JP2006303094A5 - - Google Patents

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Publication number
JP2006303094A5
JP2006303094A5 JP2005121096A JP2005121096A JP2006303094A5 JP 2006303094 A5 JP2006303094 A5 JP 2006303094A5 JP 2005121096 A JP2005121096 A JP 2005121096A JP 2005121096 A JP2005121096 A JP 2005121096A JP 2006303094 A5 JP2006303094 A5 JP 2006303094A5
Authority
JP
Japan
Prior art keywords
window member
ultraviolet
container
optical system
ultraviolet light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005121096A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006303094A (ja
JP4618552B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005121096A priority Critical patent/JP4618552B2/ja
Priority claimed from JP2005121096A external-priority patent/JP4618552B2/ja
Publication of JP2006303094A publication Critical patent/JP2006303094A/ja
Publication of JP2006303094A5 publication Critical patent/JP2006303094A5/ja
Application granted granted Critical
Publication of JP4618552B2 publication Critical patent/JP4618552B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2005121096A 2005-04-19 2005-04-19 紫外光学装置および光源装置 Expired - Lifetime JP4618552B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005121096A JP4618552B2 (ja) 2005-04-19 2005-04-19 紫外光学装置および光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005121096A JP4618552B2 (ja) 2005-04-19 2005-04-19 紫外光学装置および光源装置

Publications (3)

Publication Number Publication Date
JP2006303094A JP2006303094A (ja) 2006-11-02
JP2006303094A5 true JP2006303094A5 (enExample) 2008-04-03
JP4618552B2 JP4618552B2 (ja) 2011-01-26

Family

ID=37471047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005121096A Expired - Lifetime JP4618552B2 (ja) 2005-04-19 2005-04-19 紫外光学装置および光源装置

Country Status (1)

Country Link
JP (1) JP4618552B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105493235B (zh) * 2013-09-13 2017-05-24 优志旺电机株式会社 光照射装置
CN112768341B (zh) * 2021-01-27 2025-07-01 北京华泰诺安探测技术有限公司 一种多窗口紫外灯及其制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH083447B2 (ja) * 1987-05-27 1996-01-17 工業技術院長 光学測定装置
JPH0729804A (ja) * 1993-07-14 1995-01-31 Canon Inc 光源装置及び該光源装置を備える紫外線照射装置
JPH1154852A (ja) * 1997-08-06 1999-02-26 Nikon Corp 紫外線レーザ用光学装置
JP2001281050A (ja) * 2000-03-30 2001-10-10 Canon Inc 光検出装置、露光装置、デバイス製造方法、半導体製造工場および露光装置の保守方法
JP4004895B2 (ja) * 2002-08-29 2007-11-07 株式会社フジクラ 光学装置

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