JP2006253662A5 - - Google Patents
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- Publication number
- JP2006253662A5 JP2006253662A5 JP2006029198A JP2006029198A JP2006253662A5 JP 2006253662 A5 JP2006253662 A5 JP 2006253662A5 JP 2006029198 A JP2006029198 A JP 2006029198A JP 2006029198 A JP2006029198 A JP 2006029198A JP 2006253662 A5 JP2006253662 A5 JP 2006253662A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- conductive layer
- liquid repellent
- memory element
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000005871 repellent Substances 0.000 claims 21
- 239000007788 liquid Substances 0.000 claims 20
- 230000002940 repellent Effects 0.000 claims 20
- 238000004519 manufacturing process Methods 0.000 claims 8
- 238000000034 method Methods 0.000 claims 8
- 239000006087 Silane Coupling Agent Substances 0.000 claims 6
- 238000005192 partition Methods 0.000 claims 4
- 239000000463 material Substances 0.000 claims 3
- 125000000217 alkyl group Chemical group 0.000 claims 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical group FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006029198A JP4884791B2 (ja) | 2005-02-10 | 2006-02-07 | 記憶素子及びその作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005035266 | 2005-02-10 | ||
| JP2005035266 | 2005-02-10 | ||
| JP2006029198A JP4884791B2 (ja) | 2005-02-10 | 2006-02-07 | 記憶素子及びその作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006253662A JP2006253662A (ja) | 2006-09-21 |
| JP2006253662A5 true JP2006253662A5 (enExample) | 2009-03-05 |
| JP4884791B2 JP4884791B2 (ja) | 2012-02-29 |
Family
ID=37093750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006029198A Expired - Fee Related JP4884791B2 (ja) | 2005-02-10 | 2006-02-07 | 記憶素子及びその作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4884791B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5382037B2 (ja) * | 2011-03-17 | 2014-01-08 | ブラザー工業株式会社 | レンチキュラーシート及びレンチキュラーシートの製造方法 |
| JP2019145546A (ja) * | 2018-02-16 | 2019-08-29 | 住友電工デバイス・イノベーション株式会社 | 半導体装置の製造方法 |
| DE102020133314A1 (de) * | 2020-05-28 | 2021-12-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | 3d-speicher mit leitfähigen graphitstreifen |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4010091B2 (ja) * | 2000-03-23 | 2007-11-21 | セイコーエプソン株式会社 | メモリデバイスおよびその製造方法 |
-
2006
- 2006-02-07 JP JP2006029198A patent/JP4884791B2/ja not_active Expired - Fee Related
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