JP2006326910A5 - - Google Patents
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- Publication number
- JP2006326910A5 JP2006326910A5 JP2005150860A JP2005150860A JP2006326910A5 JP 2006326910 A5 JP2006326910 A5 JP 2006326910A5 JP 2005150860 A JP2005150860 A JP 2005150860A JP 2005150860 A JP2005150860 A JP 2005150860A JP 2006326910 A5 JP2006326910 A5 JP 2006326910A5
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- substrate
- channel
- liquid
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 6
- 238000004519 manufacturing process Methods 0.000 claims 3
- 238000001312 dry etching Methods 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
- 238000001039 wet etching Methods 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005150860A JP4693496B2 (ja) | 2005-05-24 | 2005-05-24 | 液体吐出ヘッドおよびその製造方法 |
| US11/435,441 US7575303B2 (en) | 2005-05-24 | 2006-05-17 | Liquid-ejection head and method for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005150860A JP4693496B2 (ja) | 2005-05-24 | 2005-05-24 | 液体吐出ヘッドおよびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006326910A JP2006326910A (ja) | 2006-12-07 |
| JP2006326910A5 true JP2006326910A5 (enExample) | 2008-12-18 |
| JP4693496B2 JP4693496B2 (ja) | 2011-06-01 |
Family
ID=37462070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005150860A Expired - Fee Related JP4693496B2 (ja) | 2005-05-24 | 2005-05-24 | 液体吐出ヘッドおよびその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7575303B2 (enExample) |
| JP (1) | JP4693496B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4241605B2 (ja) * | 2004-12-21 | 2009-03-18 | ソニー株式会社 | 液体吐出ヘッドの製造方法 |
| KR20080060003A (ko) * | 2006-12-26 | 2008-07-01 | 삼성전자주식회사 | 잉크젯 프린트 헤드의 제조방법 |
| US7855151B2 (en) | 2007-08-21 | 2010-12-21 | Hewlett-Packard Development Company, L.P. | Formation of a slot in a silicon substrate |
| US8409454B2 (en) * | 2009-04-01 | 2013-04-02 | Canon Kabushiki Kaisha | Production process for structure and production process for liquid discharge head |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69110958T2 (de) * | 1990-04-27 | 1995-11-30 | Canon Kk | Aufzeichnungsverfahren und Vorrichtung. |
| US5387314A (en) * | 1993-01-25 | 1995-02-07 | Hewlett-Packard Company | Fabrication of ink fill slots in thermal ink-jet printheads utilizing chemical micromachining |
| JP3143307B2 (ja) * | 1993-02-03 | 2001-03-07 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
| US6336714B1 (en) * | 1996-02-07 | 2002-01-08 | Hewlett-Packard Company | Fully integrated thermal inkjet printhead having thin film layer shelf |
| JP3652022B2 (ja) | 1996-07-23 | 2005-05-25 | キヤノン株式会社 | インクジェット記録ヘッド及びインクジェット記録ヘッドの製造方法 |
| JPH1095119A (ja) * | 1996-09-25 | 1998-04-14 | Canon Inc | 液体吐出ヘッドおよびその製造方法 |
| US6481832B2 (en) * | 2001-01-29 | 2002-11-19 | Hewlett-Packard Company | Fluid-jet ejection device |
| US6749289B2 (en) * | 2001-03-22 | 2004-06-15 | Fuji Photo Film Co., Ltd. | Liquid ejection apparatus and inkjet printer, and method of manufacturing them |
| US6910758B2 (en) * | 2003-07-15 | 2005-06-28 | Hewlett-Packard Development Company, L.P. | Substrate and method of forming substrate for fluid ejection device |
| US7326356B2 (en) * | 2004-08-31 | 2008-02-05 | Hewlett-Packard Development Company, L.P. | Substrate and method of forming substrate for fluid ejection device |
| JP2006126116A (ja) * | 2004-11-01 | 2006-05-18 | Canon Inc | フィルター用基板の製造方法、インクジェット記録ヘッドおよびその製造方法 |
| JP2006130868A (ja) * | 2004-11-09 | 2006-05-25 | Canon Inc | インクジェット記録ヘッド及びその製造方法 |
-
2005
- 2005-05-24 JP JP2005150860A patent/JP4693496B2/ja not_active Expired - Fee Related
-
2006
- 2006-05-17 US US11/435,441 patent/US7575303B2/en not_active Expired - Fee Related
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