JP2006289522A5 - - Google Patents

Claims (3)

Used in a double-side polishing apparatus comprising an upper surface plate and a lower surface plate for sandwiching a work held by a carrier from both sides, and a sun gear and an internal gear for driving the carrier. Or a pressure roller for adhering an annular polishing pad to the annular pad adhering surface of the lower surface plate,
The pressure roller is formed on a cylindrical roller body having a length equal to or greater than the width of the pad attaching surface, a roller shaft that rotatably supports the roller body, and both ends of the roller shaft. These locking portions are provided on the inner and outer peripheral sides of the lower surface plate in the polishing apparatus by independent block-shaped members individually attached to both ends of the roller shaft. It was being respectively formed so as lockable become lock receiving portion, by these locking portion to be locked in the locking receiving portion, with respect to the polishing apparatus, the radial direction of the roller body plate A pressure roller for adhering a polishing pad in a double-side polishing apparatus, wherein the pressure roller can be mounted so as to be in contact with the polishing pad over the entire width. An upper surface plate and a lower surface plate for polishing by sandwiching the work held by the carrier from both sides, a sun gear and an internal gear for driving the carrier, and an annular pad attachment of the upper surface plate and / or the lower surface plate A pressure roller for attaching an annular polishing pad to the wearing surface;
The pressure roller is formed on a cylindrical roller body having a length equal to or greater than the width of the pad adhering surface, a roller shaft that rotatably supports the roller body, and both ends of the roller shaft. Engaging portions provided on the inner and outer peripheral sides of the lower surface plate by independent block-shaped members individually attached to both ends of the roller shaft. It is formed so that it can be locked to the stopper part,
After temporarily bonding the polishing pad to the pad attachment surface of the upper and / or lower surface plate, the pressure roller is interposed between the upper and lower surface plates in the radial direction so that the roller body contacts the polishing pad over the entire width. At the same time, the locking parts at both ends of the roller shaft are locked to the locking receiving parts on the inner and outer circumferences of the lower surface plate, and the upper and lower surface plates are rotated in opposite directions with a load applied on the upper surface plate. The double-side polishing apparatus is configured to press the polishing pad against the pad adhering surface by the roller body while causing the roller body to follow and rotate following the rotation of the surface plate. . In a double-side polishing apparatus comprising an upper surface plate and a lower surface plate for sandwiching a work held by a carrier from both sides, and a sun gear and an internal gear for driving the carrier, the upper surface plate and / or the lower surface plate A method for adhering an annular polishing pad to an annular pad adhering surface of a board,
A cylindrical roller body having a length equal to or greater than the width of the pad adhering surface, a roller shaft that rotatably supports the roller body, and a locking portion formed at each end of the roller shaft. These locking parts are formed by mutually independent block-shaped members individually attached to both ends of the roller shaft, and a plurality of pressure rollers that are detachable from the polishing apparatus are used. And
After temporarily bonding the polishing pad to the pad attachment surface of the upper and / or lower surface plate, the pressure roller is interposed between the upper and lower surface plates in the radial direction so that the roller body contacts the polishing pad over the entire width. At the same time , the upper and lower surface plates are brought into contact with each other by engaging the engagement portions at both ends of the roller shaft with the engagement receiving portions provided on the inner and outer peripheral sides of the lower surface plate , and applying a load on the upper surface plate. Polishing in a double-side polishing apparatus characterized in that, by rotating in the reverse direction, the roller body follows the rotation of the surface plate and is driven to rotate, and the polishing pad is pressed against the pad attachment surface by the roller body. How to stick the pad.