JP2006352984A5 - - Google Patents

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Publication number
JP2006352984A5
JP2006352984A5 JP2005174857A JP2005174857A JP2006352984A5 JP 2006352984 A5 JP2006352984 A5 JP 2006352984A5 JP 2005174857 A JP2005174857 A JP 2005174857A JP 2005174857 A JP2005174857 A JP 2005174857A JP 2006352984 A5 JP2006352984 A5 JP 2006352984A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005174857A
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JP2006352984A (ja
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Application filed filed Critical
Priority to JP2005174857A priority Critical patent/JP2006352984A/ja
Priority claimed from JP2005174857A external-priority patent/JP2006352984A/ja
Priority to US11/447,024 priority patent/US7608981B2/en
Publication of JP2006352984A publication Critical patent/JP2006352984A/ja
Publication of JP2006352984A5 publication Critical patent/JP2006352984A5/ja
Pending legal-status Critical Current

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JP2005174857A 2005-06-15 2005-06-15 圧電薄膜振動子およびその製造方法、並びにそれを用いた駆動装置および圧電モータ Pending JP2006352984A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005174857A JP2006352984A (ja) 2005-06-15 2005-06-15 圧電薄膜振動子およびその製造方法、並びにそれを用いた駆動装置および圧電モータ
US11/447,024 US7608981B2 (en) 2005-06-15 2006-06-06 Piezoelectric thin film vibrator and fabrication method thereof, driving apparatus and piezoelectric motor using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005174857A JP2006352984A (ja) 2005-06-15 2005-06-15 圧電薄膜振動子およびその製造方法、並びにそれを用いた駆動装置および圧電モータ

Publications (2)

Publication Number Publication Date
JP2006352984A JP2006352984A (ja) 2006-12-28
JP2006352984A5 true JP2006352984A5 (ja) 2008-07-03

Family

ID=37572706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005174857A Pending JP2006352984A (ja) 2005-06-15 2005-06-15 圧電薄膜振動子およびその製造方法、並びにそれを用いた駆動装置および圧電モータ

Country Status (2)

Country Link
US (1) US7608981B2 (ja)
JP (1) JP2006352984A (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8049579B2 (en) * 2008-10-30 2011-11-01 Hewlett-Packard Development Company, L.P. Resonator having a stator coupled to three stator voltages
US9761785B2 (en) 2011-10-17 2017-09-12 The United States Of America As Represented By The Secretary Of The Army Stylo-epitaxial piezoelectric and ferroelectric devices and method of manufacturing
US8866367B2 (en) 2011-10-17 2014-10-21 The United States Of America As Represented By The Secretary Of The Army Thermally oxidized seed layers for the production of {001} textured electrodes and PZT devices and method of making
WO2021095637A1 (ja) * 2019-11-15 2021-05-20 株式会社村田製作所 超音波モータ
WO2021095549A1 (ja) * 2019-11-15 2021-05-20 株式会社村田製作所 超音波モータ

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4786836A (en) * 1984-03-01 1988-11-22 Matsushita Electric Industrail Co., Ltd. Piezoelectric motor
JPS6389083A (ja) * 1986-10-01 1988-04-20 Alps Electric Co Ltd 電歪モ−タ
JPS6443077A (en) * 1987-08-10 1989-02-15 Seiko Instr & Electronics Traveling surge motor
CN1035213A (zh) * 1987-12-29 1989-08-30 精工电子工业株式会社 行波电机
JPH01209963A (ja) * 1988-02-15 1989-08-23 Nec Corp 圧電モータ
JPH01227670A (ja) * 1988-03-07 1989-09-11 Matsushita Electric Ind Co Ltd 超音波モータ用素子
JPH0254610A (ja) * 1988-08-19 1990-02-23 Murata Mfg Co Ltd 圧電共振子及びその製造方法
JP2669013B2 (ja) * 1988-11-29 1997-10-27 松下電器産業株式会社 超音波モータの電極構造
JP2568707B2 (ja) * 1989-11-17 1997-01-08 松下電器産業株式会社 超音波モータ
JP3263971B2 (ja) * 1992-05-14 2002-03-11 セイコーエプソン株式会社 静電アクチュエーター
JPH07143765A (ja) * 1993-11-12 1995-06-02 Seiko Instr Inc 超音波モータ及び超音波モータ付き電子機器
US5814919A (en) * 1995-04-28 1998-09-29 Canon Kabushiki Kaisha Electro-mechanical energy conversion element and a vibration wave actuator using the electro-mechanical energy conversion element
JPH09223825A (ja) * 1996-02-19 1997-08-26 Nikon Corp 圧電応用素子
JPH09223824A (ja) 1996-02-19 1997-08-26 Nikon Corp 圧電応用素子
JPH11187677A (ja) * 1997-12-19 1999-07-09 Canon Inc 振動装置、振動型駆動装置およびこれを用いた装置
JPH11289782A (ja) * 1998-04-02 1999-10-19 Star Micronics Co Ltd 超音波モータ用振動体の製造方法及び超音波モータ用振動体
JP3148729B2 (ja) * 1998-04-13 2001-03-26 セイコーインスツルメンツ株式会社 超音波モータ及び超音波モータ付電子機器
JP3241683B2 (ja) * 1998-04-27 2001-12-25 セイコーインスツルメンツ株式会社 圧電アクチュエータ及びこれの方向補正方法
US6215375B1 (en) 1999-03-30 2001-04-10 Agilent Technologies, Inc. Bulk acoustic wave resonator with improved lateral mode suppression
JP2001352768A (ja) * 2000-06-05 2001-12-21 Canon Inc 積層電気−機械エネルギー変換素子および振動波駆動装置
US6943481B2 (en) * 2001-06-05 2005-09-13 Canon Precision Kabushiki Kaisha Vibration member and vibration wave driving apparatus
JP4261894B2 (ja) * 2002-12-13 2009-04-30 キヤノン株式会社 振動型駆動装置
US7095160B2 (en) * 2003-05-27 2006-08-22 The Penn State Research Foundation Piezoelectric motor and method of exciting an ultrasonic traveling wave to drive the motor
JP4165347B2 (ja) * 2003-06-25 2008-10-15 セイコーエプソン株式会社 圧電素子の製造方法
US7554422B2 (en) * 2004-09-10 2009-06-30 Panasonic Corporation Filter module using piezoelectric resonators, duplexer, communication device, and method for fabricating filter module
JP4829495B2 (ja) * 2004-12-21 2011-12-07 キヤノン株式会社 振動波駆動装置
FR2906238B1 (fr) * 2006-09-27 2008-12-19 Commissariat Energie Atomique Procede de realisation d'un composant electromecanique sur un substrat plan

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