JP2006525554A - 吸着防止バンプと、一体型マイクロレンズと、反射吸収層とを有する自己パッケージ化光干渉表示装置 - Google Patents

吸着防止バンプと、一体型マイクロレンズと、反射吸収層とを有する自己パッケージ化光干渉表示装置 Download PDF

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Publication number
JP2006525554A
JP2006525554A JP2006513412A JP2006513412A JP2006525554A JP 2006525554 A JP2006525554 A JP 2006525554A JP 2006513412 A JP2006513412 A JP 2006513412A JP 2006513412 A JP2006513412 A JP 2006513412A JP 2006525554 A JP2006525554 A JP 2006525554A
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Japan
Prior art keywords
reflector
electronic device
optical cavity
reflectors
thickness
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Pending
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JP2006513412A
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English (en)
Japanese (ja)
Inventor
ピール，アーサー
プリジビラ，ジェイムズ・アール
ゴジール，アダム・エル
マーティン，エリック・ティー
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Hewlett Packard Development Co LP
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Hewlett Packard Development Co LP
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Publication of JP2006525554A publication Critical patent/JP2006525554A/ja
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    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/3433—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices
    • G09G3/3466—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using light modulating elements actuated by an electric field and being other than liquid crystal devices and electrochromic devices based on interferometric effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0008—Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00—Aspects of the constitution of display devices
    • G09G2300/06—Passive matrix structure, i.e. with direct application of both column and row voltages to the light emitting or modulating elements, other than LCD or OLED
JP2006513412A 2003-04-30 2004-04-29 吸着防止バンプと、一体型マイクロレンズと、反射吸収層とを有する自己パッケージ化光干渉表示装置 Pending JP2006525554A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/428,247 US7370185B2 (en) 2003-04-30 2003-04-30 Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
PCT/US2004/013163 WO2004099861A2 (en) 2003-04-30 2004-04-29 Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers

Publications (1)

Publication Number Publication Date
JP2006525554A true JP2006525554A (ja) 2006-11-09

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JP2006513412A Pending JP2006525554A (ja) 2003-04-30 2004-04-29 吸着防止バンプと、一体型マイクロレンズと、反射吸収層とを有する自己パッケージ化光干渉表示装置

Country Status (7)

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US (2) US7370185B2 (US20040217919A1-20041104-M00002.png)
EP (1) EP1618427A2 (US20040217919A1-20041104-M00002.png)
JP (1) JP2006525554A (US20040217919A1-20041104-M00002.png)
KR (1) KR20060014384A (US20040217919A1-20041104-M00002.png)
CN (1) CN100359361C (US20040217919A1-20041104-M00002.png)
TW (1) TWI300875B (US20040217919A1-20041104-M00002.png)
WO (1) WO2004099861A2 (US20040217919A1-20041104-M00002.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008517324A (ja) * 2004-10-15 2008-05-22 ヒューレット−パッカード デベロップメント カンパニー エル．ピー． 微小電気機械素子のための電荷制御回路
JP2011512261A (ja) * 2008-02-11 2011-04-21 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 干渉変調器の測定および特性評価の方法
US9448176B2 (en) 2011-09-29 2016-09-20 Seiko Epson Corporation Variable wavelength interference filter, optical filter device, optical module, and electronic apparatus

Families Citing this family (183)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6674562B1 (en) 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US7460291B2 (en) * 1994-05-05 2008-12-02 Idc, Llc Separable modulator
US8014059B2 (en) 1994-05-05 2011-09-06 Qualcomm Mems Technologies, Inc. System and method for charge control in a MEMS device
US7532377B2 (en) * 1998-04-08 2009-05-12 Idc, Llc Movable micro-electromechanical device
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
TWI289708B (en) 2002-12-25 2007-11-11 Qualcomm Mems Technologies Inc Optical interference type color display
US7447891B2 (en) * 2003-04-30 2008-11-04 Hewlett-Packard Development Company, L.P. Light modulator with concentric control-electrode structure
US7218499B2 (en) * 2003-05-14 2007-05-15 Hewlett-Packard Development Company, L.P. Charge control circuit
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
US7303645B2 (en) * 2003-10-24 2007-12-04 Miradia Inc. Method and system for hermetically sealing packages for optics
US7342705B2 (en) 2004-02-03 2008-03-11 Idc, Llc Spatial light modulator with integrated optical compensation structure
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7855824B2 (en) 2004-03-06 2010-12-21 Qualcomm Mems Technologies, Inc. Method and system for color optimization in a display
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7164520B2 (en) 2004-05-12 2007-01-16 Idc, Llc Packaging for an interferometric modulator
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US8031133B2 (en) 2004-09-27 2011-10-04 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7898521B2 (en) 2004-09-27 2011-03-01 Qualcomm Mems Technologies, Inc. Device and method for wavelength filtering
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7679627B2 (en) 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US8124434B2 (en) 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. Method and system for packaging a display
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US20060076634A1 (en) 2004-09-27 2006-04-13 Lauren Palmateer Method and system for packaging MEMS devices with incorporated getter
US7130104B2 (en) * 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7424198B2 (en) 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US7417783B2 (en) 2004-09-27 2008-08-26 Idc, Llc Mirror and mirror layer for optical modulator and method
US7304784B2 (en) 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US7701631B2 (en) 2004-09-27 2010-04-20 Qualcomm Mems Technologies, Inc. Device having patterned spacers for backplates and method of making the same
US7349141B2 (en) 2004-09-27 2008-03-25 Idc, Llc Method and post structures for interferometric modulation
US7525730B2 (en) * 2004-09-27 2009-04-28 Idc, Llc Method and device for generating white in an interferometric modulator display
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7920135B2 (en) 2004-09-27 2011-04-05 Qualcomm Mems Technologies, Inc. Method and system for driving a bi-stable display
US7675669B2 (en) 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7527995B2 (en) 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7668415B2 (en) 2004-09-27 2010-02-23 Qualcomm Mems Technologies, Inc. Method and device for providing electronic circuitry on a backplate
US7916103B2 (en) 2004-09-27 2011-03-29 Qualcomm Mems Technologies, Inc. System and method for display device with end-of-life phenomena
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7653371B2 (en) 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7710629B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. System and method for display device with reinforcing substance
US7373026B2 (en) 2004-09-27 2008-05-13 Idc, Llc MEMS device fabricated on a pre-patterned substrate
US8362987B2 (en) 2004-09-27 2013-01-29 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7710632B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. Display device having an array of spatial light modulators with integrated color filters
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7564612B2 (en) 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7807488B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. Display element having filter material diffused in a substrate of the display element
US8102407B2 (en) 2004-09-27 2012-01-24 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7911428B2 (en) 2004-09-27 2011-03-22 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7808703B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. System and method for implementation of interferometric modulator displays
US7692839B2 (en) 2004-09-27 2010-04-06 Qualcomm Mems Technologies, Inc. System and method of providing MEMS device with anti-stiction coating
US7893919B2 (en) 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7302157B2 (en) 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7630119B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing slippage between structures in an interferometric modulator
US7928928B2 (en) 2004-09-27 2011-04-19 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing perceived color shift
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
CN103345058A (zh) * 2005-02-23 2013-10-09 皮克斯特隆尼斯有限公司 用于作动显示器的方法和装置
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
KR20080027236A (ko) 2005-05-05 2008-03-26 콸콤 인코포레이티드 다이나믹 드라이버 ｉｃ 및 디스플레이 패널 구성
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
CA2507177C (en) * 2005-05-13 2012-04-24 Institut National D'optique Image projector with flexible reflective analog modulator
US7884989B2 (en) 2005-05-27 2011-02-08 Qualcomm Mems Technologies, Inc. White interferometric modulators and methods for forming the same
EP2495212A3 (en) 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
US7733553B2 (en) * 2005-09-21 2010-06-08 Hewlett-Packard Development Company, L.P. Light modulator with tunable optical state
US7760197B2 (en) * 2005-10-31 2010-07-20 Hewlett-Packard Development Company, L.P. Fabry-perot interferometric MEMS electromagnetic wave modulator with zero-electric field
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US7652814B2 (en) 2006-01-27 2010-01-26 Qualcomm Mems Technologies, Inc. MEMS device with integrated optical element
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US7530696B2 (en) * 2006-02-13 2009-05-12 Hewlett-Packard Development Company, L.P. Projectors and operation thereof
US7603001B2 (en) 2006-02-17 2009-10-13 Qualcomm Mems Technologies, Inc. Method and apparatus for providing back-lighting in an interferometric modulator display device
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US20070211257A1 (en) * 2006-03-09 2007-09-13 Kearl Daniel A Fabry-Perot Interferometer Composite and Method
US7643203B2 (en) 2006-04-10 2010-01-05 Qualcomm Mems Technologies, Inc. Interferometric optical display system with broadband characteristics
US7903047B2 (en) 2006-04-17 2011-03-08 Qualcomm Mems Technologies, Inc. Mode indicator for interferometric modulator displays
US7628493B2 (en) * 2006-04-18 2009-12-08 Xerox Corporation Projector based on tunable individually-addressable Fabry-Perot filters
US20070242358A1 (en) * 2006-04-18 2007-10-18 Xerox Corporation Fabry-perot tunable filter
US7417784B2 (en) * 2006-04-19 2008-08-26 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing a porous surface
US20070249078A1 (en) * 2006-04-19 2007-10-25 Ming-Hau Tung Non-planar surface structures and process for microelectromechanical systems
US7527996B2 (en) * 2006-04-19 2009-05-05 Qualcomm Mems Technologies, Inc. Non-planar surface structures and process for microelectromechanical systems
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US8004743B2 (en) 2006-04-21 2011-08-23 Qualcomm Mems Technologies, Inc. Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7369292B2 (en) 2006-05-03 2008-05-06 Qualcomm Mems Technologies, Inc. Electrode and interconnect materials for MEMS devices
US7649671B2 (en) * 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
WO2008045207A2 (en) 2006-10-06 2008-04-17 Qualcomm Mems Technologies, Inc. Light guide
EP2366942A1 (en) 2006-10-06 2011-09-21 Qualcomm Mems Technologies, Inc. Optical loss layer integrated in an illumination apparatus of a display
US7629197B2 (en) * 2006-10-18 2009-12-08 Qualcomm Mems Technologies, Inc. Spatial light modulator
US7684106B2 (en) 2006-11-02 2010-03-23 Qualcomm Mems Technologies, Inc. Compatible MEMS switch architecture
US7706042B2 (en) 2006-12-20 2010-04-27 Qualcomm Mems Technologies, Inc. MEMS device and interconnects for same
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US8115987B2 (en) 2007-02-01 2012-02-14 Qualcomm Mems Technologies, Inc. Modulating the intensity of light from an interferometric reflector
US7916378B2 (en) 2007-03-08 2011-03-29 Qualcomm Mems Technologies, Inc. Method and apparatus for providing a light absorbing mask in an interferometric modulator display
US7733552B2 (en) 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US7742220B2 (en) 2007-03-28 2010-06-22 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing conducting layers separated by stops
CN101652317B (zh) * 2007-04-04 2012-12-12 高通Mems科技公司 通过牺牲层中的界面修改来消除释放蚀刻侵蚀
US7643202B2 (en) 2007-05-09 2010-01-05 Qualcomm Mems Technologies, Inc. Microelectromechanical system having a dielectric movable membrane and a mirror
US7715085B2 (en) 2007-05-09 2010-05-11 Qualcomm Mems Technologies, Inc. Electromechanical system having a dielectric movable membrane and a mirror
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7643199B2 (en) * 2007-06-19 2010-01-05 Qualcomm Mems Technologies, Inc. High aperture-ratio top-reflective AM-iMod displays
US7782517B2 (en) 2007-06-21 2010-08-24 Qualcomm Mems Technologies, Inc. Infrared and dual mode displays
WO2009006340A2 (en) 2007-06-29 2009-01-08 Qualcomm Mems Technologies, Inc. Electromechanical device treatment with water vapor
US7630121B2 (en) 2007-07-02 2009-12-08 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US8068268B2 (en) 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
WO2009018287A1 (en) 2007-07-31 2009-02-05 Qualcomm Mems Technologies, Inc. Devices for enhancing colour shift of interferometric modulators
US8072402B2 (en) 2007-08-29 2011-12-06 Qualcomm Mems Technologies, Inc. Interferometric optical modulator with broadband reflection characteristics
US7847999B2 (en) 2007-09-14 2010-12-07 Qualcomm Mems Technologies, Inc. Interferometric modulator display devices
US7773286B2 (en) * 2007-09-14 2010-08-10 Qualcomm Mems Technologies, Inc. Periodic dimple array
US20090078316A1 (en) * 2007-09-24 2009-03-26 Qualcomm Incorporated Interferometric photovoltaic cell
EP2212926A2 (en) 2007-10-19 2010-08-04 QUALCOMM MEMS Technologies, Inc. Display with integrated photovoltaics
US8058549B2 (en) 2007-10-19 2011-11-15 Qualcomm Mems Technologies, Inc. Photovoltaic devices with integrated color interferometric film stacks
US8054527B2 (en) 2007-10-23 2011-11-08 Qualcomm Mems Technologies, Inc. Adjustably transmissive MEMS-based devices
US20090293955A1 (en) * 2007-11-07 2009-12-03 Qualcomm Incorporated Photovoltaics with interferometric masks
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US8068710B2 (en) 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
US7715079B2 (en) 2007-12-07 2010-05-11 Qualcomm Mems Technologies, Inc. MEMS devices requiring no mechanical support
JP2011508430A (ja) * 2007-12-21 2011-03-10 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 多接合光起電力セル
US7863079B2 (en) 2008-02-05 2011-01-04 Qualcomm Mems Technologies, Inc. Methods of reducing CD loss in a microelectromechanical device
US8164821B2 (en) 2008-02-22 2012-04-24 Qualcomm Mems Technologies, Inc. Microelectromechanical device with thermal expansion balancing layer or stiffening layer
US7944604B2 (en) 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
US7612933B2 (en) 2008-03-27 2009-11-03 Qualcomm Mems Technologies, Inc. Microelectromechanical device with spacing layer
US7898723B2 (en) 2008-04-02 2011-03-01 Qualcomm Mems Technologies, Inc. Microelectromechanical systems display element with photovoltaic structure
US7969638B2 (en) 2008-04-10 2011-06-28 Qualcomm Mems Technologies, Inc. Device having thin black mask and method of fabricating the same
US7851239B2 (en) * 2008-06-05 2010-12-14 Qualcomm Mems Technologies, Inc. Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices
US7768690B2 (en) 2008-06-25 2010-08-03 Qualcomm Mems Technologies, Inc. Backlight displays
US8023167B2 (en) 2008-06-25 2011-09-20 Qualcomm Mems Technologies, Inc. Backlight displays
US7746539B2 (en) 2008-06-25 2010-06-29 Qualcomm Mems Technologies, Inc. Method for packing a display device and the device obtained thereof
US7859740B2 (en) 2008-07-11 2010-12-28 Qualcomm Mems Technologies, Inc. Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control
US7855826B2 (en) 2008-08-12 2010-12-21 Qualcomm Mems Technologies, Inc. Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices
US8358266B2 (en) 2008-09-02 2013-01-22 Qualcomm Mems Technologies, Inc. Light turning device with prismatic light turning features
US20100096011A1 (en) * 2008-10-16 2010-04-22 Qualcomm Mems Technologies, Inc. High efficiency interferometric color filters for photovoltaic modules
WO2010044901A1 (en) * 2008-10-16 2010-04-22 Qualcomm Mems Technologies, Inc. Monolithic imod color enhanced photovoltaic cell
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
US20100181652A1 (en) * 2009-01-16 2010-07-22 Honeywell International Inc. Systems and methods for stiction reduction in mems devices
US8270056B2 (en) 2009-03-23 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with openings between sub-pixels and method of making same
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
US20100302218A1 (en) 2009-05-29 2010-12-02 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
US8270062B2 (en) 2009-09-17 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with at least one movable stop element
US8488228B2 (en) 2009-09-28 2013-07-16 Qualcomm Mems Technologies, Inc. Interferometric display with interferometric reflector
US7999995B2 (en) * 2009-09-28 2011-08-16 Sharp Laboratories Of America, Inc. Full color range interferometric modulation
JP2013519122A (ja) * 2010-02-02 2013-05-23 ピクストロニックス・インコーポレーテッド ディスプレイ装置を制御するための回路
US8547626B2 (en) * 2010-03-25 2013-10-01 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of shaping the same
CN102834761A (zh) 2010-04-09 2012-12-19 高通Mems科技公司 机电装置的机械层及其形成方法
US8848294B2 (en) 2010-05-20 2014-09-30 Qualcomm Mems Technologies, Inc. Method and structure capable of changing color saturation
CN103109315A (zh) 2010-08-17 2013-05-15 高通Mems科技公司 对干涉式显示装置中的电荷中性电极的激活和校准
US9057872B2 (en) 2010-08-31 2015-06-16 Qualcomm Mems Technologies, Inc. Dielectric enhanced mirror for IMOD display
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
US8736939B2 (en) 2011-11-04 2014-05-27 Qualcomm Mems Technologies, Inc. Matching layer thin-films for an electromechanical systems reflective display device
CN103246124B (zh) * 2012-02-02 2016-03-30 联想(北京)有限公司 电子设备及其显示方法
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
US9213045B2 (en) * 2013-05-23 2015-12-15 Freescale Semiconductor, Inc. Active lateral force stiction self-recovery for microelectromechanical systems devices
DE102016214565A1 (de) * 2016-08-05 2018-02-08 Robert Bosch Gmbh Interferometer und Verfahren zum Betreiben desselben
CN107132653B (zh) * 2017-07-12 2019-08-30 京东方科技集团股份有限公司 像素结构、显示基板和显示面板
US10761554B2 (en) * 2017-09-04 2020-09-01 Excalibur Almaz Usa, Inc. Propulsive devices that comprise selectively reflective epitaxial surfaces
CN109901285B (zh) * 2019-04-04 2020-11-10 山西大学 一种像素结构、显示器件、投影显示系统和显示装置

Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63194285A (ja) * 1987-02-06 1988-08-11 シャープ株式会社 カラ−表示装置
JPH01158818A (ja) * 1987-10-26 1989-06-21 Siemens Ag スイツチングトランジスタのベース電流調節方法および装置
JPH02140028A (ja) * 1988-06-27 1990-05-29 Sharp Corp 波長多重光通信システム
JPH04368483A (ja) * 1991-06-13 1992-12-21 Mitsubishi Electric Corp 圧電素子駆動装置
JPH11211999A (ja) * 1998-01-28 1999-08-06 Teijin Ltd 光変調素子および表示装置
US6195196B1 (en) * 1998-03-13 2001-02-27 Fuji Photo Film Co., Ltd. Array-type exposing device and flat type display incorporating light modulator and driving method thereof
JP2001296483A (ja) * 2000-03-25 2001-10-26 Lucent Technol Inc 光空洞からなる物品
JP2001525075A (ja) * 1996-10-03 2001-12-04 ヴァルション テクニッリネン トゥトキムスケスクス 電気的に調整可能な光学的フィルタ
JP2002006238A (ja) * 2000-04-14 2002-01-09 Agilent Technol Inc ファブリ・ペロー共振器用中空構造体
JP2002036197A (ja) * 2000-04-13 2002-02-05 Nokia Mobile Phones Ltd マイクロマシン素子を制御するための方法および装置
US20020015215A1 (en) * 1994-05-05 2002-02-07 Iridigm Display Corporation, A Delaware Corporation Interferometric modulation of radiation
US20020024711A1 (en) * 1994-05-05 2002-02-28 Iridigm Display Corporation, A Delaware Corporation Interferometric modulation of radiation
US6381022B1 (en) * 1992-01-22 2002-04-30 Northeastern University Light modulating device
US6384953B1 (en) * 2000-06-29 2002-05-07 The United States Of America As Represented By The Secretary Of The Navy Micro-dynamic optical device
US20020054424A1 (en) * 1994-05-05 2002-05-09 Etalon, Inc. Photonic mems and structures
US6466285B1 (en) * 1999-04-13 2002-10-15 Canon Kabushiki Kaisha Liquid crystal device or apparatus comprises pixels of at least one of three primary colors having a pixel size different from those of pixels of the other colors
WO2002091059A1 (en) * 2001-05-03 2002-11-14 Nokia Corporation Electrically controlled variable thickness plate
JP2004334201A (ja) * 2003-04-30 2004-11-25 Hewlett-Packard Development Co Lp 表示可能な画像のピクセルを少なくとも部分的に表示する電子デバイス

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4093534A (en) * 1974-02-12 1978-06-06 Plessey Handel Und Investments Ag Working fluids for electrophoretic image display devices
US5835255A (en) 1986-04-23 1998-11-10 Etalon, Inc. Visible spectrum modulator arrays
GB2222923B (en) 1988-09-14 1992-09-23 Marconi Gec Ltd Display apparatus
US6404127B2 (en) 1993-07-20 2002-06-11 University Of Georgia Research Foundation, Inc. Multi-color microcavity resonant display
US6040937A (en) 1994-05-05 2000-03-21 Etalon, Inc. Interferometric modulation
US5771321A (en) 1996-01-04 1998-06-23 Massachusetts Institute Of Technology Micromechanical optical switch and flat panel display
US5832255A (en) * 1996-03-22 1998-11-03 Sharp Microelectronics Technology, Inc. System and method for selecting a signal source to trigger a microprocessor counter/timer macro cell
US6031653A (en) * 1997-08-28 2000-02-29 California Institute Of Technology Low-cost thin-metal-film interference filters
US6297907B1 (en) 1997-09-02 2001-10-02 California Institute Of Technology Devices based on surface plasmon interference filters
US6117699A (en) * 1998-04-10 2000-09-12 Hewlett-Packard Company Monolithic multiple wavelength VCSEL array
US6154591A (en) 1998-04-20 2000-11-28 British Telecommunications Public Limited Company Tunable optical device
US6040936A (en) 1998-10-08 2000-03-21 Nec Research Institute, Inc. Optical transmission control apparatus utilizing metal films perforated with subwavelength-diameter holes
JP2000167969A (ja) * 1998-12-07 2000-06-20 Nitto Denko Corp 透明積層体およびそれを用いたプラズマディスプレイパネル用フィルター
US6373632B1 (en) 2000-03-03 2002-04-16 Axsun Technologies, Inc. Tunable Fabry-Perot filter
WO2002004903A1 (en) * 2000-07-12 2002-01-17 Macquarie Research Ltd Optical heterodyne detection in optical cavity ringdown spectroscopy
JP4196531B2 (ja) * 2000-09-08 2008-12-17 富士ゼロックス株式会社 表示媒体の駆動方法
JP4085565B2 (ja) * 2000-09-21 2008-05-14 富士ゼロックス株式会社 画像表示媒体の駆動方法及び画像表示装置
TW556002B (en) * 2000-10-17 2003-10-01 Koninkl Philips Electronics Nv Light valve and device provided with a light valve
JP4165001B2 (ja) * 2000-11-02 2008-10-15 富士ゼロックス株式会社 画像表示媒体、画像表示装置及び画像表示方法
US6724796B2 (en) * 2000-12-06 2004-04-20 Applied Optoelectronics, Inc. Modified distributed bragg reflector (DBR) for vertical cavity surface-emitting laser (VCSEL) resonant wavelength tuning sensitivity control
US6833958B2 (en) * 2001-02-06 2004-12-21 Agilent Technologies, Inc. Optical cavities for optical devices
US20020126864A1 (en) 2001-03-07 2002-09-12 Dennis George J. Hearing devices kit
US6865315B2 (en) * 2001-08-29 2005-03-08 Jds Uniphase Corporation Dispersion compensating filters
US6768555B2 (en) * 2002-03-21 2004-07-27 Industrial Technology Research Institute Fabry-Perot filter apparatus with enhanced optical discrimination
US6829132B2 (en) * 2003-04-30 2004-12-07 Hewlett-Packard Development Company, L.P. Charge control of micro-electromechanical device
US6853476B2 (en) * 2003-04-30 2005-02-08 Hewlett-Packard Development Company, L.P. Charge control circuit for a micro-electromechanical device
US7218438B2 (en) * 2003-04-30 2007-05-15 Hewlett-Packard Development Company, L.P. Optical electronic device with partial reflector layer

Patent Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63194285A (ja) * 1987-02-06 1988-08-11 シャープ株式会社 カラ−表示装置
JPH01158818A (ja) * 1987-10-26 1989-06-21 Siemens Ag スイツチングトランジスタのベース電流調節方法および装置
JPH02140028A (ja) * 1988-06-27 1990-05-29 Sharp Corp 波長多重光通信システム
JPH04368483A (ja) * 1991-06-13 1992-12-21 Mitsubishi Electric Corp 圧電素子駆動装置
US6381022B1 (en) * 1992-01-22 2002-04-30 Northeastern University Light modulating device
US20020015215A1 (en) * 1994-05-05 2002-02-07 Iridigm Display Corporation, A Delaware Corporation Interferometric modulation of radiation
US20020054424A1 (en) * 1994-05-05 2002-05-09 Etalon, Inc. Photonic mems and structures
US20020024711A1 (en) * 1994-05-05 2002-02-28 Iridigm Display Corporation, A Delaware Corporation Interferometric modulation of radiation
JP2001525075A (ja) * 1996-10-03 2001-12-04 ヴァルション テクニッリネン トゥトキムスケスクス 電気的に調整可能な光学的フィルタ
JPH11211999A (ja) * 1998-01-28 1999-08-06 Teijin Ltd 光変調素子および表示装置
US6195196B1 (en) * 1998-03-13 2001-02-27 Fuji Photo Film Co., Ltd. Array-type exposing device and flat type display incorporating light modulator and driving method thereof
US6466285B1 (en) * 1999-04-13 2002-10-15 Canon Kabushiki Kaisha Liquid crystal device or apparatus comprises pixels of at least one of three primary colors having a pixel size different from those of pixels of the other colors
JP2001296483A (ja) * 2000-03-25 2001-10-26 Lucent Technol Inc 光空洞からなる物品
JP2002036197A (ja) * 2000-04-13 2002-02-05 Nokia Mobile Phones Ltd マイクロマシン素子を制御するための方法および装置
JP2002006238A (ja) * 2000-04-14 2002-01-09 Agilent Technol Inc ファブリ・ペロー共振器用中空構造体
US6384953B1 (en) * 2000-06-29 2002-05-07 The United States Of America As Represented By The Secretary Of The Navy Micro-dynamic optical device
WO2002091059A1 (en) * 2001-05-03 2002-11-14 Nokia Corporation Electrically controlled variable thickness plate
JP2004334201A (ja) * 2003-04-30 2004-11-25 Hewlett-Packard Development Co Lp 表示可能な画像のピクセルを少なくとも部分的に表示する電子デバイス

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008517324A (ja) * 2004-10-15 2008-05-22 ヒューレット−パッカード デベロップメント カンパニー エル．ピー． 微小電気機械素子のための電荷制御回路
JP2011512261A (ja) * 2008-02-11 2011-04-21 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 干渉変調器の測定および特性評価の方法
US9448176B2 (en) 2011-09-29 2016-09-20 Seiko Epson Corporation Variable wavelength interference filter, optical filter device, optical module, and electronic apparatus

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US7441134B2 (en) 2008-10-21
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