JP4838821B2 - Sample holder for fluorescent X-ray analysis and fluorescent X-ray analysis method and apparatus using the same - Google Patents

Sample holder for fluorescent X-ray analysis and fluorescent X-ray analysis method and apparatus using the same Download PDF

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JP4838821B2
JP4838821B2 JP2008068756A JP2008068756A JP4838821B2 JP 4838821 B2 JP4838821 B2 JP 4838821B2 JP 2008068756 A JP2008068756 A JP 2008068756A JP 2008068756 A JP2008068756 A JP 2008068756A JP 4838821 B2 JP4838821 B2 JP 4838821B2
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JP2009222615A (en
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正道 森
典子 安西
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Rigaku Corp
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本発明は、液体試料を前処理して含有成分を蛍光X線分析するために用いられる蛍光X線分析用試料保持具ならびにそれを用いる蛍光X線分析方法および装置に関する。   The present invention relates to a sample holder for fluorescent X-ray analysis used for pre-processing a liquid sample and analyzing a contained component by fluorescent X-ray analysis, and an X-ray fluorescence analysis method and apparatus using the same.

従来、液体試料を前処理して含有成分を蛍光X線分析するための技術として、ろ紙に液体試料を滴下して乾燥させることにより含有成分を濃縮し、かつ保持させるろ紙点滴法がある。しかし、ろ紙の厚さは数100μmあるため、1次X線の散乱線が多く発生してバックグラウンドが高くなる。この散乱X線によるバックグラウンドを抑制するために、厚さ0.5μm程度のポリマーフィルムにカーボンなどの蒸着膜を形成して、その蒸着膜を形成した部位に液体試料を滴下して乾燥させることにより含有成分を保持させる技術がある(特許文献1)。しかし、蒸着膜はきわめて薄く、しかも液体試料を均一に凝縮させるために蒸着膜の直径を約2mmまでとしているので、一回に滴下できる量は、ろ紙の場合の滴下量の同等以下となる。したがって、ろ紙よりも薄いポリマーフィルムおよび蒸着膜の使用によりバックグラウンドは低くなるものの、得られる蛍光X線の強度は増大しないため、検出限界の向上は十分ではない。   2. Description of the Related Art Conventionally, as a technique for preprocessing a liquid sample and subjecting the contained component to X-ray fluorescence analysis, there is a filter paper drip method in which the contained component is concentrated and retained by dropping the liquid sample onto a filter paper and drying it. However, since the thickness of the filter paper is several hundred μm, a lot of primary X-ray scattered rays are generated and the background becomes high. In order to suppress the background caused by the scattered X-ray, a vapor deposition film such as carbon is formed on a polymer film having a thickness of about 0.5 μm, and a liquid sample is dropped on the portion where the vapor deposition film is formed and dried. There is a technique for retaining the contained components by (Patent Document 1). However, since the vapor deposition film is extremely thin and the diameter of the vapor deposition film is about 2 mm in order to uniformly condense the liquid sample, the amount that can be dripped at a time is equal to or less than the dripping amount in the case of filter paper. Therefore, although the background is lowered by using a polymer film and a vapor deposition film thinner than the filter paper, the intensity of fluorescent X-rays to be obtained does not increase, so that the detection limit is not sufficiently improved.

そこで、バックグラウンドを抑制するとともに、より大きい強度の蛍光X線を均一に発生させることにより、検出限界を十分に向上できる液体試料保持具として、輪状の台座と、その台座に保持される周辺部およびX線を透過させるための透過部を有する疎水性フィルムと、その疎水性フィルムの透過部に貼付されたシート状の液体吸収材とを備え、その液体吸収材に前記液体試料が滴下されて乾燥されることにより、前記含有成分を保持する液体試料保持具がある(特許文献2)。この液体試料保持具は、液体吸収材に前記液体試料の含有成分が保持されるので、1回に500μl程度の多量の液体試料を点滴することができ、さらに液体試料の点滴と乾燥を繰り返し行うことにより数mlの試料を点滴乾燥することができるので、測定対象元素の含有量が微量の試料の測定に適している。   Therefore, as a liquid sample holder that can sufficiently improve the detection limit by suppressing the background and uniformly generating fluorescent X-rays with higher intensity, a ring-shaped pedestal and a peripheral portion held by the pedestal And a hydrophobic film having a transmission part for transmitting X-rays, and a sheet-like liquid absorbent material affixed to the transmission part of the hydrophobic film, and the liquid sample is dropped onto the liquid absorbent material There is a liquid sample holder that holds the above-mentioned components by being dried (Patent Document 2). In this liquid sample holder, since the components contained in the liquid sample are held in the liquid absorbent material, a large amount of liquid sample of about 500 μl can be instilled at one time, and the liquid sample is repeatedly instilled and dried. Therefore, a sample of several ml can be drip-dried, which is suitable for measurement of a sample with a small amount of the element to be measured.

特許文献1に記載の液体試料保持具はポリマーフィルムにカーボンなどの蒸着膜を形成しており、特許文献2に記載の液体試料保持具は疎水性フィルムに貼付されたシート状の液体吸収材を備えているので、1次X線が照射されると、このカーボン蒸着膜や液体吸収材に含まれているMg、Al、P、Sなどの軽元素の不純線が発生する。そこで、カーボン蒸着膜や液体吸収材を有しておらず、極薄のポリマーフィルムに直径2mmの窪みを成形した試料保持具がMOXTEK社から販売されている。
特開2003−90810号公報 特表2005−012889号公報
The liquid sample holder described in Patent Document 1 forms a vapor deposition film such as carbon on a polymer film, and the liquid sample holder described in Patent Document 2 uses a sheet-like liquid absorbent material affixed to a hydrophobic film. Therefore, when primary X-rays are irradiated, impure lines of light elements such as Mg, Al, P, and S contained in the carbon vapor deposition film and the liquid absorbent material are generated. Accordingly, a sample holder which does not have a carbon vapor deposition film or a liquid absorbent and is formed by forming a recess having a diameter of 2 mm in an extremely thin polymer film is sold by MOTTEK.
JP 2003-90810 A JP 2005-012889 gazette

しかし、MOXTEK社の試料保持具は、ポリマーフィルムを成形して製作されているので、点滴された液体試料Sの乾燥前の試料保持具50の状態を示す断面図10Aおよび点滴された液体試料Sの乾燥後の試料保持具50の状態を示す断面図10Bに示すように、液体試料Sが点滴される窪み54は、液体試料Sの乾燥後であっても乾燥前と同様に窪んでいるが、液体試料Sの乾燥段階においてポリマーフィルム53に少し変形が生じ、個々の試料保持具50によって窪み54に保持されている液体試料の含有成分S1の高さが変動し、検出される蛍光X線の強度が変動する。そのため、精度よく分析することができない。   However, since the sample holder of MOXTEK is manufactured by molding a polymer film, the cross-sectional view 10A showing the state of the sample holder 50 before drying the instilled liquid sample S and the infused liquid sample S. As shown in the cross-sectional view 10B showing the state of the sample holder 50 after drying, the recess 54 into which the liquid sample S is instilled is recessed even after the liquid sample S is dried, as before drying. In the drying stage of the liquid sample S, the polymer film 53 is slightly deformed, and the height of the component S1 of the liquid sample held in the depression 54 by the individual sample holder 50 varies, and the detected fluorescent X-rays. The intensity of fluctuates. Therefore, it cannot be analyzed with high accuracy.

本発明は前記従来の問題に鑑みてなされたもので、液体試料を前処理して含有成分を蛍光X線分析するために用いられる蛍光X線分析用試料保持具ならびにそれを用いる蛍光X線分析方法および装置において、蛍光X線分析用試料保持具からの不純線をなくし、バックグラウンドを抑制して検出限界を向上させるとともに分析精度を向上させることを目的とする。   The present invention has been made in view of the above-mentioned conventional problems. A sample holder for fluorescent X-ray analysis used for pre-processing a liquid sample and analyzing the contained components by fluorescent X-ray analysis, and fluorescent X-ray analysis using the same An object of the method and apparatus is to eliminate impurity lines from the sample holder for fluorescent X-ray analysis, suppress the background, improve the detection limit, and improve the analysis accuracy.

前記目的を達成するために、本発明の蛍光X線分析用試料保持具は、液体試料を前処理して含有成分を蛍光X線分析するために用いられる蛍光X線分析用試料保持具であって、輪状の台座と、その台座に所定の張力で保持される周辺部およびX線を透過させるための透過部を有する厚さ12μm以下の熱収縮性フィルムとを備え、前記透過部に窪みが形成されており、その透過部の窪みに前記液体試料が滴下されて乾燥されることにより、前記透過部が平坦になるとともに、前記含有成分を保持する。     In order to achieve the above object, the sample holder for fluorescent X-ray analysis of the present invention is a sample holder for fluorescent X-ray analysis used for pre-processing a liquid sample and analyzing the contained components by fluorescent X-ray analysis. And a heat-shrinkable film having a thickness of 12 μm or less having a peripheral part held by the base with a predetermined tension and a transmission part for transmitting X-rays, and a depression is formed in the transmission part. It is formed, and the liquid sample is dropped into the depression of the transmission part and dried, so that the transmission part becomes flat and the contained component is held.

本発明の蛍光X線分析用試料保持具によれば、1次X線が照射される熱収縮性フィルムの透過部には従来技術のカーボン蒸着膜や液体吸収材などの液体試料保持材を有しておらず、熱収縮性フィルムの透過部に形成された窪みに液体試料を保持するので、1次X線が照射されても不純線が発生することがない。また、液体試料保持材を有していないので、照射される1次X線による散乱線の発生がほとんどなく、バックグラウンドを大幅に抑制することができる。これらにより検出限界を十分に向上できる。また、液体試料が乾燥されることにより、前記透過部が平坦になり、測定時の試料高さは常に一定の高さになるので、精度のよい分析を行うことができる。   According to the sample holder for fluorescent X-ray analysis of the present invention, the permeation portion of the heat-shrinkable film irradiated with primary X-rays has a liquid sample holder such as a conventional carbon vapor deposition film or a liquid absorbent material. In addition, since the liquid sample is held in the depression formed in the transmission part of the heat-shrinkable film, no impure line is generated even when the primary X-ray is irradiated. In addition, since the liquid sample holding material is not provided, there is almost no generation of scattered radiation due to the irradiated primary X-rays, and the background can be significantly suppressed. These can sufficiently improve the detection limit. In addition, since the liquid sample is dried, the transmission portion becomes flat, and the sample height at the time of measurement is always a constant height, so that an accurate analysis can be performed.

本発明の蛍光X線分析用試料保持具においては、前記熱収縮性フィルムが、ポリエステル、ポリプロピレンおよびポリイミドの一群から選ばれた1つからなることが好ましい。   In the sample holder for fluorescent X-ray analysis of the present invention, the heat-shrinkable film is preferably made of one selected from the group consisting of polyester, polypropylene and polyimide.

本発明の蛍光X線分析方法は、本発明の蛍光X線分析用試料保持具を用いる蛍光X線分析方法であって、前記透過部の窪みに液体試料を滴下して乾燥させることにより、前記透過部を平坦にするとともに、前記透過部の窪みであった部位に前記液体試料の含有成分を保持させ、前記透過部の窪みであった部位に1次X線を照射して、発生する2次X線の強度を測定する。   The fluorescent X-ray analysis method of the present invention is a fluorescent X-ray analysis method using the sample holder for fluorescent X-ray analysis of the present invention, wherein the liquid sample is dropped into the depression of the transmission part and dried, 2 is generated by flattening the transmissive part, holding a component contained in the liquid sample in a part of the transmissive part, and irradiating the part of the transmissive part with primary X-rays. The intensity of the next X-ray is measured.

本発明の蛍光X線分析装置は、本発明の蛍光X線分析用試料保持具を用いる蛍光X線分析装置であって、液体試料が滴下されて乾燥されることにより前記液体試料の含有成分を保持した前記透過部の窪みであった部位に1次X線を照射するX線源と、前記透過部の窪みであった部位から発生する2次X線の強度を測定する検出手段とを備える。   The X-ray fluorescence analyzer of the present invention is an X-ray fluorescence analyzer using the sample holder for X-ray fluorescence analysis of the present invention, and the components contained in the liquid sample are removed by dripping and drying the liquid sample. An X-ray source that irradiates a primary X-ray to a portion that was a depression of the held transmission portion, and a detection unit that measures the intensity of secondary X-rays generated from the portion that was a depression of the transmission portion. .

本発明の蛍光X線分析方法および装置によれば、本発明の蛍光X線分析用試料保持具を用いるので、本発明の蛍光X線分析用試料保持具と同様の作用効果が得られる。   According to the fluorescent X-ray analysis method and apparatus of the present invention, since the fluorescent X-ray analysis sample holder of the present invention is used, the same effects as the fluorescent X-ray analysis sample holder of the present invention can be obtained.

以下、本発明の第1実施形態である蛍光X線分析用試料保持具について説明する。図1に示すように、この試料保持具1は、液体試料を前処理して含有成分を蛍光X線分析するために用いられるものであって、熱収縮性フィルム3を安定に保持するための輪状の台座2と、その台座2に所定の張力で保持される周辺部3aおよびX線を透過させるための透過部3bを有する熱収縮性フィルム3とを備えている。透過部3bにおいて窪んでいる部位である窪み3cに液体試料Sが滴下されて乾燥されることにより、透過部3bが平坦になるとともに、窪み3cであった部位に液体試料Sの含有成分を濃縮し、保持する。例えば、台座2は外径50mm、内径30mm、厚さ1mmの輪状であり、ポリエチレン、ポリスチレンなどの樹脂材料からなる。例えば、熱収縮性フィルム3は厚さ12μm以下、好ましくは2〜6μmのポリエステル、ポリプロピレン、ポリイミドなどからなり、材質としてはポリプロピレンがより好ましい。   Hereinafter, the sample holder for fluorescent X-ray analysis which is 1st Embodiment of this invention is demonstrated. As shown in FIG. 1, this sample holder 1 is used for pre-processing a liquid sample and analyzing the contained components by fluorescent X-ray analysis, and stably holds the heat-shrinkable film 3. A ring-shaped pedestal 2 and a heat shrinkable film 3 having a peripheral part 3a held by the pedestal 2 with a predetermined tension and a transmission part 3b for transmitting X-rays are provided. When the liquid sample S is dropped into the depression 3c, which is a depression in the transmission part 3b, and dried, the transmission part 3b is flattened, and the components contained in the liquid sample S are concentrated in the depression 3c. And hold. For example, the base 2 has a ring shape with an outer diameter of 50 mm, an inner diameter of 30 mm, and a thickness of 1 mm, and is made of a resin material such as polyethylene or polystyrene. For example, the heat-shrinkable film 3 is made of polyester, polypropylene, polyimide or the like having a thickness of 12 μm or less, preferably 2 to 6 μm, and the material is more preferably polypropylene.

図2に縦断面図を示すが、ここでは、熱収縮性フィルム3は、直径が台座2の外径と同径の円形で、周辺部3aが台座2に所定の張力で保持されている。所定の張力で保持する方法については後述する。周辺部3aを除いた部分は、X線を透過させるための透過部3bであり、この透過部3bに窪み3cが形成されている。窪み3cは、例えば深さが約1mm、平面視で直径が約10mmの円形である。窪み3cの形状は上記に限らず、平面視で楕円形、矩形など点滴された液体試料が保持できる窪んだ形状であり、加熱されることにより熱収縮して平坦になる形状であればよい。また、寸法も上記に限らず、深さ0.5〜2mm、平面視での最大長さ5〜20mmが好ましく、深さと最大長さの寸法比では、1:3〜1:20が好ましく、1:8〜1:15がより好ましい。図1と図2では、台座2の内周は、熱収縮性フィルム3の下に隠れるので破線で示しているが、実際には透けて見える。   FIG. 2 shows a longitudinal cross-sectional view. Here, the heat-shrinkable film 3 is a circle having the same diameter as the outer diameter of the pedestal 2, and the peripheral portion 3 a is held on the pedestal 2 with a predetermined tension. A method of holding at a predetermined tension will be described later. The part excluding the peripheral part 3a is a transmission part 3b for transmitting X-rays, and a recess 3c is formed in the transmission part 3b. The depression 3c is, for example, a circle having a depth of about 1 mm and a diameter of about 10 mm in plan view. The shape of the dent 3c is not limited to the above, but may be any shape that can hold an instilled liquid sample such as an ellipse or a rectangle in plan view, and can be flattened by heat contraction when heated. In addition, the dimensions are not limited to the above, and a depth of 0.5 to 2 mm and a maximum length in a plan view of 5 to 20 mm are preferable, and a ratio of the depth to the maximum length is preferably 1: 3 to 1:20. 1: 8-1: 15 are more preferable. In FIG. 1 and FIG. 2, since the inner periphery of the base 2 is hidden under the heat-shrinkable film 3, it is shown with a broken line, but it actually shows through.

熱収縮性フィルム3を所定の張力で台座2に保持する方法について説明する。試料保持具1の第1製作手順である図4Aに示すように、台座2と同じ内外径を有する円筒21の上面21aに熱収縮性フィルム3を被せる。次に、試料保持具1の第2製作手順である図4Bに示すように、被せられた熱収縮性フィルム3の上から伸張リング22を円筒21に嵌めこみ、円筒21の側面に沿って下方にスライドさせながら円筒21の上面21aで熱収縮性フィルム3がぴんと張った状態になるように伸張する。伸張リング22は、円筒21の外径よりも少し小さい内径を有し、例えば弾性を有するゴムや樹脂材料で形成されており、その弾力により熱収縮性フィルム3に密着して熱収縮性フィルム3を引っ張りながらスライドするので、ぴんと張った状態に伸張することができる。   A method for holding the heat-shrinkable film 3 on the base 2 with a predetermined tension will be described. As shown in FIG. 4A, which is a first manufacturing procedure of the sample holder 1, the heat-shrinkable film 3 is placed on the upper surface 21 a of the cylinder 21 having the same inner and outer diameter as the base 2. Next, as shown in FIG. 4B, which is a second manufacturing procedure of the sample holder 1, the extension ring 22 is fitted into the cylinder 21 from above the covered heat-shrinkable film 3, and downward along the side surface of the cylinder 21. The heat-shrinkable film 3 is stretched so as to be tightly stretched on the upper surface 21a of the cylinder 21. The extension ring 22 has an inner diameter that is slightly smaller than the outer diameter of the cylinder 21 and is made of, for example, elastic rubber or a resin material, and is in close contact with the heat-shrinkable film 3 due to its elasticity. Because it slides while pulling, it can be stretched in a taut state.

次に、試料保持具1の第3製作手順である図4Cに示すように、例えばスプレーのり(成分はアクリルゴム(10%)、有機溶剤(54%)およびイソヘキサンガス(36%)で、噴射用高圧ガスはジメチルエーテル)を台座2の一方の面に吹き付けて、台座2の外周を熱収縮性フィルム3が伸張された円筒の上面21aの外周に合わせて貼付する。次に、伸張リング22を円筒21から取除き、台座2の外周からはみ出している熱収縮性フィルム3を切り取ると、試料保持具1の第4製作手順である図4Dに示すように、熱収縮性フィルム3が台座2に所定の張力で保持された薄膜リング5ができる。   Next, as shown in FIG. 4C, which is the third manufacturing procedure of the sample holder 1, for example, spray glue (components are acrylic rubber (10%), organic solvent (54%) and isohexane gas (36%), The high-pressure gas for injection is sprayed with dimethyl ether on one surface of the pedestal 2, and the outer periphery of the pedestal 2 is pasted in accordance with the outer periphery of the upper surface 21 a of the cylinder with the heat-shrinkable film 3 extended. Next, when the expansion ring 22 is removed from the cylinder 21 and the heat-shrinkable film 3 protruding from the outer periphery of the pedestal 2 is cut out, as shown in FIG. The thin film ring 5 in which the conductive film 3 is held on the base 2 with a predetermined tension is formed.

熱収縮性フィルム3をぴんと張った状態に伸張する方法については上記の方法に限らず、他の方法であってもよい。例えば板上に前記円筒21の筒長さを短くした円筒を複数個有する伸張板の円筒の上方から、1枚の熱収縮性フィルム3を所定の張力で引っ張りながら被せて固定する。その後、前記と同様にして台座2を複数の円筒のそれぞれの上面部分の熱収縮性フィルム3に貼付し、台座2の外周からはみ出している熱収縮性フィルム3を切り取る。   The method for stretching the heat-shrinkable film 3 in a tensioned state is not limited to the above method, and other methods may be used. For example, one heat-shrinkable film 3 is covered and fixed from above the cylinder of an extension plate having a plurality of cylinders with a reduced cylinder length of the cylinder 21 on the plate. Thereafter, in the same manner as described above, the base 2 is attached to the heat-shrinkable film 3 on the upper surface of each of the plurality of cylinders, and the heat-shrinkable film 3 protruding from the outer periphery of the base 2 is cut off.

次に、薄膜リング5に窪み3cを形成する方法について説明する。図4Eに示すような、例えば、厚さが1mm、外径29mm、内径10mmである、輪状の窪み成形冶具23を準備する。窪み成形冶具23は台座2と同じ材質であるポリエチレン、ポリスチレンなどの樹脂材料からなるのが好ましい。次に、例えば直径10mm、長さ100mm、一方の端面が半球面である円柱で、ポリエチレンやテフロン(登録商標)などの合成樹脂製の押圧冶具24を準備する。準備した輪状の窪み成形冶具23と押圧冶具24を用いて以下のように窪み3cを形成する。   Next, a method for forming the recess 3c in the thin film ring 5 will be described. As shown in FIG. 4E, for example, a ring-shaped depression forming jig 23 having a thickness of 1 mm, an outer diameter of 29 mm, and an inner diameter of 10 mm is prepared. The recess forming jig 23 is preferably made of a resin material such as polyethylene or polystyrene which is the same material as the base 2. Next, for example, a pressing jig 24 made of a synthetic resin such as polyethylene or Teflon (registered trademark) is prepared with a cylinder having a diameter of 10 mm, a length of 100 mm, and one end surface being a hemispherical surface. Using the prepared annular recess forming jig 23 and pressing jig 24, the recess 3c is formed as follows.

試料保持具1の第5製作手順の縦断面図である図4Eに示すように、窪み成形冶具23を平坦な台30の上に載置し、その上から熱収縮性フィルム3を上にして薄膜リング5の台座2の内周の中に窪み成形冶具23が入るように載置する。試料保持具1の第5製作手順の平面図である図4Fに示すように、透過部3bの下に窪み成形冶具23が透けて見える。試料保持具1の第6製作手順である図4Gに示すように、押圧冶具24の半球面の端面24aを下方にし、その外周を窪み成形冶具23の内周に合わせて、薄膜リング5の上方から、熱収縮性フィルム3の透過部3bを押圧し、押圧冶具24を持ち上げる。透過部3bが押圧されると、試料保持具1の第7製作手順である図4Hに示すように、透過部3bに窪み3cが形成される。窪み3cを形成する方法については、上記の方法に限らず、クリーンな空気や窒素ガスなどを透過部3bに吹き付けるなど他の方法であってもよい。   As shown in FIG. 4E, which is a longitudinal sectional view of the fifth manufacturing procedure of the sample holder 1, the recess forming jig 23 is placed on a flat table 30, and the heat-shrinkable film 3 is placed thereon from above. The thin-film ring 5 is placed so that the hollow forming jig 23 enters the inner periphery of the base 2 of the thin film ring 5. As shown in FIG. 4F, which is a plan view of the fifth manufacturing procedure of the sample holder 1, the depression forming tool 23 can be seen through the transmission part 3 b. As shown in FIG. 4G, which is the sixth manufacturing procedure of the sample holder 1, the end surface 24a of the hemispherical surface of the pressing jig 24 is set downward and the outer periphery thereof is aligned with the inner periphery of the depression forming jig 23 so that the upper side of the thin film ring 5 Then, the transmission part 3b of the heat-shrinkable film 3 is pressed, and the pressing jig 24 is lifted. When the transmission part 3b is pressed, a recess 3c is formed in the transmission part 3b as shown in FIG. The method for forming the depression 3c is not limited to the above method, and other methods such as blowing clean air or nitrogen gas to the transmission part 3b may be used.

この試料保持具1を用いる蛍光X線分析においては、図5に示すように、窪み3cに液体試料Sを滴下する。ここで、窪み3cはその周囲の透過部3bより窪んでいるので、液体試料Sは窪み3cから周囲に転がることがなく、窪み3cで安定に保持される。そして、滴下した液体試料Sを適切な加熱乾燥器具により40〜60℃に加熱乾燥させると、透過部3bの熱収縮性フィルム3の熱収縮により、もとと同程度の張力が発生して透過部3bは平坦になる。これにより、図3の縦断面図に示すように、窪み3cであった部位3dはその周囲の透過部3bと同一高さになるとともに、窪み3cであった部位3dに液体試料Sの含有成分S1が保持される。   In the fluorescent X-ray analysis using the sample holder 1, the liquid sample S is dropped into the recess 3c as shown in FIG. Here, since the recess 3c is recessed from the surrounding transmission part 3b, the liquid sample S does not roll from the recess 3c to the periphery, and is stably held in the recess 3c. Then, when the dropped liquid sample S is heated and dried to 40 to 60 ° C. with an appropriate heating and drying device, the heat shrinkage of the heat-shrinkable film 3 of the transmission part 3 b generates the same level of tension as the original and transmits. The part 3b becomes flat. As a result, as shown in the longitudinal sectional view of FIG. 3, the portion 3d that was the depression 3c has the same height as the surrounding transmission part 3b, and the component 3d contained in the liquid sample S is added to the portion 3d that was the depression 3c. S1 is held.

試料保持具1に点滴された液体試料Sを乾燥させる加熱乾燥器具としては、理化学機器として市販されている加熱ランプ、加熱乾燥器が好ましい。特願2007−220016号に記載されている試料乾燥装置(商品名 ウルトラドライ)を用いると、液体試料を汚染させないで乾燥させることができるので、より好ましい。試料保持具1を蛍光X線分析装置の試料台へ載置して、液体試料Sの含有成分S1を保持した透過部3bの窪み3cであった部位3dに1次X線を照射して蛍光X線分析を行う。試料保持具1を蛍光X線分析装置の試料台へ載置する方法については、後述する。   As the heating and drying apparatus for drying the liquid sample S that has been instilled on the sample holder 1, a heating lamp and a heating dryer that are commercially available as physics and chemistry equipment are preferable. It is more preferable to use a sample drying apparatus (trade name: Ultra Dry) described in Japanese Patent Application No. 2007-220016 because the liquid sample can be dried without being contaminated. The sample holder 1 is placed on the sample stage of the fluorescent X-ray analyzer, and the portion 3d that is the depression 3c of the transmission part 3b that holds the component S1 of the liquid sample S is irradiated with primary X-rays to fluoresce. Perform X-ray analysis. A method for placing the sample holder 1 on the sample stage of the X-ray fluorescence analyzer will be described later.

本実施形態の試料保持具1を用いて、この測定溶液の滴下量を500μlとして測定した測定データを図6および図7に示す。図6は軽元素の各元素毎の測定データであり、図7は重元素の定性分析チャートである。測定溶液は、Na、Mg、Al、Si、P、Cl、K、Ca、Ba、V、Cr、Mn、Fe、Co、Ni、Cu、Zn、Tl、Pbを含有する市販の混合標準溶液を蒸留水で希釈して、K、Pの濃度は5ppm(重量ppm。以下同じ)に、SiはSiO2として5ppmに、その他の元素の濃度は1ppmになるように調整した。この測定データ(図6および図7)によれば、試料保持具1からの不純線がなくなり、また散乱線の発生がほとんどなく、バックグラウンドを大幅に抑制できていることがわかる。   The measurement data measured using the sample holder 1 of the present embodiment with the measurement solution dropped to 500 μl are shown in FIGS. 6 and 7. FIG. 6 shows measurement data for each light element, and FIG. 7 is a qualitative analysis chart for heavy elements. The measurement solution is a commercially available mixed standard solution containing Na, Mg, Al, Si, P, Cl, K, Ca, Ba, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Tl, and Pb. Diluted with distilled water, the concentrations of K and P were adjusted to 5 ppm (weight ppm, hereinafter the same), Si was adjusted to 5 ppm as SiO2, and the concentrations of other elements were adjusted to 1 ppm. According to the measurement data (FIGS. 6 and 7), it can be seen that the impure line from the sample holder 1 is eliminated, the generation of scattered radiation hardly occurs, and the background can be greatly suppressed.

以上のように、本実施形態の蛍光X線分析用試料保持具1によれば、1次X線が照射される熱収縮性フィルムの透過部3bにはカーボン蒸着膜や液体吸収材などの液体試料保持材を有しておらず、従来の試料保持具が有しているろ紙に含まれているMg、Al、P、Sなどの軽元素による不純線が発生しない。また、液体試料保持材を有していないので、照射される1次X線による散乱線の発生がほとんどなく、バックグラウンドを大幅に抑制することができる。これらにより検出限界を十分に向上でき、特に軽元素においてその効果は顕著である。   As described above, according to the sample holder 1 for fluorescent X-ray analysis of the present embodiment, a liquid such as a carbon vapor deposition film or a liquid absorbent is provided in the transmission part 3b of the heat-shrinkable film irradiated with the primary X-rays. It does not have a sample holding material, and impure lines due to light elements such as Mg, Al, P, and S contained in the filter paper of a conventional sample holder do not occur. In addition, since the liquid sample holding material is not provided, there is almost no generation of scattered radiation due to the irradiated primary X-rays, and the background can be significantly suppressed. By these, the detection limit can be sufficiently improved, and the effect is particularly remarkable in light elements.

滴下された液体試料Sが乾燥されると、透過部3bの熱収縮性フィルム3の熱収縮により、もとと同程度の張力が発生して透過部3bは平坦になる。これにより、図3の縦断面図に示すように、窪み3cであった部位3dはその周囲の透過部3bと同一高さになるとともに、窪み3cであった部位3dに液体試料Sの含有成分S1が保持される。このように測定時の試料高さは常に一定の高さになるので、精度のよい分析を行うことができる。また、カーボン蒸着膜や液体吸収材を備えていないので、蛍光X線分析用試料保持具1ならびにそれを用いる蛍光X線分析方法および装置のコストを低くすることができる。   When the dropped liquid sample S is dried, the heat shrinkage of the heat-shrinkable film 3 of the transmission part 3b generates a tension of the same level as the original and the transmission part 3b becomes flat. As a result, as shown in the longitudinal sectional view of FIG. 3, the portion 3d that was the depression 3c has the same height as the surrounding transmission part 3b, and the component 3d contained in the liquid sample S is added to the portion 3d that was the depression 3c. S1 is held. As described above, since the sample height at the time of measurement is always a constant height, an accurate analysis can be performed. Moreover, since the carbon vapor deposition film and the liquid absorbing material are not provided, the cost of the fluorescent X-ray analysis sample holder 1 and the fluorescent X-ray analysis method and apparatus using the same can be reduced.

次に、本発明の第2実施形態の蛍光X線分析方法について説明する。この分析方法に使用される蛍光X線分析装置10は、本発明の第3実施形態であり、図8に示すように、第1実施形態の蛍光X線分析用試料保持具1を用いる装置であって、試料保持具1が直接または試料ホルダ18を介して載置される試料台である試料ステージ17と、液体試料Sが滴下されて乾燥されることにより、液体試料Sの含有成分S1を保持した窪み3cであった部位3dに1次X線12を照射するX線管などのX線源11と、窪み3cであった部位3dから発生する蛍光X線などの2次X線15の強度を測定するX線検出器などの検出手段16とを備えている。   Next, a fluorescent X-ray analysis method according to the second embodiment of the present invention will be described. An X-ray fluorescence analyzer 10 used in this analysis method is the third embodiment of the present invention, and as shown in FIG. 8, is an apparatus using the sample holder 1 for X-ray fluorescence analysis of the first embodiment. The sample holder 17 is a sample stage on which the sample holder 1 is mounted directly or via the sample holder 18, and the liquid sample S is dropped and dried, so that the component S1 of the liquid sample S is removed. An X-ray source 11 such as an X-ray tube that irradiates the primary X-ray 12 to the portion 3d that was the held depression 3c, and a secondary X-ray 15 such as a fluorescent X-ray generated from the portion 3d that was the depression 3c. And a detecting means 16 such as an X-ray detector for measuring the intensity.

この装置を使用する第2実施形態の蛍光X線分析方法は、第1実施形態の蛍光X線分析用試料保持具1を用いる方法であって、前述したように透過部の窪み3cに液体試料Sを滴下して乾燥させることにより、透過部3bを平坦にするとともに、窪み3cであった部位3dに液体試料Sの含有成分S1を保持させ、この前処理の後、試料保持具1全体を、アルミニウムまたはチタン製で底付き円筒状の試料ホルダ(中空カップ)18の開口部に載置して、その試料ホルダ18を試料ステージ17に載置する。このような試料ホルダ18を用いるのは、透過部3bの裏側近傍に物がこないようにしてバックグラウンドを低減するためと、透過部3bの裏側に抜けた1次X線12の装置内面での散乱線の影響を低減するためである。試料ホルダ18は、底のない単なる円筒状でもよい。   The fluorescent X-ray analysis method of the second embodiment using this apparatus is a method using the fluorescent X-ray analysis sample holder 1 of the first embodiment, and as described above, a liquid sample is placed in the dent 3c of the transmission part. By dripping and drying S, the transmission part 3b is flattened and the component S1 of the liquid sample S is held in the portion 3d that was the depression 3c. After this pretreatment, the entire sample holder 1 is removed. The sample holder 18 is placed on the sample stage 17 by placing it on the opening of a cylindrical sample holder (hollow cup) 18 made of aluminum or titanium. Such a sample holder 18 is used in order to reduce the background so that objects do not come near the back side of the transmission part 3b, and on the inner surface of the apparatus of the primary X-ray 12 that has passed through the back side of the transmission part 3b. This is to reduce the influence of scattered radiation. The sample holder 18 may have a simple cylindrical shape without a bottom.

また、図9に示すように、試料ステージ17に台座2の孔と同程度の大きさの貫通孔17aが設けられている場合には、試料ホルダ18を用いず、試料保持具1を直接試料ステージ17に載置してもよい。   As shown in FIG. 9, when the sample stage 17 is provided with a through hole 17 a having the same size as the hole of the pedestal 2, the sample holder 1 is directly attached to the sample holder 18 without using the sample holder 18. It may be placed on the stage 17.

以上のように試料ステージ17に載置した試料保持具1の液体試料Sの含有成分S1を保持した窪み3cであった部位3dに1次X線12を照射して、発生する2次X線15の強度を測定する。   As described above, the secondary X-rays generated by irradiating the primary X-ray 12 to the portion 3d that was the depression 3c holding the component S1 of the liquid sample S of the sample holder 1 placed on the sample stage 17 are irradiated. An intensity of 15 is measured.

以上は、試料Sの含有成分S1の上方から1次X線12を照射するいわゆる上面照射の場合であるが、試料Sの含有成分S1の下方から1次X線を照射するいわゆる下面照射の場合にも用いることができる。   The above is the case of so-called upper surface irradiation in which the primary X-ray 12 is irradiated from above the component S1 of the sample S, but the case of so-called lower surface irradiation in which the primary X-ray is irradiated from below the component S1 of the sample S. Can also be used.

第2、第3実施形態の方法、装置によれば、第1実施形態の蛍光X線分析用試料保持具1を用いるので、第1実施形態と同様の作用効果が得られる。   According to the method and apparatus of the second and third embodiments, since the fluorescent X-ray analysis sample holder 1 of the first embodiment is used, the same operational effects as those of the first embodiment can be obtained.

本発明の第1実施形態である蛍光X線分析用試料保持具の斜視図である。It is a perspective view of the sample holder for fluorescent X-ray analysis which is a 1st embodiment of the present invention. 同試料保持具の縦断面図である。It is a longitudinal cross-sectional view of the sample holder. 同試料保持具による試料の含有成分の保持状態を示す縦断面図である。It is a longitudinal cross-sectional view which shows the holding state of the content component of the sample by the sample holder. 同試料保持具の第1製作手順を示す斜視図である。It is a perspective view which shows the 1st manufacture procedure of the sample holder. 同試料保持具の第2製作手順を示す斜視図である。It is a perspective view which shows the 2nd manufacture procedure of the sample holder. 同試料保持具の第3製作手順を示す斜視図である。It is a perspective view which shows the 3rd manufacture procedure of the sample holder. 同試料保持具の第4製作手順を示す斜視図である。It is a perspective view which shows the 4th manufacturing procedure of the sample holder. 同試料保持具の第5製作手順を示す縦断面図である。It is a longitudinal cross-sectional view which shows the 5th manufacture procedure of the sample holder. 同試料保持具の第5製作手順を示す平面図である。It is a top view which shows the 5th manufacture procedure of the sample holder. 同試料保持具の第6製作手順を示す縦断面図である。It is a longitudinal cross-sectional view which shows the 6th manufacturing procedure of the sample holder. 同試料保持具の第7製作手順を示す縦断面図である。It is a longitudinal cross-sectional view which shows the 7th manufacturing procedure of the sample holder. 同試料保持具による液体試料の保持状態を示す縦断面図である。It is a longitudinal cross-sectional view which shows the holding state of the liquid sample by the sample holder. 軽元素の測定データである。Measurement data for light elements. 重元素の定性分析チャートである。It is a qualitative analysis chart of heavy elements. 本発明の第3実施形態である蛍光X線分析装置の概略図である。It is the schematic of the fluorescent X ray analyzer which is 3rd Embodiment of this invention. 同装置の試料ステージに第1実施形態の試料保持具を直接載置した縦断面図である。It is the longitudinal cross-sectional view which mounted the sample holder of 1st Embodiment directly on the sample stage of the apparatus. 従来の試料保持具の液体試料の乾燥前の状態を示す断面図である。It is sectional drawing which shows the state before drying of the liquid sample of the conventional sample holder. 同試料保持具の液体試料の乾燥後の状態を示す断面図である。It is sectional drawing which shows the state after the drying of the liquid sample of the sample holder.

符号の説明Explanation of symbols

1 蛍光X線分析用試料保持具
2 台座
3 熱収縮性フィルム
3a 周辺部
3b 透過部
3c 窪み
3d 窪みであった部位
10 蛍光X線分析装置
11 X線源
12 1次X線
15 2次X線
16 検出手段
S 液体試料
S1 液体試料の含有成分
DESCRIPTION OF SYMBOLS 1 Fluorescent X-ray analysis sample holder 2 Base 3 Heat-shrinkable film 3a Peripheral portion 3b Permeation portion 3c Depression 3d Recessed portion 10 Fluorescent X-ray analyzer 11 X-ray source 12 Primary X-ray 15 Secondary X-ray 16 Detection means S Liquid sample S1 Components contained in the liquid sample

Claims (4)

液体試料を前処理して含有成分を蛍光X線分析するために用いられる蛍光X線分析用試料保持具であって、
輪状の台座と、
その台座に所定の張力で保持される周辺部およびX線を透過させるための透過部を有し、前記所定の張力で保持されることによりぴんと張った状態に伸長される厚さ12μm以下の熱収縮性フィルムとを備え、
加熱による前記熱収縮性フィルムの熱収縮により前記所定の張力と同程度の張力が発生して、平坦になる形状の窪みが前記透過部に形成されており、その透過部の窪みに前記液体試料が滴下されて加熱乾燥されることにより、前記透過部が平坦になるとともに、前記含有成分を保持する蛍光X線分析用試料保持具。
A sample holder for fluorescent X-ray analysis used for pre-processing a liquid sample and analyzing the contained components by fluorescent X-ray analysis,
A ring-shaped pedestal;
It has a transmitting portion for transmitting the peripheral portion and the X-ray which is held at a predetermined tension on the seat, the thickness of 12μm or less of the heat that is extended taut by being held at the predetermined tension With shrinkable film,
Said predetermined tension about the same tension caused by heat shrinkage of the heat shrinkable film by heating, and a recess having a shape becomes flat is formed on the transmissive portion, the liquid sample in a recess of the transmission part A sample holder for fluorescent X-ray analysis that retains the above-mentioned components while flattening the transmission part by dropping and heat drying.
請求項1において、
前記熱収縮性フィルムが、ポリエステル、ポリプロピレンおよびポリイミドの一群から選ばれた1つからなる蛍光X線分析用試料保持具。
In claim 1,
A sample holder for fluorescent X-ray analysis, wherein the heat-shrinkable film is one selected from the group consisting of polyester, polypropylene and polyimide.
請求項1または2に記載の蛍光X線分析用試料保持具を用いる蛍光X線分析方法であって、
前記透過部の窪みに液体試料を滴下して加熱乾燥させることにより、前記透過部を平坦にするとともに、前記透過部の窪みであった部位に前記液体試料の含有成分を保持させ、
前記透過部の窪みであった部位に1次X線を照射して、発生する2次X線の強度を測定する蛍光X線分析方法。
A fluorescent X-ray analysis method using the fluorescent X-ray analysis sample holder according to claim 1 or 2,
By dropping the liquid sample into the depression of the transmission portion and drying by heating , the transmission portion is flattened, and the components contained in the liquid sample are held in the portion that was the depression of the transmission portion,
A fluorescent X-ray analysis method for measuring the intensity of secondary X-rays generated by irradiating primary X-rays to a portion that is a depression of the transmission part.
請求項1または2に記載の蛍光X線分析用試料保持具を用いる蛍光X線分析装置であって、
液体試料が滴下されて加熱乾燥されることにより前記液体試料の含有成分を保持した前記透過部の窪みであった部位に1次X線を照射するX線源と、
前記透過部の窪みであった部位から発生する2次X線の強度を測定する検出手段とを備えた蛍光X線分析装置。
A fluorescent X-ray analysis apparatus using the fluorescent X-ray analysis sample holder according to claim 1 or 2,
An X-ray source that irradiates primary X-rays to a portion that was a depression of the transmission part that holds the components contained in the liquid sample by being dropped and heated and dried;
A fluorescent X-ray analyzer comprising: detection means for measuring the intensity of secondary X-rays generated from a portion that was a depression of the transmission part.
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