JPH09127028A - Fluorescent x-ray analytical apparatus - Google Patents

Fluorescent x-ray analytical apparatus

Info

Publication number
JPH09127028A
JPH09127028A JP8297178A JP29717896A JPH09127028A JP H09127028 A JPH09127028 A JP H09127028A JP 8297178 A JP8297178 A JP 8297178A JP 29717896 A JP29717896 A JP 29717896A JP H09127028 A JPH09127028 A JP H09127028A
Authority
JP
Japan
Prior art keywords
cell
sample
base
ray
sample cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8297178A
Other languages
Japanese (ja)
Other versions
JP2943063B2 (en
Inventor
Masao Mizuta
雅夫 水田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP8297178A priority Critical patent/JP2943063B2/en
Publication of JPH09127028A publication Critical patent/JPH09127028A/en
Application granted granted Critical
Publication of JP2943063B2 publication Critical patent/JP2943063B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To obtain a fluorescent X-ray analytical apparatus which prevents a bad influence of the leak of a sample by fitting a base inside frame to a base outside frame in a measuring part, providing a sample cell base in which one end of the base inside frame is blocked up by an X-ray transmitting sheet which is sandwiched and bonded between them freely attachably and detachably to hold a sample cell. SOLUTION: An X-ray transmitting sheet 27 is placed on a face on the side of a rise part 30 at a base outer frame 25, and a base inside frame 26 is fitted onto it. The sheet 27 is pulled by the base inside frame 26 so as to be spread and stretched, and it is stretched and installed between the base outside frame 25 and the base inside frame 26 so as to partition a space 28 and a space 29. A sample cell base 24 which is assembled in this manner is placed on a measuring part 2 on a bench 1, and a sample cell 3 which houses a sample 23 inside, is set. In this state, the sample 23 is irradiated via the sheet 27 with X-ray from an X-ray tube 4, fluorescent X-rays which are excited by an element to be analyzed in the sample are detected by an X-ray detector 6, and their energy intensity is measured. Since the sheet 27 is stretched and installed on the cell base 24 in this manner, the cell base 24 acts as a saucer even when the sample 23 inside the cell 3 is leaked, and a bed influence is prevented.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】この発明は、蛍光X線分析装
置に関する。
TECHNICAL FIELD The present invention relates to an X-ray fluorescence analyzer.

【0002】[0002]

【従来の技術】液体または粉体のような流動試料につい
て蛍光X線分析を行う場合、底面がX線を透過させるX
線透過性の薄いシートからなる試料セルを、蛍光X線分
析装置の測定部位にセットし、この測定部位の下方から
試料セルに対して一次X線を照射し、そのとき生ずる蛍
光X線をX線検出器によって検出するようにしている。
2. Description of the Related Art When performing a fluorescent X-ray analysis on a flowing sample such as a liquid or a powder, an X-ray having a bottom surface that transmits X-rays is used.
A sample cell made of a thin sheet having a low X-ray transmittance is set at a measurement site of a fluorescent X-ray analyzer, and the sample cell is irradiated with primary X-rays from below the measurement site. It is detected by a line detector.

【0003】図5は、従来の蛍光X線分析装置の構成を
概略的に示すもので、この図において、1はベンチで、
その上方の測定部位2には試料セル3を載置するための
ターンテーブル4が設けられている。5は測定部位2の
下方から試料セル3に対して一次X線を照射するX線
管、6は一次X線の照射によって生ずる蛍光X線を検出
するX線検出器で、7は蛍光X線の入射面である。
FIG. 5 schematically shows the structure of a conventional X-ray fluorescence spectrometer. In FIG.
A turntable 4 on which the sample cell 3 is placed is provided at the measurement site 2 above the sample cell 3. Reference numeral 5 denotes an X-ray tube for irradiating the sample cell 3 with primary X-rays from below the measurement site 2, reference numeral 6 denotes an X-ray detector for detecting fluorescent X-rays generated by primary X-ray irradiation, and reference numeral 7 denotes fluorescent X-rays. Is the incident surface.

【0004】ところで、前記試料セル3としては、流動
試料を収容するとともに、一次X線を透過させる必要が
あるところから、従来より、図4に示すようなものが用
いられている。すなわち、この図において、8はポリエ
チレンなどのプラスチックまたは金属よりなる円筒状の
セル内枠で、その外部には環状の突出部9,10,11
が形成されている。
By the way, as the sample cell 3, a cell as shown in FIG. 4 has been conventionally used because it needs to accommodate a flowable sample and transmit primary X-rays. That is, in this figure, 8 is a cylindrical cell inner frame made of plastic such as polyethylene or metal, and annular protrusions 9, 10, 11 are provided on the outside thereof.
Are formed.

【0005】また、12は軟質のプラスチックフィルム
を折り曲げて成形した内枠カバーで、円形の底部13、
この底部13を取り巻くようにして立ち上がる環状の立
ち上がり部14、この立ち上がり部14の上端から連設
される折り返し部15およびこの折り返し部15に連な
るフランジ部16から構成され、立ち上がり部14と折
り返し部15との間には、セル内枠8をすっぽりと挿入
できる空間17が形成されている。なお、底部13の裏
面およびフランジ部16の裏面には補強用の台紙18が
貼着されている。
An inner frame cover 12 is formed by bending a soft plastic film, and has a circular bottom portion 13.
An annular rising portion 14 rising around the bottom portion 13, a folded portion 15 continuously provided from the upper end of the rising portion 14, and a flange portion 16 connected to the folded portion 15, the rising portion 14 and the folded portion 15. A space 17 into which the cell inner frame 8 can be completely inserted is formed between the two. A backing sheet 18 for reinforcement is attached to the back surface of the bottom portion 13 and the back surface of the flange portion 16.

【0006】19はマイラー(商品名)などのX線透過
性シートである。そして、20はポリエチレンなどのプ
ラスチックまたは金属よりなる円筒状のセル外枠で、そ
の外部にはフランジ部21が形成されるとともに、内部
には突出部22が形成されている。
Reference numeral 19 denotes an X-ray transparent sheet such as Mylar (trade name). Further, 20 is a cylindrical cell outer frame made of plastic such as polyethylene or metal, and a flange portion 21 is formed on the outside thereof, and a protruding portion 22 is formed on the inside thereof.

【0007】このような部材からなる試料セル3に試料
を充填するには、先ず、セル内枠8を内枠カバー12の
空間17に嵌め込んで、内枠カバー12の立ち上がり部
14および折り返し部15をセル内枠8にすっぽりと被
せる。次いで、内枠カバー12の底部13と立ち上がり
部14とで形成される空間内に試料を入れて、その上方
からX線透過性シート19を被覆し、さらに、その上方
からセル外枠20を外嵌するのである。これによって、
X線透過性シート19は、セル外枠20に引っ張られて
しわが生ずることなく展張し、セル内枠8の一端側を閉
塞する。
In order to fill a sample into the sample cell 3 made of such a member, first, the cell inner frame 8 is fitted into the space 17 of the inner frame cover 12, and the rising portion 14 and the folded portion of the inner frame cover 12 are folded. 15 is completely covered with the cell inner frame 8. Next, the sample is put into the space formed by the bottom portion 13 and the rising portion 14 of the inner frame cover 12, the X-ray permeable sheet 19 is covered from above, and the cell outer frame 20 is removed from above. It fits. by this,
The X-ray transparent sheet 19 is pulled by the cell outer frame 20 and spreads without wrinkling, and closes one end side of the cell inner frame 8.

【0008】そして、分析は次のようにして行われる。
すなわち、前記試料セル3を、図5に示すように、その
上下を逆にした状態で測定部位2にセットし、その状態
でX線管4から一次X線を、試料セル3のX線透過性シ
ート19を介して、試料セル3内の試料23に照射し、
試料23中に含まれる分析元素によって励起される蛍光
X線をX線検出器6で検出し、そのエネルギー強度を測
定するのである。
Then, the analysis is performed as follows.
That is, as shown in FIG. 5, the sample cell 3 is set on the measurement site 2 with its upside down, and in that state, the primary X-rays from the X-ray tube 4 are transmitted through the X-rays of the sample cell 3. Irradiate the sample 23 in the sample cell 3 through the permeable sheet 19,
The fluorescent X-ray excited by the analytical element contained in the sample 23 is detected by the X-ray detector 6 and the energy intensity thereof is measured.

【0009】[0009]

【発明が解決しようとする課題】ところで、上記従来の
蛍光X線分析装置においては、試料セル3の組立が不完
全であったり、内部に試料23を入れた状態で試料セル
3を測定部位2にセットする際など、X線透過性シート
19を測定部位2の他の部分にぶつけるなどして破損さ
せた場合、試料セル3内の試料23が漏れ出し、これに
よって、測定部位2の下方に位置するX線検出器6やX
線管4の機能に支障を来したり、これらが汚損されると
いったことがあった。
By the way, in the above-mentioned conventional X-ray fluorescence analyzer, the sample cell 3 is incompletely assembled, or the sample cell 3 is placed in the measuring portion 2 while the sample 23 is placed inside. When the X-ray transmissive sheet 19 is damaged by hitting the other part of the measurement site 2 when it is set to the position, the sample 23 in the sample cell 3 leaks out, and thereby the sample 23 below the measurement site 2 is leaked. Located X-ray detector 6 or X
There were cases where the function of the wire tube 4 was hindered and these were contaminated.

【0010】なお、このような問題は、前記図4に示し
た試料セル3を用いた場合のみならず、セル外枠20
と、このセル外枠20の内側に装着されるセル内枠8
と、これらセル外枠20とセル内枠8との間に挟み込ま
れかつセル内枠8の一端側を閉塞するX線透過性シート
19からなる試料セル3を、図5に示すように、測定部
位2にセットした場合にも生じている。
Incidentally, such a problem is not limited to the case of using the sample cell 3 shown in FIG.
And a cell inner frame 8 mounted inside the cell outer frame 20.
The sample cell 3 composed of the X-ray permeable sheet 19 sandwiched between the outer cell frame 20 and the inner cell frame 8 and closing one end of the inner cell frame 8 was measured as shown in FIG. It also occurs when it is set on site 2.

【0011】この発明は、上述の事柄に留意してなされ
たもので、その目的は、試料セルの組立が不完全であっ
たり、不測の事故などで試料セルのX線透過性シートが
破損して、試料セル内の試料が漏れ出すことがあって
も、測定部位の下方に位置するX線検出器やX線管など
に悪影響が及ぼされないようにした蛍光X線分析装置を
提供することである。
The present invention has been made in consideration of the above-mentioned matters, and an object thereof is that the X-ray transmissive sheet of the sample cell is damaged due to incomplete assembly of the sample cell or an unexpected accident. Thus, even if the sample in the sample cell leaks out, it is possible to provide an X-ray fluorescence analyzer that does not have an adverse effect on the X-ray detector or the X-ray tube located below the measurement site. is there.

【0012】[0012]

【課題を解決するための手段】上記目的を達成するた
め、この発明では、セル外枠と、このセル外枠の内側に
装着されるセル内枠と、これらセル外枠とセル内枠との
間に挟み込まれかつセル内枠の一端側を閉塞するX線透
過性シートとからなり、セル内枠内に試料を収容するよ
うに構成された試料セルを測定部位にセットし、この測
定部位の下方から前記試料セルに向かって一次X線を照
射するようにした蛍光X線分析装置において、前記測定
部位に、台外枠と、この台外枠の内側に装着される台内
枠と、これら台外枠と台内枠との間に挟み込まれかつ台
内枠の一端側を閉塞するX線透過性シートとからなる試
料セル台を着脱自在に設け、この試料セル台に前記試料
セルを保持させるようにしている。
In order to achieve the above object, according to the present invention, there are provided a cell outer frame, a cell inner frame mounted inside the cell outer frame, and a cell outer frame and a cell inner frame. An X-ray transmissive sheet that is sandwiched between the cell inner frame and one end side of the cell inner frame and is configured to store a sample in the cell inner frame is set to the measurement site, and the measurement site In a fluorescent X-ray analysis device configured to irradiate primary X-rays from below toward the sample cell, an outer frame of the stand, an inner frame mounted inside the outer frame of the stand, and A sample cell base made up of an X-ray transparent sheet sandwiched between an outer frame and an inner frame and closing one end of the inner frame is detachably provided, and the sample cell is held on the sample cell base. I am trying to let you.

【0013】上記構成の蛍光X線分析装置によれば、試
料が試料セル内から漏れ出るようなことがあっても、こ
の漏れ出た試料によって、測定部位の下方に位置するX
線検出器やX線管などに危害が及ぼされたり、汚損され
るというようなことが防止され、確実に分析を行うこと
ができる。
According to the X-ray fluorescence analyzer having the above structure, even if the sample leaks from the sample cell, the leaked sample causes the X located below the measurement site.
It is possible to prevent the radiation detector, the X-ray tube, and the like from being harmed or contaminated, and to reliably perform the analysis.

【0014】[0014]

【発明の実施の形態】以下、この発明の詳細について図
を参照しながら説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The details of the present invention will be described below with reference to the drawings.

【0015】先ず、図1は、この発明に係る蛍光X線分
析装置の一例の要部を概略的に示すものであり、この図
において、図4および図5に示した符号と同一のものは
同一物を示している。図1において、24はベンチ1上
の測定部位2に対して着脱自在に設けられる試料セル台
で、その構成の一例を図2に示す。
First, FIG. 1 schematically shows a main part of an example of an X-ray fluorescence analyzer according to the present invention. In this figure, the same parts as those shown in FIG. 4 and FIG. The same thing is shown. In FIG. 1, reference numeral 24 denotes a sample cell table detachably provided to the measurement site 2 on the bench 1, and an example of the configuration is shown in FIG.

【0016】前記試料セル台24は、図2に示すよう
に、台外枠25と、この台外枠25の内側に装着される
台内枠26と、これら台外枠25と台内枠26との間に
挟み込まれ、かつ台内枠26の一端側を閉塞するX線透
過性シート27とからなる。そして、台外枠25および
台内枠26は、互いに同径の空間部28, 29を有する
環状体(円形)に形成され、例えばアルミニウムなどよ
りなる。
As shown in FIG. 2, the sample cell base 24 includes a base outer frame 25, a base inner frame 26 mounted inside the base outer frame 25, and the base outer frame 25 and the base inner frame 26. And an X-ray transmissive sheet 27 which is sandwiched between and and closes one end side of the base inner frame 26. The outboard frame 25 and the inboard frame 26 are formed in an annular body (circular shape) having spaces 28 and 29 having the same diameter, and are made of, for example, aluminum.

【0017】そして、前記台外枠25の外縁部には、適
宜の高さを有する環状の立ち上がり部30が立設されて
いる。また、台内枠26は、台外枠25よりやや小径
で、その外縁部には、X線透過性シート27を挟み込ん
だ状態で装着したとき、立ち上がり部30の内面に密着
し、試料セル3をガイドできるように、上方にいくほど
末広がりに形成されたテーパ内周面31(図1参照)を
有する環状のガイド部32が形成されるとともに、この
ガイド部32の内側に、図示例においては、内縁部に、
環状突出部33がガイド部32と同心円状に形成されて
いる。
An annular rising portion 30 having an appropriate height is provided upright on the outer edge portion of the stand outer frame 25. Further, the inner frame 26 has a slightly smaller diameter than the outer frame 25, and when the X-ray transparent sheet 27 is attached to the outer edge of the inner frame 26, the inner frame 26 is in close contact with the inner surface of the rising portion 30 and the sample cell 3 An annular guide portion 32 having a tapered inner peripheral surface 31 (see FIG. 1) which is formed so as to widen toward the upper side so that it can be guided, is formed inside the guide portion 32. , On the inner edge,
The annular protruding portion 33 is formed concentrically with the guide portion 32.

【0018】前記台外枠25、台内枠26の各部の寸法
は、図1に示すように、環状突出部33の上端に試料セ
ル3の底面、特に、セル内枠8の下端が対応するように
試料セル3をセットでき、しかも、このセット状態にお
いて、試料セル3のセル外枠20が立ち上がり部31と
環状突出部33との間に位置することができるように設
定され、より具体的には、環状突出部33の外径は、セ
ル外枠20の内径よりも若干小さく、より好ましくは、
試料セル3を環状突出部33の上端に載置した状態にお
いて、試料セル3を水平方向にずらしてもセル内枠8の
下端が環状突出部33の上端から外れないように規制で
きるようにしてあればよい。また、ガイド部32は環状
突出部33よりも高くなるようにするのが好ましい。
As shown in FIG. 1, the dimensions of the outer frame 25 and the inner frame 26 are such that the upper end of the annular protrusion 33 corresponds to the bottom surface of the sample cell 3, particularly the lower end of the cell inner frame 8. As described above, the sample cell 3 can be set, and in this set state, the cell outer frame 20 of the sample cell 3 is set so as to be positioned between the rising portion 31 and the annular protruding portion 33. The outer diameter of the annular protrusion 33 is slightly smaller than the inner diameter of the cell outer frame 20, and more preferably,
With the sample cell 3 placed on the upper end of the annular protrusion 33, the lower end of the cell inner frame 8 can be regulated so as not to come off the upper end of the annular protrusion 33 even if the sample cell 3 is horizontally displaced. I wish I had it. Further, it is preferable that the guide portion 32 is higher than the annular protruding portion 33.

【0019】そして、前記X線透過性シート27は、試
料セル3において用いられるX線透過性シート19と同
様の材料よりなり、このX線透過性シート27を台外枠
25の立ち上がり部30側の面に置き、その上から台内
枠26を台外枠25に嵌め込み装着することにより、X
線透過性シート27は、台内枠26に引っ張られてしわ
が生ずることなく展張し、空間28, 29を仕切るよう
に台内枠26と台外枠25との間に張設されるのであ
る。
The X-ray transmissive sheet 27 is made of the same material as the X-ray transmissive sheet 19 used in the sample cell 3, and the X-ray transmissive sheet 27 is placed on the rising portion 30 side of the stand outer frame 25. On the surface of the table, and by fitting the inner frame 26 into the outer frame 25 of the table from above and mounting it, X
The line permeable sheet 27 is stretched without being wrinkled by being stretched by the base inner frame 26 and is stretched between the base inner frame 26 and the base outer frame 25 so as to partition the spaces 28 and 29. .

【0020】次に、上記構成の蛍光X線分析装置の作用
について説明すると、分析に際しては、前述のようにし
て組み立てられた試料セル台24をベンチ1上の測定部
位2に載置する。そして、内部に試料23を収容するよ
うにして別途組み立てられた試料セル3を、そのセル内
枠8の下端が環状突出部33の上端に対応するように測
定部位2にセットし、その状態でX線管4から一次X線
を、試料セル台24のX線透過性シート27および試料
セル3のX線透過性シート19を介して、試料セル3内
の試料23に照射し、試料23中に含まれる分析元素に
よって励起される蛍光X線をX線検出器6で検出し、そ
のエネルギー強度を測定するのである。
Next, the operation of the X-ray fluorescence analyzer having the above-mentioned structure will be described. At the time of analysis, the sample cell base 24 assembled as described above is placed on the measurement site 2 on the bench 1. Then, the sample cell 3 separately assembled so as to accommodate the sample 23 therein is set on the measurement site 2 such that the lower end of the cell inner frame 8 corresponds to the upper end of the annular projection 33, and in this state. The sample 23 in the sample cell 3 is irradiated with primary X-rays from the X-ray tube 4 via the X-ray permeable sheet 27 of the sample cell table 24 and the X-ray permeable sheet 19 of the sample cell 3. Is detected by the X-ray detector 6 and the energy intensity thereof is measured.

【0021】上述の実施例においては、試料セル台24
には、X線透過性シート27が張設してあるので、試料
セル3の組立が不完全であったり、X線透過性シート1
9が破損するなどして試料セル3内の試料23が漏れ出
るようなことがあっても、試料セル台24が受皿とな
り、漏れ出た試料によって、下方に位置するX線検出器
6やX線管4などに危害が及ぼされたり、汚損されると
いったことが防止され、確実に分析を行うことができ
る。
In the embodiment described above, the sample cell stand 24
Since the X-ray transmissive sheet 27 is stretched over, the assembly of the sample cell 3 is incomplete, or the X-ray transmissive sheet 1
Even if the sample 23 in the sample cell 3 leaks out due to damage to the sample cell 9, the sample cell base 24 serves as a tray, and the leaked sample causes the X-ray detector 6 and the X-ray detector 6 located below. It is possible to prevent the wire tube 4 and the like from being harmed or polluted, so that the analysis can be reliably performed.

【0022】そして、試料セル台24は、ベンチ1の測
定部位2に対して着脱自在であるとともに、それ自体が
組立・分解が容易であるから、X線透過性シート27の
交換や台外枠25、台内枠26の洗浄などのメンテナン
スを容易に行なえる。
Since the sample cell base 24 is detachable from the measurement site 2 of the bench 1 and is easy to assemble and disassemble, the X-ray transmissive sheet 27 can be replaced and the outer frame of the base can be removed. 25, maintenance such as cleaning of the base inner frame 26 can be easily performed.

【0023】また、試料セル台24にはガイド部32が
立設してあるので、セル内枠8に比べてセル外枠20が
下方に突出しているような試料セル3を所定の状態にセ
ットする場合、セル外枠20の下部がガイド部32に当
接するなどして、試料セル3の傾きを規制でき、従来に
おいて生じていた試料セル3のX線透過性シート19の
突出部分などとの当接による破損が効果的に防止される
とともに、試料セル3を所定の位置に、容易・確実にセ
ットできる。
Further, since the guide portion 32 is provided upright on the sample cell base 24, the sample cell 3 in which the cell outer frame 20 projects downward as compared with the cell inner frame 8 is set in a predetermined state. In such a case, the lower portion of the cell outer frame 20 may come into contact with the guide portion 32 so that the inclination of the sample cell 3 can be regulated. Damage due to contact can be effectively prevented, and the sample cell 3 can be easily and reliably set at a predetermined position.

【0024】さらに、試料セル3は、そのセル内枠8の
下端が試料セル台24の環状突出部33の上端に対応す
るようにセットされるから、従来と異なり、試料測定面
AとX線検出器6との距離が常に一定になり、したがっ
て、蛍光X線が空気に触れる度合いが試料セル3のセッ
ティングの度に変動することがないので、分析誤差が生
ずることもなくなる。
Furthermore, since the sample cell 3 is set so that the lower end of the cell inner frame 8 corresponds to the upper end of the annular protrusion 33 of the sample cell base 24, unlike the conventional case, the sample measurement surface A and the X-ray are different. The distance from the detector 6 is always constant, and therefore the degree of contact of the fluorescent X-rays with air does not fluctuate each time the sample cell 3 is set, so that no analysis error occurs.

【0025】図3は、この発明の他の実施例を示すもの
で、この図において、34はベンチ1の上方の測定部位
2に着脱自在に設けられる試料セル台で、この試料セル
台34には、前記実施例における試料セル台24と異な
り、環状突出部33がなく、試料セル3は、そのセル内
枠8が試料セル台34の台内枠26の平面上に直に接触
した状態に載置される。なお、他の構成については前記
試料セル台24と同様である。
FIG. 3 shows another embodiment of the present invention. In this figure, 34 is a sample cell base detachably provided on the measurement site 2 above the bench 1, and the sample cell base 34 is mounted on the sample cell base 34. Is different from the sample cell base 24 in the above-mentioned embodiment, there is no annular protrusion 33, and the sample cell 3 is in a state where the cell inner frame 8 is in direct contact with the plane of the base inner frame 26 of the sample cell base 34. Placed. The other configurations are the same as those of the sample cell base 24.

【0026】この実施例においても、試料セル台34
に、X線透過性シート27が張設してあるので、試料セ
ル3の組立が不完全であったり、X線透過性シート19
が破損するなどして試料セル3内の試料23が漏れ出る
ようなことがあっても、試料セル台34が受皿となり、
漏れ出た試料によって、下方に位置するX線検出器6や
X線管4などに危害が及ぼされたり、汚損されるといっ
たことが防止され、確実に分析を行うことができる。
Also in this embodiment, the sample cell base 34
Since the X-ray transmissive sheet 27 is stretched over, the assembly of the sample cell 3 is incomplete, or the X-ray transmissive sheet 19 is attached.
Even if the sample 23 in the sample cell 3 leaks out due to damage to the sample cell, the sample cell base 34 serves as a saucer,
The leaked sample is prevented from damaging or contaminating the X-ray detector 6 and the X-ray tube 4 located below, and reliable analysis can be performed.

【0027】そして、前記試料セル台34は、ベンチ1
の測定部位2に対して着脱自在であるとともに、それ自
体が組立・分解が容易であるから、X線透過性シート2
7の交換や台外枠25や台内枠26の洗浄などのメンテ
ナンスを容易に行なえる。
The sample cell base 34 is the bench 1
The X-ray transparent sheet 2 is detachable from the measurement site 2 of the X-ray, and is easy to assemble and disassemble by itself.
Maintenance such as replacement of 7 and cleaning of the outer frame 25 and the inner frame 26 can be easily performed.

【0028】なお、上記試料セル台34には、試料セル
3をガイドする機能はないものの、試料測定面Aを規定
する試料セル3の内枠8が試料セル台34の台内枠26
の上面に必ず当接するので、試料測定面とX線検出器6
との距離が常に一定になり、したがって、蛍光X線が空
気に触れる度合いが試料セル3のセッティングの度に変
動することがないので、分析誤差が生ずることがなくな
る。
Although the sample cell base 34 does not have a function of guiding the sample cell 3, the inner frame 8 of the sample cell 3 defining the sample measurement surface A is the inner frame 26 of the sample cell base 34.
The sample measurement surface and the X-ray detector 6
Since the distance between and is always constant, the degree of contact of the fluorescent X-rays with air does not fluctuate with each setting of the sample cell 3, so that no analysis error occurs.

【0029】なお、この実施例においては、セル外枠2
0の下端がセル内枠8の下端より下方に突出しないよう
してあるが、両者8,20の下端が同時に試料セル台3
4の台内枠26の平面に当接するように構成してあって
もよい。
In this embodiment, the cell outer frame 2
The lower end of 0 does not project downward from the lower end of the cell inner frame 8, but the lower ends of both 8 and 20 are at the same time the sample cell base 3
It may be configured so as to come into contact with the plane of the in-stand frame 26 of No. 4.

【0030】この発明は、上述した各実施例に限られる
ものではなく、例えば試料セル3としては、セル外枠2
0と、このセル外枠20の内側に装着されるセル内枠8
と、これらセル外枠20とセル内枠8との間に挟み込ま
れかつセル内枠8の一端側を閉塞するX線透過性シート
19からなるものであればよい。そして、試料セル台2
4,34はターンテーブルなどに組み込んであってもよ
い。また、図1に示した実施例において、セル内枠8の
下端が外枠20の下端より下方に突出させてあってもよ
く、さらに、両者8,20の下端が同時に台内枠26の
環状突出部33に当接するように構成してあってもよ
い。
The present invention is not limited to the above-mentioned respective embodiments, and, for example, as the sample cell 3, the cell outer frame 2 is used.
0 and the cell inner frame 8 mounted inside the cell outer frame 20
And an X-ray transmissive sheet 19 that is sandwiched between the cell outer frame 20 and the cell inner frame 8 and closes one end side of the cell inner frame 8. Then, the sample cell base 2
4, 34 may be incorporated in a turntable or the like. Further, in the embodiment shown in FIG. 1, the lower end of the cell inner frame 8 may be made to project downward from the lower end of the outer frame 20, and the lower ends of both 8 and 20 are simultaneously formed in the annular shape of the base inner frame 26. It may be configured to abut the protrusion 33.

【0031】[0031]

【発明の効果】以上説明したように、この発明によれ
ば、試料が試料セル内から漏れ出るようなことがあって
も、この漏れ出た試料によって、測定部位の下方に位置
するX線検出器やX線管などに危害が及ぼされたり、汚
損されるというようなことが防止される。そして、この
発明によれば、確実に分析を行うことができる。
As described above, according to the present invention, even if a sample leaks from the sample cell, the leaked sample detects X-rays located below the measurement site. It is possible to prevent the damage of the vessel and the X-ray tube, and the damage of the tube. And according to this invention, an analysis can be performed reliably.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の一実施例に係る蛍光X線分析装置の
要部を概略的に示す図である。
FIG. 1 is a diagram schematically showing a main part of an X-ray fluorescence analyzer according to an embodiment of the present invention.

【図2】前記装置において用いる試料セル台の一例を示
す分解斜視図である。
FIG. 2 is an exploded perspective view showing an example of a sample cell table used in the apparatus.

【図3】この発明の他の実施例に係る蛍光X線分析装置
の要部を概略的に示す図である。
FIG. 3 is a diagram schematically showing a main part of an X-ray fluorescence analyzer according to another embodiment of the present invention.

【図4】蛍光X線分析に用いる試料セルの一例を示す分
解斜視図である。
FIG. 4 is an exploded perspective view showing an example of a sample cell used for X-ray fluorescence analysis.

【図5】従来の蛍光X線分析装置の要部を概略的に示す
図である。
FIG. 5 is a view schematically showing a main part of a conventional X-ray fluorescence spectrometer.

【符号の説明】[Explanation of symbols]

2…測定部位、3…試料セル、8…セル内枠、19…X
線透過性シート、20…セル外枠、24…試料セル台、
25…台外枠、26…台内枠、27…X線透過性シー
ト、34…試料セル台。
2: Measurement site, 3: Sample cell, 8: Cell inner frame, 19: X
Line permeable sheet, 20: cell outer frame, 24: sample cell table,
25 ... Outer frame, 26 ... Inner frame, 27 ... X-ray transparent sheet, 34 ... Sample cell stand.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 セル外枠と、このセル外枠の内側に装着
されるセル内枠と、これらセル外枠とセル内枠との間に
挟み込まれかつセル内枠の一端側を閉塞するX線透過性
シートとからなり、セル内枠内に試料を収容するように
構成された試料セルを測定部位にセットし、この測定部
位の下方から前記試料セルに向かって一次X線を照射す
るようにした蛍光X線分析装置において、前記測定部位
に、台外枠と、この台外枠の内側に装着される台内枠
と、これら台外枠と台内枠との間に挟み込まれかつ台内
枠の一端側を閉塞するX線透過性シートとからなる試料
セル台を着脱自在に設け、この試料セル台に前記試料セ
ルを保持させるようにしたことを特徴とする蛍光X線分
析装置。
1. A cell outer frame, a cell inner frame to be mounted inside the cell outer frame, and an X which is sandwiched between the cell outer frame and the cell inner frame and closes one end side of the cell inner frame. A sample cell composed of a line-transparent sheet and configured to accommodate a sample in a cell inner frame is set at a measurement site, and primary X-rays are irradiated from below the measurement site toward the sample cell. In the X-ray fluorescence analyzer described above, a stand outer frame, a stand inner frame mounted inside the stand outer frame, a stand outer frame and a stand inner frame are sandwiched between the stand outer frame and the stand outer frame at the measurement site. An X-ray fluorescence analyzer, characterized in that a sample cell base made of an X-ray transmissive sheet for closing one end side of an inner frame is detachably provided, and the sample cell is held on the sample cell base.
JP8297178A 1996-10-19 1996-10-19 X-ray fluorescence analyzer Expired - Lifetime JP2943063B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8297178A JP2943063B2 (en) 1996-10-19 1996-10-19 X-ray fluorescence analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8297178A JP2943063B2 (en) 1996-10-19 1996-10-19 X-ray fluorescence analyzer

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP3130635A Division JP2838172B2 (en) 1991-05-03 1991-05-03 X-ray fluorescence analyzer

Publications (2)

Publication Number Publication Date
JPH09127028A true JPH09127028A (en) 1997-05-16
JP2943063B2 JP2943063B2 (en) 1999-08-30

Family

ID=17843193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8297178A Expired - Lifetime JP2943063B2 (en) 1996-10-19 1996-10-19 X-ray fluorescence analyzer

Country Status (1)

Country Link
JP (1) JP2943063B2 (en)

Cited By (9)

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Publication number Priority date Publication date Assignee Title
JP2001349852A (en) * 2000-04-06 2001-12-21 Seiko Instruments Inc Apparatus for chamber open-type x-ray fluorescence analysis
JP2003004673A (en) * 2001-06-15 2003-01-08 Sumitomo Metal Ind Ltd X-ray fluorescent liquid analyzer
EP2270479A2 (en) 2009-06-30 2011-01-05 HORIBA, Ltd. Fluorescent X-ray analyzer and fluorescent X-ray analysis method
JP2011013029A (en) * 2009-06-30 2011-01-20 Horiba Ltd Fluorescent x-ray analyzer
JP2011013027A (en) * 2009-06-30 2011-01-20 Horiba Ltd Fluorescent x-ray analyzer
JP2011117835A (en) * 2009-12-03 2011-06-16 Horiba Ltd Sample cell assembly implement
US8550710B2 (en) 2009-10-09 2013-10-08 Horiba, Ltd. Sample cell for fluorescent X-ray analysis and sample cell assembly instrument
JP2017032348A (en) * 2015-07-30 2017-02-09 国立大学法人広島大学 Film expansion jig
CN113552157A (en) * 2020-04-23 2021-10-26 北京安科慧生科技有限公司 X-ray fluorescence spectrometer and sample cup protection piece thereof

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001349852A (en) * 2000-04-06 2001-12-21 Seiko Instruments Inc Apparatus for chamber open-type x-ray fluorescence analysis
JP4646418B2 (en) * 2000-04-06 2011-03-09 エスアイアイ・ナノテクノロジー株式会社 X-ray fluorescence analyzer
JP2003004673A (en) * 2001-06-15 2003-01-08 Sumitomo Metal Ind Ltd X-ray fluorescent liquid analyzer
EP2270479A2 (en) 2009-06-30 2011-01-05 HORIBA, Ltd. Fluorescent X-ray analyzer and fluorescent X-ray analysis method
JP2011013029A (en) * 2009-06-30 2011-01-20 Horiba Ltd Fluorescent x-ray analyzer
JP2011013027A (en) * 2009-06-30 2011-01-20 Horiba Ltd Fluorescent x-ray analyzer
EP2270479A3 (en) * 2009-06-30 2012-02-22 HORIBA, Ltd. Fluorescent X-ray analyzer and fluorescent X-ray analysis method
US8550710B2 (en) 2009-10-09 2013-10-08 Horiba, Ltd. Sample cell for fluorescent X-ray analysis and sample cell assembly instrument
JP2011117835A (en) * 2009-12-03 2011-06-16 Horiba Ltd Sample cell assembly implement
JP2017032348A (en) * 2015-07-30 2017-02-09 国立大学法人広島大学 Film expansion jig
CN113552157A (en) * 2020-04-23 2021-10-26 北京安科慧生科技有限公司 X-ray fluorescence spectrometer and sample cup protection piece thereof

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