JP2006290504A - Device and method for correction, carriage, inspection, and manufacture of band-like flexible member - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a correction device and a correction method for securing flatness of a band-like flexible member formable in a planar shape. <P>SOLUTION: The band-like flexible member 10 is slid on a carrying plate 22 with a flat carrying face provided on upper face, and gas is jetted on the band-like flexible member 10 from above to improve flatness of the band-like flexible member 10. While keeping the flatness by the correction method, an optical inspection machine 25 checks foreign matter on or fault in the band-like flexible member 10. Therefore, a manufacturing device for the band-like flexible member 10 having the correction/inspection functions is constituted. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a correction device for a strip-like flexible member such as a film, a transport device, an inspection device and a manufacturing apparatus, a correction method for a strip-like flexible member such as a film, a transport method, an inspection method, and a manufacturing method.

  Conventionally, when a belt-like flexible member is transported in a manufacturing process of a belt-like flexible member such as a film or a production process of a product using the belt-like flexible member, it is generally transported to the end of the belt-like flexible member. Transportation was performed while contacting the means and applying a tensile force in the conveyance direction to the belt-like flexible member. However, in such an apparatus, although the belt-shaped flexible member can be transported, when the distance between the supply roll and the hoisting roll is long, or when the distance between the transport rolls is long, the direction perpendicular to the transport direction is obtained. The band-shaped flexible member may bend in the direction, and the ends on both sides may be curled (curved) upward. For this reason, when optically inspecting a defect such as a foreign object or a flaw on the strip-shaped flexible member, the surface of the strip-shaped flexible member to be inspected does not enter the depth of focus due to the curvature, or a small scratch is generated. There has been a problem of overlooking (see the prior art in Patent Document 1).

  The invention described in Patent Document 1 has been made in order to avoid such problems, and the flatness of the film for optically inspecting the film corresponding to the strip-like flexible member referred to in the present invention. We have proposed a straightening device that holds

This correction apparatus will be described with reference to FIGS. FIG. 6 is a side view showing the conventional correction device, and FIG. 7 is a plan view of the correction device. This straightening device includes two pieces that sandwich the film 101 between the left and right sides of the film 101 in the vicinity of a position where the film 101 as a strip-like flexible member conveyed by being pulled in the conveyance direction by a guide roll is optically inspected. Each of the pressure rolls 102 is provided with a roll 103. In each pressure roll 102, the film 101 is sandwiched by applying pressure between the two rolls 103, and a tensile force that pulls the film 101 in a direction perpendicular to the transport direction is generated by the sandwiching force. That is, in this correction device, the pressure roll 102 on the left side with respect to the conveyance direction of the film 101 (the white arrow in FIGS. 6 and 7) rotates so that a tensile force pulling the film 101 to the left side with respect to the conveyance direction works. The shaft 104 is tilted to the left by a predetermined angle Θ. Further, the right pressure roll 102 has the rotation shaft 104 tilted to the right by a predetermined angle Θ so that a tensile force that pulls the film 101 to the right with respect to the transport direction works. As a result, the film 101 receives the tensile force F in the direction perpendicular to the conveyance direction by the two pressure rolls 102 together with the tensile force in the conveyance direction. In this way, the film 101 is configured to maintain flatness by the tensile force in the transport direction and the tensile force F in the direction perpendicular to the transport direction. 6 and 7, reference numerals 105, 106, 107, and 108 denote guide rolls.
JP 2000-118815 A (2nd page, 3rd page, FIG. 1)

  However, in the case of the above-described conventional straightening device, the pressure roll 102 is installed, and the bearing for fixing the shaft of the pressure roll 102 and the film 101 are sandwiched between the two rolls 103, and the two rolls 103 are inserted. It was necessary to provide a pressurizing means for pressurizing the gap. For this reason, there has been a problem that the correction device becomes structurally complicated and becomes large in space. Further, in order to facilitate the sandwiching of the film 101 and reduce the applied pressure, it is conceivable that the material of the two rolls 103 is elastic, but the film 101 is passed between the two rolls 103. There was a problem that it became difficult. Furthermore, there is a problem that the balance of the frictional force between the right and left pressure rolls 102 is lost, and the film 101 tends to meander. If the film 101 meanders, an error occurs in the foreign matter or / and defect coordinates, which causes a problem that inspection reliability is lowered. In addition, when a sticky substance such as a binder resin is exposed on the surface during the manufacturing process as in the case of manufacturing a film adhesive, the pressure roll 102 touches the sticky surface. This causes a problem that foreign matter is likely to adhere.

  Therefore, as a method of holding the belt-like flexible member in a plane without using the pressure roll as described above, it is conceivable to increase the guide rolls to shorten the distance between the supports. In this case, since the effect of correcting the curl at both ends of the strip-shaped flexible member does not appear only by the line contact between the additional guide roll and the strip-shaped flexible member, the strip-shaped flexible member is large on the guide roll. It is necessary to be wound at an angle (holding angle) and make surface contact. However, in this case, there is a problem that the transfer line cannot be formed in a plane. FIG. 8 specifically shows such an example.

  FIG. 8 shows a part of the manufacturing process of the film-like adhesive as an example. The belt-like flexible member 201 in a state where the adhesive binder resin is exposed on the upper surface is shown as the belt-like flexible member 201. A tensile force is applied on the surface to keep it flat. The strip-shaped flexible member 201 referred to here is a form that appears in the production process of a film adhesive, that is, a base film alone, a film in which a film adhesive portion is formed on the base film, and this film A cover film laminated on the adhesive part. This will be specifically described. A solution extruded from the solution nozzle 204 (for example, an adhesive solution in which conductive particles are dispersed in a binder resin) is applied onto the substrate film 203 unwound from the substrate unwinding roll 202. To do. And the strip | belt-shaped flexible member 201 with which the solution 205 was coated is conveyed by the guide rolls 211-216 arrange | positioned so that the holding angle of the strip | belt-shaped flexible member 201 may become large. The strip-shaped flexible member 201 coated with the solution 205 is formed into a film in a drying furnace 206, passes through an inspection device 207, and then a cover film 221 is laminated on the film to take up a roll. It is wound by 222. The cover film 221 is supplied from the cover unwinding roll 223 to the guide roll 216 on the upstream side of the winding roll 222.

  The inspection device 207 includes a plurality of cameras 207a and a light source 207b so as to improve the camera resolution. The plurality of cameras 207a are used for the following reason. That is, in order to capture the entire width of the strip-shaped flexible member 201 with the camera 207a, the total of the visual fields of at least a plurality of cameras 207a must be equal to or greater than the total width of the strip-shaped flexible member 201. Therefore, the number of necessary cameras 207a is an integer value that exceeds the value obtained by dividing the full width dimension of the strip-shaped flexible member 201 by the visual field width dimension of the camera 207a. On the other hand, in order to improve the resolution of the camera 207a, it is necessary to use a high-power lens, and the camera 207a using the high-power lens has a small field width. For this reason, if the resolution of the camera 207a is improved, the number of cameras 207a increases. In addition, since the size of the camera body is usually larger than the field of view of the camera 207a, the cameras cannot be arranged in one row in the width direction of the belt-like flexible member 201. For this reason, in the thing of FIG. 8, the camera 207a and the light source 207b are shifted and arrange | positioned in the conveyance direction of the strip | belt-shaped flexible member 201. FIG.

  Further, in the inspection region of the inspection apparatus 207, in order to maintain the flatness of the strip-shaped flexible member 201, the distance between the guide rolls 213 and 214 is formed as short as possible, and the strip-shaped flexible member 201 is held. The angle is increased so that the correction effect by the guide rolls 213 and 214 reaches the inspection region. That is, in order to secure the holding angle of the guide roll 213 on the upstream side of the inspection device 207, the path from the base material unwinding roll 202 to the inspection device 207 is arranged to face upward. Further, in order to secure a holding angle in the guide roll 214 on the downstream side of the inspection apparatus 207, the downstream side of the guide roll 214 is configured to face downward. In the case of such a configuration, since it is necessary to form the conveyance path in a three-dimensional manner in the vertical direction, an upper and lower space is required at the installation location. In general, such facilities are often installed in a clean room. Therefore, considering the initial investment and maintenance cost of the clean room, it is more economical to have a small installation volume.

  As another method, a method in which the belt-like flexible member 201 is pressed by a guide roll from the upper surface side and the transport process is configured in a plane can be considered. However, when the belt-like flexible member 201 is such that an adhesive film is formed on the upper surface of the base film 203, there is a problem that foreign matters and scratches due to the guide roll are transferred. .

  Therefore, in such a manufacturing apparatus, it is difficult to configure the transport process in a plane. In addition, since the flatness of the belt-like flexible member 201 is maintained between the pair of guide rolls 213 and 214, the distance between the pair of guide rolls 213 and 214 is formed by forming the inspection device 207 using transmitted illumination. When the thickness increases, the fluttering of the strip-shaped flexible member 201 becomes large, and problems such as curling of the widthwise edge of the strip-shaped flexible member 201 may occur, which may impair the reliability of inspection.

  For this reason, as shown in FIG. 9, the cameras 305, 306, and 307 are configured to irradiate the epi-illumination onto the guide rolls 302, 303, and 304 for conveying the belt-like flexible member 301. For example, it is possible to devise a plan to avoid the configuration in which the flatness of the strip-shaped flexible member 201 is maintained between the pair of guide rolls 213 and 214 described above. However, even when the epi-illumination is used in this way, it is necessary to transport the strip-shaped flexible member 301 so as not to float on the guide rolls 302, 303, and 304 in order to improve the reliability of the inspection. It is. For this purpose, it is necessary to secure a holding angle of a certain angle or more in the guide rolls 302, 303, and 304, and it is necessary to make the conveying process a mountain shape in the vertical direction as shown in FIG. For this reason, also in this case, the transfer process cannot be formed in a plane.

  Further, as another method for solving such a problem, as shown in FIG. 10, guide rolls 308, 309, 310, and 311 are newly installed between the guide rolls 302, 303, and 304 so as to be flexible in a strip shape. It is also conceivable that the conveying member is pressed down from the upper surface side and the conveying process is constructed in a substantially planar manner. However, when the belt-like flexible member 301 is such that an adhesive film is formed on the base film, foreign matter or scratches are caused by the guide rolls 308, 309, 310, 311. Is difficult to apply because there is a problem that is transferred.

  The present invention has been made in view of the problems associated with the prior art, and it is an object of the present invention to provide a correction apparatus and correction method for a strip-like flexible member that can be constructed in a planar manner. . The present invention also provides a belt-like flexible member conveying apparatus, inspection apparatus, and manufacturing apparatus to which such a correction apparatus is applied, and a belt-like flexible member conveying method and inspection method using such a correction method. And it aims at providing a manufacturing method.

  The correction apparatus for a strip-shaped flexible member according to the present invention achieves the above-described problem, and includes a transport plate having a planar transport surface on which the strip-shaped flexible member is slid on the upper surface, and the transport surface. On the other hand, a gas injection device for injecting gas from above is provided.

  According to the present invention, the belt-shaped flexible member is pressed along the transport surface of the planar transport plate by the gas ejected from the gas ejection device, so that the belt-shaped flexible member is maintained so as to maintain flatness on the transport plate. Sexual members can be corrected. Thus, the correction apparatus of the present invention does not require the guide rolls to be disposed before and after the correction apparatus, and even if the guide rolls are disposed, it is not necessary to give a large holding angle to each of these guide rolls. . Therefore, the transport process can be easily configured in a plane. Moreover, in the correction apparatus of this invention, since a strip | belt-shaped flexible member is not pinched | interposed with a pressure roll like the past, and it is non-contact, it does not damage a strip | belt-shaped flexible member with a pressure roll. . Further, there is no worry that the balance of the frictional force of the pressure rolls pulled in the left-right direction is lost and the belt-like flexible member meanders. Moreover, since there is no pressure roll, there is no generation | occurrence | production of the abrasion powder by abrasion of a pressure roll which causes a foreign material to adhere to a strip | belt-shaped flexible member. Furthermore, the cleanliness of the strip-shaped flexible member can be kept high by blowing clean air from the gas injection device. In addition, the flatness of the band-shaped flexible member can be corrected in a non-contact manner without pressing or sandwiching the band-shaped flexible member with a roll or the like, so that the surface is sticky. It can be set as the correction apparatus suitable for correcting the flatness of a strip | belt-shaped flexible member.

  Moreover, in the correction apparatus of this invention, it is preferable that a conveyance plate avoids that a strip | belt-shaped flexible member adsorb | sucks to a conveyance surface. For this purpose, it is preferable that the conveyance surface is subjected to a surface treatment for preventing adsorption of the band-shaped flexible member. In this way, since the surface treatment of the conveyance surface is sufficient, the selection range of the material of the conveyance plate can be expanded. In this case, as the surface treatment for preventing adsorption, it is preferable to coat a fluororesin. Further, the transport plate itself may be formed of a fluororesin so that the surface treatment for preventing adsorption may not be performed.

  Further, the transport plate may be configured to be grounded from a conductive material such as metal. Since the strip-shaped flexible member is slid on the transport surface of the transport plate, the transport plate and the strip-shaped flexible member may be charged by contact and friction between the strip-shaped flexible member and the transport plate. In this case, a Coulomb force is generated between the strip-shaped flexible member and the transport plate, and the strip-shaped flexible member and the transport plate are attracted to make it difficult to smoothly transport the strip-shaped flexible member. Foreign matter may easily adhere to the flexible member. In addition, when the charge amount of the transport plate increases, electrostatic discharge may occur when another substance approaches, causing a spark. However, as described above, if the transport plate is made of a conductive material such as metal and is grounded, even if static electricity is generated on the transport plate, it can flow to the ground more and more. It can be avoided, and it is possible to prevent the occurrence of a spark that causes a fire between the belt-shaped flexible member and the transport plate due to charging of the transport plate and a fire. In addition, about static elimination of a strip | belt-shaped flexible member, it is preferable to neutralize by another methods, such as mixing ion in the gas sprayed on a conveyance surface so that it may mention later.

  In place of the above method, the transport plate may be grounded by applying a conductive coating such as metal plating. In this way, the insulating transport plate can be made conductive, and charging of the transport plate can be prevented as in the case of the transport plate made of the conductive material described above. Therefore, also in this case, the belt-like flexible member can be smoothly conveyed and the occurrence of a spark that causes a fire can be prevented.

  Moreover, the correction | amendment apparatus of the strip | belt-shaped flexible member which concerns on this invention WHEREIN: The gas injected from the said gas injection apparatus can be made into air. If the gas to be injected is air, there is no fear of an oxygen deficiency accident, so that the injected gas can be discharged to the periphery of the apparatus and processed. Therefore, the correction device can be simplified. Thus, if the gas to be injected is air, it is safe and inexpensive and easy to handle. In addition, when it is necessary to prevent the oxidation of the surface of a strip | belt-shaped flexible member, the objective can be achieved by making the gas ejected from a gas-injection apparatus into an inert gas.

  Further, depending on the material of the transport plate and the material of the strip-shaped flexible member, static electricity is easily generated in the strip-shaped flexible member by transporting the strip-shaped flexible member on the transport plate. In particular, when the transport plate is made of glass and the film of the strip-shaped flexible member that contacts the transport plate is made of polyethylene terephthalate (PET), the strip-shaped flexible member and the transport plate are used. The belt-like flexible member and the transport plate are likely to be charged with static electricity by contact with and friction. Further, when the belt-shaped flexible member is run while being guided by the guide roll, peeling discharge occurs due to peeling from the guide roll, and the belt-shaped flexible member is charged. When the strip-like flexible member is charged in this way, there is a problem that foreign matters are likely to adhere to the strip-like flexible member. In the present invention, in order to prevent such charging, the gas injection device has a static elimination function for neutralizing the belt-shaped flexible member by mixing positive ions and negative ions in the gas jetted from the gas injection device. It can also be configured to. In the case where the gas injection device has such a charge eliminating function, in consideration of the gas injection amount from the gas injection device, the air flow treatment method of the injected gas, etc., if sufficient ions are supplied to the transport plate, The ions can be removed from the transport plate by these ions. Of course, as described above, the method of grounding the transport plate may be employed for the charge removal of the transport plate.

  The belt-shaped flexible member transport device according to the present invention includes any one of the correction devices described above between a pair of guide rolls that transport the belt-shaped flexible member. According to such a transport apparatus, since the correction device that holds the belt-shaped flexible member in a flat surface without giving a holding angle to the guide roll is provided, it is necessary to form the transport process in three dimensions in the vertical direction. And can be formed substantially flat. Moreover, in this correction apparatus, since the pressure roll which pulls a strip | belt-shaped flexible member right and left is not used, there is no possibility that a strip | belt-shaped flexible member meanders. Further, since the correction device is non-contact, the band-shaped flexible member is not scratched or foreign matter is not attached to the correction device. Moreover, since it is equipped with a non-contact type correction device, it can be easily used as a conveying device for a strip-like flexible member whose surface is adhesive.

  In addition, the belt-shaped flexible member transport device according to the present invention includes any of the correction devices described above between the belt-shaped flexible member unwinding roll and the belt-shaped flexible member winding roll. You can also Since such a transport apparatus includes the same correction device as that in the above-described transport apparatus, the belt-shaped flexible member may meander, the belt-shaped flexible member may be damaged in the correction device, or the band-shaped flexibility. There is no fear of foreign matters adhering to the member, and the belt-like flexible member can be kept clean. Moreover, by comprising in this way, the conveyance apparatus of the roll-to-roll system provided with the correction apparatus applicable to an adhesive strip | belt-shaped flexible member can be provided.

  The inspection apparatus according to the present invention includes any one of the correction apparatuses described above and an optical inspection machine that optically inspects the foreign matters or / and defects of the belt-like flexible member conveyed on the correction apparatus. It is characterized by having. According to the inspection apparatus configured as described above, since the line configuration is substantially planar, it is easy to arrange devices such as a camera and a light source. In addition, an inspection apparatus can be constructed as long as a horizontal space can be secured. For this reason, it is easy to construct as an in-line inspection apparatus in a manufacturing apparatus of a strip-shaped flexible member or as an offline inspection apparatus dedicated to inspection. Further, by injecting the gas, curling (curving) of the entire width in the direction perpendicular to the conveying direction of the belt-like flexible member and curling of both ends of the belt-like flexible member can be prevented. Focus shift can be prevented, and inspection accuracy can be improved. Furthermore, since there is no damage to the belt-like flexible member and no foreign matter adheres to the belt-like flexible member, a highly reliable inspection apparatus can be provided.

  In such an inspection apparatus, a camera may be disposed on either the upper or lower side of the transport plate, a light source may be disposed on the other side, and a through hole may be formed in the field of view of the camera on the transport plate. With this configuration, light can efficiently reach the camera. In the inspection apparatus described above, the transport plate may be formed of a transparent member. In this case, the through hole can be omitted.

  Further, in the inspection apparatus of the present invention, a plurality of cameras may be configured so as to inspect the entire width of the belt-shaped flexible member, and the plurality of cameras may be arranged in a staggered manner as a plurality of rows in the transport direction. When the cameras are arranged in a plurality of rows, the conventional camera as shown in FIG. 8 has a problem in that the distance between the guide rolls becomes long, and fluttering or curling of the belt-like flexible member is likely to occur. In order to avoid this, it was necessary to arrange the guide rolls by the number of camera rows. Furthermore, it is necessary to dispose a guide roll in front of the inspection apparatus and maintain the holding angle of the guide roll, and a space for the inspection apparatus in the vertical direction is required. On the other hand, in the case of an apparatus for inspecting while maintaining the flatness of the belt-like flexible member by injecting gas onto the transport plate as in the present invention, the inspection line is set even if the camera has a plurality of rows. Since it can be formed substantially horizontally and the camera rows can be arranged on the same horizontal plane, an inspection line can be easily constructed as long as a horizontal space can be secured. For this reason, the conveyance line can be easily routed. Further, since the plurality of cameras are arranged in a staggered manner, it is possible to arrange the cameras in a compact manner and to place the entire width of the belt-like flexible member in the field of view of the camera while avoiding the interference of the bodies between the cameras.

  Moreover, in the inspection apparatus of this invention, it can also be set as the structure which has arrange | positioned the correction apparatus and the optical inspection machine between the unwinding roll of a strip | belt-shaped flexible member, and the winding roll of a strip | belt-shaped flexible member. With such a configuration, an off-line inspection apparatus in which an inspection line similar to the above-described inspection apparatus is constructed can be easily provided.

  Moreover, the manufacturing apparatus of the strip | belt-shaped flexible member of this invention was equipped with the above inspection apparatuses between a pair of guide rolls in the manufacturing line of a strip | belt-shaped flexible member. If comprised in this way, since a conveyance line including the apparatus before and behind an inspection apparatus can be constructed | assembled substantially flat, the manufacturing apparatus which is cheap and can be ensured easily in space can be provided. In addition, since the above-described inspection apparatus is incorporated in the production line, it is possible to provide a manufacturing apparatus for a strip-shaped flexible member having a highly accurate and reliable inspection function.

  In the method for correcting a strip-shaped flexible member according to the present invention, in the transporting process for transporting the strip-shaped flexible member, the strip-shaped flexible member is slid on the transport surface on the top surface of the transport plate and slid on the transport surface. The belt-like flexible member is characterized in that gas is ejected from a gas jetting device and the belt-like flexible member is pressed against the conveyance surface. If comprised in this way, a strip | belt-shaped flexible member can be corrected so that curl etc. may be prevented and non-contact and flatness may be hold | maintained, without pinching and pulling an edge part with a pressure roll etc. Therefore, according to this correction method, the correction line and the lines before and after the correction line can be formed substantially flat. Further, the belt-like flexible member can be corrected without damaging the belt-like flexible member or adhering foreign matter to the belt-like flexible member during correction, and the surface is sticky. Even so, it can be easily corrected.

  According to the method for inspecting a strip-shaped flexible member according to the present invention, the strip-shaped flexible member is transported so as to slide on the transport surface on the top surface of the transport plate, and gas injection is performed on the strip-shaped flexible member sliding on the transport surface. It is configured to inspect foreign matters or / and defects of the strip-shaped flexible member by an optical inspection machine while jetting gas from the apparatus and pressing the strip-shaped flexible member against the conveying surface to correct the strip-shaped flexible member. It is characterized by that. Therefore, since the inspection is performed while correcting the strip-shaped flexible member by the correction method described above, it is possible to perform a high-precision inspection without a focus shift. Further, at the time of correction, a highly reliable inspection can be performed without damaging the strip-shaped flexible member or attaching foreign matter to the strip-shaped flexible member.

  In such an inspection method, the belt-shaped flexible member may be neutralized by mixing positive ions and negative ions in the gas ejected from the gas ejection device. In this way, since charging of the belt-shaped flexible member can be removed, adhesion of foreign matter to the belt-shaped flexible member can be further reduced.

  Moreover, since the manufacturing method of the strip | belt-shaped flexible member by this invention incorporates the above-mentioned test | inspection method in the manufacturing line of a strip | belt-shaped flexible member, flattening of a conveyance line is possible, incorporating an inspection apparatus. To do. Further, it is possible to perform manufacturing incorporating the above-described high-precision and high-reliability inspection method. Moreover, the manufacturing method suitable for the strip | belt-shaped flexible member with the adhesive surface can be provided.

  According to the present invention, a large tensile force in the transport direction is applied to the strip-shaped flexible member without applying a force to pull the strip-shaped flexible member in the left-right direction with respect to the transport direction using the pressure roller. Since the gas is ejected from above to the belt-like flexible member without maintaining the flatness of the belt-like flexible member, the guide rolls arranged before and after the correction line There is no need to give a hug angle. Therefore, the conveyance line including the correction line and the lines before and after the correction line can be configured in a planar manner. In addition, since correction can be performed in a non-contact manner, the belt-shaped flexible member can be inspected with high accuracy and high reliability without scratching or adhering foreign matter. The manufacturing apparatus of the strip | belt-shaped flexible member provided with the equipment can be provided.

(Embodiment 1)
Hereinafter, the first embodiment of the present invention will be described in detail with reference to FIGS. FIG. 1 is an overall configuration diagram of a film-like adhesive manufacturing apparatus as one embodiment. 2 is a plan view of a foreign object defect inspection apparatus provided in the manufacturing apparatus, and FIG. 3 is a sectional view taken along line III-III in FIG.

  The manufacturing apparatus shown in FIG. 1 is an apparatus for manufacturing a film adhesive. As shown in FIG. 1, in this manufacturing apparatus, the base film 1 of a film adhesive is unwound from the base material unwinding roll 2 (unwinding process). As the base film 1, polyethylene terephthalate (PET) is preferable. An adhesive solution 3 in which conductive particles are dispersed in a binder resin is stored in a solution tank 4. The solution tank 4 is maintained at a predetermined pressure by nitrogen gas (N2 gas). And the solution 3 in the solution tank 4 is extruded from the solution nozzle 5 arrange | positioned facing the base film 1 with nitrogen gas pressure, and is coated on the base film 1 (coating process). The position where the solution 3 is applied is vertical between the second guide roll 8 and the third guide roll 9 when the base film 1 unwound from the base roll 2 is passed through the first guide roll 7. Is carried out on a conveyance line held in the machine. In this position, the second guide roll 8 and the third guide roll 9 apply a relatively large tensile force to the base film 1 so that the base film 1 is in tension. Can be applied to.

  The strip-shaped flexible member 10 coated with the solution 3 on the base film 1 is transported horizontally during the period from the third guide roll 9 to the fourth guide roll 11. Then, the belt-shaped flexible member 10 is transported to the drying furnace 12 on the transport line arranged horizontally, and is heated and dried in the drying furnace 12 to form a film (drying step). This film-like material is used as a film-like adhesive, and this film-like material will be described below as the film-like adhesive portion 3a in the belt-like flexible member 10.

  The strip-shaped flexible member 10 on which the film adhesive part 3 a is formed is supplied to the foreign object defect inspection apparatus 20. The foreign object defect inspection apparatus 20 detects the presence or absence of defects such as foreign objects and scratches on the belt-like flexible member 10 by optical means. This foreign matter defect inspection apparatus 20 constitutes an inspection apparatus according to the present invention. For this purpose, the foreign object defect inspection apparatus 20 includes a correction device 21 for holding the strip-shaped flexible member 10 horizontally, and a surface of the strip-shaped flexible member 10 in a state of being held horizontally by the correction device 21. And an optical inspection machine 25 for inspecting defects.

  The correction device 21 includes a transport plate 22 having a planar transport surface, and the belt-shaped flexible member 10 is slid on the transport plate 22. The transport plate 22 is made of a metallic material having a smooth surface or a material such as glass. Further, the correction device 21 is provided with a gas injection device 23 for injecting gas above the transport plate 22. Then, gas is blown from above onto the belt-like flexible member 10 that slides on the transport plate 22 by the gas injection device 23. Thus, the flatness of the inspection target portion of the strip-shaped flexible member 10 is maintained by pressing the strip-shaped flexible member 10 against the transport surface of the transport plate 22 (correction process). In addition, depending on the material of the conveyance plate 22 and the material of the base film 1 by this pressing, the belt-shaped flexible member 10 may be blocked (adsorbed) by the conveyance plate 22 and may not be smoothly conveyed. For example, when the base film 1 is a polyethylene terephthalate film (PET film) and the transport plate 22 is made of glass, blocking is likely to occur. As a method for avoiding this, it is preferable that the conveyance surface of the conveyance plate 22 is subjected to a surface treatment for preventing adsorption. As this surface treatment, it is effective to coat a fluororesin. In place of this process, the transport plate 22 may be made of a fluororesin. Examples of the fluororesin include polytetrafluoroethylene (PTFE), tetrafluoroethylene (TFE) -hexafluoropropylene (FEP) copolymer, and the like. In particular, polytetrafluoroethylene is effective.

  Further, the transport plate 22 may be grounded so as not to be charged reliably. In the case of grounding, when the transport plate 22 is made of a conductive material such as metal, the transport plate 22 is grounded as it is. When the transport plate 22 is formed of an insulating material, the surface is grounded by applying a conductive metal plating, a conductive resin coating or the like to the surface. The transport plate 22 is charged together with the strip-shaped flexible member 10 by sliding and contacting the strip-shaped flexible member 10 by sliding the strip-shaped flexible member 10 on the transport surface on the upper surface. When the transport plate 22 is charged, a Coulomb force is generated between the strip-shaped flexible member 10 and the transport plate 22, and the strip-shaped flexible member 10 and the transport plate 22 are attracted to make the strip-shaped flexible member 10 smooth. It becomes difficult to convey, and it becomes easy for a foreign substance to adhere to a strip | belt-shaped flexible member. In addition, when the charge amount of the transport plate 22 increases, electrostatic discharge may occur when another substance approaches, causing a spark. However, when configured as described above, even if static electricity is generated on the transport plate 22, it can be steadily flown to the ground, so that charging of the transport plate 22 can be avoided. Therefore, it is possible to prevent the occurrence of sparks that cause a fire between the belt-like flexible member 10 and the transport plate 22 due to charging of the transport plate 22 or a fire. In addition, as for the conveyance plate, when the conveyance plate 22 is formed of glass as described above, and the coating surface made of polytetrafluoroethylene is coated on the conveyance surface, it is necessary to impart conductivity to the coating material. As will be described later, in the case where the positive and negative ions are mixed in the gas ejected from the gas injection device 23 to neutralize the belt-shaped flexible member 10, this gas is spread around the transport plate 22. In the case of such a configuration, it is possible to carry out static elimination of the transport plate 22 with this gas. Therefore, in the case of such a configuration, the above-described static elimination by the ground can be omitted.

  On the other hand, in the optical inspection machine 25, a light source 26 is disposed below the transport plate 22, and a camera (in this case, a CCD camera) 27 is disposed above the transport plate 22. The image is formed on the imaging surface of the camera 27 through the conveyance plate 22 and the strip-shaped flexible member 10. Based on the image information of the inspection surface imaged by the camera 27, the determination analysis unit 28 determines a defect such as a foreign object or a scratch. The determination analysis unit 28 is configured to collect and analyze these data and display the data on a display unit or store the data in a memory so that the information is effectively used in a later process. The inspection process in the present invention is a process including the correction process described above. That is, it means a step of inspecting the foreign material or / and the defect of the belt-shaped flexible member 10 by the optical inspection machine 25 while maintaining the flatness of the belt-shaped flexible member 10 by the correction device 21. In this inspection step, the camera 27 is provided with a through-hole 29 in a portion corresponding to the visual field of the camera 27 so that the light from the light source 26 efficiently reaches the camera 27 (see FIGS. 3 and 4). When the transport plate 22 is formed of a material having a high light transmittance such as glass, the through hole 29 is not required.

  A plurality of optical inspection machines 25 are used to capture the entire width of the base film 1 in the field of view of the camera 27 with high resolution. Further, the cameras 27 are arranged in a staggered manner in two rows shifted in the transport direction of the belt-like flexible member 10 in order to arrange them in a compact manner while avoiding interference between the camera bodies. For this reason, as shown in FIG. 2, the through holes 29 are also arranged in a staggered manner in accordance with the arrangement of the camera 27.

  1 to 3, the optical inspection machine 25 has a camera 27 disposed above the transport plate 22 and a light source 26 disposed below the transport plate 22, but this arrangement may be reversed. Good. That is, the camera 27 can be disposed below the transport plate 22 and the light source 26 can be disposed above the transport plate 22. In FIGS. 1 to 3, the optical inspection device 25 is configured by a system using transmitted illumination, but may be configured as epi-illumination. In this case, the transport plate 22 may not be made of a transparent member, and it is not necessary to provide the through hole 29.

  In order to maintain the flatness of the strip-shaped flexible member 10, the gas ejection device 23 ejects gas onto the strip-shaped flexible member 10 and presses the inspection target portion of the strip-shaped flexible member 10 against the transport plate 22. Is for. Therefore, it is preferable that the spraying by the gas injection device 23 is basically performed on the vicinity of the through hole 29. However, this is difficult because the camera body gets in the way. Moreover, since the strip | belt-shaped flexible member 10 is heat-dried with the drying furnace 12, as shown in FIG. 4, the both ends 1a to which the solution 3 is not applied are easy to curl upward. For this reason, as shown in FIGS. 2 and 3, the gas injection device 23 is located at the injection positions 30 that are in the front and rear positions of the camera row that are not obstructed by the camera body and are located at both ends of the belt-like flexible member. Be injected.

  The gas injected from the gas injection device 23 is generally air. If the gas to be injected is air, there is no fear of an oxygen deficiency accident due to the injected gas drifting around the device. Moreover, since the gas to inject is inexhaustible air, it can be used at low cost. Therefore, the configuration of the processing apparatus after spraying can be simplified and the cost can be reduced. In addition, when especially clean air is used, the strip | belt-shaped flexible member 10 can be hold | maintained cleanly and quality can be improved further. Moreover, in this equipment, when a problem occurs when the surface of the strip-shaped flexible member 10 is oxidized, the oxidation can be prevented by using an inert gas.

  The gas injection device 23 is provided with a static eliminator (not shown) that mixes positive ions and negative ions into the gas. This is for neutralizing the charging of the strip-shaped flexible member 10. Since the strip-shaped flexible member 10 is traveled while being guided by the guide roll, peeling discharge occurs due to peeling between the strip-shaped flexible member 10 and the guide roll, so that the strip-shaped flexible member 10 is charged. Further, as described above, the strip-shaped flexible member 10 is charged by contact with the conveyance plate 22 or friction. When the belt-shaped flexible member 10 is charged, a problem that foreign matter easily adheres to the belt-shaped flexible member 10 occurs. Further, when the amount of charge of the strip-shaped flexible member 10 increases, there is a risk of generating a spark that causes a fire when another substance approaches. Under such circumstances, when positive ions and negative ions generated by the static eliminator of the gas injection device 23 are jetted together with the gas from the gas injection device 23 onto the surface of the strip-like flexible member 10, a charged belt-like shape is obtained. The flexible member 10 is neutralized and neutralized. As a result, adhesion of foreign matter to the belt-like flexible member 10 due to charging is prevented. If sufficient ions can be supplied to the transport plate 22 in consideration of the gas injection amount from the gas injection device 23, the airflow treatment method of the injected gas, etc., the transport plate 22 may be neutralized with these ions. it can. Of course, as described above, the method for grounding the transport plate 22 may be employed.

  The strip-shaped flexible member 10 conveyed through the optical inspection machine 25 described above is wound around the winding roll 34 via the fourth guide roll 11 and the fifth guide roll 33 (winding step). However, since the film adhesive part 3a has adhesiveness as it is, handling is difficult. Therefore, a laminating step is provided before reaching the take-up roll 34 in order to facilitate handling as the belt-like flexible member 10. In the laminating step, the cover film 35 covering the film adhesive part 3a is supplied from the cover unwinding roll 36 with the fifth guide roll 33 as a laminating part, and is laminated on the surface part on the film adhesive part 3a side. Is done. The cover film 35 is preferably a polyethylene terephthalate film (PET film) like the base film 1.

  In the strip-shaped flexible member 10 manufactured as described above, the base film 1 and the cover film 35 are peeled off immediately before use, and the film adhesive portion 3a is used as the film adhesive. For example, it is used by being inserted between a portion where electrodes such as a printed wiring board are densely present and a substrate corresponding to those electrodes, and being subjected to pressure bonding or thermocompression bonding.

  In the belt-shaped flexible member manufacturing apparatus configured as described above, the correction device 21 of the belt-shaped flexible member 10 transports the belt-shaped flexible member 10 in a planar manner by the gas ejected from the gas ejection device 23. Since the flatness of the strip-shaped flexible member 10 is corrected by pressing along the conveying surface of the plate 22, guide rolls having a holding angle of the strip-shaped flexible member 10 are arranged before and after the correction device. There is no need. Accordingly, the correction device 21 according to the present invention has a feature that can be constructed in a planar conveyance line, and can be used as a non-contact type correction method.

  In the manufacturing apparatus for the strip-shaped flexible member 10, the correction device 21 having the above-described features is applied to the foreign object defect inspection apparatus 20, and therefore, a conveyance line around the foreign object defect inspection apparatus 20 is constructed in a plane. can do. That is, in the above embodiment, the conveying line from the drying furnace 12 after the solution 3 is applied to the base film 1 to the foreign object defect inspection apparatus 20, that is, from the third guide roll 9 in FIG. The conveyance line reaching the fourth guide roll 11 can be configured in a plane.

  Moreover, in the correction apparatus 21 in this Embodiment, since the pressure roll which pinches | interposes the strip | belt-shaped flexible member 10 and applies a tensile force to the left-right direction like the conventional apparatus is not used, strip | belt-shaped flexibility by a pressure roll is used. The member 10 is not damaged, and foreign matter such as abrasion powder due to wear of the pressure roll is not attached to the belt-like flexible member 10. Moreover, since the pressure roll is not used, meandering of the strip-shaped flexible member 10 due to the unbalanced frictional force of the pressure roll can be prevented, and the apparatus can be simplified.

  Therefore, the foreign substance defect inspection device 20 using such a correction device 21 transports the belt-shaped flexible member 10 without meandering and prevents curling of the belt-shaped flexible member 10 in the direction perpendicular to the transport direction. Therefore, it is possible to perform a highly accurate inspection without a focus shift. Further, the foreign matter defect inspection apparatus 20 is reliable because the strip-shaped flexible member 10 is not damaged in the correction device 21 and foreign matter such as abrasion powder from the pressure roll does not adhere to the strip-shaped flexible member 10. It is possible to perform a highly accurate inspection. Moreover, since the flatness of the strip-shaped flexible member 10 is maintained in a non-contact manner, the foreign object defect inspection apparatus 20 can be easily applied to the strip-shaped flexible member 10 having a sticky surface. be able to.

  Further, in the correction device 21 of the present invention, since the transport plate 22 is grounded to prevent the transport plate 22 from being charged, it prevents the belt-like flexible member 10 and the transport plate 22 from being attracted, It is also possible to prevent the occurrence of a spark that may cause a fire when another substance approaches the transport plate 22. Further, in the correction device 21 of the present invention, when the gas injected from the gas injection device 23 is air, there is no fear of causing an oxygen deficiency accident, and the correction device can be made safe, inexpensive and easy to handle. . Furthermore, the strip-shaped flexible member 10 is charged by charging the strip-shaped flexible member 10 by providing a charge eliminating function for mixing the positive ions and the negative ions in the gas to be ejected to neutralize the strip-shaped flexible member 10. It is possible to prevent the occurrence of sparks that may cause a foreign matter to adhere to 10 or cause a fire.

  In addition, the foreign matter defect inspection apparatus 20 of the present invention is configured as a planar apparatus that inspects while maintaining the flatness of the belt-shaped flexible member 10 by injecting gas onto the transport plate 22, so that the camera 27 is Even if there are a plurality of rows, the camera rows can be arranged on the same horizontal plane. For this reason, the conveyance line can be easily routed. Further, since the plurality of cameras 27 are arranged in a staggered manner, the camera 27 is arranged in a compact manner while avoiding the interference of the bodies between the cameras 27 so that the entire width of the belt-like flexible member 10 is in the field of view of the camera 27. Can be put.

(Embodiment 2)
Next, the second embodiment will be described with reference to FIG. FIG. 5 is a configuration diagram of the inspection apparatus according to the second embodiment. In the figure, the same or corresponding parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  The second embodiment is an example of an inspection apparatus in the case where a separate inspection process for the strip-shaped flexible member 10 manufactured by the manufacturing apparatus of the first embodiment is provided. The foreign matter defect inspection apparatus 20 described above is provided between the unwinding roll 41 of the band-shaped flexible member 10 and the winding roll 42 of the band-shaped flexible member 10. Further, in this foreign object defect inspection apparatus 20, as in the case of the first embodiment, the cameras 27 are arranged in a plurality of rows with respect to the transport direction of the strip-shaped flexible member 10.

  In the second embodiment, the transport plate 22 is grounded as in the first embodiment. The gas injection device 23 is equipped with a static eliminator that generates positive ions and negative ions and mixes the ions into the gas.

  Since the foreign matter defect inspection apparatus 20 used in this embodiment can have a planar configuration as described above, a roll-to-roll inspection apparatus can be easily provided as shown in FIG. Can be configured. Therefore, it is possible to easily construct a so-called off-line inspection apparatus installed at a location different from the production line of the strip-shaped flexible member 10. Further, the off-line inspection apparatus can be made highly accurate and reliable.

  Although the present invention has been described by taking the film adhesive as an example, it can also be applied to other belt-like flexible members.

It is a whole lineblock diagram of the manufacture device of the film adhesive concerning an embodiment of the invention. It is a top view of the foreign material defect inspection apparatus part with which the manufacturing apparatus is equipped. It is III-III sectional drawing in FIG. It is state explanatory drawing of the curl which may arise in a strip | belt-shaped flexible member. FIG. 5 is a configuration diagram of the inspection apparatus according to the second embodiment. It is a side view which shows the conventional correction apparatus. It is a top view of the correction device. It is explanatory drawing of the flatness correction method of a strip | belt-shaped flexible member which can be considered other than a prior art example, Comprising: The manufacturing line of a film adhesive is taken as an example. It is explanatory drawing of the flatness correction method of the other strip | belt-shaped flexible member considered other than a prior art example. It is explanatory drawing of the flatness correction method of the other another strip | belt-shaped flexible member considered other than a prior art example.

Explanation of symbols

9 Third guide roll 10 Band-shaped flexible member 11 Fourth guide roll 20 Foreign object defect inspection device 21 Correction device 22 Transport plate 23 Gas injection device 25 Optical inspection device 26 Light source 27 Camera 29 Through hole 41 (Band-shaped flexible member ) Unwinding roll 42 (of a strip-like flexible member)

Claims (21)

  A belt-like flexibility comprising: a carrier plate having a flat carrier surface on the upper surface for sliding the belt-like flexible member; and a gas ejecting device that ejects gas from above to the carrier surface. Straightening device for members.   2. The belt-shaped flexible member correcting device according to claim 1, wherein the transport plate is subjected to a surface treatment for preventing adsorption of the belt-shaped flexible member on a transport surface.   3. The belt-shaped flexible member correcting device according to claim 2, wherein the adsorption-preventing surface treatment is a coating of a fluororesin.   The belt-shaped flexible member correcting device according to claim 1, wherein the transport plate is made of a fluororesin.   2. The belt-shaped flexible member correcting device according to claim 1, wherein the transport plate is made of a conductive material such as metal and is grounded.   The belt-shaped flexible member correcting device according to claim 1, wherein the transport plate is grounded by being coated with a conductive material such as metal plating.   The said flexible member is a device which injects air as gas, The correction | amendment apparatus of the strip | belt-shaped flexible member of any one of Claims 1-6 characterized by the above-mentioned.   The belt-like flexible member correction device according to any one of claims 1 to 6, wherein the gas injection device is for injecting an inert gas as a gas.   The belt-like flexibility according to claim 7 or 8, wherein the gas jetting device has a charge eliminating function for discharging the belt-like flexible member by mixing positive ions and negative ions in the gas to be jetted. Straightening device for members.   A belt-like flexible member conveying device comprising the straightening device according to any one of claims 1 to 9 between a pair of guide rolls that convey the belt-like flexible member.   A belt-like flexible member comprising the straightening device according to any one of claims 1 to 9 between an unwinding roll of the belt-like flexible member and a winding roll of the belt-like flexible member. Conveying device.   The straightening device according to any one of claims 1 to 9, and an optical inspection machine that optically inspects foreign matter or / and defects for a belt-like flexible member conveyed on the straightening device. An inspection apparatus for a strip-shaped flexible member, comprising:   The optical inspection machine is configured such that a camera is disposed on one of the upper and lower sides of the transport plate and a light source is disposed on the other, and the transport plate has a field of view formed as a through hole. The strip-shaped flexible member inspection device according to claim 12, wherein the inspection device is a thing.   The optical inspection machine is configured such that a camera is disposed on one of the upper and lower sides of the transport plate and a light source is disposed on the other, and the transport plate is formed of a transparent member. The strip-shaped flexible member inspection apparatus according to claim 12, wherein   15. The belt-like device according to claim 13 or 14, wherein the camera is configured to place the entire width of the belt-like flexible member as a plurality in a camera field of view, and is arranged in a plurality of rows in a staggered manner in the transport direction. Inspection device for flexible members.   The inspection apparatus according to any one of claims 13 to 15, further comprising an unwinding roll of the band-shaped flexible member and a winding roll of the band-shaped flexible member, and a correction device between the rolls. An inspection apparatus for a strip-like flexible member, comprising an optical inspection machine.   An apparatus for manufacturing a strip-shaped flexible member, comprising the inspection device according to any one of claims 13 to 15 between a pair of guide rolls in a production line for a strip-shaped flexible member.   In the transporting process for transporting the strip-shaped flexible member, the strip-shaped flexible member is slid on the transport surface on the top surface of the transport plate, and gas is ejected from the gas ejection device to the strip-shaped flexible member that slides on the transport surface. Then, the belt-like flexible member is pressed against the conveying surface.   The belt-shaped flexible member is transported so as to slide on the transport surface on the upper surface of the transport plate, and the belt-shaped flexible member is ejected from the gas ejection device to the belt-shaped flexible member sliding on the transport surface. A belt-like flexible member configured to inspect a foreign matter or / and a defect of a belt-like flexible member by an optical inspection machine while pressing the belt-like flexible member against the conveyance surface. Inspection method.   The strip-shaped flexible member inspection method according to claim 19, wherein the strip-shaped flexible member is neutralized by mixing positive ions and negative ions in the gas ejected from the gas ejection device. A method for inspecting a strip-shaped flexible member.   The manufacturing method of a strip | belt-shaped flexible member characterized by including the inspection process by the inspection method of Claim 19 or 20 in the manufacturing line of a strip | belt-shaped flexible member.

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