JP2006501484A - ナノスケール磁気顕微鏡用のナノチューブカンチレバープローブ - Google Patents
ナノスケール磁気顕微鏡用のナノチューブカンチレバープローブ Download PDFInfo
- Publication number
- JP2006501484A JP2006501484A JP2004546747A JP2004546747A JP2006501484A JP 2006501484 A JP2006501484 A JP 2006501484A JP 2004546747 A JP2004546747 A JP 2004546747A JP 2004546747 A JP2004546747 A JP 2004546747A JP 2006501484 A JP2006501484 A JP 2006501484A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- micro
- nanotube
- electrical contact
- dimension
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 title claims abstract description 117
- 239000002071 nanotube Substances 0.000 title claims description 28
- 230000005291 magnetic effect Effects 0.000 title abstract description 37
- 238000000386 microscopy Methods 0.000 title 1
- 239000003302 ferromagnetic material Substances 0.000 claims abstract description 30
- 238000004652 magnetic resonance force microscopy Methods 0.000 claims abstract 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 97
- 239000002041 carbon nanotube Substances 0.000 claims description 95
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 94
- 239000000758 substrate Substances 0.000 claims description 57
- 238000000034 method Methods 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 35
- 238000004519 manufacturing process Methods 0.000 claims description 25
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- 239000010703 silicon Substances 0.000 claims description 20
- 238000001514 detection method Methods 0.000 claims description 18
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 11
- 229910017052 cobalt Inorganic materials 0.000 claims description 10
- 239000010941 cobalt Substances 0.000 claims description 10
- 229910052759 nickel Inorganic materials 0.000 claims description 10
- 229910052723 transition metal Inorganic materials 0.000 claims description 10
- 150000003624 transition metals Chemical class 0.000 claims description 10
- 239000000956 alloy Substances 0.000 claims description 9
- 229910045601 alloy Inorganic materials 0.000 claims description 9
- 238000003384 imaging method Methods 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 230000008859 change Effects 0.000 claims description 8
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- 238000007772 electroless plating Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 229910052720 vanadium Inorganic materials 0.000 claims description 4
- 229910052727 yttrium Inorganic materials 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 238000004070 electrodeposition Methods 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- 238000003466 welding Methods 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 239000011368 organic material Substances 0.000 claims 1
- 238000002161 passivation Methods 0.000 claims 1
- 239000003054 catalyst Substances 0.000 description 33
- 210000005239 tubule Anatomy 0.000 description 16
- 230000005294 ferromagnetic effect Effects 0.000 description 14
- 238000005229 chemical vapour deposition Methods 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 10
- 238000004458 analytical method Methods 0.000 description 9
- 238000002595 magnetic resonance imaging Methods 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 8
- 238000000609 electron-beam lithography Methods 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000004621 scanning probe microscopy Methods 0.000 description 7
- 238000003786 synthesis reaction Methods 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- 230000003197 catalytic effect Effects 0.000 description 6
- 238000011065 in-situ storage Methods 0.000 description 6
- 239000000395 magnesium oxide Substances 0.000 description 6
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 6
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 238000003475 lamination Methods 0.000 description 5
- 239000002105 nanoparticle Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 239000002048 multi walled nanotube Substances 0.000 description 4
- 229910052755 nonmetal Inorganic materials 0.000 description 4
- 238000004627 transmission electron microscopy Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 238000003491 array Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 239000011859 microparticle Substances 0.000 description 3
- 239000002096 quantum dot Substances 0.000 description 3
- 238000001878 scanning electron micrograph Methods 0.000 description 3
- 239000002109 single walled nanotube Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000005481 NMR spectroscopy Methods 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- QGUAJWGNOXCYJF-UHFFFAOYSA-N cobalt dinitrate hexahydrate Chemical compound O.O.O.O.O.O.[Co+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O QGUAJWGNOXCYJF-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical group C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 108090000623 proteins and genes Proteins 0.000 description 2
- 102000004169 proteins and genes Human genes 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 238000004626 scanning electron microscopy Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 101100330193 Homo sapiens CYREN gene Proteins 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 238000003917 TEM image Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000000089 atomic force micrograph Methods 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000005100 correlation spectroscopy Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000003925 fat Substances 0.000 description 1
- 230000005307 ferromagnetism Effects 0.000 description 1
- 238000002599 functional magnetic resonance imaging Methods 0.000 description 1
- 239000008246 gaseous mixture Substances 0.000 description 1
- UCHOFYCGAZVYGZ-UHFFFAOYSA-N gold lead Chemical compound [Au].[Pb] UCHOFYCGAZVYGZ-UHFFFAOYSA-N 0.000 description 1
- 238000004050 hot filament vapor deposition Methods 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- MVFCKEFYUDZOCX-UHFFFAOYSA-N iron(2+);dinitrate Chemical compound [Fe+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MVFCKEFYUDZOCX-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004556 laser interferometry Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 210000003205 muscle Anatomy 0.000 description 1
- 238000005329 nanolithography Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229940031182 nanoparticles iron oxide Drugs 0.000 description 1
- 239000002073 nanorod Substances 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000013421 nuclear magnetic resonance imaging Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000005464 sample preparation method Methods 0.000 description 1
- 238000001338 self-assembly Methods 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 210000001519 tissue Anatomy 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910000314 transition metal oxide Inorganic materials 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/50—MFM [Magnetic Force Microscopy] or apparatus therefor, e.g. MFM probes
- G01Q60/52—Resonance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/10—Shape or taper
- G01Q70/12—Nanotube tips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/038—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices
- G01R33/0385—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices in relation with magnetic force measurements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Carbon And Carbon Compounds (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US41231902P | 2002-09-20 | 2002-09-20 | |
| PCT/US2003/029520 WO2004038430A2 (en) | 2002-09-20 | 2003-09-18 | Nanotube cantilever probes for nanoscale magnetic microscopy |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006501484A true JP2006501484A (ja) | 2006-01-12 |
| JP2006501484A5 JP2006501484A5 (enExample) | 2006-11-02 |
Family
ID=32176446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004546747A Pending JP2006501484A (ja) | 2002-09-20 | 2003-09-18 | ナノスケール磁気顕微鏡用のナノチューブカンチレバープローブ |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6887365B2 (enExample) |
| EP (1) | EP1540378A4 (enExample) |
| JP (1) | JP2006501484A (enExample) |
| AU (1) | AU2003299538B2 (enExample) |
| CA (1) | CA2499370A1 (enExample) |
| WO (1) | WO2004038430A2 (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007118112A (ja) * | 2005-10-26 | 2007-05-17 | National Institute For Materials Science | ナノ樹木／ナノ微粒子複合構造物の作製方法とナノ樹木／ナノ微粒子複合構造物 |
| JP2007232596A (ja) * | 2006-03-01 | 2007-09-13 | Jeol Ltd | 磁気共鳴力顕微鏡 |
| WO2011108543A1 (ja) | 2010-03-01 | 2011-09-09 | 国立大学法人神戸大学 | ポテンシャル取得装置、磁場顕微鏡、検査装置およびポテンシャル取得方法 |
| WO2012153496A1 (ja) | 2011-05-09 | 2012-11-15 | 国立大学法人神戸大学 | 分布解析装置 |
| WO2014129151A1 (ja) | 2013-02-25 | 2014-08-28 | 国立大学法人神戸大学 | 分布解析装置および分布解析方法 |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7214303B2 (en) * | 2002-09-20 | 2007-05-08 | The Trustees Of Boston College | Cantilever probes for nanoscale magnetic and atomic force microscopy |
| WO2004065926A1 (en) * | 2003-01-23 | 2004-08-05 | William Marsh Rice University | Smart materials: strain sensing and stress determination by means of nanotube sensing systems, composites, and devices |
| GB0304623D0 (en) * | 2003-02-28 | 2003-04-02 | Univ Surrey | Methods for the fabrication of nanoscale structures and semiconductor devices |
| US7434476B2 (en) * | 2003-05-07 | 2008-10-14 | Califronia Institute Of Technology | Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes |
| US7302856B2 (en) * | 2003-05-07 | 2007-12-04 | California Institute Of Technology | Strain sensors based on nanowire piezoresistor wires and arrays |
| US7552645B2 (en) * | 2003-05-07 | 2009-06-30 | California Institute Of Technology | Detection of resonator motion using piezoresistive signal downmixing |
| US20040245224A1 (en) * | 2003-05-09 | 2004-12-09 | Nano-Proprietary, Inc. | Nanospot welder and method |
| WO2004103903A1 (ja) * | 2003-05-23 | 2004-12-02 | Nec Corporation | ナノサイズ炭素系材料立体構造体とその製造方法 |
| DE102004005255B4 (de) * | 2004-02-03 | 2005-12-08 | Siemens Ag | Verfahren zum Anordnen einer Leitungsstruktur mit Nanoröhren auf einem Substrat |
| JP2006125984A (ja) * | 2004-10-28 | 2006-05-18 | Japan Science & Technology Agency | デイジー型カンチレバーホイールを有する計測装置 |
| JP4452827B2 (ja) * | 2004-12-28 | 2010-04-21 | 独立行政法人産業技術総合研究所 | 走査型磁気力顕微鏡用探針およびその製造方法並びにカーボンナノチューブ用強磁性合金成膜方法 |
| US7754183B2 (en) * | 2005-05-20 | 2010-07-13 | Clemson University Research Foundation | Process for preparing carbon nanostructures with tailored properties and products utilizing same |
| US7439731B2 (en) | 2005-06-24 | 2008-10-21 | Crafts Douglas E | Temporary planar electrical contact device and method using vertically-compressible nanotube contact structures |
| US7511510B2 (en) * | 2005-11-30 | 2009-03-31 | International Business Machines Corporation | Nanoscale fault isolation and measurement system |
| US7368712B2 (en) * | 2005-12-06 | 2008-05-06 | International Business Machines Corporation | Y-shaped carbon nanotubes as AFM probe for analyzing substrates with angled topography |
| JP4806762B2 (ja) * | 2006-03-03 | 2011-11-02 | 国立大学法人 名古屋工業大学 | Ｓｐｍカンチレバー |
| US8354855B2 (en) * | 2006-10-16 | 2013-01-15 | Formfactor, Inc. | Carbon nanotube columns and methods of making and using carbon nanotube columns as probes |
| US8130007B2 (en) | 2006-10-16 | 2012-03-06 | Formfactor, Inc. | Probe card assembly with carbon nanotube probes having a spring mechanism therein |
| WO2008066146A1 (fr) * | 2006-11-30 | 2008-06-05 | Japan Science And Technology Agency | Dispositif d'imagerie par resonance magnétique nucléaire, et système d'imagerie et procédé d'imagerie utilisant un tel dispositif |
| US7608854B2 (en) * | 2007-01-29 | 2009-10-27 | Hewlett-Packard Development Company, L.P. | Electronic device and method of making the same |
| US7719688B2 (en) * | 2007-04-24 | 2010-05-18 | Hewlett-Packard Development Company, L.P. | Optical device and method of making the same |
| US8149007B2 (en) * | 2007-10-13 | 2012-04-03 | Formfactor, Inc. | Carbon nanotube spring contact structures with mechanical and electrical components |
| US7997002B2 (en) * | 2007-11-01 | 2011-08-16 | International Business Machines Corporation | Dual carbon nanotubes for critical dimension metrology on high aspect ratio semiconductor wafer patterns |
| US8588920B2 (en) * | 2007-11-21 | 2013-11-19 | The Trustees Of Boston College | Apparatus and methods for visual perception using an array of nanoscale waveguides |
| ES2303491A1 (es) * | 2007-12-21 | 2008-08-01 | Universidad Politecnica De Madrid | Detector de campo magnetico, mecanico y miniaturizable y su funcionamiento. |
| US8069492B2 (en) * | 2008-03-31 | 2011-11-29 | Seagate Technology Llc | Spin-torque probe microscope |
| US8272124B2 (en) * | 2009-04-03 | 2012-09-25 | Formfactor, Inc. | Anchoring carbon nanotube columns |
| US20100252317A1 (en) * | 2009-04-03 | 2010-10-07 | Formfactor, Inc. | Carbon nanotube contact structures for use with semiconductor dies and other electronic devices |
| US9111658B2 (en) * | 2009-04-24 | 2015-08-18 | Applied Nanostructured Solutions, Llc | CNS-shielded wires |
| CN102461361A (zh) | 2009-04-24 | 2012-05-16 | 应用纳米结构方案公司 | 并入cnt的emi屏蔽复合材料和涂层 |
| US9167736B2 (en) | 2010-01-15 | 2015-10-20 | Applied Nanostructured Solutions, Llc | CNT-infused fiber as a self shielding wire for enhanced power transmission line |
| WO2011103562A1 (en) * | 2010-02-22 | 2011-08-25 | University Of Houston | Neutral particle nanopatterning for nonplanar multimodal neural probes |
| US8338296B2 (en) * | 2010-06-29 | 2012-12-25 | Imec | Method for forming a catalyst suitable for growth of carbon nanotubes |
| US8580099B2 (en) * | 2010-09-20 | 2013-11-12 | University Of South Carolina | InN nanowire based multifunctional nanocantilever sensors |
| CA2782976A1 (en) | 2010-09-23 | 2012-03-29 | Applied Nanostructured Solutions, Llc | Cnt-infused fiber as a self shielding wire for enhanced power transmission line |
| US8872176B2 (en) | 2010-10-06 | 2014-10-28 | Formfactor, Inc. | Elastic encapsulated carbon nanotube based electrical contacts |
| US9085464B2 (en) | 2012-03-07 | 2015-07-21 | Applied Nanostructured Solutions, Llc | Resistance measurement system and method of using the same |
| WO2014190343A1 (en) | 2013-05-24 | 2014-11-27 | University Of Houston | Integrated thin-film optrode |
| US10580605B2 (en) | 2015-11-23 | 2020-03-03 | University Of Utah Research Foundation | Very low power microelectromechanical devices for the internet of everything |
| US10620150B2 (en) * | 2015-12-05 | 2020-04-14 | Mohammad Abdolahad | Electromechanical approach for cancer detection |
| US10073057B2 (en) * | 2016-06-14 | 2018-09-11 | Universidad De Santiago De Chile | Micro magnetic trap and process for evaluating forces with pico Newton resolution |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6528785B1 (en) * | 1998-12-03 | 2003-03-04 | Daiken Chemical Co., Ltd. | Fusion-welded nanotube surface signal probe and method of attaching nanotube to probe holder |
| DE69921472T2 (de) | 1998-05-07 | 2006-02-02 | Commissariat à l'Energie Atomique | Verfahren zur fixierung und selbstorganisation von biologischen macromolekulen auf kohlenstoffnanoröhren und deren verwendung |
| US6401526B1 (en) * | 1999-12-10 | 2002-06-11 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotubes and methods of fabrication thereof using a liquid phase catalyst precursor |
| US20020146714A1 (en) * | 2000-09-11 | 2002-10-10 | Lieber Charles M. | Direct haplotyping using carbon nanotube probes |
| US6755956B2 (en) * | 2000-10-24 | 2004-06-29 | Ut-Battelle, Llc | Catalyst-induced growth of carbon nanotubes on tips of cantilevers and nanowires |
| US6737939B2 (en) * | 2001-03-30 | 2004-05-18 | California Institute Of Technology | Carbon nanotube array RF filter |
| US6706402B2 (en) * | 2001-07-25 | 2004-03-16 | Nantero, Inc. | Nanotube films and articles |
-
2003
- 2003-09-18 EP EP03799825A patent/EP1540378A4/en not_active Withdrawn
- 2003-09-18 CA CA002499370A patent/CA2499370A1/en not_active Abandoned
- 2003-09-18 JP JP2004546747A patent/JP2006501484A/ja active Pending
- 2003-09-18 WO PCT/US2003/029520 patent/WO2004038430A2/en not_active Ceased
- 2003-09-18 AU AU2003299538A patent/AU2003299538B2/en not_active Ceased
- 2003-09-18 US US10/665,800 patent/US6887365B2/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007118112A (ja) * | 2005-10-26 | 2007-05-17 | National Institute For Materials Science | ナノ樹木／ナノ微粒子複合構造物の作製方法とナノ樹木／ナノ微粒子複合構造物 |
| JP2007232596A (ja) * | 2006-03-01 | 2007-09-13 | Jeol Ltd | 磁気共鳴力顕微鏡 |
| WO2011108543A1 (ja) | 2010-03-01 | 2011-09-09 | 国立大学法人神戸大学 | ポテンシャル取得装置、磁場顕微鏡、検査装置およびポテンシャル取得方法 |
| WO2012153496A1 (ja) | 2011-05-09 | 2012-11-15 | 国立大学法人神戸大学 | 分布解析装置 |
| US9568567B2 (en) | 2011-05-09 | 2017-02-14 | National University Corporation Kobe University | Distribution analysis device |
| WO2014129151A1 (ja) | 2013-02-25 | 2014-08-28 | 国立大学法人神戸大学 | 分布解析装置および分布解析方法 |
| KR20150125931A (ko) | 2013-02-25 | 2015-11-10 | 고쿠리츠다이가쿠호진 고베다이가쿠 | 분포 해석 장치 및 분포 해석 방법 |
| US10295617B2 (en) | 2013-02-25 | 2019-05-21 | Kenjiro Kimura | Distribution analyzing device and distribution analyzing method |
Also Published As
| Publication number | Publication date |
|---|---|
| US6887365B2 (en) | 2005-05-03 |
| WO2004038430A2 (en) | 2004-05-06 |
| WO2004038430A3 (en) | 2004-07-29 |
| AU2003299538A1 (en) | 2004-05-13 |
| US20040113621A1 (en) | 2004-06-17 |
| EP1540378A4 (en) | 2008-09-10 |
| AU2003299538B2 (en) | 2008-05-15 |
| EP1540378A2 (en) | 2005-06-15 |
| CA2499370A1 (en) | 2004-06-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6887365B2 (en) | Nanotube cantilever probes for nanoscale magnetic microscopy | |
| US7462270B2 (en) | Cantilever probes for nanoscale magnetic and atomic force microscopy | |
| Ziv et al. | AFM‐based spin‐exchange microscopy using chiral molecules | |
| Winkler et al. | Magnetic force microscopy sensors using iron-filled carbon nanotubes | |
| Braakman et al. | Force sensing with nanowire cantilevers | |
| Kong et al. | Quantification of magnetic force microscopy using a micronscale current ring | |
| Bang et al. | Multimodal scanning probe imaging: nanoscale chemical analysis from biology to renewable energy | |
| KR100697323B1 (ko) | 나노 팁 및 이의 제조방법 | |
| Koblischka et al. | Improvements of the lateral resolution of the MFM technique | |
| Daniels et al. | Investigation of the magnetic properties of ferritin by AFM imaging with magnetic sample modulation | |
| Chong et al. | Scanning Hall probe microscopy on an atomic force microscope tip | |
| Sahoo et al. | Scanning probe microscopy based on magnetoresistive sensing | |
| Cheran et al. | Work-function measurement by high-resolution scanning Kelvin nanoprobe | |
| Poggio et al. | Force-detected nuclear magnetic resonance | |
| Passeri et al. | Magnetic force microscopy | |
| Costa et al. | Integration of magnetoresistive sensors with atomic force microscopy cantilevers for scanning magnetoresistance microscopy applications | |
| Hickman et al. | Batch-fabrication of cantilevered magnets on attonewton-sensitivity mechanical oscillators for scanned-probe nanoscale magnetic resonance imaging | |
| US7170055B1 (en) | Nanotube arrangements and methods therefor | |
| Luo et al. | Quantitative magnetization measurements of magnetic particles with FePt standard samples | |
| KR100866325B1 (ko) | 신호 검출 및 전자방출용 프로브 및 이의 제조방법 | |
| Wade et al. | Single-molecule fluorescence and force microscopy employing carbon nanotubes | |
| Meiser et al. | Low temperature scanning force microscopy using piezoresistive cantilevers | |
| Sahoo et al. | Magnetoresistive sensor based scanning probe microscopy | |
| Wiesendanger | Mapping spin structures on the atomic scale | |
| Sarac et al. | Effects of ligand monolayers on catalytic nickel nanoparticles for synthesizing vertically aligned carbon nanofibers |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060913 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060914 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20081209 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20090507 |