JP2006276188A - Device and method of pattern correction - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device and a method of pattern correction capable of promptly correcting a defective part by simple structure. <P>SOLUTION: In a standby state, a tip part 19a of an application needle is immersed in correction fluid 17. At the time of application, when a cylinder part 20 drops a drive axis 20a, the application needle 19 projects from a hole 18b of a container 18. The correction fluid 17a is adhered to the tip part 19a of the application needle. Next, an application cylinder 13 drops a drive shaft 13a, brings the tip part 19a of the application needle into contact with a defective part 22a of a substrate 22 and applies the correction fluid 17a to the defective part 22a. Consequently, a process for making the application needle go back and forth between the defective part and an ink tank as in the conventional manner is omitted. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a pattern correction apparatus and a pattern correction method, and more particularly to a pattern correction apparatus and a pattern correction method for correcting a defective portion of a fine pattern formed on a substrate. More specifically, the present invention relates to pattern correction for correcting electrode open defects, plasma display rib (partition wall) defects, liquid crystal color filter blank defects, mask defects, etc., which occur in the manufacturing process of flat panel displays. The present invention relates to an apparatus and a pattern correction method.

  In recent years, with the increase in size and definition of flat panel displays such as plasma displays, liquid crystal displays, and EL displays, defects have occurred in electrodes and ribs on the substrate in the display manufacturing process, and liquid crystal color filters There is a high probability that defects will occur in the colored layer. For this reason, a method for improving the yield and correcting various defects has been proposed.

  FIG. 27 is a diagram showing an overall configuration of a conventional pattern correction apparatus. Referring to FIG. 27, this pattern correction apparatus 101 irradiates the substrate with laser light via an observation optical system 102 for observing the surface of the substrate, a monitor 103 for displaying the observed image, and the observation optical system 102. A cutting laser unit 104 for cutting unnecessary portions, an application mechanism unit 105 for applying correction liquid to the tip of the application needle and applying it to a defective part of the substrate, and a substrate heating unit 106 for heating the correction liquid applied to the defective part. And an image processing unit 107 for recognizing a defective part, a host computer 108 for controlling the entire apparatus, and a control computer 109 for controlling the operation of the apparatus mechanism part. In addition, an XY stage 110 that moves a substrate having other defective portions in the XY direction (horizontal direction), a chuck unit 111 that holds the substrate on the XY stage 110, and the observation optical system 102 and the coating mechanism unit 105 are moved in the Z direction. A Z stage 112 that moves in the (vertical direction) is provided.

  An application needle 113 is provided at the lower end of the application mechanism unit 105. The ink tank index motor 114 is connected to an ink tank table 115 on which a plurality of ink tanks are mounted.

  When correcting the defective portion of the substrate, the application needle 113 is moved to the position of the defect, and then the ink tank index motor 114 is driven to rotate the ink tank table 115 to select an appropriate tank. Then, the application mechanism unit 105 is moved up and down to cause ink to adhere to the application needle 113 and apply an appropriate amount on the substrate.

  For example, Patent Document 1 below discloses a defect correction method and a defect correction apparatus capable of automatically correcting white defects and black defects of a color filter with a relatively simple configuration. According to this, the ink application positioning cylinder is moved up and down to deposit ink on the ink application needle, and an appropriate amount of the ink is applied onto the color filter.

Patent Document 2 below discloses a pattern correction apparatus that can correct even a relatively wide defect. According to this, when a part of the rib formed on the back glass substrate of the plasma display is missing, the correction paste is applied to the application needle and applied to the defect portion.
Japanese Patent Laid-Open No. 9-61296 JP 2000-299059 A

  In the conventional pattern correction device, if the defective part is large, it is necessary to apply the correction ink to the defective part several times. Each time application is performed, the application needle is returned from the defective part to the ink tank, and the ink is attached to the application needle. It was necessary to rework. For this reason, there is a problem that it takes time until the defect portion is corrected. Further, it is necessary to clean the application needle every time the color of the correction ink is changed.

  Therefore, a main object of the present invention is to provide a pattern correction apparatus and a pattern correction method capable of quickly correcting a defective portion with a simple configuration.

  A pattern correction apparatus according to the present invention is a pattern correction apparatus for correcting a defective portion of a fine pattern formed on a substrate, a container having a first hole opened at the bottom thereof and injected with a correction liquid, An applicator needle having substantially the same diameter as the first hole, and a drive unit that projects the tip of the applicator needle from the first hole and applies the correction liquid adhering to the tip of the applicator needle to the defective part. Is.

  Preferably, the drive unit holds the tip of the application needle in the correction liquid injected into the container during standby, and causes the tip of the application needle to protrude from the first hole during application.

  Preferably, the drive unit is fixed to the container, and the first sub-drive unit that causes the tip of the application needle to protrude from the first hole and adheres the correction liquid to the tip of the application needle is lowered. And a second sub-driving unit that applies the correction liquid adhering to the tip of the coating needle to the defective part by bringing the tip of the coating needle into contact with the defective part.

  Preferably, the linear guide is further provided between the container and the second sub-driving unit and movably holds the container so that a pressure of a predetermined value or more is not applied to the defective part from the tip of the application needle. Is provided.

  Preferably, the first sub-driving unit moves the application needle upward by a suction force between the permanent magnet fixed to the upper end of the application needle and the permanent magnet, and generates a repulsive force between the permanent magnet and the permanent magnet. And an electromagnet that moves the application needle downward.

  Preferably, the first sub-driving unit includes a movable iron core fixed to the upper end of the application needle and a solenoid coil that moves the application needle up and down by sucking or dropping the movable iron core.

  Preferably, the drive unit includes a fixed unit and a drive shaft. The pattern correction device is further provided between the fixing member for fixing the container to the fixing portion, the application needle and the drive shaft, so that a pressure of a predetermined value or more is not applied to the defective portion from the tip portion of the application needle. And a linear guide for holding the application needle movably.

  Preferably, the container is further fixed, a protrusion is provided on a surface facing the substrate, a fixing member that is moved up and down by the driving unit, and provided between the fixing member and the driving unit. The first linear guide that holds the fixing member so as to be movable, and the application needle and the drive unit are provided so that a pressure exceeding a predetermined value is not applied to the application needle. A second linear guide that holds the application needle in a movable manner is provided so that the above pressure is not applied.

  Further preferably, the movable member is further provided between the bottomed cylindrical case having a container fixed to the bottom thereof, a movable member accommodated in the case, and the inner peripheral side surface of the case and the movable member. Is provided between the application needle and the movable member, so that the application needle can be moved so that a pressure of a predetermined value or more is not applied to the defect portion from the application needle tip. A second linear guide for holding is provided. A drive part makes the front-end | tip part of an application needle | hook project from a 1st hole by pushing down a movable member.

  Preferably, a second hole having substantially the same diameter as the first hole is opened in the upper wall of the container, the container is hermetically sealed except for the first and second holes, and the application needle is the first and second holes. It is provided so as to be movable along a straight line passing through the second hole.

  A pattern correction method according to the present invention is a pattern correction method for correcting a defective portion of a fine pattern formed on a substrate, wherein a first hole is opened at the bottom of the container, and a correction liquid is injected into the container. A coating needle having substantially the same diameter as the first hole, a step of holding the tip of the coating needle in the correction liquid injected into the container, and a tip of the coating needle protruding from the first hole A step of adhering the correction liquid to the tip of the application needle, and a step of bringing the tip of the application needle into contact with the defect and applying the correction liquid adhering to the tip of the application needle to the defect.

  In the pattern correction apparatus according to the present invention, the first hole is opened at the bottom of the container, the correction liquid is injected into the container, the application needle having substantially the same diameter as the first hole, and the tip of the application needle. There is provided a drive unit that protrudes from the hole of 1 and applies the correction liquid attached to the tip of the application needle to the defective part. Therefore, the step of reciprocating the application needle between the defective portion and the ink tank (or paste tank) as in the prior art is omitted. Further, it is not necessary to provide a waiting time after the correction liquid is attached to the tip of the application needle as in the prior art, or the waiting time can be shortened. For this reason, the time required for defect correction is shortened, and the configuration of the apparatus is simplified.

  In the pattern correction method according to the present invention, a first hole is opened at the bottom of the pattern correction method, and a container into which the correction liquid is injected and an application needle having substantially the same diameter as the first hole are provided, and the tip of the application needle Holding in the correction liquid injected into the container, causing the tip of the application needle to protrude from the first hole and attaching the correction liquid to the tip of the application needle, and the tip of the application needle And applying a correction liquid adhering to the tip of the application needle to the defective part in contact with the defective part. Also in this case, the step of reciprocating the application needle between the defective portion and the ink tank (or paste tank) as in the conventional case is omitted. Further, it is not necessary to provide a waiting time after the correction liquid is attached to the tip of the application needle as in the prior art, or the waiting time can be shortened. For this reason, the time required for defect correction is shortened, and the configuration of the apparatus is simplified. In addition, since the tip of the application needle is held in the correction liquid and is on standby, the correction liquid adhering to the tip of the application needle is prevented from being dried, and the cleaning process of the tip of the application needle can be omitted. It becomes.

[Embodiment 1]
FIG. 1 is a diagram showing an overall configuration of a pattern correction apparatus according to Embodiment 1 of the present invention. In FIG. 1, a pattern correction apparatus 1 includes an observation optical system 2 for observing the surface of a substrate, a monitor 3 for displaying an observed image, and irradiating the substrate with laser light through the observation optical system 2 to cut unnecessary portions. A cutting laser unit 4 to be applied, a coating mechanism unit 5 for applying a correction liquid to the tip of the coating needle and coating the defective part of the substrate, a substrate heating unit 6 for heating the correction liquid applied to the defective part, and a defective part An image processing unit 7 for recognizing the image, a host computer 8 for controlling the entire apparatus, and a control computer 9 for controlling the operation of the apparatus mechanism unit. In addition, an XY stage 10 that moves a substrate having a defective portion in the XY direction (horizontal direction), a chuck unit 11 that holds the substrate on the XY stage 10, and the observation optical system 2 and the coating mechanism unit 5 are moved in the Z direction. A Z stage 12 that is moved in the (vertical direction) is provided.

  The XY stage 10 is used to relatively move the substrate to an appropriate position when the correction liquid is applied to the defective portion by the application mechanism unit 5 or when the surface of the substrate is observed by the observation optical system 2. The XY stage 10 shown in FIG. 1 has a configuration in which two uniaxial stages are stacked in a perpendicular direction. However, the XY stage 10 only needs to be able to move the substrate relative to the observation optical system 2 and the coating mechanism unit 5, and is limited to the configuration of the XY stage 10 shown in FIG. is not. In recent years, gantry-type XY stages that can move independently in the X-axis direction and the Y-axis direction have been widely adopted as the substrate size increases.

  2A to 2D are cross-sectional views showing the configuration and application operation of the main part of the pattern correction apparatus shown in FIG. With reference to FIG. 2 (A), the coating mechanism unit 5 includes a coating cylinder 13 and a coating unit 14.

  The application cylinder 13 includes a drive shaft 13a that is movable in the vertical direction (Z direction). A linear guide 15 including a rail portion 15a and a slide portion 15b is provided on a side surface (right side in the drawing) of the drive shaft 13a. The rail portion 15a is fixed to the drive shaft 13a, and the slide portion 15b is movable in the vertical direction (Z direction) on the rail portion 15a. The application unit 14 is fixed to the slide portion 15b. With the configuration described above, the drive shaft 13a of the application cylinder 13 moves the application unit 14 in the vertical direction.

  As the coating cylinder 13, an electric cylinder or an air cylinder can be used. When precise control is required for the application cylinder 13, it is preferable to use a cylinder using a linear guide bearing.

  The linear guide 15 has a configuration of a circulation type rolling guide in which a rolling element (ball or the like) is interposed between the slide portion 15b and the rail portion 15a, and the slide portion 15b can freely move on the rail 15a with an extremely light force. It is possible to move linearly. A stopper 16 is fixed to the lower end of the rail portion 15a. Due to the weight of the slide unit 15b and the coating unit 14, the slide unit 15b is lowered to the lower end of the rail unit 15a, and the slide unit 15b is received by the stopper 16 so as not to come out of the rail unit 15a. If the linear guide 15 has a function of preventing the slide portion 15b from coming off, the stopper 16 is unnecessary. Also, here, the rail portion 15a is fixed to the drive shaft 13a, but the rail portion and the slide portion are interchanged, the slide portion is fixed to the drive shaft 13a, and the coating unit 14 is fixed to the rail portion. It doesn't matter.

  The application unit 14 includes a container 18 into which the correction liquid 17 is injected and a case 21 that houses a cylinder portion 20 that drives the application needle 19 up and down. The cylinder portion 20 is fixed to the case 21, and the application needle 19 is fixed to the drive shaft 20 a of the cylinder portion 20 in the axial direction (vertical direction).

  Holes 18a and 18b through which the application needle 19 can pass are opened in the upper wall and the bottom wall of the container 18, respectively. The container 18 is made of, for example, a fluorine resin or a metal material that is not corroded by the correction liquid 17. Alternatively, the inside of the container 18 made of a metal material may be coated with a fluorine resin or the like. The diameters of the holes 18 a and 18 b of the container 18 are slightly larger than the outer diameter of the application needle 19. The inner peripheral surfaces of the holes 18a and 18b function as sliding guide surfaces that guide the application needle 19 so as to be movable in the vertical direction.

  The outer diameter of the application needle 19 is 1 mm or less, and is usually about 0.7 to 0.4 mm. The application needle tip 19a is tapered so as to taper as it approaches the tip, and has a flat tip surface with a diameter of about 30 μm to 70 μm. As the applicator needle 19, for example, one having the same diameter at a portion other than the applicator needle tip portion 19 a or one having a diameter close to the applicator needle tip portion 19 a being reduced stepwise is used.

  The hole 18b formed in the bottom wall of the container 18 is very small, and the correction liquid 17 does not leak from the hole 18b due to the surface tension of the correction liquid 17 and the water / oil repellency of the container 18.

  As shown in FIG. 2A, in the standby state before the start of the application operation, the application needle 19 passes through the hole 18a in the upper wall of the container 18, and the application needle tip 19a is in the correction liquid 17. Soaked.

  As the correction liquid 17, when correcting the white defect of the liquid crystal color filter, the same color ink as the colored layer of the white defect portion is used. Further, when correcting rib defects of a plasma display, a paste in which glass fine particles, which are rib materials, are dispersed in a solvent is used. Moreover, when correcting the open defect of an electrode, a silver paste or a gold paste is used. The correction liquid 17 is adjusted in advance using a diluting liquid so as to obtain an optimum viscosity. For example, the viscosity is adjusted to about 30 cP (centipoise) in the case of ink and 1000 to tens of thousands cP in the case of paste. The injection amount of the correction liquid 17 may be such that the coating needle tip 19a is immersed. Since the amount of the correction liquid consumed in one application operation is pl (picoliter), the correction liquid 17 to be injected into the container 18 may be a very small amount (for example, 1 ml or less).

  Next, the operation at the time of pattern correction will be described with reference to FIGS. 2 (B) to 2 (D). When the application operation start command is given, the cylinder unit 20 lowers the drive shaft 20a as shown in FIG. At this time, the application needle 19 protrudes from the hole 18 b in the bottom wall of the container 18. A correction liquid (ink or paste) 17a is attached to the tip 19a of the application needle.

  FIG. 3 is a partially enlarged view showing a state of the application needle tip 19a shown in FIG. As shown in FIG. 3, when the application needle 19 protrudes through the hole 18 b on the bottom wall of the container 18, the hole 18 b slides and guides the application needle 19 in the vertical direction and adheres to the outer peripheral side surface of the application needle 19. Wipe off any excess correction fluid. For this reason, the correction liquid 17 does not leak out of the container 18. When the application needle 19 protrudes from the hole 18b, the correction liquid 17a adhering to the application needle tip 19a is already formed in a state where it can be applied.

  4A and 4B are views showing the state of the application needle tip 19a in the conventional pattern correction apparatus. When correcting the white defect of the liquid crystal color filter, ink having the same color as the colored layer of the white defect is used as the correction liquid 17. In the conventional pattern correction device, the application needle 19 is lowered and dipped in the correction liquid 17 in the ink tank. After the correction liquid is attached to the application needle tip 19a, the application needle 19 is raised and extracted from the ink tank. . At this moment, as shown in FIG. 4 (A), the correction liquid 17a adhering to the application needle tip 19a has a shape in which the lower part is swollen by its own weight. In this state, the tip surface of the application needle tip 19a processed into a planar shape cannot be used effectively, and the correction liquid 17a cannot be applied to the defective portion with a desired application diameter. As time passes, the correction liquid 17a adhering to the application needle tip 19a is pulled upward. After waiting for about a few seconds, as shown in FIG. 4B, a thin layer of the correction liquid 17a remains on the tip surface of the application needle tip 19a, and the correction liquid 17a is made to have a desired application diameter to form a defective portion. It becomes possible to apply. Thus, in the conventional pattern correction apparatus, it is necessary to wait for several seconds when applying the correction liquid 17a to the defective portion.

  However, in the first embodiment, as shown in FIG. 3, when the application needle 19 protrudes from the hole 18b, the correction liquid 17a attached to the application needle tip 19a is already formed in a state where it can be applied. . Therefore, it is not necessary to provide a waiting time after the correction liquid 17a is attached to the coating needle tip 19a as in the prior art, or the waiting time can be shortened. For this reason, the time required for one coating operation is shortened.

  Next, as shown in FIG. 2C, the application cylinder 13 lowers the drive shaft 13a by a predetermined distance L1. The predetermined distance L1 is set in advance so as to be slightly larger than the distance L2 from the application needle tip 19a to the defect 22a in the state of FIG. For this reason, after the application unit 14 is lowered together with the drive shaft 13a and the application needle tip 19a contacts the defective part 22a of the substrate 22, the slide part 15b rises on the rail part 15a. At this time, the application unit 14 also moves up together with the slide portion 15b. The magnitude of the load applied from the application needle tip 19a to the defect 22a during the application operation is the total value of the weights of the slide portion 15b and the application unit 14. Therefore, an excessive pressure is not applied from the coating needle tip 19a to the defect 22a, and the substrate 22 is not damaged.

  After applying the correction liquid 17a from the tip end portion 19a of the application needle to the defective portion 22a in this way, the application cylinder 13 raises the drive shaft 13a to the original position as shown in FIG. At this time, the coating unit 14 is also raised to the original position. Thereafter, the cylinder part 20 raises the drive shaft 20a and returns the application needle tip part 19a to the correction liquid 17 (see FIG. 2A), and one application operation is completed. If it is necessary to further apply the correction liquid 17a to the defective portion 22a, this application operation may be repeated. Further, the larger the defect portion 22a, the greater the number of necessary application operations. However, the correction liquid 17a can be reattached to the application needle tip 19a simply by moving the application needle 19 up and down.

  Therefore, in the first embodiment, since the step of reciprocating the application needle 19 between the defect portion 22a and the ink tank (or paste tank) as in the prior art is omitted, the time required for defect correction is shortened. . The correction liquid 17 is contained in a sealed container 18 except for the holes 18a and 18b, and the application needle 19 is always inserted into the hole 18a on the upper wall of the container 18 with a small gap. Therefore, the area where the correction liquid 17 directly contacts the atmosphere is small. Accordingly, evaporation of the diluting liquid (solvent) of the correction liquid 17 can be prevented, and the number of days (exchange period) in which the correction liquid 17 can be used can be increased. Therefore, maintenance of the pattern correction apparatus 1 can be reduced. Can be planned. Further, since the application needle tip 19a is immersed in the correction liquid 17 in the standby state of the application operation, the correction liquid adhering to the application needle tip 19a can be prevented from being dried, and the application needle tip 19a is washed. A process can also be omitted.

  Conventionally, a plurality of application needles 19 having different tip diameters are prepared, and the application needles 19 are selected and used according to the size of the defect. However, since the time required for one application operation is short in the first embodiment, the number of application operations may be adjusted by using only one application needle 19 having the smallest tip portion diameter. Accordingly, the configuration of the apparatus is simplified.

  After an appropriate amount of correction liquid is applied to the defective portion 22a, the range including the defective portion 22a is heated using the substrate heating section 6 shown in FIG. 1, and the applied correction liquid is dried and fired. It is also possible to do. Note that a heater for heating the entire substrate 22 may be incorporated in the chuck unit 11, or the heater incorporated in the chuck unit 11 and the substrate heating unit 6 may be used in combination. Further, when the correction liquid 17 is an ultraviolet curing type, the substrate heating unit 6 may be changed to an ultraviolet irradiation device, or the ultraviolet irradiation device may be provided below the chuck portion 11 made of glass.

  5-7 is a figure which shows a mode that the defect part of various board | substrates was corrected. FIG. 5 shows that the open defect portion 23a of the electrode 23 formed on the surface of a substrate such as a plasma display is continuously applied a plurality of times using a conductive correction liquid (silver paste or the like). It shows how it was corrected.

  In FIG. 6, a correction liquid (paste) containing glass, which is a rib material, is applied to the defect 24a of the rib 24 formed on the rear panel substrate of the plasma display, and dried by the substrate heating unit 6. It shows how the defect was corrected. Thus, when the defect | deletion part 24a is large, apply | coating continuously several times, shifting an application position. Although not shown, phosphor defects in the recesses between the ribs and color loss defects in the black portion on the upper surface of the ribs can be corrected in the same manner.

  FIG. 7 shows a defect correction by performing a coating operation several times continuously on the white defect portion 25a in the colored layer of a pixel 25 on the liquid crystal color filter substrate using a correction liquid (ink) of the same color as the colored layer. It shows how it was done. When correcting defects other than white defects such as black defects, foreign substance defects, protrusion defects, and mixed color defects of the liquid crystal color filter, laser processing is performed by the cutting laser unit 4 shown in FIG. After making the defect, the coating mechanism unit 5 corrects the defect. When correcting the white spot defect of the liquid crystal color filter, the laser processing may be omitted.

  Although not shown, a defect of a mask made of metal, resin, or the like can be corrected similarly.

  8A to 8D are diagrams illustrating a first modification of the first embodiment. 8A to 8D, the cylinder portion 20 shown in FIGS. 2A to 2D is replaced with an air cylinder.

  In FIG. 8A, the application unit 14 is fitted into a piston 26 that performs a piston motion in the vertical direction in the case 21 and a ring-shaped groove formed on the outer peripheral side surface of the piston 26. An O-ring 27 for enhancing the performance and a spring (spring) 28 that is fixed to the upper wall of the container 18 and pushes up the piston 26 upward are provided. The application needle 19 is fixed to the piston 26 in the vertical direction. An air vent hole 21 a is opened on the side surface (right side in the figure) of the case 21. A pipe 29 for injecting high-pressure air into the case 21 from the outside is provided on the upper wall of the case 21. In the standby state before the start of the application operation, the piston 26 is pushed upward by the spring 28.

  Next, the operation at the time of pattern correction will be described with reference to FIGS. 8B to 8D. When a command for starting the coating operation is given, high-pressure air is supplied from the outside into the case 21 through the pipe 29. Then, as shown in FIG. 8B, air escapes from the air vent 21a to the outside, and the piston 26 descends in the case 21. At this time, the application needle 19 protrudes from the hole 18 b in the bottom wall of the container 18. The correction liquid 17a adheres to the application needle tip 19a.

  Next, as shown in FIG. 8C, the application cylinder 13 lowers the drive shaft 13a by a predetermined distance. After the application unit 14 moves down together with the drive shaft 13a and the application needle tip 19a contacts the defective portion 22a of the substrate 22, the slide portion 15b moves up on the rail portion 15a. At this time, the application unit 14 also moves up together with the slide portion 15b. After applying the correction liquid 17a from the tip end portion 19a of the application needle to the defective portion 22a in this way, the application cylinder 13 raises the drive shaft 13a to the original position as shown in FIG. 8D. At this time, the coating unit 14 is also raised to the original position. After that, when air flows out from the inside of the case 21 through the pipe 29, the piston 26 is pushed upward by the spring 28 (see FIG. 8A). As a result, the tip end portion 19a of the application needle is returned to the correction liquid 17, and one application operation is completed.

  9A to 9D are diagrams illustrating a second modification of the first embodiment. 9A to 9D, an electromagnet 32 and a permanent magnet 31 are used in place of the cylinder portion 20 shown in FIGS. 2A to 2D. Further, the application unit 14 is directly fixed to the side surface (right side in the figure) of the drive shaft 13 a of the application cylinder 13 without providing the linear guide 15.

  In FIG. 9A, the application unit 14 has an electromagnet 32 fixed to the upper part in the case 21, a stopper 30 in which the application needle 19 is press-fitted and fixed (or bonded and fixed) in the vertical direction, and an adhesive to the stopper 30. A fixed permanent magnet 31 is provided. In a standby state before the start of the coating operation, a current is passed through the coil of the electromagnet 32 so that the permanent magnet 31 is attracted to the electromagnet 32. In addition, after the permanent magnet 31 is once attracted to the electromagnet 32, the current flowing through the coil of the electromagnet 32 may be stopped.

  Next, the operation at the time of pattern correction will be described with reference to FIGS. 9B to 9D. When a command for starting the application operation is given, the direction of the current flowing through the coil of the electromagnet 32 is reversed to cause the electromagnet 32 and the permanent magnet 31 to repel each other. Then, as shown in FIG. 9B, the permanent magnet 31, the stopper 30 and the application needle 19 are integrally lowered in the case 21 in the vertical direction, and the stopper 30 is received by the upper wall of the container 18. At this time, the application needle 19 protrudes from the hole 18 b in the bottom wall of the container 18. The correction liquid 17a adheres to the application needle tip 19a.

  Next, as shown in FIG. 9C, the application cylinder 13 lowers the drive shaft 13a by a predetermined distance. After the application unit 14 is lowered together with the drive shaft 13 a and the application needle tip 19 a comes into contact with the defective portion 22 a of the substrate 22, the permanent magnet 31, the stopper 30 and the application needle 19 are pushed up by the substrate 22. At this time, the inner peripheral surfaces of the holes 18a and 18b function as sliding guide surfaces that guide the application needle 19 so as to be movable in the vertical direction. The magnitude of the load applied from the tip end portion 19 a of the application needle to the defective portion 22 a during the application operation is the total value of the weights of the permanent magnet 31, the stopper 30 and the application needle 19. After the correction liquid 17a is applied from the coating needle tip 19a to the defective portion 22a in this way, the direction of the current flowing through the coil of the electromagnet 32 is reversed again as shown in FIG. Is attracted to the electromagnet 32. As a result, the tip end portion 19 a of the application needle is returned into the correction liquid 17. Thereafter, the application cylinder 13 raises the drive shaft 13a to the original position (see FIG. 9A), and one application operation is completed.

  10A and 10B are diagrams illustrating a third modification of the first embodiment. 10A and 10B, an electromagnetic solenoid 33 is used in place of the electromagnet 32 and the permanent magnet 31 shown in FIGS. 9A to 9D.

  10A, the electromagnetic solenoid 33 includes a solenoid coil 33b fixed to the upper part in the case 21 and a movable iron core 33a to which the application needle 19 is fixed in the axial direction (vertical direction). In a standby state before the start of the coating operation, a current is passed through the solenoid coil 33b of the electromagnetic solenoid 33 to attract the movable iron core 33a upward.

  When a command for starting the application operation is given, the current flowing through the solenoid coil 33b is stopped. Then, as shown in FIG. 10B, the movable iron core 33 a and the application needle 19 are integrally lowered in the case 21 and the movable iron core 33 a is received by the upper wall of the container 18. At this time, the application needle 19 protrudes from the hole 18 b in the bottom wall of the container 18. The correction liquid 17a adheres to the application needle tip 19a.

  Thereafter, as in the case shown in FIG. 9C, the application cylinder 13 lowers the drive shaft 13a by a predetermined distance. After applying the correction liquid 17a from the tip end portion 19a of the application needle to the defective portion 22a, a current is supplied again to the solenoid coil 33b of the electromagnetic solenoid 33 to attract the movable iron core 33a into the solenoid coil 33b. Then, similarly to the case shown in FIG. 9D, the application needle tip 19 a is returned into the correction liquid 17. Thereafter, when the application cylinder 13 raises the drive shaft 13a to the original position, one application operation is completed.

[Embodiment 2]
In the configuration of the coating mechanism unit 5 shown in the first embodiment, the accuracy of the position control of the coating needle 19 with respect to the defective portion 22a depends on the size of the gap between the holes 18a and 18b of the container 18 and the coating needle 19. . For this reason, when highly precise position control of the application needle 19 is required, a configuration in which the application needle 19 is fixed to the highly rigid linear guide 15 as described below is preferable.

  FIGS. 11A to 11C are cross-sectional views showing the configuration and application operation of the main part of the pattern correction apparatus according to Embodiment 2 of the present invention. Referring to FIG. 11A, a rail portion 15a is fixed to the side surface (right side in the drawing) of the drive shaft 13a of the application cylinder 13, and an application needle fixing plate 34 is fixed to the slide portion 15b. The application needle 19 is fixed to the application needle fixing plate 34 in the axial direction (vertical direction). The application needle fixing plate 34 is fixed to the slide portion 15b using a screw or the like (not shown). A stopper 16 is fixed to the lower end of the rail portion 15a. Due to the weight of the slide portion 15b, the application needle fixing plate 34, and the application needle 19, the slide portion 15b is lowered to the lower end of the rail portion 15a, and the slide portion 15b is received by the stopper 16 so as not to come out of the rail portion 15a. If the linear guide 15 has a function of preventing the slide portion 15b from coming off, the stopper 16 is unnecessary.

  The container fixing plate 35 is fixed to the main body of the application cylinder 13. The container 18 into which the correction liquid 17 has been injected is fitted and fixed in the recess of the container fixing plate 35. The upper wall and the bottom wall of the container 18 are provided with holes 18a and 18b through which the application needle 19 can pass. Further, the container fixing plate 35 has a hole 35 a larger than the hole 18 b of the container 18. The hole 35 a of the container fixing plate 35 is located directly below the hole 18 b of the container 18 and does not hinder the vertical movement of the application needle 19.

  Although the container fixing plate 35 is fixed to the main body of the application cylinder 13 here, the container fixing plate 35 may be fixed anywhere in the apparatus as long as the relative position between the main body of the application cylinder 13 and the container 18 does not always change.

  As shown in FIG. 11 (A), in the standby state before the start of the application operation, the application needle 19 penetrates the hole 18a in the upper wall of the container 18, and the application needle tip 19a is in the correction liquid 17. Soaked.

  When a command for starting the application operation is given, the application cylinder 13 lowers the drive shaft 13a as shown in FIG. At this time, the linear guide 15, the application needle fixing plate 34 and the application needle 19 are lowered together with the drive shaft 13 a, and the application needle 19 protrudes from the hole 18 b in the bottom wall of the container 18 and the hole 35 a in the container fixing plate 35. The correction liquid 17a adheres to the application needle tip 19a.

  When the application cylinder 13 lowers the drive shaft 13a by a predetermined distance L3, as shown in FIG. 11C, after the application needle tip 19a contacts the defective part 22a of the substrate 22, the slide part is moved on the rail part 15a. 15b rises. At this time, the application needle fixing plate 34 and the application needle 19 are also raised together with the slide portion 15b. The magnitude of the load applied from the tip end portion 19a of the application needle to the defective portion 22a during the application operation is a total value of the weights of the slide portion 15b, the application needle fixing plate 34, and the application needle 19. Therefore, an excessive pressure is not applied from the coating needle tip 19a to the defect 22a, and the substrate 22 is not damaged.

  The predetermined distance L3 by which the drive shaft 13a is lowered by the application cylinder 13 is, for example, about 0.5 to 1 mm after the application needle tip 19a comes into contact with the defective portion 22a of the substrate 22. It is preset as follows.

  Thus, after apply | coating the correction liquid 17a to the defect part 22a from the application needle front-end | tip part 19a, the application | coating cylinder 13 raises the drive shaft 13a to the original position. At this time, the slide portion 15b, the application needle fixing plate 34, and the application needle 19 are also raised to their original positions (see FIG. 11A). As a result, the tip end portion 19a of the application needle is returned to the correction liquid 17, and one application operation is completed.

  12A to 12D are diagrams illustrating a first modification of the second embodiment. FIG. 12A is a top view illustrating the configuration of the coating mechanism unit 5. FIGS. 12B to 12D are side views showing the configuration of the coating mechanism section 5 and the coating operation. Even with the configuration shown in FIGS. 12A to 12D, the position control of the application needle 19 can be performed with high accuracy.

  Referring to FIGS. 12A and 12B, a mounting base 39 is fixed to the side surface of the drive shaft 13 a of the application cylinder (not shown) 13. On the side surface of the mounting base 39, a linear guide 15 composed of a rail portion 15a and a slide portion 15b and a linear guide 36 composed of a rail portion 36a and a slide portion 36b are provided. The slide portion 15b is fixed to the mounting base 39, and the rail portion 15a is guided by the slide portion 15b and is movable in the vertical direction (Z direction). A positioning table 37 is fixed to the rail portion 15a. The slide portion 36b is fixed to the mounting base 39, and the rail portion 36a is guided by the slide portion 36b and is movable in the vertical direction (Z direction). A positioning base 41 is fixed to the rail portion 36a.

  The application needle fixing plate 34 is fixed to the guide portion 37 a of the positioning table 37 by a fixing screw 38. The application needle 19 is fixed to the application needle fixing plate 34 in the axial direction (vertical direction). The guide portion 37 a of the positioning table 37 facilitates the alignment of the application needle fixing plate 34 when the application needle 19 is replaced. In the standby state before the start of the application operation, the rail portion 15a is lowered to the lower end of the slide portion 15b by the weight of the rail portion 15a, the positioning base 37, the application needle fixing plate 34, the application needle 19 and the fixing screw 38, and the rail portion 15a. Is received by a stopper (not shown) so as not to come out of the slide portion 15b.

  A container base 40 is fixed to the guide portion 41 a of the positioning base 41 by a fixing screw 42. The container base 40 is formed with a correction liquid storage hole 40a into which the correction liquid 17 is injected. A hole 40b through which the application needle 19 can pass is opened in the bottom wall of the correction liquid storage hole 40a. A lid 43 is placed on the upper part of the correction liquid storage hole 40a to prevent the solvent in the correction liquid 17 from volatilizing and prevent foreign matter from entering. A hole 43 a through which the application needle 19 can pass is opened at the center of the lid 43. The guide portion 41a of the positioning table 41 facilitates the alignment of the container table 40 when the correction liquid 17 is replaced. In the standby state before the start of the coating operation, the rail part 36a is lowered to the lower end of the slide part 36b by the weight of the positioning base 41, the container base 40, the correction liquid 17, the lid 43 and the fixing screw 38, and the rail part 36a is the slide part. It is received by a stopper (not shown) so as not to escape from 36b. A protrusion 40 c is provided on the bottom surface of the container base 40. The protrusion 40c is made of a resin member that does not damage the contact surface of the substrate 22, for example.

  As shown in FIG. 12B, in a standby state before the start of the application operation, the application needle 19 penetrates the hole 43a of the lid 43, and the application needle tip 19a is immersed in the correction liquid 17. Yes.

  Here, the container base 40 is processed to provide the correction liquid storage hole 40a. However, the container 18 as shown in FIGS. 11A to 11C has a recess formed so that it can be fitted. You may make it the structure fixed to a stand.

  When an application operation start command is given, the application cylinder (not shown) 13 lowers the drive shaft 13a as shown in FIG. Then, the application needle fixing plate 34 and the container base 40 are lowered together with the drive shaft 13a, and the protrusion 40c on the bottom surface of the container base 40 comes into contact with the substrate 22, and then is guided by the slide part 36b to raise the rail part 36a. At this time, the container base 40 also rises together with the rail portion 36a. Thereby, the application needle 19 protrudes from the hole 40b of the container base 40. The correction liquid 17a adheres to the application needle tip 19a.

  When the application cylinder 13 (not shown) further lowers the drive shaft 13a, as shown in FIG. 12D, the application needle tip 19a comes into contact with the defective portion 22a of the substrate 22 and is then guided to the slide portion 15b. As a result, the rail portion 15a rises. At this time, the application needle fixing plate 34 also rises together with the rail portion 15a. The magnitude of the load applied from the tip end portion 19a of the application needle to the defective portion 22a during the application operation is a total value of the weights of the rail portion 15a, the positioning base 37, the application needle fixing plate 34, the application needle 19 and the fixing screw 38. Therefore, an excessive pressure is not applied from the coating needle tip 19a to the defect 22a, and the substrate 22 is not damaged.

  In this manner, after applying the correction liquid 17a from the tip end portion 19a of the application needle to the defective portion 22a, the application cylinder (not shown) 13 raises the drive shaft 13a to the original position. At this time, the application needle fixing plate 34 and the container base 40 are also raised to their original positions (see FIG. 12B). As a result, the tip end portion 19a of the application needle is returned to the correction liquid 17, and one application operation is completed.

  Here, the case where the slide portions 15b and 36b are fixed to the mounting base 39 is shown, but the rail portion and the slide portion are interchanged, the rail portion is fixed to the mounting base 39, and the positioning base 37, 41 may be fixed.

  13A and 13B are diagrams illustrating a second modification of the second embodiment. 13A and 13B, the application cylinder 13 and the application unit 44 are separated.

  In FIG. 13A, a slide portion 46 b of a linear guide 46 is fixed to the inner peripheral side surface of a bottomed cylindrical case 47 of the coating unit 44. The rail portions 46a and 15a of the linear guides 46 and 15 are fixed to both side surfaces of the push rod 45, respectively. An application needle fixing plate 34 is fixed to the slide portion 15b. The application needle 19 is fixed to the application needle fixing plate 34 in the axial direction (vertical direction). Stoppers 16a and 16b are fixed to the lower ends of the rail portions 46a and 15a, respectively. Due to the weight of the slide portion 15b, the application needle fixing plate 34, and the application needle 19, the slide portion 15b is lowered to the lower end of the rail portion 15a, and the slide portion 15b is received by the stopper 16b so as not to come out of the rail portion 15a. If the linear guides 46 and 15 have a function of preventing the slide portions 46b and 15b from coming off, the stoppers 16a and 16b are unnecessary. In a standby state before the start of the application operation, the push rod 45 is pushed upward by a spring (spring) 48 fixed to the bottom wall of the case 47. The push rod 45 is configured not to be pushed upward above a predetermined position by a stopper 16a provided on the rail portion 46a.

  The container 18 into which the correction liquid 17 has been injected is fitted and fixed in a recess in the bottom wall of the case 47. The upper wall and the bottom wall of the container 18 are provided with holes 18a and 18b through which the application needle 19 can pass. Further, a hole 47 a larger than the hole 18 b of the container 18 is opened in the bottom wall of the case 47.

  The application unit 44 is fitted and fixed in a recess 49 b formed in the unit support plate 49. The unit support plate 49 is fixed to the Z stage 12 shown in FIG. The unit support plate 49 has a hole 49a that is larger than the hole 18b of the container 18. Both the hole 47a of the case 47 and the hole 49a of the unit support plate 49 are located directly below the hole 18b of the container 18, and do not hinder the vertical movement of the application needle 19.

  As shown in FIG. 13A, in the standby state before the start of the application operation, the application needle 19 passes through the hole 18a in the upper wall of the container 18, and the application needle tip 19a is in the correction liquid 17. Soaked. Further, the drive shaft 13 a of the application cylinder 13 faces the push rod 45 with a certain gap. The application cylinder 13 is fixed on the Z stage 12 shown in FIG.

  When a command to start the coating operation is given, the coating cylinder 13 lowers the drive shaft 13a as shown in FIG. Then, the push rod 45 is pushed downward by the drive shaft 13 a, and the application needle 19 protrudes from the hole 18 b in the bottom wall of the container 18. Next, when the application cylinder 13 and the application unit 44 are lowered as a whole by lowering the Z stage 12, the application needle tip 19a contacts the defective portion 22a of the substrate 22, and then the slide portion 15b on the rail portion 15a. Rises. At this time, the application needle fixing plate 34 and the application needle 19 are also raised together with the slide portion 15b. The magnitude of the load applied from the tip end portion 19a of the application needle to the defective portion 22a during the application operation is a total value of the weights of the slide portion 15b, the application needle fixing plate 34, and the application needle 19. Therefore, an excessive pressure is not applied from the coating needle tip 19a to the defect 22a, and the substrate 22 is not damaged.

  In this way, after applying the correction liquid 17a from the tip end portion 19a of the application needle to the defect portion 22a, the Z stage 12 is raised to the original position, and the application cylinder 13 raises the drive shaft 13a to the original position. At this time, since the push rod 45 is pushed upward by the restoring force of the spring 48, the slide portion 15b, the application needle fixing plate 34, and the application needle 19 are also raised to their original positions (see FIG. 13A). As a result, the tip end portion 19a of the application needle is returned to the correction liquid 17, and one application operation is completed.

  Thus, in the structure which isolate | separates the application | coating cylinder 13 and the application | coating unit 44, since it is not necessary to have the original application | coating cylinder 13 in the application | coating unit 44, the length of the application | coating unit 44 does not need to become so long. Further, when the pattern correction apparatus includes a plurality of application units 44 and includes a mechanism for controlling the relative position between the application unit 44 selected from the plurality of application units 44 and the application cylinder 13, Sharing is possible.

  FIGS. 14A and 14B are diagrams illustrating a third modification of the second embodiment. 14A and 14B, the application cylinder 13 is built in the application unit 44. A coupling portion 50 coupled to the push rod 45 is provided at the lower end of the drive shaft 13 a of the coating cylinder 13. In this case, the spring 48 shown in FIGS. 13A and 13B is not necessary. As the application cylinder 13, an air cylinder or an electric cylinder can be used. Since the operation in this case is the same as that in FIGS. 13A and 13B, description thereof is omitted.

[Embodiment 3]
FIG. 15 is a cross-sectional view showing a configuration of a main part of a pattern correction apparatus according to Embodiment 3 of the present invention. 15, the configuration of the container 18 shown in FIGS. 11A to 11C will be described in detail.

  Holes 18a and 18b through which the application needle 19 can pass are provided in the center of the upper wall and the bottom wall of the container 18 into which the correction liquid 17 is injected. The holes 18a and 18b are located on the same axis. The upper surface 18c of the bottom wall of the container 18 has a tapered shape in which the wall thickness decreases as the hole 18b is approached. Therefore, even if the remaining amount of the correction liquid 17 decreases, the application needle tip 19a is immersed in the correction liquid 17, so that the correction liquid 17 can be used effectively.

  A ring-shaped groove 18e is formed on the lower surface of the bottom wall of the container 18, and a ring-shaped magnet 31 is fitted in the groove 18e. The container 18 is fitted into a recess 35b of a container fixing plate 35 made of an iron-based magnetic material. Here, the container 18 is fixed to the container fixing plate 35 by a suction force acting between the magnet 31 fitted in the container 18 and the container fixing plate 35. With such a configuration, it is possible to replace and align the container 18 without using a tool.

  A hole 35 a larger than the hole 18 b of the container 18 is opened in the container fixing plate 35. The hole 35 a of the container fixing plate 35 is located directly below the hole 18 b of the container 18 and does not hinder the vertical movement of the application needle 19.

  A solenoid 52 is fixed to the side surface (right side in the figure) of the container fixing plate 35. A shutter 51 is connected to the solenoid 52 via an arm 51b, and the solenoid 52 rotationally drives the shutter 51 in the horizontal direction. The shutter 51 has a concave cross-sectional shape. The recess 51a of the shutter 51 is located below the hole 35a of the container fixing plate 35, and receives the correction liquid 17 when the correction liquid 17 leaks from the hole 18b of the container 18. The solenoid 52 opens the shutter 51 during the application operation, and closes the shutter 51 in the standby state of the application operation. Therefore, the correction liquid 17 is prevented from dripping onto the substrate 22 in the standby state of the coating operation.

  FIG. 16 is a diagram illustrating a first modification of the third embodiment. In FIG. 16, a recess is formed on the upper surface 18d of the bottom wall of the container 18, and a hole 18b is formed at the bottom of the recess. In this case as well, even when the correction liquid 17 remains, the application needle tip 19a is immersed in the correction liquid 17, so that the correction liquid 17 can be used effectively.

  The shutter 51 is provided with an absorption sheet 53 for absorbing the correction liquid 17 leaking from the hole 18b of the container 18. Also in this case, the correction liquid 17 is prevented from dripping onto the substrate 22 in the standby state of the coating operation, as in the case where the shutter 51 is provided with the recess 51a. In addition, as the absorbent sheet 53, a sheet having excellent absorbability and less self-dusting is preferable. For example, a PVA (polyvinyl alcohol) based porous sheet is used.

  FIG. 17 is a diagram illustrating a second modification of the third embodiment. In FIG. 17, the tapered portion 18 f formed on the lower surface of the bottom wall of the container 18 has a tapered shape in which the wall thickness decreases as the hole 18 b is approached. An absorption sheet 54 processed into a ring shape is provided on the outer peripheral portion of the tapered portion 18f. The absorbent sheet 54 is fixed to the container 18 with, for example, a double-sided tape.

  When the application operation is repeated a plurality of times, the correction liquid 17 adhering to the application needle tip 19a may leak to the outside of the container 18 as the application needle 19 slides in the hole 18b of the container 18. At this time, the leaked correction liquid 17 is absorbed by the absorbent sheet 54 along the tapered lower surface 18f. In this case, the shutter 51 shown in FIG. 16 may be omitted.

  FIG. 18 is a diagram illustrating a third modification of the third embodiment. In FIG. 18, in order to reduce the friction between the hole 18 a provided in the upper wall of the container 18 and the application needle 19, the outer peripheral side surface 19 b of the application needle 19 has a sliding member (fluorine having excellent slidability). Resin). The hole 18a is formed of a sliding bearing (resin or the like) 55 having excellent slidability. In addition, in order to lengthen the sliding distance between the application needle 19 and the sliding bearing 55, the sliding bearing 55 may be lengthened in the vertical direction (see the dotted line portion). Further, the inner peripheral surface of the hole 18a may be coated with a sliding member (such as a fluororesin) having excellent slidability.

  Thus, by coating the outer peripheral side surface 19b of the application needle 19, the slidability between the application needle 19 and the holes 18a, 18b is improved, and the wear of the holes 18a, 18b can be reduced. Although not shown, the hole 18b in the bottom wall of the container 18 may be formed by a similar sliding bearing.

  FIG. 19 is a diagram illustrating a fourth modification of the third embodiment. In FIG. 19, a replenishment hole 18 g for replenishing the correction fluid 17 is opened on the upper wall of the container 18. In this case, the correction liquid 17 can be refilled into the container 18 by inserting a syringe or the like containing the replenishment correction liquid 17 into the replenishment hole 18g. After refilling, the container 18 is sealed by closing the refill hole 18g with the adhesive sheet 56. The replenishing hole 18g may be provided on the side wall of the container 18.

[Embodiment 4]
FIG. 20 is a cross-sectional view showing a configuration of a main part of a pattern correction apparatus according to Embodiment 4 of the present invention, and shows an example in which the application mechanism unit 5 shown in FIG. 8A is applied. When correcting the white defect of the liquid crystal color filter, the coating unit 14 of each color corresponding to the color R (red), G (green), B (blue) and black matrix BM (black) of the colored layer of the pixel on the substrate. It is necessary to prepare. Further, in some cases, it is necessary to prepare a coating unit 14 for an overcoat OC (overcoat ink) for surface protection.

  FIG. 20 shows a configuration in which the coating units 14 shown in FIG. 8A are provided for four colors. The fixed base 57 is fixed to the slide portion 15 b of the linear guide 15. Four coating units 14 are fixed on the fixed base 57. Further, holes 57 a corresponding to the respective application units 14 are opened in the fixing table 57. The hole 57a provided in the fixed base 57 does not hinder the vertical movement of the application needle.

  In this case, the selecting means (not shown) selects the coating unit 14 into which the correction liquid of the color desired to be used for defect correction is injected among the four coating units 14. And the piston in the selected application | coating unit 14 is dropped, and application | coating operation as shown to FIG.8 (B)-(D) is performed. Note that the offset position between each coating unit 14 and the observation optical system 2 shown in FIG. 1 is set in advance. Therefore, for example, after performing laser processing of the defective portion of the substrate using the observation optical system 2 and the cutting laser portion 4, the defective portion of the substrate is moved to XY just below the desired coating unit based on the set offset amount. The coating operation can be performed by moving the stage 10.

  With such a configuration, a mechanism for rotating the ink tank table as in the conventional pattern correction device is not required. Further, it is not necessary to wash the application needle every time the color of the correction liquid used is changed as in the prior art. For this reason, the configuration of the apparatus is simplified. Although not shown, the same applies when a plurality of coating units 14 shown in FIGS. 2A, 9A, and 10A are provided.

  FIG. 21 is a diagram illustrating a first modification of the fourth embodiment. FIG. 21 shows the coating unit 14 as viewed from above. Four coating units 14 are provided on the four side surfaces of the drive shaft 13a having a rectangular parallelepiped shape. Each application unit 14 is fixed to the drive shaft 13a by a linear guide 15 including a rail portion 15a and a slide portion 15b. Thus, when the some application | coating unit 14 is arranged in the circumference direction around the drive shaft 13a, size reduction of an apparatus is achieved. Although not shown, the same applies when a plurality of coating units 14 shown in FIGS. 2A, 9A, and 10A are provided.

  FIGS. 22A and 22B are diagrams showing a second modification of the fourth embodiment, and show an example in which the application mechanism unit 5 shown in FIG. 11A is applied. FIG. 22A is a front view of the coating mechanism unit 5, and FIG. 22B is an XX cross-sectional view of the coating mechanism unit 5.

  Referring to FIGS. 22A and 22B, the container fixing plate 35 is fixed to the application cylinder 13 body. The four containers 18 into which the correction liquids 17 of different colors are injected are fitted and fixed in the recesses of the container fixing plate 35. Holes 18a and 18b through which the application needle 19 can penetrate are opened in the upper wall and the bottom wall of each container 18, respectively. Further, the container fixing plate 35 has a hole 35 a larger than the hole 18 b of the container 18. The hole 35 a of the container fixing plate 35 is located directly below the hole 18 b of the container 18 and does not hinder the vertical movement of the application needle 19.

  A side surface 58 a of a hollow plate 58 having a space inside is fixed to the drive shaft 13 a of the coating cylinder 13. Further, on the other side surface 58 b of the hollow plate 58, four linear guides 15 are provided corresponding to the four containers 18. The rail portion 15 a of each linear guide 15 is fixed to the side surface 58 b of the hollow plate 58. An application needle fixing plate 34 is fixed to the slide portion 15b. The application needle 19 is fixed to the application needle fixing plate 34 in the axial direction (vertical direction). A stopper 16 is fixed to the lower end of the rail portion 15a.

  A pin 59 is fixed to the side surface of the application needle fixing plate 34 in the horizontal direction. The hollow plate 58 is provided with four cylinders 60 corresponding to the four application needle fixing plates 34. A lever 61 is fixed to the drive shaft 60a of each cylinder 60 in the horizontal direction. The lever 61 protrudes from a long hole 58 c provided in the side surface 58 b of the hollow plate 58, and the tip thereof is located immediately below the pin 59. The cylinder 60 has a role of hooking the pin 59 on the lever 61 and lifting the application needle fixing plate 34 and the slide portion 15b upward.

  Here, a case where the correction liquid 17 injected into the first container 18 from the left side is used for correction of the defective portion 22a of the substrate 22 will be described with reference to FIG. The cylinder 60 corresponding to the first container 18 from the left has the corresponding lever 61 positioned at the lowest end. The other cylinder 60 raises the corresponding lever 61 and pushes the pin 59 upward so that the corresponding application needle 19 is not immersed in the correction liquid 17. Thus, by using the four cylinders 60, only one of the four application needles 19 is selected and used.

  Referring to FIG. 22B, due to the weight of slide portion 15b, application needle fixing plate 34, and application needle 19, slide portion 15b descends to the lower end of rail portion 15a, and slide portion 15b does not come out of rail portion 15a. As shown in FIG. If the linear guide 15 has a function of preventing the slide portion 15b from coming off, the stopper 16 is unnecessary. In the standby state before the start of the application operation, the application needle 19 passes through the hole 18 a on the upper wall of the container 18, and the application needle tip 19 a is immersed in the correction liquid 17.

  About application | coating operation | movement, since it is the same as that of the case demonstrated using FIG. 11 (A)-(C), description is abbreviate | omitted. It is assumed that the offset position between each application needle 19 and the observation optical system 2 shown in FIG. 1 is set in advance.

  FIG. 23 is a diagram illustrating a third modification of the fourth embodiment, and illustrates an example in which the coating units 44 illustrated in FIG. 13A are provided for four colors.

  The unit support plate 49 is fixed to a stage 62 that is movable in the left-right direction, and the stage 62 is fixed to the Z stage 12, for example. Each application unit 44 is fitted and fixed in a recess 49 b formed in the unit support plate 49. The unit support plate 49 has a hole 49a that is larger than the hole 18b of the container 18. The hole 49a is located directly below the hole 18b of the container 18 and does not hinder the vertical movement of the application needle 19.

  The stage 62 moves the unit support plate 49 so that the push rod 45 of the coating unit 44 to be used is positioned directly below the drive shaft 13 a of the coating cylinder 13 among the four coating units 44. The drive shaft 13a of the application cylinder 13 is opposed to the push rod 45 with a certain gap.

  The application operation is the same as that described with reference to FIGS. 13A and 13B, and the description thereof is omitted. It is assumed that the offset position between each application needle 19 and the observation optical system 2 shown in FIG. 1 is set in advance.

  Thus, in the structure which isolate | separates the application | coating cylinder 13 and the application | coating unit 44, since it is not necessary to have the original application | coating cylinder 13 in the application | coating unit 44, the application | coating cylinder 13 can be shared. Further, since there is a certain distance between the application unit 44 and the drive shaft 13a of the application cylinder 13, the application unit 44 can be removed and replaced.

  The unit support plate 49 may be fixed to the Z stage 12 and the application cylinder 13 may be fixed to the stage 62. In this case, the application cylinder 13 is moved in the left-right direction by the stage 62. Further, the application cylinder 13 may be built in each application unit 44 without using the stage 62.

  FIG. 24 is a diagram illustrating a fourth modification of the fourth embodiment, and illustrates an example in which the coating units 44 illustrated in FIG. 14A are provided for four colors. The unit support plate 49 is fixed to the Z stage 12 shown in FIG. Each application unit 44 is fitted and fixed in a recess 49 b formed in the unit support plate 49.

  FIG. 25 is a partial enlarged view of a main part of the coating mechanism unit 5 shown in FIG. A hole 49 a larger than the hole 18 b of the container 18 is opened in the unit support plate 49. The hole 49a is located directly below the hole 18b of the container 18 and does not hinder the vertical movement of the application needle 19.

  A ring-shaped groove 47b is formed on the lower surface of the bottom wall of the case 47, and a ring-shaped magnet 63 is fitted in the groove 47b. The case 47 is fitted into a recess 49b of a unit support plate 49 made of an iron-based magnetic material. Here, the case 47 is fixed to the unit support plate 49 by the attractive force acting between the magnet 63 fitted in the case 47 and the case 47. In addition, a protrusion 47c is provided on the bottom surface of the bottom wall of the case 47 so as to protrude at a position shifted from the center of the bottom surface. The unit support plate 49 has a hole 49c into which the protrusion 47c can be fitted. With such a configuration, the replacement and alignment of the coating unit 44 can be simplified without using a tool. In addition, the relative position between the coating unit 44 and the unit support plate 49 can always be fixed.

  A hole may be provided in the lower surface of the bottom wall of the case 47 instead of the protrusion 47c, and a needle pin may be press-fitted and fixed to the hole via the hole 49c of the unit support plate 49. Further, a fitting portion may be provided on the side surface of the case 47 and the concave portion 49b of the unit support plate 49 so that the relative positions of the coating unit 44 and the unit support plate 49 are matched.

  FIGS. 26A and 26B are diagrams showing a fifth modification of the fourth embodiment, and show an example in which the coating units 44 shown in FIG. 14A are provided for four colors. FIG. 26A is a top view of the coating unit 44, and FIG. 26B is a side view of the coating unit 44.

  In each application unit 44, a flange 64 is fixed to the outer peripheral surface of a case 47 having a cylindrical shape. The circular unit support plate 49 is provided with a stepped hole 49d formed so that each coating unit 44 can be penetrated and the flange 64 can be fitted therein. With such a configuration, the four coating units 44 can be arranged on the unit support plate 49 in the circumferential direction. As in the case described with reference to FIG. 25, a ring-shaped magnet may be provided on the lower surface of the flange 64. Further, a protrusion may be provided on the lower surface of the flange 64 and a hole into which the protrusion can be inserted may be formed in the unit support plate 49.

  In this case, if the unit support plate 49 is rotated in the circumferential direction so that one coating unit 44 is selected from the four coating units 44 and used, the coating unit 44 to be used and the observation optics shown in FIG. It is only necessary to set an offset position with respect to the system 2 in advance. That is, it is not necessary to set the offset positions of the other three coating units 44 and the observation optical system 2.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

It is a figure which shows the whole structure of the pattern correction apparatus by Embodiment 1 of this invention. It is sectional drawing which shows the structure of the principal part of the pattern correction apparatus shown in FIG. 1, and application | coating operation | movement. It is the elements on larger scale which show the mode of the application needle tip part shown in FIG. It is a figure which shows the mode of the coating needle front-end | tip part in the conventional pattern correction apparatus. It is a 1st figure which shows a mode that the defective part of the board | substrate was corrected. It is a 2nd figure which shows a mode that the defective part of the board | substrate was corrected. It is a 3rd figure which shows a mode that the defect part of the board | substrate was corrected. It is a figure which shows the example 1 of a change of Embodiment 1. FIG. It is a figure which shows the example 2 of a change of Embodiment 1. FIG. It is a figure which shows the example 3 of a change of Embodiment 1. FIG. It is sectional drawing which shows the structure and application | coating operation | movement of the principal part of the pattern correction apparatus by Embodiment 2 of this invention. It is a figure which shows the example 1 of a change of Embodiment 2. FIG. It is a figure which shows the example 2 of a change of Embodiment 2. It is a figure which shows the example 3 of a change of Embodiment 2. FIG. It is sectional drawing which shows the structure of the principal part of the pattern correction apparatus by Embodiment 3 of this invention. It is a figure which shows the example 1 of a change of Embodiment 3. It is a figure which shows the example 2 of a change of Embodiment 3. It is a figure which shows the example 3 of a change of Embodiment 3. It is a figure which shows the example 4 of a change of Embodiment 3. It is sectional drawing which shows the structure of the principal part of the pattern correction apparatus by Embodiment 4 of this invention. It is a figure which shows the example 1 of a change of Embodiment 4. FIG. It is a figure which shows the example 2 of a change of Embodiment 4. FIG. It is a figure which shows the example 3 of a change of Embodiment 4. FIG. It is a figure which shows the example 4 of a change of Embodiment 4. FIG. It is the elements on larger scale of the principal part of the application | coating mechanism part shown in FIG. It is a figure which shows the example 5 of a change of Embodiment 4. FIG. It is a figure which shows the whole structure of the conventional pattern correction apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,101 Pattern correction apparatus, 2,102 Observation optical system, 3,103 Monitor, 4,104 Cutting laser part, 5,105 Coating mechanism part, 6,106 Substrate heating part, 7,107 Image processing part, 8, 108 host computer, 9, 109 control computer, 10, 110 XY stage, 11, 111 chuck part, 12, 112 Z stage, 13 coating cylinder, 13a, 60a drive shaft, 14, 44 coating unit, 15, 36, 46 Linear guide, 15a, 36a, 46a Rail part, 15b, 36b, 46b Slide part, 16, 30 Stopper, 17, 17a Correction fluid, 18 Container, 18a, 18b, 35a, 40b, 43a, 47a, 49a, 49c, 57a Hole, 18g Replenishment hole, 19,113 Application needle, 19a Application needle tip 19b outer peripheral side surface, 20 cylinder portion, 20a drive shaft, 21, 47 case, 21a air vent hole, 22 substrate, 22a defective portion, 23 electrode, 23a open defective portion, 24 rib, 24a defective portion, 25 pixels, 25a white void Defective part, 26 piston, 27 O-ring, 28, 48 spring, 29 tube, 31 permanent magnet, 32 electromagnet, 33 electromagnetic solenoid, 33a movable core, 33b solenoid coil, 34 coating needle fixing plate, 35 container fixing plate, 35b, 49b, 51a Recessed part, 37, 41 Positioning base, 37a, 41a Guide part, 38, 42 Fixing screw, 40a Correction fluid storage hole, 40c, 47c Projection part, 43 Lid, 45 Push rod, 47b Groove part, 49 Unit support plate, 49d Stepped hole, 50 coupling portion, 51 shutter, 51b Part, 52 solenoid, 53, 54 absorption sheet, 55 sliding bearing, 56 adhesive sheet, 57 fixing base, 58 hollow plate, 58a, 58b side, 58c long hole, 59 pin, 60 cylinder, 61 lever, 62 stage, 63 magnet 64 flange, 114 ink tank index motor, 115 ink tank table.

Claims (11)

A pattern correction apparatus for correcting a defective portion of a fine pattern formed on a substrate,
A container in which a first hole is opened at the bottom and correction fluid is injected;
An application needle having substantially the same diameter as the first hole, and a drive for causing the tip of the application needle to protrude from the first hole and applying the correction liquid adhering to the tip of the application needle to the defect portion A pattern correction apparatus comprising a unit.   The said drive part hold | maintains the front-end | tip part of the said applicator needle in the correction liquid inject | poured into the said container at the time of standby, and makes the front-end | tip part of the said applicator needle protrude from the said 1st hole at the time of application | coating. Pattern correction device. The drive unit is
A first sub-drive unit fixed to the container, causing the tip of the application needle to protrude from the first hole, and causing the correction liquid to adhere to the tip of the application needle; and lowering the container; 3. A second sub-driving unit that applies a correction liquid adhered to the tip of the application needle to the defective part by bringing the tip of the application needle into contact with the defective part. 4. Pattern correction device.   Further, a linear device is provided between the container and the second sub-driving unit and movably holds the container so that a pressure of a predetermined value or more is not applied from the tip of the coating needle to the defective part. The pattern correction apparatus according to claim 3, comprising a guide. The first sub-driving unit is
A permanent magnet fixed to the upper end of the application needle, and the application needle is moved upward by an attractive force between the permanent magnet and the application needle is moved downward by a repulsive force between the permanent magnet and the permanent magnet. The pattern correction apparatus according to claim 3, comprising an electromagnet. The first sub-driving unit is
The pattern correction apparatus according to claim 3, comprising: a movable iron core fixed to an upper end of the application needle; and a solenoid coil that moves the application needle up and down by sucking or dropping the movable iron core. The drive unit includes a fixed unit and a drive shaft,
The pattern correction device further includes:
A fixing member for fixing the container to the fixing portion, and provided between the application needle and the drive shaft, so that a pressure of a predetermined value or more is not applied to the defective portion from the tip portion of the application needle. The pattern correction apparatus according to claim 1, further comprising a linear guide that holds the application needle movably. Furthermore, the container is fixed, a protrusion is provided on the surface facing the substrate, and a fixing member that is moved up and down by the drive unit,
A first linear guide that is provided between the fixing member and the driving unit and that holds the fixing member movably so as not to apply a pressure of a predetermined value or more to the substrate from the protrusion; A second linear guide is provided between the needle and the drive unit, and holds the application needle movably so that a pressure of a predetermined value or more is not applied to the defective portion from the tip of the application needle. The pattern correction apparatus according to claim 1 or 2. Furthermore, a bottomed cylindrical case with the container fixed to the bottom,
A movable member housed inside the case,
A first linear guide provided between an inner peripheral side surface of the case and the movable member, and movably holding the movable member; and provided between the application needle and the movable member; A second linear guide that movably holds the application needle so that a pressure of a predetermined value or more is not applied from the tip portion to the defect portion;
The pattern correction apparatus according to claim 1, wherein the driving unit causes the tip end portion of the application needle to protrude from the first hole by pushing down the movable member.   A second hole having substantially the same diameter as the first hole is opened in the upper wall of the container, the container is sealed except for the first and second holes, and the applicator needle is the first hole. The pattern correction apparatus according to any one of claims 1 to 9, wherein the pattern correction apparatus is provided so as to be movable along a straight line passing through the first and second holes. A pattern correction method for correcting a defective portion of a fine pattern formed on a substrate,
A first hole is opened at the bottom of the container, and a container into which correction fluid is injected, and an application needle having substantially the same diameter as the first hole are provided.
Holding the tip of the application needle in the correction fluid injected into the container;
Causing the tip of the application needle to protrude from the first hole and attaching a correction liquid to the tip of the application needle; and bringing the tip of the application needle into contact with the defect, and the application needle The pattern correction method including the step of apply | coating the correction liquid adhering to the front-end | tip part of said defect part.

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