JP2006334755A - Surface coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in high-speed and deep cutting - Google Patents
Surface coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in high-speed and deep cutting Download PDFInfo
- Publication number
- JP2006334755A JP2006334755A JP2005165367A JP2005165367A JP2006334755A JP 2006334755 A JP2006334755 A JP 2006334755A JP 2005165367 A JP2005165367 A JP 2005165367A JP 2005165367 A JP2005165367 A JP 2005165367A JP 2006334755 A JP2006334755 A JP 2006334755A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- unit
- inclination angle
- degrees
- hard coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Images
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
この発明は、特に硬質被覆層の構成層である酸化アルミニウム層（以下、Ａｌ2Ｏ3層で示す）を厚膜化した状態で、各種の鋼や鋳鉄などの切削加工を、高速で、かつ高い機械的衝撃を伴なう高切り込みや高送りなどの重切削条件で行った場合にも、硬質被覆層がすぐれた耐チッピング性を示し、したがってチッピング（微少欠け）などの発生なく、長期に亘ってすぐれた耐摩耗性を発揮する表面被覆サーメット製切削工具（以下、被覆サーメット工具という）に関するものである。 In the present invention, particularly in a state in which an aluminum oxide layer (hereinafter referred to as an Al 2 O 3 layer) that is a constituent layer of a hard coating layer is thickened, various kinds of cutting work such as steel and cast iron can be performed at high speed. Even under heavy cutting conditions such as high cutting and high feed with high mechanical impact, the hard coating layer exhibits excellent chipping resistance, and therefore, no chipping (small chipping) occurs, and long-term The present invention relates to a surface-coated cermet cutting tool (hereinafter referred to as a coated cermet tool) that exhibits excellent wear resistance.
従来、一般に、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された基体（以下、これらを総称して工具基体という）の表面に、
（ａ）下部層が、Ｔｉの炭化物（以下、ＴｉＣで示す）層、窒化物（以下、同じくＴｉＮで示す）層、炭窒化物（以下、ＴｉＣＮで示す）層、炭酸化物（以下、ＴｉＣＯで示す）層、および炭窒酸化物（以下、ＴｉＣＮＯで示す）層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層が、厚膜化した状態も含めると、１〜１２μｍの平均層厚を有し、かつ化学蒸着した状態でα型の結晶構造を有する酸化アルミニウム層（以下、蒸着α型Ａｌ2Ｏ3層で示す）、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる被覆サーメット工具が知られており、この被覆サーメット工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられることは良く知られている。
また、上記の被覆サーメット工具において、上記（ｂ）の上部層を蒸着α型Ａｌ2Ｏ3層単独で形成するのではなく、蒸着α型Ａｌ2Ｏ3層とＴｉ化合物層（例えば、Ｔｉの窒化物（以下、ＴｉＮで示す）層，炭化物（以下、ＴｉＣで示す）層，炭窒化物（以下、ＴｉＣＮで示す）層，炭窒酸化物（以下、ＴｉＣＮＯで示す）層，窒酸化物（以下、ＴｉＮＯで示す）層，炭酸化物（以下、ＴｉＣＯで示す）層）との積層構造として形成することにより、硬質被覆層の密着性、硬度、耐摩耗性を改善する工夫もなされている。
そして、蒸着α型Ａｌ2Ｏ3層とＴｉ化合物層は、いずれも所定の硬度、強度を有することから、蒸着α型Ａｌ2Ｏ3層とＴｉ化合物層の積層構造からなる上部層を備えた硬質被覆層を蒸着形成してなるこれらの従来被覆サーメット工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられることは良く知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) The lower layer is a Ti carbide (hereinafter referred to as TiC) layer, a nitride (hereinafter also referred to as TiN) layer, a carbonitride (hereinafter referred to as TiCN) layer, a carbon oxide (hereinafter referred to as TiCO). A Ti compound layer consisting of one or two or more layers of carbonitride oxide (hereinafter referred to as TiCNO) layers and having an overall average layer thickness of 3 to 20 μm,
(B) An aluminum oxide layer having an average layer thickness of 1 to 12 μm and having an α-type crystal structure in a state of chemical vapor deposition (hereinafter referred to as vapor deposition α-type Al) 2 O 3 layer)
There is known a coated cermet tool formed by vapor-depositing a hard coating layer composed of (a) and (b) above, and this coated cermet tool can be used for continuous cutting and intermittent cutting of various steels and cast irons, for example. It is well known to be used.
In the above coated cermet tool, the upper layer of (b) is not formed by the vapor-deposited α-type Al 2 O 3 layer alone, but the vapor-deposited α-type Al 2 O 3 layer and Ti compound layer (for example, Ti Nitride (hereinafter referred to as TiN) layer, carbide (hereinafter referred to as TiC) layer, carbonitride (hereinafter referred to as TiCN) layer, carbonitride oxide (hereinafter referred to as TiCNO) layer, nitride oxide ( Hereinafter, a device for improving the adhesion, hardness, and wear resistance of the hard coating layer has also been devised by forming it as a laminated structure of a layer of TiNO) and a carbonate (hereinafter referred to as TiCO) layer.
Since the vapor-deposited α-type Al 2 O 3 layer and the Ti compound layer both have predetermined hardness and strength, an upper layer comprising a laminated structure of the vapor-deposited α-type Al 2 O 3 layer and the Ti compound layer is provided. It is well known that these conventional coated cermet tools formed by vapor-depositing a hard coating layer are used for continuous cutting and intermittent cutting of, for example, various types of steel and cast iron.
また、一般に、上記の被覆サーメット工具の硬質被覆層を構成するＴｉ化合物層や蒸着α型Ａｌ2Ｏ3層が粒状結晶組織を有し、さらに、Ｔｉ化合物層を構成する前記ＴｉＮ，ＴｉＣＯ，ＴｉＣＮＯなどの各層は、形成すべきＴｉ化合物の種類に応じた反応ガス、反応条件を選定することによって、通常の化学蒸着装置で化学蒸着することにより形成されるものであることも知られている。
近年の切削装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、さらに切削加工は一段と高速化すると共に、高切り込みや高送りなどの重切削条件での切削加工が強く求められる傾向にあるが、上記の従来被覆サーメット工具においては、これを鋼や鋳鉄などの通常の条件での連続切削や断続切削に用いた場合には問題はないが、特にこれを高速重切削条件で用いた場合には、特に硬質被覆層を構成する蒸着α型Ａｌ2Ｏ3層の高温硬さおよび高温強度が不十分であるために、摩耗が急速に進行し、かつチッピングも発生し易くなり、さらに前記蒸着α型Ａｌ2Ｏ3層の厚膜化によってチッピングは一段と発生し易くなることから、比較的短時間で使用寿命に至るのが現状である。 In recent years, the performance of cutting equipment has been remarkable. On the other hand, there is a strong demand for labor saving and energy saving and further cost reduction for cutting work. Further, cutting speed is further increased, and heavy cutting such as high cutting and high feed. Although there is a tendency that cutting under conditions is strongly demanded, in the above-mentioned conventional coated cermet tool, there is no problem when it is used for continuous cutting and intermittent cutting under normal conditions such as steel and cast iron. Especially when this is used under high-speed heavy cutting conditions, wear progresses rapidly because the high-temperature hardness and high-temperature strength of the vapor-deposited α-type Al 2 O 3 layer that constitutes the hard coating layer is insufficient. In addition, chipping is likely to occur, and further chipping is more likely to occur due to the thickening of the deposited α-type Al 2 O 3 layer, so that the service life is reached in a relatively short time.
そこで、本発明者等は、上述のような観点から、硬質被覆層の上部層を、蒸着α型Ａｌ2Ｏ3層とＴｉ化合物層の積層構造として形成した従来被覆サーメット工具に着目し、特に硬質被覆層の上部層の前記蒸着α型Ａｌ2Ｏ3層の耐チッピング性向上を図るべく研究を行った結果、
（ａ）上記の従来被覆サーメット工具の硬質被覆層としての蒸着α型Ａｌ2Ｏ3層は、一般に、通常の化学蒸着装置にて、
反応ガス組成：容量％で、ＡｌＣｌ3：１〜５％、ＣＯ2：３〜７％、ＨＣｌ：０．３〜３％、Ｈ2Ｓ：０．０２〜０．４％、Ｈ2：残り、
反応雰囲気温度：９５０〜１１００℃、
反応雰囲気圧力：６〜１３ｋＰａ、
の条件（以下、通常条件という）で形成されるが、この通常条件形成の蒸着α型Ａｌ2Ｏ3層（以下、蒸着α型Ａｌ2Ｏ3標準層という）について、電界放出型走査電子顕微鏡を用い、図１（ａ），（ｂ）および図２（ａ），（ｂ）に概略説明図で示される通り、工具基体表面と平行な研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、それぞれ０〜４５度および４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成すると、図５，６に例示される通り、（０００１）面の測定傾斜角の分布が０〜４５度および４５〜９０度の範囲内で不偏的な傾斜角度数分布グラフを示すこと。
In view of the above, the inventors focused on a conventional coated cermet tool in which the upper layer of the hard coating layer is formed as a laminated structure of a vapor-deposited α-type Al 2 O 3 layer and a Ti compound layer, and in particular, As a result of conducting research to improve the chipping resistance of the vapor-deposited α-type Al 2 O 3 layer of the upper layer of the hard coating layer,
(A) The vapor-deposited α-type Al 2 O 3 layer as a hard coating layer of the above-described conventional coated cermet tool is generally used in a normal chemical vapor deposition apparatus.
Reaction gas composition: by volume%, AlCl 3: 1~5%, CO 2: 3~7%, HCl: 0.3~3%, H 2 S: 0.02~0.4%, H 2: remainder ,
Reaction atmosphere temperature: 950-1100 ° C.
Reaction atmosphere pressure: 6-13 kPa,
The evaporated α-type Al 2 O 3 layer (hereinafter referred to as a vapor-deposited α-type Al 2 O 3 standard layer) formed under the normal conditions is subjected to a field emission scanning electron microscope. 1 (a), 1 (b) and FIGS. 2 (a), 2 (b), a hexagonal crystal lattice existing in the measurement range of the polished surface parallel to the tool base surface And measuring the inclination angle formed by the normal line of the (0001) plane, which is the crystal plane of the crystal grain, with respect to the normal line of the polished surface. Among them, the measured inclination angles within the range of 0 to 45 degrees and 45 to 90 degrees are divided for each pitch of 0.25 degrees, and the inclination angle number distribution is obtained by counting the frequencies existing in each section. When the graph is created, as shown in FIGS. The distribution of the corner exhibits an unbiased inclination angle frequency distribution graph in the range of 0-45 degrees and 45-90 degrees.
（ｂ）一方、α型Ａｌ2Ｏ3層を、同じく通常の化学蒸着装置を用い、
反応ガス組成：容量％で、ＡｌＣｌ3：６〜１０％、ＣＯ2：０．１〜１％、ＨＣｌ：０．３〜３％、Ｈ2Ｓ：０．５〜１％、Ａｒ：１０〜３５％、Ｈ2：残り、
反応雰囲気温度：１０００〜１０５０℃、
反応雰囲気圧力：５〜８ｋＰａ、
の条件、すなわち反応ガス組成を調整して上記の通常条件の反応ガス組成とは異なった反応ガス組成とした条件（反応雰囲気の温度および圧力は上記の通常条件と同じ）で形成すると、この結果形成された蒸着α型Ａｌ2Ｏ3層は、同じく電界放出型走査電子顕微鏡を用い、図１（ａ），（ｂ）に示される通り、同じく工具基体表面と平行な研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで現した場合、図３に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、試験結果によれば、化学蒸着装置における反応雰囲気圧力を、上記の通り５〜８ｋＰａの範囲内で変化させると、上記シャープな最高ピークの現れる位置が傾斜角区分の０〜１０度の範囲内で変化すると共に、前記０〜１０度の範囲内に存在する度数の合計は、傾斜角度数分布グラフにおける度数全体の４５〜６５％の割合を占めるようになり、この結果の傾斜角度数分布グラフにおいて０〜１０度の範囲内に傾斜角区分の最高ピークが現れる蒸着α型Ａｌ2Ｏ3層は、上記の通常条件形成の蒸着α型Ａｌ2Ｏ3層に比して、相対的にすぐれた高温強度を有すること。
(B) On the other hand, the α-type Al 2 O 3 layer was similarly used with a normal chemical vapor deposition apparatus,
Reaction gas composition: volume%, AlCl 3 : 6 to 10%, CO 2 : 0.1 to 1%, HCl: 0.3 to 3%, H 2 S: 0.5 to 1%, Ar: 10 to 10% 35%, H 2 : remaining,
Reaction atmosphere temperature: 1000 to 1050 ° C.
Reaction atmosphere pressure: 5 to 8 kPa,
If the reaction gas composition is adjusted to the reaction gas composition different from the reaction gas composition of the above normal conditions (the temperature and pressure of the reaction atmosphere are the same as the above normal conditions), this result is obtained. The deposited α-type Al 2 O 3 layer formed was similarly measured using a field emission scanning electron microscope, as shown in FIGS. 1 (a) and 1 (b), within the measurement range of a polished surface parallel to the tool substrate surface. Each of the crystal grains having a hexagonal crystal lattice existing in the substrate is irradiated with an electron beam, and the inclination angle formed by the normal line of the (0001) plane that is the crystal plane of the crystal grain is made relative to the normal line of the polished surface. Measured and divided the measured inclination angle within the range of 0 to 45 degrees among the measured inclination angles for each pitch of 0.25 degrees, and the number of inclination angles obtained by totalizing the frequencies existing in each section When shown in the distribution graph, as illustrated in FIG. A sharp maximum peak appears at a specific position in the oblique section. According to the test results, when the reaction atmosphere pressure in the chemical vapor deposition apparatus is changed within the range of 5 to 8 kPa as described above, the sharp maximum peak appears. While the position changes within the range of 0 to 10 degrees of the inclination angle section, the total of the frequencies existing within the range of 0 to 10 degrees is a ratio of 45 to 65% of the total degrees in the inclination angle frequency distribution graph. The deposited α-type Al 2 O 3 layer in which the highest peak of the tilt angle section appears in the range of 0 to 10 degrees in the resulting tilt angle number distribution graph is the deposited α-type Al of the above-mentioned normal conditions. Compared to the 2 O 3 layer, it has relatively high temperature strength.
（ｃ）さらに、蒸着α型Ａｌ2Ｏ3層を、同じく通常の化学蒸着装置を用い、
反応ガス組成：容量％で、ＡｌＣｌ3：１〜５％、ＣＯ2：３〜７％、ＨＣｌ：０．３〜３％、Ｈ2Ｓ：０．０２〜０．４％、Ｈ2：残り、
反応雰囲気温度：７５０〜９００℃、
反応雰囲気圧力：２０〜３０ｋＰａ、
の相対的に低温高圧条件（反応ガス組成は上記の通常条件と同じ）で形成すると、この結果形成された蒸着α型Ａｌ2Ｏ3層は、同じく電界放出型走査電子顕微鏡を用い、図２（ａ），（ｂ）に示される通り、上記工具基体表面と平行な研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記縦断研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで現した場合、図４に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、試験結果によれば、化学蒸着装置における反応雰囲気圧力を、上記の通り２０〜３０ｋＰａの範囲内で変化させると、上記シャープな最高ピークの現れる位置が傾斜角区分の７５〜８５度の範囲内で変化すると共に、前記７５〜８５度の範囲内に存在する度数の合計は、傾斜角度数分布グラフにおける度数全体の４５〜６５％の割合を占めるようになり、この結果の傾斜角度数分布グラフにおいて７５〜８５度の範囲内に傾斜角区分の最高ピークが現れる蒸着α型Ａｌ2Ｏ3層は、上記の通常条件形成の蒸着α型Ａｌ2Ｏ3層に比して、相対的に高い高温硬さを有すること。
(C) Furthermore, the vapor-deposited α-type Al 2 O 3 layer was similarly used with a normal chemical vapor deposition apparatus,
Reaction gas composition: by volume%, AlCl 3: 1~5%, CO 2: 3~7%, HCl: 0.3~3%, H 2 S: 0.02~0.4%, H 2: remainder ,
Reaction atmosphere temperature: 750 to 900 ° C.
Reaction atmosphere pressure: 20-30 kPa,
2 formed under the relatively low temperature and high pressure conditions (reaction gas composition is the same as the above normal conditions), the deposited α-type Al 2 O 3 layer formed as a result is also shown in FIG. As shown in (a) and (b), each crystal grain having a hexagonal crystal lattice existing in the measurement range of the polishing surface parallel to the tool base surface is irradiated with an electron beam, The inclination angle formed by the normal line of the (0001) plane, which is the crystal plane of the crystal grain, is measured with respect to the normal line, and the measurement inclination angle within the range of 45 to 90 degrees out of the measurement inclination angles is set to 0. .When divided into 25-degree pitches and represented by an inclination angle number distribution graph in which the frequencies existing in each area are aggregated, as shown in FIG. The highest peak appears and the test results show that When the atmospheric pressure is changed within the range of 20 to 30 kPa as described above, the position at which the sharpest peak appears changes within the range of 75 to 85 degrees of the inclination angle section, and the 75 to 85 degrees The sum of the frequencies existing in the range occupies a ratio of 45 to 65% of the entire frequency in the tilt angle frequency distribution graph, and the tilt angle falls within the range of 75 to 85 degrees in the resulting tilt angle frequency distribution graph. The vapor-deposited α-type Al 2 O 3 layer in which the highest peak of the section appears has a relatively high high-temperature hardness as compared with the vapor-deposited α-type Al 2 O 3 layer formed under normal conditions.
（ｄ）従来被覆サーメット工具の硬質被覆層の上部層、つまり、蒸着α型Ａｌ2Ｏ3標準層とＴｉ化合物層との積層構造として形成した上部層、において、上記（ｂ）の反応ガス組成調整条件の蒸着α型Ａｌ2Ｏ3層からなる層を第１単位層、上記（ｃ）の低温高圧条件の蒸着α型Ａｌ2Ｏ3層からなる層を第２単位層、また、上記Ｔｉ化合物層を中間層とすると共に、第１単位層及び第２単位層のそれぞれの平均層厚を１．５〜５μｍとし、第１単位層及び第２単位層の間に中間層を介在させた３層積層構造で上部層を構成し、かつ全体平均層厚を３．５〜１１μｍとしてなる上部層を、下部層がＴｉ化合物層からなる硬質被覆層の上部層として構成してなる被覆サーメット工具は、前記３層積層構造の上部層が、すぐれた密着性とともにすぐれた高温硬さと高温強度を具備するようになることから、特に最大層厚で１１μｍに厚膜化した状態で、高速重切削条件で切削加工を行っても、上記蒸着α型Ａｌ2Ｏ3標準層とＴｉ化合物層とを積層した従来被覆サーメット工具に比して、硬質被覆層にチッピングの発生なく、一段とすぐれた耐摩耗性を長期に亘って発揮するようになること。
以上（ａ）〜（ｄ）に示される研究結果を得たのである。
(D) In the upper layer of the hard coating layer of the conventional coated cermet tool, that is, the upper layer formed as a laminated structure of the vapor-deposited α-type Al 2 O 3 standard layer and the Ti compound layer, the reaction gas composition of (b) above layer of the first unit layer composed of vapor-deposited α-type the Al 2 O 3 layer of the adjustment condition, the second unit layer a layer of a vapor deposited α-type the Al 2 O 3 layer of low temperature and high pressure conditions described above (c), also, the Ti The compound layer is an intermediate layer, the average thickness of each of the first unit layer and the second unit layer is 1.5 to 5 μm, and the intermediate layer is interposed between the first unit layer and the second unit layer. A coated cermet tool comprising an upper layer with a three-layer laminated structure and an upper layer having an overall average layer thickness of 3.5 to 11 μm as an upper layer of a hard coating layer whose lower layer is a Ti compound layer The upper layer of the three-layer structure has excellent adhesion and excellent adhesion. Therefore, even if cutting is performed under high-speed heavy cutting conditions with a maximum layer thickness of 11 μm, the above evaporated α-type Al 2 O 3 standard Compared to a conventional coated cermet tool in which a layer and a Ti compound layer are laminated, the hard coating layer exhibits excellent wear resistance over a long period of time without occurrence of chipping.
The research results shown in (a) to (d) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、工具基体の表面に、
（ａ）Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層からなる下部層、
（ｂ）第１単位層と、第２単位層と、第１単位層と第２単位層との間に介在する中間層との３層積層構造からなり、かつ３．５〜１１μｍの全体平均層厚を有する上部層、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる表面被覆サーメット製切削工具において、
上記上部層の第１単位層と第２単位層は、化学蒸着した状態でα型の結晶構造を有するα型酸化アルミニウム層から構成され、また、上記中間層は、Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層および炭窒酸化物層のうちの１種または２種以上からなるＴｉ化合物層から構成され、第１単位層と第２単位層は、それぞれ、１．５〜５μｍの平均層厚を有し、さらに電界放出型走査電子顕微鏡を用い、上記工具基体表面と平行な研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、上記第１単位層については０〜４５度、上記第２単位層については４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで現した場合、
（Ａ）上記第１単位層は、０〜１０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記０〜１０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜６５％の割合を占める傾斜角度数分布グラフを示し、
（Ｂ）上記第２単位層は、７５〜８５度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記７５〜８５度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜６５％の割合を占める傾斜角度数分布グラフを示すこと、
を特徴とする硬質被覆層が高速重切削ですぐれた耐チッピング性を発揮する表面被覆サーメット工具に特徴を有するものである。
This invention was made based on the above research results, and on the surface of the tool base,
(A) It consists of one or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer, and carbonitride layer, and has an overall average layer thickness of 3 to 20 μm. A lower layer composed of a Ti compound layer,
(B) It has a three-layer laminated structure of a first unit layer, a second unit layer, and an intermediate layer interposed between the first unit layer and the second unit layer, and an overall average of 3.5 to 11 μm An upper layer having a layer thickness,
In the surface-coated cermet cutting tool formed by vapor-depositing the hard coating layer composed of (a) and (b) above,
The first unit layer and the second unit layer of the upper layer are composed of an α-type aluminum oxide layer having an α-type crystal structure in the state of chemical vapor deposition, and the intermediate layer includes a Ti carbide layer and a nitride. Layer, carbonitride layer, carbon dioxide layer, and carbonitride oxide layer are composed of one or two or more Ti compound layers, and the first unit layer and the second unit layer are each 1.5. Irradiate an electron beam to each crystal grain having a hexagonal crystal lattice having an average layer thickness of ˜5 μm and further having a field emission scanning electron microscope within a measurement range of a polished surface parallel to the tool substrate surface. Then, an inclination angle formed by a normal line of the (0001) plane which is a crystal plane of the crystal grain is measured with respect to a normal line of the polished surface, and the first unit layer is measured out of the measured inclination angles. 0 to 45 degrees, and the second unit layer is within a range of 45 to 90 degrees. If while dividing the measured angle of inclination for each pitch of 0.25 degrees, revealed in inclination angle frequency distribution graph obtained by aggregating the frequencies present in each segment,
(A) In the first unit layer, the highest peak exists in the inclination angle section in the range of 0 to 10 degrees, and the total of the frequencies existing in the range of 0 to 10 degrees is an inclination angle number distribution graph. The inclination angle frequency distribution graph which occupies the ratio of 45-65% of the whole frequency in is shown,
(B) In the second unit layer, the highest peak exists in the inclination angle section in the range of 75 to 85 degrees, and the total of the frequencies existing in the range of 75 to 85 degrees is an inclination angle number distribution graph. Showing an inclination angle frequency distribution graph occupying a proportion of 45 to 65% of the entire frequency in
The hard coating layer characterized by the above features a surface-coated cermet tool that exhibits excellent chipping resistance in high-speed heavy cutting.
以下に、この発明の被覆サーメット工具の硬質被覆層の構成層に関し、上記の通りに数値限定した理由を説明する。
（ａ）下部層（Ｔｉ化合物層）
Ｔｉ化合物層は、基本的には３層積層構造の上部層を構成する第１単位層、第２単位層および中間層の下部層として存在し、自身の具備するすぐれた高温強度によって硬質被覆層が高温強度を具備するようにするほか、工具基体と上部層を構成する第１単位層、第２単位層、中間層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性向上に寄与する作用を有するが、その平均層厚が３μｍ未満では、前記作用を十分に発揮させることができず、一方その平均層厚が２０μｍを越えると、特に高熱発生を伴なう高速切削では熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、その平均層厚を３〜２０μｍと定めた。
The reason why the numerical values of the constituent layers of the hard coating layer of the coated cermet tool of the present invention are limited as described above will be described below.
(A) Lower layer (Ti compound layer)
The Ti compound layer basically exists as a lower layer of the first unit layer, the second unit layer, and the intermediate layer constituting the upper layer of the three-layer laminated structure, and the hard coating layer is provided by its excellent high-temperature strength. In addition to having high-temperature strength, it firmly adheres to any of the first unit layer, the second unit layer and the intermediate layer constituting the tool base and the upper layer, so that the hard coating layer adheres to the tool base. Although it has an effect of contributing to improvement, if the average layer thickness is less than 3 μm, the above-mentioned effect cannot be sufficiently exerted, while if the average layer thickness exceeds 20 μm, particularly high-speed cutting accompanied by high heat generation. Then, it becomes easy to cause thermoplastic deformation, and this causes uneven wear. Therefore, the average layer thickness is set to 3 to 20 μm.
（ｂ）上部層（第１単位層、第２単位層および中間層）
上記の通り、第１および第２単位層のそれぞれの傾斜角度数分布グラフにおける測定傾斜角の最高ピーク位置は、いずれも化学蒸着装置における反応雰囲気圧力を変化させることによって変化するが、試験結果によれば、前記反応雰囲気圧力を、第１単位層では５〜８ｋｐａ、また第２単位層では２０〜３０ｋＰａとすると、最高ピークが、上記第１単位層では０〜１０度、上記第２単位層では７５〜８５度の範囲内の傾斜角区分に現れると共に、前記０〜１０度および７５〜８５度の範囲内に存在する度数の合計が、いずれの場合も傾斜角度数分布グラフにおける度数全体の４５〜６５％の割合を占める傾斜角度数分布グラフを示すようになるものであり、したがって、前記反応雰囲気圧力がそれぞれ前記範囲から低い方に外れても、また高い方に外れても、測定傾斜角の最高ピーク位置はそれぞれ０〜１０度および７５〜８５度の範囲から外れてしまい、このような場合には第１単位層であれば所望のすぐれた高温強度、さらに第２単位層であれば同じく高温硬さを具備することができないものである。
また、第１および第２単位層のもつそれぞれの特性、すなわち高温強度および高温硬さを上部層に十分に、かつ層厚全体に亘って均一に具備させるには、前記単位層のそれぞれの平均層厚を１．５〜５μｍにする必要がある。しかし、第１単位層と第２単位層の平均層厚をこのような数値範囲に定めた場合であっても、第１単位層と第２単位層とでは、それぞれ優勢となる結晶成長方向が相異なることから、第１単位層と第２単位層との界面（境界領域）には成長方向の乱れによる歪が発生しやすくなり、第１単位層と第２単位層との間の密着性の低下を招きかねない。そこで、第１単位層と第２単位層との間にひずみ緩和作用を有する中間層を介在させて、第１単位層と第２単位層との界面（境界領域）に生じる内部応力の発生を抑え、もって，第１単位層と第２単位層に発生する内部歪、或いは、上部層全体に発生する内部歪の低減を図る。
中間層としては、従来被覆サーメット工具において、蒸着α型Ａｌ2Ｏ3標準層との積層構造を形成する際に従来から知られていたＴｉ化合物層（Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層および炭窒酸化物層のうちの１種または２種以上からなるＴｉ化合物層）を用いることができる。これらのＴｉ化合物層からなる中間層を第１単位層と第２単位層間に介在させることにより、第１単位層と第２単位層間に発生する内部応力を抑え、第１単位層と第２単位層間の密着性を十分に確保することができ、また、上部層全体としても、内部応力、内部歪が極めて少ない、品質の高い健全な上部層を形成することができることから、所望のすぐれた高温強度と高温硬さの両者をバランス良く具備した上部層を得ることができる。
中間層の厚さとしては、第１単位層と第２単位層との間のひずみ緩和作用を発揮することができる程度の厚みが最小限必要とされ、一方、厚すぎては、上部層全体の特性として、必要とされる所望の高温強度と高温硬さの両者をバランス良く確保することができないことから、中間層の平均層厚は、０．５〜１．０μｍであることが望ましい。
また、第１単位層と第２単位層と中間層の３層積層構造からなる上部層全体の平均層厚が３．５μｍ未満では、これのもつすぐれた特性を長期に亘って十分に発揮させることができず、一方その平均層厚が１１μｍを越えて厚くなりすぎると、切刃部にチッピング（微少欠け）が発生し易くなることから、その全体平均層厚を３．５〜１１μｍと定めた。
(B) Upper layer (first unit layer, second unit layer and intermediate layer)
As described above, the highest peak position of the measured inclination angle in each of the inclination angle number distribution graphs of the first and second unit layers is changed by changing the reaction atmosphere pressure in the chemical vapor deposition apparatus. Accordingly, when the reaction atmosphere pressure is 5 to 8 kpa in the first unit layer and 20 to 30 kPa in the second unit layer, the highest peak is 0 to 10 degrees in the first unit layer and the second unit layer. In this case, it appears in the inclination angle section in the range of 75 to 85 degrees, and the total of the frequencies existing in the range of 0 to 10 degrees and 75 to 85 degrees is the total of the degrees in the inclination angle number distribution graph in any case. An inclination angle number distribution graph occupying a ratio of 45 to 65% is shown. Therefore, even if the reaction atmosphere pressure deviates from the above range, However, the maximum peak position of the measured tilt angle is out of the range of 0 to 10 degrees and 75 to 85 degrees, respectively. In such a case, the first unit layer has the desired excellent high temperature. If it is the strength and further the second unit layer, it cannot have high temperature hardness.
In addition, in order to provide the upper layer with sufficient properties of the first and second unit layers, that is, high temperature strength and high temperature hardness, and uniformly throughout the entire layer thickness, the average of each of the unit layers It is necessary to make the layer thickness 1.5 to 5 μm. However, even when the average thickness of the first unit layer and the second unit layer is set in such a numerical range, the dominant crystal growth direction is obtained in each of the first unit layer and the second unit layer. Since they are different from each other, the interface (boundary region) between the first unit layer and the second unit layer is likely to be distorted due to disorder in the growth direction, and the adhesion between the first unit layer and the second unit layer. May lead to a decline. Therefore, an internal layer having a strain relaxation action is interposed between the first unit layer and the second unit layer, thereby generating internal stress generated at the interface (boundary region) between the first unit layer and the second unit layer. Therefore, the internal strain generated in the first unit layer and the second unit layer or the internal strain generated in the entire upper layer is reduced.
As an intermediate layer, a Ti compound layer (Ti carbide layer, nitride layer, carbonitriding) conventionally known when forming a laminated structure with a vapor-deposited α-type Al 2 O 3 standard layer in a conventional coated cermet tool A Ti compound layer comprising one or more of a physical layer, a carbonate layer and a carbonitride layer can be used. By interposing an intermediate layer composed of these Ti compound layers between the first unit layer and the second unit layer, internal stress generated between the first unit layer and the second unit layer is suppressed, and the first unit layer and the second unit layer are suppressed. Adhesion between layers can be sufficiently secured, and the upper layer as a whole can form a high-quality, healthy upper layer with extremely low internal stress and internal strain. An upper layer having a good balance between strength and high-temperature hardness can be obtained.
As the thickness of the intermediate layer, a minimum thickness that can exert a strain relaxation effect between the first unit layer and the second unit layer is required. On the other hand, if the thickness is too thick, the entire upper layer is required. Since the required high-temperature strength and high-temperature hardness that are required cannot be ensured in a well-balanced manner, the average layer thickness of the intermediate layer is preferably 0.5 to 1.0 μm.
In addition, when the average layer thickness of the entire upper layer composed of the three-layer laminated structure of the first unit layer, the second unit layer, and the intermediate layer is less than 3.5 μm, the excellent characteristics of the upper layer can be sufficiently exhibited over a long period of time. On the other hand, if the average layer thickness exceeds 11 μm and becomes too thick, chipping (small chipping) is likely to occur at the cutting edge, so the overall average layer thickness is set to 3.5 to 11 μm. It was.
なお、切削工具の使用前後の識別を目的として、黄金色の色調を有するＴｉＮ層を、必要に応じて硬質被覆層の最表面層として蒸着形成してもよいが、この場合の平均層厚は０．１〜１μｍでよく、これは０．１μｍ未満では、十分な識別効果が得られず、一方前記ＴｉＮ層による前記識別効果は１μｍまでの平均層厚で十分であるという理由からである。 In addition, for the purpose of identification before and after the use of the cutting tool, a TiN layer having a golden color tone may be vapor-deposited as the outermost surface layer of the hard coating layer as necessary, but the average layer thickness in this case is It may be 0.1 to 1 μm, and if it is less than 0.1 μm, a sufficient discrimination effect cannot be obtained, while the discrimination effect by the TiN layer is sufficient for an average layer thickness of up to 1 μm.
この発明の被覆サーメット工具は、各種の鋼や鋳鉄などの切削加工を高速で、かつ高い機械的衝撃を伴なう高切り込みや高送りなどの重切削条件で行っても、硬質被覆層の上部層は、内部歪が小さく密着性にすぐれ、かつ、すぐれた高温強度と高温硬さを有することから、硬質被覆層にチッピングの発生なく、すぐれた耐摩耗性を発揮し、使用寿命の一層の延命化を可能とするものである。 The coated cermet tool of the present invention can be used to cut various types of steel and cast iron at a high speed even if the cutting process is performed at a high cutting speed and a high feed rate with a high mechanical impact. The layer has low internal strain, excellent adhesion, and excellent high-temperature strength and high-temperature hardness, so that it exhibits excellent wear resistance without occurrence of chipping in the hard coating layer, and has a long service life. Life extension is possible.
つぎに、この発明の被覆サーメット工具を実施例により具体的に説明する。 Next, the coated cermet tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＺｒＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3Ｃ2粉末、ＴｉＮ粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、切刃部にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ・ＣＮＭＧ１２０４０８に規定するスローアウエイチップ形状をもったＷＣ基超硬合金製の工具基体Ａ〜Ｆをそれぞれ製造した。 As raw material powders, WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, and Co powder each having an average particle diameter of 1 to 3 μm are prepared. The raw material powder is blended in the blending composition shown in Table 1, added with wax, ball mill mixed in acetone for 24 hours, dried under reduced pressure, and press-molded into a green compact of a predetermined shape at a pressure of 98 MPa. The green compact is vacuum-sintered in a vacuum of 5 Pa at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour. After sintering, the cutting edge is subjected to a honing process of R: 0.07 mm. Thus, tool bases A to F made of a WC-based cemented carbide having a throwaway tip shape specified in ISO · CNMG120408 were manufactured.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（質量比でＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、９８ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を１．３ｋＰａの窒素雰囲気中、温度：１５４０℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ規格・ＣＮＭＧ１２０４１２のチップ形状をもったＴｉＣＮ基サーメット製の工具基体ａ〜ｆを形成した。 In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after the sintering, the cutting edge portion was subjected to a honing process of R: 0.07 mm. Tool bases a to f made of TiCN-based cermet having a standard / CNMG12041 chip shape were formed.
ついで、これらの工具基体Ａ〜Ｆおよび工具基体ａ〜ｆのそれぞれを、通常の化学蒸着装置に装入し、
（ａ）まず、表３（表３中のｌ−ＴｉＣＮは特開平６−８０１０号公報に記載される縦長成長結晶組織をもつＴｉＣＮ層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである）に示される条件にて、表４，５に示される目標層厚のＴｉ化合物層を硬質被覆層の下部層として蒸着形成し、
（ｂ）ついで、反応ガス組成：容量％で、ＡｌＣｌ3：７．４％、ＣＯ2：０．３％、ＨＣｌ：２．５％、Ｈ2Ｓ：０．７％、Ａｒ：３０％、Ｈ2：残り、
反応雰囲気温度：１０２０ ℃、
反応雰囲気圧力：５〜８ｋＰａの範囲内の所定の圧力、
の反応ガス組成調整条件で第１単位層、
（ｃ）さらに、反応ガス組成：容量％で、ＡｌＣｌ3：２．２％、ＣＯ2：５％、ＨＣｌ：２％、Ｈ2Ｓ：０．１５％、Ｈ2：残り、
反応雰囲気温度：８５０℃、
反応雰囲気圧力：２０〜３０ｋＰａの範囲内の所定の圧力、
の低温高圧条件で第２単位層、
をそれぞれ表４，５に示される目標層厚で上部層を蒸着形成し、
（ｄ）また、表３に示される条件にて、表４、５に示される目標層厚で、中間層であるＴｉ化合物層を蒸着形成し、
本発明被覆サーメット工具１〜１３をそれぞれ製造した。
Then, each of these tool bases A to F and tool bases a to f is charged into a normal chemical vapor deposition apparatus,
(A) First, Table 3 (l-TiCN in Table 3 indicates the conditions for forming a TiCN layer having a vertically elongated crystal structure described in JP-A-6-8010, and the other conditions are ordinary granularity. Under the conditions shown in Table 4 and 5), the Ti compound layer having the target layer thickness shown in Tables 4 and 5 is deposited as the lower layer of the hard coating layer.
(B) Next, the reaction gas composition: volume%, AlCl 3 : 7.4%, CO 2 : 0.3%, HCl: 2.5%, H 2 S: 0.7%, Ar: 30%, H 2 : Remaining
Reaction atmosphere temperature: 1020 ° C.
Reaction atmosphere pressure: a predetermined pressure within a range of 5 to 8 kPa,
The first unit layer under the reaction gas composition adjustment conditions of
(C) Furthermore, the reaction gas composition: volume%, AlCl 3 : 2.2%, CO 2 : 5%, HCl: 2%, H 2 S: 0.15%, H 2 : the rest,
Reaction atmosphere temperature: 850 ° C.
Reaction atmosphere pressure: a predetermined pressure in the range of 20-30 kPa,
The second unit layer under low temperature and high pressure conditions of
The upper layer is vapor-deposited with the target layer thickness shown in Tables 4 and 5, respectively.
(D) Further, under the conditions shown in Table 3, a Ti compound layer as an intermediate layer is formed by vapor deposition at the target layer thicknesses shown in Tables 4 and 5.
The present coated cermet tools 1 to 13 were produced, respectively.
また、比較の目的で、硬質被覆層の上部層を構成する蒸着α型Ａｌ2Ｏ3層の形成を、
反応ガス組成：容量％で、ＡｌＣｌ3：２．２％、ＣＯ2：５％、ＨＣｌ：２％、Ｈ2Ｓ：０．１５％、Ｈ2：残り、
反応雰囲気温度：１０２０℃、
反応雰囲気圧力：６〜１３ｋＰａの範囲内の所定の圧力、
の通常条件で、表６，７に示される通りの目標層厚で形成する以外は、上記の本発明被覆サーメット工具１〜１３と同一の条件で従来被覆サーメット工具１〜１３をそれぞれ製造した。
For the purpose of comparison, the formation of a vapor-deposited α-type Al 2 O 3 layer that constitutes the upper layer of the hard coating layer,
Reaction gas composition: volume%, AlCl 3 : 2.2%, CO 2 : 5%, HCl: 2%, H 2 S: 0.15%, H 2 : remaining,
Reaction atmosphere temperature: 1020 ° C.
Reaction atmosphere pressure: a predetermined pressure in the range of 6 to 13 kPa,
The conventional coated cermet tools 1 to 13 were produced under the same conditions as those of the present invention coated cermet tools 1 to 13 except that the target layer thicknesses shown in Tables 6 and 7 were used.
ついで、上記の本発明被覆サーメット工具１〜１３の硬質被覆層の上部層を構成する第１および第２単位層と、従来被覆サーメット工具１〜１３の上部層を構成する蒸着α型Ａｌ2Ｏ3層について、電界放出型走査電子顕微鏡を用いて、傾斜角度数分布グラフをそれぞれ作成した。
すなわち、上記傾斜角度数分布グラフは、上記の本発明被覆サーメット工具１〜１３の上部層の第１単位層および第２単位層については、工具基体表面と平行な面をそれぞれ研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、それぞれの前記研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に照射して、電子後方散乱回折像装置を用い、３０×５０μｍの領域を０．１μｍ／ｓｔｅｐの間隔で、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、上記第１単位層については０〜４５度、上記第２単位層については４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。
また、従来被覆サーメット工具１〜１３の蒸着α型Ａｌ2Ｏ3層についても、工具基体表面と平行な任意研磨面を同一の条件で観察し、同一の条件で傾斜角度数分布グラフを作成した。
Next, the first and second unit layers constituting the upper layer of the hard coating layer of the above-described coated cermet tool 1-13 of the present invention, and the vapor deposition α-type Al 2 O constituting the upper layer of the conventional coated cermet tool 1-13. A tilt angle number distribution graph was created for each of the three layers using a field emission scanning electron microscope.
That is, the inclination angle number distribution graph is a state in which the first unit layer and the second unit layer of the upper layer of the above-described coated cermet tools 1 to 13 of the present invention have a surface parallel to the tool base surface as a polished surface. Then, it is set in a lens barrel of a field emission scanning electron microscope, and an electron beam with an acceleration voltage of 15 kV at an incident angle of 70 degrees is applied to the polished surface within the measurement range of each polished surface with an irradiation current of 1 nA. By irradiating each crystal grain having an existing hexagonal crystal lattice and using an electron backscatter diffraction image apparatus, a region of 30 × 50 μm is spaced at a spacing of 0.1 μm / step with respect to the normal line of the polished surface. The inclination angle formed by the normal line of the (0001) plane, which is the crystal plane of the crystal grain, is measured. Based on the measurement result, of the measurement inclination angle, the first unit layer is 0 to 45 degrees, 45 for the second unit layer Measuring the inclination angle is in the range of 90 degrees as well as classified for each pitch of 0.25 degrees, was created by aggregating the frequencies present in each segment.
As for the conventional coated cermet tools 1 to 13 deposited α-type the Al 2 O 3 layer of, by observing the tool substrate parallel to the surface optionally polished surface under the same conditions to prepare a tilt angle frequency distribution graph in the same conditions .
この結果得られた各種の蒸着α型Ａｌ2Ｏ3層の傾斜角度数分布グラフにおいて、表４〜７にそれぞれ示される通り、本発明被覆サーメット工具１〜１３の上部層を構成する第１および第２単位層は、いずれも（０００１）面の測定傾斜角の分布が、前記第１単位層では０〜１０度、前記記第２単位層では７５〜８５度の範囲内の傾斜角区分に最高ピークが現れる傾斜角度数分布グラフを示した。これに対して、従来被覆サーメット工具１〜１３の蒸着α型Ａｌ2Ｏ3層は、（０００１）面の測定傾斜角の分布が０〜９０度のいずれの範囲内でも不偏的で、最高ピークが存在しない傾斜角度数分布グラフを示すものであった。
また表４〜７には、上記の各種の蒸着α型Ａｌ2Ｏ3層の傾斜角度数分布グラフにおいて、それぞれ０〜１０度および７５〜８５度の範囲内の傾斜角区分に存在する全傾斜角度数の傾斜角度数分布グラフ全体に占める割合を示した。
なお、図３は、本発明被覆サーメット工具１の上部層を構成する第１単位層の傾斜角度数分布グラフ、図４は同第２単位層の傾斜角度数分布グラフ、図５，６は従来被覆サーメット工具１の上部層を構成する蒸着α型Ａｌ2Ｏ3層のそれぞれ０〜４５度および４５〜９０度の傾斜角区分を示す傾斜角度数分布グラフである。
In the inclination angle number distribution graphs of the various deposited α-type Al 2 O 3 layers obtained as a result, as shown in Tables 4 to 7, the first and the first layers constituting the upper layers of the coated cermet tools 1 to 13 of the present invention are shown. Each of the second unit layers has a distribution of measured inclination angles on the (0001) plane within the range of 0 to 10 degrees in the first unit layer and 75 to 85 degrees in the second unit layer. An inclination angle distribution graph in which the highest peak appears is shown. On the other hand, the deposited α-type Al 2 O 3 layer of the conventional coated cermet tools 1 to 13 is unbiased even if the distribution of the measured inclination angle of the (0001) plane is in the range of 0 to 90 degrees, and the highest peak It was a graph showing the distribution of the number of tilt angles in which there is no.
Tables 4 to 7 show the total inclinations existing in the inclination angle sections in the range of 0 to 10 degrees and 75 to 85 degrees in the inclination angle number distribution graphs of the various deposited α-type Al 2 O 3 layers. The ratio of the number of angles to the entire gradient number distribution graph is shown.
3 is an inclination angle number distribution graph of the first unit layer constituting the upper layer of the coated cermet tool 1 of the present invention, FIG. 4 is an inclination angle number distribution graph of the second unit layer, and FIGS. the inclination angle frequency distribution graph, respectively showing the inclination angle segment of 0 to 45 degrees and 45-90 degrees coated cermet constituting the upper layer of the tool 1 deposited α-type the Al 2 O 3 layer.
また、この結果得られた本発明被覆サーメット工具１〜１３および従来被覆サーメット工具１〜１３の硬質被覆層の構成層の厚さを、走査型電子顕微鏡を用いて測定（縦断面測定）したところ、いずれも目標層厚と実質的に同じ平均層厚（５点測定の平均値）を示した。 Moreover, when the thickness of the constituent layer of the hard coating layer of the present invention coated cermet tools 1 to 13 and the conventional coated cermet tools 1 to 13 obtained as a result was measured using a scanning electron microscope (longitudinal section measurement) , Each showed an average layer thickness (average value of 5-point measurement) substantially the same as the target layer thickness.
つぎに、上記の本発明被覆サーメット工具１〜１３および従来被覆サーメット工具１〜１３各種の被覆サーメット工具について、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材： ＪＩＳ−Ｓ５０Ｃ 、
切削速度：３５０ ｍ／ｍｉｎ．、
切り込み：２．０ ｍｍ、
送り： ０．４ ｍｍ／ｒｅｖ．、
切削時間： ７ 分、
の条件（切削条件Ａという）での炭素鋼の乾式連続高速高送り切削試験（通常の切削速度および送りは２００ｍ／ｍｉｎ．および０．２ｍｍ／ｒｅｖ．）、
被削材： ＪＩＳ−ＳＣＭ４４０ 、
切削速度：４００ ｍ／ｍｉｎ．、
切り込み：４．０ ｍｍ、
送り： ０．３ ｍｍ／ｒｅｖ．、
切削時間： ８ 分、
の条件（切削条件Ｂという）での合金鋼の乾式断続高速高切り込み切削試験（通常の切削速度および切り込みは２００ｍ／ｍｉｎ．および１．５ｍｍ）、さらに、
被削材： ＪＩＳ−ＦＣ３００ 、
切削速度：５００ ｍ／ｍｉｎ．、
切り込み：４．５ ｍｍ、
送り： ０．３ ｍｍ／ｒｅｖ．、
切削時間： ７ 分、
の条件（切削条件Ｃという）での鋳鉄の乾式連続高速高切り込み切削試験（通常の切削速度および切り込みは２５０ｍ／ｍｉｎ．および１．５ｍｍ）を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表８に示した。
Next, for the various coated cermet tools of the present invention coated cermet tool 1-13 and the conventional coated cermet tool 1-13, all of them are screwed with a fixing jig to the tip of the tool steel tool,
Work material: JIS-S50C
Cutting speed: 350 m / min. ,
Cutting depth: 2.0 mm,
Feed: 0.4 mm / rev. ,
Cutting time: 7 minutes,
Dry continuous high-speed high-feed cutting test of carbon steel under the following conditions (referred to as cutting condition A) (normal cutting speed and feed are 200 m / min. And 0.2 mm / rev.),
Work material: JIS-SCM440,
Cutting speed: 400 m / min. ,
Incision: 4.0 mm,
Feed: 0.3 mm / rev. ,
Cutting time: 8 minutes,
In a dry interrupted high-speed high-cutting test of the alloy steel under the conditions (cutting condition B) (normal cutting speed and cutting is 200 m / min. And 1.5 mm),
Work material: JIS-FC300
Cutting speed: 500 m / min. ,
Cutting depth: 4.5 mm,
Feed: 0.3 mm / rev. ,
Cutting time: 7 minutes,
The dry continuous high-speed, high-cut cutting test (normal cutting speed and cutting is 250 m / min. And 1.5 mm) of cast iron under the above conditions (referred to as cutting condition C). The width was measured. The measurement results are shown in Table 8.
表４〜８に示される結果から、本発明被覆サーメット工具１〜１３は、いずれも硬質被覆層の上部層が第１単位層、第２単位層および中間層の３層積層構造を有し、かつ前記第１および第２単位層のそれぞれが、（０００１）面の傾斜角度数分布グラフで前記第１単位層では０〜１０度、前記第２単位層では７５〜８５度の範囲内の傾斜角区分で最高ピークを示し、また、第１単位層と第２単位層間には中間層が介在し積層構造の上部層の密着性を確保しているので、上部層の内部応力、内部歪が極めて小さく密着性にもすぐれ、品質の良好な健全な上部層を形成することができ、かつ、該上部層はすぐれた高温強度と高温硬さを具備するようになることから、鋼や鋳鉄の切削加工を、高速で、かつ高い機械的衝撃を伴なう高速重切削条件で行っても、チッピングの発生なく、すぐれた耐摩耗性を示す。一方、硬質被覆層の上部層全体が、（０００１）面の測定傾斜角の分布が０〜４５度および４５〜９０度の範囲内で不偏的で、最高ピークが存在しない傾斜角度数分布グラフを示す蒸着α型Ａｌ2Ｏ3層で構成された従来被覆サーメット工具１〜１３においては、いずれも前記蒸着α型Ａｌ2Ｏ3層の高温強度および高温硬さ不足が原因で、高速重切削条件では硬質被覆層にチッピングが発生し、比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 4 to 8, each of the coated cermet tools 1 to 13 of the present invention has a three-layer laminated structure in which the upper layer of the hard coating layer is a first unit layer, a second unit layer, and an intermediate layer, Each of the first and second unit layers has an inclination angle number distribution graph of (0001) plane within the range of 0 to 10 degrees for the first unit layer and 75 to 85 degrees for the second unit layer. It shows the highest peak in the corner section, and an intermediate layer is interposed between the first unit layer and the second unit layer to ensure the adhesion of the upper layer of the laminated structure. Since it is extremely small and has excellent adhesion, it can form a sound upper layer with good quality, and the upper layer has excellent high-temperature strength and high-temperature hardness. Cutting at high speed and heavy cutting conditions with high mechanical impact at high speed What is also no occurrence of chipping, it exhibits excellent wear resistance. On the other hand, the entire upper layer of the hard coating layer has an inclination angle number distribution graph in which the distribution of measured inclination angles on the (0001) plane is unbiased within the range of 0 to 45 degrees and 45 to 90 degrees, and the highest peak does not exist. In the conventional coated cermet tools 1 to 13 composed of the vapor-deposited α-type Al 2 O 3 layer shown, all of the high-speed heavy cutting conditions were caused by the lack of high-temperature strength and high-temperature hardness of the vapor-deposited α-type Al 2 O 3 layer. Then, it is clear that chipping occurs in the hard coating layer and the service life is reached in a relatively short time.
上述のように、この発明の被覆サーメット工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、特に高速重切削加工でも硬質被覆層にチッピングの発生なく、すぐれた耐摩耗性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated cermet tool of the present invention is excellent in that there is no chipping in the hard coating layer even in continuous cutting and intermittent cutting under normal conditions such as various steels and cast iron, especially in high-speed heavy cutting. High wear resistance and excellent cutting performance over a long period of time can be fully satisfied with the high performance of cutting equipment, labor saving and energy saving of cutting, and cost reduction It is.
Claims (1)
（ａ）Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層からなる下部層、
（ｂ）第１単位層と、第２単位層と、第１単位層と第２単位層との間に介在する中間層との３層積層構造からなり、かつ３．５〜１１μｍの全体平均層厚を有する上部層、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる表面被覆サーメット製切削工具において、
上記上部層の第１単位層と第２単位層は、化学蒸着した状態でα型の結晶構造を有するα型酸化アルミニウム層から構成され、また、上記中間層は、Ｔｉの炭化物層、窒化物層、炭窒化物層、炭酸化物層および炭窒酸化物層のうちの１種または２種以上からなるＴｉ化合物層から構成され、第１単位層と第２単位層は、それぞれ、１．５〜５μｍの平均層厚を有し、さらに電界放出型走査電子顕微鏡を用い、上記工具基体表面と平行な研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、上記第１単位層については０〜４５度、上記第２単位層については４５〜９０度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで現した場合、
（Ａ）上記第１単位層は、０〜１０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記０〜１０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜６５％の割合を占める傾斜角度数分布グラフを示し、
（Ｂ）上記第２単位層は、７５〜８５度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記７５〜８５度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の４５〜６５％の割合を占める傾斜角度数分布グラフを示すこと、
を特徴とする硬質被覆層が高速重切削ですぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具。 On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) It consists of one or more of Ti carbide layer, nitride layer, carbonitride layer, carbonate layer, and carbonitride layer, and has an overall average layer thickness of 3 to 20 μm. A lower layer composed of a Ti compound layer,
(B) It has a three-layer laminated structure of a first unit layer, a second unit layer, and an intermediate layer interposed between the first unit layer and the second unit layer, and an overall average of 3.5 to 11 μm An upper layer having a layer thickness,
In the surface-coated cermet cutting tool formed by vapor-depositing the hard coating layer composed of (a) and (b) above,
The first unit layer and the second unit layer of the upper layer are composed of an α-type aluminum oxide layer having an α-type crystal structure in the state of chemical vapor deposition, and the intermediate layer includes a Ti carbide layer and a nitride. Layer, carbonitride layer, carbon dioxide layer, and carbonitride oxide layer are composed of one or two or more Ti compound layers, and the first unit layer and the second unit layer are each 1.5. Irradiate an electron beam to each crystal grain having a hexagonal crystal lattice having an average layer thickness of ˜5 μm and further having a field emission scanning electron microscope within a measurement range of a polished surface parallel to the tool substrate surface. Then, an inclination angle formed by a normal line of the (0001) plane which is a crystal plane of the crystal grain is measured with respect to a normal line of the polished surface, and the first unit layer is measured out of the measured inclination angles. 0 to 45 degrees, and the second unit layer is within a range of 45 to 90 degrees. If with dividing the measured tilt angle for each pitch of 0.25 degrees, revealed in inclination angle frequency distribution graph obtained by aggregating the frequencies present in each segment,
(A) In the first unit layer, the highest peak exists in the inclination angle section in the range of 0 to 10 degrees, and the total of the frequencies existing in the range of 0 to 10 degrees is an inclination angle number distribution graph. The inclination angle frequency distribution graph which occupies the ratio of 45-65% of the whole frequency in is shown,
(B) In the second unit layer, the highest peak exists in the inclination angle section in the range of 75 to 85 degrees, and the total of the frequencies existing in the range of 75 to 85 degrees is an inclination angle number distribution graph. Showing an inclination angle frequency distribution graph occupying a proportion of 45 to 65% of the entire frequency in
A surface-coated cermet cutting tool that features a hard coating layer that exhibits excellent chipping resistance in high-speed heavy cutting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005165367A JP2006334755A (en) | 2005-06-06 | 2005-06-06 | Surface coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in high-speed and deep cutting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005165367A JP2006334755A (en) | 2005-06-06 | 2005-06-06 | Surface coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in high-speed and deep cutting |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2006334755A true JP2006334755A (en) | 2006-12-14 |
Family
ID=37555721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005165367A Withdrawn JP2006334755A (en) | 2005-06-06 | 2005-06-06 | Surface coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in high-speed and deep cutting |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2006334755A (en) |
-
2005
- 2005-06-06 JP JP2005165367A patent/JP2006334755A/en not_active Withdrawn
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4747324B2 (en) | Surface coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in high speed heavy cutting | |
| JP2006198735A (en) | Cutting tool made of surface coated cermet with hard coating layer exhibiting excellent chipping resistance in high-speed intermittent cutting | |
| JP4512989B2 (en) | Surface coated cermet cutting tool with excellent chipping resistance with hard coating layer | |
| JP5286891B2 (en) | Surface coated cutting tool whose hard coating layer exhibits excellent chipping resistance and wear resistance in high speed heavy cutting | |
| JP2009006426A (en) | Surface coated cutting tool with hard coating layer exerting superior wear resistance in high speed cutting | |
| JP4747388B2 (en) | Surface-coated cermet cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed cutting of difficult-to-cut materials | |
| JP4720418B2 (en) | Surface-coated cermet cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed cutting of difficult-to-cut materials | |
| JP2006043853A (en) | Surface coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in high-speed and multiple cutting | |
| JP2006198740A (en) | Cutting tool made of surface coated cermet with hard coating layer exhibiting excellent chipping resistance in high-speed intermittent cutting | |
| JP2006334754A (en) | Surface coated cermet cutting tool with hard coated layer exhibiting excellent chipping resistance in high speed deep cutting | |
| JP4811787B2 (en) | Surface-coated cermet cutting tool with excellent grain interface strength in modified κ-type aluminum oxide layer of hard coating layer | |
| JP2006315154A (en) | SURFACE COATED CERMET CUTTING TOOL IN WHICH THICK FILM alpha-TYPE ALUMINUM OXIDE LAYER EXHIBITS EXCELLENT CHIPPING RESISTANCE | |
| JP2006334758A (en) | Surface coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in high-speed and deep cutting | |
| JP4474644B2 (en) | Surface-coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in high-speed intermittent cutting | |
| JP2006116621A (en) | Surface-coated cermet cutting tool with hard coating layer exerting excellent chipping resistance in high-speed intermittent cutting | |
| JP2006334757A (en) | Surface coated cermet cutting tool whose hard coating layer exhibits excellent wear resistance in high-speed cutting | |
| JP2005238437A (en) | Surface-coated cermet cutting tool having hard coating layer exhibiting superior abrasion resistance in high speed cutting | |
| JP2005279917A (en) | Surface coated cermet-made cutting tool having hard coating layer exhibiting excellent chipping resistance | |
| JP2006334759A (en) | Surface coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in high-speed and deep cutting | |
| JP5892335B2 (en) | Surface coated cutting tool with excellent chipping resistance with hard coating layer | |
| JP4747338B2 (en) | Surface-coated cermet cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed cutting of difficult-to-cut materials | |
| JP4529578B2 (en) | Surface coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in high speed heavy cutting | |
| JP2007160464A (en) | Surface coated cermet cutting tool having hard coating layer exhibiting excellent chipping resistance in high-speed intermittent cutting | |
| JP4747386B2 (en) | Surface coated cermet cutting tool whose hard coating layer exhibits excellent wear resistance in high speed cutting | |
| JP2006334755A (en) | Surface coated cermet cutting tool whose hard coating layer exhibits excellent chipping resistance in high-speed and deep cutting |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20080902 |