JP2011089794A - Sample holder for fluorescent x-ray analysis, and method and device of fluorescent x-ray analysis using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sample holder for fluorescent X-ray analysis which enhances the analytical sensitivity and analysis accuracy, by holding a large amount of sample dripped and dried in a constant height position, at all times. <P>SOLUTION: The sample holder 1 for fluorescent X-ray analysis includes a tubular fastener 3; a polymeric film 2 having a slack 2a for forming a cavity 2c of a prescribed size, inside the tubular fastener 3 and a periphery 2b locked along one end 3a of the tubular fastener; and a tubular holder 4 for pushing up the slack 2a of the polymeric film in the vicinity of an inner circumference of the tubular holder 4 by being upward slid along the inner circumference of the tubular holder 4. The liquid sample S is immersed and dried in the cavity 2c formed by the slack 2a of the polymeric film being pushed downward. The tubular holder 4 is slid upward, to make one end 4a of the tubular holder flatten the slack 2a, and holds the dried sample. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a fluorescent X-ray analysis sample holder used for fluorescent X-ray analysis of a liquid sample, and a fluorescent X-ray analysis method and apparatus using the same.

  Conventionally, as a technique for fluorescent X-ray analysis of a liquid sample, a sample holder in which a recess having a diameter of 2 mm is formed in an extremely thin polymer film is sold by MOTTEK. 13 is a fluorescent X-ray analysis sample holder 1 used for fluorescent X-ray analysis of a liquid sample S as shown in FIG. 13, and is held by a ring-shaped base 2 and the base 2 with a predetermined tension. A heat-shrinkable film 3 having a thickness of 12 μm or less having a peripheral portion 3a and a transmissive portion 3b for transmitting X-rays. A dent 3c is formed in the transmissive portion 3b, and a liquid sample is formed in the dent 3c of the transmissive portion. When S is dropped and dried, there is a fluorescent X-ray analysis sample holder 1 that holds the dried sample while the transmission part 3b becomes flat (Patent Document 1).

JP 2009-222615 A

  However, since the sample holder of MOXTEK is manufactured by molding a polymer film, FIG. 14 which is a cross-sectional view showing the state of the sample holder 50 before drying the instilled liquid sample S and the instilled liquid sample S. As shown in FIG. 15, which is a cross-sectional view showing the state of the sample holder 50 after the liquid sample S is dried, the depression 54 into which the liquid sample S is instilled is not dried even after the liquid sample S is dried. Similarly, the polymer film 53 is slightly deformed in the drying stage of the liquid sample S, and the height of the dried sample S held in the depression 54 by the individual sample holders 50 varies and is detected. The intensity of the fluorescent X-rays to be changed varies. Therefore, it cannot be analyzed with high accuracy.

  The sample holder 1 for fluorescent X-ray analysis described in Patent Document 1 is such that a heat-shrinkable film 3 is stretched to a ring-shaped pedestal 2 with a predetermined tension at room temperature, and in this stretched state, a pressing jig is used. The depression 3c is formed by pressing. Therefore, the depression 3c does not return to a flat original state at room temperature. A liquid sample is dropped and dried in the recess 3c. The heat-shrinkable film 3 is shrunk and flattened by the amount of heat when the liquid sample is dried, and the dried sample is held. Thus, in this fluorescent X-ray analysis sample holder 1, the heat-shrinkable film 3 must be a recess 3c that can return to a flat state by the amount of heat when the liquid sample is dried. The diameter is small and the depth is shallow, and the capacity that the recess 3c can hold the liquid sample is small. Since the volume that can hold the liquid sample is small, the concentration of the sample is low, and high-sensitivity X-ray fluorescence analysis cannot be performed.

  When a liquid sample is dropped into the shallow depression 3c, the liquid sample may creep up along the peripheral wall of the depression 3c, and the liquid sample may spread outside the depression 3c. In particular, this scooping phenomenon is likely to occur in the sample of the organic solvent solution, and a part of the liquid sample may be dried outside the recess 3c. For this reason, since the holding position of the dried sample differs depending on the sample, the sensitivity of the fluorescent X-ray analysis varies. Further, the heat-shrinkable film 3 may not be returned to a uniform flat surface when the liquid sample is dried, and may be partially wavy. When the heat-shrinkable film 3 becomes wavy, the sensitivity of the fluorescent X-ray analysis varies because the height position of the dropped and dried sample varies.

  The present invention has been made in view of the above-mentioned conventional problems, and in a fluorescent X-ray analysis sample holder used for fluorescent X-ray analysis of a liquid sample, and a fluorescent X-ray analysis method and apparatus using the same, An object of the present invention is to improve analysis sensitivity and improve analysis accuracy by providing a sample holder for fluorescent X-ray analysis that can always hold a drip-dried sample at a certain height position.

  In order to achieve the above object, a sample holder for fluorescent X-ray analysis of the present invention is a sample holder for fluorescent X-ray analysis used for fluorescent X-ray analysis of a liquid sample, and includes a cylindrical fixing tool and A polymer film having a slack portion for forming a hollow portion of a predetermined size inside the cylindrical fixing tool and a peripheral portion fixed along one end of the cylindrical fixing tool, and A cylindrical holder having an outer diameter smaller than an inner diameter of the cylindrical fastener and slidable along an inner periphery of the cylindrical fastener, wherein the cylinder is inserted from one end of the cylindrical fastener. A cylindrical holder inserted inside the cylindrical fastener and slid upward along the inner periphery of the cylindrical fastener to push up the slack portion of the polymer film near the inner periphery of the cylindrical fastener And the slack portion of the polymer film is pushed downward A liquid sample is dripped and dried in the formed recess, the cylindrical holder is slid upward along the inner periphery of the cylindrical fastener, and the slack portion is formed by one end of the cylindrical holder. Hold the dried and supported sample in a flattened position.

  According to the sample holder for fluorescent X-ray analysis of the present invention, a large amount of drip-dried sample can always be held at a certain height position, so that highly sensitive and highly accurate analysis can be performed.

  The fluorescent X-ray analyzer of the present invention is a fluorescent X-ray analyzer provided with the fluorescent X-ray analysis sample holder of the present invention, wherein a liquid sample is dropped and dried in the recess, and the cylindrical holder An X-ray source that irradiates primary X-rays to a portion that was the hollow portion where the slack portion was flattened and held the sample, and the intensity of secondary X-rays generated from the portion that was the hollow portion are measured Detecting means.

  The method for producing a sample holder for fluorescent X-ray analysis of the present invention is a method for producing a sample holder for fluorescent X-ray analysis, comprising a cylindrical fixing tool and a polymer film, and an inner side of the cylindrical fixing tool. The peripheral part of the polymer film is fixed along one end of the cylindrical fixing tool so that a slack part for forming a hollow part of a predetermined size is formed on the inner diameter of the cylindrical fixing tool. A cylindrical holder that has a smaller outer diameter and is slidable along the inner periphery of the cylindrical fastener, and the cylindrical holder is located inside one end of the cylindrical fastener. Insert and slide upward along the inner periphery of the cylindrical fastener to push up the slack portion of the polymer film in the vicinity of the inner periphery of the cylindrical fastener to one end of the cylindrical holder The slack portion is flattened by sliding the cylindrical holder downward and again the polymer. To form a slack portion of Irumu by depressing the slack portion downwardly to form a recess portion for holding a liquid sample is dropped.

  According to the method for producing a sample holder for fluorescent X-ray analysis of the present invention, a sample holder for fluorescent X-ray analysis that can always hold a large amount of drip-dried sample at a certain height position is produced. Therefore, highly sensitive and highly accurate analysis can be performed.

  The fluorescent X-ray analysis method of the present invention is a fluorescent X-ray analysis method using the fluorescent X-ray analysis sample holder of the present invention, in which a liquid sample is dropped and dried in the recess, and the cylindrical holder is used to While supporting the slack portion at a flattened position, the dried sample is held in the portion that was the depression, and the secondary X generated by irradiating the portion that was the depression with primary X-rays. Measure the line strength.

  According to the fluorescent X-ray analysis method and apparatus of the present invention, since the fluorescent X-ray analysis sample holder of the present invention is used, the same effects as the fluorescent X-ray analysis sample holder of the present invention can be obtained.

It is a longitudinal cross-sectional view of the cylindrical fixing tool of the sample holder for fluorescent X-ray analysis which is 1st Embodiment of this invention. It is a longitudinal cross-sectional view which shows the state by which the cylindrical holder was inserted in the cylindrical fixing tool of the sample holder. It is a longitudinal cross-sectional view which shows the state in which the slack part of the sample holder is flat. It is a longitudinal cross-sectional view which shows the state in which the hollow part of the sample holder is formed with a pressing jig. It is a longitudinal cross-sectional view which shows the holding state of the liquid sample by the sample holder. It is a longitudinal cross-sectional view which shows the state which hold | maintains the sample which the slack part of the sample holder became flat and was dried. It is a calibration curve of Si. It is the schematic of the top surface irradiation type | mold fluorescence X-ray-analysis apparatus which is 3rd Embodiment of this invention. It is the schematic of the bottom surface irradiation type | mold fluorescence X-ray-analysis apparatus which is a deformation | transformation of 3rd Embodiment of this invention. It is measurement data of Na. It is the measurement data of Mg. It is the measurement data of Al. It is a perspective view of the conventional sample holder. It is a longitudinal cross-sectional view which shows the state in which the other conventional sample holder hold | maintains a liquid sample. It is a longitudinal section showing the state where the sample holder holds the dried sample.

  Hereinafter, the sample holder for fluorescent X-ray analysis which is 1st Embodiment of this invention is demonstrated. A cylindrical fixing tool 3 and a polymer film 2 are prepared, and as shown in FIG. 1, a cylindrical part is formed so as to form a slack part 2a for forming a recessed part of a predetermined size inside the cylindrical fixing tool 3. The peripheral portion 2b of the polymer film is fixed along one end 3a of the shaped fixing tool 3. The slack portion 2a is a circle having a predetermined radius. A method for fixing the peripheral portion 2b of the polymer film will be described later. The cylindrical fixing tool 3 includes a locking portion having a sliding friction force larger than that of other inner peripheral portions, for example, three rows of circumferential slits 3c on the inner periphery of the other end portion 3b. For example, the cylindrical fixture 3 has a cylindrical shape with an outer diameter of 43.5 mm, an inner diameter of 40.5 mm, and a height of 23 mm, and is made of a resin material such as polyethylene or polystyrene. For example, the polymer film 2 is made of polyester, polypropylene, polyimide or the like having a thickness of 12 μm or less, preferably 2 to 8 μm, and the material is more preferably polyimide.

  A cylindrical holder 4 having an outer diameter smaller than the inner diameter of the cylindrical fastener 3 and slidable along the inner periphery of the cylindrical fastener 3 is prepared. For example, the cylindrical holder 4 has a cylindrical shape with an outer diameter of 40.0 mm, an inner diameter of 38 mm, and a height of 24.5 mm, and is made of a synthetic resin material such as polyethylene or polystyrene.

  As shown in FIG. 2, the cylindrical holder 4 is inserted inside the other end 3 b of the cylindrical fixing tool 3 and is slid upward along the inner periphery of the cylindrical fixing tool 3. As a method of sliding the cylindrical fixing tool 3 upward, the other end 4b of the cylindrical holder 4 is placed on a desk, and an inner diameter slightly larger than the outer diameter of the cylindrical holder 4 and a sufficient depth. The cylindrical fixing tool 3 may be slid downward along the outer periphery of the cylindrical holder 4 using a bell-shaped pushing jig (not shown) having

  When it is slid upward along the inner periphery of the cylindrical fixture 3, the slack portion 2a is supported at a position where the slack portion 2a is flattened by one end 4a of the cylindrical holder 4 as shown in FIG. At this time, at the position where the end surface 4d of one end of the cylindrical holder 4 and the end surface 3d of the other end of the cylindrical fastener 3 are flush with each other, the locking portion 3c of the cylindrical fastener 3 The slack portion 2a is supported and stretched to a tight flat state.

  The tensioned flat state is extended at a position where the end surface 4d of one end of the cylindrical holder 4 protrudes several millimeters from the end surface 3d of the other end of the cylindrical fixing member 3 and the slack portion 2a. May be supported. In the sample holder 1 according to the first embodiment of the present invention, the cylindrical holding is performed so that the slack portion 2a is supported at a position where the end surface 4d and the end surface 3d are flush with each other, or the end surface 4d protrudes several mm from the end surface 3d. The height of the tool 4 is 1.5 mm higher than the height of the cylindrical fixing tool 3.

  As can be seen from FIG. 3, the sagging of the polymer film 2 in which the end surface 4d at one end of the cylindrical holder 4 and the end surface 3d at the other end of the cylindrical fixture 3 are supported in a flush state. When the entire portion 2a is extended on a plane, the portion 2a has a circular shape having a radius of a length obtained by adding the height of the cylindrical holder 4 and 1/2 of the same outer diameter.

  The cylindrical holder 4 is slid downward, the slack portion 2a of the polymer film is formed again, and the slack portion 2a is pushed downward to form the hollow portion 2c that holds the liquid sample S to be dropped. . As shown in FIG. 4, for example, a cylinder having a diameter of 15 mm and a length of 100 mm, made of a synthetic resin such as polyethylene or Teflon (registered trademark), or a glass tube whose end face is treated so as not to damage the polymer film 2 The depression 2c is formed by pressing the slack portion 2a downward using the pressing jig 5. The formed recess 2c is, for example, a circle having a depth of about 20 mm and a diameter of about 15 mm in plan view. The shape of the dent 2c is not limited to the above, and may be any shape that can hold an instilled liquid sample such as an ellipse or a rectangle in plan view. Also, the dimensions are not limited to the above, and the size suitable for the amount of liquid sample to be instilled, such as a depth of 2 to 20 mm and a maximum length of 5 to 35 mm in plan view, by changing the distance by which the cylindrical holder 4 is slid downward. What is necessary is just to form.

  A method for fixing the polymer film 2 to the cylindrical fixing tool 3 will be described. As described above, the circular predetermined radius of the slack portion 2a can be calculated from the same outer diameter as the height of the cylindrical holder 4, so that the cylindrical fastener 3 is placed on the outer periphery of the circle having the predetermined radius. A polymer film 2 having a peripheral portion 2b serving as a margin for adhering along one end portion 3a is prepared. For example, if the cylindrical holder 4 having an outer diameter of 40.0 mm, an inner diameter of 38 mm, and a height of 24.5 mm is used and the width of the peripheral portion 2b is 20 mm, the radius of the slack portion 2a is 44.5 mm. A polymer film 2 having a radius of 64.5 mm is prepared. The region of the peripheral portion 2b that becomes a margin is clarified by displaying a line on the boundary between the slack portion 2a and the peripheral portion 2b on the surface of the polymer film 2 that is not in contact with the sample. The peripheral portion 2b is fixed along the outer periphery of the end portion 3a, for example, the end portion 3a. The part to be fixed is not limited to the outer periphery of the end 3a, but may be the end face of the end 3a. The polymer film 2 is preferably fixed by welding, bonding with an adhesive, sticking with an adhesive tape, or the like, but it may be fixed with a ring or the like.

  In addition, the manufacturing method of the sample holder 1 of 1st Embodiment is also embodiment of this invention.

  In the fluorescent X-ray analysis using the sample holder 1, the liquid sample S is dropped into the recess 2c as shown in FIG. Here, since the recess 2c is recessed from the periphery thereof, the liquid sample S does not roll from the recess 2c to the periphery, and is stably held in the recess 2c. And if the dripped liquid sample S is heat-dried at 40-60 degreeC with a suitable heat-drying instrument, the liquid sample S of the hollow 2c will be dried and hold | maintained.

  When the cylindrical holder 4 is slid upward along the inner periphery of the cylindrical fixture 3, the slack portion 2a is supported by the locking portion 3c at a flattened position as shown in FIG. The sample S dried in position is held.

  The sample holder 1 is placed on the sample stage of the fluorescent X-ray analyzer, and the X-ray fluorescence analysis is performed by irradiating the primary X-rays onto the portion that was the recess 2c holding the component S of the liquid sample S. . A method for placing the sample holder 1 on the sample stage of the X-ray fluorescence analyzer will be described later.

  Using the sample holder 1 of the first embodiment, a calibration curve is obtained when the ether solution sample 1 containing a trace amount of Si is drip-dried 100 μl (microliter) and measured with a primary X-ray output of 2.4 KW. As shown in FIG. In this calibration curve, the horizontal axis represents the concentration of Si, the vertical axis represents the fluorescent X-ray intensity, and shows good linearity in the range of 4 ppm or less. When the detection limit LLD is calculated from this calibration curve in which the measurement time of the fluorescent X-ray intensity is 120 seconds, it becomes 30 ppb. According to this measurement result, it was possible to measure a trace amount of Si in an organic solvent that could not be measured until now.

  As described above, according to the sample holder 1 for X-ray fluorescence analysis of the first embodiment, the deep large depression 2c is formed by pushing down the slack portion 2a of the polymer film downward, so that a large amount of liquid The sample can be dropped and dried at a time, and high sensitivity analysis can be performed with high accuracy due to high concentration. If a plurality of infusions are performed to instill a large amount of liquid sample as in the prior art, the infusion amount error accumulates a plurality of times, the infusion amount error increases, and the analysis accuracy deteriorates. For example, if drip is performed 10 times, the error becomes 10 times. Furthermore, since the dried sample S is held by the tightly stretched and flat polymer film 2, the sample height at the time of measurement is always a constant height, and an accurate analysis can be performed. . In particular, even a sample of an organic solvent solution whose surface tension is weak and the liquid sample crawls up and easily spreads outside the depression is held at a fixed position in the deep large depression 2c, so that a reproducible analysis can be performed. The effect is remarkable. Furthermore, since the polymer film 2 is used as the holding carrier for the drip-dried sample S, the background can be suppressed by reducing scattered X-rays from the holding carrier.

  Next, a fluorescent X-ray analysis method according to the second embodiment of the present invention will be described. An X-ray fluorescence analyzer 10 used in this analysis method is a third embodiment of the present invention, and as shown in FIG. 8, is an apparatus including the sample holder 1 for X-ray fluorescence analysis of the first embodiment. The sample holder 1 is a sample stage 17 that is placed directly or via the sample holder 18, and the liquid sample S is dropped and dried to hold the dried sample S. The intensity of the secondary X-ray 15 such as an X-ray source 11 such as an X-ray tube that irradiates the primary X-ray 12 to the part 2d that was the depression 2c, and the fluorescent X-ray generated from the part 2d that was the depression 2c. And a detecting means 16 such as an X-ray detector for measurement. In order to reduce the influence of scattered radiation from the sample holder 18, a spacer 19 made of an appropriate material for height adjustment may be provided.

  In the fluorescent X-ray analysis method of the second embodiment using this apparatus, the liquid sample S is dropped into the recess 2c of the fluorescent X-ray analysis sample holder 1 of the first embodiment and dried, and then held in a cylindrical shape. The tool 4 is slid upward along the inner periphery of the cylindrical fixing tool 3, and is supported by the locking part 3c at a flattened position where the slack part 2a is tight as shown in FIG. 6, and is dried at that position. Sample S is held. The entire sample holder 1 holding the dried sample S is placed in the opening of the bottomed cylindrical sample holder 18, and the sample holder 18 is placed on the sample stage 17.

  The sample holder 1 may be placed directly on the sample stage 17 without using the sample holder 18.

  As described above, the primary X-ray 12 is irradiated to the portion 2d which is the depression 2c holding the dried sample S of the sample holder 1 placed on the sample stage 17, and the secondary X-ray 15 generated is generated. Measure strength.

  An oil containing 5000 ppm of each of the elements Na, Mg, and Al is diluted 200 times with an aromatic organic solvent, and the aromatic solution is instilled into the depression 2c by 30 μl by the analysis method of this embodiment. Data measured for 120 seconds at the next X-ray output of 50 W are shown in FIGS. In this measurement data, the horizontal axis represents 2θ which is the gonio scanning angle of the fluorescent X-ray analyzer, and the vertical axis represents the fluorescent X-ray intensity. This measurement result is highly sensitive data with a detection limit LLD of Na 3.3 ppm, Mg 2.3 ppm, and Al 0.68 ppm. Therefore, even when diluted at a high magnification, it is possible to measure trace components in the sample. Furthermore, by diluting an oil sample such as heavy oil at a high magnification, the influence of coexisting elements can be sufficiently suppressed, and high-precision analysis can be performed. In collecting the measurement data shown in FIGS. 10 to 12, a polypropylene film having a thickness of 12 μm was used as the polymer film 2 holding the liquid sample.

  The above is the case of so-called top surface irradiation in which the primary X-ray 12 is irradiated from above the dried sample S. As shown in FIG. 9, the primary X-ray is irradiated from below the dried sample S. The sample holder 1 can also be used in the case of so-called bottom irradiation.

  According to the method and apparatus of the second and third embodiments, since the fluorescent X-ray analysis sample holder 1 of the first embodiment is used, the same operational effects as those of the first embodiment can be obtained.

  In the embodiment described above, the sample holder 1 for fluorescent X-ray analysis in which the polymer film 2 is fixed along the one end 3a of the cylindrical fixture 3 has been described, but the cylindrical fixture 3 is not used. In addition, the polymer film 2 may be supported on the cylindrical holder 4 by a snap ring (not shown) that is detachable along one end of the cylindrical holder. For example, a snap ring made of polyethylene is coupled by an uneven fitting on the outer periphery of one end of the cylindrical holder, and can be removed from the cylindrical holder by removing the fitting.

  In the sample holder for fluorescent X-ray analysis using this snap ring, the polymer film 2 is sandwiched between the snap ring and one end portion 4a of the cylindrical holder 4, and the pressing jig 5 has a desired size. After forming the recess 2c, the polymer film 2 is supported on one end 4a of the cylindrical holder 4 with a snap ring. The liquid sample S is dropped into the recess 2c and dried. When the liquid sample S is dried, the snap ring is removed from the cylindrical holder 4, and the polymer film 2 is stretched so as to be tight and flat on the end surface of one end portion 4a of the cylindrical holder. The polymer film 2 is supported by one end 4a of the cylindrical holder. Since the dried sample S is held in the portion 2d that is the depression 2c, the entire sample holder 1 is placed on the opening of the sample holder 18 in the same manner as the analysis method of the second embodiment. The sample holder 18 is placed on the sample stage 17 and analyzed.

  In this analysis method, since a desired large depression 2c is formed, a large amount of liquid sample can be dropped and dried by one operation, and high sensitivity and high accuracy analysis can be performed with high concentration. If a plurality of infusions are performed to instill a large amount of liquid sample as in the prior art, the infusion amount error accumulates a plurality of times, the infusion amount error increases, and the analysis accuracy deteriorates. For example, if drip is performed 10 times, the error becomes 10 times. Furthermore, since the dried sample S is held by the tightly stretched and flat polymer film 2, the sample height at the time of measurement is always a constant height, and an accurate analysis can be performed. . In particular, even a sample of an organic solvent solution whose surface tension is weak and the liquid sample tends to spread and spread outside the depression is held at a fixed position in the deep large depression 2c, so that a reproducible analysis can be performed. The effect is remarkable.

DESCRIPTION OF SYMBOLS 1 Sample holder 2 for fluorescent X-ray analysis Polymer film 2a Slack part 2b Peripheral part 2c Indented part 2d The part which was a hollow 3 Cylindrical fixing tool 3a One end part 4 of a cylindrical fixing tool Cylindrical holding tool 4a One end 10 of the cylindrical holder X-ray fluorescence analyzer 11 X-ray source 12 Primary X-ray 15 Secondary X-ray 16 Detection means S Liquid sample

Claims (4)

A sample holder for X-ray fluorescence analysis used for X-ray fluorescence analysis of a liquid sample,
A cylindrical fastener,
A polymer film having a slack portion for forming a recessed portion of a predetermined size inside the cylindrical fixing tool and a peripheral portion fixed along one end of the cylindrical fixing tool;
A cylindrical holder having an outer diameter smaller than an inner diameter of the cylindrical fastener, and slidable along an inner periphery of the cylindrical fastener, wherein the cylindrical fastener is disposed from one end of the cylindrical fastener. A cylindrical holder that is inserted inside the cylindrical fixing tool and is slid upward along the inner periphery of the cylindrical fixing tool to push up the slack portion of the polymer film near the inner periphery of the cylindrical fixing tool. With tools,
The liquid sample is dripped and dried into a recess formed by the downward slack of the polymer film being pushed down, and the cylindrical holder is slid upward along the inner periphery of the cylindrical fastener, A sample holder for fluorescent X-ray analysis which holds a dried sample while being supported at a position where the slack portion is flattened by one end of a cylindrical holder. A fluorescent X-ray analyzer comprising the fluorescent X-ray analysis sample holder according to claim 1,
An X-ray source that irradiates primary X-rays onto a portion of the hollow portion where the liquid sample is dropped and dried in the hollow portion, the slack portion is flattened by the cylindrical holder and the sample is held;
A fluorescent X-ray analyzer comprising: detection means for measuring the intensity of secondary X-rays generated from the portion that was the depression. A method for producing a sample holder for fluorescent X-ray analysis,
Prepare a cylindrical fastener and a polymer film,
The peripheral portion of the polymer film is fixed along one end of the cylindrical fixing tool so that a slack portion for forming a hollow portion of a predetermined size is formed inside the cylindrical fixing tool,
A cylindrical holder having an outer diameter smaller than an inner diameter of the cylindrical fastener, and being slidable along an inner periphery of the cylindrical fastener;
The cylindrical holder is inserted inside one end of the cylindrical fixing tool, and is slid upward along the inner periphery of the cylindrical fixing tool, so that the cylindrical portion of the slack portion of the polymer film is Pushing up the vicinity of the inner periphery of the fastener to flatten the slack portion by one end of the cylindrical holder,
Fluorescent X-ray analysis that slides down the cylindrical holder, forms a sagging portion of the polymer film again, and pushes the sagging portion downward to form a hollow portion that holds the dropped liquid sample. Method for preparing a sample holder. A fluorescent X-ray analysis method using the fluorescent X-ray analysis sample holder according to claim 1,
A liquid sample is dropped and dried in the recess,
While supporting the slack portion at a position flattened by the cylindrical holder, and holding the dried sample in the portion that was the depression,
A fluorescent X-ray analysis method for measuring the intensity of secondary X-rays generated by irradiating primary X-rays to the portion that was the depression.

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