JP2006336038A - High magnetic flux-density material and its manufacturing method - Google Patents
High magnetic flux-density material and its manufacturing method Download PDFInfo
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- 239000000463 material Substances 0.000 title claims abstract description 36
- 230000004907 flux Effects 0.000 title claims abstract description 26
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 239000000843 powder Substances 0.000 claims abstract description 17
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 10
- 239000000956 alloy Substances 0.000 claims abstract description 10
- 238000002441 X-ray diffraction Methods 0.000 claims abstract description 6
- 239000002775 capsule Substances 0.000 claims abstract description 5
- 238000001192 hot extrusion Methods 0.000 claims abstract description 5
- 239000000203 mixture Substances 0.000 claims abstract description 5
- 239000012535 impurity Substances 0.000 claims abstract description 4
- 238000001513 hot isostatic pressing Methods 0.000 claims abstract description 3
- 239000013078 crystal Substances 0.000 claims description 12
- 239000002994 raw material Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 229910020516 Co—V Inorganic materials 0.000 abstract description 5
- 238000000889 atomisation Methods 0.000 abstract description 5
- 229910052720 vanadium Inorganic materials 0.000 abstract description 5
- 238000000609 electron-beam lithography Methods 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 9
- 239000000696 magnetic material Substances 0.000 description 7
- 201000009310 astigmatism Diseases 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 4
- 229910017052 cobalt Inorganic materials 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 3
- 229910017061 Fe Co Inorganic materials 0.000 description 2
- 238000005266 casting Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000007712 rapid solidification Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910000756 V alloy Inorganic materials 0.000 description 1
- ABEXMJLMICYACI-UHFFFAOYSA-N [V].[Co].[Fe] Chemical compound [V].[Co].[Fe] ABEXMJLMICYACI-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000009689 gas atomisation Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000000700 radioactive tracer Substances 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 238000009692 water atomization Methods 0.000 description 1
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Abstract
Description
本発明は、電子顕微鏡、電子ビーム描画装置等の電子レンズのポールピース、ヨーク、および磁気共鳴装置、質量分析装置等の電磁石のポールピース、ヨーク等に使用するＦｅ−Ｃｏ−Ｖ軟質性の高磁束密度材料およびその製造方法に関するものである。 The present invention has a high Fe-Co-V softness used for pole pieces and yokes of electron lenses such as electron microscopes and electron beam drawing apparatuses, and pole pieces and yokes of electromagnets such as magnetic resonance apparatuses and mass spectrometers. The present invention relates to a magnetic flux density material and a manufacturing method thereof.
従来、Ｆｅ−Ｃｏ系磁性材料は、磁性材料中高い飽和磁束密度を有するため、ポールピース、ヨーク用磁性材料として適している。特に、Ｖを添加したＦｅ−Ｃｏ−Ｖ系磁性材料は、体積固有抵抗値が大きく、質量分析装置のように磁場強度を走査する場合の応答性が良好で優れた材料であることが知られている。このＦｅ−Ｃｏ−Ｖ系（パーメンジュール）材は一般的に鋳造法により製造され、一部焼結による検討もなされている。しかしながら、鋳造法または焼結により製造されたこの材料の機械加工性は、電子レンズのように非常に精密な機械加工を必要とする用途では不十分であり改善を要する。また、従来材の磁気特性の均質度は電子顕微鏡、磁気共鳴装置、質量分析装置などに使用する場合に決して満足のゆくものではない。 Conventionally, an Fe—Co based magnetic material has a high saturation magnetic flux density in the magnetic material, and is therefore suitable as a magnetic material for a pole piece and a yoke. In particular, Fe-Co-V magnetic materials added with V have a large volume resistivity, and are known to be excellent and excellent in responsiveness when scanning magnetic field strength as in a mass spectrometer. ing. This Fe-Co-V (permendur) material is generally manufactured by a casting method, and studies by partial sintering have also been made. However, the machinability of this material produced by casting or sintering is insufficient and needs improvement in applications that require very precise machining, such as electron lenses. Moreover, the homogeneity of the magnetic properties of conventional materials is never satisfactory when used in electron microscopes, magnetic resonance apparatuses, mass spectrometers, and the like.
一方、電子顕微鏡等の電子レンズは、上下ポールピース間隙の狭い空間内により強い磁場を発生させ、さらに、その磁場が均質（特に軸対称性）であることが要求される。従って、ポールピース材料には、（１）高飽和磁束密度であること、（２）高透磁率であること、（３）磁気特性の分布が均一であること、の３条件が求められる。これらの条件を満たす材料は、鉄とコバルトをほぼ一対一に含有する合金であり、この合金を磁気特性が均質になるよう製造することが課題となる。
この合金は、硬く脆い性質のため機械加工を行うことが困難である。このため約２％程度のバナジウムを添加し、切削性、研磨性を改善している。ただ、バナジウムは磁気特性の劣化を招くため、できれば低減することが望ましいものである。
On the other hand, an electron lens such as an electron microscope is required to generate a stronger magnetic field in a narrow space between the upper and lower pole piece gaps and to be homogeneous (particularly axially symmetric). Therefore, three conditions are required for the pole piece material: (1) high saturation magnetic flux density, (2) high magnetic permeability, and (3) uniform distribution of magnetic characteristics. A material satisfying these conditions is an alloy containing iron and cobalt in a substantially one-to-one relationship, and it is a problem to manufacture the alloy so that the magnetic properties are uniform.
This alloy is difficult to machine due to its hard and brittle nature. For this reason, about 2% vanadium is added to improve machinability and polishability. However, since vanadium causes deterioration of magnetic properties, it is desirable to reduce it if possible.
電子レンズは、中心に電子が通過する貫通穴を設けた円錐形状のポールピースを上下に対向させた構造が一般的であるが、電子顕微鏡等の分解能をさらに向上させるためには、中心の穴径を、ますます小さくすることが要求され、中心穴および各円錐曲面の真円度、また相互の同軸度には、ますます高い精度が要求されるようになっている。このような高精度の機械加工を行なうためには、材料の切削性、研磨性が良好であることがますます重要な要求事項となっている。この点から、鉄−コバルト−バナジウム合金の切削性、研磨性を改善することがポールピース材料としての重要な課題となっている。 An electron lens generally has a structure in which a conical pole piece with a through hole through which electrons pass is opposed to each other vertically, but in order to further improve the resolution of an electron microscope or the like, The diameter is required to become smaller and smaller, and higher accuracy is required for the roundness of the center hole and each conical curved surface, and the coaxiality of each other. In order to perform such high-precision machining, it is an increasingly important requirement that the material has good machinability and abrasiveness. From this point, improving the machinability and polishability of the iron-cobalt-vanadium alloy is an important issue as a pole piece material.
このＦｅ−Ｃｏ−Ｖ系材として、例えば特開平５−１７８０４号公報に開示されているように、コバルトが４０〜６０重量％、バナジウムが１．０〜２．５重量％、残部が鉄および不可避的不純物からなる原料粉末を成形し、焼結して鉄・コバルト系焼結磁性材料を製造する方法であって、焼結後、９５０〜１２００℃の温度で第１の熱処理を行い、その後７５０〜８５０℃の温度で第２の熱処理をする鉄・コバルト系焼結磁性材料の製造方法が提案されている。 As this Fe—Co—V-based material, for example, as disclosed in JP-A-5-17804, cobalt is 40 to 60% by weight, vanadium is 1.0 to 2.5% by weight, and the balance is iron and A method for producing an iron / cobalt-based sintered magnetic material by forming a raw material powder composed of inevitable impurities, sintering, and performing a first heat treatment at a temperature of 950 to 1200 ° C. after sintering. A method of manufacturing an iron / cobalt-based sintered magnetic material in which a second heat treatment is performed at a temperature of 750 to 850 ° C. has been proposed.
特許文献１の場合、Ｖを添加することで加工性を改善することが出来、その添加量は通常２％程度とされているが、しかしながら、上述したように磁気特性は劣化するため、電子顕微鏡の電子レンズのポールピースに用いる場合には高分解能化に限界があった。 In the case of Patent Document 1, the workability can be improved by adding V, and the amount added is usually about 2%. However, as described above, the magnetic characteristics deteriorate, so an electron microscope is used. However, there is a limit to high resolution when used for the pole piece of the electron lens.
上述したような問題を解消するために、発明者らは鋭意開発を進めた結果、結晶粒と脆性相の析出を抑制することにより、従来よりも低いＶ量でも十分な加工性が得られることを見出し本発明に至ったものである。その発明の要旨とするところは、
（１）質量％で、Ｃｏ：４８〜５２％、Ｖ：０．８〜１．６％、残部がＦｅおよび不可避的不純物からなり、結晶粒径が１００μｍ以下からなることを特徴とする高磁束密度材料。
In order to solve the problems described above, the inventors have intensively developed, and as a result, by suppressing the precipitation of crystal grains and a brittle phase, sufficient workability can be obtained even with a lower V amount than in the past. Has been found and has led to the present invention. The gist of the invention is that
(1) High magnetic flux characterized by comprising, in mass%, Co: 48 to 52%, V: 0.8 to 1.6%, the balance being Fe and inevitable impurities, and the crystal grain size being 100 μm or less. Density material.
（２）前記（１）に記載の成分組成からなり、Ｘ線回折によるαのメインピークに対する脆性相のピーク強度α´の比が０．０５以下であることを特徴とする高磁束密度材料。
（３）前記（１）に記載の結晶粒径が２０〜７０μｍであることを特徴とする高磁束密度材料。
(2) A high magnetic flux density material comprising the component composition described in (1) above, wherein the ratio of the peak intensity α ′ of the brittle phase to the α main peak by X-ray diffraction is 0.05 or less.
(3) A high magnetic flux density material, wherein the crystal grain size according to (1) is 20 to 70 μm.
（４）原料粉末をＡｒガスもしくは水を用いてアトマイズにより製造した合金粉末を、可鍛性カプセルに封入し、このカプセルごと上記粉末を熱間等方圧プレスにて成形することを特徴とする前記（１）〜（３）に記載の高磁束密度材料の製造方法。
（５）原料粉末をＡｒガスもしくは水を用いてアトマイズにより製造した合金粉末を、熱間押出加工にて棒状に成形することを特徴とする前記（１）〜（３）に記載の高磁束密度材料の製造方法にある。
(4) The alloy powder produced by atomizing the raw material powder using Ar gas or water is enclosed in a malleable capsule, and the above-mentioned powder together with the capsule is formed by hot isostatic pressing. The manufacturing method of the high magnetic flux density material as described in said (1)-(3).
(5) The high magnetic flux density according to the above (1) to (3), wherein the alloy powder produced by atomizing the raw material powder with Ar gas or water is formed into a rod shape by hot extrusion. It is in the manufacturing method of material.
以上述べたように、本発明により、従来よりも磁気特性が十分高く、磁気特性がより均質であり、良好な加工性を有するＦｅ−Ｃｏ系合金の作製が可能となったことは極めて産業上有利である。 As described above, according to the present invention, it is extremely industrially possible to produce an Fe—Co alloy having sufficiently higher magnetic characteristics than the conventional one, more uniform magnetic characteristics, and good workability. It is advantageous.
以下、本発明についての成分組成の限定理由について説明する。
Ｃｏ：４８〜５２％
Ｃｏは、磁性体を得るための基本の元素である。しかし、４８％未満では得られる磁性体の透磁率が低くなり、一方、５２％を超えると飽和磁束密度が小さくなるため、その範囲を４８〜５２％とした。
Hereinafter, the reasons for limiting the component composition according to the present invention will be described.
Co: 48-52%
Co is a basic element for obtaining a magnetic substance. However, if the content is less than 48%, the magnetic permeability of the obtained magnetic material is low. On the other hand, if the content exceeds 52%, the saturation magnetic flux density decreases, so the range is set to 48 to 52%.
Ｖ：０．８〜１．６％
Ｖは、磁気特性を向上させ、かつ加工性を改善させる元素である。しかし、０．８％未満では加工性を確保することができない。また、１．６％を超えると磁気特性が十分でないことから、その範囲を０．８〜１．６％とした。さらに、好ましくは１．１〜１．４％とする。
V: 0.8 to 1.6%
V is an element that improves magnetic properties and improves workability. However, if it is less than 0.8%, workability cannot be ensured. Moreover, since magnetic characteristics are not enough when it exceeds 1.6%, the range was made into 0.8 to 1.6%. Furthermore, it is preferably 1.1 to 1.4%.
結晶粒径が１００μｍ以下
結晶粒径を１００μｍ以下に微細化することにより、Ｖを低減しても加工性が十分確保できることを見出した。この点に本発明における大きな特徴がある。すなわち、Ｖの低減により磁気特性を向上させることが可能である。しかし、Ｖの含有量との関係から、結晶粒径が１０μｍ以下では磁気特性の劣化を招く。一方、１００μｍを超えると加工性が確保できない。従って、１００μｍ以下、好ましくは２０〜７０μｍとする。
It has been found that by reducing the crystal grain size to 100 μm or less, the workability can be sufficiently secured even if V is reduced. This is a major feature of the present invention. That is, the magnetic characteristics can be improved by reducing V. However, due to the relationship with the V content, if the crystal grain size is 10 μm or less, the magnetic properties are deteriorated. On the other hand, if it exceeds 100 μm, workability cannot be ensured. Accordingly, the thickness is 100 μm or less, preferably 20 to 70 μm.
さらに、Ｘ線回折によるαのメインピークに対する脆性相のピーク強度α´の比を０．０５以下に抑えることによりＶ量を低減しても加工性が十分確保できることを見出した。 上記、Ｘ線回折によるαのメインピークに対する脆性相のピーク強度α´の比が０．０５を超えると、本発明の目的とするＶ量を低減した場合には加工性が十分得られない。従って、その上限を０．０５とした。この結晶粒の微細化、脆性相の抑制には特にアトマイズ法が望ましい。アトマイズ法としてはガスアトマイズおよび水アトマイズのいずれでも構わない。急冷凝固により微細結晶粒および脆性相の低減を達成することができる。 Furthermore, it has been found that workability can be sufficiently ensured even if the amount of V is reduced by suppressing the ratio of the peak intensity α ′ of the brittle phase to the main peak of α by X-ray diffraction to 0.05 or less. When the ratio of the peak intensity α ′ of the brittle phase to the α main peak by X-ray diffraction exceeds 0.05, the workability cannot be sufficiently obtained when the V amount targeted by the present invention is reduced. Therefore, the upper limit was set to 0.05. The atomization method is particularly desirable for the refinement of the crystal grains and the suppression of the brittle phase. As the atomization method, either gas atomization or water atomization may be used. Reduction of fine grains and brittle phase can be achieved by rapid solidification.
また、アトマイズ法は急冷凝固により粉末を作製するため、本発明のような微細組織を必要とする場合に有効である。また、この粉末を熱間押出し法、もしくは熱間等方圧プレスにて成形することにより高密度、かつ工業的に生産することが可能である。 In addition, the atomization method is effective when a fine structure as in the present invention is required because a powder is prepared by rapid solidification. Moreover, it is possible to produce this powder at high density and industrially by molding the powder by a hot extrusion method or a hot isostatic press.
以下、本発明について実施例によって具体的に説明する。
原料粉末をアトマイズ条件として、圧力１〜５ＭＰａ、ノズル径φ２．０〜３．０ｍｍ、Ａｒガスもしくは水を用いて、圧力とノズル径の変更により結晶粒、脆性相の量を変化させた結果を表１に示す。また、表１に示すアトマイズにより製造した各種合金粉末を、１４７３Ｋ−５ｈｒ−１５０ＭＰａにて保持してなるＨＩＰ（熱間高圧力処理）、もしくは１４７３Ｋにてφ１９０からφ９０に熱間押出加工を行い、φ９０×１０００ｍｍに成形した後、切断、切削加工および研磨加工し、φ８０×１００ｍｍに仕上げ、リング試験片を得る。この試験片の磁気特性、加工特性を調査した。その結果を表１に示す。
Hereinafter, the present invention will be specifically described with reference to examples.
The result of changing the amount of crystal grains and brittle phase by changing the pressure and nozzle diameter, using raw material powder as atomizing conditions, pressure 1-5 MPa, nozzle diameter φ2.0-3.0 mm, Ar gas or water Table 1 shows. In addition, HIP (hot high pressure treatment) in which various alloy powders manufactured by atomization shown in Table 1 are held at 1473 K-5 hr-150 MPa, or hot extrusion from φ190 to φ90 at 1473 K, After forming to φ90 × 1000 mm, cutting, cutting and polishing are performed to finish to φ80 × 100 mm to obtain a ring test piece. The magnetic characteristics and processing characteristics of this test piece were investigated. The results are shown in Table 1.
（１）飽和磁束密度（Ｂｓ）、保磁力（Ｈｃ）：ＢＨトレーサー装置を用いて、試験片形状は、外径１５ｍｍ、内径１０ｍｍ、高さ５ｍｍのもの
（２）印加磁場：２４０ｋＡ／ｍ
（３）結晶粒径：光学顕微鏡にて１００個の結晶粒径の平均値を算出した。
（４）脆性相の量：Ｘ線回折によるαのメインピークに対する脆性相のピーク強度α´の比を算出した。
（５）加工性：製品仕上がり後に割れ、欠けが無いか目視にて確認した。
(1) Saturation magnetic flux density (Bs), coercive force (Hc): Using a BH tracer device, the test piece has an outer diameter of 15 mm, an inner diameter of 10 mm, and a height of 5 mm. (2) Applied magnetic field: 240 kA / m
(3) Crystal grain size: The average value of 100 crystal grain sizes was calculated with an optical microscope.
(4) Amount of brittle phase: The ratio of the peak intensity α ′ of the brittle phase to the main peak of α by X-ray diffraction was calculated.
(5) Workability: After finishing the product, it was visually checked for cracks and chips.
表１に示すように、Ｎｏ．１〜１２は本発明例であり、Ｎｏ．１３〜１７は比較例である。比較例Ｎｏ．１３およびＮｏ．１４はＶ含有量が低く、かつピーク強度比が高いために、加工後の割れが発生した。比較例Ｎｏ．１５およびＮｏ．１６はＶ含有量が高いために、磁気特性である飽和磁束密度（Ｂｓ）および保磁力が劣る。比較例Ｎｏ．１７は結晶粒径が大きく、かつピーク強度比が低いために、加工後の割れが発生した。これに対し、本発明例であるＮｏ．１〜１２はいずれの場合も磁気特性、加工特性に優れていることが分かる。 As shown in Table 1, no. Nos. 1 to 12 are examples of the present invention. 13 to 17 are comparative examples. Comparative Example No. 13 and no. No. 14 had a low V content and a high peak intensity ratio, so cracks after processing occurred. Comparative Example No. 15 and no. Since No. 16 has a high V content, the saturation magnetic flux density (Bs) and coercive force, which are magnetic properties, are inferior. Comparative Example No. Since No. 17 had a large crystal grain size and a low peak intensity ratio, cracks after processing occurred. On the other hand, No. which is an example of the present invention. It can be seen that 1 to 12 are excellent in magnetic characteristics and processing characteristics in any case.
本発明により製造された高磁束密度材料（Ｖ含有量１．３４ｍａｓｓ％）を用いて、加速電圧２００ｋＶの透過電子顕微鏡の対物レンズポールピース６式を製作し、電子顕微鏡に実装して飽和磁束密度および磁気特性の均質度（軸対称性）を評価した。
電子レンズに使用した場合の飽和磁束密度は、リングサンプルを用いて測定したサンプル容積内において平均化された特性値とは異なる。電子レンズにおいては高い飽和磁束密度は、より低い励磁電流により、所定の焦点距離が得られることによって示される。本材料を用いたポールピースは本電子顕微鏡において要求される励磁電流１１．３Ａを６式すべてがクリアし、その平均値は１１．２４Ａであった。電子レンズに用いた場合に十分に高い磁束密度が得られていることが確認された。
Using a high magnetic flux density material (V content: 1.34 mass%) manufactured according to the present invention, a set of 6 objective lens pole pieces of a transmission electron microscope with an accelerating voltage of 200 kV is manufactured and mounted on an electron microscope to obtain a saturation magnetic flux density. In addition, the homogeneity (axial symmetry) of the magnetic properties was evaluated.
The saturation magnetic flux density when used in an electron lens is different from the characteristic value averaged in the sample volume measured using a ring sample. In an electron lens, a high saturation magnetic flux density is indicated by the fact that a predetermined focal length is obtained with a lower excitation current. The pole piece using this material cleared the exciting current 11.3A required in the present electron microscope for all six types, and the average value was 11.24A. It was confirmed that a sufficiently high magnetic flux density was obtained when used for an electron lens.
磁気特性の均質度（軸対称性）は対物レンズの非点隔差−直行する２方向での焦点距離の差−により評価する。像観察時には非点隔差は非点補正コイルにより補正されるが、補正を行なわないポールピース自体の非点隔差は、補正コイルの補正量より逆算して求めることができる。ポールピース自体の非点隔差は、機械精度と材料の磁気特性不均質の両要因に影響されるが、機械精度は今日では３次元測定器などにより確認できる。機械精度を十分確認したポールピースにおいては、非点隔差は材料の磁気特性の均質度を表す指標と考えることができる。本材料により製作したポールピースの非点隔差は、本電子顕微鏡において要求される２．０μｍを６式すべてがクリアし、平均値は１．１２４μｍであった。このことから、本発明により製造された材料が、磁気特性の均質度において優れており、対物レンズの非点隔差を低減させることが確認できた。 The homogeneity (axial symmetry) of the magnetic characteristics is evaluated by the astigmatic difference of the objective lens-the difference in focal length in two orthogonal directions. During image observation, the astigmatism is corrected by the astigmatism correction coil, but the astigmatism of the pole piece itself that is not corrected can be obtained by back calculation from the correction amount of the correction coil. The astigmatic difference of the pole piece itself is affected by both the mechanical accuracy and the magnetic property inhomogeneity of the material, but the mechanical accuracy can be confirmed by a three-dimensional measuring instrument today. In a pole piece whose mechanical accuracy has been sufficiently confirmed, the astigmatic difference can be considered as an index representing the homogeneity of the magnetic properties of the material. The astigmatic difference of the pole piece made of this material was 2.0 μm required for the present electron microscope, all 6 types cleared, and the average value was 1.124 μm. From this, it was confirmed that the material produced according to the present invention is excellent in the homogeneity of magnetic characteristics and reduces the astigmatic difference of the objective lens.
電子顕微鏡の分解能は対物レンズの性能でほぼ決まり、対物レンズの性能はポールピース材料の磁気特性に大きく影響される。ポールピース材料の飽和磁束密度の向上、および磁気特性の均質度の向上によるポールピース自体の非点隔差の低減は、いずれも電子顕微鏡の分解能を向上させる。その他、３次元測定器などにより測定されたポールピースの各部の機械的精度は良好な数値を示しており、本材料が従来材に比較して機械加工性（切削性、研磨性）において優れていることも確認されている。
上述したように、本発明により製造された高磁束密度材料は電子顕微鏡、電子ビーム描画装置等の電子レンズ、磁気共鳴装置、質量分析装置のポールピース、ヨーク材料として、従来に比較して優れた特性を有しており、工業的に極めて有利な方法を提供するものである。
特許出願人 山陽特殊製鋼株式会社 他１名
代理人 弁理士 椎 名 彊
The resolution of the electron microscope is almost determined by the performance of the objective lens, and the performance of the objective lens is greatly influenced by the magnetic properties of the pole piece material. Improvement of the saturation magnetic flux density of the pole piece material and reduction of the astigmatism of the pole piece itself by improving the homogeneity of the magnetic properties both improve the resolution of the electron microscope. In addition, the mechanical accuracy of each part of the pole piece measured by a three-dimensional measuring instrument shows a good numerical value, and this material is superior in machinability (cutting ability, abrasiveness) compared to conventional materials. It has also been confirmed.
As described above, the high magnetic flux density material manufactured according to the present invention is superior to conventional materials as an electron microscope, an electron lens such as an electron beam drawing device, a magnetic resonance device, a pole piece of a mass spectrometer, and a yoke material. It has characteristics and provides an industrially very advantageous method.
Patent applicant Sanyo Special Steel Co., Ltd. and 1 other
Attorney: Attorney Shiina
Claims (5)
Ｃｏ：４８〜５２％、
Ｖ：０．８〜１．６％、
残部がＦｅおよび不可避的不純物からなり、結晶粒径が１００μｍ以下からなることを特徴とする高磁束密度材料。 % By mass
Co: 48-52%
V: 0.8-1.6%,
A high magnetic flux density material characterized in that the balance is Fe and inevitable impurities, and the crystal grain size is 100 μm or less.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3546094A1 (en) | 2018-03-29 | 2019-10-02 | Seiko Epson Corporation | Soft magnetic powder and method for producing sintered body |
| WO2021182518A1 (en) * | 2020-03-10 | 2021-09-16 | 日立金属株式会社 | METHOD FOR MANUFACTURING Fe-Co-BASED ALLOY ROD, AND Fe-Co-BASED ALLOY ROD |
| US11450459B2 (en) | 2018-03-29 | 2022-09-20 | Seiko Epson Corporation | Soft magnetic powder and method for producing sintered body |
| WO2023042278A1 (en) * | 2021-09-14 | 2023-03-23 | 株式会社プロテリアル | Fe-co alloy bar stock |
| WO2023042279A1 (en) * | 2021-09-14 | 2023-03-23 | 株式会社プロテリアル | Fe-co-based alloy rod material |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| EP3546094A1 (en) | 2018-03-29 | 2019-10-02 | Seiko Epson Corporation | Soft magnetic powder and method for producing sintered body |
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| WO2023042278A1 (en) * | 2021-09-14 | 2023-03-23 | 株式会社プロテリアル | Fe-co alloy bar stock |
| WO2023042279A1 (en) * | 2021-09-14 | 2023-03-23 | 株式会社プロテリアル | Fe-co-based alloy rod material |
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