JP2006286536A - プラズマ生成方法、誘導結合型プラズマ源、およびプラズマ処理装置 - Google Patents

プラズマ生成方法、誘導結合型プラズマ源、およびプラズマ処理装置 Download PDF

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JP2006286536A
JP2006286536A JP2005107843A JP2005107843A JP2006286536A JP 2006286536 A JP2006286536 A JP 2006286536A JP 2005107843 A JP2005107843 A JP 2005107843A JP 2005107843 A JP2005107843 A JP 2005107843A JP 2006286536 A JP2006286536 A JP 2006286536A
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plasma
antenna
inductively coupled
plasma generation
generation chamber
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JP2005107843A
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Japanese (ja)
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JP2006286536A5 (enExample
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Kazuo Yamauchi
和雄 山内
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Ebara Corp
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Ebara Corp
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  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
JP2005107843A 2005-04-04 2005-04-04 プラズマ生成方法、誘導結合型プラズマ源、およびプラズマ処理装置 Withdrawn JP2006286536A (ja)

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JP2005107843A JP2006286536A (ja) 2005-04-04 2005-04-04 プラズマ生成方法、誘導結合型プラズマ源、およびプラズマ処理装置

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JP2005107843A JP2006286536A (ja) 2005-04-04 2005-04-04 プラズマ生成方法、誘導結合型プラズマ源、およびプラズマ処理装置

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JP2006286536A5 JP2006286536A5 (enExample) 2008-05-15

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008056556A1 (en) * 2006-11-08 2008-05-15 Nissin Electric Co., Ltd. Method and device for forming silicon dot and silicon dot and method and device for forming substrate with insulating film
JP2008181747A (ja) * 2007-01-24 2008-08-07 Matsushita Electric Ind Co Ltd 大気圧プラズマ発生方法及び装置
JP2009290025A (ja) * 2008-05-29 2009-12-10 Tohoku Univ 中性粒子照射型ｃｖｄ装置
JP2010153274A (ja) * 2008-12-26 2010-07-08 Meiko:Kk プラズマ処理装置
JP2012248578A (ja) * 2011-05-25 2012-12-13 Ulvac Japan Ltd プラズマエッチング装置
JP2013041968A (ja) * 2011-08-15 2013-02-28 Nlt Technologies Ltd 薄膜デバイス及びその製造方法
KR20180025963A (ko) * 2015-07-24 2018-03-09 어플라이드 머티어리얼스, 인코포레이티드 가스 저감을 위한 방법 및 장치
JP2019004057A (ja) * 2017-06-15 2019-01-10 株式会社アルバック プラズマ処理装置

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008056556A1 (en) * 2006-11-08 2008-05-15 Nissin Electric Co., Ltd. Method and device for forming silicon dot and silicon dot and method and device for forming substrate with insulating film
JP2008124078A (ja) * 2006-11-08 2008-05-29 Nissin Electric Co Ltd シリコンドット形成方法及び装置並びにシリコンドット及び絶縁膜付き基板の形成方法及び装置
JP2008181747A (ja) * 2007-01-24 2008-08-07 Matsushita Electric Ind Co Ltd 大気圧プラズマ発生方法及び装置
JP2009290025A (ja) * 2008-05-29 2009-12-10 Tohoku Univ 中性粒子照射型ｃｖｄ装置
JP2010153274A (ja) * 2008-12-26 2010-07-08 Meiko:Kk プラズマ処理装置
JP2012248578A (ja) * 2011-05-25 2012-12-13 Ulvac Japan Ltd プラズマエッチング装置
JP2013041968A (ja) * 2011-08-15 2013-02-28 Nlt Technologies Ltd 薄膜デバイス及びその製造方法
CN102956683A (zh) * 2011-08-15 2013-03-06 Nlt科技股份有限公司 薄膜器件及其制备方法
US9378981B2 (en) 2011-08-15 2016-06-28 Nlt Technologies, Ltd. Thin film device and manufacturing method thereof
KR20180025963A (ko) * 2015-07-24 2018-03-09 어플라이드 머티어리얼스, 인코포레이티드 가스 저감을 위한 방법 및 장치
KR102551216B1 (ko) 2015-07-24 2023-07-03 어플라이드 머티어리얼스, 인코포레이티드 가스 저감을 위한 방법 및 장치
JP2019004057A (ja) * 2017-06-15 2019-01-10 株式会社アルバック プラズマ処理装置

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