JP4398901B2 - Sample holder for fluorescent X-ray analysis and fluorescent X-ray analysis method and apparatus using the same - Google Patents

Description

  The present invention relates to a fluorescent X-ray analysis sample holder used for fluorescent X-ray analysis of components contained in an analysis sample, and a fluorescent X-ray analysis method and apparatus using the same.

  Conventionally, as a technique for X-ray fluorescence analysis of components contained in an analysis sample, there is an analysis method using a sample container for X-ray fluorescence analysis using a film for holding a liquid sample (see Patent Document 1). In such a fluorescent X-ray analysis method, a liquid sample container 90 (FIG. 8) using a film is used. As shown in FIG. 9, the container has a central portion of the film 93 that is directed to one end surface of the inner cell 91 among the inner and outer double cylindrical cells, and the periphery of the container is aligned with the periphery of the inner cell 91. 93, the tip of the inner cell 91 is inserted from one end of the outer cell 92, and when the tip of the inner cell 91 reaches the protrusion (clamp portion) 88 of the outer cell 92, the protrusion 88 The film 93 that is to be wrapped is sandwiched between the outer peripheral surface of the inner cell 91 and the film 93 is stretched to one end side of the inner cell 91 with a predetermined tension. The liquid sample 94 is poured into the holder 90 and held from above with the end face on which the film 93 is stretched as the bottom. In this state, primary X-rays are irradiated from the lower side, and fluorescent X-ray analysis is performed.

  In such a sample holding method, since the liquid sample 94 is directly put into the holder 90, the liquid sample 94 adheres to the inner surface of the container, and when analyzing other samples, the holder 90 must be washed. It takes. When the film is stretched on the holder, the film may be wrinkled or uneven tension may cause the liquid sample to leak, contaminating the measuring device, the holder, the periphery of the measuring device, the operator's hand, etc. Arise. If the measurement surface becomes wrinkled or becomes slack due to non-uniform tension, the height of the measurement surface varies from sample to sample, resulting in poor analysis accuracy. In particular, in the case of a measurer who is not used to this work, such a problem is likely to occur.

  As an improvement of the above-described sample holding method, there is an analysis method using a liquid sample container for fluorescent X-ray analysis (FIG. 10) using two films for holding a liquid sample. As shown in FIG. 11A, the sample container 80 is assembled in the following procedure. One end of the inner cell 81 is faced upward, and a first film 83 is placed thereon, and the first film 83 is pushed into the opening 82 of the inner cell 81 to form a recess 84. Next, as shown in FIG. 11B, a liquid sample 85 is injected into the recess 84. As shown in FIG. 11 (C), a second film 86 is covered from the top so as to cover the opening of the recess 84 containing the liquid sample 85, and an outer cell 87 with one end side down from above is covered. In this manner, the inner cell 81 wrapped with the first film 83 is inserted into the outer cell 87. As shown in FIG. 11 (D), when the tip of the inner cell 81 reaches the protrusion (clamping portion) 88 of the outer cell 87 with the insertion, the protrusion 88 wraps the inner cell 81. A heavy film is sandwiched between the outer peripheral surface of the inner cell 81 and the outer film 86 is stretched to one end side of the inner cell 81 with a predetermined tension. Thereby, the hollow part 84 is sealed and the holder 80 is assembled.

When the holder is assembled in this manner, the holder is turned upside down, the side on which the film is stretched is directed downward, and X-rays are irradiated from the lower side to perform fluorescent X-ray analysis.
Japanese Patent Laid-Open No. 7-134082

  However, in the sample holder in which the measurer himself stretches the film on the liquid sample container using one or two films as described above, the film on the measurement surface irradiated with X-rays was pulled evenly. It takes skill to assemble into a state. As shown in FIG. 11 (B), the first film 83 that initially holds the liquid sample 85 is pushed into the opening of the inner cell to form the depression 84, and the entire inner cell 81 is completely removed. A wrinkle is formed over the circumference. Therefore, when the second film 86 is put on the inner cell 81 and the outer cell 87 is inserted, wrinkles formed over the entire circumference of the inner cell 81 may cause wrinkles on the second film 86 or uneven tension. (FIG. 11D). In particular, such an inconvenience is likely to occur in the case of a non-expert who is not used to this work. If the second film 86 is wrinkled, problems such as leakage of the liquid sample occur.

  In the conventional sample holder, the measurer himself must stretch one or two films into the sample container so that the liquid samples 85 and 94 do not leak. Moreover, after pouring the liquid samples 85 and 94 into the sample containers 80 and 90, they are set in the apparatus in the state shown in FIGS. Then, a pressure corresponding to the liquid surface height of the liquid samples 85 and 94 is applied to the measurement surface 89 irradiated with the primary X-rays. As a result, by forming wrinkles on the films 83, 86, 93, a slight gap can be formed between the film 93 and the inner cell 91 or between the first film 83 and the second film 86 at the clamp position. If the liquid level of the liquid sample is higher than the clamp position of the film, the differential pressure action between the liquid sample pressure and the slight gap pressure at the clamp position will cause a slight gap at the clamp position. Liquid samples 85 and 94 leak out.

  For this reason, there arises a problem that the measuring device, the sample container, the periphery of the measuring device, the hand of the measurer, etc. are contaminated. If the measurement surface becomes wrinkled or becomes slack due to non-uniform tension, the height of the measurement surface varies from sample to sample and the analysis accuracy deteriorates.

  After the measurement, it is necessary to remove the film from the sample container in order to collect the sample and reuse the sample container. However, since the conventional sample container has a protrusion (clamp part), even when the film is removed from the sample container, even if the sample container is damaged or two films are used, the sample container is In some cases, the sample container cannot be used again due to contamination.

  The present invention has been made in view of the above-mentioned conventional problems, and in a fluorescent X-ray analysis sample holder used for fluorescent X-ray analysis of a component contained in a sample, and a fluorescent X-ray analysis method and apparatus using the same, The purpose is to improve the analysis accuracy by making the measurement surface of each sample not only the liquid but also the efficiency and simplification of the analysis work of the powder and solid sample, and making the height of the measurement surface for each sample the same over the entire measurement surface. To do.

  In order to achieve the above object, the sample holder for fluorescent X-ray analysis according to the first configuration of the present invention is used for fluorescent X-ray analysis by irradiating a sample with primary X-rays from below. And a film having a frame, an attachment portion attached to the frame, an outer peripheral portion outside the outer periphery of the frame body, and a transmission portion for transmitting X-rays inside the inner periphery of the frame body And hold the sample.

  According to the first configuration of the present invention, since the film constituting the sample measurement surface is stretched with a uniform tension without any wrinkles on the frame, the measurement surface for each sample is not stretched by the measurer himself. The analysis accuracy can be improved by making the height position of the same over the entire measurement surface. Therefore, skill is not required for the preparation of the measurement sample. In addition, according to the first configuration of the present invention, the sample contacts only one film or one film and a frame attached to the film. A gap is not formed between the two films, and the pressure of the liquid sample is not applied to the clamp part, and the pressure difference between the liquid sample pressure and the slight gap pressure formed at the clamp position causes the clamp. The liquid sample does not leak from the slight gap formed at the position.

  In the first configuration of the present invention, it is preferable to use polypropylene and polyethylene terephthalate (PET) having a thickness of about 1 mm for the frame, and for the film to which the frame is attached, polyester (for example, polyethylene terephthalate), polypropylene or It is preferable to use polyimide. The attachment of the frame and the attachment portion of the film is not particularly limited as long as it is a method using an adhesive capable of adhering a plastic film, or an attachment method such as thermal welding or ultrasonic welding.

  The fluorescent X-ray analysis method according to the second configuration of the present invention uses the fluorescent X-ray analysis sample holder of the first configuration and a cylindrical holder having an opening for allowing X-rays to pass therethrough. The fluorescent X-ray analysis sample holder is mounted on the holder so that the transmission part covers the opening of the holder and the outer peripheral part covers the inner surface of the side part of the holder, and the liquid or A powder sample is poured, and the sample is irradiated with primary X-rays from below through the transmission part, and the intensity of the generated secondary X-rays is measured.

  A fluorescent X-ray analysis apparatus according to a third configuration of the present invention uses the fluorescent X-ray analysis sample holder of the first configuration, and is transmitted through the fluorescent X-ray analysis sample holder holding a sample. And an X-ray source for irradiating the sample with primary X-rays from below and a detecting means for measuring the intensity of secondary X-rays generated from the sample.

  According to the second and third configurations of the present invention, since the sample holder for fluorescent X-ray analysis of the first configuration is used, the same effects as the first configuration can be obtained.

  Hereinafter, the sample holder for fluorescent X-ray analysis which is 1st Embodiment of this invention is demonstrated. This sample holder is used for fluorescent X-ray analysis of the components contained in the sample, and as shown in FIG. 1, for example, for stably holding an X-ray transmissive film for holding a sample, An annular frame 2 made of a resin material such as polypropylene or polyethylene terephthalate (PET), an attachment portion 1a attached to the frame with an adhesive for plastic, an outer peripheral portion 1c outside the outer periphery of the frame 2, and Provided with a film 1 made of a resin material such as polyester (for example, polyethylene terephthalate), polypropylene, or polyimide having a thickness of less than 10 μm and having a transmission part 1b for transmitting X-rays inside the inner periphery of the frame, A transparent holder 1b covers the opening 7 of the holder 6 on the cylindrical holder 6 having an opening 7 for allowing X-rays to pass through the outer periphery 1c. By being mounted so as to cover the inner surface of the side of the holder 6, for holding a liquid sample 9 which was poured from above.

  Since the sample holder 5 of the present embodiment is used in such a manner that the inner and outer circumferences of the ring-shaped frame 2 and the inner diameter of the side portion of the cylindrical holder 6 are mounted concentrically, the ring-shaped frame 2 is used. The diameter of the outer circumference of the cylindrical holder 6 is preferably slightly smaller than the inner diameter of the side of the cylindrical holder 6 to be used, and the diameter of the inner circumference of the ring-shaped frame 2 is a diameter that can transmit X-rays sufficient to measure the sample. Therefore, the outer diameter of the outer periphery of the frame body 2 may be of a predetermined size that matches the inner diameter of the side of the predetermined holder 6 and the diameter of the opening 7. In order to stably hold the X-ray transmissive film 1 holding the sample 9, the frame 2 is preferably made of a resin material such as polypropylene or polyethylene terephthalate (PET) in consideration of chemical resistance and disposal after use. The thickness for stably holding the film is preferably 0.5 mm or more and 2 mm or less, more preferably about 1 mm.

  As shown in the top view of the sample holder 5 in FIG. 2, the frame 2 is polypropylene having an outer diameter d2 of 40 mm, an inner diameter d1 of 30 mm, and a thickness of 1 mm. From the outer periphery of the frame 2 and attached to the attachment part 1a of the film 1 with an adhesive for plastic so that the center position is located in the center of the circular polyethylene terephthalate film 1 having a thickness of 6 μm and a diameter (d3 in FIG. 2) of 90 mm. In addition, a transmission portion 1b for transmitting X-rays is formed inside the outer peripheral portion 1c and the inner periphery of the frame 2 inside.

  For attachment of the film 1 and the frame 2, for example, spray paste (components are acrylic rubber (10%), organic solvent (54%) and isohexane gas (36%), high-pressure gas for injection is dimethyl ether) It is sprayed on the back of the body and stuck to the center of the film 1. The adhesive used for sticking is not limited to this spray paste, and any adhesive that does not hinder analysis can be used. As shown in FIG. 3, the entire lower surface of the frame 2 is attached to the film 1 to form an attachment portion 1 a. For ease of illustration and understanding, the thickness of each part shown in the figure is different from the actual dimension.

  As shown in FIG. 1, the sample holder 5 has a cylindrical holder 6 having an opening 7 for allowing X-rays to pass therethrough, for example, a lower surface having a bottom 6a conventionally used for fluorescent X-ray analysis. In the irradiation liquid holder 6, the frame 2 is positioned below the film 1, the transmission part 1 b covers the opening 7 of the holder together with the inner peripheral part of the frame 2, and the outer peripheral part 1 c is the inner surface of the side part of the holder 6. The liquid sample 9 poured from above is held.

  In the above example, the frame body 2 of the sample holder has been described as having a ring shape. As long as it has a structure, it may be a frame such as a polygon or an ellipse, and the size and thickness of the inner and outer peripheries of the frame may be the same as those of a ring.

  In the above example, the outer peripheral portion 1c of the sample holder is shown in a circular shape, but it is only necessary to fix the outer edge portion of the outer peripheral portion 1c of the sample holder to the open portion 8 at the upper part of the holder, and therefore it needs to be circular. For example, it may be an ellipse or a polygon. In addition, although the circular diameter of the sample holder is 90 mm, the outer peripheral portion 1c of the sample holder may be of a size that can easily hold the sample.

  In the above example, the holder 6 having the bottom 6a is illustrated, but the transmission part 1a of the sample holder 5 covers the opening of the cylindrical holder that does not have the bottom, and the outer peripheral part 1c of the sample holder 5 covers the bottom. The sample may be held by attaching it to a cylindrical holder that does not have the bottom of the sample holder 5 so as to cover the inner surface of the side of the cylindrical holder that does not have. In the present embodiment, the cylindrical holder 6 has been described. However, a cylindrical holder such as an elliptic cylinder or a rectangular cylinder may be used, and it is desirable to use a holder having a shape that matches the shape of the frame 2 of the sample holder 5. .

  In the above, the frame 2 is positioned below the film 1 on the cylindrical holder 6, the transmission part 1 b covers the opening 7 of the holder together with the inner peripheral part of the frame 2, and the outer peripheral part 1 c is on the holder 6 side. As shown in FIG. 4, the frame 2 is positioned above the film 1 and the transmission part 1b covers the opening 7 of the holder, as shown in FIG. An example in which the outer peripheral portion 1c is mounted so as to cover the inner surface of the side portion of the holder 6 will be described below.

  When the frame 2 is mounted so as to be positioned above the film 1, the transmission portion 1 b that is the measurement surface of the sample 9 and the primary X-ray are compared with the case where the frame 2 is mounted so as to be positioned below the film 1. The intensity of the secondary X-rays 22 generated from the sample 9 increases as the distance from 21 approaches the distance of the thickness of the frame 2, and the analysis sensitivity is improved. This is an example suitable for a case where higher sensitivity analysis is desired.

  On the other hand, when the frame 2 is mounted so as to be positioned above the film 1, the frame 2 comes into contact with the liquid sample 9. When the adhering portion 1a is adhered with an adhesive, depending on the type of liquid sample to be measured, the liquid sample 9 permeates between the adhering portion 1a and the frame 2 and elutes the components in the adhesive. May affect the element to be measured. Therefore, in this case, it is necessary to examine the content of the sample and the element to be measured before starting the analysis. In particular, it is preferably used for analysis of an aqueous sample having a low possibility of affecting the measurement target element. When the frame is attached by thermal welding or ultrasonic welding without using an adhesive, the above consideration is not necessary.

  When the sample 9 is an easily vaporized sample, the measurement device is contaminated or corroded by the vaporized gas of the sample, or the liquid sample overflows when the holder 6 into which the liquid sample is poured is transported As shown in FIG. 5, a lid 16 holding a gas permeable material such as a gas vent cap or a porous membrane 14 in the opening 8 at the top of the holder so that the vaporized gas or liquid sample of the sample does not spill. It is desirable to cover the opening 8 at the top of the holder. When it is necessary to more securely fix the outer peripheral portion 1c of the sample holder on the side surface of the holder 6, the film presser 37 (see FIG. 7) described in the second embodiment may be used together with the lid 16. . When the lid 16 is not necessary, the outer peripheral portion 1c may be more securely fixed using only the film presser 37.

  In the above description, the sample holder 5 holds the sample using the cylindrical holder. However, the sample holder may be held only by the sample holder without using the cylindrical holder. A small amount of liquid, a small amount of gel or powder sample is placed on the transmission part 1b of the sample holder 5, and the outer peripheral part 1c of the sample holder 5 is stopped with a clip or the like above the sample so as to wrap the sample. Hold. In addition, the frame 2 of the sample holder 5 is aligned with the bottom of the concave recess on which the sample turret of the fluorescent X-ray analyzer or the sample of the sample measurement unit is placed, and the outer peripheral portion 1c of the sample holder 5 holds the sample. A sample holder 5 is mounted so as to cover the inner surface of the side of the concave recess to be placed, a liquid or powder sample is poured from above, and the outer peripheral portion 1c of the sample holder 5 is clipped or the like above the sample. A stop sample may be held. As described above, the sample holder of the present invention holds not only a liquid sample but also a sample such as a gel-like body, powder, or solid.

  In the transmission part 1b of the sample holder 5 of the present invention, the film 1 constituting the sample measurement surface is stretched with a uniform tension without any wrinkles on the frame body 2, so that the transmission of the sample container is performed as in the prior art. The sample holder 5 is attached to the cylindrical holder 6 and the sample 9 is attached from the upper side of the holder 6 without performing the work of stretching the film by the measurer himself without any wrinkles or even tension. The measurement can be performed by setting it in the fluorescent X-ray analyzer as it is without turning the pouring holder 6 upside down, and the analysis work can be simplified. The film 1 of the transmission part 1b constituting the sample measurement surface is stretched with a uniform tension in a state where there is no wrinkle on the frame 2, and the height position of the measurement surface for each sample is made the same over the entire measurement surface. Therefore, the measurer can perform highly accurate analysis without requiring skill.

  In addition, regarding the leakage of the liquid sample that occurs when the liquid sample is held as in the prior art, the sample holder 5 of the present invention is attached to the liquid sample and one film, or one film and film. Since only the frame is contacted, no gap is formed between the film and the holder or between the two films as in the prior art, and the pressure of the liquid sample is not applied to the clamp part. Due to the pressure difference between the pressure and the pressure in the slight gap at the clamping position, the liquid sample does not leak from the slight gap at the clamping position. Since the sample can be held only by the sample holder without using the cylindrical holder as described above, the analysis work can be simplified. Moreover, the sample holder of the present invention can hold not only a liquid sample but also a sample such as a gel-like body, a powder, and a solid.

  Next, a fluorescent X-ray analysis method according to the second embodiment of the present invention will be described. An X-ray fluorescence analyzer 40 used in this analysis method is the third embodiment of the present invention, and as shown in FIG. 6, is an apparatus using the sample holder 5 for X-ray fluorescence analysis of the first embodiment. The sample holder 5 has a sample stage 25 which is a sample stage placed directly or via the holder 6, and an opening 7 for allowing X-rays to pass therethrough, and the transmission part 1b of the sample holder. Covers the opening 7, and the cylindrical holder 6 mounted so that the outer peripheral portion 1c of the sample holder covers the inner surface of the cylindrical side portion is mounted inside the cylindrical holder 6, and poured from above. Generated from an X-ray source 23 such as an X-ray tube that irradiates a primary X-ray 14 to a portion of the transmission part 1b of the sample holder holding the liquid sample and a sample of the part of the transmission part 1b of the sample holder Detection means 24 such as an X-ray detector for measuring the intensity of secondary X-rays 15 such as fluorescent X-rays; It is equipped with a.

  The fluorescent X-ray analysis method of the second embodiment using this apparatus 40 is a method using the sample holder 5 for fluorescent X-ray analysis of the first embodiment, and the sample holder 5 generates scattered X-rays. The transparent portion 1b of the sample holder 5 covers the opening 7 of a cylindrical holder made of a small amount of resin or metal such as aluminum or titanium, and the outer peripheral portion 1c of the sample holder covers the inner surface of the side portion of the cylindrical holder 6. In order to facilitate the work of pouring the liquid or powder sample, the outer edge of the outer peripheral portion 1c of the sample holder is folded outward at the upper end of the side portion constituting the open portion 8 of the holder 6, A liquid or powder sample 9 is poured from above the holder 6 to hold the liquid or powder sample 9 in the sample holder 5, and the holder 6 is placed on the sample stage 25, via the transmission part 1 b of the sample holder. Irradiate the sample with primary X-rays 14 from below, Measuring the intensity of green for secondary X-rays 15.

  In the present embodiment, the frame 2 of the sample holder has been described as having a ring shape. However, similarly to the first embodiment, the sample can be stably held, and a transmissive portion that can transmit X-rays sufficient to measure the sample. As long as the structure has 1b, it may be a frame such as a polygon or an ellipse, and the size and thickness of the inner and outer peripheries of the frame may be the same as those of a ring.

  In the present embodiment, the outer peripheral portion 1c of the sample holder has been described as being circular, but it is not necessary to be circular as in the first embodiment, and may be, for example, an ellipse, a rectangle, or a polygon. The outer peripheral portion 1c of the sample holder may be of a size that can easily hold the sample.

  Similar to the first embodiment, when the sample is easily vaporized, the measuring device is contaminated or corroded by the vaporized gas of the sample, or the liquid sample overflows when the holder into which the liquid sample is poured is transported When there is a concern, as shown in FIG. 5, the open portion 8 at the top of the holder is covered with a lid 16 that holds a gas-permeable cap or a porous material such as the porous membrane 14. It is desirable to cover 8. When it is necessary to more securely fix the outer peripheral portion 1 c of the sample holder on the side surface of the holder 6, a film presser 37 (see FIG. 7) described below may be used together with the lid 16. When the lid 16 is not necessary, the outer peripheral portion 1c may be more securely fixed using only the film presser 37.

  In the above example, the holder 6 having the bottom 6a is illustrated. However, the transmission part 1a of the sample holder 5 covers the opening of the cylindrical holder 36 (see FIG. 7) that does not have the bottom, and the outer periphery of the sample holder The sample holder 5 may be attached to the cylindrical holder 36 having no bottom so that the sample 9 is held so that the part 1c covers the inner surface of the side of the cylindrical holder 36 having no bottom. An example of a method for attaching the sample holder 5 to the cylindrical holder 36 having no bottom and holding the sample 9 will be described below.

  As shown in FIG. 7 (A), the ring-shaped frame 2 of the sample holder 5 is placed on a table (not shown) so as to be positioned below, and the outer peripheral portion 1c is folded in the direction of the transmitting portion 1b. The outer peripheral portion 1c that is adjacent to the adhering portion 1a has a cylindrical shape having an inner and outer peripheral diameter that is substantially the same as the inner and outer peripheral diameters of the annular frame 2 and the annular frame 2 of the sample holder 5. The holder 36 is sandwiched between the side lower surfaces 36a. The sample holder 5 is mounted on the cylindrical holder 36 so that the outer peripheral portion not sandwiched covers the inner surface of the side portion of the cylindrical holder 36, and as shown in FIG. 7B, the outer peripheral portion 1c. The outer edge portion is fixed by the ring-shaped film presser 37 and the side upper surface 36b of the cylindrical holder 36, and the liquid or powder sample 9 is poured from above the holder 36 as shown in FIG. Then, the liquid or powder sample 9 is held by the sample holder 5 by fixing the film presser 37 from above with a cap 38 having air holes. The holder 36 is placed on the sample stage 25, the sample 9 is irradiated with the primary X-ray 14 from below through the transmission part 1b of the sample holder, and the intensity of the secondary X-ray 15 generated from the sample 9 is measured. (See FIG. 6).

  In the present embodiment, both the ring-shaped film press 37 and the cap 38 having air holes are used. However, only the film press 37 may be used without using the cap 38, or only the cap 38 may be used. .

  In the present embodiment, the cylindrical holders 6 and 36 have been described. However, similarly to the first embodiment, a cylindrical shape such as an elliptical cylinder or a rectangular cylinder may be used, and the shape of the frame 2 of the sample holder 5 is adapted. It is desirable to use a cylindrical holder.

  Similarly to the first embodiment, the frame 2 of the sample holder 5 may be attached to the holders 6 and 36 so that the frame 2 of the sample holder 5 is positioned below the film 1. You may mount | wear with the holders 6 and 36 so that it may be located upwards.

  As described above, the primary X-ray 14 is irradiated to the part of the transmission part 1b of the sample holder 5 mounted on the sample stage 25 or the sample holder 5 mounted on the holders 6 and 36, and generated from the sample 9. The intensity of the secondary X-ray 15 is measured and the fluorescent X-ray analysis is performed. The X-ray fluorescence analyzer 40 may be either an energy dispersion type or a wavelength dispersion type apparatus. According to the method and apparatus of the second and third embodiments, since the fluorescent X-ray analysis sample holder 5 of the first embodiment is used, the same operational effects as those of the first embodiment can be obtained.

It is sectional drawing of the sample holder for fluorescent X-ray analysis which is 1st Embodiment of this invention, and a holder. It is a top view of the sample holder. It is sectional drawing of the sample holder. It is sectional drawing which shows the modification which equips the holder with the sample holder. It is sectional drawing of the sample holder, a holder, and a lid | cover. It is the schematic which shows the X-ray fluorescence analyzer of 3rd Embodiment of this invention used for the X-ray fluorescence analysis method of 2nd Embodiment of this invention. (A), (B), (C) is sectional drawing which shows each procedure of the method of hold | maintaining the sample of 2nd Embodiment. It is sectional drawing of the 1st prior art example. FIG. 9 is an exploded perspective view of the conventional example of FIG. 8. It is sectional drawing of the 2nd prior art example. (A), (B), (C) is a perspective view which shows each procedure of the method of hold | maintaining the sample of the prior art example of the said FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Film 1a Adhering part 1b Permeation | transmission part 1c Outer peripheral part 2 Frame 5 Sample holder 6, 36 Cylindrical holder 7 Opening of cylindrical holder 9 Sample 14 Primary X-ray 15 Secondary X-ray 23 X-ray source 24 Detection Means 40 X-ray fluorescence analyzer

Claims (3)

A sample holder for X-ray fluorescence analysis used for X-ray fluorescence analysis by irradiating a liquid, gel or powder sample with primary X-rays from below ;
A film having a frame, an attachment portion attached to the frame, an outer periphery outside the outer periphery of the frame, and a transmission portion for transmitting X-rays inside the inner periphery of the frame A sample holder for fluorescent X-ray analysis provided ,
A cylindrical holder having an opening for passing X-rays at the bottom;
With
The frame is located below the film, the transmission part covers the opening of the cylindrical holder together with the inner peripheral part of the frame, and the outer peripheral part covers the inner surface of the side part of the cylindrical holder. A sample holder for fluorescent X-ray analysis that is arranged so as to cover and holds the sample on the transmission part . A fluorescent X-ray analysis method using the fluorescent X-ray analysis sample holder according to claim 1,
Pour the sample from above the sample holder for X-ray fluorescence analysis,
A fluorescent X-ray analysis method for measuring the intensity of secondary X-rays generated by irradiating the sample with primary X-rays from below through the transmission part. A fluorescent X-ray analyzer using the fluorescent X-ray analysis sample holder according to claim 1,
Through the transmission portion of the fluorescent X-ray analytical sample holder holding the sample, the X-ray source for irradiating primary X-rays from below the sample,
A fluorescent X-ray analyzer comprising: a detecting unit that measures the intensity of secondary X-rays generated from the sample.

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