JP2006518534A5

JP2006518534A5 -

Info

Publication number: JP2006518534A5
Application number: JP2005515862A
Authority: JP
Filing date: 2003-12-10
Publication date: 2006-09-21

Claims

A sample container,
A sample enclosure comprising: an electron beam permeable fluid impermeable membrane; and a surrounding enclosure sealed to the membrane to form the sample enclosure with the membrane;
A closure of the sample enclosure having a quick connect attachment function for sealing engagement with the sample enclosure;
A sample container.

The sample container according to claim 1, wherein the function of the quick connection attachment includes a bayonet connection function.

The sample container according to claim 1 or 2, wherein the sample container is at least partially conductive.

The sample container according to any one of claims 1 to 3, comprising a reference coordination indicator.

5. A sample container according to any one of the preceding claims, comprising a membrane support grid for supporting the membrane and providing a reference coordination indicator.

6. A sample container according to any one of the preceding claims, comprising a flexible support element.

A sample container according to any one of claims 1 to 6;
A microscope,
A sample inspection system.

An X-ray detector arranged to receive X-rays from the sample;
A photodetector arranged to receive light from the sample in the range from ultraviolet to infrared; and
A backscattered electron detector arranged to receive backscattered electrons from the sample;
A secondary electron detector arranged to receive secondary electrons from the sample;
The sample inspection system of claim 7, comprising at least one of:

A multiple sample holder,
A sample container comprising: an electron beam permeable and fluid impermeable membrane; and an enclosure hermetically sealed to form the sample container together with the membrane;
A support for supporting the plurality of sample containers;
With multiple sample holders.

The multiple sample holder of claim 9, wherein the support comprises a light transmissive portion underlying the membrane.

The multiple sample holder according to claim 9 or 10, wherein the support portion includes a liquid reservoir.

With a suction device and pipette,
12. The suction device according to any one of claims 9 to 11, wherein the suction device is configured to prevent its physical engagement with the membrane during its operative engagement with the support. Multiple sample holder.

The multiple sample holder of claim 12, wherein at least one of the pipettes is provided with a collar element to prevent unintentional engagement of the pipette with the membrane.

A method for operating an electron microscope comprising:
Placing a sample in a sample enclosure, the sample enclosure comprising an electron beam permeable fluid impermeable membrane and a surrounding enclosure sealed to the membrane to form the sample enclosure with the membrane; An outer enclosure arranged around the sample enclosure and forming with the interior of the sample enclosure an aperture for electrons to pass through the membrane;
Sealing the sample enclosure with the outer enclosure;
Placing the sample enclosure in an electron beam;
Analyzing the result of the interaction between the electron beam and the sample;
A method comprising:

15. The method of claim 14, wherein the step of sealing the sample enclosure with the outer enclosure is performed using a bayonet connection.

Placing the sample in the sample enclosure comprises:
16. A method according to claim 14 or 15, comprising positioning the sample with respect to a reference configuration indicator of the sample enclosure.

Placing the sample in between the flexible support element and the membrane, whereby the sample is abutted on the first surface of the sample, the first surface of the sample being in contact with the sample; 17. A method according to any one of claims 14 to 16, comprising the step of being opposite the second surface, wherein the second surface of the sample is adjacent to the flexible support element.

A method for operating an electron microscope comprising:
Providing a sample that is sensitive to damage induced by electron beam irradiation;
Adding a protective material to the sample that at least partially prevents damage induced by the electron beam irradiation;
A method comprising the steps of irradiating the sample and the protective material with an electron beam in an electron microscope.

Placing the sample in a sample enclosure, the sample enclosure comprising an electron beam permeable, fluid impermeable membrane and a surrounding enclosure sealed to the membrane to form the sample enclosure with the membrane; The method of claim 18, comprising the step.

The method of claim 19, wherein the film is sensitive to the electron beam induced damage resulting from electron beam irradiation of the film.

21. A method according to claim 19 or 20, wherein the film is sensitive to the electron beam induced damage resulting from electron beam irradiation of the sample.

A top open microscope sample container,
A light permeable, fluid impervious sample support having a thickness of less than 10 microns;
An open top ambient enclosure that is sealed to the sample support and together with the sample support forms the open top microscope sample container;
A top open microscope sample container comprising:

A sample container having a sample enclosure,
The sample enclosure is
An electron beam permeable and fluid impermeable membrane;
A surrounding enclosure sealed to the membrane to form the sample enclosure with the membrane;
A sample enclosure closure having a quick connect attachment means for connecting the sample enclosure to the sample enclosure closure;
A sample container.

The sample container according to claim 23, wherein the quick connection type attachment means has a bayonet type connection function.

25. A sample container according to claim 23 or 24, wherein the sample container is at least partially conductive.

26. A sample container according to any one of claims 23 to 25, comprising a reference coordination indicator.

27. A sample container according to any one of claims 23 to 26, comprising a membrane support grid for supporting the membrane and providing a reference coordination indicator.

28. A sample container according to any one of claims 23 to 27, comprising a flexible support element.