JP2006324692A5 - - Google Patents

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Publication number
JP2006324692A5
JP2006324692A5 JP2006218563A JP2006218563A JP2006324692A5 JP 2006324692 A5 JP2006324692 A5 JP 2006324692A5 JP 2006218563 A JP2006218563 A JP 2006218563A JP 2006218563 A JP2006218563 A JP 2006218563A JP 2006324692 A5 JP2006324692 A5 JP 2006324692A5
Authority
JP
Japan
Prior art keywords
substrate
rim
chuck body
air
peripheral side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006218563A
Other languages
English (en)
Japanese (ja)
Other versions
JP4643520B2 (ja
JP2006324692A (ja
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Publication date
Application filed filed Critical
Priority to JP2006218563A priority Critical patent/JP4643520B2/ja
Priority claimed from JP2006218563A external-priority patent/JP4643520B2/ja
Publication of JP2006324692A publication Critical patent/JP2006324692A/ja
Publication of JP2006324692A5 publication Critical patent/JP2006324692A5/ja
Application granted granted Critical
Publication of JP4643520B2 publication Critical patent/JP4643520B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2006218563A 2006-08-10 2006-08-10 検査方法および検査装置 Expired - Lifetime JP4643520B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006218563A JP4643520B2 (ja) 2006-08-10 2006-08-10 検査方法および検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006218563A JP4643520B2 (ja) 2006-08-10 2006-08-10 検査方法および検査装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2000080695A Division JP3936828B2 (ja) 2000-03-22 2000-03-22 基板搭載装置

Publications (3)

Publication Number Publication Date
JP2006324692A JP2006324692A (ja) 2006-11-30
JP2006324692A5 true JP2006324692A5 (https=) 2007-04-12
JP4643520B2 JP4643520B2 (ja) 2011-03-02

Family

ID=37544079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006218563A Expired - Lifetime JP4643520B2 (ja) 2006-08-10 2006-08-10 検査方法および検査装置

Country Status (1)

Country Link
JP (1) JP4643520B2 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5414602B2 (ja) 2010-03-31 2014-02-12 株式会社日立ハイテクノロジーズ 検査装置
CN109461691A (zh) * 2017-09-06 2019-03-12 富士迈半导体精密工业（上海）有限公司 晶圆支撑装置
JP7331139B2 (ja) * 2019-12-24 2023-08-22 株式会社日立ハイテク 基板検査装置
CN112105166B (zh) * 2020-09-02 2024-03-29 深圳市鑫达辉软性电路科技有限公司 一种fpc翘曲修复装置
WO2023037424A1 (ja) * 2021-09-08 2023-03-16 株式会社日立ハイテク ウェハ検査装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2891894B2 (ja) * 1995-03-30 1999-05-17 大陽東洋酸素株式会社 基板回転装置
JPH11111819A (ja) * 1997-09-30 1999-04-23 Asahi Kasei Micro Syst Co Ltd ウェハーの固定方法及び露光装置

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