JP2006246449A5 - - Google Patents

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Publication number
JP2006246449A5
JP2006246449A5 JP2006026357A JP2006026357A JP2006246449A5 JP 2006246449 A5 JP2006246449 A5 JP 2006246449A5 JP 2006026357 A JP2006026357 A JP 2006026357A JP 2006026357 A JP2006026357 A JP 2006026357A JP 2006246449 A5 JP2006246449 A5 JP 2006246449A5
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JP
Japan
Prior art keywords
groove
piezoelectric vibrator
groove portion
vibrating arm
package
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Application number
JP2006026357A
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Japanese (ja)
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JP2006246449A (en
JP4235207B2 (en
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Priority to JP2006026357A priority Critical patent/JP4235207B2/en
Priority claimed from JP2006026357A external-priority patent/JP4235207B2/en
Publication of JP2006246449A publication Critical patent/JP2006246449A/en
Publication of JP2006246449A5 publication Critical patent/JP2006246449A5/ja
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Publication of JP4235207B2 publication Critical patent/JP4235207B2/en
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Claims (4)

基部から振動腕部が２本伸びだして音叉型に形成されている圧電振動子において、
前記振動腕部の表面部及び裏面部に、当該振動腕部の基端部から長さ方向に沿って伸びると共に長さ方向に２つに分割されて形成された溝部と、
前記振動腕部の側面及び溝部内に夫々設けられた、対をなす励振電極と、
前記振動腕部の表面部に形成された溝部と前記振動腕部の裏面部に形成された溝部は底部を有していることと、
長さ方向に２つに分割されて形成された溝部のうち基端側の溝部を第１の溝部、先端側の溝部を第２の溝部とすると、振動腕部の基端部から第２の溝部の先端までの長さＬ１に対する第１の溝部及び第２の溝部の間隔ｄの比ｄ／Ｌ１が０．０１０〜０．０１６であることと、を備えたことを特徴とする圧電振動子。 In the piezoelectric vibrator formed in a tuning fork shape with two vibrating arms extending from the base,
A groove portion formed on the front surface portion and the back surface portion of the vibration arm portion, extending along the length direction from the base end portion of the vibration arm portion and divided into two in the length direction;
A pair of excitation electrodes provided in each of the side surface and the groove of the vibrating arm, and
The groove formed on the surface of the vibrating arm and the groove formed on the back of the vibrating arm have a bottom;
Of the groove portions divided into two in the length direction, if the groove portion on the proximal end side is the first groove portion and the groove portion on the distal end side is the second groove portion, the second end portion from the proximal end portion of the vibrating arm portion The ratio d / L1 of the distance d between the first groove portion and the second groove portion to the length L1 to the tip of the groove portion is 0.010 to 0.016, and the piezoelectric vibrator is characterized in that . 長さ方向に２つに分割されて形成された溝部のうち基端側の溝部を第１の溝部、先端側の溝部を第２の溝部とすると、振動腕部の基端部から第２の溝部の先端までの長さＬ１に対する第１の溝部の長さＬ２の比Ｌ２／Ｌ１が０．３５〜０．６５であることを特徴とする請求項１記載の圧電振動子。   Of the groove portions divided into two in the length direction, if the groove portion on the proximal end side is the first groove portion and the groove portion on the distal end side is the second groove portion, the second end portion from the proximal end portion of the vibrating arm portion 2. The piezoelectric vibrator according to claim 1, wherein a ratio L2 / L1 of the length L2 of the first groove to the length L1 to the tip of the groove is 0.35 to 0.65. パッケージと、このパッケージの中に設けられた請求項１または２に記載の圧電振動子と、前記パッケージの外に設けられ、前記圧電振動子の引き出し電極に電気的に接続された電極と、を備えたことを特徴とする圧電振動子パッケージ。 A package, a piezoelectric vibrator according to claim 1 or 2 provided in the package, and an electrode provided outside the package and electrically connected to an extraction electrode of the piezoelectric vibrator. pressure electrostatic resonator package characterized by comprising. 請求項１または２に記載の圧電振動子と、この圧電振動子を発振させる発振回路と、を備えたことを特徴とする発振器。 A piezoelectric vibrator according to claim 1 or 2, you comprising the an oscillation circuit for oscillating the piezoelectric vibrator oscillators.
JP2006026357A 2005-02-02 2006-02-02 Piezoelectric vibrator, piezoelectric vibrator package, and oscillation circuit Active JP4235207B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006026357A JP4235207B2 (en) 2005-02-02 2006-02-02 Piezoelectric vibrator, piezoelectric vibrator package, and oscillation circuit

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005026099 2005-02-02
JP2006026357A JP4235207B2 (en) 2005-02-02 2006-02-02 Piezoelectric vibrator, piezoelectric vibrator package, and oscillation circuit

Publications (3)

Publication Number Publication Date
JP2006246449A JP2006246449A (en) 2006-09-14
JP2006246449A5 true JP2006246449A5 (en) 2008-12-04
JP4235207B2 JP4235207B2 (en) 2009-03-11

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ID=37052318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006026357A Active JP4235207B2 (en) 2005-02-02 2006-02-02 Piezoelectric vibrator, piezoelectric vibrator package, and oscillation circuit

Country Status (1)

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JP (1) JP4235207B2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4618440B2 (en) * 2006-09-28 2011-01-26 日本電波工業株式会社 Crystal resonator element and vibration device
JP4582718B2 (en) * 2006-09-29 2010-11-17 日本電波工業株式会社 Tuning fork type crystal resonator element
JP4102839B2 (en) 2006-10-06 2008-06-18 日本電波工業株式会社 Tuning fork type crystal vibrating piece manufacturing method, crystal vibrating device manufacturing method, tuning fork type crystal vibrating piece and crystal vibrating device
JP2008113380A (en) * 2006-10-31 2008-05-15 Nippon Dempa Kogyo Co Ltd Method for manufacturing crystal vibrator, crystal vibrator, and electronic component
JP5059387B2 (en) * 2006-11-29 2012-10-24 日本電波工業株式会社 Tuning fork type piezoelectric resonator element, piezoelectric device, and tuning fork type piezoelectric resonator element
US7863803B2 (en) 2007-05-30 2011-01-04 Epson Toyocom Corporation Tuning fork resonator element and tuning fork resonator
JP5080616B2 (en) * 2010-06-28 2012-11-21 日本電波工業株式会社 Tuning fork type piezoelectric vibrating piece and piezoelectric device

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