JPH0642059U - Surface plate for attaching polishing cloth of polishing machine - Google Patents
Surface plate for attaching polishing cloth of polishing machineInfo
- Publication number
- JPH0642059U JPH0642059U JP8525592U JP8525592U JPH0642059U JP H0642059 U JPH0642059 U JP H0642059U JP 8525592 U JP8525592 U JP 8525592U JP 8525592 U JP8525592 U JP 8525592U JP H0642059 U JPH0642059 U JP H0642059U
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- polishing
- polishing cloth
- porous structure
- continuous porous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】
【目的】 表面精密研磨に使用される片面研磨機及び両
面研磨機の定盤の改良を目的とする。
【構成】 連通性の多孔構造で形成された定盤及び研磨
布との貼付面が連通性多孔構造で他層を非多孔構造の二
層構造で形成された定盤。
【効果】 研磨布を定盤に貼付ける作業に於てその接着
界面に空気が残留することがなく研磨布貼付加工が安易
に迅速且つ確実に行うことが出来た。
(57) [Summary] [Purpose] The objective is to improve the surface plate of single-sided and double-sided polishing machines used for precision surface polishing. [Structure] A surface plate formed of a continuous porous structure and a surface plate formed of a two-layer structure in which the surface to be adhered to the polishing cloth is a continuous porous structure and the other layer is a non-porous structure. [Effect] In the work of sticking the polishing cloth to the surface plate, air did not remain at the bonding interface, and the polishing cloth sticking process could be performed easily and quickly.
Description
【0001】[0001]
本考案は表面精密研磨に使用される片面研磨機及び両面研磨機の改良に関する ものである。 The present invention relates to an improvement of a single-sided polishing machine and a double-sided polishing machine used for surface precision polishing.
【0002】[0002]
研磨機の大型化にともない、研磨布も大版となり、この大版の研磨布を研磨機 の定盤に貼付けることは、かなりの熟練を必要とする。しかも熟練者といえども 、この貼付作業に於て定盤と研磨布との間に空気を残すことなく、完全に均一に 定盤に貼付けることは不可能に近く、貼付けた後、針等で研磨布をつついてその 針穴より空気を抜くなど種々の方法で空気抜きが行われている。 Along with the increase in the size of the polishing machine, the polishing cloth also becomes a large plate, and it takes considerable skill to attach the large-sized polishing cloth to the surface plate of the polishing machine. In addition, even a skilled person could not completely and evenly adhere to the surface plate without leaving air between the surface plate and the polishing cloth during this application work. Various methods are used to bleed air, such as poking a polishing cloth to bleed air from the needle hole.
【0003】[0003]
上記のように研磨布と定盤との貼付作業時に入る空気及びその空気の除去には 非常に手間がかゝり問題とされていた。本考案はかゝる問題を解決するもので定 盤と研磨布の貼付けにより全く空気が残らない定盤を提供するものである。 As described above, it is very troublesome to remove the air and the air that enters during the work of attaching the polishing cloth and the surface plate. The present invention solves such a problem and provides a surface plate in which no air remains at all by sticking a surface plate and a polishing cloth.
【0004】[0004]
上記目的を達成するため連通性の多孔構造をもった定盤及び研磨布の貼付面を 連通性の多孔構造をもった層とそれを支持する非連通性非多孔構造で形成された 二層構造の定盤を提供するにある。 In order to achieve the above object, the surface of the plate having a continuous porous structure and the surface of the polishing cloth to be attached have a layer having a continuous porous structure and a two-layer structure formed of a non-continuous non-porous structure supporting the layer To provide the surface plate of.
【0005】[0005]
上記のように連通性の多孔構造をもった定盤であるため研磨布と定盤とを貼付 ける場合接着界面に於て混入してくる空気は定盤を透過し外部へ流出する。従っ て研磨布と定盤との接着界面に於て従来の様に空気が残留することがないため、 熟練した貼合せ技術も、又貼付け後、針等の空気抜きの手間も全くいらない従来 問題とされていた課題を解決するものである。 又、連通性多孔構造の機械的強度を改善するために連通性多孔構造でないもの と二層構造にすることにより本考案の効果を損なうことなく小型化,軽量化定盤 を提供することが出来る。 As described above, since the surface plate has a continuous porous structure, when adhering the polishing cloth and the surface plate, the air mixed in at the bonding interface permeates the surface plate and flows out. Therefore, since air does not remain at the bonding interface between the polishing cloth and the surface plate as in the past, there is no need for skilled bonding techniques, nor for the conventional problem of removing air such as needles after bonding. It solves the problems that were being addressed. Further, in order to improve the mechanical strength of the continuous porous structure, a non-continuous porous structure and a two-layer structure can be provided to provide a compact, lightweight surface plate without impairing the effects of the present invention. .
【0006】[0006]
直径1250mm,厚さ150mm,孔径10ミクロン〜30ミクロンの連通 性多孔構造の鋳鉄製の研磨機定盤を作製し、予め両面粘着テープを圧着したスエ ード調研磨布を定盤に貼付けた結果、接着面での空気の残留が全くなく簡単に貼 付けることが出来た。 The result of making a cast iron polishing machine surface plate with a diameter of 1250 mm, a thickness of 150 mm, and a pore size of 10 to 30 microns, and having a continuous porous structure, and pasting a suede-like polishing cloth to which double-sided adhesive tape was pressed in advance. However, there was no air remaining on the adhesive surface and it could be easily applied.
【0007】 直径1500mm,厚さ150mmの鉄製盤の片面に直径1500mm,厚さ 10mm,孔径20ミクロン〜60ミクロンの連通性多孔構造のステンレス盤を 接着剤で接合させた研磨機定盤を作製し、両面粘着テープを予め圧着したスエー ド調研磨布を貼付せた結果、接着面での空気の残留が全くなく、良好な研磨効果 が得られた。A polishing machine surface plate was prepared by joining a stainless steel plate having a continuous porous structure with a diameter of 1500 mm, a thickness of 10 mm and a hole diameter of 20 to 60 microns to one surface of an iron plate having a diameter of 1500 mm and a thickness of 150 mm with an adhesive. As a result of applying a suede-like polishing cloth with double-sided pressure-sensitive adhesive tape pre-pressed, no air remained on the adhesive surface and a good polishing effect was obtained.
【0008】[0008]
本考案による定盤は研磨布との貼付け作業に於てその接着界面に残る空気が定 盤を透過して流出するため、定盤と研磨布との界面に空気が残ることが全くなく 、従来必要とされていた熟練した貼付せ技術や貼付せ後、針等で空気抜き作業を する必要もなく、研磨布貼付け作業を非常に安易に迅速且つ確実に行うことが出 来る。 In the surface plate according to the present invention, the air remaining at the bonding interface of the surface of the polishing cloth permeates the surface plate and flows out when the surface is attached to the polishing cloth. It is possible to perform the polishing cloth sticking work very easily, quickly and surely without the need for skilled sticking techniques and the need for air bleeding work with a needle after sticking.
【図面の簡単な説明】[Brief description of drawings]
【図1】本考案登録請求範囲請求項1の実施例を示す断
面図。FIG. 1 is a sectional view showing an embodiment of claim 1 of the invention registration claim.
【図2】本考案登録請求範囲請求項2の実施例を示す断
面図。FIG. 2 is a sectional view showing an embodiment of claim 2 of the invention registration claim.
1 連通性多孔構造 2 非連通性多孔構造 3 接着剤層 1 continuous porous structure 2 non-continuous porous structure 3 adhesive layer
Claims (2)
ものであって、連通性多孔構造を特徴とする研磨布貼付
用定盤。1. A surface plate for sticking a polishing cloth, which is used in a single-sided polishing machine and a double-sided polishing machine, and has a continuous porous structure.
非多孔構造との二層構造を特徴とする研磨布貼付用定
盤。2. A surface plate for sticking a polishing cloth, wherein the surface to which the polishing cloth is stuck has a two-layer structure of a continuous porous structure and a non-communication non-porous structure.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8525592U JPH0642059U (en) | 1992-11-16 | 1992-11-16 | Surface plate for attaching polishing cloth of polishing machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8525592U JPH0642059U (en) | 1992-11-16 | 1992-11-16 | Surface plate for attaching polishing cloth of polishing machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0642059U true JPH0642059U (en) | 1994-06-03 |
Family
ID=13853471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8525592U Pending JPH0642059U (en) | 1992-11-16 | 1992-11-16 | Surface plate for attaching polishing cloth of polishing machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0642059U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006289522A (en) * | 2005-04-06 | 2006-10-26 | Speedfam Co Ltd | Pressure roller for applying polishing pad and applying method of polishing pad with pressure roller in double-sided polishing device |
JP2008093759A (en) * | 2006-10-08 | 2008-04-24 | Musashi Kasei Kogyo Kk | Super-strong adhesive sheet for polishing device |
-
1992
- 1992-11-16 JP JP8525592U patent/JPH0642059U/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006289522A (en) * | 2005-04-06 | 2006-10-26 | Speedfam Co Ltd | Pressure roller for applying polishing pad and applying method of polishing pad with pressure roller in double-sided polishing device |
JP4584755B2 (en) * | 2005-04-06 | 2010-11-24 | スピードファム株式会社 | Pressure roller for attaching polishing pad in double-side polishing apparatus, and method for attaching polishing pad with pressure roller |
JP2008093759A (en) * | 2006-10-08 | 2008-04-24 | Musashi Kasei Kogyo Kk | Super-strong adhesive sheet for polishing device |
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