JP2006261156A5 - - Google Patents

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Publication number
JP2006261156A5
JP2006261156A5 JP2005072291A JP2005072291A JP2006261156A5 JP 2006261156 A5 JP2006261156 A5 JP 2006261156A5 JP 2005072291 A JP2005072291 A JP 2005072291A JP 2005072291 A JP2005072291 A JP 2005072291A JP 2006261156 A5 JP2006261156 A5 JP 2006261156A5
Authority
JP
Japan
Prior art keywords
holding
original
substrate
convex support
exposure apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005072291A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006261156A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005072291A priority Critical patent/JP2006261156A/ja
Priority claimed from JP2005072291A external-priority patent/JP2006261156A/ja
Priority to US11/371,100 priority patent/US20060209289A1/en
Publication of JP2006261156A publication Critical patent/JP2006261156A/ja
Publication of JP2006261156A5 publication Critical patent/JP2006261156A5/ja
Withdrawn legal-status Critical Current

Links

JP2005072291A 2005-03-15 2005-03-15 原版保持装置およびそれを用いた露光装置 Withdrawn JP2006261156A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005072291A JP2006261156A (ja) 2005-03-15 2005-03-15 原版保持装置およびそれを用いた露光装置
US11/371,100 US20060209289A1 (en) 2005-03-15 2006-03-09 Exposure apparatus, and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005072291A JP2006261156A (ja) 2005-03-15 2005-03-15 原版保持装置およびそれを用いた露光装置

Publications (2)

Publication Number Publication Date
JP2006261156A JP2006261156A (ja) 2006-09-28
JP2006261156A5 true JP2006261156A5 (https=) 2008-05-01

Family

ID=37009943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005072291A Withdrawn JP2006261156A (ja) 2005-03-15 2005-03-15 原版保持装置およびそれを用いた露光装置

Country Status (2)

Country Link
US (1) US20060209289A1 (https=)
JP (1) JP2006261156A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5013941B2 (ja) * 2007-04-19 2012-08-29 キヤノン株式会社 ステージ装置、露光装置、及びデバイス製造方法
US20130250271A1 (en) * 2012-02-17 2013-09-26 Nikon Corporation Stage assembly with secure device holder

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1077393A2 (en) * 1999-08-19 2001-02-21 Canon Kabushiki Kaisha Substrate attracting and holding system for use in exposure apparatus
KR100855527B1 (ko) * 2001-02-13 2008-09-01 가부시키가이샤 니콘 유지장치, 유지방법, 노광장치 및 디바이스 제조방법
JP2002305138A (ja) * 2001-04-05 2002-10-18 Nikon Corp 露光装置および露光方法
EP1510868A1 (en) * 2003-08-29 2005-03-02 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
DE602004032100D1 (de) * 2003-11-05 2011-05-19 Asml Netherlands Bv Lithographischer Apparat und Vorrichtungs-Halteverfahren
JP4411100B2 (ja) * 2004-02-18 2010-02-10 キヤノン株式会社 露光装置
JP4794882B2 (ja) * 2005-03-25 2011-10-19 キヤノン株式会社 走査型露光装置、走査型露光方法

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