|
US5985623A
(en)
*
|
1995-01-24 |
1999-11-16 |
Shin-Etsu Bio, Inc. |
DNA segments and methods for increasing polysaccharide production
|
|
DE59611078D1
(de)
*
|
1995-03-28 |
2004-10-14 |
Brooks Automation Gmbh |
Be- und Entladestation für Halbleiterbearbeitungsanlagen
|
|
US5806574A
(en)
*
|
1995-12-01 |
1998-09-15 |
Shinko Electric Co., Ltd. |
Portable closed container
|
|
US6138721A
(en)
*
|
1997-09-03 |
2000-10-31 |
Asyst Technologies, Inc. |
Tilt and go load port interface alignment system
|
|
JPH11159218A
(ja)
*
|
1997-11-26 |
1999-06-15 |
Shin Etsu Polymer Co Ltd |
精密基板容器のドアラッチ機構
|
|
US6704998B1
(en)
*
|
1997-12-24 |
2004-03-16 |
Asyst Technologies, Inc. |
Port door removal and wafer handling robotic system
|
|
US6082951A
(en)
*
|
1998-01-23 |
2000-07-04 |
Applied Materials, Inc. |
Wafer cassette load station
|
|
JPH11214479A
(ja)
*
|
1998-01-23 |
1999-08-06 |
Tokyo Electron Ltd |
基板処理装置及びその方法並びに基板搬送装置
|
|
JPH11220001A
(ja)
|
1998-01-30 |
1999-08-10 |
Hitachi Ltd |
半導体基板処理装置におけるロードポート及びロードポート搬送台車
|
|
US6281516B1
(en)
*
|
1998-07-13 |
2001-08-28 |
Newport Corporation |
FIMS transport box load interface
|
|
US6502869B1
(en)
*
|
1998-07-14 |
2003-01-07 |
Asyst Technologies, Inc. |
Pod door to port door retention system
|
|
US6261044B1
(en)
*
|
1998-08-06 |
2001-07-17 |
Asyst Technologies, Inc. |
Pod to port door retention and evacuation system
|
|
US6168364B1
(en)
*
|
1999-04-19 |
2001-01-02 |
Tdk Corporation |
Vacuum clean box, clean transfer method and apparatus therefor
|
|
US6396072B1
(en)
*
|
1999-06-21 |
2002-05-28 |
Fortrend Engineering Corporation |
Load port door assembly with integrated wafer mapper
|
|
JP3954287B2
(ja)
*
|
1999-06-28 |
2007-08-08 |
東京エレクトロン株式会社 |
ウェハキャリア用蓋体の着脱装置
|
|
JP2001102426A
(ja)
*
|
1999-10-01 |
2001-04-13 |
Hirata Corp |
物品容器開閉・転送装置および物品容器開閉・転送方法
|
|
JP3559213B2
(ja)
*
|
2000-03-03 |
2004-08-25 |
株式会社半導体先端テクノロジーズ |
ロードポート及びそれを用いた生産方式
|
|
AU2001270277A1
(en)
*
|
2000-06-30 |
2002-01-14 |
Ajs Automation, Inc. |
Apparatus and methods for semiconductor wafer processing equipment
|
|
US20020015636A1
(en)
*
|
2000-08-04 |
2002-02-07 |
Shinsung Eng Corporation |
FOUP door opening apparatus of FOUP opener and latch key control method
|
|
US20020044859A1
(en)
*
|
2000-08-28 |
2002-04-18 |
Shinsung Eng Corporation |
FOUP loading apparatus for FOUP opener
|
|
US6419438B1
(en)
*
|
2000-11-28 |
2002-07-16 |
Asyst Technologies, Inc. |
FIMS interface without alignment pins
|
|
US7021882B2
(en)
*
|
2000-11-30 |
2006-04-04 |
Hirata Corporation |
Drive-section-isolated FOUP opener
|
|
JP3699348B2
(ja)
*
|
2000-11-30 |
2005-09-28 |
平田機工株式会社 |
駆動部隔離ｆｏｕｐオープナ
|
|
JP2002184831A
(ja)
*
|
2000-12-11 |
2002-06-28 |
Hirata Corp |
Ｆｏｕｐオープナ
|
|
US6533521B1
(en)
*
|
2001-03-29 |
2003-03-18 |
Genmark Automation, Inc. |
Integrated substrate handler having pre-aligner and storage pod access mechanism
|
|
EP1315198B1
(en)
*
|
2001-11-21 |
2006-08-30 |
RIGHT MFG. Co. Ltd. |
Pod cover removing-installing apparatus
|
|
JP2003203961A
(ja)
*
|
2002-01-04 |
2003-07-18 |
Hitachi Kokusai Electric Inc |
基板処理装置
|
|
JP4175560B2
(ja)
*
|
2002-11-13 |
2008-11-05 |
平田機工株式会社 |
容器開閉装置
|
|
US6984839B2
(en)
*
|
2002-11-22 |
2006-01-10 |
Tdk Corporation |
Wafer processing apparatus capable of mapping wafers
|
|
JP2004296856A
(ja)
*
|
2003-03-27 |
2004-10-21 |
Hitachi Kokusai Electric Inc |
半導体製造装置
|
|
JP3902583B2
(ja)
*
|
2003-09-25 |
2007-04-11 |
Ｔｄｋ株式会社 |
可搬式密閉容器内部のパージシステムおよびパージ方法
|
|
US7328727B2
(en)
*
|
2004-04-18 |
2008-02-12 |
Entegris, Inc. |
Substrate container with fluid-sealing flow passageway
|