JP2002107313A - Sample holder for x-ray analysis and x-ray analyzer device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sample holder for X-ray analysis, capable of simply holding a trace amount of samples. SOLUTION: The sample holder 8 for X-ray analysis is for holding the samples S3 to be analyzed by an X-ray analyzer, and a sample support 31 for supporting the samples S3 is mounted detachably to the sample holder 8. The sample support 31 is provided with a plate-shaped main body 33 with one sample insertion hole 32 or more and a film 34, which covers one surface of the main body and to which the samples S3 to be inserted in the insertion holes 32 is adhered.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample holder which has a sample support capable of holding a plurality of minute solid samples and which can be set in an X-ray analyzer such as an X-ray fluorescence analyzer. The present invention relates to a line analyzer.

[0002]

2. Description of the Related Art An X-ray fluorescence analyzer is an apparatus for irradiating a sample with radiation such as primary X-rays and measuring the fluorescent X-rays generated from the sample to perform elemental analysis of the sample. In this analyzer, a sample holder is usually used in order to correctly set a sample at a primary X-ray irradiation position. When setting a very small amount of solid sample in this sample holder, it is common to embed the test sample on the surface of the base material that does not contain the target component, or to fix it to the sample table with an adhesive or adhesive tape. It is a target.

[0003]

However, in the former method of embedding on the surface of a base material, for example, fibrous cellulose is lightly press-formed in advance, a small amount of a test sample is placed thereon, and Pressure molding is performed, and there is a problem that the pressure molding operation is complicated. In the latter method of fixing with an adhesive, an adhesive tape or the like, the sample can be fixed somewhat more easily than the embedding method, but the fixing position of the sample is not fixed.

SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems, and a sample holder for X-ray analysis which can easily hold a very small amount of sample at an accurate position and an X-ray provided with the sample holder.
It is intended to provide a line analyzer.

[0005]

In order to achieve the above object, a sample holder according to a first aspect of the present invention is a sample holder for X-ray analysis for holding a sample to be analyzed by an X-ray analyzer. A sample support for supporting a sample is detachably attached to a sample holder, and the sample support is
A bottomed cylindrical main body, one or more rod-shaped support members that are erected on the bottom wall of the main body and support the sample at the tip end surface, and cover the opening of the main body; A supporting film between the two. According to this configuration, since the sample is sandwiched and held between the film and the distal end surface of the rod-shaped support member, a very small amount required for analysis can be secured and held with a simple configuration. Further, the sample can be completely recovered by removing the film after analysis without contamination by an adhesive or the like. Furthermore, since the periphery of the support member is a space, scattered radiation can be suppressed. Further, the support member can be used any number of times only by exchanging the film without fear of contamination of the support member by the adhesive or the like.

In a preferred embodiment of the present invention, the rod-shaped support member is screwed to a bottom wall of the main body, and is set so as to be able to advance and retreat toward the film. According to this configuration, the support member is advanced by the rotation of the support member, tension is applied to the film, and samples having different sizes and heights can be reliably set between the support member and the film.

[0007] In a preferred embodiment of the present invention, a recess is provided in the tip end surface of the rod-shaped support member. According to this configuration, when the sample is extremely small, such as powder,
Scattering can be prevented, and the sample can be completely recovered.

A sample holder according to a second aspect of the present invention is a sample holder for X-ray analysis for holding a sample to be analyzed by an X-ray analyzer, wherein a sample support for supporting the sample is detachable from the sample holder. The sample supporter is provided with a bottomed cylindrical main body, and one or more rod-shaped supports that are vertically erected on the bottom wall of the main body and that support the sample on the tip end surface. And a member. According to this configuration, since the sample is supported by the distal end surface of the rod-shaped support member, the support position is constant. In addition, since the height of the support member can be easily adjusted, minute samples having different sizes (heights) can be easily adjusted to a predetermined height of the sample holder.

Further, the sample holder according to the third aspect of the present invention includes:
An X-ray analysis sample holder for holding a sample to be analyzed by an X-ray analyzer, wherein a sample support for supporting the sample is detachably attached to the sample holder, and the sample support is a sample holder. The apparatus includes a plate-shaped main body having one or more insertion holes, and a film covering one surface of the main body and attaching a sample to be inserted into the insertion hole. According to this configuration, the sample is supported on the film in the insertion hole by dropping and drying, so that the supporting position is constant. Further, since an adhesive or an adhesive tape is not used for holding the sample, the sample is not contaminated and the sample after the analysis can be collected. Furthermore, the sample holder can be used any number of times only by changing the film without the risk of contamination of the sample holder by the adhesive or the like.

In a preferred embodiment of the present invention, an engaging portion for positioning the sample holder in the circumferential direction with respect to the sample holder is further provided on the outer periphery of the main body of the sample support. According to this configuration, positioning in the X-ray irradiation direction is easy.

The X-ray analyzer according to the fourth aspect of the present invention,
An X-ray analyzer for setting a sample holder for X-ray analysis on a table driven two-dimensionally and performing X-ray analysis of a sample held in the sample holder, wherein a position of the sample holder in a rotation direction is detected. A sample rotation direction positioning mechanism for rotating the sample holder and positioning the sample holder in the rotation direction based on a detection signal from the sensor before setting the sample holder on the table; Features. According to this configuration, the position of the sample holder with respect to the X-ray analyzer can be easily determined.

[0012]

Preferred embodiments of the present invention will be described below in detail with reference to the drawings. First, the outline of the fluorescent X-ray analyzer will be described. In FIG. 11, X
The radiation tube (radiation source) 50 emits primary X-rays (radiation) B1 and applies the primary X-rays to a sample S, which is a solid sample of a small amount of powder held by the sample support 1 in the sample holder 8. Irradiate B1. The primary X-ray B1 applied to the sample S
Is excited to generate a fluorescent X-ray B2 unique to the element. The fluorescent X-rays B2 from the sample S pass through the field-of-view limiting slit 51 and the first solar slit 52, enter the spectral crystal 53 at an incident angle θ, and have a predetermined wavelength that satisfies the Bragg equation. Only is diffracted at the same diffraction angle θ as the incident angle θ. The diffracted fluorescent X-ray B2 is
After passing through the solar slit 54, the X-ray detector 55
And is detected. The element analysis of the sample S is performed based on the detected value. The sample holder 8 is placed on an Rθ table 56 that performs linear movement and rotation in one direction,
By driving the table 56, the sample S is moved to an irradiation position and irradiated with X-rays.

As shown in FIG. 1, a sample support 1 according to the present invention comprises a rod-shaped support member 2 on which a sample S1 is mounted on a distal end surface;
A cylindrical body with a bottom (hereinafter referred to as "sample cup")
3 and a film 4 attached to the opening 3d of the main body 3. The sample S1 is provided on the tip surface 2 of the rod-shaped support member 2.
a and the film 4 to be held therebetween.

The rod-shaped support member 2 has an elongated cylindrical portion 2b forming a distal end surface 2a on which the sample S1 is placed, and the cylindrical portion 2b.
b, the outer diameter of the male screw portion 2c is formed larger than the outer diameter of the cylindrical portion 2b. A groove 2d is formed in the groove. On the other hand, a female screw portion 3b is formed at the center of the bottom wall 3a of the sample cup 3, and the support member 2 is inserted into the cylinder from below the bottom wall 3a and screwed into the bottom wall 3a with a screwdriver or the like. And is erected at the center of the sample cup 3. The support member 2 is formed of a resin such as polypropylene.

The outer diameter of the rod-shaped support member 2 is small, and as shown in FIG.
1 almost completely covered. Therefore, the sample S1
Is held hollow, the amount of scattered radiation generated from members around the sample S1 is reduced, and the analysis accuracy is improved. This also reduces the need to consider a material that does not contain the target component when manufacturing the support member 2. Therefore, from the viewpoint of ease of molding and the like, it can be formed of the above-mentioned resin.

The sample cup 3 shown in FIG. 1 has an annular groove 3c formed on the outer periphery. The snap ring 7 is fitted into the groove 3c so that the film 4 covers the opening 3d with an appropriate tension. The film 4 is supported. By supporting the film 4 with the snap ring 7, the attachment / detachment of the film 4 becomes easy, and the film 4 can be easily replaced with a new one. However, the present invention is not limited to this. For example, the film 4 may be attached to the sample cup 3 with an adhesive or the like. The bottom wall 3a of the sample cup 3 is provided with an air hole 10 for the case where the inside is evacuated.

The film 4 is made of a resin such as polyester or polypropylene.

The sample support 1 of the present invention is used by being detachably attached to a sample holder 8 as shown in FIG. The sample holder 8 includes a bottomed cylindrical case 8c,
An annular holding plate 8b for holding the opening end 3e of the sample cup 3 and an annular cap 8a screwed to the case 8c so as to hold the holding plate 8b against the case 8c. A sponge 9 as an elastic body for pressing and fixing the sample support 1 is inserted into the bottom of the case 8c.
The sample support 1 is placed on the sample holder 3 and the cap 8a is turned and fixed to the case 8c while the opening 3d of the sample cup 3 and the opening 8d of the holding plate 8b are held concentrically. In addition to the sponge 9, an elastic body such as a coil spring may be used. The sample holder 8 is formed of stainless steel, aluminum, or the like.

As shown in FIGS. 3 and 4, recesses 5 and 6 for accommodating the sample S1 may be provided on the distal end surface 2a of the support member 2. The recess 5 in FIG. 3 has a circular counterbore in the axial direction, and the recess 6 in FIG. 4 has a mortar shape. Due to the recesses 5 and 6, particularly, a very small sample S 1 such as powder can be formed on the tip surface 2.
The sample S1 can be held so as not to be spilled from a, and the sample S1 can be completely recovered after the analysis when analyzing an expensive sample.

Further, another embodiment will be described with reference to FIGS. FIG. 5 is a perspective view of the sample support 1, and FIG. 6 is an explanatory view of a cross section in a state where the sample support 1 of FIG.

In FIG. 5, the sample cup 13 has a plurality of support members 2. The support member 2 has a rod-like shape similar to that shown in FIGS. 1 to 4, and has a plurality of female screw portions 13 b formed on the bottom wall 13 a of the sample cup 13 as shown in FIG. Fixed together.
The number and position of the support members 2 are not particularly limited. Further, the air holes 20 may be appropriately provided in the bottom wall 13a.

Further, in FIG.
The outer periphery of 3 is provided with an engaging portion 11 formed of a triangular protrusion protruding in the radial direction and extending in the axial direction. on the other hand,
As shown in FIG. 6, the engaging portion 1 of the sample cup 13 is provided on the inner periphery of the sample holder 8 that houses the sample cup 13.
An engaged portion 19 formed of a triangular recess engaging with the first member 1 extends in the axial direction. Thereby, the positioning in the circumferential direction when the sample cup 13 is stored in the sample holder 8 can be performed.

On the other hand, the positioning of the sample holder 8 with respect to the Rθ table 56 shown in FIG. 11 is performed as follows.
That is, the sample holder 8 is provided from outside the X-ray analyzer.
The sample is conveyed to the sample inlet 62 of the X-ray analyzer, and the turntable 6 of the sample rotation direction positioning mechanism 65 provided in the inlet 62 is provided.
4 and is rotated together with the turntable 64 by the drive of the drive motor 63. The sample rotation direction positioning mechanism 65 includes a sensor 60 fixed to a peripheral portion of the input port 62.
The detected portion 61 provided on the outer peripheral surface of the sample holder 8 shown in FIG. 6 is detected by the sensor 60, the drive motor 63 is stopped, and the sample holder 8 is set to a predetermined rotational position. When the rotational position of the sample holder 8 is determined, the sample holder 8 is moved up and down and moved in parallel by the transport mechanism 66, and R
transported on the θ table 56. In this manner, the position of the sample holder 8 with respect to the Rθ table 56 is determined, so that the position coordinates of the plurality of support members 2 in the radial direction (R direction) and the rotation direction (θ direction) are determined. Therefore, Rθ
By driving the table 56, the tip surfaces 2a of the plurality of support members 2 can be set to the irradiation positions using the coordinates, and the sample S1 can be irradiated with X-rays accurately. The detected part 61
In the illustrated example, as shown in FIGS. 6 and 10,
Although the groove is elongated in the axial direction, it may be, for example, a protrusion as long as it can be detected by the sensor 60. Also,
Instead of the Rθ table, a two-dimensionally driven table such as an XY table movable in two orthogonal directions can be used as appropriate.

Note that the sample cup 3 having only one support member 2 as in the embodiment shown in FIGS. 1 and 2 is also positioned with respect to the sample holder 8 as shown in FIGS. May be adopted. Needless to say, a projection is provided on the sample holder 8 side,
A recess may be provided on the sample cup 13 side.

As shown in FIG. 6, since the sensor 60 is provided in the sample rotation direction positioning mechanism 65, the sample holder 8 can be positioned in the rotation direction (the direction of arrow a). In the present invention, an optical sensor can be used as the sensor 60 shown in FIG.
The position is detected from a change in the intensity of the reflected wave at the detected portion 61 such as a concave portion (may be a convex portion) provided on the outer periphery of.

Further, another embodiment will be described with reference to FIG. The sample support 21 has a sample cup 23
In addition, a rod-shaped support member 2 similar to that shown in FIG. 1 is screwed together so that the height can be adjusted, and a fine granular solid sample S2 is supported at the tip of the support member 2, that is, at a fixed position. Can be. The sample S2 is held, for example, at the tip of the support member 2 with an adhesive, and the film as shown in FIG. 1 is omitted. This makes it possible to easily set insect eggs and the like in the X-ray analyzer in addition to the stones in the universe.

Next, another embodiment will be described with reference to FIGS. FIG. 9 is an explanatory longitudinal sectional view of FIG. 8, and FIG. 10 is a view in which the sample support 31 of FIGS. 8 and 9 is attached to the sample holder 8 and set in the sample holder rotation direction positioning mechanism 65 of the X-ray analyzer. It is a longitudinal section explanatory view in a state.

As shown in FIG. 8, the main body 33 of the sample support 31 has a plate shape, and the sample S3 is held by dropping and drying on a film 34 stretched on one side shown in FIG. You. The main body 33 has a plurality of insertion holes 32, and the film 34 is attached to the main body 33 with an adhesive. After the film 34 is fixed, the main body 33 is turned over, the liquid sample is dropped into the insertion hole 32, dried, and the sample is attached to the back surface of the film 34. This body 33 also
An engaging portion 30 (see FIG. 8) formed of a protrusion is provided on the outer periphery,
As shown in FIG. 11, it is detachably mounted in the sample holder 8. The sample holder 8 includes a case 8c, a holding plate 8b, and a cap 8a, like the one shown in FIG. A sponge 9 as an elastic body and a holding table such as a hollow cup 35 are sequentially inserted into the case 8c,
The sample support 31 is placed on the open end of the hollow cup 35 and is held between the hollow cup 35 and the holding plate 8b. Since the X-rays applied to the sample S3 pass through S3 and then enter the hollow portion of the hollow cup 35, there is an advantage that scattered radiation from the hollow cup 35 is reduced.

In FIG. 10, this sample holder 8 also has
As in FIG. 6, the detection target 61 is provided, and the positioning in the circumferential direction can be performed by the sensor 60 provided in the sample rotation direction positioning mechanism 65. By driving (see FIG. 11), the predetermined insertion hole 32 of the sample support 31 is moved to the irradiation position, and the sample S3 can be accurately irradiated with X-rays.

[0030]

The sample holder for X-ray analysis and the X-ray of the present invention
According to the X-ray analyzer, a very small amount of a solid sample can be easily supported, easily set at a predetermined position of the X-ray analyzer, and the analysis accuracy can be improved.

[Brief description of the drawings]

FIG. 1 is a partially cutaway perspective view of a sample support attached to a sample holder according to an embodiment of the present invention.

FIG. 2 is a longitudinal sectional view showing a state where the sample support is attached to a sample holder.

FIG. 3 is a longitudinal sectional view showing a modification of the support member.

FIG. 4 is a vertical sectional view showing still another modification of the support member.

FIG. 5 is a perspective view showing a sample support according to a second embodiment.

6 is a cross-sectional view showing a state where the sample support of FIG. 5 is attached to a sample holder.

FIG. 7 is a perspective view showing a sample support in a third embodiment.

FIG. 8 is a perspective view of a plate-shaped main body of a sample support according to a fourth embodiment.

FIG. 9 is a longitudinal sectional view of FIG.

FIG. 10 is a longitudinal sectional view showing a state where the plate-shaped main body of FIG. 8 is attached to a sample holder.

FIG. 11 is a schematic configuration diagram of a fluorescent X-ray analyzer according to the present invention.

[Explanation of symbols]

1, 21, 31: sample support, 2: support member, 2a: tip surface, 2c: male screw part, 3, 13, 23: sample cup (bottomed cylindrical main body), 3a, 13a: bottom wall, 3b ,
13b ... female screw part, 3d ... opening, 4 ... film 5,
6 recess, 8 sample holder, 11 engaging portion, 32 insertion hole, 33 plate-shaped main body, 34 film, 60 sensor, S, S1, S2, S3 sample

────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission Date] September 28, 2001 (2001.9.2)
8)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Full text

[Correction method] Change

[Correction contents]

[Document Name] Statement

Patent application title: Sample holder for X-ray analysis and X-ray analyzer

[Claims]

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates includes a sample support member capable plurality holding a minute amount of specimen, the specimen holder and the X that can be set in the X-ray analysis apparatus such as a fluorescent X-ray analyzer The present invention relates to a line analyzer.

[0002]

2. Description of the Related Art An X-ray fluorescence analyzer is an apparatus for irradiating a sample with radiation such as primary X-rays and measuring the fluorescent X-rays generated from the sample to perform elemental analysis of the sample. In this analyzer, a sample holder is usually used in order to correctly set a sample at a primary X-ray irradiation position. When setting the minute amount of specimen in the specimen holder, viscosity Chakuzai, it is common to or fixed to the sample stage with adhesive tape.

[0003]

[SUMMARY OF THE INVENTION However, viscosity Chakuzai, how to fix with adhesive tape or the like, contaminating the sample, a fixed position of the sample is not constant.

SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems, and a sample holder for X-ray analysis which can easily hold a very small amount of sample at an accurate position and an X-ray provided with the sample holder.
It is intended to provide a line analyzer.

In order to achieve the above object, a sample holder of the present invention is a sample holder for X-ray analysis for holding a sample to be analyzed by an X-ray analyzer, wherein a sample support for supporting the sample is provided. The sample holder is detachably attached to a sample holder, and the sample supporter has a plate-shaped main body having one or more sample insertion holes, and covers one surface of the main body, and a sample inserted into the insertion hole is attached. And a film.
According to this configuration, the sample is supported on the film in the insertion hole by dropping and drying, so that the supporting position is constant. Further, since an adhesive or an adhesive tape is not used for holding the sample, the sample is not contaminated and the sample after the analysis can be collected. Furthermore, the sample holder can be used any number of times only by changing the film without the risk of contamination of the sample holder by the adhesive or the like.

[0006] In a preferred embodiment of the present invention, the engagement portion for positioning in the circumferential direction relative to the sample holder on the outer circumference of the body before <br/> Symbol sample support are provided. According to this configuration, positioning in the X-ray irradiation direction is easy.

Further, the X-ray analyzer according to the present invention is characterized in that
An X-ray analyzer for setting a sample holder for X-ray analysis on a table driven two-dimensionally and performing X-ray analysis of a sample held in the sample holder, wherein a position of the sample holder in a rotation direction is detected. A sample rotation direction positioning mechanism for rotating the sample holder and positioning the sample holder in the rotation direction based on a detection signal from the sensor before setting the sample holder on the table; Features. According to this configuration, the position of the sample holder with respect to the X-ray analyzer can be easily determined.

[0008]

Preferred embodiments of the present invention will be described below in detail with reference to the drawings. First, the outline of the fluorescent X-ray analyzer will be described. In FIG. 11, X
The radiation tube (radiation source) 50 emits primary X-rays (radiation) B1 and applies the primary X-rays to a sample S, which is a solid sample of a small amount of powder held by the sample support 1 in the sample holder 8. Irradiate B1. The primary X-ray B1 applied to the sample S
Is excited to generate a fluorescent X-ray B2 unique to the element. The fluorescent X-rays B2 from the sample S pass through the field-of-view limiting slit 51 and the first solar slit 52, enter the spectral crystal 53 at an incident angle θ, and have a predetermined wavelength that satisfies the Bragg equation. Only is diffracted at the same diffraction angle θ as the incident angle θ. The diffracted fluorescent X-ray B2 is
After passing through the solar slit 54, the X-ray detector 55
And is detected. The element analysis of the sample S is performed based on the detected value. The sample holder 8 is placed on an Rθ table 56 that performs linear movement and rotation in one direction,
By driving the table 56, the sample S is moved to an irradiation position and irradiated with X-rays.

As shown in FIG. 1, a sample support 1 according to a first reference example , which is not included in the present invention , includes a rod-shaped support member 2 on which a sample S1 is mounted on a front end surface, and a bottomed cylindrical main body. (Less than,
3) and the opening 3d of the main body 3
And a film 4 to be adhered to the sample S1.
The film 4 is held between the distal end surface 2 a of the rod-shaped support member 2 and the film 4.

The rod-shaped support member 2 has an elongated cylindrical portion 2b forming a tip end surface 2a on which the sample S1 is placed, and the cylindrical portion 2b.
b, the outer diameter of the male screw portion 2c is formed larger than the outer diameter of the cylindrical portion 2b. A groove 2d is formed in the groove. On the other hand, a female screw portion 3b is formed at the center of the bottom wall 3a of the sample cup 3, and the support member 2 is inserted into the cylinder from below the bottom wall 3a and screwed into the bottom wall 3a with a screwdriver or the like. And is erected at the center of the sample cup 3. The support member 2 is formed of a resin such as polypropylene.

The outer diameter of the rod-shaped support member 2 is small, and as shown in FIG.
1 almost completely covered. Therefore, the sample S1
Is held hollow, the amount of scattered radiation generated from members around the sample S1 is reduced, and the analysis accuracy is improved. This also reduces the need to consider a material that does not contain the target component when manufacturing the support member 2. Therefore, from the viewpoint of ease of molding and the like, it can be formed of the above-mentioned resin.

The sample cup 3 shown in FIG. 1 has an annular groove 3c formed on the outer periphery. The snap ring 7 is fitted into the groove 3c so that the film 4 covers the opening 3d with an appropriate tension. The film 4 is supported. By supporting the film 4 with the snap ring 7, the attachment / detachment of the film 4 becomes easy, and the film 4 can be easily replaced with a new one. However, the present invention is not limited to this. For example, the film 4 may be attached to the sample cup 3 with an adhesive or the like. The bottom wall 3a of the sample cup 3 is provided with an air hole 10 for the case where the inside is evacuated.

The film 4 is made of a resin such as polyester or polypropylene.

[0014] The sample support 1, as shown in FIG. 2, is used by being detachably attached to the sample holder 8. The sample holder 8 has a bottomed cylindrical case 8c and an annular holding plate 8b for holding the open end 3e of the sample cup 3.
And an annular cap 8a screwed to the case 8c so as to press the holding plate 8b against the case 8c. A sponge 9 which is an elastic body for pressing and fixing the sample support 1 is inserted into the bottom of the case 8c. The sample support 1 is placed on the sponge 9, and the opening 3d of the sample cup 3 is placed.
The cap 8a is turned and fixed to the case 8c while keeping the opening 8d of the holding plate 8b concentric. Sponge 9
Alternatively, an elastic body such as a coil spring may be used.
The sample holder 8 is formed of stainless steel, aluminum, or the like.

As shown in FIGS. 3 and 4, recesses 5 and 6 for accommodating the sample S1 may be provided on the distal end surface 2a of the support member 2. The recess 5 in FIG. 3 has a circular counterbore in the axial direction, and the recess 6 in FIG. 4 has a mortar shape. Due to the recesses 5 and 6, particularly, a very small sample S 1 such as powder can be formed on the tip surface 2.
The sample S1 can be held so as not to be spilled from a, and the sample S1 can be completely recovered after the analysis when analyzing an expensive sample.

[0016] Furthermore, with reference to FIGS. 5 and 6, the onset
A second reference example that is not included in the description will be described. FIG. 5 is a perspective view of the sample support 1, and FIG. 6 is a perspective view of the sample support 1 of FIG.
FIG. 3 is an explanatory view of a cross section in a state where the is stored in a sample holder 8.

In FIG. 5, the sample cup 13 has a plurality of support members 2. The support member 2 has a rod-like shape similar to that shown in FIGS. 1 to 4, and has a plurality of female screw portions 13 b formed on the bottom wall 13 a of the sample cup 13 as shown in FIG. Fixed together.
The number and position of the support members 2 are not particularly limited. Further, the air holes 20 may be appropriately provided in the bottom wall 13a.

Further, in FIG.
The outer periphery of 3 is provided with an engaging portion 11 formed of a triangular protrusion protruding in the radial direction and extending in the axial direction. on the other hand,
As shown in FIG. 6, the engaging portion 1 of the sample cup 13 is provided on the inner periphery of the sample holder 8 that houses the sample cup 13.
An engaged portion 19 formed of a triangular recess engaging with the first member 1 extends in the axial direction. Thereby, the positioning in the circumferential direction when the sample cup 13 is stored in the sample holder 8 can be performed.

On the other hand, the positioning of the sample holder 8 with respect to the Rθ table 56 shown in FIG. 11 is performed as follows.
That is, the sample holder 8 is provided from outside the X-ray analyzer.
The sample is conveyed to the sample inlet 62 of the X-ray analyzer, and the turntable 6 of the sample rotation direction positioning mechanism 65 provided in the inlet 62 is provided.
4 and is rotated together with the turntable 64 by the drive of the drive motor 63. The sample rotation direction positioning mechanism 65 includes a sensor 60 fixed to a peripheral portion of the input port 62.
The detected portion 61 provided on the outer peripheral surface of the sample holder 8 shown in FIG. 6 is detected by the sensor 60, the drive motor 63 is stopped, and the sample holder 8 is set to a predetermined rotational position. When the rotational position of the sample holder 8 is determined, the sample holder 8 is moved up and down and moved in parallel by the transport mechanism 66, and R
transported on the θ table 56. In this manner, the position of the sample holder 8 with respect to the Rθ table 56 is determined, so that the position coordinates of the plurality of support members 2 in the radial direction (R direction) and the rotation direction (θ direction) are determined. Therefore, Rθ
By driving the table 56, the tip surfaces 2a of the plurality of support members 2 can be set to the irradiation positions using the coordinates, and the sample S1 can be irradiated with X-rays accurately. The detected part 61
In the illustrated example, as shown in FIGS. 6 and 10,
Although the groove is elongated in the axial direction, it may be, for example, a protrusion as long as it can be detected by the sensor 60. Also,
Instead of the Rθ table, a two-dimensionally driven table such as an XY table movable in two orthogonal directions can be used as appropriate.

It should be noted that the present invention shown in FIGS.
The sample cup 3 having only one support member 2 as in the first reference example not included is also configured to be capable of positioning with respect to the sample holder 8 as shown in FIGS. Good. Needless to say, a projection may be provided on the sample holder 8 side and a recess may be provided on the sample cup 13 side.

As shown in FIG. 6, since the sensor 60 is provided in the sample rotation direction positioning mechanism 65, the sample holder 8 can be positioned in the rotation direction (the direction of arrow a). In the present invention, an optical sensor can be used as the sensor 60 shown in FIG.
The position is detected from a change in the intensity of the reflected wave at the detected portion 61 such as a concave portion (may be a convex portion) provided on the outer periphery of.

Further, FIG. 7 does not include the present invention .
A third reference example will be described. The sample support 21 is formed by screwing a rod-shaped support member 2 similar to that shown in FIG. 1 to a sample cup 23 so that the height can be adjusted. That is, it can be supported at a fixed position. The sample S2 is held, for example, at the tip of the support member 2 with an adhesive, and the film as shown in FIG. 1 is omitted. This allows
In addition to cosmic stones, insect eggs can be easily set on the X-ray analyzer.

Next, based on FIGS. 8 to 10, an embodiment of the present invention. FIG. 9 is an explanatory longitudinal sectional view of FIG. 8, and FIG. 10 is a view in which the sample support 31 of FIGS. 8 and 9 is attached to the sample holder 8 and set in the sample holder rotation direction positioning mechanism 65 of the X-ray analyzer. It is a longitudinal section explanatory view in a state.

As shown in FIG. 8, the main body 33 of the sample support 31 has a plate shape, and the sample S3 is held by dropping and drying on a film 34 stretched on one side shown in FIG. You. The film 34 is made of polyester, polyp,
It is made of a resin such as propylene. The main body 33
It has a plurality of insertion holes 32, and the film 34 is attached to the main body 33 with an adhesive. After the film 34 is fixed, the main body 33 is turned over, the liquid sample is dropped into the insertion hole 32, dried, and the sample is attached to the back surface of the film 34. The main body 33 is also provided with an engaging portion 3 having a projection on the outer periphery.
0 (see FIG. 8), and is detachably mounted in the sample holder 8 as shown in FIG. Sample holder 8
Comprises a case 8c, a holding plate 8b, and a cap 8a, like the one shown in FIG. A sponge 9 as an elastic body and a holding table such as a hollow cup 35 are sequentially inserted into the case 8c, the sample support 31 is placed on the open end of the hollow cup 35, and the holding plate 8b Is gripped between. Since the X-rays applied to the sample S3 pass through S3 and then enter the hollow portion of the hollow cup 35, there is an advantage that scattered radiation from the hollow cup 35 is reduced.

In FIG. 10, this sample holder 8 also has
As in FIG. 6, the detection target 61 is provided, and the positioning in the circumferential direction can be performed by the sensor 60 provided in the sample rotation direction positioning mechanism 65. By driving (see FIG. 11), the predetermined insertion hole 32 of the sample support 31 is moved to the irradiation position, and the sample S3 can be accurately irradiated with X-rays.

[0026]

The sample holder for X-ray analysis and the X-ray of the present invention
According to the X-ray analyzer, a very small amount of a solid sample can be easily supported, easily set at a predetermined position of the X-ray analyzer, and the analysis accuracy can be improved.

[Brief description of the drawings]

FIG. 1 is a partially cutaway perspective view of a sample support attached to a sample holder according to a first reference example not included in the present invention.

FIG. 2 is a longitudinal sectional view showing a state where the sample support is attached to a sample holder.

FIG. 3 is a longitudinal sectional view showing a modification of the support member.

FIG. 4 is a vertical sectional view showing still another modification of the support member.

FIG. 5 is a perspective view showing a sample support in a second reference example not included in the present invention.

6 is a cross-sectional view showing a state where the sample support of FIG. 5 is attached to a sample holder.

FIG. 7 is a perspective view showing a sample support in a third reference example not included in the present invention.

FIG. 8 is a perspective view of a plate-shaped main body of the sample support according to the embodiment of the present invention .

FIG. 9 is a longitudinal sectional view of FIG.

FIG. 10 is a longitudinal sectional view showing a state where the plate-shaped main body of FIG. 8 is attached to a sample holder.

FIG. 11 is a schematic configuration diagram of a fluorescent X-ray analyzer according to the present invention.

[Description of Signs] 1, 21, 31: sample support, 2: support member, 2a: distal end face, 2c: male screw part, 3, 13, 23: sample cup (bottomed cylindrical body), 3a, 13a ... bottom wall, 3b,
13b ... female screw part, 3d ... opening, 4 ... film 5,
6 recess, 8 sample holder, 11 engaging portion, 32 insertion hole, 33 plate-shaped main body, 34 film, 60 sensor, S, S1, S2, S3 sample

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Koichi Aoyagi 14-8 Akaojimachi, Takatsuki-shi, Osaka Rigaku Electric Industry Co., Ltd. F-term (reference) 2G001 AA01 BA04 CA01 GA01 GA13 JA08 KA01 MA04 QA01 QA02 QA10 RA08 SA01

Claims (7)

[Claims] An X-ray analysis sample holder for holding a sample to be analyzed by an X-ray analyzer, wherein a sample support for supporting the sample is detachably attached to the sample holder. The support tool has a bottomed cylindrical body,
The apparatus includes one or more rod-shaped support members that are erected on the bottom wall of the main body and support the sample at the distal end surface, and a film that covers the opening of the main body and supports the sample between the support member and the support member. X-ray analysis sample holder. 2. The X-ray analysis sample holder according to claim 1, wherein the rod-shaped support member is screwed to a bottom wall of the main body so as to be able to advance and retreat toward the film. 3. The sample holder for X-ray analysis according to claim 1, wherein a concave portion is provided on a tip end surface of the rod-shaped support member. 4. An X-ray analysis sample holder for holding a sample to be analyzed by an X-ray analyzer, wherein a sample supporter for supporting the sample is detachably attached to the sample holder. The support tool has a bottomed cylindrical body,
A sample holder for X-ray analysis, comprising: one or more rod-shaped support members, which are erected on the bottom wall of the main body so as to be adjustable in height, and whose tip surface supports the sample. 5. An X-ray analysis sample holder for holding a sample to be analyzed by an X-ray analyzer, wherein a sample support for supporting the sample is detachably attached to the sample holder. An X-ray analysis sample holder comprising: a support having a plate-shaped main body having at least one sample insertion hole; and a film covering one surface of the main body and having a sample to be inserted into the insertion hole adhered thereto. 6. The X-ray analysis sample according to claim 1, further comprising an engaging portion provided on an outer periphery of the main body of the sample support for positioning in a circumferential direction with respect to a sample holder. holder. 7. An X-ray for setting the sample holder for X-ray analysis according to any one of claims 1 to 6 on a table driven two-dimensionally and performing X-ray analysis of the sample held in the sample holder. An analyzer, comprising: a sensor for detecting a position of the sample holder in a rotation direction, and before being set on the table, the sample holder is rotated to drive the sample holder based on a detection signal from the sensor. An X-ray analyzer comprising a sample rotation direction positioning mechanism for positioning the sample in the rotation direction.