JP2007021987A - Method and apparatus for manufacture of ceramic green sheet - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for the manufacture of a ceramic green sheet enabling the improvement in the rate of operation. <P>SOLUTION: A slurry containing a ceramic material is applied to one side of a carrier film 82, while the carrier film 82 is conveyed, to form a ceramic green sheet. Guide rolls 31 to 34 guiding the carrier film 82 in the upstream of the slurry-applying location 44 in the conveying direction include two or more differential-diameter guide rolls 31, 32 and 34, all being different in the outside diameter. The period of defects of the ceramic green sheet due to the differential-diameter guide rolls 31, 32 and 34 is stored preliminarily so as to correspond respectively to the differential-diameter guide rolls 31, 32 and 34, and the detected period of defects of the ceramic green sheet is compared with the preliminarily stored period of defects to identify the guide roll causing the defects among the differential-diameter guide rolls 31, 32 and 34. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method and apparatus for manufacturing a ceramic green sheet, and more particularly to a method and apparatus for manufacturing a ceramic green sheet supported by a carrier film.

  A multilayer ceramic electronic component or the like is manufactured by stacking and firing a plurality of ceramic green sheets.

  For example, the unfired ceramic green sheet is prepared by applying a ceramic slurry 2 having a constant thickness on a long carrier film 3 using a slurry coater 5 using the manufacturing apparatus 1 shown in FIG. A ceramic green sheet 4 supported by the carrier film 3 is formed. Specifically, the carrier film 3 is supplied to the peripheral surface of the backing roll 6 through the guide roll 13, and the backing roll 6 is rotated in the direction indicated by the arrow 14. The slurry coater 5 guides the slurry 2 pumped as indicated by an arrow 7 to the first slurry chamber 8, the slurry channel 9, and the second slurry chamber 11, and is conveyed while being held by the backing roll 6. The slurry 2 is pressed against the film 3 at a constant pressure from the opening 10 of the second slurry chamber 11. The coating thickness of the slurry 2 is determined by the distance between the doctor edge 12 located on the downstream side in the transport direction of the carrier film 3 and the carrier film 3 (see, for example, Patent Document 1).

Conventionally, a technique for inspecting defects such as uneven density of a sheet-like material such as cloth or paper during the conveyance of the sheet-like material is known. For example, Patent Document 2 discloses a technique in which a sheet-like object being conveyed is scanned in the width direction by a one-dimensional CCD image sensor and inspected using the image information data.
Japanese Patent Laid-Open No. 11-77626 JP-A-6-50873

  When a carrier film for forming a ceramic green sheet is conveyed through a guide roll, if foreign matter or the like adheres to the guide roll in contact with the carrier film before slurry application, undesired scratches etc. Contact marks may be formed, or foreign oil may be transferred. When a slurry having a small film thickness is applied on such a carrier film, the ceramic green sheet has a defect. For example, the thickness of the ceramic green sheet becomes non-uniform at the contact mark portion of the carrier film, the slurry is repelled at the portion where the oil component is transferred to the carrier film, and a hole is opened in the ceramic green sheet.

  If foreign matter or the like remains on the guide roll, defects will occur repeatedly, leading to a decrease in yield. Therefore, it is necessary to stop the apparatus and remove foreign matter or the like causing the defect from the guide roll. At this time, it is desirable to quickly identify the cause location, shorten the apparatus stop time as much as possible, and increase the operating rate.

  The present invention is intended to provide a method and an apparatus for manufacturing a ceramic green sheet that can improve the operation rate in view of such a situation.

  In order to solve the above-mentioned problems, the present invention provides a method for producing a ceramic green sheet configured as follows.

  The method for manufacturing a ceramic green sheet includes a preparation step and first to fourth steps. In the first step, the carrier film is conveyed while being guided by a plurality of guide rolls. In the second step, a slurry containing a ceramic material is applied on one surface of the carrier film conveyed in the first step, and a ceramic green sheet supported by the carrier film is formed. In the third step, a defect is detected in the ceramic green sheet formed in the second step. The guide roll includes a plurality of upstream guide rolls that guide the carrier film on the upstream side in the transport direction from the position where the slurry is applied. The upstream guide roll includes a plurality of different diameter guide rolls having different outer diameter dimensions. In the preparation step, the cycle of the defect of the ceramic grease sheet generated due to the different diameter guide roll is stored in advance before the first to third steps in association with the different diameter guide roll. Keep it. In the fourth step, for the defect of the ceramic green sheet detected in the third step, a cycle of the defect is detected and compared with the cycle of the defect stored in advance in the preparation step. The different-diameter guide roll that has caused the defect is specified.

  If a defect occurs in the ceramic green sheet due to foreign matter adhering to the guide roll, if the foreign matter remains attached to the guide roll, the fixed length corresponding to the circumference of the guide roll to which the foreign matter is attached Defects occur in the cycle. From this, if the cycle of the defect is known, the outer diameter dimension of the guide roll that has caused the defect can be specified.

  On the other hand, most of the defects of the ceramic green sheet are caused by foreign matter adhesion or the like on the guide roll (that is, the upstream guide roll) that guides the carrier film on the upstream side of the position where the slurry is applied.

  If at least part of the upstream guide roll is a different-diameter guide roll with different outer diameters, the circumference of the different-diameter guide roll will be different, and the different-diameter guide roll will suffer from the different-diameter guide roll. The periods of all become different. As a result, when a defect occurs repeatedly in the ceramic green sheet due to foreign matter or the like adhering to any of the different diameter guide rolls, the different diameter guide roll causing the defect can be easily identified from the period of the defects. .

  According to the above method, since the trouble of specifying the cause location can be saved, the operating rate can be improved by shortening or eliminating the time for stopping the manufacturing apparatus for specifying the cause location.

  Preferably, a guide roll cleaning mechanism capable of selectively cleaning the outer peripheral surface of the different diameter guide roll contacting the carrier film is provided. About the said different diameter guide roll specified in the said 4th process, the said guide roll cleaning mechanism is operated, The 5th process of cleaning the said outer peripheral surface which contact | connects the said carrier film of the said different diameter guide roll is further provided.

  In this case, when cleaning is required, the guide roll cleaning mechanism is activated only for the different diameter guide roll that needs to be cleaned, and the surface of the different diameter guide roll that needs to be cleaned is in contact with the carrier film to remove foreign matter. Remove and eliminate the occurrence of defects. Thereby, the operating rate can be further improved by shortening or eliminating the time for stopping the manufacturing apparatus for cleaning. Further, by cleaning only the guide rolls having different diameters that need to be cleaned, it is possible to extend the life of consumables such as a cleaning tool of the guide roll cleaning mechanism.

  Preferably, only the upstream guide roll in contact with the one surface of the carrier film is the different diameter guide roll.

  Most of the causes of the disadvantages of the ceramic green sheet are formed by the upstream guide roll in contact with one side of the carrier film to which the slurry is applied. Therefore, if only the upstream guide roll in contact with one surface of the carrier film as described above is a different diameter guide roll, a practically sufficient effect can be obtained. Further, the configuration can be simplified by reducing the number of the different diameter guide rolls.

  Moreover, in order to solve the said subject, this invention provides the manufacturing apparatus of the ceramic green sheet comprised as follows.

The ceramic green sheet manufacturing apparatus includes (1) a film transport unit that transports a carrier film while guiding it with a plurality of guide rolls, and (2) on one surface of the carrier film that is transported by the film transport unit. A coating unit that supplies a slurry containing a ceramic material and forms a ceramic green sheet supported by the carrier film; and (3) an inspection device that inspects the ceramic green sheet formed by the coating unit. . The film transport unit includes a plurality of upstream guide rolls that guide the carrier film upstream of the coating unit in the transport direction of the carrier film. The upstream guide roll includes a plurality of different diameter guide rolls having different outer diameter dimensions. The inspection device includes:
(A) a defect detection unit for detecting defects in the ceramic green sheet formed by the coating unit, and (b) a cycle of the defects of the ceramic grease sheet generated due to the different diameter guide rolls, A defect cycle storage unit that is stored in advance in association with the different diameter guide roll, and (c) a defect cycle detection that detects a cycle of the defect with respect to the defect of the ceramic green sheet detected by the defect detection unit. And (d) comparing the cycle of the defect detected by the defect cycle detection unit with the cycle of the defect stored in advance by the defect cycle storage unit, and generating the different diameter at which the defect is generated. A guide roll specifying unit for specifying the guide roll.

  According to the above configuration, when a defect occurs in the ceramic green sheet due to the different diameter guide roll, the different diameter guide roll that has caused the defect can be identified from the cycle of the defect. Since the trouble of specifying the cause location can be saved, the operating rate can be improved by shortening or eliminating the time for stopping the manufacturing apparatus to identify the cause location.

  Preferably, (4) a guide roll cleaning mechanism capable of selectively cleaning an outer peripheral surface of the different diameter guide roll contacting the carrier film, and (5) specified by the guide roll specifying unit of the inspection apparatus. The different diameter guide roll further includes a guide roll cleaning control unit that operates the guide roll cleaning mechanism to clean the outer peripheral surface of the different diameter guide roll in contact with the carrier film.

  According to the above configuration, when cleaning is necessary, the guide roll cleaning mechanism is operated only for the different-diameter guide rolls that need to be cleaned, and the surface that contacts the carrier film of the different-diameter guide rolls that need to be cleaned is cleaned. Remove foreign materials and eliminate defects. Thereby, the operating rate can be further improved by shortening or eliminating the time for stopping the manufacturing apparatus for cleaning. Further, by cleaning only the guide rolls having different diameters that need to be cleaned, it is possible to extend the life of consumables such as a cleaning tool of the guide roll cleaning mechanism.

  Preferably, only the upstream guide roll in contact with the one surface of the carrier film is the different diameter guide roll.

  Most of the causes of the disadvantages of the ceramic green sheet are formed by the upstream guide roll in contact with one side of the carrier film to which the slurry is applied. Therefore, if only the upstream guide roll in contact with one surface of the carrier film as described above is a different diameter guide roll, a practically sufficient effect can be obtained. Further, the configuration can be simplified by reducing the number of the different diameter guide rolls.

  According to the method and apparatus for producing a ceramic green sheet of the present invention, the operating rate can be improved.

  Hereinafter, an embodiment of the present invention will be described with reference to the block diagram of FIG.

  The ceramic green sheet manufacturing apparatus 20 unwinds the long carrier film 82 from the roll 80, conveys it while guiding it with the guide rolls 31 to 39, and winds it on the sheet reel 40. The guide rolls 31 to 39 and the sheet reel 40 are rotationally driven by a motor (not shown). In the middle of the conveyance path of the carrier film 82, a coating unit 44, a drying furnace 46, and an inspection device 50, which are coating units, are sequentially provided. The carrier film 82 is, for example, a PET (polyethylene terephthalate) film.

  The coating unit 44 applies a slurry containing a ceramic material on one surface of the carrier film 82, and forms a thin film-like ceramic green sheet on one surface of the carrier film 82. Although not shown in detail, for example, as in FIG. 1, between one surface of the carrier film 82 and a doctor edge (not shown) on the downstream side in the transport direction of the carrier film 82 from the portion for supplying the slurry. A certain gap is formed in the slurry, and the slurry is configured to pass through the gap to have a certain thickness.

  The ceramic green sheet is conveyed while being supported by the carrier film 82. The drying furnace 46 dries the ceramic green sheet conveyed with the carrier film 82, and removes the solvent in the ceramic green sheet to some extent.

  The inspection device 50 inspects the ceramic green sheet being conveyed. The inspection apparatus 50 includes an illumination unit 52 and a camera unit 54 that are respectively arranged on both sides of the conveyance path, and an apparatus main body 55. The illumination unit 52 illuminates the carrier film and the ceramic green sheet. The camera unit 54 receives transmitted light that has passed through the carrier film and the ceramic green sheet in the illumination light from the illumination unit 52, and sends a detection signal corresponding to the intensity of the received transmitted light to the apparatus main body 55. The apparatus body 55 detects defects such as density unevenness of the ceramic green sheet based on the detection signal from the camera unit 54. For example, the apparatus main body 55 includes a CPU, a memory, a signal processing circuit, and the like, and determines the presence / absence of a defect by comparing the level of a detection signal from the camera unit 54 with a predetermined threshold value.

  The ceramic green sheet inspected by the inspection apparatus 50 uses a portion having no defect in a subsequent process. For example, a press (not shown) is arranged on the downstream side in the transport direction from the inspection device 50, and the ceramic green sheet is punched with a press die together with a carrier film so as not to include a defective portion, and used in a subsequent process.

  Of the guide rolls (that is, the upstream guide rolls) 31 to 34 that guide the carrier film 82 on the upstream side in the transport direction from the coating unit 44, the guide rolls 31 that are in contact with one surface to which the slurry of the carrier film 82 is supplied, 32 and 34 are different diameter guide rolls 31, 32 and 34 having different outer diameter dimensions.

  Each of the different diameter guide rolls 31, 32, 34 is provided with a cleaning unit 42 which is a guide roll cleaning mechanism. Although not shown in detail, for example, the cleaning unit 42 has a cleaning roll. The cleaning roll is rotatably supported, and the outer peripheral surface has adhesiveness. The cleaning roll comes in contact with and separates from the outer peripheral surface of the different diameter guide rolls 31, 32, 34 in contact with the carrier film 82 according to a control signal from the apparatus main body 55 of the inspection apparatus 50. As for foreign matters and the like adhering to the outer peripheral surface of the different diameter guide rolls 31, 32, and 34 in contact with the carrier film 82, the outer peripheral surface of the cleaning roll rotates while the carrier film 82 is being rotated. , 34 adheres to the outer peripheral surface of the cleaning roll and is removed from the outer peripheral surfaces of the different diameter guide rolls 31, 32, 34. The cleaning unit 42 can clean the outer peripheral surfaces of the different diameter guide rolls 31, 32, 34 while transporting the carrier film 82. Since it is not necessary to stop the manufacturing apparatus 20 for cleaning the different diameter guide rolls 31, 32, 34, the operating rate can be improved.

  If foreign matter adheres to the outer peripheral surfaces of the different-diameter guide rolls 31, 32, 34, contact marks such as undesired scratches may remain on one surface of the carrier film 82 on which the slurry is applied, or the foreign matter may have oil content. It is transcribed. When a slurry having a particularly small film thickness is applied on such a carrier film 82, a ceramic green sheet is formed thicker in the contact mark portion of the carrier film 82 than in other portions. In addition, the slurry is repelled in the portion where the oil is transferred to the carrier film 82, and a hole is formed in the ceramic green sheet. Therefore, the ceramic green sheet has a defect.

  If foreign matter remains attached to the different diameter guide rolls 31, 32, 34, defects will occur repeatedly. The defect occurs at a constant cycle corresponding to the circumferential length of the different-diameter guide rolls 31, 32, 34 to which foreign matter is attached. Since the outer diameter dimensions of the different-diameter guide rolls 31, 32, 34 are all different, the defect cycles are also different for each different-diameter guide roll 31, 32, 34. Therefore, if the period of the defect is known, the different diameter guide rolls 31, 32, and 34 that have generated the defect can be easily identified.

  Therefore, the apparatus main body 55 of the inspection apparatus 50 has a function of not only detecting the defect of the ceramic green sheet but also detecting the period of the defect and identifying the different diameter guide rolls 31, 32, and 34 that have generated the defect. I have.

  Specifically, the apparatus main body 55 of the inspection apparatus 50 includes a defect cycle storage unit 57, a defect cycle detection unit 58, and a guide roll specifying unit 59 in addition to the defect detection unit 56 that detects defects in the ceramic green sheet. Including. The defect cycle storage unit 57 stores in advance the defect cycle of the ceramic grease sheet caused by the different diameter guide rolls 31, 32, 34 in association with the different diameter guide rolls 31, 32, 34. . The defect cycle detector 58 detects the defect cycle of the defects of the ceramic green sheet detected by the defect detector 56. The guide roll specifying unit 59 determines whether or not the defect cycle stored in advance by the cycle storage unit 57 matches the defect cycle detected by the defect cycle detection unit 58 within a predetermined allowable range. In this case, the different-diameter guide rolls 31, 32, and 34 corresponding to the defect cycle stored in the cycle storage unit 57 are specified as the different-diameter guide rolls that have generated the detected defect.

  The guide roll specifying unit 59 also functions as a guide roll cleaning control unit, and outputs a control signal to the cleaning unit 42 provided in the specified different diameter guide rolls 31, 32, 34. By this control signal, the cleaning unit 42 operates only for the different diameter guide rolls 31, 32, 34 in which the defects are generated, and adheres to the outer peripheral surfaces of the different diameter guide rolls 31, 32, 34 in which the defects are generated. Remove foreign matter. Thereby, after that, the fault resulting from the different-diameter guide rolls 31, 32, 34 does not occur.

  As described above, when the ceramic green sheet manufacturing apparatus 20 has a defect in the ceramic green sheet due to foreign matter or the like adhering to the different diameter guide rolls 31, 32, 34, the defect is detected by the inspection apparatus 50. At the same time, it is possible to identify the guide rolls 31, 32, and 34 that have caused the defect from the cycle of the defect. Since the trouble of specifying the cause location can be saved, the operating rate can be improved by shortening or eliminating the time for stopping the manufacturing apparatus 20 to specify the cause location.

  Further, the different diameter guide rolls 31, 32, and 34 that have caused the defects are automatically cleaned by the cleaning unit 42, thereby shortening or eliminating the time for stopping the manufacturing apparatus 20 for cleaning, The operating rate can be further improved.

  In addition, since most of the defects of the carrier film are generated in the upstream guide roll in contact with the surface of the carrier film 82 on which the slurry is applied, the upstream guide roll in contact with the surface of the carrier film 82 on which the slurry is applied. If only 31, 32, and 34 have different diameter guide rolls 31, 32, and 34, a practically sufficient effect can be obtained. By simplifying the configuration by reducing the number of guide rollers 31, 32, and 34 having different diameters, it is possible to suppress the burden on the manufacture and control of the apparatus.

  In addition, the manufacturing method and apparatus of the ceramic green sheet of this invention are not limited to above-mentioned embodiment, It can add and implement various changes.

  For example, the ceramic green sheet may be inspected by the inspection device 50 before being dried in the drying furnace 46, or may be naturally dried without the drying furnace 46.

  Further, the guide rollers 31, 32, and 34 having different diameters specified by the defect cycle may be manually cleaned instead of being automatically cleaned by the cleaning unit.

  The upstream guide roll 33 in contact with the surface opposite to the surface on which the slurry of the carrier film 82 is applied may be a different diameter guide roll. One or two or more guide rolls 34 to 39 other than the upstream guide rolls 31 to 34 may be different diameter guide rolls.

It is a principal part block diagram of the manufacturing apparatus of a ceramic green sheet. (Conventional example) It is a block diagram of the manufacturing apparatus of a ceramic green sheet. (Example)

Explanation of symbols

20 Manufacturing apparatus 31-39 Guide roll (film conveyance part)
40 sheet reel (film transport section)
42 Cleaning unit (guide roll cleaning mechanism)
44 Coating unit (Coating department)
46 Drying oven 50 Inspection device 56 Defect inspection unit 57 Defect cycle storage unit 58 Defect cycle detection unit 59 Guide roll identification unit

Claims (6)

A first step of conveying the carrier film while guiding it with a plurality of guide rolls;
A second step of applying a slurry containing a ceramic material on one surface of the carrier film being conveyed in the first step, and forming a ceramic green sheet supported by the carrier film;
A third step of detecting defects in the ceramic green sheet formed by the second step,
The guide roll includes a plurality of upstream guide rolls that guide the carrier film on the upstream side in the transport direction from the position where the slurry is applied,
The upstream guide roll includes a plurality of different diameter guide rolls having different outer diameter dimensions,
A preparatory step in which the period of the defect of the ceramic grease sheet generated due to the different diameter guide roll is stored in advance before the first to third steps in association with the different diameter guide roll. When,
Regarding the defect of the ceramic green sheet detected in the third step, the cycle of the defect is detected, and compared with the cycle of the defect stored in advance in the preparation step, the defect is generated. A method for producing a ceramic green sheet, comprising: a fourth step of identifying the different diameter guide roll. A guide roll cleaning mechanism capable of selectively cleaning the outer peripheral surface of the different diameter guide roll contacting the carrier film;
About the said different diameter guide roll specified in the said 4th process, the said guide roll cleaning mechanism was operated, The 5th process which cleans the said outer peripheral surface which contact | connects the said carrier film of the said different diameter guide roll was further provided. The method for producing a ceramic green sheet according to claim 1, wherein:   3. The method for producing a ceramic green sheet according to claim 1, wherein only the upstream guide roll contacting the one surface of the carrier film is the different diameter guide roll. A film transport section for transporting the carrier film while guiding it with a plurality of guide rolls;
Supplying a slurry containing a ceramic material on one surface of the carrier film being transported by the film transport unit, and forming a ceramic green sheet supported by the carrier film; and
An inspection device for inspecting the ceramic green sheet formed by the coating unit,
The film transport unit includes a plurality of upstream guide rolls that guide the carrier film on the upstream side in the transport direction of the carrier film from the coating unit,
The upstream guide roll includes a plurality of different diameter guide rolls having different outer diameter dimensions,
The inspection device includes:
A defect detection unit for detecting defects in the ceramic green sheet formed by the coating unit;
A defect period storage unit that stores the defect cycle of the ceramic grease sheet generated due to the different diameter guide roll in advance in association with the different diameter guide roll;
About the defect of the ceramic green sheet detected by the defect detection unit, a defect cycle detection unit for detecting the cycle of the defect,
The guide for identifying the different-diameter guide roll that has generated the defect by comparing the cycle of the defect detected by the defect cycle detection unit with the cycle of the defect stored in advance by the defect cycle storage unit. A ceramic green sheet manufacturing apparatus including a roll specifying unit. A guide roll cleaning mechanism capable of selectively cleaning the outer peripheral surface of the different diameter guide roll contacting the carrier film;
Guide roll cleaning control for operating the guide roll cleaning mechanism and cleaning the outer peripheral surface of the different diameter guide roll in contact with the carrier film for the different diameter guide roll specified by the guide roll specifying section of the inspection apparatus. The apparatus for producing a ceramic green sheet according to claim 4, further comprising a section.   6. The apparatus for producing a ceramic green sheet according to claim 4, wherein only the upstream guide roll in contact with the one surface of the carrier film is the different-diameter guide roll.

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