JP2014038035A - X-ray detecting apparatus, and sample mounting body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an X-ray detecting apparatus and a sample mounting body that allow easy fixing of an X-ray transmitting membrane, in an extended state to prevent wrinkling, folding or the like, to a sample mount, and obtain satisfactory analysis accuracy.SOLUTION: A sample mount 1 of an X-ray detecting apparatus is provided with a base plate 11, a press-fixing body 12, and a fitting body 13. The base plate 11 has a rectangular board shape, having in its peripheral part a protruding accommodation part 111 for accommodating the press-fixing body 12 and the fitting body 13 and in its central part a cylinder-shaped protruding part 112. The press-fixing body 12 has an annular shape. The fitting body 13 is shaped like a disk and has a through hole in the central part and a recess 133 on the rear side. In the accommodation part 111 of the base plate 11, an X-ray transmitting membrane 14 is mounted in a state in which the central part is in contact with the protruding part 112 and, after the press-fixing body 12 is so snapped in as to press the periphery of the X-ray transmitting membrane 14, the recess 133 is snapped onto the protruding part 112.

Description

  The present invention includes an X-ray detection apparatus that irradiates a sample with X-rays and detects fluorescent X-rays generated from the sample, and a substrate. The sample is placed via an X-ray transmission film, and X The present invention relates to a sample mounting body used for detecting fluorescent X-rays generated by irradiating rays.

  X-ray fluorescence analysis is an analysis technique in which X-rays are irradiated to a sample, fluorescent X-rays generated from the sample are detected, and elements contained in the sample are qualitatively analyzed or quantitatively analyzed from the spectrum of the fluorescent X-rays. . An X-ray detection apparatus generally includes a sample mounting table on which a sample is mounted via a circular X-ray transmission film, and an X-ray irradiation unit that irradiates the sample mounted on the sample mounting table with X-rays. An X-ray detector that detects X-rays generated from the sample, and a collimator that narrows down the X-rays that the X-ray irradiation unit irradiates the sample (for example, Patent Document 1). The X-ray permeable membrane is used to seal the opening of the sample mounting portion of the apparatus in order to prevent the detection sensitivity from being lowered due to fogging or the like in a corrosive atmosphere. As the X-ray permeable film, for example, a sheet-like organic thin film made of a synthetic resin that easily transmits X-rays such as polyethylene terephthalate or polypropylene is used.

The sample mounting table includes a substrate and a mounting body that can be attached to and detached from the substrate. Both the substrate and the mounting body have through holes. An X-ray permeable membrane is stretched so as to close the through hole, and the X-ray permeable membrane is fixed in a state of being sandwiched between the substrate and the mounting body. That is, with the mounting body removed, an X-ray transmission film is stretched in the through hole of the substrate, and the X-ray transmission film is fixed by mounting the mounting body on the substrate. The sample is placed on the upper side of the X-ray permeable membrane.
In addition, the X-ray permeable membrane is set in a state where the X-ray permeable membrane is stretched on a mounting part separate from the apparatus, and the mounting part is fitted on the sample mounting base and fixed to the sample mounting base, and then the mounting part is removed. There are also X-ray detection devices.

JP 2012-088196 A

When the X-ray permeable membrane is fixed to the sample mounting table in a state where the X-ray transmission film is bent, wrinkled, bent, or the like, there is a problem that the accuracy of the fluorescent X-ray analysis is lowered due to scattering or the like. In addition, since a shadow is generated, there is a problem in that good imaging cannot be obtained when a sample is imaged through an X-ray transmission film.
Therefore, when the mounting body is mounted on the substrate, the mounting body is fitted into the substrate while pulling the peripheral portion of the X-ray permeable membrane by hand so that bending, wrinkling, folding, etc. do not occur. For this reason, the work becomes complicated, and it is difficult to spread the film uniformly over the entire circumference of the X-ray permeable membrane.
And when it was comprised so that a mounting body might be attached to a board | substrate after attaching a board | substrate to an apparatus main body, there existed a problem that it was difficult to attach the above-mentioned attachment component to a board | substrate.

  The present invention has been made in view of such circumstances, and the X-ray permeable membrane can be easily fixed in a stretched state so as not to bend, wrinkle, bend, etc., and good analysis accuracy can be obtained. It is an object of the present invention to provide an X-ray detection apparatus and a sample mounting body.

  An X-ray detection apparatus according to the present invention has a substrate and irradiates a sample placing body on which a sample is placed via an X-ray transmission film, and the sample placed on the sample placing body with X-rays. In an X-ray detection apparatus comprising an X-ray irradiation unit and an X-ray detector for detecting X-rays generated from the sample, the sample mounting body has a fitting part on a substrate, and the fitting of the substrate A holding body that holds and holds the X-ray permeable membrane outside the joint portion and a fitted portion that is fitted to the fitting portion, and between the fitted portion and the fitting portion And an attachment body attached to the substrate in a state where the X-ray transmission membrane is sandwiched between the attachment member and the substrate.

Here, “fitting” means that the fitted portion is fitted with no gap (close state) in the fitting portion, and the fitted portion is fitted with a gap in the fitting portion. The case where it is loosely fitted.
In the present invention, the mounting body is fitted in a state where a pressing body is pressed in advance in a state where the X-ray permeable membrane is sandwiched between the peripheral side portion (outer side portion) of the substrate, and tension is thereby generated. Since the joint portion is fitted into the fitting portion of the substrate, the X-ray permeable membrane is easily and reliably fixed to the substrate in a stretched state. Therefore, the occurrence of bending, wrinkling, folding, etc. in the X-ray permeable membrane is suppressed. Therefore, X-rays can be satisfactorily irradiated onto the sample without scattering, and when the sample is photographed, it can be photographed well, and good analysis accuracy can be obtained.
And unlike the attachment parts for the X-ray permeable membrane of the conventional X-ray detection apparatus, the holding body is a component part of the sample mounting body, and is configured so as to be substantially on the same plane as the mounting body. The sample can be mounted on the sample mounting body without any unevenness.

  In the X-ray detection apparatus according to the present invention, the fitting portion is a protruding portion having a cylindrical shape, the mounting body has a flat plate shape, and the fitted portion is a concave portion fitted into the protruding portion. It is characterized by being.

  In the present invention, at the time of fitting, the X-ray permeable membrane is fixed in a state in which it is satisfactorily pulled radially toward the outer peripheral portion.

  In the X-ray detection apparatus according to the present invention, the substrate has a peripheral wall portion on the inner side of a peripheral edge, the holding body has a ring shape, is externally fitted to the mounting body, and is internally fitted to the peripheral wall portion. It is characterized by that.

Here, “outer fitting” means fitting outside, and “inner fitting” means fitting inside. There may or may not be a gap between the mounting body and the holding body and between the holding body and the peripheral wall portion.
In the present invention, tension can be easily applied to the X-ray permeable membrane uniformly in the circumferential direction.
Further, even after the substrate is attached to the housing of the apparatus main body, the pressing body and the mounting body can be easily fitted into the peripheral wall portion of the substrate, and the workability is good.

  In the X-ray detection apparatus according to the present invention, the holding body is fitted in the mounting body with a gap, and a leg portion provided in the sample cell is provided between the mounting body and the holding body. It is configured to be insertable.

  In the present invention, the sample cell having the legs can be easily and securely fixed to the sample mounting table.

  The X-ray detection apparatus according to the present invention is characterized in that the mounting body and the pressing body are integrated.

  In the present invention, the mounting operation of the mounting body on the substrate is simplified.

  An X-ray detection apparatus according to the present invention has a substrate and irradiates a sample placing body on which a sample is placed via an X-ray transmission film, and the sample placed on the sample placing body with X-rays. In an X-ray detection apparatus including an X-ray irradiation unit and an X-ray detector for detecting X-rays generated from the sample, the sample mounting body is provided with a first fitting unit on a substrate, and the first A second fitting portion is provided outside the fitting portion, has a flat plate shape, is fitted to the first fitting portion, and the outside of the first fitted portion. A second fitted portion fitted to the second fitting portion, and the X-ray permeable membrane is interposed between the first fitting portion and the first fitted portion. A mounting body mounted on the substrate in a sandwiched state is provided.

  In the present invention, the first fitting portion of the mounting body can be fitted to the first fitting portion of the substrate in a state where the peripheral side portion of the X-ray permeable membrane is pressed and tension is generated with a simple configuration. The X-ray permeable membrane can be easily and reliably fixed to the substrate in a stretched state. Therefore, the occurrence of bending, wrinkling, folding, etc. in the X-ray permeable film is suppressed, and the X-ray can be irradiated to the sample satisfactorily without scattering. You can shoot.

  The sample mounting body according to the present invention has a substrate, and a sample used for detecting a fluorescent X-ray generated by placing the sample via an X-ray transmission film and irradiating the sample with X-rays. In the mounting body, a holding member having a fitting portion on the substrate and pressing and stopping the X-ray permeable film on a peripheral side portion of the substrate, and a fitting portion fitted to the fitting portion And a mounting body mounted on the inside of the holding body of the substrate in a state where the X-ray transmission film is sandwiched between the fitted portion and the fitting portion. Features.

  In the present invention, the mounting body is fitted in a state where a pressing body is pressed in advance in a state where the X-ray permeable membrane is sandwiched between the peripheral side portion (outer side portion) of the substrate, and tension is thereby generated. Since the joint portion is fitted into the fitting portion of the substrate, the X-ray permeable membrane is easily and reliably fixed to the substrate in a stretched state. Therefore, the occurrence of bending, wrinkling, folding, etc. in the X-ray permeable membrane is suppressed.

According to the present invention, the peripheral portion of the X-ray permeable membrane is pressed by the pressing body, and the fitting portion of the mounting body is fitted to the fitting portion of the substrate in a state where tension is generated. The X-ray permeable membrane can be fixed to the substrate in a stretched state. Therefore, the occurrence of bending, wrinkling, folding, etc. in the X-ray permeable film is suppressed, and the X-ray can be irradiated to the sample satisfactorily without scattering. Images can be taken and good analysis accuracy can be obtained.
Unlike the conventional mounting parts, the holding body is a component part of the sample mounting body, and is configured to be substantially on the same plane as the mounting body, so that the sample can be placed on the sample mounting body without unevenness. can do.

It is a typical perspective view which shows the structure of the principal part of the X-ray detection apparatus which concerns on Embodiment 1 of this invention. It is the II-II sectional view taken on the line of FIG. It is a disassembled perspective view which shows a sample mounting base. FIG. 4A is a back view showing the holding body of the sample mounting table, and FIG. 4B is a back view showing the mounting body of the sample mounting table. It is sectional drawing which shows a sample mounting base. It is a perspective view which shows the external appearance of a X-ray detection apparatus. It is sectional drawing which shows the other example of a mounting body. FIG. 8A is a cross-sectional view showing a sample mounting table according to Embodiment 2 of the present invention, and FIG. 8B is a partially enlarged view showing a case where a mounting body is mounted on a substrate. It is sectional drawing which shows the sample mounting base which concerns on Embodiment 3 of this invention.

Hereinafter, the present invention will be specifically described with reference to the drawings showing embodiments thereof.
Embodiment 1 FIG.
1 is a schematic perspective view showing a configuration of a main part of an X-ray detection apparatus 10 according to Embodiment 1 of the present invention, and FIG. 2 is a cross-sectional view taken along the line II-II in FIG.
The X-ray detection apparatus 10 detects fluorescent X-rays generated by irradiating the sample S1 with X-rays, and performs an X-ray fluorescence analysis for measuring a fluorescent X-ray spectrum or analyzing elements contained in the sample. It is.
The X-ray detection apparatus 10 includes a sample mounting table (sample mounting body) 1, a collimator 2, an X-ray irradiation unit 4, an X-ray detector 5, an image sensor 61, and a linear drive motor 7. The sample mounting table 1 has a horizontal plate shape, and supports the sample S1 by mounting the sample S1. A through hole 131 is provided at the center of the sample mounting table 1. The sample S <b> 1 is placed on the X-ray permeable film 14 so as to close the through hole 131.
Further, a sample cell S2 (shown by a broken line in FIG. 2) may be placed on the X-ray permeable membrane 14. The sample cell S2 has a cylindrical main body S2a, and a plate portion S2b is provided at a predetermined height from the lower opening of the main body S2a. In the sample cell S2, a liquid sample is injected from the upper opening of the main body S2a and stored. The sample cell S2 is configured to insert a leg portion, which is a portion below the plate portion S2b of the main body S2a, into a gap between a pressing body 12 and a mounting body 13, which will be described later.

Hereinafter, the sample S1 will be described as an example.
Below the sample mounting table 1, the above-described X-ray irradiation unit 4 that irradiates the mounted sample S1 with X-rays, the collimator 2 that narrows the X-rays from the X-ray irradiation unit 4, and the fluorescence X generated from the sample S1 An X-ray detector 5 for detecting a line is arranged. In FIG. 2, the X-ray irradiation unit 4 and the X-ray detector 5 are simplified and shown in a cross section, but actually, the X-ray irradiation unit 4 and the X-ray detector 5 are configured by a plurality of components. The interior also contains cavities.

  The sample mounting table 1 includes a substrate 11, a pressing body 12, and a mounting body 13. A mounting body 13 is fitted in the center of the substrate 11, and a holding body 12 is fitted outside the mounting body 13. An X-ray transmission film 14 is sandwiched between the substrate 11, the pressing body 12 and the mounting body 13. The X-ray permeable film 14 is a circular sheet made of a synthetic resin that easily transmits X-rays, such as polyethylene terephthalate or polypropylene. The X-ray permeable membrane 14 may have a polygonal shape. The configuration of the sample mounting table 1 will be described later.

  The X-ray irradiation unit 4 is disposed at a position where X-rays are irradiated obliquely from below on the lower surface of the sample S1 mounted on the sample mounting table 1. The X-ray irradiation unit 4 is configured by using an X-ray tube, and is arranged with the X-ray emission end directed toward the through hole 131 of the sample mounting table 1. The X-ray detector 5 is disposed at a position where it can detect fluorescent X-rays emitted obliquely downward from the lower surface of the sample S1 mounted on the sample mounting table 1. The X-ray detector 5 is configured by using an X-ray detection element such as an Si element, and is arranged with the incident end of the fluorescent X-ray directed toward the through hole 131 of the sample mounting table 1. That is, the X-ray irradiation unit 4 and the X-ray detector 5 are arranged on the same surface side with respect to the flat sample mounting table 1, and the X-ray exit and the fluorescent X-ray entrance are placed on the sample mounting. It arrange | positions toward the predetermined predetermined part of the mounting base 1. FIG. The irradiation axis of the X-ray irradiation unit 4 and the incident axis of the X-ray detector 5 do not need to overlap at one point on the sample mounting table 1, and X-rays from the X-ray irradiation unit 4 on the sample mounting table 1 It is only necessary that the irradiation range and the X-ray incidence range from the sample mounting table 1 to the X-ray detector 5 overlap. In addition, the X-ray irradiation unit 4 and the X-ray detector 5 are arranged at positions symmetrical to a virtual central axis that passes through the center of the through hole 131 perpendicular to the flat plate-like sample mounting table 1. It is placed close to. In FIG. 2, a virtual central axis is indicated by a one-dot chain line. The sample S1 is irradiated with X-rays from the X-ray irradiating unit 4, fluorescent X-rays are generated in the sample S1, and the fluorescent X-rays are detected by the X-ray detector 5. In FIG. 2, X-rays irradiated from the X-ray irradiation unit 4 to the sample S1 and fluorescent X-rays generated from the sample S1 and detected by the X-ray detector 5 are indicated by broken lines.

  The collimator 2 is disposed on the X-ray path from the X-ray irradiation unit 4 to the sample mounting table 1 immediately below the sample mounting table 1. The collimator 2 is formed in a plate shape using a metal as a material, and an aperture is formed. When the aperture hole is positioned on the X-ray path, the X-ray is irradiated from the X-ray irradiation unit 4 to the sample S1 through the aperture hole. X-rays that do not pass through the aperture are shielded by the collimator 2. The collimator 2 is connected to a window (not shown) that allows light to pass through. The window part is comprised using transparent members, such as an acrylic board. An imaging element 61 such as a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor is provided immediately below the through hole 131. The X-ray detection apparatus 10 includes a light emitting element (not shown) such as a light emitting diode. The light emitting element emits light in a state where the window portion is located directly below the through hole 131, the light passes through the window portion, is reflected by the sample S 1, passes through the window portion, and enters the image sensor 61. As described above, the sample S1 is photographed. The collimator 2 is moved along the lower surface of the sample mounting table 1 by a linear drive motor 7.

The X-ray detection apparatus 10 includes a control unit (not shown) that controls the operation of the X-ray irradiation unit 4 and the like. When the window portion is directly below the through hole 131, the control unit does not cause the X-ray irradiation unit 4 to emit X-rays. Note that the X-ray detector device may not include the imaging element 61, the window, and the light emitting element.
Further, the X-ray detection apparatus 10 includes a signal processing unit (not shown) that executes signal processing for fluorescent X-ray measurement. The X-ray detector 4 outputs a signal proportional to the detected energy of the fluorescent X-ray to the signal processing unit, and the signal processing unit counts the signal of each value and detects the fluorescent X-ray detected by the X-ray detector 5. The process of acquiring the relationship between the energy and the count number, that is, the spectrum of fluorescent X-rays is performed. The X-ray detector 5 may be configured to detect fluorescent X-rays separately for each wavelength. Further, the signal processing unit may be configured to also execute a fluorescent X-ray analysis process for performing a qualitative analysis or a quantitative analysis of an element contained in a sample based on a fluorescent X-ray spectrum.

Hereinafter, the sample mounting table 1 will be described in detail.
3 is an exploded perspective view showing the sample mounting table 1, FIG. 4A is a back view showing the holding body 12 of the sample mounting table 1, FIG. 4B is a back view showing the mounting body 13 of the sample mounting table 1, and FIG. 1 is a cross-sectional view showing a mounting table 1.
The substrate 11 has a rectangular plate shape. Screw insertion holes 114 are provided at four corners of the substrate 11. A cylindrical storage portion (peripheral wall portion) 111 that stores the pressing body 12 and the mounting body 13 protrudes slightly inside the portion of the substrate 11 where the screw insertion hole 114 is provided. The outer edge of the storage part 111 has a rectangular shape with rounded corners, and the inner edge has a circular shape.
Moreover, the board | substrate 11 has the protrusion part (fitting part) 112 which makes a round cylinder shape in the center part. An opening 113 corresponding to the inner wall surface of the protruding portion 112 passes through the bottom surface of the storage portion 111, that is, passes through the substrate 11.

  The pressing body 12 has an annular shape. As shown in FIGS. 4A and 5, the pressing body 12 has a tapered surface 121 on the inner edge on the back side, and is configured to be easily attached and detached. The pressing body 12 is not limited to an annular shape, and may be a rectangular shape.

The mounting body 13 has a disk shape. As shown in FIGS. 4B and 5, the through-hole 131 is provided in the central portion of the mounting body 13, and semicircular notches 132 are provided in both radial end portions. The mounting body 13 is easily attached and detached by the notch 132.
On the back side of the mounting body 13, a concave portion 133 (fitted portion) having a circular shape whose diameter is larger than the diameter of the through hole 131 in a plan view is provided.
The outer diameter of the mounting body 13 is slightly smaller than the inner diameter of the retaining body 12.

In the sample mounting table 1 configured as described above, first, the substrate 11 is inserted into a housing 83 of the apparatus main body, which will be described later, and a screw is inserted into the screw insertion hole 114 and screwed.
The X-ray transmission film 14 is placed in the storage portion 111 of the substrate 11 with the central portion in contact with the protruding portion 112, and a pressing body is pressed so as to press the peripheral side portion of the X-ray transmission film 14. 12 is fitted. In a state where the X-ray transmissive film 14 is sandwiched, the pressing body 12 is pressed so that the bottom surface of the pressing body 12 comes into contact with the substrate plane (bottom surface) inside the storage unit 111. Radial tension is applied.

And the recessed part 133 of the mounting body 13 is fitted to the protrusion part 112 of the board | substrate 11, and the mounting body 13 is mounted | worn on the board | substrate 11 (refer FIG. 2).
Since the X-ray permeable membrane 14 is tensioned by the presser 12 in advance, the X-ray permeable membrane 14 is bent, wrinkled, or broken when the concave portion 133 is fitted to the protruding portion 112. Is suppressed. In other words, tension is easily applied to the X-ray permeable membrane 14 from the central portion toward the outer edge obliquely downward by simply fitting the retaining body 12 into the storage portion 111 without using any mounting parts as in the prior art. In addition, since the pressing body 12 has a ring shape, the X-ray permeable membrane 14 can be spread evenly in the circumferential direction, and the mounting body 13 can be attached to the projecting portion 112 without loosening the stretched state. Can be fitted. Then, the holding body 12 and the mounting body 13 are configured to be substantially on the same plane when fitted to the substrate 11, so that the holding body 12 becomes a part of the mounting stage of the sample S1, and the sample S1. Can be placed on a surface without unevenness, and the sample S1 can be prevented from being tilted or moved.
When the sample cell S2 is used, the leg portion of the main body S2a of the sample cell S2 is inserted into the gap between the mounting body 13 and the holding body 12, and the plate portion S2b is brought into contact with the mounting body 13 and the X-ray permeable membrane 14. By making contact, the sample cell S2 can be satisfactorily fixed to the sample mounting table 1.
When removing the X-ray permeable membrane 14, after removing either the mounting body 13 or the holding body 12 first, the other is removed, and the X-ray permeable membrane 14 is taken out from the storage unit 111.

  FIG. 6 is a perspective view showing the external appearance of the X-ray detection apparatus 10. A main part of the X-ray detection apparatus 10 is housed in a housing 83 together with other parts (not shown) such as a power supply unit, and a part of the housing 83 is formed of a resin member 82. The casing 83 is covered with a metal lid 81. FIG. 6 shows a state where the lid 81 is opened. The lid 81 has a shape in which one end of a flat plate is bent, and the bent end is a movable end. The end opposite to the bent end is a connecting end connected to the casing 83 by a hinge, and the lid 81 can be opened and closed with respect to the casing 83 by the operation of the hinge. When the lid 81 is closed, the movable end of the lid 81 is fixed to the housing 83 by a stopper, and the upper side of the housing 83 is covered by the lid 81. When the lid 81 is opened, the upper side of the housing 83 is opened. An opening is formed at the center of the upper surface of the housing 83, and the above-described sample mounting table 1 is disposed in the opening. The upper surface of the mounting body 13 and the upper surface of the housing 83 are on substantially the same plane. Parts other than the sample mounting table 1 of the main part of the X-ray detection apparatus 10 are disposed inside the housing 83.

In the X-ray detection apparatus 10 configured as described above, the X-ray transmission film 14 is provided so as to close the through-hole 131 in a state in which the occurrence of deflection or the like is suppressed. When X-rays are irradiated from X to X-rays, X-rays are not scattered and the sample S1 can be irradiated with X-rays satisfactorily. Since the X-ray transmission film 14 is suppressed from being bent or the like, a shadow is not generated, and the sample S1 can be imaged satisfactorily by the image sensor 61. Therefore, good analysis accuracy can be obtained.
In addition, even after the substrate 11 is attached to the housing 83, the pressing body 12 and the mounting body 13 can be easily fitted into the storage portion 111 of the substrate 11, and workability is good.

In addition, in this Embodiment, although demonstrated about the case where the mounting body 13 is loosely fitted to the presser body 12, it is not limited to this. In the case where it is not considered to fix the sample cell S2 to the sample mounting table 1, the fitting may be performed so that no gap is generated between the mounting body 13 and the holding body 12.
Moreover, you may decide to comprise so that there may be a clearance gap between the pressing body 12 and the accommodating part 111. FIG.

  Moreover, it is not limited to when the pressing body 12 and the mounting body 13 are separate bodies. As shown in FIG. 7, the holding body 23 may be configured by integrating the holding body 12 and the mounting body 13. In FIG. 7, the same parts as those in FIG. The mounting body 23 includes a through-hole 231 and a recess 233 that fits around the protruding portion 112 of the substrate 11. Even in this case, the side surface of the mounting body 23 is pressed against the inner wall of the storage portion 111 with the X-ray permeable membrane 14 interposed therebetween, and the recess 233 is formed on the protruding portion 112 while the X-ray permeable membrane 14 is tensioned. Mated. In this case, the mounting work of the mounting body 13 on the substrate 11 is simplified.

  Further, in the above-described embodiment, the case where the substrate 11 has the protruding portion 112, the mounting body 13 has the concave portion 133, and the mounting body 13 is fitted to the protruding portion 112 has been described. It is not limited to. The substrate 11 is provided with a concave portion (fitting portion), and the mounting body 13 is provided with a convex portion (fitted portion). The convex portion is fitted into the concave portion and the mounting body 13 is attached to the substrate 11. In this case as well, the peripheral side portion of the X-ray transmission film 14 is previously held by the pressing body 12.

Embodiment 2. FIG.
The X-ray detection apparatus according to the second embodiment of the present invention has the same configuration as the X-ray detection apparatus 10 according to the first embodiment except that the configuration of the sample mounting table 30 is different.
FIG. 8A is a cross-sectional view showing the sample mounting table 30 according to Embodiment 2 of the present invention, and FIG. 8B is a partially enlarged view when the mounting body 33 is mounted on the substrate 31.
The sample mounting table 30 includes a substrate 31 and a mounting body 33. Unlike the sample mounting table 1 according to the first embodiment, the sample mounting table 30 is integrated with a mounting body 33.
The substrate 31 has a rectangular plate shape. A cylindrical storage portion 311 that stores the mounting body 33 protrudes slightly inside the substrate 31. The outer edge of the storage portion 311 has a quadrangular shape with rounded corners, and the inner edge has a circular shape.
Further, the substrate 31 has a protruding portion (first fitting portion) 312 having a round cylindrical shape at the center. An opening 313 corresponding to the inner wall surface of the protruding portion 312 passes through the bottom surface of the storage portion 311, that is, passes through the substrate 31.
A convex portion (second fitting portion) 315 having a ring shape in plan view is provided between the peripheral wall portion of the storage portion 311 and the protruding portion 312 in the plane of the substrate 31.

The mounting body 33 has a disk shape. A through hole 331 is provided in the center of the mounting body 33, and a concave portion (first fitting portion) having a circular shape with a diameter larger than the diameter of the through hole 331 in plan view is provided on the back side of the mounting body 33. 333 is provided.
A concave portion (second fitted portion) 335 to be fitted to the convex portion 315 is provided on the peripheral edge portion of the back surface of the mounting body 33.

  In the present embodiment, the X-ray permeable membrane 14 is placed on the storage portion 311 with the central portion in contact with the protruding portion 312, and the concave portion is sandwiched between the peripheral side portions of the X-ray transmissive membrane 14. 335 is pressed against the convex portion 315 and tension is generated in the X-ray transmission film 14, and then the concave portion 333 is fitted into the protruding portion 312 to mount the mounting body 33 on the substrate 31. In the present embodiment, the X-ray permeable film 14 is pressed against the substrate 31 by the recess 335, and the recess 335 functions as a pressing body according to the first embodiment.

The height of each of the concave portion 333 and the concave portion 335 from the bottom surface of the mounting body 33 is a and b, and the height of each of the convex portion 315, the protruding portion 312 and the storage portion 311 from the bottom surface of the storage portion 311 is c and d. , E.
In order to attach the mounting body 33 to the substrate 31 by fitting the concave portion 335 to the convex portion 315 and fitting the concave portion 333 to the projecting portion 312 with the X-ray permeable membrane 14 sandwiched therebetween. , A, b, c, and d need to satisfy the following expressions (1) and (2).
a ≦ d (1)
a + c <b + d (2)
As shown in FIG. 8B, in order for the X-ray permeable film 14 to be sandwiched between the recess 333 and the protrusion 312, the above formula (1) needs to be satisfied. When a> d, a gap is formed between the recess 333 and the protrusion 312, and the X-ray permeable membrane 14 cannot be sandwiched in a stretched state, resulting in a recess. In this case, when the sample is scattered during X-ray irradiation or when the sample S1 is imaged, a shadow is generated, and good imaging cannot be obtained, and the analysis accuracy is lowered.

As shown in FIG. 8B, when the bottom surface of the storage portion 311 is used as a reference surface, the height obtained by adding b to (da) is set higher than c, so that the distance between the concave portion 335 and the convex portion 315 is increased. After the X-ray transmissive film 14 is sandwiched between the concave portion 335 and the convex portion 315, the concave portion 333 can be fitted into the protruding portion 312. That is, when there is no gap between the concave portion 335 and the convex portion 315, the concave portion 333 is first fitted into the protruding portion 312, and the X-ray permeable film 14 cannot be stretched.
From the above relational expression (d−a + b> c), the above expression (2) is derived.
Further, it is necessary to satisfy the following formula (3) so that the top surface is flush with the mounting body 33 when fitted to the substrate 31.
d <e (3)

  In the present embodiment, it is easy to fit the X-ray permeable membrane 14 from the central portion to the outer edge obliquely below by simply fitting the concave portion 335 against the convex portion 315 without using a conventional mounting part. Since the convex portion 315 has a ring shape, the X-ray permeable film 14 can be evenly stretched in the circumferential direction, and the concave portion 333 projects without being loosened. It can be fitted to the part 312. Therefore, the X-ray transmissive film 14 is fixed to the substrate 31 in a state where bending, wrinkling, and bending are suppressed, and X-rays are not scattered when X-ray irradiation is performed from the X-ray irradiation unit 4. The sample S1 can be irradiated with X-rays satisfactorily. Since the X-ray transmission film 14 is suppressed from being bent or the like, a shadow is not generated, and the sample S1 can be imaged satisfactorily by the image sensor 61. Therefore, good analysis accuracy can be obtained.

Embodiment 3 FIG.
The X-ray detection apparatus according to Embodiment 3 of the present invention has the same configuration as that of the X-ray detection apparatus according to Embodiment 2 except that the configuration of the sample mounting table 30 is different. In the figure, the same parts as those in FIG.
FIG. 9 is a cross-sectional view showing a sample mounting table 30 according to Embodiment 3 of the present invention.
In the present embodiment, a groove (second fitting portion) having a circular plan view between the peripheral wall portion of the storage portion 311 and the protruding portion (first fitting portion) 312 in the plane of the substrate 31. ) 314 is provided.
An insertion portion (second fitted portion) 334 that fits into the groove portion 314 protrudes from the peripheral side portion of the back surface of the mounting body 33.

  In the present embodiment, the X-ray permeable membrane 14 is placed on the storage portion 311 with the central portion being in contact with the protruding portion 312 and the peripheral side portion of the X-ray permeable membrane 14 is sandwiched between them. After the insertion portion 334 is fitted to the groove portion 314 to be pressed and tension is generated in the X-ray permeable membrane 14, the concave portion (first fitted portion) 333 is fitted to the protruding portion 312, and the mounting body 33. Is mounted on the substrate 31.

The height and the protruding length of the concave portion 333 and the insertion portion 334 from the bottom surface of the mounting body 33 are a and b, the depth of the groove portion 314 from the bottom surface of the storage portion 311 is c, and the protrusion portion 312 and the storage portion 311. The heights from the bottom surface of the storage unit 311 are d and e, respectively.
In order to attach the mounting body 33 to the substrate 31 by fitting the insertion portion 334 against the groove portion 314 with the X-ray permeable membrane 14 interposed therebetween, and then fitting the concave portion 333 to the protruding portion 312. , A, b, c, and d need to satisfy the following expressions (1) and (4).
a ≦ d (1)
a + b <c + d (4)
In the case where the bottom surface of the mounting body 33 is used as a reference surface, by adding c to (da), the protrusion length from the reference surface is made longer than b, so that a gap is formed between the insertion portion 334 and the groove portion 314. As a result, after the X-ray transmission film 14 is sandwiched between the insertion portion 334 and the groove portion 314, the concave portion 333 can be fitted into the protruding portion 312. That is, when there is no gap between the insertion portion 334 and the groove portion 314, the concave portion 333 is first fitted into the protruding portion 312, and the X-ray permeable membrane 14 cannot be expanded.
From the above relational expression (d−a + c> b), the above expression (4) is derived.
Further, it is necessary to satisfy the above formula (3) so that the upper surface is flush with the mounting body 33 when fitted to the substrate 31.

  In the present embodiment, it is possible to easily fit the pressing portion 334 against the groove portion 314 while sandwiching the peripheral portion of the X-ray permeable membrane 14 without using a conventional mounting part. Tension can be applied to the X-ray permeable membrane 14 from the central portion toward the outer edge obliquely downward, and the insertion portion 334 has a ring shape, so that the X-ray permeable membrane 14 is evenly spread in the circumferential direction. The recessed portion 333 can be fitted into the protruding portion 312 without loosening the extended state. Therefore, the X-ray transmissive film 14 is fixed to the substrate 31 in a state where bending, wrinkling, and bending are suppressed, and X-rays are not scattered when X-ray irradiation is performed from the X-ray irradiation unit 4. The sample S1 can be irradiated with X-rays satisfactorily. Since the X-ray transmission film 14 is suppressed from being bent or the like, a shadow is not generated, and the sample S1 can be imaged satisfactorily by the image sensor 61. Therefore, good analysis accuracy can be obtained.

The concave portion 335 of the second embodiment is recessed upward, whereas the insertion portion 334 of the present embodiment protrudes downward, and the direction of concave upward is added as in the second embodiment. In this embodiment, the insertion portion 334 is recessed by (−b) in the plus direction.
Further, while the convex portion 315 of the second embodiment protrudes upward, the groove portion 314 is recessed downward, and the direction protruding upward as in the second embodiment is a plus direction. In this embodiment, the groove 314 protrudes in the positive direction by (−c). That is, in the above formula (2), the above formula (4) is derived by setting [a + (− c) <(− b) + d] in consideration of the direction of unevenness.

  Similarly, in the configuration of the sample mounting table 30 of FIG. 8 according to the second embodiment, when a recess is provided at the center of the substrate 31 and a protrusion that fits into the recess is provided at the center of the mounting body 33, the recess is Since the protrusion protrudes by (−d) in the plus direction and the protrusion is recessed by (−a) in the plus direction, in the above equation (1), the direction of the unevenness is taken into account [(−a ) ≦ (−d)], the equation (a ≧ d) is derived, and in the above equation (2), the direction of the unevenness is taken into account, and [(−a) + c <b + (− d) )], The equation (c + d <a + b) is derived. When these formulas are satisfied, a gap is formed between the concave portion 335 and the convex portion 315, and after the X-ray transmissive film 14 is first sandwiched between the concave portion 335 and the convex portion 315, the protruding portion of the mounting body 33 is It is possible to fit into the recess of the substrate 31.

  Similarly, in the configuration of the sample mounting table 30 in FIG. 8 according to the second embodiment, a recess is formed at the center of the substrate 31, and a protrusion that fits into the recess is formed at the center of the mounting body 33. In the case where an insertion portion that fits into the groove portion is provided on the peripheral portion of the mounting body 33, the concave portion protrudes in the positive direction (−d), and the protruding portion extends in the positive direction (−a ), The groove protrudes by (−c) in the positive direction, and the insertion portion is recessed by (−b) in the positive direction. In consideration of this, by setting [(−a) ≦ (−d)], the equation (a ≧ d) is derived, and in the above equation (2), the direction of the unevenness is considered and [(− By setting a) + (− c) <(− b) + (− d)], an expression of (b + d <a + c) is derived. When these formulas are satisfied, a gap is generated between the insertion portion and the groove portion, and after the X-ray transmission film 14 is first sandwiched between the insertion portion and the groove portion, the protruding portion of the mounting body is fitted into the concave portion of the substrate. It becomes possible.

  As described above, plus and minus are defined on the basis of the plus direction with respect to the concave and convex directions of the first fitting portion, the second fitting portion, the first fitted portion, and the second fitted portion. Thus, the above formulas (1) and (2) are generalized. That is, the above formulas (1) and (2) are used regardless of the direction of unevenness of the first fitting portion, the second fitting portion, the first fitted portion, and the second fitted portion. Thus, the size relationship of the unevenness can be set. As a result, a gap is generated in the fitting direction when the second fitting portion and the second fitted portion are fitted, and the X is first formed between the second fitting portion and the second fitted portion. After the radiation permeable membrane 14 is sandwiched, the first fitted portion can be fitted into the first fitting portion, and the X-ray permeable membrane 14 can be satisfactorily stretched.

As described above, according to the present invention, since the mounting body is fitted to the inner portion of the substrate while the outer portion of the X-ray transmission film 14 is pressed to the outer portion of the substrate, the inner portion is satisfactorily stretched. In this state, the X-ray transmission film can be fixed to the substrate.
The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is intended to include all modifications within the scope of the claims and the scope equivalent to the scope of the claims.

1 Sample mounting table (sample mounting body)
11, 31 Substrate 111, 311 Storage portion 112, 312 Protruding portion 113, 313 Opening portion 314 Groove portion 315 Protruding portion 12 Pressing body 121 Tapered surface 13, 23, 33 Mounting body 131, 231, 331 Through hole 132 Notch 133, 233, 333 Concave part 334 Insertion part 335 Concave part 14 X-ray transmissive film 2 Collimator 4 X-ray irradiation part 5 X-ray detector 61 Imaging element 7 Linear drive motor 81 Cover part 83 Case

Claims (7)

A sample mounting body having a substrate and mounting a sample via an X-ray permeable film, an X-ray irradiation unit for irradiating the sample mounted on the sample mounting body with X-rays, and generated from the sample In an X-ray detection apparatus comprising an X-ray detector for detecting X-rays to be
The sample mounting body is:
It has a fitting part on the board,
A pressing body that holds and presses down the X-ray permeable membrane outside the fitting portion of the substrate;
A mounting body that has a fitted portion to be fitted to the fitting portion, and is attached to the substrate in a state in which the X-ray transmission film is sandwiched between the fitted portion and the fitting portion. An X-ray detection apparatus comprising: The fitting part is a cylindrical projecting part,
The X-ray detection apparatus according to claim 1, wherein the mounting body has a flat plate shape, and the fitted portion is a concave portion fitted into the protruding portion. The substrate has a peripheral wall portion inside the periphery,
The X-ray detection apparatus according to claim 2, wherein the holding body has a ring shape, is externally fitted to the mounting body, and is fitted to the peripheral wall portion.   The holding body is fitted to the mounting body in a state having a gap, and a leg portion provided in a sample cell can be inserted between the mounting body and the holding body. The X-ray detection apparatus according to claim 3.   The X-ray detection apparatus according to claim 3, wherein the mounting body and the pressing body are integrated. A sample mounting body having a substrate and mounting a sample via an X-ray permeable film, an X-ray irradiation unit for irradiating the sample mounted on the sample mounting body with X-rays, and generated from the sample In an X-ray detection apparatus comprising an X-ray detector for detecting X-rays to be
The sample mounting body is:
A first fitting portion is provided on the substrate, and a second fitting portion is provided outside the first fitting portion;
A flat plate-like first fitting portion that is fitted to the first fitting portion, and a second fitting portion that is provided outside the first fitting portion and is fitted to the second fitting portion. A fitted body that is fitted to the substrate in a state in which the X-ray permeable film is sandwiched between the first fitted part and the first fitted part. A featured X-ray detection apparatus. In a sample mounting body used for detecting fluorescent X-rays generated by irradiating an X-ray on the sample, having a substrate, placing the sample through an X-ray permeable film,
It has a fitting part on the board,
On the peripheral side portion of the substrate, a pressing body that holds and stops the X-ray permeable film,
The holding body of the substrate has a fitted portion to be fitted to the fitting portion, and the X-ray permeable film is sandwiched between the fitted portion and the fitting portion. A sample mounting body, comprising: a mounting body mounted on the inside of the mounting body.

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