KR101202550B1 - Apparatus for correcting pattern, method for correcting pattern, and unit for correcting pattern - Google Patents

Abstract

Provided is a pattern correction apparatus capable of quickly correcting a defective part with a simple configuration.

In this pattern correction apparatus, the coating needle tip portion 19a is immersed in the correction liquid 17 in the standby state. At the time of application | coating, when the cylinder part 20 lowers the drive shaft 20a, the coating needle 19 protrudes from the hole 18b of the container 18. As shown in FIG. The correction liquid 17a is attached to the coating needle tip portion 19a. Next, the application cylinder 13 lowers the drive shaft 13a to bring the coating needle tip portion 19a into contact with the defect portion 22a of the substrate 22 to apply the correction liquid 17a to the defect portion 22a. do. Therefore, the step of reciprocating the coating needle between the defective portion and the ink tank as in the prior art is omitted.

Pattern Correction Device, Pattern Correction Method, Pattern Correction Unit

Description

Pattern Correcting Device, Pattern Correcting Method and Pattern Correcting Unit {APPARATUS FOR CORRECTING PATTERN, METHOD FOR CORRECTING PATTERN, AND UNIT FOR CORRECTING PATTERN}

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a diagram showing the overall configuration of a pattern correction apparatus according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view showing the configuration and application operation of main parts of the pattern correction apparatus shown in FIG. 1. FIG.

3 is a partially enlarged view showing an aspect of the tip of the coating needle shown in FIG.

4 is a view showing an aspect of a coating needle tip in a conventional pattern correcting apparatus.

FIG. 5 is a first view showing an aspect in which a defect portion of a substrate is corrected. FIG.

FIG. 6 is a second view showing a modified aspect of a defective portion of a substrate. FIG.

7 is a third view showing an aspect in which a defect portion of a substrate is corrected.

8 is a view showing a modification 1 of the first embodiment;

9 is a view showing a modification 2 of the first embodiment;

10 is a view showing a modification 3 of the first embodiment;

Fig. 11 is a cross-sectional view showing the configuration and the application operation of the principal part of the pattern correction apparatus according to the second embodiment of the present invention.

12 is a view showing a modification 1 of the second embodiment;

FIG. 13 is a view showing a modification 2 to Example 2. FIG.

14 is a view showing a modification 3 of the second embodiment;

Fig. 15 is a sectional view showing the structure of principal parts of the pattern correction apparatus according to the third embodiment of the present invention.

Fig. 16 is a diagram showing a modification 1 of the third embodiment.

FIG. 17 is a view showing a modification 2 to Example 3. FIG.

18 is a view showing a modification 3 of the third embodiment;

FIG. 19 is a view showing a modification 4 to Example 3. FIG.

20 is a cross-sectional view showing a configuration of main parts of the pattern correction apparatus according to the fourth embodiment of the present invention.

Fig. 21 is a view showing a modification 1 of the fourth embodiment.

FIG. 22 is a view showing a modification 2 to Example 4. FIG.

FIG. 23 is a view showing a modification 3 to Example 4; FIG.

24 is a view showing a modification 4 of the fourth embodiment;

FIG. 25 is an enlarged view of a main part of the application mechanism shown in FIG. 24; FIG.

FIG. 26 is a view showing a modification 5 to Example 4. FIG.

Fig. 27 is a sectional view showing the schematic configuration and coating operation of the coating unit of the pattern correcting apparatus according to the fifth embodiment of the present invention.

FIG. 28 is a sectional view showing the specific configuration and coating operation of the coating unit shown in FIG. 27; FIG.

Fig. 29 is a diagram showing the configuration and coating operation of the coating unit of the pattern correction apparatus according to the sixth embodiment of the present invention.

30 is a view showing another application operation using the application unit shown in FIG. 29;

FIG. 31 is a diagram showing a modification 1 to Example 6. FIG.

32 is a view showing a modification 2 to Example 6. FIG.

33 is a view showing a modification 3 to Example 6. FIG.

34 shows a modification 4 of the sixth embodiment;

35 is a view showing a modification 5 to the sixth embodiment;

36 is a partially enlarged view of a main part of the application unit shown in FIG. 35;

37 is a view showing a modification 6 to Example 6. FIG.

FIG. 38 is a view showing a modification 7 to Example 6. FIG.

39 is a view showing a modification 8 to Example 6. FIG.

40 is a view in which a plurality of coating units are arranged in the circumferential direction.

Fig. 41 is a diagram showing the configuration of a coating unit of the pattern correction device according to the seventh embodiment of the present invention.

FIG. 42 is a view showing a modification 1 to Example 7. FIG.

FIG. 43 is a view showing a modification 2 to Example 7. FIG.

FIG. 44 is a view showing a modification 3 to Example 7. FIG.

45 is a view showing a modification 4 of the seventh embodiment;

46 shows a modification 5 of the seventh embodiment;

FIG. 47 is a view showing a modification 6 to Example 7. FIG.

48 is a view showing a seventh modified example of the seventh embodiment;

Fig. 49 is a diagram showing the overall configuration of a conventional pattern correction apparatus.

<Code description>

1, 201: pattern correction apparatus 2, 202: observation optical system 3, 203: monitor 4, 204: laser portion 5, 205 for cut 5, application mechanism 6, 206: substrate heating part 7, 207: image processing part 8, 208: host Computers 9 and 209: Control Computers 10 and 210: XY Stages 11 and 211: Chuck Parts 12 and 212: Z Stage 13: Application Cylinders 13a and 60a: Drive Shafts 14 and 44: Application Units 15, 36 and 46: Linear Guides 15a, 36a, 46a: rail portions 15b, 36b, 46b: slide portions 16, 30: stopper 17, 17a: correction liquid 18: container 18a, 18b, 35a, 40b, 43a, 47a, 49a, 49c, 57a: hole 18g: replacement hole 19, 113: coating needle 19a: coating needle tip portion 19b: outer circumferential side surface 20: cylinder portion 20a: drive shaft 21, 47: case 21a: air bleed hole 22: substrate 22a: defect portion 23: electrode 23a: open defect portion 24: rib 24a: defective part 25: pixel 25a: void defective part 26: piston 270: O-ring 28, 48: spring 29: tube 31: permanent magnet 32: electromagnet 33: electromagnetic solenoid 33a: movable iron core 33b: solenoid coil 34: coating needle fixing plate 35: container fixing plates 35b, 49b, 51a: recess 37, 41: positioning table 37a, 41a: guide part 38, 42: fixing screw 40a: correction liquid storage hole 40C, 47c: protrusion 43: cover 45: push rod 47b: groove 49: unit support plate 49d: hole with steps 50: coupling part 51: shutter 51b: arm 52: solenoid 53, 54: absorbent sheet 55: sliding bearing 56: adhesive sheet 57: fixing table 58: hollow plate 58a, 58b: side 58c: long hole 59: pin 60: cylinder 61: lever 62: stage 63: magnet 64: flange 67: support 67a: recess 68: stopper 69: air cylinder 69a: output shaft 70: Pin 71: Drive stage 71a: Drive shaft 76: Container part 77: Coating part 78: Drive part 79: Container 79a, 80a, 82e, 93a: Hole 79b, 82f, 97a: Flange 79c: Top surface 79e: Cylindrical part 79f: Taper part 79g Protruding portion 79h Recessing portion 79i Magnet 80 Cover 80b Flange surface 80C Lower surface 81 Seal member 82 Teeth 82a: Hole with steps 82b: Side surface 82c, 82d: Concave portion 82g: Groove portion 82h: End portion 82i: Taper portion 82j: Window 82k: Fitting surface 83: Linear guide 83a: Rail portion 83b: Slide portion 84: Positioning fixture 85 Applicator fixing plate 85a Notch part 86 Fixing screw 87 Electromagnet 87a Iron core 87b Coil 88 Electromagnetic solenoid 89, 89a, 89b, 94 Permanent magnet 90 Magnetic loop 91, 98 Cover 92 Spacer 93 Unit support plate 95: Linear bush 95a: Rolling element 96: Snap ring 97: Moving shaft 97b: Hole 99: Absorption sheet 100: Filling passage 100a: Filling port 101: Tape 102: RFID tag 103: Stopper 104: Reference mark 105: Position Dowel pin 214: Motor for ink tank index 215: Ink tank table

Field of technology

TECHNICAL FIELD This invention relates to a pattern correction apparatus, a pattern correction method, and a pattern correction unit. Specifically, It is related with the pattern correction apparatus, the pattern correction method, and the pattern correction unit which correct | amend the defect part of the fine pattern formed on the board | substrate. More specifically, the present invention provides a pattern correcting apparatus for correcting an open defect of an electrode, a plasma display rib (bump) defect, a void defect of a liquid crystal color filter, a defect of a mask, and the like, which occur in a flat panel display manufacturing process, and a pattern. A modification method and a pattern correction unit.

Prior art

In recent years, with the increase in size and precision of flat panel displays such as plasma displays, liquid crystal displays, and EL displays, defects occur in electrodes, ribs, etc. on substrates, or defects occur in colored layers of liquid crystal color filters in display manufacturing processes. The probability of doing is increasing. For this reason, the method which aimed at the improvement of a yield and correct | amended various defects is proposed.

Fig. 49 is a diagram showing the overall configuration of a conventional pattern correction apparatus. Referring to FIG. 49, this pattern correction apparatus 201 includes a laser light on a substrate through an observation optical system 202 for observing the surface of the substrate, a monitor 203 for illuminating the observed image, and an observation optical system 202. Laser portion 204 for irradiating and cutting unneeded portions, an application mechanism portion 205 for attaching the correction liquid to the tip of the coating needle and applying it to the defect portion of the substrate, and a substrate heating portion for heating the correction liquid applied to the defect portion. 206, an image processing unit 207 for recognizing defects, a host computer 208 for controlling the entire apparatus, and a control computer 209 for controlling the operation of the apparatus mechanism unit. In addition, the XY stage 210 which moves the board | substrate which has a defect part to XY direction (horizontal direction), the chuck part 211 which supports a board | substrate on the XY stage 210, observation optical system 202, and an application | coating mechanism part The Z stage 212 which moves 205 to a Z direction (vertical direction) is provided.

The application needle 213 is provided in the front-end | tip of the application | coating mechanism part 205 below. The ink tank index motor 214 is connected to an ink tank table 215 on which a plurality of ink tanks are mounted.

When correcting the defect portion of the substrate, after moving the coating needle 213 to the position of the defect, the ink tank index motor 214 is driven to rotate the ink tank table 215 to select an appropriate tank. Then, the application mechanism 205 is attached up and down, and ink is applied to the application needle 213, and an appropriate amount is applied onto the substrate.

For example, Patent Document 1 described below discloses a defect correction method and a defect correction apparatus capable of automatically correcting a white defect and a black defect with a relatively simple configuration. According to this, the ink application positioning cylinder is attached up and down, and ink is attached to the ink application needle, and this is appropriately applied onto the color filter.

In addition, Patent Literature 2 described below discloses a pattern correction apparatus capable of correcting even a relatively large defect. According to this, when a part of the ribs formed on the plasma display back glass substrate is affixed, the correction paste is affixed to the coating needle and applied to the defect.

Patent Document 1: Japanese Patent Application Laid-Open No. 9-61296

Patent Document 2: Japanese Patent Application Laid-Open No. 2000-299059

In the conventional pattern correction apparatus, when the defect portion is large, it is necessary to apply the correction ink to the defect portion a plurality of times. Each time, the application needle is returned from the defect portion to the ink tank to apply the ink to the application needle again. Needs to be. For this reason, there is a problem that time is required until the defect is corrected and finished. Moreover, it is necessary to wash the coating needle every time the color of the ink for correction is changed.

Therefore, a main object of the present invention is to provide a pattern correction apparatus, a pattern correction method and a pattern correction capable of quickly correcting a defective portion with a simple configuration.

A pattern correction apparatus according to the present invention is a pattern correction apparatus for correcting a defective portion of a fine pattern formed on a substrate, the first hole of which is opened at the bottom thereof, and a container into which the correction liquid is injected, and the first hole of the pattern correction device. A coating needle having a diameter and a driving portion for protruding the tip of the coating needle from the first hole and applying the correction liquid attached to the tip of the coating needle to the defect portion.

Preferably, the drive section stores the tip of the coating needle in the correction liquid injected into the container during the waiting, and protrudes the tip of the coating needle from the first hole at the time of coating.

Also preferably, the driving portion is fixed to the container, and the first sub-drive portion which protrudes the tip of the coating needle from the first hole to attach the correction liquid to the tip of the coating needle, lowers the container, And a second sub-drive section for contacting the tip portion with the defect portion and applying the correction liquid attached to the tip portion of the coating needle to the defect portion.

Also preferably, a linear guide is provided between the container and the second sub-drive part to move the container so as not to exert a pressure higher than a predetermined value from the distal end of the coating needle.

Also preferably, the first sub-drive section moves the applicator upwards by the suction force between the permanent magnet fixed to the upper end of the applicator and the permanent magnet, and the applicator needle by the repulsive force between the permanent magnet and the permanent magnet. It includes an electromagnet for moving downward.

Also preferably, the first sub-drive section includes a movable iron core fixed to the upper end of the coating needle and a solenoid coil which swings the coating needle by sucking or dropping the movable iron core.

Also preferably, the driving unit includes a fixing unit and a driving shaft. The pattern correcting apparatus is further provided between a fixing member for fixing the container to the fixing portion, and the coating needle and the drive shaft, so that the coating needle can move so that a pressure equal to or more than a predetermined value is not applied from the tip of the coating needle to the defect portion. A linear guide is provided.

Also preferably, the container is fixed, and a projection is provided on a surface facing the substrate, and is provided between the fixing member which is moved by the driving unit, the fixing member and the driving unit, and the pressure is greater than or equal to a predetermined value from the projection. The coating needle is moved between the first linear guide for movably supporting the fixing member and the coating needle and the driving portion so as not to be applied, and the pressure is applied so that a pressure equal to or more than a predetermined value is not applied from the tip of the coating needle to the defect portion. A second linear guide that possibly supports is provided.

Also preferably, further, it is provided between a cylindrical case having a bottom fixed to the bottom thereof, a movable member accommodated inside the case, and an inner circumferential side of the case and the movable member to move the movable member. A first linear guide that can be supported, and a second linear guide provided between the applicator and the movable member so as to move the applicator needle so as not to apply a pressure higher than a predetermined value to the defect portion from the applicator tip. Is prepared. The drive unit projects the tip of the coating needle from the first hole by pressing the movable member.

Also preferably, in the upper wall of the container, a second hole of approximately the same diameter as the first hole is opened, the container is sealed except for the first and second holes, and the coating needle It is provided so that a movement is possible along the straight line which passes through 1st and 2nd hole.

The pattern correction method according to the present invention is a pattern correction method for correcting a defective portion of a fine pattern formed on a substrate, the first hole of which is opened at its bottom, and the container into which the correction liquid is injected, Providing a coating needle having a diameter, preserving the tip portion of the coating needle in the correction liquid injected into the container, protruding the tip portion of the coating needle from the first hole, and attaching the correction liquid to the tip portion of the coating needle; A step of contacting the tip portion of the coating needle with the defect portion and applying the correction liquid attached to the tip portion of the coating needle to the defect portion.

A coating unit according to the present invention is a coating unit of a pattern correcting apparatus for correcting a defective portion of a fine pattern formed on a substrate, the container having a first hole opened at the bottom thereof, and a correction liquid injected therein, A coating needle having an approximately same diameter, a linear guide member for supporting the coating needle so as to be movable, and a coating needle moved downward to protrude the tip of the coating needle from the first hole. It is equipped with the drive part which affixes correction liquid to a front-end | tip, and makes it possible to apply the correction liquid attached to the front-end | tip of a coating needle to a defect part.

Preferably, further, it is provided with the coating needle fixing member which fixes and supports the base end part of a coating needle, and the linear motion guide member supports the coating needle so that it can be moved by the application | coating needle fixing member so that a driving part ( In 1), the coating needle fixing member is moved up and down, and the tip portion of the coating needle is stored in the correction liquid injected into the container during the waiting, and the tip portion of the coating needle is projected from the first hole at the time of coating.

Further, preferably, the driving unit has a coating needle when at least the tip portion of the coating needle contacts the defective portion so that no pressure is applied to the defect portion from the tip portion of the coating needle when the tip portion of the coating needle contacts the defective portion. Open the support of the fixing member.

Also preferably, the drive unit includes a support member for supporting the applicator fixing member from below, and a cylinder for moving the support member.

Also preferably, the applicator fixing member is made of a magnetic material, and the driving unit includes an iron core and a coil wound around the iron core, and the magnetic force between the applicator fixing member and the coil is wound in response to an electric current flowing through the coil. (Iii) The coating needle fixing member is moved upward by the suction force, and the coating needle fixing member is moved downward in response to the breakdown of the coil current.

Also preferably, the permanent magnet further includes a permanent magnet fixed to the upper end of the coating needle fixing member, and the driving part includes an iron core and a coil wound around the iron core, and in response to the current flowing through the coil, The applicator fixing member is moved downward by the magnetic repulsion force between and the applicator fixing member is moved upward by the magnetic attraction force between the permanent magnets in response to the current cut off of the coil.

Also preferably, the apparatus further includes an iron core fixed to an upper end of the coating needle fixing member, and the driving unit includes a solenoid coil, and is applied by a magnetic suction force with the iron core in response to an electric current flowing through the solenoid coil. The needle fixing member is moved upward, and the coating needle fixing member is moved downward in response to the current of the solenoid coil being cut off.

Also preferably, on the opened upper surface of the container, a lid in which a second hole having a diameter approximately equal to the diameter of the coating needle is opened is fixed, and the container is sealed except for the first and second holes, The needle is provided to be movable along a straight line passing through the first and second holes.

Also preferably, it is further provided with an absorbing member disposed around the first hole of the lower surface of the bottom of the container and absorbing the correction liquid leaking out of the first hole.

Moreover, Preferably, it is equipped with one case, the container of several tanks, the coating needle, the linear guide member, and the drive part provided in one case.

Moreover, the pattern correction apparatus which concerns on this invention is equipped with the said coating unit and the movement apparatus which moves a coating unit and a board | substrate relatively at the time of application | coating, and apply | amends the correction liquid attached to the front-end | tip part of a coating needle to a defect part.

Preferably, a plurality of application units are provided, and a correction liquid of a different type from a correction liquid injected into a container of another application unit is injected into a container of each application unit, and the moving device is at least a kind of defect portion in the plurality of application units. In response, the selected coating unit and the substrate are relatively moved, and the correction liquid attached to the tip of the coating needle is applied to the defect portion.

In the pattern correction apparatus according to the present invention, a first hole is opened at the bottom thereof, a container into which the correction liquid is injected, a coating needle having a diameter approximately the same as the first hole, and a tip portion of the coating needle is the first hole. The drive part which protrudes from and apply | coats the correction liquid attached to the front-end | tip part of a coating needle to a defect part is provided. Therefore, the step of reciprocating the coating needle between the defective portion and the ink tank (or paste tank) as in the prior art is omitted. In addition, it is no longer necessary to provide a waiting time after attaching the correction liquid to the coating needle tip as in the prior art, or it is possible to shorten the waiting time. For this reason, the time required for defect correction is shortened, and the structure of the apparatus is simplified.

In the pattern correction method which concerns on this invention, the 1st hole is opened in the bottom, the container in which the correction liquid was injected, and the coating needle which has a diameter substantially the same as a 1st hole are provided, and the tip part of a coating needle is provided in a container. A step of preserving the injected correction liquid, a step of protruding the tip of the coating needle from the first hole to attach the correction liquid to the tip of the coating needle, and contacting the tip of the coating needle with the defect portion to the tip of the coating needle. And applying the corrected liquid to the defect portion. In this case as well, the step of reciprocating the coating needle between the defective portion and the ink tank (or paste tank) as in the prior art is omitted. In addition, it is possible to eliminate the waiting time or shorten the waiting time after attaching the correction liquid to the tip of the coating needle as in the related art. For this reason, the time required for defect correction is shortened, and the structure of the apparatus is simplified. In addition, since the tip portion of the coating needle is waited in the state of being preserved in the correction liquid, drying of the correction liquid attached to the tip portion of the coating needle is prevented, and the washing step of the tip portion of the coating needle can be omitted.

In the application | coating unit which concerns on this invention, the 1st hole is opened in the bottom, the container which the correction liquid was inject | poured, the coating needle which has a diameter roughly the same as a 1st hole, and the direct drive which supports the coating needle so that it can be moved to Shanghai. The guide member and the drive part which moves the applicator downward, protrude the tip part of an applicator needle from a 1st hole, and attach a correction liquid to the tip part of an applicator are provided, and the correction liquid attached to the tip part of an applicator part is provided in a defect part. Makes it possible to apply. Therefore, the step of reciprocating the coating needle between the defective portion and the ink tank (or paste tank) as in the prior art is omitted. In addition, it is possible to eliminate the need to provide a waiting time or to shorten the waiting time after attaching the correction liquid to the coating needle tip as in the related art. For this reason, the time required for defect correction is shortened, and the structure of the apparatus is simplified. In addition, by waiting in the state where the tip of the coating needle is preserved in the correction liquid, drying of the correction liquid attached to the tip of the coating needle can be prevented, and the washing step of the tip of the coating needle can be omitted.

In the pattern correction apparatus according to the present invention, the coating unit and the substrate are relatively moved so as to contact the defect portion with the tip portion of the coating needle at the time of coating, and apply the correction liquid attached to the tip portion of the coating needle to the defect portion. A mobile device is provided. Also in this case, the process of repeating the coating needle between the defective portion and the ink tank (or paste tank) is omitted. In addition, it is no longer necessary to provide a waiting time after attaching the correction liquid to the coating needle tip as in the prior art, or it is possible to shorten the waiting time. For this reason, the time required for defect correction is shortened, and the structure of the apparatus is simplified.

Example 1

1 is a diagram showing the overall configuration of a pattern correction apparatus according to a first embodiment of the present invention. 1, the pattern correction apparatus 1 irradiates a laser beam to a board | substrate through the observation optical system 2 which observes the surface of a board | substrate, the monitor 3 which illuminates an observed image, and the observation optical system 2, Cut laser portion 4 for cutting out unnecessary parts, a coating mechanism portion 5 for attaching a correction liquid to the tip of the coating needle and applying it to a defective portion of the substrate, and a substrate heating portion 6 for heating the correction liquid applied to the defective portion. And an image processing unit 7 for recognizing a defect, a host computer 8 for controlling the entire apparatus, and a control computer 9 for controlling the operation of the apparatus mechanism unit. In addition, the XY stage 10 which moves the board | substrate which has a defect part to XY direction (horizontal direction), the chuck part 11 which supports a board | substrate on the XY stage 10, the observation optical system 2, and an application mechanism part The Z stage 12 etc. which move (5) to a Z direction (vertical direction) are provided.

The XY stage 10 is used to relatively move the substrate to an appropriate position when applying the correction liquid to the defect portion by the application mechanism 5, or when observing the surface of the substrate by the observation optical system 2. . The XY stage 10 shown in FIG. 1 has the structure which piled two uniaxial stages in the orthogonal direction. However, this XY stage 10 should just be able to move a board | substrate with respect to the observation optical system 2 and the application | coating mechanism part 5 relatively, It is limited to the structure of the XY stage 10 shown in FIG. no. In recent years, gantry-type XY stages which can move independently in the X-axis direction and the Y-axis direction have been adopted with the increase of the substrate size.

2 (A) to (D) are cross-sectional views showing the configuration and application operation of the principal part of the pattern correction apparatus shown in FIG. 1. Referring to FIG. 2A, the application mechanism portion 5 is composed of an application cylinder 13 and an application unit 14.

The application cylinder 13 includes a drive shaft 13a that is movable in the vertical direction (Z direction). The linear guide 15 which consists of the rail part 15a and the slide part 15b is provided in the side surface (right side in drawing) of this drive shaft 13a. The rail part 15a is being fixed to the drive shaft 13a, and the slide part 15b can move the rail part 15a to a vertical direction (Z direction). The application unit 14 is fixed to the slide portion 15b. By the above structure, the drive shaft 13a of the application cylinder 13 moves the application unit 14 in the vertical direction.

As the application cylinder 13, it is possible to use an electric cylinder or an air cylinder. When precise control is required for the application cylinder 13, it is preferable to use the cylinder using a linear guide bearing.

The linear guide 15 has a configuration of a circulating rolling guide provided with a rolling element (ball or the like) between the slide portion 15b and the rail portion 15a, and the slide portion 15b. It is possible to freely linearly move the false rail 15a with an extremely light force. The stopper 16 is fixed to the lower end of the rail part 15a. Due to the weight of the slide portion 15b and the application unit 14, the slide portion 15b is lowered to the lower end of the rail portion 15a so that the slide portion 15b does not escape from the rail portion 15a. By stopper 16

It is supported. In addition, if the linear guide 15 has the function to prevent the slide part 15b from coming off, the stopper 16 is unnecessary. In addition, although the case where the rail part 15a was fixed to the drive shaft 13a is shown here, it is also possible to replace the rail part and the slide part, to fix the slide part to the drive shaft 13a, and to fix the coating unit 14 to the rail part. none.

The application unit 14 is composed of a container 18 into which the correction liquid 17 is injected, and a case 21 accommodating the cylinder portion 20 for driving the application needle 19 up and down. The cylinder portion 20 is fixed to the case 21, and the coating needle 19 is fixed to the drive shaft 20a of the cylinder portion 20 in the axial direction (vertical direction).

In the upper wall and the bottom wall of the container 18, holes 18a and 18b through which the coating needle 19 can penetrate are opened, respectively. The container 18 is made of, for example, a fluorine-based resin or a metal material that does not corrode the correction liquid 17. Alternatively, the inside of the container 18 made of a metal material may be coated with a fluorine resin or the like. The diameters of the holes 18a and 18b of the container 18 are slightly larger than the outer diameter of the coating needle 19. The inner circumferential surfaces of the holes 18a and 18b respectively function as slide guide surfaces on which the coating needles 19 are movably guided in the vertical direction.

The outer diameter of the coating needle 19 is 1 mm or less, and is usually about 0.7 to 0.4 mm. The coating needle tip portion 19a is processed into a tapered shape so as to taper as the tip gets closer to the tip, and has a flat tip surface having a diameter of about 30 μm to about 70 μm. As the coating needle 19, for example, the diameters of portions other than the coating needle tip portion 19a are the same, and the diameters of the portions close to the coating needle tip portion 19a are smaller in step shape.

The hole 18b formed in the bottom wall of the container 18 is minute, and is corrected from the hole 18b by the surface tension of the correction liquid 17 and the water / oil repellency of the container 18. (17) does not leak.

As shown in Fig. 2A, in the standby state before the start of the coating operation, the coating needle 19 penetrates through the hole 18a of the upper wall of the container 18, and the coating needle tip portion 19a is a correction liquid ( It is immersed in 17).

As the correction liquid 17, when correct | amending the void defect of a liquid crystal color filter, the ink of the same color as the colored layer of a void defect part is used. In addition, when correct | amending a plasma display rib defect, the paste which disperse | distributed the microparticles | fine-particles of the glass which is a material of a rib in a solvent is used. In addition, when correct | amending the open defect of an electrode, a silver paste, a gold paste, a metal complex solution, and a colloidal solution are used. The correction liquid 17 is previously adjusted using a dilution liquid so that it may become an optimal viscosity. For example, in the case of ink, it is adjusted to the viscosity of about 30 cP (cm poise), and in the case of paste, it is 1000 to tens of thousands of cP. The injection amount of the correction liquid 17 may be such that the coating needle tip portion 19a is locked. Since the amount of correction liquid consumed in one coating operation is in the unit of pL (picoritol), the correction liquid 17 to be injected into the container 18 is good in a small amount (for example, 1 ml or less).

Next, the operation at the time of pattern correction is demonstrated using FIG.2 (B)-FIG.2 (D). When the instruction | indication of starting application | coating operation | movement is given, as shown to FIG. 2 (B), the cylinder part 20 will lower the drive shaft 20a. At this time, the coating needle 19 protrudes from the hole 18b of the bottom wall of the container 18. A correction liquid (ink or paste) 17a is attached to the coating needle tip portion 19a.

FIG. 3 is a partially enlarged view showing an aspect of the coating needle tip portion 19a shown in FIG. 2B. As shown in FIG. 3, when the applicator needle 19 protrudes through the hole 18b of the bottom wall of the container 18, the hole 18b slides and guides the applicator 19 in the vertical direction. Together, the excess correction liquid attached to the outer peripheral side of the applicator 19 is wiped off. For this reason, the correction liquid 17 does not leak out of the container 18. In addition, when the coating needle 19 protrudes from the hole 18b, the correction liquid 17a adhering to the coating needle tip 19a is already formed in the state which can be apply | coated.

4A and 4B are views showing aspects of the coating needle tip portion 19a in the conventional pattern correction apparatus. When correcting the void defect of the liquid crystal color filter, ink of the same color as the colored layer of the void defect portion is used as the correction liquid 17. In the conventional pattern correcting apparatus, the coating needle 19 is lowered and immersed in the correction liquid 17 in the ink tank, and after the correction liquid is attached to the coating needle tip portion 19a, the coating needle 19 is raised to draw from the ink tank. do. At this moment, as shown in Fig. 4A, the correction liquid 17a attached to the coating needle tip portion 19a has a shape in which the lower portion expands due to its own weight. In this state, the tip surface of the coating needle tip portion 19a processed into a planar shape cannot be effectively used, and the correction liquid 17a cannot be applied to the defective portion with a desired coating diameter. As time passes, the correction liquid 17a attached to the coating needle tip portion 19a is pulled upward. When waiting for a few seconds, as shown in FIG. 4 (B), the layer of the correction liquid 17a remains thin on the tip surface of the coating needle tip portion 19a, and the correction liquid 17a is a desired coating diameter. It becomes possible to apply to a defective part. Thus, in the conventional pattern correction apparatus, when applying the correction liquid 17a to a defect part, it was necessary to wait about several seconds.

However, in the first embodiment, as shown in FIG. 3, when the coating needle 19 protrudes from the hole 18b, the correction liquid 17a attached to the coating needle tip portion 19a is already applicable. Formed. Therefore, it is not necessary to provide a waiting time after attaching the correction liquid 17a to the coating needle tip portion 19a as in the related art, or it is possible to shorten the waiting time. For this reason, the time required for one coating operation is shortened.

Next, as shown in FIG.2 (c), the application cylinder 13 lowers the drive shaft 13a by the predetermined distance L1. This predetermined distance L1 is set in advance so as to be a value slightly larger than the distance L2 from the coating needle tip portion 19a to the defect portion 22a in the state shown in FIG. 2 (B). For this reason, after the coating unit 14 descends with the drive shaft 13a, and the coating needle tip portion 19a contacts the defective portion 22a of the substrate 22, the slide portion (a) is placed on the rail portion 15a. 15b) rises. At this time, the coating unit 14 also rises with the slide part 15b. The magnitude | size of the load applied to the defect part 22a from the coating needle tip part 19a at the time of an application | coating operation becomes a total value of the weight of the slide part 15b and the application unit 14. As shown in FIG. Therefore, excessive pressure is not applied from the coating needle tip portion 19a to the defective portion 22a, and the substrate 22 is not damaged.

After applying the correction liquid 17a from the coating needle tip portion 19a to the defect portion 22a in this manner, as shown in FIG. 2 (D), the application cylinder 13 moves the drive shaft 13a to its original position. Raise to At this time, the coating unit 14 also rises to the original position. Then, the cylinder part 20 raises the drive shaft 20a, returns the coating needle tip part 19a to the correction liquid 17 (refer FIG. 2 (A)), and completes one application | coating operation | movement. When it is necessary to apply the correction liquid 17a to the defect part 22a, this coating operation may be repeated. The larger the defect portion 22a, the larger the number of necessary coating operations. However, the correction liquid 17a can be reattached to the coating needle tip portion 19a by only moving the coating needle 19 up and down.

Therefore, in the first embodiment, since the step of reciprocating the coating needle 19 between the defect portion 22a and the ink tank (or paste tank) is omitted as in the prior art, the time required for defect correction is shortened. In addition, the correction liquid 17 enters the sealed container 18 except the holes 18a and 18b, and the coating needle 19 always has a small gap in the hole 18a of the upper wall of the container 18. Since it is in the inserted state, the area in which the correction liquid 17 directly contacts the atmosphere is small. Therefore, since the evaporation of the dilution liquid (solvent) of the correction liquid 17 can be prevented and the usable number of days (exchange cycle) of the correction liquid 17 can be made long, the maintenance of the pattern correction apparatus 1 can be reduced. can do. In addition, since the coating needle tip portion 19a is immersed in the correction liquid 17 in the standby state of the coating operation, drying of the correction liquid attached to the coating needle tip portion 19a can be prevented, and the coating needle tip portion 19a is washed. The process can also be omitted.

Moreover, conventionally, the some coating needle 19 from which the diameter of a front-end | tip part differs is prepared, and the coating needle 19 is selected and used according to the magnitude | size of a defect. However, in Example 1, since the time required for one coating operation is short, the number of coating operations may be adjusted by using only one coating needle 19 having the smallest diameter of the tip portion. As such, the configuration of the apparatus is simplified.

In addition, after the appropriate amount of correction liquid is applied to the defect portion 22a, a range including the defect portion 22a is heated using the substrate heating portion 6 shown in FIG. 1 to dry the coated correction liquid. It is also possible to fire. Moreover, the heater which heats the whole board | substrate 22 may be built in the chuck | zipper part 11, and it is also possible to use the heater and board | substrate heating part 6 which were built in the chuck | zipper part 11 together. In addition, when the correction liquid 17 is an ultraviolet curing type, the board | substrate heating part 6 may be changed into the ultraviolet irradiation device, and the ultraviolet irradiation device may be provided below the chuck | zipper part 11 comprised from glass.

5 to 7 are views illustrating aspects in which defect portions of various substrates are corrected. FIG. 5 shows that the open defect portion 23a of the electrode 23 formed on the surface of a substrate such as a plasma display is subjected to a plurality of successive coating operations using a conductive correction liquid (such as a silver paste) to correct defects. The aspect is shown.

Fig. 6 is applied to a defect 24a of the rib 24 formed on the plasma display back panel substrate by applying a correction liquid (paste) containing glass, which is a material of the rib, and drying it with the substrate heating part 6 to make a defect. The modified aspect is shown. Thus, when the defect part 24a is large, it apply | coats continuously in multiple times, leaving application position aside. Although not shown, phosphor defects in the recesses between the ribs and the ribs, color defects in the black portions on the rib upper surface, and the like can also be corrected.

FIG. 7: A coating operation is performed in succession several times using the correction liquid (ink) of the same color as the colored layer to the void defect part 25a in the colored layer of the certain pixel 25 on a liquid crystal color filter board | substrate, and a defect The modified aspect is shown. In addition, when correct | amending defects other than a void defect, such as a black defect, a foreign material defect, a protrusion defect, and a mixed color defect of a liquid crystal color filter, laser processing by the laser part 4 for cuts shown in FIG. After making a defect, defect is corrected by the application | coating mechanism part 5. When correcting the void defect of the liquid crystal color filter, laser processing may be omitted.

In addition, although not shown, the defect of the mask which consists of a metal, resin, etc. can also be corrected similarly.

8 (A) to (D) are diagrams showing a modification 1 of the first embodiment. In FIG.8 (A)-(D), the cylinder part 20 shown in FIG.2 (A)-(D) is substituted by the air cylinder.

In FIG. 8A, the application unit 14 is fitted into the piston 26 which performs the piston movement in the vertical direction in the case 21 and the ring-shaped groove formed on the outer circumferential side of the piston 26. O-ring 27 for enhancing the airtightness inside the case 21 and a spring (spring) 28 fixed to the upper wall of the container 18 and for pushing the piston 26 upward. It is. The application needle 19 is fixed to the piston 26 in the vertical direction. The air releasing hole 21a is opened in the side surface (right side in drawing) of the case 21. As shown in FIG. The upper wall of the case 21 is provided with a pipe 29 for injecting high pressure air from the outside into the case 21. In the standby state before the start of the coating operation, the piston 26 is pushed upward by the spring 28.

Next, the operation at the time of pattern correction is demonstrated using FIG. 8 (B)-FIG. 8 (D). When the instruction | indication of starting application | coating operation | movement is given, high pressure air is supplied into the case 21 through the pipe | tube 29 from the exterior. Then, as shown in FIG. 8 (B), while the air escapes from the air escape hole 21a to the outside, the piston 26 descends the inside of the case 21. At this time, the coating needle 19 protrudes from the hole 18b of the bottom wall of the container 18. The correction liquid 17a is attached to the coating needle tip portion 19a.

Next, as shown in FIG. 8 (C), the application cylinder 13 lowers the drive shaft 13a by a predetermined distance. After the coating unit 14 descends together with the drive shaft 13a and the coating needle tip portion 19a contacts the defective portion 22a of the substrate 22, the slide portion 15b is placed on the rail portion 15a. To rise. At this time, the coating unit 14 also rises with the slide part 15b. After applying the correction liquid 17a from the coating needle tip portion 19a to the defect portion 22a in this manner, as shown in FIG. 8 (D), the application cylinder 13 moves the drive shaft 13a to its original position. Raise to At this time, the coating unit 14 also rises to the original position. Then, when air flows out from the inside of the case 21 through the pipe 29, the piston 26 is pushed upward by the spring 28 (refer FIG. 8 (A)). Thereby, the coating needle tip 19a returns to the correction liquid 17, and one application | coating operation is completed.

9 (A) to (D) are diagrams showing a modification 2 of the first embodiment. 9 (A) to (D), an electromagnet 32 and a permanent magnet 31 are used in place of the cylinder portion 20 shown in Figs. 2A to 2D. In addition, the application unit 14 is directly fixed to the side surface (right side in the figure) of the drive shaft 13a of the application cylinder 13 without providing the linear guide 15.

In FIG. 9A, the application unit 14 includes an electromagnet 32 fixed to the upper part of the case 21 and a stopper 30 in which the application needle 19 is press-fitted (or adhesive fixed) in the vertical direction. And a permanent magnet 31 adhesively fixed to the stopper 30. In the standby state before application | coating operation | movement start | flow, the electric current is made to flow in the coil of the electromagnet 32, and the permanent magnet 31 is made to adsorb | suck to the electromagnet 32. FIG. In addition, after the permanent magnet 31 is once adsorbed to the electromagnet 32, the current flowing through the coil of the electromagnet 32 may be cut off.

Next, the operation | movement at the time of pattern correction is demonstrated using FIG. 9 (B)-FIG. 9 (D). When the instruction | indication of starting application | coating operation | movement is given, the electromagnet 32 and the permanent magnet 31 will repulse mutually by inverting the direction of the electric current which flows through the coil of the electromagnet 32. FIG. Then, as shown in Fig. 9B, the permanent magnet 31, the stopper 30 and the coating needle 19 are integrated to lower the inside of the case 21 in the vertical direction, and the stopper 30 It is supported by the upper wall of the container 18. At this time, the coating needle 19 protrudes from the hole 18b of the bottom wall of the container 18. The correction liquid 17a is attached to the coating needle tip portion 19a.

Next, as shown in Fig. 9C, the application cylinder 13 lowers the drive shaft 13a by a predetermined distance. The application unit 14 is lowered together with the drive shaft 13a, and after the coating needle tip portion 19a contacts the defective portion 22a of the substrate 22, the permanent magnet 31, the stopper 30, and the coating needle. 19 is pushed up by the substrate 22. At this time, the inner circumferential surfaces of the holes 18a and 18b function as slide guide surfaces on which the coating needles 19 are movably guided in the vertical direction. The magnitude of the load exerted from the tip needle portion 19a to the defective portion 22a at the time of the coating operation is the total value of the weights of the permanent magnet 31, the stopper 30, and the coating needle 19. After applying the correction liquid 17a from the coating needle tip portion 19a to the defect portion 22a, the current direction flowing through the coil of the electromagnet 32 is reversed again as shown in Fig. 9D. The permanent magnet 31 is adsorbed to the electromagnet 32. Thereby, the coating needle tip portion 19a returns to the correction liquid 17. Thereafter, the application cylinder 13 raises the drive shaft 13a to the original position (see Fig. 9A), and one application operation is completed.

10A and 10B show a modification 3 of the first embodiment. In FIGS. 10A and 10B, an electromagnetic solenoid 33 is used in place of the electromagnet 32 and the permanent magnet 31 shown in FIGS. 9A to 9D.

In Fig. 10A, the solenoid 33 is a solenoid coil 33b fixed to an upper portion of the case 21, and a movable iron core 33a to which the coating needle 19 is fixed in the axial direction (vertical direction). It consists of. In the standby state before application | coating operation | movement start | flow, the electric current flows in the solenoid coil 33b of the electromagnetic solenoid 33, and the movable iron core 33a is sucked upward.

When a command for starting the coating operation is given, the current flowing in the solenoid coil 33b is cut off. Then, as shown in FIG. 10B, the movable iron core 33a and the coating needle 19 are integrated, and the inside of the case 21 is lowered in the vertical direction, and the movable iron core 33a is the upper wall of the container 18. As shown in FIG. Is upheld. At this time, the coating needle 19 protrudes from the hole 18b of the bottom wall of the container 18. The correction liquid 17a is attached to the coating needle tip portion 19a.

Thereafter, similarly to the case shown in Fig. 9C, the application cylinder 13 is lowered by the drive shaft 13a by a predetermined distance. After applying the correction liquid 17a from the coating needle tip portion 19a to the defective portion 22a, a current is again flowed through the solenoid coil 33b of the electromagnetic solenoid 33 to move the movable iron core 33a to the solenoid coil 33b. Aspirate into Then, similarly to the case shown in FIG. 9 (D), the coating needle tip portion 19a returns to the correction liquid 17. After that, when the application cylinder 13 raises the drive shaft 13a to the original position, one application operation is completed.

[Example 2]

In the structure of the application | coating mechanism part 5 shown in Example 1, the precision of the position control of the coating needle 19 with respect to the defect part 22a is the hole 18a, 18b and the coating needle 19 of the container 18. Depends on the size of the gap. For this reason, when highly precise position control of the coating needle 19 is requested | required, the structure which fixes the coating needle 19 to the linear guide 15 with high rigidity is preferable, as described below.

11 (A) to (c) are cross-sectional views showing the configuration and application operation of the principal part of the pattern correction apparatus according to the second embodiment of the present invention. Referring to Fig. 11A, the rail portion 15a is fixed to the side surface (right side in the drawing) of the drive shaft 13a of the application cylinder 13, and the application needle fixing plate 34 is fixed to the slide portion 15b. It is. The coating needle 19 is fixed to the coating needle fixing plate 34 in the axial direction (vertical direction). The coating needle fixing plate 34 is fixed to the slide portion 15b using a screw or the like not shown. The stopper 16 is fixed to the lower end of the rail part 15a. Due to the weight of the slide portion 15b, the coating needle fixing plate 34, and the coating needle 19, the slide portion 15b is lowered to the lower end of the rail portion 15a, and the slide portion 15b is the rail portion 15a. The stopper 16 is supported by the stopper 16 so as not to escape. In addition, the stopper 16 is unnecessary if the linear guide 15 has a function of preventing the slide portion 15b from being pulled out.

The container fixing plate 35 is fixed to the application cylinder 13 main body. The container 18 into which the correction liquid 17 is injected is fixed to the recessed portion of the container fixing plate 35. In the upper wall and the bottom wall of the container 18, the holes 18a and 18b which the coating needle 19 can penetrate are provided, respectively. In addition, a hole 35a larger than the hole 18b of the container 18 is opened in the container fixing plate 35. The hole 35a of the container holding plate 35 is located just below the hole 18b of the container 18 and does not prevent the vertical movement of the coating needle 19.

In addition, although the container fixing plate 35 was fixed to the application | coating cylinder 13 main body here, although the relative position of the application cylinder 13 main body and the container 18 does not always change, even if the container fixing plate 35 is fixed to any place of an apparatus, Does not matter.

As shown in Fig. 11A, in the standby state before the start of the coating operation, the coating needle 19 penetrates the hole 18a of the upper wall of the container 18, and the coating needle tip portion 19a is a correction liquid ( It is immersed in 17).

When a command for starting the coating operation is given, as shown in Fig. 11B, the coating cylinder 13 lowers the drive shaft 13a. At this time, the linear guide 15, the coating needle fixing plate 34, and the coating needle 19 are lowered together with the drive shaft 13a, so that the coating needle 19 is a hole 18b of the bottom wall of the container 18 and the container. It protrudes from the hole 35a of the fixing plate 35. The correction liquid 17a is attached to the coating needle tip portion 19a.

When the application cylinder 13 lowers the drive shaft 13a by a predetermined distance L3, as shown in FIG. 11 (C), the application needle tip 19a contacts the defective portion 22a of the substrate 22. Then, the slide part 15b raises on the rail part 15a. At this time, the coating needle fixing plate 34 and the coating needle 19 also rise together with the slide portion 15b. The magnitude | size of the load applied to the defect part 22a from the coating needle tip part 19a at the time of application | coating operation becomes a total value of the weight of the slide part 15b, the coating needle fixing plate 34, and the coating needle 19. As shown in FIG. Therefore, excessive pressure is not applied from the coating needle tip portion 19a to the defective portion 22a, and the substrate 22 is not damaged.

In addition, the predetermined distance L3 at which the drive shaft 13a is lowered by the application cylinder 13 is, for example, after the application needle tip portion 19a contacts the defective portion 22a of the substrate 22. The drive shaft 13a is set in advance so as to descend by about 0.5 to 1 mm.

In this way, after applying the correction liquid 17a from the coating needle tip portion 19a to the defect portion 22a, the application cylinder 13 raises the drive shaft 13a to its original position. At this time, the slide part 15b, the coating needle fixing plate 34, and the coating needle 19 also raise to the original position (refer FIG. 11 (A)). Thereby, the coating needle tip portion 19a returns to the correction liquid 17, and one coating operation is completed.

12 (A) to (D) are diagrams showing a modification 1 of the second embodiment. FIG. 12 (A) is a top view showing the configuration of the application mechanism part 5. 12B to 12D are side views showing the structure and the coating operation of the coating mechanism part 5. Even with the structure shown to FIG. 12 (A)-(D), the position control of the high precision coating needle 19 can be performed.

Referring to Fig. 12A and 12B, the mounting table 39 is fixed to the side surface of the drive shaft 13a of the application cylinder (not shown) 13. The linear guide 15 which consists of the rail part 15a and the slide part 15b, and the linear guide 36 which consists of the rail part 36a and the slide part 36b are provided in the side surface of the mounting table 39. As shown in FIG. . The slide portion 15b is fixed to the mounting table 39, and the rail portion 15a is guided by the slide portion 15b to be movable in the vertical direction (Z direction). The positioning table 37 is fixed to the rail part 15a. The slide portion 36b is fixed to the mounting table 39, and the rail portion 36a is guided by the slide portion 36b to be movable in the vertical direction (Z direction). The positioning table 41 is fixed to the rail part 36a.

The coating needle fixing plate 34 is fixed to the guide portion 37a of the positioning table 37 by the fixing screw 38. The coating needle 19 is fixed to the coating needle fixing plate 34 in the axial direction (vertical direction). The guide portion 37a of the positioning table 37 facilitates the alignment of the coating needle fixing plate 34 when the coating needle 19 is replaced. In the standby state before the start of the coating operation, the rail portion 15a slides due to the weight of the rail portion 15a, the positioning table 37, the coating needle fixing plate 34, the coating needle 19, and the fixing screw 38. It descend | falls to the lower end of the part 15b, and the rail part 15a is supported by the stopper (not shown) so that it may not come out of the slide part 15b.

The container table 40 is fixed to the guide part 41a of the positioning table 41 by the fixing screw 42. In the container stand 40, the correction liquid accommodation hole 40a into which the correction liquid 17 is injected is formed. In the bottom wall of the correction liquid storage hole 40a, a hole 40b through which the coating needle 19 can pass is opened. On the upper part of the correction liquid accommodation hole 40a, a cover 43 is applied to suppress the volatilization of the solvent in the correction liquid 17 and prevent foreign substances from entering. In the center portion of the lid 43, a hole 43a through which the coating needle 19 can pass is opened. The guide portion 41a of the positioning table 41 facilitates the alignment of the container table 40 when the correction liquid 17 is replaced. In the standby state before the start of the coating operation, the rail portion 36a is slid by the weight of the positioning table 41, the container table 40, the correction liquid 17, the lid 43, and the fixing screw 38. ), The rail portion 36a is supported by a stopper (not shown) so as not to escape from the slide portion 36b. The bottom part of the container stand 40 is provided with the projection 40C. This projection part 40C is comprised from the resin member which does not damage the contact surface of the board | substrate 22, for example.

As shown in Fig. 12B, in the standby state before the start of the coating operation, the coating needle 19 penetrates through the hole 43a of the lid 43, and the coating needle tip portion 19a is the correction liquid 17. It is immersed in

In addition, although the container stand 40 was processed and the correction liquid storage hole 40a was provided here, the container stand which has the recessed part formed so that the container 18 as shown in FIG. 11 (A)-(c) can be fitted. It may be a structure fixed to the.

When a command for starting the coating operation is given, as shown in Fig. 12C, the coating cylinder (not shown) 13 lowers the drive shaft 13a. Then, together with the drive shaft 13a, the coating needle fixing plate 34 and the container stand 40 are lowered, and the projection 40C on the bottom surface of the container stand 40 contacts the substrate 22, and then the slide portion ( Guide rail 36b is raised to raise the rail portion 36a. At this time, the container stand 40 also rises with the rail part 36a. As a result, the coating needle 19 protrudes from the hole 40b of the container table 40. The correction liquid 17a is attached to the coating needle tip portion 19a.

When the application cylinder (not shown) 13 lowers the drive shaft 13a further, as shown in FIG. 12 (D), the application needle tip portion 19a contacts the defective portion 22a of the substrate 22. Then, it guides to the slide part 15b, and the rail part 15a raises. At this time, the coating needle fixing plate 34 also rises together with the rail portion 15a. The magnitude of the load exerted from the tip needle portion 19a to the defect portion 22a at the time of the coating operation includes the rail portion 15a, the positioning table 37, the coating needle fixing plate 34, the coating needle 19, It is set as the total value of the weight of the fixing screw 38. Therefore, excessive pressure is not applied from the coating needle tip portion 19a to the defective portion 22a, and the substrate 22 is not damaged.

In this way, after applying the correction liquid 17a from the coating needle tip portion 19a to the defect portion 22a, the coating cylinder (not shown) 13 raises the drive shaft 13a to its original position. At this time, the coating needle fixing plate 34 and the container base 40 also rise to the original position (see FIG. 12 (B)). Thereby, the coating needle tip portion 19a returns to the correction liquid 17, and one coating operation is completed.

In addition, although the case where the slide parts 15b and 36b were fixed to the mounting stand 39 is shown here, the rail part and the slide part are replaced, the rail part is fixed to the mounting stand 39, and the positioning stand ( 37 and 41) may be fixed.

13 (A) and (B) are diagrams showing a modification 2 of the second embodiment. In FIG. 13A (B), the application cylinder 13 and the application unit 44 are separated.

In FIG. 13A, the slide portion 46b of the linear guide 46 is fixed to the inner circumferential side of the bottomed cylindrical case 47 of the coating unit 44. Rail portions 46a and 15a of the linear guides 46 and 15 are fixed to both side surfaces of the push rod 45, respectively. The coating needle fixing plate 34 is fixed to the slide portion 15b. The coating needle 19 is fixed to the coating needle fixing plate 34 in the axial direction (vertical direction). Stoppers 16a and 16b are fixed to lower ends of the rail portions 46a and 15a, respectively. Due to the weight of the slide portion 15b, the coating needle fixing plate 34, and the coating needle 19, the slide portion 15b is lowered to the lower end of the rail portion 15a, and the slide portion 15b is the rail portion 15a. Is supported by the stopper 16b. In addition, if the linear guides 46 and 15 have the fall prevention function of the slide parts 46b and 15b, respectively, the stoppers 16a and 16b are unnecessary. In the standby state before the start of the coating operation, the push rod 45 is pushed upward by a spring (spring) 48 fixed to the bottom wall of the case 47. The push rod 45 is configured not to be pushed upward from a predetermined position by the stopper 16a provided in the rail portion 46a.

The container 18 into which the correction liquid 17 is injected is fixed to the recessed part of the bottom wall of the case 47. In the upper wall and the bottom wall of the container 18, the holes 18a and 18b which the coating needle 19 can penetrate are provided, respectively. In addition, a hole 47a larger than the hole 18b of the container 18 is opened in the bottom wall of the case 47.

The application unit 44 is fitted and fixed to the recess 49b formed in the unit support plate 49. The unit support plate 49 is fixed to the Z stage 12 shown in FIG. Moreover, the hole 49a larger than the hole 18b of the container 18 is opened in the unit support plate 49. The hole 47a of the case 47 and the hole 49a of the unit support plate 49 are both located just below the hole 18b of the container 18, and prevent the movement of the coating needle 19 in the vertical direction. I never do that.

As shown in Fig. 13A, in the standby state before the start of the coating operation, the coating needle 19 penetrates the hole 18a of the upper wall of the container 18, and the coating needle tip portion 19a is a correction liquid ( It is immersed in 17). In addition, the drive shaft 13a of the application cylinder 13 is opposed to the push rod 45 at a constant gap. The application cylinder 13 is fixed on the Z stage 12 shown in FIG.

When the instruction | indication of starting application | coating operation | movement is given, as shown to FIG. 13 (B), the application | coating cylinder 13 lowers the drive shaft 13a. Then, the push rod 45 is pressed downward by the drive shaft 13a, and the coating needle 19 protrudes from the hole 18b of the bottom wall of the container 18. As shown in FIG. Next, when the coating cylinder 13 and the coating unit 44 are lowered integrally by lowering the Z stage 12, the coating needle tip portion 19a contacts the defective portion 22a of the substrate 22. Then, the slide part 15b raises on the rail part 15a. At this time, the coating needle fixing plate 34 and the coating needle 19 also rise together with the slide portion 15b. The magnitude of the load applied to the defective portion 22a from the coating needle tip portion 19a at the time of the coating operation is the total value of the weights of the slide portion 15b, the coating needle fixing plate 34 and the coating needle 19. Therefore, excessive pressure is not applied from the coating needle tip portion 19a to the defective portion 22a, and the substrate 22 is not damaged.

After applying the correction liquid 17a from the coating needle tip portion 19a to the defect portion 22a in this manner, the Z stage 12 is raised to its original position, and the application cylinder 13 moves the drive shaft 13a. Raise to original position. At this time, since the push rod 45 is pushed upward by the restoring force of the spring 48, the slide portion 15b, the coating needle fixing plate 34 and the coating needle 19 also rise to the original position ( See FIG. 13 (A). Thereby, the coating needle tip portion 19a returns to the correction liquid 17, and one coating operation is completed.

Thus, in the structure which isolate | separates the application | coating cylinder 13 and the application | coating unit 44, since it is not necessary to have original application | coating cylinder 13 in the application | coating unit 44, the length of the application | coating unit 44 does not become very long. You don't have to. In addition, when the pattern correction apparatus is provided with the some application | coating unit 44, and is equipped with the mechanism which controls the relative position of the selected application | coating unit 44 and the application | coating cylinder 13 in the some application | coating unit 44, The coating cylinder 13 can be shared.

14 (A) and (B) are diagrams showing a modification 3 of the second embodiment. In FIG. 14 (A) (B), the application cylinder 13 is built in the application unit 44. At the lower end of the drive shaft 13a of the application cylinder 13, a coupling portion 50 engaged with the push rod 45 is provided. In this case, the spring 48 shown to FIG. 13 (A) (B) is unnecessary. As the application cylinder 13, an air cylinder, an electric cylinder, or the like can be used. Since operation in this case is the same as that of Fig. 13A and 13B, the description is omitted.

[Example 3]

15 is a cross-sectional view showing the configuration of main parts of the pattern correction apparatus according to the third embodiment of the present invention. In FIG. 15, the structure of the container 18 shown to FIG. 11 (A)-(C) is demonstrated in detail.

In the centers of the upper wall and the bottom wall of the container 18 into which the correction liquid 17 is injected, holes 18a and 18b through which the coating needle 19 can penetrate are respectively provided. The holes 18a and 18b are coaxially located. The upper surface 18c of the bottom wall of the container 18 has a tapered shape in which the wall thickness becomes thin as it approaches the hole 18b. Therefore, since the coating needle tip 19a is immersed in the correction liquid 17 even if the correction liquid 17 is short, the correction liquid 17 can be used effectively.

In addition, a ring-shaped groove 18e is formed in the lower surface of the bottom wall of the container 18, and a ring-shaped magnet 31 is fitted in the groove 18e. The container 18 fits into the recessed part 35b of the container fixing plate 35 made of an iron-based magnetic body. Here, the container 18 is fixed to the container holding plate 35 by a suction force acting between the magnet 31 inserted into the container 18 and the container holding plate 35. With such a configuration, the container 18 can be replaced and aligned without using a tool.

In the container fixing plate 35, a hole 35a larger than the hole 18b of the container 18 is opened. The hole 35a of the container holding plate 35 is located just below the hole 18b of the container 18 and does not prevent the vertical movement of the coating needle 19.

The solenoid 52 is fixed to the side surface (right side in the figure) of the container fixing plate 35. The shutter 51 is connected to the solenoid 52 via the arm 51b, and the solenoid 52 rotates and drives the shutter 51 in the horizontal direction. The shutter 51 has a concave cross-sectional shape. The recessed part 51a of the shutter 51 is located below the hole 35a of the container fixing plate 35, and is corrected when the correction liquid 17 leaks from the hole 18b of the container 18. ) The solenoid 52 opens the shutter 51 at the time of an application | coating operation, and closes the shutter 51 in the standby state of an application | coating operation. Therefore, the correction liquid 17 does not fall on the board | substrate 22 in the standby state of an application | coating operation.

16 is a diagram showing a modification 1 of the third embodiment. In FIG. 16, the recessed part is formed in 18 d of upper surfaces of the bottom wall of the container 18, and the hole 18b is formed in the bottom of this recessed part. Also in this case, since the coating needle tip 19a is immersed in the correction liquid 17 even if the correction liquid 17 is short, the correction liquid 17 can be used effectively.

In addition, the shutter 51 is provided with an absorption sheet 53 for absorbing the correction liquid 17 leaked from the hole 18b of the container 18. Also in this case, the correction liquid 17 does not fall on the board | substrate 22 in the standby state of an application | coating operation similarly to the case where the recessed part 51a is provided in the shutter 51. As shown in FIG. In addition, as the absorbent sheet 53, it is excellent in water absorptivity, and it is good that there is little self-oscillation, For example, the PVA (polyvinyl alcohol) type porous sheet is used.

17 is a diagram showing a modification 2 of the third embodiment. In FIG. 17, the tapered portion 18f formed on the lower surface of the bottom wall of the container 18 has a tapered shape in which the wall thickness becomes thinner as the hole 18b approaches. In the outer peripheral portion of the tapered portion 18f, an absorbent sheet 54 processed in a ring shape is provided. The absorbent sheet 54 is fixed to the container 18 with a double-sided tape or the like, for example.

When the coating operation is repeated a plurality of times, the coating needle 19 slides the hole 18b of the container 18, so that the correction liquid 17 attached to the coating needle tip portion 19a moves out of the container 18. It may be a case of leaking. At this time, the leaked correction liquid 17 transfers the lower surface 18f having a tapered shape and is absorbed by the absorbent sheet 54. In this case, the shutter 51 shown in FIG. 16 may be omitted.

18 is a diagram showing a modification 3 of the third embodiment. 18, in order to reduce the friction between the hole 18a provided in the upper wall of the container 18, and the coating needle 19, the outer peripheral side surface 19b of the coating needle 19 is a sliding member (fluorine) excellent in sliding property. Resin). The hole 18a is formed of a sliding bearing (resin, etc.) 55 excellent in sliding performance. In addition, in order to lengthen the slide distance of the coating needle 19 and the sliding bearing 55, you may lengthen the sliding bearing 55 in a vertical direction (refer the dotted line part). Moreover, you may coat-process the inner peripheral surface of the hole 18a with the sliding member (fluorine resin etc.) excellent in sliding property.

Thus, by coating the outer peripheral side surface 19b of the coating needle 19, the sliding property of the coating needle 19 and the holes 18a and 18b is improved, and it is possible to reduce the abrasion of the holes 18a and 18b. Become. In addition, although not shown in figure, the hole 18b of the bottom wall of the container 18 may also be formed with the same sliding bearing.

19 is a diagram showing a modification 4 of the third embodiment. In FIG. 19, a refilling hole 18g for replenishing the correction liquid 17 is opened in the upper wall of the container 18. In this case, a syringe or the like into which the replenishment correction liquid 17 has entered can be inserted into the replenishing hole 18g to replenish the correction liquid 17 into the container 18. After replenishment, the container 18 is sealed by closing the replenishment hole 18g with the adhesive sheet 56. The replenishment hole 18g may also be provided in the side wall of the container 18.

Example 4

20 is a cross-sectional view showing the configuration of the main part of the pattern correction apparatus according to the fourth embodiment of the present invention, showing an example in which the application mechanism 5 shown in FIG. 8A is applied. When correcting the void defect of the liquid crystal color filter, each color corresponding to the color (R (red), G (green), B (blue)) and the black matrix (BM (black)) of the colored layer of the pixel on the substrate It is necessary to prepare the application unit 14. In some cases, it is also necessary to prepare an application unit 14 for overcoat (OC (finishing ink)) for surface protection.

In FIG. 20, the structure by which the application | coating unit 14 shown to FIG. 8 (A) is provided for four colors is shown. The fixed base 57 is fixed to the slide part 15b of the linear guide 15. Four application units 14 are fixed on the holder 57. In addition, a hole 57a corresponding to each coating unit 14 is opened in the fixing table 57. The hole 57a provided in the fixing base 57 does not prevent movement of the coating needle in the vertical direction.

In this case, the selection means which is not shown in figure selects the application unit 14 in which the correction liquid of the color which you want to use for defect correction was injected among the four application units 14. Then, the piston in the selected coating unit 14 is lowered, and the coating operation as shown in Figs. 8B to 8D is performed. In addition, the offset position of each application unit 14 and the observation optical system 2 shown in FIG. 1 is preset. Therefore, after performing laser processing of the defect part of a board | substrate using the observation optical system 2 and the cut laser part 4, for example, based on the set offset amount, it is XY to just under the application | coating unit desired of the defect part of a board | substrate. The coating operation can be performed by moving by the stage 10.

With such a configuration, a mechanism for rotating the ink tank table as in the conventional pattern correction apparatus is unnecessary. Moreover, it is not necessary to wash an applicator every time the color of the correction liquid used conventionally changes. For this reason, the structure of the apparatus is simplified. In addition, although not shown in figure, it is the same also in the case where multiple application units 14 shown in FIG.2 (A), FIG.9 (A), and FIG.10 (A) are provided.

21 is a diagram showing a modification 1 of the fourth embodiment. In FIG. 21, an aspect of the application unit 14 seen from above is shown. Four application units 14 are provided on four side surfaces of the drive shaft 13a having a rectangular parallelepiped shape. Each coating unit 14 is fixed to the drive shaft 13a by the linear guide 15 comprised by the rail part 15a and the slide part 15b. In this way, when the plurality of coating units 14 are arranged in the circumferential direction around the drive shaft 13a, the apparatus can be miniaturized. In addition, although not shown in figure, it is the same also in the case where multiple application units 14 shown in FIG.2 (A), FIG.9 (A), and FIG.10 (A) are provided.

22 (A) and (B) show a modification example 2 of the fourth embodiment, and show an example in which the application mechanism 5 shown in FIG. 11 (A) is applied. FIG. 22A is a front view of the coating mechanism part 5, and FIG. 22B is an X-X cross-sectional view of the coating mechanism part 5.

Referring to FIG. 22 (A) (B), the container fixing plate 35 is fixed to the application cylinder 13 main body. Four containers 18 into which the correction liquids 17 of different colors are injected are fitted into the recesses of the container fixing plate 35 and fixed. In the upper wall and the bottom wall of each container 18, the holes 18a and 18b which the coating needle 19 can penetrate are opened, respectively. In addition, a hole 35a larger than the hole 18b of the container 18 is opened in the container fixing plate 35. The hole 35a of the container holding plate 35 is located just below the hole 18b of the container 18 and does not prevent the vertical movement of the coating needle 19.

The side face 58a of the hollow plate 58 having a space therein is fixed to the drive shaft 13a of the application cylinder 13. In addition, four linear guides 15 are provided on the other side surface 58b of the hollow plate 58 corresponding to the four containers 18. The rail part 15a of each linear guide 15 is being fixed to the side surface 58b of the hollow plate 58. The coating needle fixing plate 34 is fixed to the slide portion 15b. The coating needle 19 is fixed to the coating needle fixing plate 34 in the axial direction (vertical direction). The stopper 16 is fixed to the lower end of the rail part 15a.

Moreover, the pin 59 is fixed to the side surface of the coating needle fixing plate 34 in the horizontal direction. The hollow plate 58 is provided with four cylinders 60 corresponding to the four coating needle fixing plates 34. The lever 61 is fixed to the drive shaft 60a of each cylinder 60 in the horizontal direction. The lever 61 protrudes from the elongate hole 58c provided in the side surface 58b of the hollow plate 58, and the tip thereof is located just below the pin 59. The cylinder 60 has the role of hooking the pin 59 to the lever 61 and lifting the coating needle fixing plate 34 and the slide part 15b upwards.

Here, with reference to FIG. 22A, the case where the correction liquid 17 injected into the 1st container 18 from the left side is used for correction | amendment of the defect part 22a of the board | substrate 22 is demonstrated. The cylinder 60 corresponding to the first container 18 from the left position the corresponding lever 61 at the bottom end. The other cylinder 60 raises the corresponding lever 61, and pushes the pin 59 upward so that the corresponding coating needle 19 will not be submerged in the correction liquid 17. As shown in FIG. In this way, by using the four cylinders 60, only one is selected from the four coating needles 19 and used.

Referring to Fig. 22B, the slide portion 15b is lowered to the lower end of the rail portion 15a by the weight of the slide portion 15b, the application needle fixing plate 34, and the application needle 19, and the slide The part 15b is supported by the stopper 16 so as not to escape from the rail part 15a. In addition, the stopper 16 is unnecessary if the linear guide 15 has a function of preventing the slide portion 15b from being pulled out. In the standby state before the start of the coating operation, the coating needle 19 penetrates the hole 18a of the upper wall of the container 18, and the coating needle tip portion 19a is immersed in the correction liquid 17.

Since the application | coating operation is the same as the case demonstrated using FIG. 11 (A)-(c), description is abbreviate | omitted. In addition, the offset position of each coating needle 19 and the observation optical system 2 shown in FIG. 1 shall be preset.

FIG. 23 is a diagram showing a modification example 3 of the fourth embodiment, showing an example in which four colors of the coating unit 44 shown in FIG. 13A are provided.

The unit support plate 49 is fixed to the stage 62 which can move to the left-right direction, and the stage 62 is fixed to the Z stage 12, for example. Each coating unit 44 is fitted into the recessed part 49b formed in the unit support plate 49 and fixed. Moreover, the hole 49a larger than the hole 18b of the container 18 is opened in the unit support plate 49. The hole 49a is located just below the hole 18b of the container 18 and does not prevent the vertical movement of the coating needle 19.

The stage 62 is the unit support plate 49 so that the push rod 45 of the application unit 44 used among the four application units 44 is located just below the drive shaft 13a of the application cylinder 13. Move). The drive shaft 13a of the application cylinder 13 is opposed to the push rod 45 with a constant gap.

Since the application | coating operation is the same as the case demonstrated using FIG. 13 (A) (B), description is abbreviate | omitted. In addition, the offset position of each coating needle 19 and the observation optical system 2 shown in FIG. 1 shall be preset.

Thus, in the structure which isolate | separates the application | coating cylinder 13 and the application | coating unit 44, since it is not necessary to have original application | coating cylinder 13 in the application | coating unit 44, the application | coating cylinder 13 can be shared. have. In addition, since there is a fixed interval between the application unit 44 and the drive shaft 13a of the application cylinder 13, the application unit 44 can be removed and replaced.

In addition, the unit support plate 49 may be fixed to the Z stage 12, and the application cylinder 13 may be fixed to the stage 62. In this case, the application cylinder 13 is moved to the left and right directions by the stage 62. In addition, the application cylinder 13 may be incorporated in each application unit 44 without using the stage 62.

FIG. 24 is a diagram showing a modification 4 of the fourth embodiment, showing an example in which four colors of the coating unit 44 shown in FIG. 14A are provided. The unit support plate 49 is fixed to the Z stage 12 shown in FIG. Each coating unit 44 is fitted into the recessed part 49b formed in the unit support plate 49 and fixed.

FIG. 25 is a partial enlarged view of a main part of the application mechanism part 5 shown in FIG. 24. A hole 49a larger than the hole 18b of the container 18 is opened in the unit support plate 49. The hole 49a is located just below the hole 18b of the container 18 and does not prevent the vertical movement of the coating needle 19.

A ring-shaped groove 47b is formed on the lower surface of the bottom wall of the case 47, and a ring-shaped magnet 63 is fitted into the groove 47b. The case 47 is fitted to the recess 49b of the unit support plate 49 made of an iron magnetic body. Here, the case 47 is fixed to the unit support plate 49 by the suction force acting between the magnet 63 and the case 47 inserted into the case 47. Moreover, the lower part of the bottom wall of the case 47 is provided with the projection part 47c formed so that it may protrude in the position deflected from the center part of the lower surface. A hole 49c into which the protrusion 47c is fitted is opened in the unit support plate 49. With such a configuration, replacement and alignment of the application unit 44 can be simplified without using a tool. In addition, the relative position between the application unit 44 and the unit support plate 49 can always be fixed.

In addition, a hole may be provided in the lower surface of the bottom wall of the case 47 in place of the protrusion 47c, and the needle pin may be press-fitted to the hole using the hole 49c of the unit support plate 49. In addition, the fitting part may be provided in the side surface of the case 47 and the recessed part 49b of the unit support plate 49, and it may be made to match the relative position of the application | coating unit 44 and the unit support plate 49. FIG.

FIG. 26 (A) (B) is a diagram showing a variation 5 of Example 4, and shows an example in which four colors of the coating unit 44 shown in FIG. 14A are provided. FIG. 26A is a top view of the application unit 44, and FIG. 26B is a side view of the application unit 44.

The flange 64 is fixed to each application unit 44 on the outer peripheral surface of the case 47 which has a cylindrical shape. In the circular unit support plate 49, each coating unit 44 is penetrated, and a stepped hole 49d is formed in which the flange 64 can be fitted. With such a configuration, the four application units 44 can be arranged in the circumferential direction on the unit support plate 49. As in the case described with reference to FIG. 25, a ring-shaped magnet may be provided on the lower surface of the flange 64. Moreover, you may provide the projection part in the lower surface of the flange 64, and the hole which can insert a projection part in the unit support plate 49 may be formed.

In this case, when the unit support plate 49 is rotated in the circumferential direction and one coating unit 44 is selected from four coating units 44, the coating unit 44 to be used and the one shown in FIG. The offset position with the observation optical system 2 only needs to be set previously. That is, the offset position of the other three coating units 44 and the observation optical system 2 does not need to be set.

[Example 5]

27A to 27D schematically illustrate the configuration of the coating unit 65 of the pattern correcting apparatus according to the fifth embodiment of the present invention, and illustrate the main steps of defect correction. As shown in FIG. 27 (A), the coating unit 65 attaches the correction liquid 17 to the container portion 76 into which the correction liquid 17 is injected, and the tip portion 19a of the coating needle 19. The application part 77 is apply | coated to the defect part 22a of the board | substrate 22, and the drive part 78 which drives the application part 77 in a vertical direction is comprised.

The container part 76 is comprised from the container 79 of cross-sectional concave shape, and the lid 80 which closes the opened upper surface, and is fixed to the support stand 67. As shown in FIG. In the center of the bottom of the container 79 and the center of the lid 80, holes 79a and 80a through which the coating needle 19 can penetrate are opened, and the holes 79a and 80a are located coaxially. In addition, although the lid 80 is fixed to the container 79, the lid 80 may be press-fitted into the container 79, and the convex-concave portions may be provided and fitted to the joint surfaces of the cover 80 and the container 79, respectively. You may also do it. In order to facilitate alignment of the lid 80, a flange surface for fitting not shown in the lid 80 may be formed, and the upper portion of the inner circumferential side of the container 79 is internally screwed to form a lid ( The outer diameter surface of 80) may be externally threaded to be screwed together. Moreover, you may improve the sealing property of the clearance gap between the container 79 and the lid 80 by providing the seal member not shown in the joining surface.

The container 79 and the lid 80 are made of, for example, a resin material such as a fluorine resin, a polypropylene resin, a polyacetal resin, or a metal material that does not corrode the correction liquid 17. Alternatively, the surface of the metal material may be coated with a fluorine resin or the like. The diameters of the holes 79a and 80a of the container 79 and the lid 80 are slightly larger than the outer diameter of the coating needle 19. The holes 79a and 80a and the coating needle 19 have a constant gap. The hole 79a formed in the bottom of the container 79 is minute, and the correction liquid 17 does not leak from the hole 79a by the surface tension of the correction liquid 17 and the water repellency and oil repellency of the container 79. .

The coating portion 77 includes a coating needle 19, a coating needle fixing plate 85 for fixing the proximal end of the coating needle 19, and a linear guide for movably supporting the coating needle fixing plate 85 in the vertical direction. (83). The linear guide 83 is comprised from the rail part 83a and the slide part 83b. The rail part 83a of the linear guide 83 is being fixed to the side surface of the support stand 67, and the slide part 83b is provided so that a movement to a perpendicular direction (Z direction) is carried out along the rail part 83a. The linear guide 83 has the structure of the rolling rolling guide which provided the rolling element (ball etc.) between the slide part 83b and the rail part 83a, and the slide part 83b has the rail 83a extremely. It is possible to move linearly freely with light force. Moreover, since the support rigidity of the coating needle 19 can be strengthened by using the linear guide 83, it contributes to stabilization of application | coating precision.

The drive part 78 has the function of holding the coating needle fixing plate 85 fixed to the slide part 83b in the intermediate position of the linear guide 83, and the function of opening the support of the slide part 83b. In the case where the slide portion 83b is supported and opened, the slide portion 83b can freely move back and forth on the rail portion 83a, so that the slide portion 83b, the coating needle fixing plate 85, and the coating needle 19 are freely weighed. Thereby, it descends to the position of the stopper 68 below. Moreover, the stopper 68 is provided also above the rail part 83a, and the slide part 83b does not peel from the rail part 83a. In addition, in the case of using the linear guide 83 incorporating the function of the stopper 68, the stopper 68 can be omitted. Although the case where the rail part 83a is fixed to the side surface of the support body 67 is shown here, the rail part 83a and the slide part 83b are replaced, and the slide part 83b is attached to the side surface of the support body 67. As shown in FIG. It may fix and the fixation guide 85 may be fixed to the rail part 83a.

Next, an operation of correcting the defective portion 22a of the substrate 22 will be described. Returning to FIG. 1, the defect part 22a of the board | substrate 22 is moved by the XY stage 10 just under the observation optical system 2, and the image of the defect part 22a on the monitor 3 is returned. Is displayed. At this time, the defect part 22a is fine-adjusted so that it may be located in the center of the screen of the monitor 3. Then, the size of the defective portion 22a is specified by the image processing portion 7. When the board | substrate 22 is a liquid crystal color filter board | substrate, the color discrimination of the pixel of the defect part 22a is also performed. When correcting defects other than void defects, such as a black defect, a foreign material defect, a protrusion defect, and a mixed color defect of a liquid crystal color filter board | substrate. The laser processing by the cut laser part 4 shown in FIG. 1 is made into a void defect once, and the defect is corrected by the application | coating unit 65. FIG. When correct | amending a void defect, laser processing may be abbreviate | omitted and you may make it the arbitrary shape which is easy to correct the shape of a defect part by laser processing using the cut laser part 4 in some cases. Thereafter, the XY stage 10 is moved on the basis of the offset position between the observation optical system 2 and the coating unit 65 set in advance, and the defect portion (just below the coating needle 19 of the coating unit 65) 22a).

As shown in Fig. 27A, in the standby state before the start of the coating operation, the coating needle 19 penetrates through the hole 80a of the lid 80, and the coating needle tip portion 19a is the correction liquid 17. The coating needle fixing plate 85 fixed to the slide portion 83b is held at the predetermined position of the linear guide 83 by the drive portion 78 so as to maintain the state of being immersed in the inside.

When the instruction of starting the coating operation is given from the host computer 8, the support of the coating needle fixing plate 85 by the drive unit 78 is opened, and as shown in FIG. 27 (B), the coating needle fixing plate 85 is shown. The application needle 19 and the slide portion 83b are integrated to descend to the position of the stopper 68 in the vertical direction. At this time, the coating needle 19 protrudes from the hole 79a at the bottom of the container 79. At this time, a correction liquid (ink or metal paste) 17a is attached to the coating needle tip portion 19a.

Next, as shown in FIG. 27C, the coating unit 65 is lowered by a predetermined distance L1. This predetermined distance L1 is set in advance so as to be a value slightly larger than the distance L2 from the coating needle tip portion 19a to the defective portion 22a in the state shown in Fig. 27B. The predetermined distance L1 is set in advance such that, for example, the coating needle tip portion 19a comes into contact with the defective portion 22a, and then the coating unit 65 descends about 0.5 to 1 mm. For this reason, after the coating unit 65 descends and the coating needle tip portion 19a contacts the defective portion 22a of the substrate 22, the slide portion 83b moves up the rail portion 83a. At this time, the coating needle fixing plate 85 also rises together with the slide portion 83b. The magnitude of the load applied to the defect portion 22a from the coating needle tip portion 19a at the time of coating operation is the total value of the weights of the slide portion 83b, the coating needle fixing plate 85, and the coating needle 19. . Therefore, excessive pressure is not applied from the coating needle tip portion 19a to the defective portion 22a, and the substrate 22 is not damaged. The application load is considerably small, for example around 10 g.

As the means for lowering the coating unit 65, the Z stage 12 fixing the coating unit 65 may be used, or another driving stage (not shown) including a function of driving in the vertical direction may be used. The application unit 65 may be moved up and down.

After the coating needle tip portion 19a applies the correction liquid 17a to the defect portion 22a, as shown in FIG. 27 (D), the coating unit 65 is raised to its original position and the driving portion ( 78 is driven to keep the coating needle tip portion 19a returned to the correction liquid 17, one coating operation is completed.

In addition, when it is necessary to apply | coat the correction liquid 17a further to the defect part 22a, this application | coating operation may be performed repeatedly. The larger the defect portion 22a, the greater the number of application operations required. However, the correction liquid 17a can be fixed to the application needle tip portion 19a by only moving the application needle 19 up and down.

FIG. 28 (A)-(D) is a figure which shows the specific structure of the coating unit 65 shown in FIG. 27 (A)-(D). In FIG. 28 (A)-(D), the air cylinder 69 is used as the drive part 78. FIG. A projection 79g is provided on the side of the container 79, a recess 79h is provided on the rear surface of the projection 79g, and a magnet 79i is embedded in the recess 79h. The protrusion 79g is fitted to the recess 67a provided on the side surface of the support 67 made of magnetic material, and is fixed to the support 67 by the magnetic attraction force of the magnet 79i.

The air cylinder 69 is fixed to the support base 67, and the output shaft 69a expands and contracts in the up-down direction. The pin 70 is fixed horizontally to the output shaft 69a, and the pin 70 is integrated with the output shaft 69a to move in the vertical direction. One end of the pin 70 is in contact with the notch portion 85a processed by the coating needle fixing plate 85 for fixing the coating needle 19, and the coating needle fixing plate 85 on which the coating needle 19 is fixed. It has a function to hold | maintain in the intermediate position of the linear guide 83, and a function to open | release.

In FIG. 28 (A), the furnace in which the output shaft 69a of the air cylinder 69 protrudes, and one end of the pin 70 is processed to the coating needle fixing plate 85 for fixing the coating needle 19. The coating needle fixing plate 85 on which the coating needle 19 is fixed by being pushed down against the tooth portion 85a is held at an intermediate position of the linear guide 83. In this state, the coating needle tip portion 19a is immersed in the correction liquid 17.

In FIG. 28 (B), the output shaft 69a of the air cylinder 69 is in a downwardly drawn state, and in accordance with this, the coating needle fixing plate 85, the coating needle 19, and the slide portion 83b are integrally formed. It descends, and the coating needle 19 protrudes from the hole 79a at the bottom of the container 79. The correction needle (ink or metal paste) 17a is attached to the coating needle tip portion 19a. In this example, it descends until just before the slide part 83b contacts the stopper 68, and the lowering position of the coating needle fixing plate 85 is restrained by the position of the pin 70. As shown in FIG.

Next, as shown in Fig. 28 (c), the drive shaft 71a of the drive stage 71 is lowered to lower the coating unit 65 by a predetermined distance, and the coating needle tip portion 19a is brought to the defective portion 22a. ) And apply the correction liquid 17. At this time, after the coating needle tip portion 19a is in contact with the defective portion 22a of the substrate 22, the coating unit 65 is set to lower about 0.5 to 1 mm. 19 moves upward along the rail portion 83a as its contact is maintained. Subsequently, as shown in FIG. 28 (D), the drive shaft 71a of the drive stage 71 is raised to raise the coating unit 65, and the output shaft 69a of the air cylinder 69 is projected to apply. One application | coating operation | movement is complete | finished by raising the needle 19 and returning the application | coating unit 65 to an original state.

In addition, as the correction is performed in this manner, when the correction liquid 17 decreases or when it is necessary to replace the container 19 due to deterioration of the correction liquid 17, the coating needle 19 is moved upward. After saving, it replaces for every container part 19.

[Example 6]

29A to 29D are cross-sectional views showing the configuration and coating operation of the coating unit 72 of the pattern correction apparatus according to the sixth embodiment. Referring to FIG. 29A, the coating unit 72 is a coating portion in which a correction portion 17 is attached to a container portion 76 into which the correction liquid 17 is injected, and a correction liquid 17 is applied to the coating needle tip portion 19a and applied to a defective portion. The part 77, the drive part 78 which drove the application part 77 to the vertical direction, and the case 82 are included.

The container part 76 is comprised from the container 79 of cross-sectional concave shape, and the lid 80 which closes the opened upper surface. In the center of the bottom of the container 79 and the center of the lid 80, holes 79a and 80a through which the coating needle 19 can penetrate are opened, and the holes 79a and 80a are located coaxially. In addition, the cover 80 is tightly fixed to the container 79 via a seal member 81 such as rubber at a portion where the container 79 and the cover 80 are in contact with each other. By providing the seal member 81, leakage of the correction liquid 17 from the gap between the container 79 and the lid 80 is prevented. However, when the adhesion between the container 79 and the lid 80 is not particularly required, the seal member 81 becomes unnecessary.

The flange 79b is provided in the outer peripheral side of the container 79, and the bottomed hole 82a is formed in the bottom of the cylindrical case 82 with a bottom. Since the flange 79b is provided in the container 79, when the cylindrical part 79e of the container 79 is fitted into the hole 82a of the stage 82 of the case 82, the container 79 will become the case 82. Is fixed to.

The coating portion 77 includes a coating needle 19, a coating needle fixing plate 85 on which the coating needle 19 is fixed, and a linear guide 83 for movably supporting the coating needle fixing plate 85 in the vertical direction. It consists of. The linear guide 83 includes a rail portion 83a and a slide portion 83b, and the rail portion 83a is fixed to the inner circumferential surface 82b of the case 82. The slide portion 83b is movable in the vertical direction (Z direction) along the rail portion 83a.

The positioning holder 84 is fixed to the slide portion 83b, and the coating needle fixing plate 85 is fixed to the positioning holder 84 with the fixing screw 86. As shown in FIG. The applicator 19 is such that the center line of the applicator 19 passes through the center of the holes 79a and 80a such that the applicator 19 can penetrate the holes 79a and 80a of the container 79 and the lid 80. ) Is arranged. The coating needle fixing plate 85 is made of a magnetic material such as iron. For example, when using a mechanical structural carbon steel (SC material), Ni plating is applied to the surface for rust prevention. When using stainless steel (SUS430 etc.), Ni plating is unnecessary.

By the weights of the slide portion 83b, the positioning holder 84, the coating needle fixing plate 85, the coating needle 19, and the fixing screw 86, the slide portion 83b is extended to the lower end of the rail portion 83a. It lowers and the slide part 83b is supported by the stopper (not shown) provided in the linear guide 83 so that it may not come out from the rail part 83a. In addition, although the case where the rail part 83a is fixed to the inner peripheral surface 82b of the case 82 is shown here, the rail part 83a and the slide part 83b are replaced, and the inner peripheral surface 82b of the case 82 is replaced. The slide part 83b may be fixed to the rail), and the positioning holder 84 may be fixed to the rail part 83a.

A lid 98 is fixed to the opened upper surface of the case 82, and the case 82 is sealed. The drive part 78 is an electromagnet 87 comprised by the iron core 87a and the coil 87b. The iron core 87a is fixed to the lid 98.

Moreover, the window 82j is formed in the side surface (right side in drawing) of the case 82, and is closed by the lid 91. As shown in FIG. At the time of assembly, the cover 91 is removed and a member such as the linear guide 83 or the coating needle fixing plate 85 is assembled from the window 82j. After assembling, the lid | cover 91 is covered and the case 82 is sealed. In addition, if it is not necessary to seal the inside of the case 82, the shape of the case 82 may be made into the cross-section C shape, and the inside may be opened, and the case 82 is not limited to a cylindrical shape.

Next, an operation of correcting the defective portion 22a of the substrate 22 will be described. As shown in FIG. 29 (A), in the standby state before the start of the coating operation, a current flows through the coil 87b to adsorb the coating needle fixing plate 85 to the electromagnet 87. At this time, the coating needle 19 penetrates through the hole 80a of the lid 80, and the coating needle tip portion 19a is immersed in the correction liquid 17.

When a command to start the coating operation is given from the host computer 8, the electric current of the coil 87b of the electromagnet 87 is cut off. Then, since the electromagnet 87 loses a suction force, as shown to FIG. 29 (B), the coating needle fixing plate 85, the coating needle 19, the positioning guide 84, the fixing screw 86, and The slide portion 83b is integrated and descends in the vertical direction. At this time, the coating needle 19 protrudes from the hole 89a at the bottom of the container 89. A correction liquid (ink or metal paste) 17a is attached to the coating needle tip portion 19a.

Next, as shown in FIG. 29C, the coating unit 72 is lowered by a predetermined distance L1. This predetermined distance L1 is set in advance so as to be a value slightly larger than the distance L2 from the coating needle tip portion 19a to the defect portion 22a in the state shown in FIG. 29 (B). The predetermined distance L1 is set in advance such that, for example, the coating needle tip portion 19a comes into contact with the defective portion 22a, and then the coating unit 72 is lowered by about 0.5 to 1 mm. For this reason, after the coating unit 72 descends and the coating needle tip portion 19a contacts the defective portion 22a of the substrate 22, the slide portion 83b moves up the rail portion 83a. At this time, the coating needle fixing plate 85 also rises together with the slide portion 83b. The magnitude of the load exerted from the tip needle portion 19a to the defect portion 22a at the time of the coating operation includes the slide portion 83b, the positioning holder 84, the coating needle fixing plate 85, and the coating needle ( 19) and the total of the weights of the fixing screws 86. Therefore, excessive pressure is not applied from the coating needle tip portion 19a to the defective portion 22a, and the substrate 22 is not damaged. The application load is quite small, about 10 g.

In addition, the Z stage 12 which fixed the coating unit 72 is used as a means of lowering the coating unit 72. Alternatively, the coating unit 72 may be moved up and down using another driving unit (not shown) that can be driven in the vertical direction.

When the application unit 72 is lowered to the lowest end, the distance from the top of the application needle fixing plate 85 to the electromagnet 87 is shorter than that in FIG. 29 (B). In this way, after applying the correction liquid 17a from the coating needle tip portion 19a to the defect portion 22a, more current than usual flows through the coil 87b of the electromagnet 87, as shown in FIG. 29 (D). As described above, the coating needle fixing plate 85 is adsorbed to the electromagnet 87. At this time, the coating needle tip portion 19a returns to the correction liquid 17. Thereafter, the coating unit 72 is raised to its original position (see Fig. 29A) to complete one coating operation. In addition, after the coating needle fixing plate 85 is attracted to the electromagnet 87, the coating needle fixing plate 85 does not fall even if the current flowing through the coil 87b is reduced. For this reason, the heat_generation | fever of the electromagnet 87 can be suppressed.

When it is necessary to apply the correction liquid 17a to the defect part 22a, this coating operation may be repeated. In addition, the larger the defect portion 22a, the greater the number of necessary coating operations. However, the correction liquid 17a can be reattached to the coating needle tip portion 19a only by moving the coating needle 19 up and down.

30A) -D show another application | coating operation | movement of a pattern correction apparatus, and are a figure compared with FIG. 29 (A)-(D). As shown in FIG. 30 (A), in the standby state before the start of the coating operation, a current flows through the coil 87b to adsorb the coating needle fixing plate 85 to the electromagnet 87.

When the instruction of starting the coating operation is given from the host computer 8, the coating unit 72 is lowered as shown in Fig. 30B. At this time, it descends in the range which does not contact the board | substrate 22 so that the space | interval of the coating unit 72 and the board | substrate 22 may become small.

In this state, when the current of the coil 87b of the electromagnet 87 is cut off, the electromagnet 87 loses the attraction force. As shown in FIG. 30 (C), the coating needle fixing plate 85 and the coating needle 19 ), The positioning stand 84, the fixing screw 86, and the slide portion 83b are integrated to descend in the vertical direction. At this time, the coating needle 19 protrudes from the hole 79a at the bottom of the container 79. Then, the coating needle tip portion 19a contacts the surface of the defective portion 22a of the substrate 22, and the correction liquid (ink or metal paste) 17a attached to the coating needle tip portion 19a is attached to the defective portion 22a. Is applied. In addition, as described above, since the coating load is considerably small at about 10 g, the excessive pressure is not applied to the defective portion 22a from the coating needle tip portion 19a, and the substrate 22 is not damaged.

In this state, when more current is flown through the coil 87b of the electromagnet 87 than shown in the tubular shape, the coating needle fixing plate 85 is adsorbed by the electromagnet 87 as shown in FIG. 30 (D). When it is necessary to further apply the correction liquid 17a to the defect portion 22a, the on / off current of the coil 87b may be repeated while gradually moving the substrate 22 by the XY stage 10. .

Therefore, in the sixth embodiment, the step of reciprocating the coating needle 19 between the defect portion 22a and the ink tank (or paste tank) as in the conventional case is omitted, so that the time required for defect correction is shortened. In addition, the correction liquid 17 enters the sealed container portion 76 except for the holes 79a and 80a of the container 79 and the lid 80, and the coating needle 19 is formed by the hole of the lid 80 ( Since it is always inserted with a small gap in 80a), the area where the correction liquid 17 directly contacts the atmosphere is small. Therefore, evaporation of the dilution liquid (solvent) of the correction liquid 17 can be prevented, and it becomes possible to lengthen the usable number of days (exchange cycle) of the correction liquid 17, and the reduction of the maintenance of the pattern correction apparatus 1 is aimed at. can do. In addition, since the coating needle tip portion 19a in the standby state of the coating operation can be submerged in the correction liquid 17, it is possible to prevent drying of the correction liquid attached to the coating needle tip portion 19a. In addition, the washing | cleaning process of the coating needle front-end | tip 19a can also be skipped. In addition, the lid 80 may be omitted if the diluent of the correction liquid 17 does not evaporate much, and mixing of foreign matter from the upper side is not a problem.

In addition, conventionally, the several coating needles 19 from which the diameter of a front-end | tip part differs is prepared, and the coating needle 19 is selected and used according to the magnitude | size of a defect. However, in the sixth embodiment, since the time required for one application operation is short, the number of application operations may be adjusted by using only one application needle 19 having the smallest diameter of the tip portion. As such, the configuration of the apparatus is simplified. Further, even if a plurality of coating units 72 having different coating diameters are prepared, the coating time per one becomes shorter, so that the coating time can be shortened as compared with the conventional one.

After the appropriate amount of the correction liquid 17a is applied to the defect portion 22a, the correction liquid applied by heating the range including the defect portion 22a by using the substrate heating portion 6 shown in FIG. It is also possible to dry and bake. Moreover, the heater which heats the whole board | substrate 22 may be built in the chuck | zipper part 11, and it is also possible to use the heater and board | substrate heating part 6 which were built in the chuck | zipper part 11 together. In addition, when the correction liquid 17 is an ultraviolet curing type, you may change the board | substrate heating part 6 to an ultraviolet irradiation apparatus, and may provide the ultraviolet irradiation apparatus below the chuck | zipper part 11 which consists of glass. .

As described above, open defects of electrodes formed on substrates such as flat panel displays, defects on ribs (bulk walls) formed on plasma display back panel substrates, void defects on liquid crystal color filter substrates, defects on masks, and the like can be corrected. Further, the phosphor defects in the recesses between the ribs on the plasma display back panel substrate, the color defects in the black portions on the rib upper surface, and the like can also be corrected.

31 is a diagram showing a modification 1 of the sixth embodiment. In FIG. 31, the spacer 92 is fixed to the side surface 82b in the case 82. A U-shaped iron core 87a is fixed to the side surface (right side in the drawing) of the spacer 92. The coil 87b is wound around the U-shaped iron core 87a.

When current flows through the coil 87b, the coating needle fixing plate 85 is attracted to the electromagnet 87, and the magnetic loop 90 closed by the U-shaped iron core 87a and the coating needle fixing plate 85 is closed. Is formed. When the current of the coil 87b is cut off, the coating needle 19 descends. In this case, compared with the electromagnet 87 shown to FIG. 29 (A)-(D), a suction force can be strengthened. In addition, since the application | coating operation in this case is the same as the case shown to FIG. 29 (A)-(D), FIG. 30A)-(D), description is abbreviate | omitted here.

32 is a diagram showing a modification 2 of the sixth embodiment. In Fig. 32, an electromagnetic solenoid 88 is used in place of the electromagnet 87 shown in Figs. 29A to 29D. The electromagnetic solenoid 88 is comprised from the movable iron core 88a fixed to the upper surface of the coating needle fixing plate 85, and the solenoid coil 88bh fixed to the cover 98 of the case 82. As shown in FIG.

When a current flows through the solenoid coil 88b of the electromagnetic solenoid 88, the movable iron core 88a is attracted upwards. When the current of the solenoid coil 88b is cut off, the coating needle 19 falls. In addition, since the application | coating operation in this case is the same as the case shown in FIG. 29 (A)-(D) and FIG. 30 (A)-(D), description is abbreviate | omitted here.

33 is a diagram showing a modification 3 of the sixth embodiment. In Fig. 33, the permanent magnet 89 is fixed to the upper surface of the coating needle fixing plate 85 shown in Figs. 29A to 29D so as to face the electromagnet 87. Figs. In this case, the permanent magnet 89 is adsorbed to the iron core 87a of the electromagnet 87 without applying a current to the coil 87b of the electromagnet 87 in the standby state before the start of the coating operation, and the coating needle tip portion 19a. ) Is immersed in the correction liquid 17.

In response to the instruction to start the coating operation, a current flows through the coil 87b of the electromagnet 87, and the polarity of the iron core 87a is made the same as that of the permanent magnet 89. Thus, the electromagnet 87 and the permanent magnet 89 repel each other, so that the permanent magnet 89, the coating needle fixing plate 85, the coating needle 19, the positioning guide 84, the fixing screw 86, and the slide The portion 83b is integrated and falls. And the coating needle 19 protrudes from the hole 79a of the bottom of the container 79. For example, when the permanent magnet 89 is hard to fall from the iron core 87a, the stroke of the slide portion 83b is adjusted so that a minute air gap is formed between the permanent magnet 89 and the iron core 87a. Alternatively, the nonmagnetic spacer may be fixed to either surface of the permanent magnet 89 and the iron core 87a.

In the example shown to FIG. 29 (A)-(D), it is necessary to continue to flow an electric current to the coil 87b at the time of standby. However, in the third modification of the sixth embodiment, since the permanent magnet 89 is provided on the upper surface of the coating needle fixing plate 85, it is not necessary to flow a current into the coil 87b during the standby operation, and only during the application operation. What is necessary is to flow a current through the coil 87b.

34 is a diagram showing a modification 4 to the sixth embodiment. In FIG. 34, two permanent magnets 89a and 89b are fixed to the upper surface of the coating needle fixing plate 85 shown in FIG. 31 so as to face the electromagnet 87. The magnetic flux directions of the two permanent magnets 89a and 89b are different from each other. The coil 87b is wound around the U-shaped iron core 87a. In this case, the permanent magnets 89a and 89b are attracted to the U-shaped iron core 87a in the standby state before the start of the coating operation, even though no current flows through the coil 87b of the electromagnet 87, and the U-shaped iron core ( The closed magnetic loop 90 is formed by the 87a), the permanent magnets 89a and 89b, and the applicator fixing plate 85. In this case, the attraction force can be stronger than that of the electromagnet 87 shown in FIG.

In response to the command for starting the coating operation, a current flows through the coil 87b of the electromagnet 87. Thereby, the electromagnet 87 and the permanent magnets 89a and 89b repel each other, so that the permanent magnets 89a and 89b, the coating needle fixing plate 85, the coating needle 19, the positioning guide 84 and the fixing screw ( 86 and the slide portion 83b are integrated and fall. And the coating needle 19 protrudes from the hole 79a of the bottom of the container 79.

In this case, since the permanent magnets 89a and 89b are provided on the upper surface of the coating needle fixing plate 85 in the same manner as in the modification 3 of the sixth embodiment shown in FIG. 33, the current flows to the coil 87b during standby. There is no need, and a current may flow through the coil 87b only during the coating operation.

35 is a view showing a modification 5 to the sixth embodiment. 35, it has a taper shape in which the wall thickness becomes thin as it approaches the upper surface 79cn of the bottom wall of the container 79, and the hole 79a. Therefore, the correction needle 17 can be effectively used because the coating needle tip portion 19a is immersed in the semen 17 even if the correction liquid 17 is short.

FIG. 36 is a partially enlarged view of the main part of the coating unit 72 shown in FIG. 35. In Fig. 36, a ring-shaped groove portion 79e is formed on the lower surface of the flange 79b provided on the outer circumferential side surface of the container 79, and a ring-shaped magnet 79i is fitted into the groove portion 79e. The container 79 is fitted into a hole 82a having a stage of a case 82 made of an iron-based magnetic body. Here, the container 79 is tightly fixed to the case 82 by the suction force acting between the magnet 79i inserted into the container 79 and the case 82. With such a configuration, the container 79 can be replaced and aligned without using a tool.

In addition, the tapered portion 79f formed on the lower surface of the bottom wall of the container 79 has a tapered shape in which the wall thickness becomes thin as it approaches the hole 79a. In the outer peripheral portion of the tapered portion 79f, an absorbent sheet 99 processed into a ring shape is provided. The absorbent sheet 99 is fixed to the container 79 with, for example, a double-sided tape. This absorbent sheet 99 is replaceable. When the coating operation is repeated a plurality of times, the coating needle 19 slides the hole 79a of the container 79, so that the correction liquid 17 attached to the coating needle tip portion 19a moves out of the container 79. It may be a case of leaking. At this time, the leaked correction liquid 17 transfers the lower surface 79f having a tapered shape and is absorbed by the absorbent sheet 99. As the absorbent sheet 99, one having excellent water absorption and low self-oscillation may be used. For example, a porous sheet of PVA (polyvinyl alcohol) system is used. Although not illustrated, when the absorbent sheet 99 is disposed to overlap the tapered portion 79f, the correction liquid 17 is absorbed at an early stage of leakage of the correction liquid 17.

In addition, although the shutter for receiving the correction liquid 17 leaked from the hole 79a may be provided below the hole 79a, in order to simplify a mechanism, the shutter was abbreviate | omitted here. If necessary, for example, a zero ring (rubber member) may be provided around the hole 79a to wipe off the correction liquid 17 adhering to the outer circumferential side of the coating needle 19. However, the inner diameter of the ring is the same as, or slightly larger than, the outer diameter of the coating needle 19, so that the lowering of the coating needle 19 is not prevented.

In addition, in order to reduce the friction caused by the sliding between the holes 79a and 20a of the container 79 and the lid 80 and the coating needle 19, a fluorine resin or the like having excellent sliding properties on the outer circumferential side of the coating needle 19 You may coat-process. Further, the holes 79a and 80a may be formed of a sliding bearing (resin or the like) excellent in sliding performance.

37 is a diagram showing a modification 6 to the sixth embodiment. In FIG. 37, a portion corresponding to the container 79 shown in FIG. 36 is provided directly at the bottom of the case 82. That is, the tapered concave portion 82c is formed at the bottom of the case 82, and the correction liquid 17 is injected therein. In the bottom of the recess 82c, a hole 82e through which the coating needle 19 can penetrate is opened. In addition, a tapered portion 82i is formed on the lower surface of the bottom wall of the case 82 so that the wall thickness becomes thinner as the hole 82e approaches.

38 is a diagram showing a modification 7 to the sixth embodiment. In FIG. 38, a portion corresponding to the container 79 shown in FIG. 35 is provided directly at the bottom of the case 82. That is, the recessed part 82c is formed in the bottom of the case 82, and the correction liquid 17 is inject | poured in it. A recess 82d is further formed in the bottom of the recess 82c, and a hole 82e through which the coating needle 19 can penetrate is opened in the center of the recess 82d. Also in this case, since the coating needle tip 19a is immersed in the correction liquid 17 even if the correction liquid 17 is short, the correction liquid 17 can be used effectively.

39 is a diagram showing a modification 8 to Example 6. FIG. In FIG. 39, the plurality of application units 72 are fixedly supported by the unit support plate 93. The unit support plate 93 is fixed to the Z stage 12 shown in FIG. 1, for example.

When correcting the void defect of the liquid crystal color filter substrate, each color corresponding to the color (R (red), G (green), B (blue)) and the black matrix (BM (black)) of the colored layer of the pixel on the substrate It is necessary to prepare the coating unit 72. In some cases, it is also necessary to prepare an application unit 72 for overcoat (OC (finish ink)) for surface protection. Here, the structure by which the application | coating unit 72 was provided for three colors is shown.

The flange 82f is provided on the outer peripheral side of the coating unit 72. A ring-shaped groove portion 82g is formed on the lower surface of the flange 82f, and a ring-shaped magnet 94 is fitted into the groove portion 82g. In addition, a fitting surface 82k is formed at the bottom of the coating unit 72. Each coating unit 72 is fitted into a hole 93a formed in the unit support plate 93 made of an iron-based magnetic body. Here, each application unit 72 is closely fixed to the unit support plate 93 by the suction force acting between the magnet 94 inserted into the flange 82f and the unit support plate 93. With such a configuration, the application unit 72 can be replaced and aligned without using a tool.

In this case, the application | coating unit 72 containing the correction liquid of the color required for correction | amendment of the defect part of a board | substrate is selected, and the application | coating operation demonstrated in FIG. 29 (A)-(D) or FIG. 30 (A)-(D) is performed. . The offset position between the observation optical system 2 and the application unit 72 is input to the host computer 8 or the control computer 9 shown in FIG. 1 in advance.

In addition, when the coating unit 72 is mounted as many times as necessary, the void defects can be corrected corresponding to the color of the colored layer of the pixel on the liquid crystal color filter substrate.

In addition, although the example which has arrange | positioned the some coating unit 72 in a line was shown here, as shown in FIG. 40, you may arrange | position the some coating unit 72 in the circumferential direction. Moreover, other arrangement methods may be sufficient. In addition, the structure which arrange | positioned two or more application units 72 shown in FIG. 27 and FIG. 28 in parallel may be sufficient. In this way, when a plurality of coating units 72 are prepared, the mechanism of the apparatus can be simplified without the need for a mechanism such as a turntable which has been conventionally required. Moreover, it is not necessary to wash the coating needle 19 every time the color of the correction liquid 17 used conventionally changes. For this reason, the structure of the apparatus can be simplified and contribute to shortening the tact time.

In addition, if the case 82 of the application unit 72 is cylindrical, and the position of the application | coating tip 19a is comprised in the center of the case 82, the offset position will be readjusted at the time of replacement | exchange of the application unit 72. FIG. The trouble to do is omitted. In addition, when installing the application unit 72 to the unit support plate 93, there is no need to worry about the mounting direction, and the mechanism for alignment (phase alignment) is also unnecessary.

[Example 7]

FIG. 41: is a figure which shows the structure of the application | coating unit 73 of the pattern correction apparatus by Example 7 of this invention. In FIG. 41, in the coating unit 73, the linear bush 95 is used as the linear guide device in place of the linear guides 83 used in the fifth and sixth embodiments.

The linear bush 95 is disposed coaxially with the case 82 in the cylindrical case 82. The snap ring 96 fixed to the case 82 is provided in the upper part of the linear bush 95, and the linear bush 95 is prevented from escaping from the case 82. FIG. Under the linear bush 95, the recessed part 82c for inject | pouring the correction liquid 17 is formed. A recess 82d is further formed in the bottom of the recess 82c, and a hole 82e through which the coating needle 19 can penetrate is opened in the center of the recess 82d. The upper surface of the recess 82c is closed by the lid 80. A hole 80a through which the coating needle 19 can pass is opened at the center of the lid 80, and the holes 80a and 82e are coaxially located. In addition, the cover 80 is tightly fixed by interposing a seal member 81 such as rubber in a portion where the recessed portion 82c and the cover 80 contact each other.

As the material of the case 82, a nonmagnetic stainless steel material or a fluorine resin is used. In the case of using a thin material, the surface of the concave portion 82c into which the correction liquid 17 is injected and the inner circumferential surface of the hole 82e may be coated with a fluorine resin or the like.

By the circulation of the rolling element 95a in the linear bush 95, the movable shaft 97 having a cylindrical shape is movable in the vertical direction. The hole 97b is formed in the lower part of the movable shaft 97, and the coating needle 19 is adhesively fixed to the hole 97b using the jig | tool (not shown). The application needle 19 is disposed on the central axis of the case 82. Although not shown in figure, the movable shaft 97 and the coating needle 19 may be integrally formed to increase the coaxiality. On the outer peripheral side surface of the upper part of the movable shaft 97, the flange 97a which functions as a stopper is provided. The movable shaft 97 can be lowered to a position where the flange 97a contacts the end portion 82h of the case 82.

A lid 98 is fixed to the upper surface of the case 82, and the case 82 is sealed. The iron core 87a of the electromagnet 87 is fixed to the lid 98. The coil 87b is wound around the iron core 87a. Thus, the electromagnet 87 is arrange | positioned above the flange 97a of the movable shaft 97, and the electromagnet 87 has a function which attracts the movable shaft 97 upward. In addition, since the application | coating operation in this case is the same as the case shown in FIG. 29 (A)-(D) and FIG. 30 (A)-(D), description is abbreviate | omitted here.

Further, a tapered portion 82i is formed on the bottom surface of the bottom of the case 82 so that the wall thickness becomes thin as the hole 82e is approached. The absorbent sheet 99 processed into the ring shape is provided in the outer peripheral part of the taper part 82i. The correction liquid 17 which leaked out from the hole 82e is absorbed by the absorption sheet 99 by electrolysing the taper part 82i.

A flange 82f is provided on the outer circumferential side of the case 82 of the coating unit 73. A ring-shaped groove portion 82g is formed on the lower surface of the flange 82f, and a ring-shaped magnet 94 is fitted into the groove portion 82g. The application unit 73 is fitted into a hole 93a formed in the unit support plate 93 made of an iron-based magnetic body. Here, the application unit 73 is tightly fixed to the unit support plate 93 by the magnetic attraction force acting between the magnet 94 wound around the flange 82f and the unit support plate 93.

At the time when the correction liquid 17 disappears or when the application operation reaches the set number of times, the application unit 73 is replaced with a new one. Since the application unit 73 is not fixed to the unit support plate 93 with a screw or the like but is fixed only by the attraction force of the magnet, it is possible to perform the replacement operation without using a tool. The used coating unit 73 can be reused by injecting the correction liquid 17 after disassembly and washing, and is excellent in recycling property. In this example, the case 82 is integrally formed, but may be separated into a portion into which the correction liquid 17 enters and another portion, and can be detachably attached.

According to the above structure, it is possible to arrange | position the coating needle front-end | tip 19a in the center of the cylindrical case 82, and the effort which readjusts the offset position at the time of replacement | exchange of the coating unit 73 is abbreviate | omitted. In addition, when installing the application unit 73 to the unit support plate 93, there is no need to worry about the attachment direction, and the mechanism for alignment (phase alignment) is also unnecessary.

In addition, as shown in FIG. 31, the electromagnet 87 may be comprised from the U-shaped iron core 87a and the coil 87b. In addition, although not shown in figure, when using the some application | coating unit 73, you may arrange | position the some application unit 73 to the unit support plate 93 in a line, or arrange in the circumferential direction.

Fig. 42 is a diagram showing a modification 1 of the seventh embodiment. In FIG. 42, an electromagnetic solenoid 88 is used in place of the electromagnet 87 shown in FIG. 41. The electromagnetic solenoid 88 is comprised from the movable iron core 88a fixed to the upper surface of the movable shaft 97, and the solenoid coil 88b fixed to the cover 98 of the case 82. As shown in FIG. In addition, since the application | coating operation in this case is the same as the case shown in FIG. 29 (A)-(D) and FIG. 30 (A)-(D), description is abbreviate | omitted here.

43 is a diagram showing a modification 2 of the seventh embodiment. In FIG. 43, the permanent magnet 89 is fixed to the upper surface of the movable shaft 97 shown in FIG. 41 so as to face the electromagnet 87. As shown in FIG. In this case, it is not necessary to flow an electric current through the coil 87b at the time of waiting, and it is only necessary to flow an electric current through the coil 87b only at the time of application | coating operation.

In addition, as shown in FIG. 34, the electromagnet 87 is composed of a U-shaped iron core 87a and a coil 27b, and the two permanent magnets are opposed to the electromagnet 87 on the upper surface of the movable shaft 97. You may adhere | attach (89a, 89b).

44 is a diagram showing a modification 3 to the seventh embodiment. In FIG. 44, a replenishment passage 100 for replenishing the correction liquid 17 is formed in the case 82. At the time when the correction liquid 17 disappeared or when the application operation of the set number of times was completed, the correction liquid from the refill port 100a of the replenishment passage 100 in the state where the application unit 73 was set on the unit support plate 93. Replenish (17). After replenishment, the tape 100 is affixed to the refill port 100a, and the inside of the case 82 is sealed.

If the lower part of the case 82 is formed of a transparent member such as acrylic or polycarbonate, the remaining amount of the correction liquid 17 can be visually confirmed. In addition, the color and material of the correction liquid 17 can also be identified by visual observation. The same applies to the case where the container 19 shown in Example 6 is formed of a transparent member.

On the surface of the case 82 of the coating unit 73, a label, bar code, or color, which records the specifications of the correction liquid 17, its filling amount, the date of assembly, the coating diameter of the coating needle 19, the number of coatings available, the expiration date, and the like. The application unit 73 may be managed by attaching an identification mark or the like.

Instead, a recess 98a is formed on the surface of the lid 98, and a RFID (Radio Frequency Identification) tag 102 capable of recording / reading data is inserted in the recess 98a. The RFID tag 102 records the specifications of the correction liquid 17, its injection amount, the date of assembly, the application diameter of the application needle 19, the number of applications that can be applied, the available expiration date, and the like. The RFID tag 102 may be sealed with a plug (not shown) after being inserted into the recess 98a, or may flow into a solid resin material (epoxy resin or the like) to be solidified. When the lid 98 is made of a member such as resin, the data of the RFID tag 43 is read to a non-contact reader (not shown), and thus, it is preferable. The RFID tag 102 may be attached anywhere as long as it is the surface of the case 82.

Thereby, not only the specification of the coating unit 73 can be confirmed, but also the history management of the coating unit 73 can be performed. That is, when the history information so far is input to the RFID tag 102, the contents confirmation before mounting the application | coating unit 73 to the pattern correction apparatus 1, and the history management at the time of reassembly becomes easy. In addition, when the reader of the RFID tag 102 is provided in the pattern correction apparatus 1, the type of the coating unit 73 currently mounted can be grasped | ascertained by the pattern correction apparatus 1 unit | unit, and It is also possible to control the apparatus based on the information.

45 is a view showing a modification 4 to the seventh embodiment. When preparing a new coating unit 73 for replacement, there is a fear that the coating needle tip portion 19a protrudes from the coating unit 73 due to vibration from the outside. In addition, as shown in FIG. 41, in the case of the coating unit 73 which does not use the permanent magnet 89, until the wiring work of the drive part 78 (electromagnet 87 or the electromagnetic solenoid 88) is complete | finished. In the meantime, the coating needle tip portion 19a may protrude from the coating unit 73.

Then, as shown in FIG. 45, the stopper 103 is inserted from the hole 82m opened in the side surface of the case 82. As shown in FIG. The stopper 103 receives the lower surface 97c of the flange 97a of the movable shaft 97 and fixes and supports the movable shaft 97 so that the coating needle 19 does not fall. Therefore, even before the replacement | coating unit 73 for replacement is mounted in the pattern correction apparatus 1, it becomes possible to hold | maintain the state which contained the coating needle front-end | tip 19a in the correction liquid 17. FIG. After the application unit 73 is fixed to the unit support plate 93 and the wiring work of the electromagnet 87 (drive part 78) is completed, and the electromagnet 87 becomes controllable, the stopper 103 is removed and the application unit ( 73) is made available.

In addition, in order to prevent the stopper 103 from being easily removed from the hole 82m, the hole 82m may be female-threaded, and the stopper 103 may be externally screwed to be screwed together. In addition, when supporting the coating needle fixing plate 85 with the linear guide 83 as shown in Example 1, the hole which the stopper 103 can insert is formed in the side surface of the coating needle fixing plate 85, for example. It is good to leave.

46 is a diagram showing a modification 5 to the seventh embodiment. When the distance that the coating needle 19 has moved up and down is long, the correction liquid 17 adhering to the outer peripheral side of the coating needle 19 leaks from the hole 80a of the lid 80 to the upper surface of the lid 80. It is expected to be. If the correction liquid 17 leaks to the upper surface of the lid 80, the leaked correction liquid 17 hardens with time, and there exists a possibility that the movement of the coating needle 19 may be made dull.

Thus, as shown in FIG. 46, the movable distance of the movable shaft 97 which is integrated with the application needle 19 and moves, that is, the distance h1 from the lower surface of the flange 97a to the end 82h. Is made shorter than the distance h2 from the lower surface 80C of the lid 80 to the liquid surface 13b of the correction liquid 17. Thereby, even if the coating needle 19 is moved up and down, since the correction liquid 17 adhering to the outer peripheral side surface of the coating needle 19 does not reach the hole 80a of the lid 80, There is no slowdown in movement. However, the injection amount of the correction liquid 17 is managed in consideration of the distances h1 and h2.

In addition, if the volatility of the dilution liquid of the correction liquid 17 is low, and mixing of the foreign material from upper direction does not become a problem, the cover 80 may be abbreviate | omitted. In addition, the diameter of the hole 80a of the lid 80 may be made larger than the diameter of the coating needle 19 so that the correction liquid may not adhere to the inner circumferential surface of the hole 80a.

47 is a diagram showing a modification 6 to the seventh embodiment. In FIG. 47, this application unit 73 includes three sub-application units 73a, 73b, 73c housed in one case 82.

The flange 82f is provided in the left side and the right side of the case 82, respectively. A groove portion 82g is formed in the lower surface of the flange 82f, and a magnet 94 is inserted into the groove portion 82g. The case 82 is fitted into a hole 93a formed in the unit support plate 93 made of an iron-based magnetic body. Here, the case 82 is tightly fixed to the unit support plate 93 by the suction force acting between the magnet 94 inserted into the case 82 and the unit support plate 93.

On the surface of the lid 98, the RFID tag 102 into which data including the specifications of the three non-coating units 73a, 73b, and 73c are input is fixed.

On the upper surface of the flange 82f, the reference mark 104 is provided so that the order of the three non-coating units 73a, 73b, 73c can be known. As the reference mark 104, a recess may be provided or a seal may be attached. The position of the non-coating unit 73a, 73b, 73c is attached from the position of this reference mark 104. FIG. In addition, the number of the non-coating unit 73a may be carved on the surface of the case 82.

When the plurality of non-coating units 73a, 73b, 73c are provided in one case 82 as described above, the plurality of coating units 73 are placed on the unit support plate 93 as shown in FIGS. 39 and 40. The space can be made smaller than that of In addition, although the example which three non-coating units 73a, 73b, 73c were arrange | positioned in the block-shaped case 82 was shown here, you may arrange | position in the circumferential direction in the cylindrical case 82. In addition, although the case where three non-coating units are accommodated in one case 82 was shown here, the number of non-coating units accommodated in one case 82 is arbitrary.

48 (A) (B) is a diagram showing a modification 7 of the seventh embodiment. FIG. 48 (A) is a top view of the application unit 73, and FIG. 48 (B) is a side view of the application unit 73. FIG.

In the case 82 having a cylindrical shape, four non-coating units 73a to 73d are accommodated. Thus, when the case 82 has a cylindrical shape, the alignment pin 105 is provided in the flange 82f provided in the outer peripheral side surface of the case 82. On the basis of the position of the positioning pin 105, (1 to 4) indicating the order of the four non-coating units 73a to 73d are embedded in the upper surface of the lid 98. Positioning (phase alignment) of the case 82 becomes possible by forming the hole which the positioning pin 105 can fit into the unit support plate 93 (not shown) which fixes and supports the case 22.

In addition, although the method of using magnetism as the drive part 78 of the coating units 72 and 73 was shown in Example 6 and Example 7, it is not limited to this, You may use another drive source. For example, as shown in Example 5, an air cylinder may be used as a drive source. In the case where the plurality of application units 73 are fixed to the case 82, the case 82 has a cylindrical or block shape, but the plurality of containers 79, the coating needles 19, and the driving unit ( 78 may be disposed, and the shape of the case 82 is not limited.

The embodiment disclosed herein is to be considered in all respects as illustrative and not restrictive. The scope of the present invention is shown by above-described not description but Claim, and it is intended that the meaning of a claim and equality and all the changes within a range are included.

In the pattern correction apparatus according to the present invention, a first hole is opened at the bottom thereof, a container into which the correction liquid is injected, a coating needle having a diameter approximately the same as the first hole, and a tip portion of the coating needle is the first hole. The drive part which protrudes from and apply | coats the correction liquid attached to the front-end | tip part of a coating needle to a defect part is provided. Therefore, the step of reciprocating the coating needle between the defective portion and the ink tank (or paste tank) as in the prior art is omitted. In addition, it is no longer necessary to provide a waiting time after attaching the correction liquid to the coating needle tip as in the prior art, or it is possible to shorten the waiting time. For this reason, the time required for defect correction is shortened, and the structure of the apparatus is simplified.

In the pattern correction method which concerns on this invention, the 1st hole is opened in the bottom, the container in which the correction liquid was injected, and the coating needle which has a diameter substantially the same as a 1st hole are provided, and the tip part of a coating needle is provided in a container. A step of preserving the injected correction liquid, a step of protruding the tip of the coating needle from the first hole to attach the correction liquid to the tip of the coating needle, and contacting the tip of the coating needle with the defect portion to the tip of the coating needle. And applying the corrected liquid to the defect portion. In this case as well, the step of reciprocating the coating needle between the defective portion and the ink tank (or paste tank) as in the prior art is omitted. In addition, it is no longer necessary to provide a waiting time after attaching the correction liquid to the coating needle tip as in the prior art, or it is possible to shorten the waiting time. For this reason, the time required for defect correction is shortened, and the structure of the apparatus is simplified. In addition, since the tip portion of the coating needle is waited in the state of being preserved in the correction liquid, drying of the correction liquid attached to the tip portion of the coating needle is prevented, and the washing step of the tip portion of the coating needle can be omitted.

In the application | coating unit which concerns on this invention, the 1st hole is opened in the bottom, the container which the correction liquid was inject | poured, the coating needle which has a diameter roughly the same as a 1st hole, and the direct drive which supports the coating needle so that it can be moved to Shanghai. The guide member and the drive part which moves the applicator downward, protrude the tip part of an applicator needle from a 1st hole, and attach a correction liquid to the tip part of an applicator are provided, and the correction liquid attached to the tip part of an applicator part is provided in a defect part. Makes it possible to apply. Therefore, the step of reciprocating the coating needle between the defective portion and the ink tank (or paste tank) as in the prior art is omitted. In addition, it is possible to eliminate the need to provide a waiting time or to shorten the waiting time after attaching the correction liquid to the coating needle tip as in the related art. For this reason, the time required for defect correction is shortened, and the structure of the apparatus is simplified. In addition, by waiting in the state where the tip of the coating needle is preserved in the correction liquid, drying of the correction liquid attached to the tip of the coating needle can be prevented, and the washing step of the tip of the coating needle can be omitted.

In the pattern correction apparatus according to the present invention, the coating unit and the substrate are relatively moved so as to contact the defect portion with the tip portion of the coating needle at the time of coating, and apply the correction liquid attached to the tip portion of the coating needle to the defect portion. A mobile device is provided. In this case as well, the step of reciprocating the coating needle between the defective portion and the ink tank (or paste tank) as in the prior art is omitted. In addition, it is no longer necessary to provide a waiting time after attaching the correction liquid to the coating needle tip as in the prior art, or it is possible to shorten the waiting time. For this reason, the time required for defect correction is shortened, and the structure of the apparatus is simplified.

Claims (23)

A pattern correction apparatus for correcting a defective portion of a fine pattern formed on a substrate, A container in which the first hole is opened at the bottom thereof, and the correction liquid is injected; An applicator having a diameter approximately equal to the first hole, and A driving part for protruding the tip of the coating needle from the first hole and applying the correction liquid attached to the tip of the coating needle to the defect portion; The driving unit includes: A first sub-drive part fixed to the container, for protruding the tip of the applicator from the first hole, and attaching a correction liquid to the tip of the applicator, and And a second sub-drive section for lowering the container, contacting the tip portion of the coating needle with the defect portion, and applying a correction liquid attached to the tip portion of the coating needle to the defect portion. . The method of claim 1, The first sub-drive section stores the tip portion of the coating needle in the correction liquid injected into the container at the time of waiting, and at the time of application, the pattern correction portion protrudes from the first hole. Device. delete The method of claim 1, And a linear guide provided between the container and the second sub-drive part to support the container so as not to exert a pressure greater than or equal to a predetermined value from the distal end of the coating needle. Pattern correction apparatus. The method of claim 1, The first sub-drive unit, An electromagnet for moving the applicator upward by a repulsive force between the permanent magnet fixed to the upper end of the applicator and the permanent magnet, and the suction force between the permanent magnet and the repelling force between the permanent magnet. Pattern modification apparatus comprising a. The method of claim 1, The first sub-drive unit, A movable iron core fixed to the top of the applicator, and And a solenoid coil which swings the applicator needle by sucking or dropping the movable iron core. A pattern correction apparatus for correcting a defective portion of a fine pattern formed on a substrate, A container in which the first hole is opened at the bottom thereof, and the correction liquid is injected; An applicator having a diameter approximately equal to the first hole, and A driving part for protruding the tip of the coating needle from the first hole and applying the correction liquid attached to the tip of the coating needle to the defect portion; The drive unit includes a fixed part and a drive shaft, The pattern correction device, A fixing member for fixing the container to the fixing portion, and And a linear guide provided between the applicator and the drive shaft, the linear guide movably supporting the applicator so that a pressure equal to or more than a predetermined value is not applied from the distal end of the applicator to the defect. Device. A pattern correction apparatus for correcting a defective portion of a fine pattern formed on a substrate, A container in which the first hole is opened at the bottom thereof, and the correction liquid is injected; An applicator having a diameter approximately equal to the first hole, A driving unit for protruding the tip of the coating needle from the first hole and applying the correction liquid attached to the tip of the coating needle to the defect portion; A fixing member to which the container is fixed, a protrusion is provided on a surface facing the substrate, and is moved by the driving unit; A first linear guide provided between the fixing member and the driving unit, the first linear guide movably supporting the fixing member so that a pressure equal to or greater than a predetermined value is not applied from the protrusion to the substrate, and And a second linear guide provided between the applicator and the driving part, the second guide movably supporting the applicator so that a pressure equal to or more than a predetermined value is not applied from the distal end of the applicator. Pattern correction device. A pattern correction apparatus for correcting a defective portion of a fine pattern formed on a substrate, A container in which the first hole is opened at the bottom thereof, and the correction liquid is injected; An applicator having a diameter approximately equal to the first hole, A driving unit for protruding the tip of the coating needle from the first hole and applying the correction liquid attached to the tip of the coating needle to the defect portion; A cylindrical case having a bottom on which the container is fixed, A movable member accommodated in the case, A first linear guide provided between an inner circumferential side surface of the case and the movable member, the first linear guide movably supporting the movable member; A second linear guide provided between the applicator and the movable member to support the applicator movably so as not to be exerted a predetermined value or more from the applicator tip to the defective part; The said drive part protrudes the front-end | tip part of the said coating needle from the said 1st hole by pressing down the said movable member. A pattern correction apparatus for correcting a defective portion of a fine pattern formed on a substrate, A container in which the first hole is opened at the bottom thereof, and the correction liquid is injected; An applicator having a diameter approximately equal to the first hole, and A driving part for protruding the tip of the coating needle from the first hole and applying the correction liquid attached to the tip of the coating needle to the defect portion; A second hole of approximately the same diameter as the first hole is opened in an upper wall of the container, the container is sealed except for the first and second holes, and the coating needle is formed in the first and second holes. It is provided so that a movement is possible along the straight line which passes through the hole of 2. The pattern correction apparatus characterized by the above-mentioned. delete delete As a coating unit of a pattern correction apparatus which corrects the defect part of the fine pattern formed on the board | substrate, A container in which the first hole is opened at the bottom thereof, and the correction liquid is injected; An applicator having a diameter approximately equal to the first hole, A linear guide member for supporting the applicator so as to be movable; and A driving part for moving the applicator downward to protrude the tip of the applicator from the first hole and attaching the correction liquid to the tip of the applicator, It is possible to apply the correction liquid attached to the distal end of the coating needle to the defect portion, In addition, there is provided a coating needle fixing member for holding and holding the base end of the coating needle, The linear guide member supports the coating needle in a movable manner through the coating needle fixing member, The drive unit swings the coating needle fixing member, and stores the tip portion of the coating needle in the correction liquid injected into the container during standby, and protrudes the tip portion of the coating needle from the first hole during application. An application unit, characterized in that. As a coating unit of a pattern correction apparatus which corrects the defect part of the fine pattern formed on the board | substrate, A container in which the first hole is opened at the bottom thereof, and the correction liquid is injected; An applicator having a diameter approximately equal to the first hole, A linear guide member for supporting the applicator so as to be movable; and A driving part for moving the applicator downward to protrude the tip of the applicator from the first hole and attaching the correction liquid to the tip of the applicator, It is possible to apply the correction liquid attached to the distal end of the coating needle to the defect portion, When the tip portion of the coating needle contacts the defective portion at least when the tip portion of the coating needle does not exert a pressure or more than a predetermined value from the tip portion of the coating needle when the tip portion of the coating needle contacts the defective portion. An application unit, characterized in that for opening the support of the coating needle fixing member. The method according to claim 13 or 14, The driving unit includes: A support member for supporting the applicator fixing member from below; And a cylinder for swinging the support member. The method according to claim 13 or 14, The applicator fixing member is made of a magnetic material, The drive unit includes an iron core and a coil wound around the iron core, and moves the applicator fixing member upward by a magnetic attraction force between the applicator fixing member in response to an electric current flowing through the coil. And the coating needle fixing member is moved downward in response to the current of the coil cut off. The method according to claim 13 or 14, In addition, provided with a permanent magnet fixed to the upper end of the coating needle fixing member, The drive unit includes an iron core and a coil wound around the iron core, and moves the applicator fixing member downward by a magnetic repulsion force between the permanent magnet in response to an electric current flowing through the coil. And the coating needle fixing member is moved upward by a magnetic attraction force between the permanent magnets in response to the electric current of the coil being cut off. The method according to claim 13 or 14, In addition, provided with an iron core fixed to the upper end of the coating needle fixing member, The driving unit includes a solenoid coil, and in response to a current flowing through the solenoid coil, moves the coating needle fixing member upward by a magnetic attraction force between the iron core and the current of the solenoid coil is disconnected. In response, the coating needle fixing member is moved downward. The method according to claim 13 or 14, On the opened upper surface of the container, a lid in which a second hole having a diameter approximately equal to the diameter of the coating needle is opened is fixed, and the container is sealed except for the first and second holes, and the coating The needle is provided so as to be movable along a straight line passing through the first and second holes. The method according to claim 13 or 14, And an absorbing member disposed around the first hole at the bottom of the bottom of the container and absorbing the correction liquid leaking out of the first hole. The method according to claim 13 or 14, With one case, And a plurality of sets of the container, the coating needle, the linear motion guide member, and the driving portion provided in the one case. The coating unit according to claim 13 or 14, and And a moving device which relatively moves the coating unit and the substrate during the coating and applies the correction liquid attached to the tip of the coating needle to the defect portion. 23. The method of claim 22, It is provided with a some application | coating unit, The container of each application unit is inject | poured the correction liquid different from the correction liquid injected into the container of another application unit, The moving device relatively moves at least the selected coating unit and the substrate in response to at least a kind of the defective portion in the plurality of coating units, and applies the correction liquid attached to the tip of the coating needle to the defective portion. Pattern correction device.

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