate is raised and loaded into a new slot. Furthermore, in order to arrange a plurality of cassettes so that they can be transferred (for example, refer to Patent Document 2) or to facilitate the processing when the cassettes are installed in a place where there is a roller, the position is lower than the conveyance level of the cassettes. In other cases, a level for conveying a substrate is set (for example, see Patent Document 2).
Japanese Patent Laid-Open No. 11-79388 JP 2004155555 A JP 2002-167038 A

ところで、この種の装置では、基板などのワークは、カセットの昇降によって搬入された順場に上下に並んで収納されるので、ワークをカセットから搬出する場合には、最後に搬入したワークから搬出することになる。このような場合には、先に搬入したワークの滞留時間が長くなり、ワークの種類や周囲の環境によっては、汚染や劣化が進んで品質をばらつかせることがある。これに対して、ワークを任意の位置から取り出せるロボットを設けると、ロボットのアームを挿入するためのスペースが必要になるので、1つのカセットに収納できるワークの数が減ってしまい、収納効率が低下する。特に、ワークが、大型ディスプレイ用の基板の場合には、基板が撓み易いので、スロットの間隔を大きくしなければならず、さらに収納効率が低下する。
この発明は、このような事情に鑑みてなされたものであり、複数のワークを効率良く処理し、先に収納されたワークの滞留時間を低減させることを主な目的とする。
By the way, in this type of apparatus, since workpieces such as substrates are stored side-by-side in the normal place loaded by raising and lowering the cassette, when the workpiece is unloaded from the cassette, it is unloaded from the last loaded workpiece. Will do. In such a case, the residence time of the work carried in first becomes long, and depending on the type of work and the surrounding environment, contamination and deterioration may progress and the quality may vary. On the other hand, if a robot that can take out a workpiece from an arbitrary position is provided, a space for inserting the robot arm is required, so the number of workpieces that can be stored in one cassette is reduced and storage efficiency is reduced. To do. In particular, when the workpiece is a substrate for a large display, the substrate is easily bent, so that the slot interval must be increased, and the storage efficiency is further reduced.
The present invention has been made in view of such circumstances, and has as its main object to efficiently process a plurality of workpieces and reduce the residence time of the workpieces previously stored.

上記の課題を解決する本発明の請求項1に係る発明は、搬入端に搬入されたワークを収納し、搬出端から搬出するワーク収納装置であって、搬入端に設けられて複数のワークを搬入された順に配列して収納する搬入側バッファと、前記搬入側バッファに収納した複数の前記ワークを一つずつ前記搬入側バッファから搬出する搬送部と、搬出端に設けられて前記搬送部によって前記搬入側バッファから搬出された前記ワークを受け入れ可能で、受け入れ順に前記ワークを配列して収納する搬出側バッファと、前記搬送部が前記ワークを搬出する度に前記ワークの配列が逆転するように前記搬入側バッファ及び前記搬出側バッファを移動させる制御装置と、を有することを特徴とするワーク収納装置とした。
このワーク収納装置では、複数のワークが搬入端の搬入側バッファに順番に搬入されると、搬入側バッファから搬出側バッファにワークを移載する。このときにワークの配置を逆転させるので、ワークは搬入時の順番で搬出される。
The invention according to claim 1 of the present invention for solving the above problem is a work storage device for storing a work carried into a carry-in end and carrying out the work from the carry-out end, wherein a plurality of works are provided at the carry-in end. A loading-side buffer arranged and stored in the order of loading, a plurality of the workpieces stored in the loading-side buffer one by one from the loading-side buffer, and a conveying portion provided at the unloading end. The work carried out from the carry-in buffer can be received, and a work-out buffer for arranging and storing the work in the order of acceptance, and the work arrangement being reversed every time the transport unit carries out the work. And a control device that moves the carry-in side buffer and the carry-out side buffer.
In this workpiece storage device, when a plurality of workpieces are sequentially loaded into the loading-side buffer at the loading end, the workpieces are transferred from the loading-side buffer to the loading-side buffer. At this time, since the arrangement of the workpieces is reversed, the workpieces are carried out in the order of loading.

請求項2に係る発明は、請求項1に記載のワーク収納装置において、前記制御装置は、前記搬送部が前記ワークを搬出する度に前記搬入側バッファ及び前記搬出側バッファを逆方向に移動させるように構成したことを特徴とする。
このワーク収納装置では、ワークを移載する際に、両バッファを逆方向に移動させることで、ワークの収納順番を逆転させ、ワークを搬入時の順番で搬出できるように並べ替える。
According to a second aspect of the present invention, in the work storage device according to the first aspect, the control device moves the carry-in side buffer and the carry-out side buffer in the reverse direction each time the carrying unit carries out the work. It is configured as described above.
In this workpiece storage device, when the workpiece is transferred, both the buffers are moved in the reverse direction to reverse the workpiece storage order and rearrange the workpieces so that they can be carried out in the order of loading.

請求項3に係る発明は、請求項1又は請求項2に記載のワーク収納装置において、前記ワークは、薄板の基板であり、前記搬入側バッファと前記搬出側バッファとは、前記基板を上下に収納可能で、かつ独立に昇降自在に設けられていることを特徴とする。
このワーク収納装置では、基板は両バッファに上下に順番に収納される。基板を移載する際には、両バッファを上下方向に、かつ逆方向に移動させながら基板を並べ替える。
According to a third aspect of the present invention, in the work storage device according to the first or second aspect, the work is a thin board, and the carry-in side buffer and the carry-out side buffer move the board up and down. It is storable and can be moved up and down independently.
In this work storage device, the substrates are stored in both buffers in order up and down. When the substrate is transferred, the substrates are rearranged while moving both buffers in the vertical direction and in the reverse direction.

請求項4に係る発明は、請求項1から請求項3のいずれか一項に記載のワーク収納装置において、前記搬入側バッファと、前記搬送部と、前記搬出側バッファとを複数組み並列に配置したことを特徴とする。
このワーク収納装置では、搬入側バッファと、搬送部と、搬出側バッファで1組の収納部を形成し、この収納部を並列に複数設けたので、1つの収納部でワークを移載している間に、他の収納部にワークを搬入したり、ワークを搬出したりすることが可能になる。
The invention according to claim 4 is the work storage device according to any one of claims 1 to 3, wherein a plurality of sets of the carry-in side buffer, the transfer unit, and the carry-out side buffer are arranged in parallel. It is characterized by that.
In this workpiece storage device, a pair of storage units are formed by the carry-in buffer, the transfer unit, and the carry-out buffer, and a plurality of storage units are provided in parallel. During this time, the workpiece can be carried into and out of another storage unit.

請求項5に係る発明は、搬入端に搬入されたワークを収納し、搬出端から搬出するにあたり、複数のワークを搬入された順に搬入側バッファに収納する工程と、前記搬入側バッファに収納した複数の前記ワークを搬入時に順番と逆の順番で一つずつ前記搬入側バッファから搬出する工程と、前記搬入側バッファから搬出した前記ワークを搬出側バッファに受け入れ、受け入れ順に収納する工程と、前記搬出側バッファから前記ワークを受け入れ順とは逆の順番に搬出する工程と、を有することを特徴とするワーク収納方法とした。
このワーク収納方法では、搬入側バッファに搬入した順番にワークを収納した後に、搬入側バッファから搬出側バッファにワークを移載し、この際にワークを並べ替えることで、ワークを搬入した順番に搬出できるようになる。
The invention according to claim 5 stores the work carried in at the carry-in end, and when carrying out the work from the carry-out end, a plurality of works are housed in the carry-in buffer in the order of carrying in, and the work is housed in the carry-in buffer. A step of unloading a plurality of the workpieces from the loading buffer one by one in the reverse order of loading, a step of receiving the workpieces unloaded from the loading buffer in a loading buffer, and storing the workpieces in the order of acceptance; And a step of unloading the workpieces from the unloading buffer in an order opposite to the order of acceptance.
In this workpiece storage method, after storing the workpieces in the order of loading into the loading side buffer, the workpieces are transferred from the loading side buffer to the unloading side buffer, and the workpieces are rearranged at this time, so that the workpieces are loaded in the order of loading. Can be carried out.

請求項6に係る発明は、請求項5に記載のワーク収納方法において、前記搬出側バッファから前記ワークを搬出する際に、他の前記ワークを前記搬入側バッファに搬入することを特徴とする。
このワーク収納方法では、搬出側バッファからワークを搬出する際には、搬入側バッファは空いているので、この空いている搬入側バッファに新たなワークを順場に搬入し、収納させ、ワークの処理効率を向上させる。
According to a sixth aspect of the present invention, in the work storage method according to the fifth aspect, when the work is unloaded from the unloading side buffer, the other work is loaded into the unloading side buffer.
In this work storage method, when the work is unloaded from the unloading side buffer, the loading side buffer is vacant, so a new work is loaded into the empty loading side buffer and stored in order. Improve processing efficiency.

本発明によれば、2つのバッファの間でワークを並べ替えるようにしたので、ワークを搬入した順番で搬出できるようにする。したがって、最初に搬入されたワークの滞留時間を短縮することができる。滞留時間の長短がワークの品質に影響を与える場合には、最初に搬入されたワークの滞留時間を短縮することで品質のばらつきを防止することが可能になる。   According to the present invention, since the workpieces are rearranged between the two buffers, the workpieces can be carried out in the order of loading. Therefore, the residence time of the work carried in initially can be shortened. In the case where the length of the residence time affects the quality of the workpiece, it is possible to prevent variations in quality by shortening the residence time of the workpiece loaded first.

発明を実施するための最良の形態について図面を参照しながら詳細に説明する。なお、以下の各実施の形態において、収納対象となるワークは、ガラスなどからなる薄板状の基板Wとして説明するが、ワークは、基板Wに限定されずに、組立途中の部品などでも良い。   The best mode for carrying out the invention will be described in detail with reference to the drawings. In each of the following embodiments, the workpiece to be stored is described as a thin plate-like substrate W made of glass or the like, but the workpiece is not limited to the substrate W, and may be a component in the middle of assembly.

(第1の実施の形態)
図1及び図2に第1の実施の形態におけるワーク収納装置としての基板収納装置の概略構成を示す。図1及び図2に示すように、基板収納装置1は、床面などに設置されるベース部2を有し、ベース部2上には搬送部である搬送コンベア3が設けられている。搬送コンベア3は、鉛直方向で上向きに延びる搬送台4が複数平行に配設されており、各搬送台4の上部には、ローラ5が回転自在に取り付けられている。搬送台4は、平面視で細長形状を有し、ローラ5の回転軸と、搬送台4の長手方向とは一致しており、ローラ5の軸線方向と直交する方向に等間隔に搬送台4が並んでいる。各ローラ5は、不図示の駆動装置に連結されており、それぞれが回転駆動できるようになっている。
(First embodiment)
1 and 2 show a schematic configuration of a substrate storage device as a workpiece storage device according to the first embodiment. As shown in FIGS. 1 and 2, the substrate storage device 1 has a base portion 2 installed on a floor surface or the like, and a transport conveyor 3 as a transport portion is provided on the base portion 2. In the conveyor 3, a plurality of conveyor tables 4 extending upward in the vertical direction are arranged in parallel, and a roller 5 is rotatably attached to the upper part of each conveyor table 4. The transport table 4 has an elongated shape in plan view, the rotation axis of the roller 5 coincides with the longitudinal direction of the transport table 4, and the transport table 4 is equally spaced in the direction orthogonal to the axial direction of the roller 5. Are lined up. Each roller 5 is connected to a drive device (not shown) so that each roller can be driven to rotate.

この基板収納装置1では、搬送台4の配列方向の一端側の3つの搬送台4及びローラ5が基板Wの搬入端を形成し、これら搬送台4及びローラ5を平面視で囲むように第一基板カセット10が配置されている。第一基板カセット10は、外形が直方形状になっており、矩形のフレームからなる天部10Aと底部10Bとを複数の支柱10Cで連結した構成を有し、搬入側バッファとして機能する。図2に示すように、第一基板カセット10の底部10Bは、搬入端の3つの搬送台4の外縁を合わせた形状よりも大きく、ローラ5と平行な梁11が2本架け渡されている。梁11は、底部10Bの歪みを防止するもので、搬送台4の隙間に進入可能な配置及び大きさになっている。支柱10Cには、複数の基板Wを鉛直方向に等間隔に複数載置するための桟部材(不図示)が等間隔に固定されている。この桟部材によって、基板Wを一枚収納可能なスロットが鉛直方向に複数形成される。第一基板カセット10の一端部側及び他端部側は、基板Wを出し入れ可能に開口している。このような第一基板カセット10は、第一昇降機構13によって鉛直方向に移動自在に支持されている。   In this substrate storage apparatus 1, the three transport tables 4 and the rollers 5 on one end side in the arrangement direction of the transport table 4 form a carry-in end of the substrate W, and the transport table 4 and the rollers 5 are surrounded by a plan view so as to surround them. One substrate cassette 10 is arranged. The first substrate cassette 10 has a rectangular outer shape, has a configuration in which a top 10A and a bottom 10B made of a rectangular frame are connected by a plurality of columns 10C, and functions as a carry-in buffer. As shown in FIG. 2, the bottom 10 </ b> B of the first substrate cassette 10 is larger than the combined shape of the outer edges of the three transfer platforms 4 at the carry-in end, and two beams 11 parallel to the rollers 5 are bridged. . The beam 11 prevents distortion of the bottom portion 10 </ b> B, and is arranged and sized so as to be able to enter the gap of the transport table 4. A cross member (not shown) for mounting a plurality of substrates W at equal intervals in the vertical direction is fixed to the column 10C at equal intervals. By the crosspiece member, a plurality of slots capable of storing one substrate W are formed in the vertical direction. One end side and the other end side of the first substrate cassette 10 are open so that the substrate W can be taken in and out. Such a first substrate cassette 10 is supported by the first elevating mechanism 13 so as to be movable in the vertical direction.

また、この基板収納装置1では、他端側の3つの搬送台4及びローラ5が基板Wの搬出端を形成しており、これら搬送台4及びローラ5を平面視で囲むように第二基板カセット20が配置されている。第二基板カセット20は、前記した第一基板カセット10と同じ構成を有し、搬出側バッファとして機能する。すなわち、第二基板カセット20は、搬送台4を挿入可能な底部10Bを有し、搬送台4間に進入可能な梁11が2本架け渡され、複数の基板Wを鉛直方向に等間隔に複数載置可能になっている。第二基板カセット20の一端部側及び他端部側は、基板Wを出し入れ可能に開口している。この第二基板カセット20は、第二昇降機構14によって鉛直方向に移動自在に支持されている。   Further, in the substrate storage apparatus 1, the three transport tables 4 and the rollers 5 on the other end side form a carry-out end of the substrate W, and the second substrate is surrounded by the transport table 4 and the rollers 5 in a plan view. A cassette 20 is arranged. The second substrate cassette 20 has the same configuration as the first substrate cassette 10 described above, and functions as a carry-out buffer. That is, the second substrate cassette 20 has a bottom portion 10B into which the transport table 4 can be inserted, two beams 11 that can enter between the transport tables 4 are bridged, and a plurality of substrates W are equally spaced in the vertical direction. Multiple mounting is possible. The one end part side and the other end part side of the second substrate cassette 20 are open so that the substrate W can be taken in and out. The second substrate cassette 20 is supported by the second lifting mechanism 14 so as to be movable in the vertical direction.

各昇降機構13,14及びローラ5の駆動装置は、制御装置25に接続されている。制御装置25は、CPU(中央演算ユニット)などを備え、後述する基板Wの搬入搬出動作を制御するように構成されている。   The elevating mechanisms 13 and 14 and the driving device for the roller 5 are connected to the control device 25. The control device 25 includes a CPU (Central Processing Unit) and the like, and is configured to control the loading / unloading operation of the substrate W described later.

次に、この実施の形態の作用について説明する。なお、初期状態として、図3に示すように、第一基板カセット10は、最も下方で待機しており、一番上の桟部材よりも僅かにローラ5が上方に突出している。一方、第二基板カセット20は、最も上方で待機しており、一番下の桟部材よりも僅かにローラ5が上方に突出している。   Next, the operation of this embodiment will be described. As an initial state, as shown in FIG. 3, the first substrate cassette 10 stands by at the lowermost position, and the roller 5 slightly protrudes upward from the top beam member. On the other hand, the second substrate cassette 20 stands by at the uppermost position, and the roller 5 slightly protrudes upward from the bottom beam member.

図4のタイムチャートに示すステップS101のように、最初に第一基板カセット10に基板Wを搬入する。具体的には、一枚の基板Wが不図示の搬送装置によって第一基板カセット10の一端部側の開口から挿入される。制御装置25は、搬入端の3つのローラ5を回転させ、これらローラ5に搬送されるようにして基板Wが第一基板カセット10内に進入する。一枚目の基板Wの搬入が終了したら、第一昇降機構13が駆動し、2番目の桟部材がローラ5より僅かに下側にくるように1スロットピッチ分だけ第一基板カセット10を上昇させる。この際に先に搬入された基板Wは、一番上の桟部材に周縁部を支持されるようにして上昇する。そして、その基板Wの下側に2枚目の基板Wが前記と同様にして搬入される。以降は、必要な全ての基板Wが搬入されるまで、同様の動作を繰り返す。その結果、第一基板カセット10には、複数の基板Wが先に搬入された順に上から収納される。   First, the substrate W is loaded into the first substrate cassette 10 as in step S101 shown in the time chart of FIG. Specifically, a single substrate W is inserted from the opening on one end side of the first substrate cassette 10 by a transfer device (not shown). The control device 25 rotates the three rollers 5 at the carry-in end, and the substrate W enters the first substrate cassette 10 so as to be conveyed by these rollers 5. When the loading of the first substrate W is completed, the first elevating mechanism 13 is driven and the first substrate cassette 10 is raised by one slot pitch so that the second beam member is slightly below the roller 5. Let At this time, the substrate W carried in first rises with the peripheral portion supported by the uppermost crosspiece member. Then, the second substrate W is loaded under the substrate W in the same manner as described above. Thereafter, the same operation is repeated until all necessary substrates W are loaded. As a result, the plurality of substrates W are stored in the first substrate cassette 10 from the top in the order in which they are first carried.

この後、図4のステップS102として、基板Wを第一基板カセット10から第二基板カセット20に移載する。具体的には、制御装置25が全てのローラ5を回転駆動させて、第一基板カセット10の一番下の基板Wを搬出し、第二基板カセット20に受け渡す。基板Wが第二基板カセット20内に収納されたら、制御装置25は、第一昇降機構13を駆動させて第一基板カセット10を1スロットピッチ分だけ下降させる一方で、第二昇降機構14を駆動させて第二基板カセット20を1スロットピッチ分だけ上昇させる。その結果、第二基板カセット20内の基板Wは、一番上の桟部材に支持されるようにして上昇する。さらに、第一基板カセット10の下から2番目の基板Wがローラ5によって第一基板カセット10から搬出され、第二基板カセット20の上から2番目のスロットに搬入される。以降は、第一基板カセット10の全ての基板Wが第二基板カセット20に移載されるまでの同様の動作を繰り返し、その後、ローラ5及び昇降機構13,14を停止させる。これによって、第一基板カセット10は空になり、第二基板カセット20には複数の基板Wが先に搬入された順に下から収納される。   Thereafter, the substrate W is transferred from the first substrate cassette 10 to the second substrate cassette 20 in step S102 of FIG. Specifically, the controller 25 rotates all the rollers 5 to carry out the lowermost substrate W of the first substrate cassette 10 and deliver it to the second substrate cassette 20. When the substrate W is stored in the second substrate cassette 20, the control device 25 drives the first lifting mechanism 13 to lower the first substrate cassette 10 by one slot pitch, while moving the second lifting mechanism 14. Driven to raise the second substrate cassette 20 by one slot pitch. As a result, the substrate W in the second substrate cassette 20 rises while being supported by the uppermost crosspiece member. Further, the second substrate W from the bottom of the first substrate cassette 10 is unloaded from the first substrate cassette 10 by the roller 5 and loaded into the second slot from the top of the second substrate cassette 20. Thereafter, the same operation is repeated until all the substrates W of the first substrate cassette 10 are transferred to the second substrate cassette 20, and then the roller 5 and the lifting mechanisms 13, 14 are stopped. As a result, the first substrate cassette 10 becomes empty, and a plurality of substrates W are stored in the second substrate cassette 20 from the bottom in the order of loading.

この基板収納装置1から基板Wを搬出する際には、ステップS103として、第二基板カセット20から基板Wを一枚ずつ搬出する。制御装置25は、搬出端の3つのローラ5を回転させて、一番下、つまり搬入端に最初に搬入された基板Wを第二基板カセット20の他端部から搬出し、不図示の他の装置に受け渡す。他の装置は、搬送装置でも良いし、公知の生産装置であっても良い。基板Wを一枚搬出したら、第二昇降機構14を駆動させて、第二基板カセット20をスロットピッチ分だけ下降させる。その結果、下から2番目、つまり搬入端に2番目に搬入された基板Wが基板収納装置1から搬出される。以降は、必要な基板Wを全て搬出するまで同様の動作を繰り返す。   When unloading the substrates W from the substrate storing apparatus 1, the substrates W are unloaded from the second substrate cassette 20 one by one as step S103. The control device 25 rotates the three rollers 5 at the carry-out end to carry out the substrate W first carried into the bottom, that is, the carry-in end from the other end of the second substrate cassette 20, Hand over to the device. The other apparatus may be a transfer apparatus or a known production apparatus. When one substrate W is unloaded, the second lifting mechanism 14 is driven to lower the second substrate cassette 20 by the slot pitch. As a result, the second substrate W loaded from the bottom, that is, the second substrate W loaded into the loading end is unloaded from the substrate storage device 1. Thereafter, the same operation is repeated until all necessary substrates W are carried out.

この間、第一基板カセット10は、空になっているので、新しい基板Wを搬入することができる。これによって、第二基板カセット20から基板Wを搬出する間に、第一基板カセット10に新しい基板Wが収納される。したがって、以降は、ステップS102とステップS103を繰り返すことで複数の基板Wを搬入し、搬入した順番に搬出することができる。   During this time, the first substrate cassette 10 is empty, so a new substrate W can be carried in. Thus, a new substrate W is stored in the first substrate cassette 10 while the substrate W is unloaded from the second substrate cassette 20. Therefore, after that, by repeating Step S102 and Step S103, a plurality of substrates W can be carried in and carried out in the order of carrying them.

この実施の形態によれば、複数の基板Wを順番に収納し、第一、第二基板カセット10,20間で基板Wの移載を行うことで基板Wを並べ替えるようにしたので、先に搬入した基板Wから搬出することが可能になる。このため、先に搬入した基板Wの滞留時間が増大することに起因する品質のばらつきを防止できる。また、先に搬入された基板Wの滞留時間が短くなるので、塵埃の堆積などを最小限に止めることができる。
また、第一、第二基板カセット10,20は、逆方向に昇降動作を行うだけで済むので、装置構成を簡略化することができる。したがって、基板カセット10,20の大型化が容易になり、大型基板への対応が容易になる。第一、第二基板カセット10,20には、ロボットのアームを挿入するためのスペースを設ける必要がないので、収納効率を高めることができる。
さらに、第二基板カセット20から基板Wを搬出する間に、第一基板カセット10に新しい基板Wを搬入するようにしたので、多数の基板Wを効率良く搬入及び搬出することができる。
According to this embodiment, the plurality of substrates W are sequentially stored, and the substrates W are rearranged by transferring the substrates W between the first and second substrate cassettes 10 and 20. It is possible to carry out the substrate W that has been carried into the substrate. For this reason, the dispersion | variation in quality resulting from the residence time of the board | substrate W carried in previously increasing can be prevented. Further, since the residence time of the substrate W that has been carried in first becomes shorter, dust accumulation and the like can be minimized.
Further, since the first and second substrate cassettes 10 and 20 need only be moved up and down in the reverse direction, the apparatus configuration can be simplified. Therefore, it is easy to increase the size of the substrate cassettes 10 and 20, and it is easy to handle large substrates. Since it is not necessary to provide a space for inserting the robot arm in the first and second substrate cassettes 10 and 20, the storage efficiency can be improved.
Further, since the new substrate W is loaded into the first substrate cassette 10 while the substrate W is unloaded from the second substrate cassette 20, a large number of substrates W can be loaded and unloaded efficiently.

(第二の実施の形態)
本発明の第二の実施の形態について図面を参照して詳細に説明する。なお、第一の実施の形態と同じ構成要素には、同一の符号を付す。また、重複する説明は省略する。
図5に示すように、基板収納装置51は、第一収納部52と、第二収納部53とが並列に配置され、第一収納部52又は第二収納部53の一方に基板Wを搬入する搬入側ローラコンベア54と、第一収納部52又は第二収納部53の一方からの基板Wを搬出する搬出側ローラコンベア54と、制御装置25とを有している。
(Second embodiment)
A second embodiment of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same component as 1st embodiment. In addition, overlapping explanation is omitted.
As shown in FIG. 5, in the substrate storage device 51, the first storage unit 52 and the second storage unit 53 are arranged in parallel, and the substrate W is loaded into one of the first storage unit 52 or the second storage unit 53. A carry-in side roller conveyor 54, a carry-out side roller conveyor 54 that carries out the substrate W from one of the first storage unit 52 and the second storage unit 53, and the control device 25.

第一収納部52及び第二収納部53は、それぞれが第一の実施の形態の基板収納装置1と同様の構成になっている。すなわち、ベース部2上に搬送コンベア3が設けられており、搬送コンベア3の長手方向に第一基板カセット10と、第二基板カセット20とが配置され、各々が第一、第二昇降機構13,14によって独立に昇降自在に支持されている。   Each of the first storage unit 52 and the second storage unit 53 has the same configuration as that of the substrate storage device 1 of the first embodiment. That is, the conveyor 3 is provided on the base portion 2, and the first substrate cassette 10 and the second substrate cassette 20 are arranged in the longitudinal direction of the conveyor 3. , 14 are supported so that they can be raised and lowered independently.

搬入側ローラコンベア54は、第一、第二収納部52,53の搬送方向に基板Wを移動させるローラ60が多数配設されており、その端部54A,54Bは第一、第二収納部52,53のそれぞれの搬入端に対応して設けられている。さらに、搬出端54A,54Bには、ローラ61がローラ60の回転方向と直交する方向に回転可能に複数配設されている。同様に、搬出側ローラコンベア55は、基板Wを搬送方向に移動させるローラ60が多数配設されている。第一、第二収納部52,53の搬出端に対応する端部55A,55Bには、ローラ60に加えて、ローラ61が基板Wの搬出方向と直交する方向に基板Wを搬送可能に多数配設されている。なお、ローラ61は、昇降自在に設けることが好ましい。   The carry-in roller conveyor 54 is provided with a number of rollers 60 for moving the substrate W in the transport direction of the first and second storage portions 52 and 53, and its end portions 54 </ b> A and 54 </ b> B are the first and second storage portions. 52 and 53 are provided corresponding to the respective carry-in ends. Further, a plurality of rollers 61 are arranged at the carry-out ends 54 </ b> A and 54 </ b> B so as to be rotatable in a direction orthogonal to the rotation direction of the roller 60. Similarly, the carry-out side roller conveyor 55 is provided with a number of rollers 60 that move the substrate W in the transport direction. In addition to the roller 60, a large number of rollers 61 can transport the substrate W in the direction orthogonal to the unloading direction of the substrate W at the end portions 55 </ b> A and 55 </ b> B corresponding to the unloading ends of the first and second storage portions 52 and 53. It is arranged. In addition, it is preferable that the roller 61 is provided so that raising / lowering is possible.

次に、この実施の形態の作用について説明する。なお、以下においては、図6のタイムチャートに示すように、第一収納部52に先に基板Wを搬入する場合について説明するが、第二収納部53から先に基板Wを搬入しても良い。
まず、ステップS201に示すように、第一収納部52に基板Wを搬入する。基板Wは、搬入側ローラコンベア54から第一収納部52の第一基板カセット10に、上から順番に搬入される。第一基板カセット10の全てのスロットに基板Wを収納したら、ステップS202に進む。
Next, the operation of this embodiment will be described. In the following, as shown in the time chart of FIG. 6, the case where the substrate W is first loaded into the first storage unit 52 will be described. However, even if the substrate W is loaded first from the second storage unit 53, good.
First, as shown in step S <b> 201, the substrate W is carried into the first storage unit 52. The substrates W are sequentially loaded from the carry-in side roller conveyor 54 into the first substrate cassette 10 of the first storage unit 52 from the top. When the substrates W are stored in all the slots of the first substrate cassette 10, the process proceeds to step S202.

ステップS202では、第一収納部52において第一基板カセット10から第二基板カセット20に基板Wを一枚ずつ移載する。この際に、制御装置25は、第一、第二基板カセット10,20を逆方向に1スロットピッチ分ずつ移動させ、先に搬入された基板Wを第二基板カセット20の下から順番に収納させる。また、このステップS202では、搬入側ローラコンベア54から基板Wが第二収納部53の第一基板カセット10に搬入される。基板Wは、搬入側ローラコンベア54の端部からローラ61の回転によって端部54Bに搬送され、ここから第二収納部53の第一基板カセット10に上から順番に搬入される。第一、第二収納部52,53の各第一基板カセット10には、同じ枚数の基板Wが収納されるので、第一収納部52での基板Wの移載が終了するのとほぼ同時に、第二収納部53への基板Wの搬入が終了する。   In step S <b> 202, the substrates W are transferred from the first substrate cassette 10 to the second substrate cassette 20 one by one in the first storage unit 52. At this time, the control device 25 moves the first and second substrate cassettes 10 and 20 by one slot pitch in the reverse direction, and stores the previously loaded substrates W in order from the bottom of the second substrate cassette 20. Let In step S <b> 202, the substrate W is carried into the first substrate cassette 10 of the second storage unit 53 from the carry-in side roller conveyor 54. The substrates W are transported from the end portion of the carry-in roller conveyor 54 to the end portion 54B by the rotation of the rollers 61, and are then carried in order from the top to the first substrate cassette 10 of the second storage portion 53. Since the same number of substrates W are stored in each of the first substrate cassettes 10 of the first and second storage units 52 and 53, the transfer of the substrate W in the first storage unit 52 is almost completed. Then, the loading of the substrate W into the second storage unit 53 is completed.

次に、ステップS203で、第一収納部52から搬出側ローラコンベア55に基板Wを一枚ずつ搬出する。このときの第二基板カセット20は1スロットピッチ分ずつ順番に下降し、基板Wは先に搬入されたものから順番に搬出される。これと同時に、第一収納部52の空になった第一基板カセット10に搬出側ローラコンベア55から基板Wが一枚ずつ搬入され、第一基板カセット10の上から順番に収納される。さらに、このステップS203においては、第二収納部53の第一基板カセット10に収納した基板Wを第二基板カセット20に移載する。第一、第二基板カセット10,20は逆方向に昇降し、第二基板カセット20には、先に搬入された基板Wが下から順番に収納される。   Next, in step S203, the substrates W are unloaded from the first storage unit 52 to the unloading-side roller conveyor 55 one by one. At this time, the second substrate cassette 20 descends in order of one slot pitch, and the substrates W are unloaded in order from the previously loaded ones. At the same time, the substrates W are carried one by one from the carry-out side roller conveyor 55 into the first substrate cassette 10 emptied in the first storage unit 52 and sequentially stored from above the first substrate cassette 10. Further, in step S 203, the substrate W stored in the first substrate cassette 10 of the second storage unit 53 is transferred to the second substrate cassette 20. The first and second substrate cassettes 10 and 20 are moved up and down in the opposite direction, and the substrates W previously carried in are stored in the second substrate cassette 20 in order from the bottom.

そして、続くステップS204では、第一収納部52で基板Wの移載を行うと共に、第二収納部53の第二基板カセット20から基板Wを順番に搬出する。第二収納部53において、基板Wは、先に搬入されたものから順番に搬出側ローラコンベア55に搬出される。さらに、第二収納部53では、空になっている第一基板カセット10に基板Wが上から順番に搬入される。以降は、ステップS203とステップS204とを交互に実施して基板Wを収納された順に搬出する。   In subsequent step S <b> 204, the substrate W is transferred by the first storage unit 52, and the substrates W are sequentially unloaded from the second substrate cassette 20 of the second storage unit 53. In the second storage unit 53, the substrates W are carried out to the carry-out side roller conveyor 55 in order from the first carried in. Further, in the second storage unit 53, the substrates W are sequentially loaded into the empty first substrate cassette 10 from the top. Thereafter, step S203 and step S204 are alternately performed to carry out the substrates W in the order in which they are stored.

この実施の形態によれば、第一収納部52、第二収納部53を並列に設けることで多数の基板Wを、収納した順番に搬出することが可能になり、作業効率が向上する。その他の効果は、第一の実施の形態と同じである。   According to this embodiment, by providing the first storage unit 52 and the second storage unit 53 in parallel, it becomes possible to carry out a large number of substrates W in the order in which they are stored, and work efficiency is improved. Other effects are the same as those of the first embodiment.

なお、本発明は、前記の各実施の形態に限定されずに広く応用することができる。
例えば、基板Wの搬送は、ローラに限定されずにエアー浮上を用いても良い。
また、基板Wを略水平に搬送し、上下に並んで収納する代わりに、基板Wを略垂直に立たせた状態で搬送及び収納しても良い。この場合に、第一、第二基板カセット10,20は、基板Wを立たせたままで平行に収納するように構成され、制御装置25は、第一、第二基板カセット10,20を1スロットピッチ分ずつ左右方向、かつ逆方向に移動させる。このような構成でも前記と同様に効果が得られる。この場合に、基板Wは、垂直から僅かに傾斜させた姿勢でローラ搬送しても良いし、基板Wの下端に当接するように下側にローラを配設したりしても良い。
第二の実施の形態において、収納部(第一収納部52、第二収納部53)の数を3つ以上にすると、さらに多数の基板Wを効率良く処理することができる。
The present invention can be widely applied without being limited to the above-described embodiments.
For example, the conveyance of the substrate W is not limited to a roller, and air levitation may be used.
Further, instead of transporting the substrate W substantially horizontally and storing the substrates W side by side, the substrate W may be transported and stored in a state in which the substrate W stands substantially vertically. In this case, the first and second substrate cassettes 10 and 20 are configured to store the substrates W in parallel while standing, and the control device 25 divides the first and second substrate cassettes 10 and 20 by one slot pitch. Move left and right and reverse each minute. Even in such a configuration, the same effect as described above can be obtained. In this case, the substrate W may be transported by a roller in a posture slightly inclined from the vertical, or a roller may be disposed on the lower side so as to contact the lower end of the substrate W.
In the second embodiment, when the number of storage units (first storage unit 52, second storage unit 53) is three or more, a larger number of substrates W can be processed efficiently.

本発明の実施の形態に係る基板収納装置の構成を示す側面図である。It is a side view which shows the structure of the board | substrate storage apparatus which concerns on embodiment of this invention. 基板収納装置の平面図である。It is a top view of a substrate storage device. 基板を搬入するときの配置を示す図である。It is a figure which shows arrangement | positioning when carrying in a board | substrate. 基板の収納方法を示すタイムチャートである。It is a time chart which shows the storage method of a board | substrate. 本発明の他の実施の形態に係る基板収納装置の構成を示す側面図である。It is a side view which shows the structure of the board | substrate storage apparatus which concerns on other embodiment of this invention. 基板の収納方法を示すタイムチャートである。It is a time chart which shows the storage method of a board | substrate.

符号の説明Explanation of symbols

1,51 基板収納装置(ワーク収納装置)
3 搬送コンベア(搬送部)
10 第一基板カセット(搬入側バッファ)
20 第二基板カセット(搬出側バッファ)
25 制御装置
52 第一収納部
53 第二収納部
W 基板(ワーク)

1,51 Substrate storage device (work storage device)
3 Transport conveyor (transport section)
10 1st substrate cassette (incoming buffer)
20 Second substrate cassette (unloading side buffer)
25 Control Device 52 First Storage Unit 53 Second Storage Unit W Substrate (Workpiece)

Claims (6)

搬入端に搬入されたワークを収納し、搬出端から搬出するワーク収納装置であって、
搬入端に設けられて複数のワークを搬入された順に配列して収納する搬入側バッファと、前記搬入側バッファに収納した複数の前記ワークを一つずつ前記搬入側バッファから搬出する搬送部と、搬出端に設けられて前記搬送部によって前記搬入側バッファから搬出された前記ワークを受け入れ可能で、受け入れ順に前記ワークを配列して収納する搬出側バッファと、前記搬送部が前記ワークを搬出する度に前記ワークの配列が逆転するように前記搬入側バッファ及び前記搬出側バッファを移動させる制御装置と、を有することを特徴とするワーク収納装置。
A work storage device for storing a work carried into a carry-in end and carrying out from a carry-out end,
A loading-side buffer that is provided at the loading end and stores a plurality of workpieces arranged in the order of loading; a conveying unit that unloads the plurality of workpieces stored in the loading-side buffer one by one from the loading-side buffer; An unloading-side buffer provided at the unloading end and capable of receiving the workpiece unloaded from the loading-side buffer by the transfer unit; the unloading-side buffer for arranging and storing the workpieces in the receiving order; and the transfer unit unloading the workpiece And a control device for moving the carry-in side buffer and the carry-out side buffer so that the arrangement of the work pieces is reversed.
前記制御装置は、前記搬送部が前記ワークを搬出する度に前記搬入側バッファ及び前記搬出側バッファを逆方向に移動させるように構成したことを特徴とする請求項1に記載のワーク収納装置。   The work storage device according to claim 1, wherein the control device is configured to move the carry-in side buffer and the carry-out side buffer in opposite directions each time the carrying unit carries out the work. 前記ワークは、薄板の基板であり、前記搬入側バッファと前記搬出側バッファとは、前記基板を上下に収納可能で、かつ独立に昇降自在に設けられていることを特徴とする請求項1又は請求項2に記載のワーク収納装置。   2. The workpiece according to claim 1, wherein the workpiece is a thin substrate, and the carry-in side buffer and the carry-out side buffer are provided so that the substrate can be stored vertically and can be moved up and down independently. The work storage device according to claim 2. 前記搬入側バッファと、前記搬送部と、前記搬出側バッファとを複数組み並列に配置したことを特徴とする請求項1から請求項3のいずれか一項に記載のワーク収納装置。   4. The work storage device according to claim 1, wherein a plurality of sets of the carry-in side buffer, the transfer unit, and the carry-out side buffer are arranged in parallel. 5. 搬入端に搬入されたワークを収納し、搬出端から搬出するにあたり、複数のワークを搬入された順に搬入側バッファに収納する工程と、前記搬入側バッファに収納した複数の前記ワークを搬入時に順番と逆の順番で一つずつ前記搬入側バッファから搬出する工程と、前記搬入側バッファから搬出した前記ワークを搬出側バッファに受け入れ、受け入れ順に収納する工程と、前記搬出側バッファから前記ワークを受け入れ順とは逆の順番に搬出する工程と、を有することを特徴とするワーク収納方法。   A step of storing a plurality of workpieces in the loading-side buffer in the order of loading, and a plurality of the workpieces stored in the loading-side buffer in the order of loading the workpieces loaded into the loading end and unloading from the unloading end. A step of unloading from the loading side buffer one by one in the reverse order, a step of receiving the workpieces unloaded from the loading side buffer into the unloading side buffer and storing them in the order of acceptance, and receiving the workpieces from the unloading side buffer. And a step of unloading in a reverse order to the order. 前記搬出側バッファから前記ワークを搬出する際に、他の前記ワークを前記搬入側バッファに搬入することを特徴とする請求項5に記載のワーク収納方法。

The work storage method according to claim 5, wherein when the work is unloaded from the unloading buffer, the other work is loaded into the loading buffer.

JP2005183446A 2005-06-23 2005-06-23 Work storage device Expired - Fee Related JP4941627B2 (en)

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JP2005183446A JP4941627B2 (en) 2005-06-23 2005-06-23 Work storage device
US11/368,622 US20070007708A1 (en) 2005-06-23 2006-03-07 Paper taking out device
PCT/JP2006/312341 WO2006137407A1 (en) 2005-06-23 2006-06-20 Work receiving device and work receiving method
KR1020077027104A KR100934809B1 (en) 2005-06-23 2006-06-20 Work storage device and work storage method
CNA2006800181072A CN101180229A (en) 2005-06-23 2006-06-20 Paper taking out device and method
TW095122286A TW200738538A (en) 2005-06-23 2006-06-21 Apparatus for receiving workpiece and method of receiving thereof

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010070328A (en) * 2008-09-19 2010-04-02 Sinfonia Technology Co Ltd Sorting device of article to be conveyed and sorting method of the article to be conveyed
JP2011210929A (en) * 2010-03-30 2011-10-20 Dainippon Screen Mfg Co Ltd Substrate processing apparatus, substrate processing system, and substrate processing method
KR101183043B1 (en) 2008-12-12 2012-09-20 가부시키가이샤 아이에이치아이 System for keeping and supplying substrate
JP2012209591A (en) * 2012-07-17 2012-10-25 Tokyo Electron Ltd Substrate processing apparatus, substrate processing method, and storage medium

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018083700A (en) * 2016-11-25 2018-05-31 日本電産サンキョー株式会社 Method of controlling substrate supply device and method of controlling substrate supply/recovery device
JP7134071B2 (en) * 2018-11-14 2022-09-09 株式会社ダイフク Goods transport equipment

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59227612A (en) * 1983-06-07 1984-12-20 Matsushita Electric Ind Co Ltd Buffer stocker device for circuit board
JPH02207547A (en) * 1989-02-07 1990-08-17 Tokyo Electron Ltd Processing method
JPH07257756A (en) * 1994-03-18 1995-10-09 Hitachi Metals Ltd Control method for picking out powdery-granular material
JP2000025931A (en) * 1998-07-09 2000-01-25 Dainippon Printing Co Ltd Buffer device
JP2002255338A (en) * 2001-03-02 2002-09-11 Daifuku Co Ltd Platelike body conveyance device
JP2004207279A (en) * 2002-12-20 2004-07-22 Rorze Corp Sheet-shaped object manufacturing facility

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59227612A (en) * 1983-06-07 1984-12-20 Matsushita Electric Ind Co Ltd Buffer stocker device for circuit board
JPH02207547A (en) * 1989-02-07 1990-08-17 Tokyo Electron Ltd Processing method
JPH07257756A (en) * 1994-03-18 1995-10-09 Hitachi Metals Ltd Control method for picking out powdery-granular material
JP2000025931A (en) * 1998-07-09 2000-01-25 Dainippon Printing Co Ltd Buffer device
JP2002255338A (en) * 2001-03-02 2002-09-11 Daifuku Co Ltd Platelike body conveyance device
JP2004207279A (en) * 2002-12-20 2004-07-22 Rorze Corp Sheet-shaped object manufacturing facility

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010070328A (en) * 2008-09-19 2010-04-02 Sinfonia Technology Co Ltd Sorting device of article to be conveyed and sorting method of the article to be conveyed
KR101183043B1 (en) 2008-12-12 2012-09-20 가부시키가이샤 아이에이치아이 System for keeping and supplying substrate
JP2011210929A (en) * 2010-03-30 2011-10-20 Dainippon Screen Mfg Co Ltd Substrate processing apparatus, substrate processing system, and substrate processing method
JP2012209591A (en) * 2012-07-17 2012-10-25 Tokyo Electron Ltd Substrate processing apparatus, substrate processing method, and storage medium

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TW200738538A (en) 2007-10-16
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