JP4643316B2 - マイクロマシンスイッチ及びその駆動方法 - Google Patents

マイクロマシンスイッチ及びその駆動方法 Download PDF

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Publication number
JP4643316B2
JP4643316B2 JP2005070053A JP2005070053A JP4643316B2 JP 4643316 B2 JP4643316 B2 JP 4643316B2 JP 2005070053 A JP2005070053 A JP 2005070053A JP 2005070053 A JP2005070053 A JP 2005070053A JP 4643316 B2 JP4643316 B2 JP 4643316B2
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JP2006253039A5 (enExample
JP2006253039A (ja
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清裕 柴田
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Toshiba Corp
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Toshiba Corp
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JP2005070053A 2005-03-11 2005-03-11 マイクロマシンスイッチ及びその駆動方法 Expired - Fee Related JP4643316B2 (ja)

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JP2005070053A JP4643316B2 (ja) 2005-03-11 2005-03-11 マイクロマシンスイッチ及びその駆動方法

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JP2005070053A JP4643316B2 (ja) 2005-03-11 2005-03-11 マイクロマシンスイッチ及びその駆動方法

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JP2006253039A JP2006253039A (ja) 2006-09-21
JP2006253039A5 JP2006253039A5 (enExample) 2008-04-24
JP4643316B2 true JP4643316B2 (ja) 2011-03-02

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JP2005070053A Expired - Fee Related JP4643316B2 (ja) 2005-03-11 2005-03-11 マイクロマシンスイッチ及びその駆動方法

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4919819B2 (ja) * 2007-01-24 2012-04-18 富士通株式会社 マイクロマシンデバイスの駆動制御方法および装置
WO2009063627A1 (ja) * 2007-11-14 2009-05-22 Panasonic Corporation 電気機械素子およびそれを用いた電気機器
KR101092926B1 (ko) * 2009-05-21 2011-12-12 한국과학기술원 공진형 회전이동 구동기 및 이를 갖는 공진형 회전이동 구동 어레이
US7928333B2 (en) * 2009-08-14 2011-04-19 General Electric Company Switch structures

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI109155B (fi) * 2000-04-13 2002-05-31 Nokia Corp Menetelmä ja järjestely mikromekaanisen elementin ohjaamiseksi
JP2004134370A (ja) * 2002-07-26 2004-04-30 Matsushita Electric Ind Co Ltd スイッチ

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