JP2006290630A6 - - Google Patents

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Publication number
JP2006290630A6
JP2006290630A6 JP2005046859A JP2005046859A JP2006290630A6 JP 2006290630 A6 JP2006290630 A6 JP 2006290630A6 JP 2005046859 A JP2005046859 A JP 2005046859A JP 2005046859 A JP2005046859 A JP 2005046859A JP 2006290630 A6 JP2006290630 A6 JP 2006290630A6
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005046859A
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Japanese (ja)
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JP2006290630A (ja
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Priority to JP2005046859A priority Critical patent/JP2006290630A/ja
Priority claimed from JP2005046859A external-priority patent/JP2006290630A/ja
Publication of JP2006290630A publication Critical patent/JP2006290630A/ja
Publication of JP2006290630A6 publication Critical patent/JP2006290630A6/ja
Pending legal-status Critical Current

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JP2005046859A 2005-02-23 2005-02-23 レーザを用いたガラスの加工方法 Pending JP2006290630A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005046859A JP2006290630A (ja) 2005-02-23 2005-02-23 レーザを用いたガラスの加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005046859A JP2006290630A (ja) 2005-02-23 2005-02-23 レーザを用いたガラスの加工方法

Publications (2)

Publication Number Publication Date
JP2006290630A JP2006290630A (ja) 2006-10-26
JP2006290630A6 true JP2006290630A6 (enrdf_load_stackoverflow) 2006-12-28

Family

ID=37411613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005046859A Pending JP2006290630A (ja) 2005-02-23 2005-02-23 レーザを用いたガラスの加工方法

Country Status (1)

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JP (1) JP2006290630A (enrdf_load_stackoverflow)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4734569B2 (ja) * 2006-07-12 2011-07-27 国立大学法人長岡技術科学大学 ガラス材料の加工法
US8603351B2 (en) 2007-05-25 2013-12-10 Hamamatsu Photonics K.K. Working method for cutting
JP5608444B2 (ja) * 2010-07-01 2014-10-15 武二 新井 ガラス製マイクロレンズアレイの製造方法
US9108269B2 (en) 2010-07-26 2015-08-18 Hamamatsu Photonics K. K. Method for manufacturing light-absorbing substrate and method for manufacturing mold for making same
EP2599579B1 (en) 2010-07-26 2020-03-11 Hamamatsu Photonics K.K. Method for manufacturing semiconductor device
JP5693074B2 (ja) 2010-07-26 2015-04-01 浜松ホトニクス株式会社 レーザ加工方法
WO2012014722A1 (ja) 2010-07-26 2012-02-02 浜松ホトニクス株式会社 基板加工方法
WO2012014724A1 (ja) 2010-07-26 2012-02-02 浜松ホトニクス株式会社 基板加工方法
EP2599576B1 (en) 2010-07-26 2019-12-11 Hamamatsu Photonics K.K. Laser processing method
EP2600397B1 (en) 2010-07-26 2019-08-21 Hamamatsu Photonics K.K. Method for manufacturing interposer
JP5653110B2 (ja) 2010-07-26 2015-01-14 浜松ホトニクス株式会社 チップの製造方法
EP2599577A4 (en) 2010-07-26 2016-06-15 Hamamatsu Photonics Kk LASER PROCESSING
JP5702556B2 (ja) 2010-07-26 2015-04-15 浜松ホトニクス株式会社 レーザ加工方法
JP5574866B2 (ja) 2010-07-26 2014-08-20 浜松ホトニクス株式会社 レーザ加工方法
US8961806B2 (en) 2010-07-26 2015-02-24 Hamamatsu Photonics K.K. Laser processing method
CN103237771B (zh) * 2010-11-30 2016-10-19 康宁股份有限公司 在玻璃中形成高密度孔阵列的方法
JP5942558B2 (ja) * 2012-04-13 2016-06-29 並木精密宝石株式会社 微小空洞形成方法
JP2016070900A (ja) * 2014-10-02 2016-05-09 セイコーエプソン株式会社 磁気計測装置の製造方法、ガスセルの製造方法、磁気計測装置、およびガスセル
TW201704177A (zh) 2015-06-10 2017-02-01 康寧公司 蝕刻玻璃基板的方法及玻璃基板
US20180340262A1 (en) * 2015-08-31 2018-11-29 Nippon Sheet Glass Company, Limited Method for producing glass with fine structure
US10410883B2 (en) 2016-06-01 2019-09-10 Corning Incorporated Articles and methods of forming vias in substrates
US10134657B2 (en) 2016-06-29 2018-11-20 Corning Incorporated Inorganic wafer having through-holes attached to semiconductor wafer
US10794679B2 (en) 2016-06-29 2020-10-06 Corning Incorporated Method and system for measuring geometric parameters of through holes
US11078112B2 (en) 2017-05-25 2021-08-03 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same
US10580725B2 (en) 2017-05-25 2020-03-03 Corning Incorporated Articles having vias with geometry attributes and methods for fabricating the same
US12180108B2 (en) 2017-12-19 2024-12-31 Corning Incorporated Methods for etching vias in glass-based articles employing positive charge organic molecules
US11554984B2 (en) 2018-02-22 2023-01-17 Corning Incorporated Alkali-free borosilicate glasses with low post-HF etch roughness
JP7230650B2 (ja) 2019-04-05 2023-03-01 Tdk株式会社 無機材料基板の加工方法、デバイス、およびデバイスの製造方法
JP7116926B2 (ja) * 2019-04-23 2022-08-12 日本電気硝子株式会社 ガラス板の製造方法、及びガラス板、並びにガラス板集合体
JP7028418B2 (ja) * 2020-04-27 2022-03-02 株式会社Nsc 貫通孔を有するガラス基板製造方法および表示装置製造方法
CN111799169B (zh) * 2020-07-17 2024-05-28 绍兴同芯成集成电路有限公司 一种飞秒激光结合hf湿蚀刻加工tgv的工艺
CN114988711A (zh) * 2022-06-08 2022-09-02 广东工业大学 一种通过预设应力辅助玻璃图案化的成型方法
CN115385578B (zh) * 2022-07-29 2023-11-28 惠州市清洋实业有限公司 一种摄像头镜片化学打孔制造工艺

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