JP2006329791A5 - - Google Patents
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- JP2006329791A5 JP2006329791A5 JP2005153144A JP2005153144A JP2006329791A5 JP 2006329791 A5 JP2006329791 A5 JP 2006329791A5 JP 2005153144 A JP2005153144 A JP 2005153144A JP 2005153144 A JP2005153144 A JP 2005153144A JP 2006329791 A5 JP2006329791 A5 JP 2006329791A5
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- JP
- Japan
- Prior art keywords
- shape
- shape data
- coordinate conversion
- evaluation value
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- 238000011156 evaluation Methods 0.000 claims 21
- 238000006243 chemical reaction Methods 0.000 claims 14
- 230000003287 optical effect Effects 0.000 claims 12
- 238000005259 measurement Methods 0.000 claims 9
- 230000029777 axis specification Effects 0.000 claims 2
- 230000009466 transformation Effects 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005153144A JP2006329791A (ja) | 2005-05-25 | 2005-05-25 | 形状評価方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005153144A JP2006329791A (ja) | 2005-05-25 | 2005-05-25 | 形状評価方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006329791A JP2006329791A (ja) | 2006-12-07 |
| JP2006329791A5 true JP2006329791A5 (zh) | 2008-07-03 |
Family
ID=37551630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005153144A Withdrawn JP2006329791A (ja) | 2005-05-25 | 2005-05-25 | 形状評価方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2006329791A (zh) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5211656B2 (ja) * | 2007-11-28 | 2013-06-12 | 株式会社島津製作所 | トロイダル面評価方法 |
| JP5281918B2 (ja) * | 2009-02-19 | 2013-09-04 | オリンパス株式会社 | 面形状測定機、面形状測定方法、及び面形状の測定値の解析方法 |
-
2005
- 2005-05-25 JP JP2005153144A patent/JP2006329791A/ja not_active Withdrawn
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