JP2006313942A - Carrier mounting apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve a problem that a carrier transport robot or a substrate transport robot can not transport normally if a carrier is not mounted at a normal position in mounting the carrier on a carrier mounting base. <P>SOLUTION: The carrier mounting apparatus 1 includes a mounting base 3 provided with pins 5 to fit in pin holes 6 provided on a carrier C; a first normality sensor 7a and a second normality sensor 7b to detect whether a predetermined region of a bottom surface of the carrier C is in a reference position in a vertical direction; and an indicator 20 to indicate that the carrier C is mounted normally fitting to the pins 5 when the predetermined region of the bottom surface described above is in the reference position. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a carrier mounting device on which a carrier that accommodates a substrate is mounted.

  In addition to a horizontal arrangement carrier that accommodates substrates in a state where a plurality of substrates are arranged in a row in a horizontal direction as a conventional carrier for accommodating substrates, the main surface of the substrate is recently A vertical arrangement carrier that accommodates substrates in a state where a plurality of substrates are arranged in a line in a vertical direction in a horizontal direction has come to be used.

  A vertical array carrier (hereinafter simply referred to as a carrier) is shown in FIG.

  The carrier C is mounted on the mounting table 900 by a carrier transport device (not shown) and is taken away. The carrier C has three pin holes (not shown) at the bottom, and fits with the three pins 901 included in the mounting table 900. The carrier C is positioned at a predetermined position on the mounting table 900 by fitting the pin hole and the pin 901 together.

  Further, the substrate transport robot 902 carries the substrate W in and out of the positioned carrier C. By positioning the carrier C at a predetermined position on the mounting table 900 in this way, the carrier transport device can accurately hold and transport the carrier C. The substrate transport robot 902 can also transport the substrate W accurately.

  By the way, the carrier C may be mounted on the mounting table 900 in a state where the carrier C is not accurately fitted to the pin 901 for some reason.

  In this case, since the carrier C is not in a predetermined position on the mounting table 900, for example, even if the carrier C is carried out by the carrier transport device, the carrier transport device cannot hold the carrier C accurately.

  Further, when the substrate transfer robot 902 loads or unloads the substrate, the substrate transfer robot 902 cannot accurately load or unload the substrate. In the worst case, the transfer robot 902 collides with the carrier C, The substrate W may be damaged.

  The objective of this invention is providing the carrier mounting apparatus which can confirm correctly whether the carrier mounted in the mounting base is mounted normally.

  The invention according to claim 1 is a carrier placement device for placing a carrier for storing a substrate having a strict part consisting of a concave portion or a convex portion at the bottom, and a placement portion for placing the carrier, The carrier occupies the carrier when the carrier is placed on the mounting part, and positioning means having a convex part or concave part for positioning the carrier, which are provided in the part and are closely matched to the concave part or convex part of the carrier bottom. A presence sensor for detecting whether or not there is an object in space; a detection sensor for detecting a position in a vertical direction of the carrier placed on the placement section after detection by the presence sensor; and a detection result of the detection sensor Based on the position of the carrier in the up and down direction when the carrier is placed on the placement unit, the detection sensor detects the detection sensor. From the results, it is determined whether the carrier is at the reference position in the vertical direction, and when the presence sensor is determined to be present, when the detection sensor determines that the carrier is at the reference position in the vertical direction, the carrier is When the detection sensor determines that the carrier is normally placed on the placement unit and the detection sensor determines that the carrier is not in the reference position in the vertical direction, the carrier is not placed on the placement unit normally. It is characterized by notifying abnormality.

  According to a second aspect of the present invention, in the first aspect of the invention, when the notification unit determines that the presence sensor is absent, the detection sensor determines that the carrier is in the reference position in the vertical direction. When the carrier is not properly placed on the placement portion, the abnormality is notified, and when the detection sensor determines that the carrier is not in the reference position in the vertical direction, the carrier is informed that the carrier is not placed. .

  According to a third aspect of the present invention, in the first or second aspect of the present invention, the presence sensor includes a light projecting unit that emits detection light into a space occupied by a carrier, and a light receiving unit that receives the detection light. With.

  In the carrier mounting device according to the first aspect, the carrier is mounted and positioned on the mounting portion so that the concave or convex portion of the carrier bottom and the positioning means of the mounting portion are fitted.

  When the carrier is normally placed on the placement portion, the concave portion or the convex portion of the carrier bottom and the positioning means of the placement portion are fitted, so that the carrier is positioned at a predetermined reference position in the vertical direction. On the other hand, when the carrier is not normally placed on the placement portion, the concave portion or the convex portion at the bottom of the carrier does not fit with the positioning means of the placement portion, so the carrier has deviated from a predetermined reference position in the vertical direction. Located in position.

  The presence sensor detects whether or not there is an object in the space occupied by the carrier when the carrier is placed on the placement unit. The detection sensor detects the position of the carrier placed on the placement unit in the vertical direction after detection by the presence sensor, and the notification unit notifies information based on the detection result of the detection sensor.

  That is, when the detection unit determines that the presence sensor is present and the detection sensor determines that the carrier is at the reference position in the vertical direction, the notification unit can normally notify that the carrier is normally placed on the placement unit, When the detection sensor determines that the carrier is not at the reference position, an abnormality can be notified that the carrier is not normally placed on the placement portion. Thereby, it is possible to accurately detect whether or not the carrier on which the placement unit is placed is normally placed.

  In addition, since the carrier mounting apparatus of the first aspect includes the presence sensor, the detection sensor, and the two sensors, the detection sensor is not located at the reference position even though the carrier exists in the mounting portion. Even if it judges, it can detect that a carrier exists on a mounting part. Thereby, at least, it can be detected that the carrier is not normally placed on the placement portion.

  Further, in the carrier mounting device according to claim 2, when the presence / absence sensor determines that the presence / absence sensor is absent, when the detection sensor determines that the carrier is at the reference position in the vertical direction, the carrier is normally placed on the mounting portion. When it is not placed, an abnormality can be notified, and when the detection sensor determines that the carrier is not at the reference position, it can be notified that the carrier is not placed on the placement portion.

  Furthermore, in the carrier mounting apparatus according to claim 3, since the presence / absence sensor includes a light projecting unit and a light receiving unit, the presence / absence of the carrier can be detected without contact, and as a result, there is no contact between the presence / absence sensor and the carrier. The generation of pollutants caused by contact can be prevented. Further, it is possible to prevent wear of the presence / absence sensor due to wear of the presence / absence sensor and the carrier.

  FIG. 1 shows a carrier mounting device 1 of the present invention.

The carrier mounting device 1 has a mounting table 3 on which the carrier C is mounted, and a first pin 5a, a second pin 5b, and a third pin 5c protrude at predetermined positions on the mounting table 3. (Hereinafter, the first pin 5a, the second pin 5b, and the third pin 5c are collectively referred to as the pin 5).
Each of the pins 5 can be fitted into a first pin hole 6a, a second pin hole 6b, and a third pin hole 6c provided on the bottom of the carrier C. (Only the third pin hole 6c is shown in FIG. 1). Hereinafter, the first pin hole 6a, the second pin hole 6b, and the third pin hole 6c are collectively referred to as the pin hole 6.

  Further, the position in the vertical direction of the carrier C when the carrier C is positioned by the pin 5 as shown in FIG. Furthermore, the position in the vertical direction of the bottom surface of the carrier C at the reference position is referred to as a reference bottom surface position. In the present embodiment, the reference bottom surface position is the same as the position of the upper surface US of the mounting table 3.

  The front surface F of the carrier C is provided with an opening for taking in and out the substrate (not shown).

  Next, the mounting table 3 is provided with a first normal sensor 7a and a second normal sensor 7b, and detects a vertical position of a bottom surface BS (described later) of the carrier C.

  Further, the mounting table 3 is provided with a light projecting portion 9 a of a presence / absence sensor 9 that detects the presence / absence of the carrier C on the mounting table 3. The light projecting unit 9 a is provided at a position lower than the upper surface US of the mounting table 3 and is not in contact with the carrier C. The light projecting unit 9a emits the detection light DL1 obliquely upward. The detection light DL1 passes through the space SP occupied by the carrier C when the carrier C is positioned by the pin 5 on the mounting table 3. A light receiving portion 9b of the presence / absence sensor 9 is provided outside the space SP occupied by the carrier C on the extension of the detection light DL1. The presence sensor 9 of the present embodiment is set to be turned on when the detection light DL1 is blocked.

  Next, the pin 5 will be described with reference to FIG. Here, the first pin 5a will be described as an example. FIG. 2 shows a part of the SS cross section of FIG.

  As shown in FIG. 2, the first pin 5 a is a substantially cylindrical member having a conical top portion, and is erected in the vertical direction on the mounting table 3. The first pin 5a can be fitted into the first pin hole 6a at the bottom of the carrier C.

  The second pin 5b and the third pin 5c have the same structure as the first pin 5a, and the second pin hole 6b and the third pin hole 6c have the same structure as the first pin hole 6a. Has a structure.

  Next, the first normal sensor 7a will be described with reference to FIG. For convenience, hatching of the first normal sensor 7a is omitted.

  The first normal sensor 7 a has a planar shape at the top, and has a light projecting element 71 and a light receiving element 72. The first normal sensor 7 a is arranged at a position where the upper plane is lower than the upper surface US of the mounting table 3. The light projecting element 71 emits the detection light DL2 obliquely upward. The light receiving element 72 detects the detection light DL2 emitted from the light projecting element 71 and reflected on the object, and is particularly set to detect only the detection light reflected from the object existing at a predetermined distance.

  Here, when the detection light DL2 reflected by the bottom surface BS at the reference bottom surface position is detected, the first normal sensor 7a is set to be ON.

  On the other hand, for example, when the carrier C is not normally placed, the carrier C does not normally fit with the first pin 5a, so the bottom surface BS does not reach the reference bottom surface position and is positioned above the reference bottom surface position. . At this time, since the light receiving element 72 does not detect the detection light DL2, the first normal sensor 7a is turned off.

  As will be described later, the carrier C arrives at the reference position when the pins 5 are fitted in all the pin holes 6, and at this time, the bottom surface BS also arrives at the reference bottom surface position. Therefore, if it can be detected that the bottom surface BS is at the reference bottom surface position, it can be said that the carrier C is normally mounted on the mounting table 3.

  The second normal sensor 7b has the same configuration as that of the first normal sensor 7a, and is set to be ON when the bottom surface BS is at the reference bottom surface position.

  As described above, the first normal sensor 7a and the second normal sensor 7b detect the vertical position of the bottom surface BS of the carrier C in a non-contact manner with the detection light. For this reason, it is possible to suppress dust generation and to prevent contaminants on the substrate from being scattered around.

  Further, since the first normal sensor 7a and the second normal sensor 7b do not contact the carrier C, the upper surfaces of the first normal sensor 7a and the second normal sensor 7b are not damaged or worn. For this reason, the period during which the detection light is projected and received satisfactorily becomes very long, the malfunction of the first normal sensor 7a and the second normal sensor 7b is suppressed over a long period of time, and the replacement frequency can be reduced.

  Next, the arrangement of the first normal sensor 7a and the second normal sensor 7b on the mounting table 3 will be described with reference to FIG. FIG. 3 is a top view of the mounting table 3.

  As shown in the figure, a first pin 5 a, a second pin 5 b, and a third pin 5 c are provided on the mounting table 3. The outline LS of the bottom surface BS of the carrier C when positioned by the first pin 5a, the second pin 5b, and the third pin 5c is indicated by a two-dot chain line.

  For convenience of explanation, this figure shows the bottom surface BS seen through from above.

  The bottom surface BS of the carrier C is substantially rectangular as indicated by the contour LS, and is parallel to the side SD1 located on the front surface F side where the substrate is taken in and out, and passes through the center CP of the bottom surface, It can be divided into four regions by a second straight line L2 orthogonal to the first straight line L1 and passing through the center CP of the bottom surface. Here, the center CP at the bottom corresponds to the approximate center of gravity of the bottom.

When the four regions are defined as bottom surface regions R1, R2, R3, R4 counterclockwise starting from the upper left region of the drawing, the first normal sensor 7a detects the vertical position of the bottom surface region R1. The second normal sensor 7b is disposed at a position for detecting the vertical position of the bottom surface region R3 that is symmetrical to the bottom surface region R1 with respect to the center CP of the bottom surface. (The areas R1 and R3 are hatched.)
Specifically, the first normal sensor 7a and the second normal sensor 7b emit the detection light so that the first normal sensor 7a and the second normal sensor 7b reach the bottom surface region R1 and the bottom surface region R3 when the bottom surface BS is at the reference bottom surface position. A normal sensor 7a and a second normal sensor 7b are arranged.

  Further, the carrier C has a first pin hole 6a, a second pin hole 6b, and a third pin hole 6c that are arranged at the apex of a substantially isosceles triangle surrounding the center CP of the bottom surface, and each has a first pin 5a. The second pin 5b and the third pin 5c are positioned at three points by fitting, so if any two of the first pin 5a, the second pin 5b and the third pin 5c are fitted, the remaining 1 Fit one another. When these three pins 5 are fitted into the three pin holes 6, the carrier C is positioned at the reference position and the bottom surface BS arrives at the reference bottom surface position.

  In the present embodiment, it is detected whether or not the bottom surface region located diagonally across the center CP of the substantially rectangular bottom surface BS is at the reference bottom surface position. Thereby, it is possible to detect whether or not the entire bottom surface BS is at the reference bottom surface position, and thus whether or not the carrier C is at the reference position can be detected.

  In the present embodiment, the first normal sensor 7a and the second normal sensor 7b are arranged so as to detect the bottom areas R1, R3, respectively, but may be arranged so as to detect the bottom areas R2, R4, In short, it is only necessary to detect a bottom area located diagonally with the center CP at the bottom as the center.

  It should be noted that the first normal sensor 7a and the second normal sensor 7b are respectively located in the vertical direction of the bottom region R1, R3 other than the portion where the first pin hole 6a and the second pin hole 6b are present. Although it can be arranged to detect the position, it is preferably arranged at a position to detect the bottom surface in the vicinity of the first pin hole 6a and the second pin hole 6b as in the present embodiment. This is because when the carrier C is not normally placed, the bottom surface BS near the pin hole has a larger amount of deviation from the reference bottom surface position than other bottom surface BS portions.

  Next, the hardware configuration of the carrier mounting device 1 will be described with reference to FIG.

  As shown in the figure, the first normal sensor 7 a, the second normal sensor 7 b, and the presence / absence sensor 9 are connected to the notification unit 20. The notification unit 20 includes a CPU, a RAM, and a ROM, an information processing unit 11 that processes various types of information, a display 12 that displays information from the information processing unit 11, the information processing unit 11 and the external device 14. And an interface 13 to be connected. Examples of the external apparatus 14 include a substrate processing apparatus, a substrate transfer apparatus, and a carrier transfer apparatus.

  Next, an example of operation | movement of the carrier mounting apparatus 1 is demonstrated using the flowchart of FIG.

  The carrier mounting device 1 is in a state immediately after startup, that is, in the start SS of the figure, each of the first normal sensor 7a and the second normal sensor 7b is emitting detection light. The presence sensor 9 is also in the state of emitting the detection light DL1.

  Thereafter, the process enters step 1 in FIG. In step S <b> 1, the information processing section 11 determines whether or not the external device 14 has inquired about the mounting state of the carrier C through the interface 13. If there is no inquiry, step S1 is repeated. If there is an inquiry, the process proceeds to step S2.

  In step S2, the information processing unit 11 determines whether or not the presence sensor 9 is ON. If the presence / absence sensor 9 is ON, it is determined that the carrier C or other object is present on the mounting table 3, and the process proceeds to step S3.

  In step S3, it is determined whether both the first normal sensor 7a and the second normal sensor 7b are ON. If ON, it is determined that the carrier C is normally mounted on the mounting table 3, and the process proceeds to step S4. move on.

  In step S4, the display 12 displays that the carrier C is normally placed, and notifies the external device 14 that the carrier C is normally placed through the interface 13.

  Returning to step S3, if neither the first normal sensor 7a nor the second normal sensor 7b is ON, it is determined that the carrier C is not normally mounted on the mounting table 3, and the process proceeds to step S5.

  The state in step S5 is a state in which one or both of the first normal sensor 7a and the second normal sensor 7b are OFF despite the presence / absence sensor 9 being ON. 3, it is presumed that there is an object on 3 and the carrier C is not normally placed even if the object is the carrier C.

  Therefore, the display 12 displays that the carrier C is not normally placed, notifies the operator to this effect, and informs the external device 14 that the carrier C is not normally placed through the interface 13. .

  Returning to step S2, if the presence sensor 9 is OFF, the process proceeds to step S6. In step S6, it is determined whether any of the first normal sensor 7a and the second normal sensor 7b is ON. If any of them is ON, the process proceeds to step S7.

  The state in step S7 is a state in which the presence sensor 9 is OFF and one of the first normal sensor 7a and the second normal sensor 7b is ON. That is, if the carrier C is normally placed, at least the presence / absence sensor 9 should be ON, but the presence / absence sensor 9 is OFF, and the first normal sensor 7a and the second normal sensor 7b One of them is ON. Therefore, here, an object that could not be detected by the presence sensor 9 is detected by either the first normal sensor 7a or the second normal sensor 7b.

  Therefore, as in step S5, the display 12 displays that the carrier C is not normally placed, informs the operator of this fact, and informs the operator that the carrier C is not normally placed through the interface 13. 14 is notified.

  Returning to step S6 again, if neither the first normal sensor 7a nor the second normal sensor 7b is ON, there is nothing on the mounting table 3, so the process proceeds to step S8 and the external device 14 is reached. On the other hand, it is notified that the carrier C is not placed.

  In the present embodiment, it is determined that the carrier C is normally placed only when all of the first normal sensor 7a, the second normal sensor 7b, and the presence sensor 9 are turned on. For this reason, it is possible to accurately notify whether or not the carrier C is normally placed.

  As described above, in the present embodiment, the carrier C having a pin hole as a concave portion at the bottom portion is targeted. However, in the case of a carrier having a convex portion at the bottom portion, the carrier in the vertical direction is provided with a concave portion that fits the convex portion on the mounting table. What is necessary is just to detect whether the position of the bottom face is in a reference | standard bottom face position.

It is a figure which shows the structure of the carrier mounting apparatus which is embodiment. It is SS sectional drawing in FIG. 4 is a top view of the mounting table 3. FIG. It is a figure which shows the hardware constitutions of a carrier mounting apparatus. It is a flowchart which shows an example of operation | movement of a carrier mounting apparatus. It is a figure which shows the conventional carrier mounting apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Carrier mounting apparatus 3 Mounting base 5a 1st pin 5b 2nd pin 5c 3rd pin 6a 1st pin hole 6b 2nd pin hole 6c 3rd pin hole 7a 1st normal sensor 7b 2nd normal sensor 9 Presence sensor 9a Throw Light part 9b Light receiving part 20 Notification part 71 Light projecting element 72 Light receiving element L1 First straight line L2 Second straight line R1, R2, R3, R4 Bottom area US Upper surface

Claims (3)

In the carrier mounting device for mounting a substrate storing carrier having a strict part consisting of a concave portion or a convex portion at the bottom,
A placement unit for placing the carrier;
Positioning means provided on the mounting portion, and having a convex portion or a concave portion for positioning the carrier that is strictly matched with the concave portion or the convex portion of the carrier bottom,
When a carrier is placed on the placement section, a presence / absence sensor that detects whether there is an object in the space occupied by the carrier, and
A detection sensor for detecting a position in a vertical direction of the carrier placed on the placement unit after detection by the presence sensor;
Based on the detection result of the detection sensor, and a notification unit for reporting information,
The notifying unit determines whether the carrier is in the reference position in the vertical direction from the detection result of the detection sensor, with the position of the carrier in the vertical direction when the carrier is placed on the mounting unit as a reference position. If the detection sensor determines that the presence sensor is present and the detection sensor determines that the carrier is at the reference position in the up-down direction, a normal notification is made that the carrier is normally placed on the placement unit. The carrier mounting device, wherein when the detection sensor determines that the carrier is not in the reference position in the vertical direction, an abnormality is notified that the carrier is not normally mounted on the mounting unit. The carrier mounting apparatus according to claim 1,
If the detection unit determines that the presence sensor is absent and the detection sensor determines that the carrier is in the reference position in the vertical direction, the notification unit is abnormal if the carrier is not normally placed on the placement unit. A carrier mounting device that notifies that the carrier is not mounted when the detection sensor determines that the carrier is not in the reference position in the vertical direction. In the carrier mounting apparatus according to claim 1 or 2,
The presence / absence sensor is a carrier mounting device including a light projecting unit that emits detection light into a space occupied by a carrier and a light receiving unit that receives the detection light.

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