JP2006314898A - Cleaning device, drying device, and cleaning and drying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cleaning device which is suitable for efficiently cleaning up a box-type transfer container. <P>SOLUTION: The cleaning device for cleaning a transfer container comprises a nearly rectangular bottom part and a side part which is formed around the bottom part and prevents a transferred substance from falling. The device is equipped with the following: a first liquid injection means 3 which has two or more injection ports 2 injecting a cleaning solution and pure water into the bottom part of a transfer container; a second liquid injection means 5 which has two or more injection ports 4 injecting the cleaning solution and pure water into the side part of the transfer container and of which the injection ports are formed by aligning them in a shape almost similar to the vertical section shape of the side parts of the transfer container; and a height control means which moves the first and second liquid injection means vertically so as to keep a given distance from the cleaned surface of the transfer container. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a cleaning container, a drying apparatus, and a cleaning / drying apparatus suitable for cleaning a box-shaped transport container having an open top, particularly a transport container having a bottom formed in a lattice shape.

  In a manufacturing process of a display such as a liquid crystal substrate or an FPD, a transport system for sequentially performing substrate processing while transporting between each process is constructed so that a glass substrate finally becomes a product through a plurality of processes. .

  In such a manufacturing process, even if extremely fine dust adheres to the product, defective products are produced and the yield is reduced. Manufacturing is performed in a clean room that is extremely cleaned. Even high cleanliness is required. For example, a container that accommodates a wafer to be manufactured, a glass substrate, or the like is required to have high cleanliness, and accordingly, sufficient cleaning is performed before use.

  The present applicant has already filed a container for transporting a glass substrate suitable for such a transport system, and this container is used for pushing up a glass substrate for pushing up the glass substrate from below when taking out the accommodated glass substrate. It has an opening for passing a pin, and the bottom surface is formed in a lattice shape.

Since this glass transport container is a new one different from the conventional containers, there has been no cleaning / drying apparatus suitable for such a glass transport container. In addition, although it is a field | area different from the container which accommodates a shiitake artificial coconut tree etc., the washing | cleaning apparatus for wash | cleaning the container which has a similar shape is known (for example, refer patent document 1).
JP-A-6-79249

  However, the cleaning device for a transport container described in Patent Document 1 is a combination of a swing nozzle and a fixed nozzle so that each surface of the transport container can be cleaned. Since only one surface is provided for each surface, the cleaning power for the cleaning surface is limited.

  In addition, when the bottom surface of the container for transportation described in Patent Document 1 is formed in a lattice shape having openings, the cleaning container is configured to inject cleaning water over the entire cleaning surface, so that it is relatively large. For the transport container having the opening, the cleaning water and the pure water are consumed, which is not efficient.

  Then, an object of this invention is to provide the washing | cleaning apparatus suitable for cleaning a box-type conveyance container efficiently. In addition, another object of the present invention is to provide a drying apparatus suitable for efficiently drying a box-type transport container and a cleaning / drying apparatus capable of efficiently cleaning and drying.

  The cleaning device of the present invention is a cleaning device for cleaning a transport container composed of a substantially rectangular bottom portion and a side portion for preventing a transported object formed around the bottom portion, and is for the bottom portion of the transport container. A first liquid injection means having a plurality of injection ports capable of injecting the cleaning liquid and pure water, and a plurality of injection ports capable of injecting the cleaning liquid and pure water to the side of the transfer container. And a second liquid ejecting means in which the ejection openings are aligned in a shape substantially similar to the vertical cross-sectional shape of the side portion of the transport container, and the ejection openings of the first and second liquid ejecting means And an altitude adjusting means for moving up and down so as to maintain a predetermined distance with respect to the cleaning surface of the transport container.

  Further, the drying device of the present invention is a drying device for drying a transport container comprising a substantially rectangular bottom portion and a side portion for preventing a drop of transported material formed around the bottom portion, and the bottom portion of the transport container A first gas injection means having a plurality of injection ports capable of injecting dry air, and a plurality of injection ports capable of injecting dry air to the side of the transport container, A second gas injection means formed such that the injection port is aligned in a shape substantially similar to the vertical cross-sectional shape of the side portion of the transport container; and the injection ports of the first and second gas injection means, And altitude adjusting means for moving up and down to maintain a predetermined distance with respect to the drying surface of the transport container.

  The cleaning / drying apparatus of the present invention is a combination of the cleaning apparatus of the present invention and the drying apparatus and / or heat drying apparatus of the present invention.

  Furthermore, another cleaning / drying apparatus according to the present invention is a cleaning / drying apparatus for cleaning and drying a transport container having a substantially rectangular bottom portion and a side portion for preventing dropping of a transported object formed around the bottom portion. A first fluid ejecting means having a plurality of injection ports capable of injecting cleaning liquid, pure water and dry air to the bottom of the transport container; and a cleaning liquid, pure to the side of the transport container. A second fluid having a plurality of injection ports capable of injecting water and dry air, the injection ports being formed in alignment with a substantially similar shape with respect to the vertical cross-sectional shape of the side portion of the transport container And an altitude adjusting means for moving the injection ports of the first and second fluid ejecting means up and down so as to maintain a predetermined distance with respect to the cleaning / drying surface of the transport container. It is what.

  According to the cleaning device of the present invention, the cleaning liquid is applied to the cleaning surface of the transport container including the substantially rectangular bottom portion for storing the transported object and the side part formed around the bottom to prevent the transported object from dropping off. In addition, the pure water can be injected from a short distance, and the container for transportation can be efficiently cleaned.

  According to the drying apparatus of the present invention, after the cleaning operation, dry air can be injected from a short distance onto the drying surface of the wet transfer container, and the transfer container can be efficiently dried.

  According to the cleaning / drying apparatus of the present invention, the effects of the cleaning apparatus and the drying apparatus of the present invention can be obtained together. If the entire transport container is heated and dried, the entire transport container can be dried. It can be performed more efficiently.

  Hereinafter, the present invention will be described with reference to the drawings by way of examples.

(First embodiment)
FIG. 1 is a perspective view showing the cleaning device according to the first embodiment of the present invention together with a transport container which is an object to be cleaned.

  The cleaning device 1 in this embodiment is illustrated with a first liquid ejecting means 3 having an ejection port 2 for cleaning liquid and pure water, and a second liquid ejecting means 5 having an ejection port 4 for cleaning liquid and pure water. Although there is no altitude adjusting means for moving the first and second liquid ejecting means up and down so as to maintain a predetermined distance with respect to the cleaning surface of the container to be cleaned.

  The cleaning apparatus 1 is configured so that a cleaning operation can be performed from the upper part of the transport container, which is an object to be cleaned, at the time of cleaning. It can be cleaned while moving in the direction, or the cleaning device 1 is fixed in the horizontal direction, and the mounting table 10 of the transport container can move in the horizontal direction. Similarly, it can be cleaned while moving in the horizontal direction. Further, at the time of this cleaning operation, the cleaning device 1 or the transport container mounting table 10 is moved up and down while the first and second injection ports and the cleaning surface of the transport container have a constant cleaning power at a predetermined distance. The washing operation is performed as if it is held.

  In addition, the container 100 for conveyance shown here is a container for container conveyance which uses the glass substrate used for manufacture of FPD etc. as a conveyance thing, and omission of the substantially rectangular bottom part 101 and the glass substrate formed in the circumference | surroundings is carried out. The bottom portion 101 is provided with a plurality of openings 103 so that a push-up pin that is pushed up from below when the glass substrate is taken out can pass therethrough. Are formed in a lattice shape.

  The bottom 101 is, for example, a glass substrate of a TFT liquid crystal display panel having a size of G6 of 1500 × 1850 mm, G7 of 1870 × 2200 mm, G7.5 of 2160 × 2400 mm, and G8 of 2200 × 2600 mm. As a glass substrate of a display panel for a display (PDP), G6 is 1800 × 2000 mm, G7 is 1900 × 2000 mm, G7.5 is 2000 × 2400 mm, so that these sizes can be accommodated and transported, Shape.

  Next, the components of the present invention will be described in detail. The first liquid ejecting means 3 in the present embodiment can clean the upper surface of the bottom 101 of the transport container 100 that is a cleaning object. And an injection port 2 through which the cleaning liquid and pure water can be injected to the bottom surface which is the cleaning surface.

  The first liquid ejecting means 3 is formed to extend in the horizontal direction of the horizontal direction or the width direction orthogonal to the horizontal direction of movement of the transport container 100, and the injection port 2 is aligned in the width direction so that the lower side in the vertical direction. It is formed so that the cleaning liquid and pure water can be injected.

  The injection ports 2 can be provided in a line or a plurality of rows, and at this time, the cleaning liquid and pure water may be sequentially injected from the same injection port. The injection port may be provided separately for pure water injection.

  The injection ports 2 are provided in an aligned manner, but the plurality of injection ports are preferably formed corresponding to the lattice elements of the bottom portion 101 formed in the lattice shape of the transport container 100. . Specifically, it is preferable that the same number of ejection openings 2 as the number of lattice elements are provided, and the number of the lattice elements is one for each of the ejection openings.

  The injection port 2 is formed by a nozzle or a slit, and by injecting the cleaning liquid perpendicularly to the cleaning surface, the cleaning liquid can be efficiently cleaned by injecting the cleaning liquid onto the surface of the bottom 101 of the container. Is preferable. On the other hand, the injection port 2 may be arranged so that it can be injected so as to have an inclination angle of 0 to 45 degrees with respect to the lower part in the vertical direction. In this case, the injected cleaning liquid is temporarily removed without remaining. Etc. are preferable in that they hardly remain on the surface.

  The first liquid ejecting means 3 having such an ejection port 2 is moved up and down by an altitude adjusting means (not shown) so that the ejection port 2 maintains a predetermined distance with respect to the cleaning surface of the container. The cleaning liquid and pure water can be injected onto the cleaning surface with pressure.

  The altitude adjustment includes a sensor that detects a distance between the ejection port 2 of the first liquid ejecting means 3 and the cleaning surface of the container 100 that is the object to be cleaned, and the first liquid ejecting means according to the distance detected by the sensor. 3 is driven by driving means for moving 3 up and down.

  The trajectory of the first liquid ejecting means 3 when performing the cleaning operation is shown in FIG. FIG. 2 is a view of the trajectory of the first liquid ejecting means 3 in the cleaning operation as viewed from the side of the first liquid ejecting means 3.

  First, the first liquid ejecting means 3 moves onto the container in order to clean the transport container 100, and moves at such a height that it does not contact the side portion 102a of the transport container 100. Then, when the upper surface of the side portion 102a is cleaned and the side portion is crossed and the upper region of the substrate housing portion is entered, the injection port 2 and the bottom surface are lowered until a predetermined distance is reached. When it is lowered to a predetermined distance, it is moved to the vicinity of the side portion 102b while washing the upper surface of the bottom portion as it is, and then lifted. When the height rises to a level that does not contact the side portion 102b, the upper surface of the side portion 102b is moved in the horizontal direction while being cleaned, and the injection of the cleaning liquid is stopped when the side portion of the side portion 102b is exceeded. To do. The locus 6 of movement of the first liquid ejecting means 3 in this operation is indicated by a broken line in FIG.

  Next, the second liquid ejecting means 5 in this embodiment will be described. The second liquid ejecting means 5 cleans the side portion 102 (the side portions 102c and 102d parallel to the horizontal movement direction of the second liquid ejecting means 5) of the transport container 100, which is an object to be cleaned. The injection port 4 that can inject the cleaning liquid and pure water to the cleaning surface is provided.

  This injection port 4 is arranged in alignment with a substantially similar shape to the vertical cross-sectional shape of the side portion so that the cleaning liquid and pure water can be injected at a predetermined distance from the side portion 102 during cleaning. It is a thing. Similar to the first liquid ejecting means 3, the ejection ports 4 can also be arranged in one or a plurality of rows.

  Further, the injection port 4 is formed by a nozzle or a slit, and by injecting the cleaning liquid perpendicularly to the cleaning surface, the cleaning liquid is injected to the surface of the side portion 102 of the container with a high pressure to be efficiently cleaned. It is preferable in that it can be made. On the other hand, the injection port 4 may be arranged so that it can be injected so that it has an inclination angle of 0 to 45 degrees with respect to the lower side in the vertical direction. In this case, impurities etc. from which the injected cleaning liquid has been removed are efficiently removed. This is preferable in that it is washed down.

  The second liquid ejecting means 5 having such an ejection port 4 is moved up and down by an altitude adjusting means (not shown) so that the ejection port 4 maintains a predetermined distance with respect to the cleaning surface of the transport container, The cleaning liquid and pure water can be injected onto the cleaning surface with a constant pressure.

  The altitude adjustment includes a sensor that detects the distance between the injection port 4 of the second liquid ejecting means 5 and the cleaning surface of the container 100 that is the object to be cleaned, and the second liquid ejecting means according to the distance detected by the sensor. This is performed by driving means for moving 5 up and down.

  FIG. 3 shows the positional relationship between the second liquid ejecting means 5 and the transport container 100 during the cleaning operation. Here, the first liquid ejecting means 3 is also shown, but the first liquid ejecting means 3 and the second liquid ejecting means 5 may be operated as a single unit, or may be operated separately. Also good.

  The second liquid ejecting means 5 basically operates while drawing a locus similar to that of the first liquid ejecting means 3, and performs a cleaning operation. When the respective liquid ejecting means are lowered, FIG. 3 is a side view seen from the downstream side in the horizontal movement direction.

  The injection port 4 is provided so that the cleaning liquid and pure water can be injected to the inner and outer surfaces and the upper surface of the side portion, and each is formed so as to hold a predetermined distance with respect to the cleaning surface. Yes. At this time, it is preferable to provide the injection port 4a so that the cleaning liquid and the pure water can be injected also to the bottom part which becomes the joining part with the side part of the grid-like bottom part of the container. Incidentally, the ejection port 2 of the first liquid ejection means 3 is disposed at a position corresponding to the lattice of the bottom 101.

  By adopting such a configuration for the first and second liquid ejecting means, the transport container 100 can be efficiently cleaned, and the first liquid ejecting means 3 has an ejection port 2 having a lattice element. Since the cleaning liquid and pure water are not excessively injected into the opening 103, the cleaning liquid and pure water can be saved, and the cost can be reduced.

  Also, the lattice part orthogonal to this is such that the cleaning liquid and pure water injected from the injection port 2 are injected at a predetermined distance, and thus the cleaning surface is brought closer to the cleaning surface by being closer to the cleaning surface. Can be sufficiently cleaned by the flow from there.

The first and second liquid ejecting means 3 and 5 appropriately adjust the altitude by appropriately selecting a water pressure and a distance that can perform cleaning at a pressure of 0.2 to 1 MPa / cm ² with respect to the cleaning surface. Etc. are preferably performed.

(Second Embodiment)
This embodiment is the same as the first embodiment except for the first liquid ejecting means in the device configuration. As for the first liquid ejecting means, as described below, the first liquid ejecting means can move so as to eject the cleaning liquid and pure water at an acute angle with respect to the vertically downward direction and the vertically downward direction. Except for the points that can be performed, this embodiment is the same as the first embodiment.

  The operation of the first liquid ejecting means 3 of the present embodiment will be described below with reference to FIG. FIG. 4 is a diagram illustrating a mechanism in which the ejection port 12 of the first liquid ejecting means can move so as to draw an arcuate trajectory.

  In FIG. 4a, the crank lever 14 is fixed to one end of the first liquid injection means 13 provided with the injection port 12 with the fixed shaft 11 as an axis, and the crank lever 14 and the crank arm 15 can be bent by a pin 16a. Further, the crank 18 fixed to the motor 17 and the crank arm 15 are connected to each other by a pin 16b so that they can be bent.

  First, when the crank 18 is rotated by the motor 17, the pin 16b of the crank arm 15 performs a circular motion. Due to this circular motion, the position of the pin 16a of the crank arm 15 moves in the vertical direction, and accordingly, the pin 16a of the crank lever 14 also moves in the vertical direction. Therefore, the first liquid ejecting means 13 is configured such that the ejection port 12 at the tip of the first liquid ejecting means 13 reciprocates in an arc shape around the fixed shaft 11 so that the ejection angle of the cleaning liquid and pure water can be changed.

  FIG. 4 b shows the liquid ejecting means in which the first liquid ejecting means 22 provided with the ejection port 21 is connected to the drive side sprocket 24 fixed to the motor 23 by the chain 25. When the motor 23 is rotated, the first liquid ejecting means 22 is also rotated, and the ejection port 21 at the tip thereof reciprocates in an arc shape so that the ejection angle of the cleaning liquid and pure water can be changed. Yes.

  Further, FIG. 4 c shows the liquid ejecting means in which the first liquid ejecting means 32 provided with the ejection port 31 and the swing arm 33 are connected by the rotary cylinder 34, and the swing arm 33 is further connected to the driving device 35. It is a thing. The drive device 35 can perform the swing operation of the swing arm 33 and the rotation operation of the rotary cylinder 34, and the swing arm 33 reciprocates in an arc shape around the connection portion with the drive device by the swing operation. In addition, the rotation of the rotary cylinder 34 causes the injection port 31 at the tip of the first liquid injection means 32 to reciprocate in an arc shape so that the injection angle of the cleaning liquid and pure water can be changed. ing.

  If the liquid ejection angle of the first liquid ejection means can be changed in this way, as shown in FIG. 5, the side portion 102a of the transport container 100 that is orthogonal to the horizontal movement direction of the first liquid ejection means 3 is used. , 102b, the cleaning efficiency of the inner and outer surfaces can be increased. That is, in the first embodiment, since the liquid injection angle is fixed, the side upper surface and the bottom upper surface of the transport container can be efficiently cleaned, but the horizontal direction of the first liquid ejecting means 3 can be improved. The cleaning efficiency of the inner side surface and the outer side surface of the side portions 102a, 102b orthogonal to the moving direction was slightly inferior.

  However, as shown in FIG. 5a, first, the outer side surface of the side portion 102a of the transport container can be cleaned by performing the cleaning start operation while making an angle as shown at 13a, and then the side top surface. When passing through, the injection port is directed downward in the vertical direction as in 13b, and when entering the upper surface area of the bottom (conveyed object storage unit) beyond the side, as in 13c → 13d The inner surface of the side portion 102a can be efficiently cleaned by lowering the angle and simultaneously performing a cleaning operation.

  Subsequently, when cleaning the upper surface of the bottom portion, as shown in FIG. 5B, cleaning is performed in the same manner as in the first embodiment with the injection port of the first liquid injection means 13 directed downward in the vertical direction. Then, when the cleaning of the upper surface of the bottom portion is completed, the inner and outer surfaces and the upper surface of the side portion 102b are cleaned in the same manner as the side portion 102a while changing the angle of the injection port, and the cleaning operation is finished.

  By operating in this way, the side portion of the first liquid ejecting means that is perpendicular to the horizontal movement direction is cleaned by the first liquid ejecting means, and the side portion parallel to the horizontal movement direction is cleaned by the second liquid ejecting means. Therefore, the surface of the transport container 100 can be kept extremely clean.

  Note that the injection angle of the cleaning liquid and pure water of the first liquid injection means 13 at this time can be changed to an acute angle with respect to the downward vertical direction, and the limit of this angle is the downward vertical direction. The angle is preferably 10 to 45 degrees.

(Third embodiment)
The present embodiment relates to a drying apparatus that dries the transport container after cleaning. The drying device here has the same configuration as the cleaning device in the first embodiment, and the first liquid ejecting means in the first embodiment is replaced with the first gas ejecting means. The liquid ejecting means is the same as that of the first embodiment except that the liquid ejecting means is the second gas ejecting means.

  The first and second gas injection means are the same as those in the first embodiment except that the first and second gas injection means inject dry air instead of the cleaning liquid and pure water injected in the first embodiment. The same operation is performed. At this time, similarly to the first liquid ejecting means shown in the second embodiment, the angle of the dry air ejected from the first gas ejecting means may be changed.

  In this embodiment, since it is dry air that is a dried gas, it is possible to efficiently dry the surface of the transport container by injecting it onto the transport container wet by washing. it can.

  In addition, the dry air injected here is sufficient if the moisture at 25 ° C. is 1% or less, which can be obtained by compressing the air with a compressor or passing through a filter for removing moisture. It is preferably compressed dry air obtained by compressing air and then removing moisture with a filter or the like.

(Fourth embodiment)
The present embodiment relates to a cleaning / drying apparatus that can perform both cleaning and drying of a transport container. What is necessary is just to comprise the washing | cleaning / drying apparatus here as what has both a washing | cleaning apparatus and a drying apparatus together.

  As the cleaning device, for example, the cleaning device shown in the first embodiment or the second embodiment is used, and as the drying device, for example, the drying device shown in the third embodiment and / or the general device is used. A heat drying apparatus may be used.

  Here, the cleaning device and the drying device may be provided as separate devices and may be operated in the order of cleaning and drying, or the cleaning device and the drying device are integrated, and the cleaning liquid and pure water are supplied from the injection port. Further, it may be possible to inject dry air.

  This is because the first liquid ejecting means and the first gas ejecting means, the second liquid ejecting means and the second gas ejecting means are each configured as one ejecting means, that is, the cleaning apparatus shown in FIG. The first fluid injection means capable of injecting the cleaning liquid, pure water and dry air, and the cleaning liquid, pure water and dry air. It can be obtained by having the second fluid ejecting means capable of ejecting.

(Fifth embodiment)
In the present embodiment, a known drying apparatus using heating or decompression is used for the cleaning apparatus, drying apparatus or cleaning / drying apparatus of the present invention.

  The drying apparatus used here may be a drying apparatus using a heating method such as hot air heating, high-temperature heating, far-infrared heating, or microwave heating. Any device can be used as long as it is dried in a vacuum state. Thus, if it is a drying by a well-known system, even if it is based on another principle, it can be used if it is a drying apparatus which dries the whole container for conveyance and removes the water | moisture adhering to a container.

  Specifically, the cleaning device of the present invention + drying device by heating or reduced pressure, the cleaning device of the present invention + the drying device of the present invention + the drying device by heating or the reduced pressure, the cleaning / drying device of the present invention + drying by heating or the reduced pressure. A combination of the apparatus, the drying apparatus of the present invention + a drying apparatus by heating or decompression is mentioned.

  In this way, by providing a drying device separately from the present invention, the transport container can be further completely dried, and the bottom back surface of the transport container that is difficult to dry with the drying device of the present invention, etc. It can be dried sufficiently.

The perspective view which showed the washing | cleaning apparatus in the 1st Embodiment of this invention. The figure which showed the locus | trajectory of operation | movement of the 1st liquid injection means 3. The figure which showed the positional relationship of the 1st and 2nd liquid injection means in a washing | cleaning operation, and the container for conveyance. The figure which showed the mechanism which can move so that the injection outlet of the 1st liquid injection means may draw a circular-arc-like locus | trajectory The figure which showed the mechanism which can move so that the injection outlet of the 1st liquid injection means may draw a circular-arc-like locus | trajectory The figure which showed the mechanism which can move so that the injection outlet of the 1st liquid injection means may draw a circular-arc-like locus | trajectory The figure which showed the washing | cleaning operation | movement of the side part of a container for conveyance by the 1st liquid injection means shown to FIG. The figure which showed the washing | cleaning operation | movement of the bottom part of a container for conveyance by the 1st liquid injection means shown to FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Cleaning apparatus, 2 ... Injection port, 3 ... 1st liquid injection means, 4 ... Injection port, 5 ... 2nd liquid injection means, 6 ... Trajectory, 10 ... Mounting stand, 11 ... Fixed axis, 12 ... Injection Outlet, 13 ... first liquid injection means, 14 ... crank lever, 15 ... crank arm, 16a, 16b ... pin, 17 ... motor, 18 ... crank, 21 ... injection port, 22 ... liquid injection means, 23 ... motor, 24 ... Drive side sprocket, 25 ... Chain

Claims (26)

A cleaning device for cleaning a container for transportation composed of a substantially rectangular bottom portion and a side portion for preventing dropping of a conveyed product formed around the bottom portion,
First liquid ejecting means having a plurality of ejection ports capable of ejecting cleaning liquid and pure water to the bottom of the transport container;
It has a plurality of injection ports capable of injecting cleaning liquid and pure water to the side of the transfer container, and the injection port is substantially similar to the vertical cross-sectional shape of the side of the transfer container A second liquid ejecting means formed in alignment with
Altitude adjusting means for vertically moving the outlets of the first and second liquid ejecting means to maintain a predetermined distance with respect to the cleaning surface of the transport container;
An apparatus for cleaning a transporting container, comprising:   A bottom portion of the transfer container is formed in a lattice shape with an opening, and an injection port of the first liquid ejecting means injects cleaning liquid and pure water to the lattice at the bottom portion of the transfer container. The cleaning apparatus according to claim 1.   The cleaning apparatus according to claim 2, wherein the first liquid ejecting means has the same number of ejection ports as the vertical or horizontal lattices of the bottom of the container for transportation.   The cleaning apparatus according to any one of claims 1 to 3, wherein the injection port of the first liquid injection means is a nozzle.   When the ejection port of the first liquid ejecting means cleans the outer side surface and the inner side surface of the transport container, the cleaning liquid and pure water are ejected at an acute angle with respect to the vertical downward direction, The cleaning apparatus according to any one of claims 1 to 4, wherein when cleaning the upper side surface and the bottom upper surface of the container, the cleaning liquid and pure water are injected downward in the vertical direction.   The cleaning apparatus according to claim 5, wherein an injection angle of the first liquid injection unit can be changed by moving an injection port so as to draw an arcuate locus.   The first and second liquid ejecting means can move in a direction perpendicular to the alignment direction of the ejection openings of the first liquid ejecting means and in the vertical direction, and the transport container is cleaned while moving. The cleaning apparatus according to any one of claims 1 to 6, wherein:   The cleaning apparatus has container moving means that can move while supporting the transfer container, and is fixed in the horizontal direction while moving the transfer container by the container moving means, and can move in the vertical direction. The cleaning apparatus according to claim 1, wherein the transfer container is cleaned by the first and second liquid ejecting means that can be used. A drying device that dries a container for transportation composed of a substantially rectangular bottom portion and side portions that prevent dropping of a conveyed product formed around the bottom portion,
First gas injection means having a plurality of injection ports capable of injecting dry air to the bottom of the transport container;
It has a plurality of injection ports capable of injecting dry air to the side of the transfer container, and the injection ports are aligned in a shape similar to the vertical cross-sectional shape of the side of the transfer container. A second gas injection means formed by:
Altitude adjusting means for vertically moving the injection ports of the first and second gas injection means so as to maintain a predetermined distance with respect to the drying surface of the transport container;
An apparatus for drying a transport container, comprising:   The bottom portion of the transport container has an opening and is formed in a lattice shape, and the injection port of the first gas injection means injects dry air to the lattice at the bottom portion of the transport container. The drying apparatus according to claim 9.   The drying apparatus according to claim 10, wherein the first gas injection unit has the same number of injection ports as the vertical or horizontal lattices of the bottom of the transport container.   The drying apparatus according to any one of claims 9 to 11, wherein the injection port of the first gas injection means is a nozzle.   When the injection port of the first gas injection means dries the outer side surface and the inner side surface of the transport container, it injects dry air at an acute angle with respect to the vertically downward direction, The drying apparatus according to any one of claims 9 to 12, wherein when drying the upper surface of the side portion and the upper surface of the bottom portion, the drying air is injected downward in the vertical direction.   The drying apparatus according to claim 13, wherein the injection port of the first gas injection means can move so as to draw an arcuate locus to change the injection angle.   The first and second gas injection means can move in the direction perpendicular to the alignment direction of the injection ports of the first gas injection means and the vertical direction, and dry the transport container while moving. The drying apparatus according to any one of claims 9 to 14, wherein:   The drying apparatus has container moving means that can move while supporting the transfer container. The drying apparatus is fixed while moving the transfer container by the container moving means, and can move up and down. The drying apparatus according to claim 9, wherein the transfer container is dried by the second gas injection unit. A washing / drying device for washing and drying a container for transportation composed of a substantially rectangular bottom portion and a side portion for preventing dropping of a conveyed product formed around the bottom portion,
First fluid ejecting means having a plurality of ejection ports capable of ejecting cleaning liquid, pure water and dry air to the bottom of the transport container;
It has a plurality of injection ports capable of injecting cleaning liquid, pure water and dry air to the side of the transfer container, and the injection port is substantially the same as the vertical sectional shape of the side of the transfer container. A second fluid ejecting means formed in alignment with a similar shape;
Altitude adjusting means for vertically moving the injection ports of the first and second fluid injection means so as to maintain a predetermined distance with respect to the cleaning / drying surface of the transport container;
An apparatus for cleaning and drying a container for transportation, comprising:   A bottom portion of the transfer container is formed in a lattice shape with an opening, and an injection port of the first fluid ejecting means injects cleaning liquid and pure water to the lattice at the bottom portion of the transfer container. The cleaning apparatus according to claim 17.   19. The cleaning / drying apparatus according to claim 18, wherein the first fluid ejecting means has the same number of ejection ports as the vertical or horizontal lattices of the bottom of the transport container.   The cleaning / drying apparatus according to any one of claims 17 to 19, wherein the injection port of the first fluid injection means is a nozzle.   When the injection port of the first fluid injection means cleans and dries the outer side surface and the inner side surface of the transport container, it injects cleaning liquid, pure water and dry air at an acute angle with respect to the vertically downward direction. 21. The cleaning liquid, pure water, and dry air are injected downward in the vertical direction when cleaning the side upper surface and the bottom upper surface of the transport container. Cleaning and drying equipment.   The cleaning / drying apparatus according to claim 21, wherein the injection port of the first fluid injection means can move so as to draw an arcuate locus to change the injection angle.   The first and second fluid ejecting means can move in a direction perpendicular to the alignment direction of the ejection openings of the first fluid ejecting means and in the vertical direction, and the transport container is washed and dried while moving. 23. The cleaning / drying apparatus according to any one of claims 17 to 22, wherein   The cleaning / drying apparatus has container moving means that can move while supporting the transfer container, and is fixed while moving the transfer container by the container moving means, and can move vertically. The cleaning / drying apparatus according to any one of claims 17 to 22, wherein the transport container is cleaned and dried by the first and second fluid ejecting means.   A cleaning / drying apparatus comprising: the cleaning apparatus according to any one of claims 1 to 8; and the drying apparatus according to any one of claims 9 to 16.   A cleaning device according to any one of claims 1 to 8, a drying device according to any one of claims 9 to 16, or a cleaning / drying device according to any one of claims 17 to 25, and heating or A cleaning / drying apparatus comprising a drying apparatus using reduced pressure.

Images