JP2006253039A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2006253039A5 JP2006253039A5 JP2005070053A JP2005070053A JP2006253039A5 JP 2006253039 A5 JP2006253039 A5 JP 2006253039A5 JP 2005070053 A JP2005070053 A JP 2005070053A JP 2005070053 A JP2005070053 A JP 2005070053A JP 2006253039 A5 JP2006253039 A5 JP 2006253039A5
- Authority
- JP
- Japan
- Prior art keywords
- flexible body
- contact
- contact portion
- substrate
- micromachine switch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 7
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005070053A JP4643316B2 (ja) | 2005-03-11 | 2005-03-11 | マイクロマシンスイッチ及びその駆動方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005070053A JP4643316B2 (ja) | 2005-03-11 | 2005-03-11 | マイクロマシンスイッチ及びその駆動方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006253039A JP2006253039A (ja) | 2006-09-21 |
| JP2006253039A5 true JP2006253039A5 (enExample) | 2008-04-24 |
| JP4643316B2 JP4643316B2 (ja) | 2011-03-02 |
Family
ID=37093281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005070053A Expired - Fee Related JP4643316B2 (ja) | 2005-03-11 | 2005-03-11 | マイクロマシンスイッチ及びその駆動方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4643316B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4919819B2 (ja) * | 2007-01-24 | 2012-04-18 | 富士通株式会社 | マイクロマシンデバイスの駆動制御方法および装置 |
| WO2009063627A1 (ja) * | 2007-11-14 | 2009-05-22 | Panasonic Corporation | 電気機械素子およびそれを用いた電気機器 |
| KR101092926B1 (ko) * | 2009-05-21 | 2011-12-12 | 한국과학기술원 | 공진형 회전이동 구동기 및 이를 갖는 공진형 회전이동 구동 어레이 |
| US7928333B2 (en) * | 2009-08-14 | 2011-04-19 | General Electric Company | Switch structures |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI109155B (fi) * | 2000-04-13 | 2002-05-31 | Nokia Corp | Menetelmä ja järjestely mikromekaanisen elementin ohjaamiseksi |
| JP2004134370A (ja) * | 2002-07-26 | 2004-04-30 | Matsushita Electric Ind Co Ltd | スイッチ |
-
2005
- 2005-03-11 JP JP2005070053A patent/JP4643316B2/ja not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2012185153A5 (enExample) | ||
| JP2009050146A5 (enExample) | ||
| US10971986B2 (en) | Broadband vibrational energy harvesting device combining multiple nonlinearity | |
| JP2014533009A5 (enExample) | ||
| WO2007070022A3 (en) | Electromechanical energy harvesting system | |
| EP1619710A3 (en) | Vibration type MEMS switch and fabricating method thereof | |
| WO2011052973A3 (ko) | 진동의 자기-증폭 기능을 갖는 구조로 된 압전진동장치 및 이를 진동수단으로 채용한 전기/전자기기 | |
| EP2490002A3 (en) | Piezoelectric vibration type force sensor and robot apparatus | |
| JP2005234238A5 (enExample) | ||
| JP2005271191A5 (enExample) | ||
| JP2010112888A5 (enExample) | ||
| RU2011137568A (ru) | Линейный колебательный привод | |
| EP2017905A3 (en) | Actuator | |
| JP2012023883A5 (enExample) | ||
| CN204103801U (zh) | 一种升频式振动能量采集系统 | |
| JP2011199661A5 (enExample) | ||
| Al-Mashaal et al. | Tunable graphene-polymer resonators for audio frequency sensing applications | |
| JP2006253039A5 (enExample) | ||
| CN207652692U (zh) | 一种压电发声装置 | |
| WO2021086184A1 (en) | Membrane transducer with improved bandwidth | |
| KR20130037286A (ko) | 압전소자가 장착된 바이브레이터 | |
| JP2019030091A5 (enExample) | ||
| JP2006314179A5 (enExample) | ||
| CN202652515U (zh) | 具固定装置的振动扬声器 | |
| JP3214266U (ja) | マイクロリニア振動子 |