CN209570528U - Fixture for fluorescent x-ray analyzer - Google Patents
Fixture for fluorescent x-ray analyzer Download PDFInfo
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- CN209570528U CN209570528U CN201822128961.7U CN201822128961U CN209570528U CN 209570528 U CN209570528 U CN 209570528U CN 201822128961 U CN201822128961 U CN 201822128961U CN 209570528 U CN209570528 U CN 209570528U
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- fluorescent
- fixture
- sample
- ray analyzer
- sample frame
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- Element Separation (AREA)
Abstract
The utility model provides the fixture for fluorescent x-ray analyzer that sample is shifted between a kind of fixture without in sample frame and for fluorescent x-ray analyzer.Fixture for fluorescent x-ray analyzer, to share the fixture in the sample frame of X-ray diffraction device of the centre with the recess portion or hole configured for sample with fluorescent x-ray analyzer, have: base component, with the first upper surface abutted with the lower surface of the sample frame and the second upper surface formed in a manner of there is difference of height between first upper surface;And ring, the cylindrical portion and the flange for being arranged on the lower end of the cylindrical portion and being abutted with second upper surface that the outer lateral side of its outer lateral side and the region for being provided with the difference of height with the sample frame is abutted with inner side surface, and the film covered to the surface of the sample is sandwiched between the sample frame and the base component.
Description
Technical field
The utility model relates to a kind of fixtures for fluorescent x-ray analyzer.
Background technique
As the analytical equipment for having used X-ray, it is known that the X-ray diffraction parsed to the crystal structure of sample fills
The fluorescent x-ray analyzer set and element included in sample is analyzed.For example, public in following patent documents 1
The cement production system including fluorescent x-ray analyzer and X-ray diffraction device is opened.
Citation
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2013-133237 bulletin
Utility model content
Utility model project to be solved
However, implementing the tectonic knot carried out by X-ray diffraction device to same sample sometimes and by fluorescent X-ray
The elemental analysis that analytical equipment carries out.When carrying out each analysis, the fixture for being positioned in sample on device can be used.Here, X
Fixture used in fixture used in ray diffraction device and fluorescent x-ray analyzer, shape are different.
Specifically, Fig. 6 (a) is to indicate fixture (hereinafter referred to as sample frame used in existing X-ray diffraction device
104) figure.Fig. 6 (b) is to indicate that fixture used in existing fluorescent x-ray analyzer is (hereinafter referred to as existing to be used for
The fixture 600 of fluorescent x-ray analyzer) figure.
Sample frame 104 has the recess portion configured for sample 102 in centre.Specifically, for example, sample frame 104 be
It is round, the shape thicker than central portion near edge under overlook view.Sample frame 104 is in the recess portion for being arranged at central portion
Configured with the sample 102 as measurement object.Sample frame 104 is placed in X-ray diffraction device, thus by sample
102 surface X-ray irradiations measure.
The existing fixture 600 for fluorescent x-ray analyzer includes unit 602, snap ring 604, outer receptacle 606.
Specifically, unit 602 is formed as cylindric by resin or metal.Snap ring 604 is that internal diameter is abutted with the shape of unit 602
Size, and be formed as cyclic annular.
Snap ring 604 clips film 116, chimeric with the lower part of unit 602.Sample 102 be configured in the inside of unit 602 and
On film 116.Unit 602 and snap ring 604 configured with sample 102 are configured in outer receptacle 606.
Outer receptacle 606 is cylindrical shape, and has opening in upside and downside.The lower opening of outer receptacle 606
Less than the outer diameter of unit 602, to be supported to unit 602 and snap ring 604.In addition, side has outer receptacle 606 on the outside
There is difference of height.The diameter of the upside of outer receptacle 606 is greater than the diameter of downside.
Fluorescent x-ray analyzer has the turntable 400 configured for the fixture for fluorescent x-ray analyzer.This turn
Platform 400 is provided with the outer diameter on the top less than outer receptacle 606, and is greater than the hole of the outer diameter of lower part.Outer receptacle 606 is matched
It is placed in the hole.It is arranged at the upper of the part of the difference of height of outer receptacle 606 and the turntable 400 of fluorescent x-ray analyzer
Surface abuts.As shown in Fig. 6 (b), first time X-ray 402 is irradiated to sample 102 from lower surface, thus by issuing from sample
Second of X-ray 404 carry out elemental analysis.
Carrying out tectonic knot to same sample 102 and in the case where elemental analysis, need sample frame 104 with it is existing
The fixture 600 for fluorescent x-ray analyzer between shift sample 102.Therefore, measurement needs the time, and inconvenient.
The utility model is completed in view of the above subject, and its purpose is to provide one kind without filling in X-ray diffraction
Sample frame used in setting and for shifted between the fixture of fluorescent x-ray analyzer sample for fluorescent X-ray point
The fixture of analysis apparatus.
Means for solving the problems
Fixture described in mode 1 for fluorescent x-ray analyzer is to share in fluorescent x-ray analyzer
There is the fixture of the sample frame of the X-ray diffraction device of the recess portion or hole that configure for sample at centre, it is described to be used for fluorescent X-ray
The fixture of analytical equipment is characterized in that having: base component, has on first abutted with the lower surface of the sample frame
Surface and the second upper surface formed in a manner of there is difference of height between first upper surface;And ring, tool
The circle that the outer lateral side of the outer lateral side and the region for being provided with the difference of height that have the sample frame is abutted with inner side surface
Canister portion and the flange for being arranged on the lower end of the cylindrical portion and being abutted with second upper surface, and with the examination
The film covered to the surface of the sample is sandwiched between material frame and the base component.
It is characterized in that described in mode 2 for the fixture of fluorescent x-ray analyzer, for glimmering described in the mode 1
In the fixture of light x-ray analysis equipment, the sample frame and the base component are configured respectively in the part mutually abutted against
There is the fixed part that mutual position is fixed.
It is characterized in that described in mode 3 for the fixture of fluorescent x-ray analyzer, for glimmering described in the mode 2
In the fixture of light x-ray analysis equipment, the fixed part is magnet.
Fixture described in mode 4 for fluorescent x-ray analyzer is characterized in that, in any of mode 1 to 3 institute
In the fixture for fluorescent x-ray analyzer stated, the ring is with the inside and the flange with the cylindrical portion
The inside groove of lower surface connection.
Utility model effect
According to utility model described in mode 1, can cut down carry out tectonic knot and when elemental analysis it is required when
Between and energy.
According to utility model described in mode 2 and 3, a possibility that sample frame is fallen can reduce.
According to utility model described in mode 4, can prevent from being used in around the fixture of fluorescent x-ray analyzer at
The state of affairs of breakage of thin film applied when for vacuum.
Detailed description of the invention
Fig. 1 is the fixture for illustrating to be used for fluorescent x-ray analyzer involved in the embodiments of the present invention
Figure.
Fig. 2 (a) and Fig. 2 (b) is for illustrating involved in the embodiments of the present invention for fluorescent X-ray point
The figure of the fixture of analysis apparatus.
Fig. 3 (a) and Fig. 3 (b) is the figure that outlined the ring in variation.
Fig. 4 is the figure for illustrating the fixture for fluorescent x-ray analyzer when measuring.
Fig. 5 is the figure for illustrating the fixture for fluorescent x-ray analyzer in variation.
Fig. 6 (a) and Fig. 6 (b) is that outlined existing sample frame and the folder for fluorescent x-ray analyzer
The figure of tool.
Symbol description
102 samples;104 sample framves;106 base components;108 rings;110 first upper surfaces;112 second upper surfaces;114 is high
Low difference;116 films;118 fixed parts;300 inside grooves;400 turntables;402 first time X-rays;404 second of X-ray;600 is existing
The fixture for fluorescent x-ray analyzer;Unit 602;604 snap rings;606 outer receptacles.
Specific embodiment
Hereinafter, with reference to the accompanying drawings come to for implement preferred embodiments of the present invention (hereinafter referred to as embodiment) into
Row explanation.
Fig. 1, Fig. 2 (a) and Fig. 2 (b) are for illustrating to penetrate involved in the embodiments of the present invention for fluorescence X
The figure of the fixture of line analysis device.Fig. 1 is to indicate each component combination included in the fixture for fluorescent x-ray analyzer
Preceding state, Fig. 2 (a) and Fig. 2 (b) indicate the state after each component combination.
In addition, Fig. 2 (a) is the figure observed from upper surface, Fig. 2 (b) is the figure observed from side.
Fixture and X-ray diffraction device for fluorescent x-ray analyzer share sample frame 104.The sample frame 104 exists
Centre has the recess portion configured for sample 102 or hole.Specifically, for fluorescent x-ray analyzer fixture with for
It is disk-shaped and in centre there is the sample frame 104 of the recess portion configured for sample 102 to be used together.The sample frame 104 and existing
Fixture used in some X-ray diffraction devices is identical.Fixture for fluorescent x-ray analyzer has base component
106 and ring 108.
Base component 106 has the first upper surface 110 and the second upper surface 112.Specifically, base component 106 is circle
The shape of tubular, and have the first upper surface 110 for being abutted with the lower surface of sample frame 104 and with the first upper surface
The second upper surface 112 that there is the mode of difference of height 114 between 110 and formed.The lower surface of base component 106 is flat.
The internal diameter of base component 106 is for example roughly equal with the internal diameter of the recess portion of sample frame 104, but can also arbitrarily set.Setting
The outer diameter of the part (part between the first upper surface 110 and the second upper surface 112) of difference of height 114 be in ring 108
The size that wall abuts.The cylinder of the height height after being added and ring 108 of 104 end of height and sample frame of the difference of height 114
The height in portion is roughly equal.In addition, the height of height and sample frame 104 from the first upper surface 110 to lower surface is after being added
Height is roughly equal with the height of the outer receptacle 606 of existing fluorescent x-ray analyzer.
Ring 108 has cylindrical portion and flange.Specifically, cylindrical portion is, the cylindric portion formed by resin or metal
Point.As shown in Fig. 2 (b), the inner side surface of cylindrical portion is provided with difference of height with base component 106 in the state of being combined
The outer lateral side in 114 region abuts.The height of cylindrical portion is the height with difference of height 114 set on base component 106
It is roughly equal with the height height after being added of 104 end of sample frame.Until the upper surface to the root of flange of cylindrical portion
The height of length and the difference of height 114 of the outer lateral side for the outer receptacle 606 for being arranged on existing fluorescent x-ray analyzer
It spends roughly equal.Flange is the lower end for being arranged at cylindrical portion, and the part formed in a manner of towards outside.Method
Blue lower surface is abutted with the second upper surface 112 of base component 106.The width of the lower surface of flange and base component 106
The width of second upper surface 112 is roughly equal.
Ring 108 sandwiched between sample frame 104 and base component 106 surface of sample 102 is covered it is thin
Film 116.Specifically, as shown in Figure 1, the first upper surface 110 of base component 106 and the sample frame 104 configured for sample 102
It abuts.Film 116 is configured in a manner of covering the surface of sample 102.Film 116 is, in the state of clamped from ring 108 with
It is risen between base component 106 and is related to the size of entire surrounding and degree outstanding.The table of sample 102 is covered in film 116
The mode in face and from upside cover ring 108 in the state of configuring.As a result, as shown in Fig. 2 (b), ring 108 with sample frame 104 with
And the film 116 cover to the surface of sample 102 is sandwiched between base component 106.Ring 108 and base component 106 press from both sides
Film 116, the case where so as to prevent sample 102 from falling.
In the present embodiment, sample frame 104 and base component 106 are configured with respectively in the part mutually abutted against
The fixed part 118 that mutual position is fixed.Specifically, for example, polarity is different as shown in Fig. 1 and Fig. 2 (b)
Magnet is configured in the part that sample frame 104 and base component 106 abut.Fixed part 118 is at least configured on the diagonal 2
Place.In addition, fixed part 118 can also be configured as colyliform along the shape of the first upper surface 110.Pass through 118 energy of fixed part
Enough positions that base component 106 Yu sample frame 104 are prevented when ring 108 to be entrenched on base component 106 and sample frame 104
Relationship changes, so that operation becomes easy.
In addition, ring 108 also can be set to the inside groove 300 of the lower surface connection with the inside and flange with cylindrical portion
Structure.Specifically, as shown in figure 3, ring 108 has in 1 from the upper surface of cylindrical portion to lower surface and in inner side surface
Slot 300.Link in addition, ring 108 has in the lower surface of flange with inside groove 300 set in cylindrical portion, and from flange
Inside groove 300 set by medial end to outboard end.Fixture for fluorescent x-ray analyzer is placed in true in measurement
Under Altitude.Therefore can exist in the case where being mixed into air inside sample 102, the fixture quilt for fluorescent x-ray analyzer
The damaged situation of film 116 when being placed under vacuum environment.However, by setting inside groove 300, so that inside sample 102
External discharge of the air being mixed into via the inside groove 300 and to the fixture for fluorescent x-ray analyzer, so as to anti-
The only breakage of film 116.
Fig. 4 is the figure for illustrating the fixture for fluorescent x-ray analyzer when measuring.As shown in figure 4, for glimmering
The fixture of light x-ray analysis equipment is for example, be configured in the turntable 400 of lower surface irradiation type fluorescent x-ray analyzer.Turntable
400 as shown in Fig. 6 (b), the providing holes in a manner of it can configure fixture used in existing fluorescent x-ray analyzer.
Outside the lower part of the diameter of the outer lateral side of the cylindrical portion of ring 108 and the existing fixture 600 for fluorescent x-ray analyzer
The diameter of side side is roughly equal.Therefore, the fixture involved in the utility model for fluorescent x-ray analyzer is with flange
It is configured with mode that the surface of turntable 400 abuts.From be configured on turntable 400 for fluorescent x-ray analyzer
First time X-ray 402 is irradiated in the lower surface of fixture.It can be by second of X-ray 404 for being issued from sample come to sample 102
Included in element analyzed.
As described above, sample frame 104 used in X-ray diffraction device is with original state and base portion and ring 108
Combination just can be used in fluorescent x-ray analyzer without transfer sample 102.
In addition, the utility model is not limited to above embodiment.For example, as shown in figure 5, sample frame 104 can also be with
There is hole and the not structure of recess portion using in the part configured for sample 102.According to this structure, in the area of illuminated X-ray
Domain is not configured the lower surface of sample frame 104.It therefore, will not be through the sample 102 as measurement object to 104 following table of sample frame
First time X-ray 402 is irradiated in face, therefore can be improved measurement accuracy.
Claims (4)
1. a kind of fixture for fluorescent x-ray analyzer has to share with fluorescent x-ray analyzer in centre
The fixture of the sample frame of the X-ray diffraction device of recess portion or hole for sample configuration,
The fixture for fluorescent x-ray analyzer is characterized in that having:
Base component has the first upper surface abutted with the lower surface of the sample frame and with the table on described first
The second upper surface that there is the mode of difference of height between face and formed;And
Ring, the outer lateral side of outer lateral side and the region for being provided with the difference of height with the sample frame and inside side
The cylindrical portion and the flange for being arranged on the lower end of the cylindrical portion and being abutted with second upper surface that face abuts, and
The film covered to the surface of the sample is sandwiched between the sample frame and the base component.
2. the fixture according to claim 1 for fluorescent x-ray analyzer, which is characterized in that
The sample frame and the base component are configured with consolidate to mutual position respectively in the part mutually abutted against
Fixed fixed part.
3. the fixture according to claim 2 for fluorescent x-ray analyzer, which is characterized in that
The fixed part is magnet.
4. the fixture according to any one of claim 1 to 3 for fluorescent x-ray analyzer, which is characterized in that
The ring has the inside groove with the inside of the cylindrical portion and the connection of the lower surface of the flange.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017005736A JP2018117001A (en) | 2017-01-17 | 2017-01-17 | Manufacturing method of semiconductor device |
JP2017-005736 | 2017-12-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN209570528U true CN209570528U (en) | 2019-11-01 |
Family
ID=62984093
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201822128961.7U Active CN209570528U (en) | 2017-01-17 | 2018-12-18 | Fixture for fluorescent x-ray analyzer |
Country Status (2)
Country | Link |
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JP (1) | JP2018117001A (en) |
CN (1) | CN209570528U (en) |
-
2017
- 2017-01-17 JP JP2017005736A patent/JP2018117001A/en active Pending
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2018
- 2018-12-18 CN CN201822128961.7U patent/CN209570528U/en active Active
Also Published As
Publication number | Publication date |
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JP2018117001A (en) | 2018-07-26 |
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