JP2006329791A - 形状評価方法 - Google Patents

形状評価方法 Download PDF

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Publication number
JP2006329791A
JP2006329791A JP2005153144A JP2005153144A JP2006329791A JP 2006329791 A JP2006329791 A JP 2006329791A JP 2005153144 A JP2005153144 A JP 2005153144A JP 2005153144 A JP2005153144 A JP 2005153144A JP 2006329791 A JP2006329791 A JP 2006329791A
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Japan
Prior art keywords
shape
coordinate
evaluation
coordinate conversion
shape data
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JP2005153144A
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Japanese (ja)
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JP2006329791A5 (enExample
Inventor
Sunao Ito
直 伊藤
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Olympus Corp
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Olympus Corp
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Priority to JP2005153144A priority Critical patent/JP2006329791A/ja
Publication of JP2006329791A publication Critical patent/JP2006329791A/ja
Publication of JP2006329791A5 publication Critical patent/JP2006329791A5/ja
Withdrawn legal-status Critical Current

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JP2005153144A 2005-05-25 2005-05-25 形状評価方法 Withdrawn JP2006329791A (ja)

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JP2005153144A JP2006329791A (ja) 2005-05-25 2005-05-25 形状評価方法

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JP2005153144A JP2006329791A (ja) 2005-05-25 2005-05-25 形状評価方法

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JP2006329791A true JP2006329791A (ja) 2006-12-07
JP2006329791A5 JP2006329791A5 (enExample) 2008-07-03

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JP2005153144A Withdrawn JP2006329791A (ja) 2005-05-25 2005-05-25 形状評価方法

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009128340A (ja) * 2007-11-28 2009-06-11 Shimadzu Corp トロイダル面評価方法
JP2010190790A (ja) * 2009-02-19 2010-09-02 Olympus Corp 面形状測定機、面形状測定方法、及び面形状の測定値の解析方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009128340A (ja) * 2007-11-28 2009-06-11 Shimadzu Corp トロイダル面評価方法
JP2010190790A (ja) * 2009-02-19 2010-09-02 Olympus Corp 面形状測定機、面形状測定方法、及び面形状の測定値の解析方法

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