JP2006216454A - Excimer lamp - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an excimer lamp stably obtaining an expected illumination distribution in a longitudinal direction of the excimer lamp over a long period of time in the excimer lamp in which an interior electrode is comprised of a coil. <P>SOLUTION: The exicimer lamp is provided with a tube state discharge container comprised at least partially from optically transparent dielectric body with discharge gas inside, an exterior electrode installed extending in the longitudinal direction on an outer periphery surface of the discharging container and an interior electrode comprised of the coil formed by winding a metal strand and installed extended to be approximately on the same axis as an axis of the discharging container and facing the exterior electrode and discharging is configured with at least one dielectric body interposing between the exterior electrode and the interior electrode. The interior electrode is provided with a position readjustment means readjusting its position according to the movement of the coil in the axial direction. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an excimer lamp.

For example, as known in Patent Document 1 or the like, a discharge gas that forms excimer molecules is sealed inside a discharge vessel, and excimer molecules are formed by dielectric barrier discharge, and light emitted from the excimer molecules is extracted. A so-called excimer lamp is known. In such a lamp, a dielectric such as glass and a discharge gas are interposed between a pair of electrodes, and discharge is generated through the dielectric when a high-frequency voltage is applied between the electrodes.
The excimer lamp irradiates the surface of the object to be irradiated with ultraviolet light in the range of 200 nm or less and 100 nm or more, and decomposes and scatters organic substances on the surface of the object to be processed by the synergistic effect of the generated ozone and the transmitted ultraviolet light. Let For example, the liquid crystal glass substrate is suitably used for processing such as cleaning.

The excimer lamp described in the above publication will be described with reference to FIG. FIG. 9A is a sectional view for explanation in which the lamp is cut in the tube axis direction of the discharge vessel, and FIG. 9B is a sectional view taken along line AA.
At least a part of the discharge vessel 90 is made of a dielectric material that transmits ultraviolet rays, for example, synthetic quartz glass. The discharge vessel 90 has a so-called double tube structure, in which a cylindrical inner tube 91 is disposed on the center side of the tube axis, and an outer tube 92 having a diameter larger than that of the inner tube 91 is disposed coaxially thereto. By closing at both ends, the discharge vessel 90 has a cylindrical shape as a whole. The discharge vessel 90 is filled with a rare gas such as xenon as a discharge gas that generates excimer. An inner electrode 93 is disposed along the inner peripheral surface 91 a of the inner tube 91 in the discharge vessel 90, and an electrode opposite to the inner electrode 93 is formed on the outer peripheral surface 92 b of the outer tube 92 by a metal wire or net. The outer electrode 94 is formed. The inner electrode 93 shown in the figure has a coil shape, but may be used in combination with, for example, a bowl-shaped plate electrode having a semicircular cross section.

  In addition, the excimer lamp described in Patent Document 2 is configured by, for example, a discharge vessel 95 configured by a single cylindrical tube and pinch-sealed at both ends as illustrated in a sectional view in the tube axis direction illustrated in FIG. . Inside the discharge vessel 95, a coiled inner electrode 96 is arranged along the tube axis, and an outer electrode 97 opposite to this is formed in a semi-cylindrical shape by a metal plate or the like. It is attached and arranged on the outer peripheral surface 95a. In the figure, reference numerals 98a and 98b are metal foils connected to both ends of the inner electrode 96, and reference numerals 99a and 99b are external leads connected to the metal foils 98a and 98b, respectively.

The above-described excimer lamp is connected to an AC power source. When a high frequency voltage is applied between the inner electrode 96 and the outer electrode 97, a discharge is generated through the dielectric layer formed by the discharge vessel 95. Become.
Japanese Patent No. 2528244 JP 2003-317670 A

  By the way, the above-mentioned excimer lamp is required to have a high output in order to increase the efficiency of the throughput of the apparatus, and the electric power supplied to the lamp tends to increase.

Therefore, in the excimer lamp, the electrode becomes hot as the input electric power increases, and members such as a coil constituting the electrode may thermally expand.
Such a phenomenon is not so serious in the outer electrode because it is easy to dissipate heat due to the structure disposed on the outermost peripheral portion of the discharge vessel and can be easily cooled as necessary. However, the inner electrode is located on the tube axis center side of the arc tube and is difficult to dissipate heat. Further, the inner electrode is difficult to cool and easily heated, and the internal electrode is exposed to extremely high temperatures.

  As a result, for example, a coil made of tungsten or the like constituting the inner electrode forms a density in the coil when it is expanded by heat, and as a result, the location where the discharge is formed is biased in the length direction of the lamp, resulting in stable illuminance. May not be obtained, or the desired illuminance distribution may not be obtained.

  For example, an excimer lamp configured to change the coil pitch of the inner electrode to a predetermined length in the length direction and vary the illuminance in the length direction of the discharge vessel results in a desired illuminance distribution as a result of the coil pitch being shifted. The problem of disappearing arises.

Moreover, in the processing factory where the cleaning process of the liquid crystal glass substrate is performed, it was common to hold and transport the glass substrate in the horizontal direction, but as described above, the glass substrate was enlarged, Occupancy in the factory is a problem. In view of this, recently, it has been proposed and carried out that the glass substrate is conveyed while being tilted rather than horizontal, and further held vertically.
In response to such changes on the factory line side, the excimer lamp used for cleaning the glass substrate is also tilted or suspended so that the tube axis of the discharge vessel is parallel to the substrate. It is required to stand up and hold it in a direction other than the horizontal direction and irradiate light. However, in the case where the inner electrode is composed of a coil as described above, the deformation due to the weight of the coil is promoted by heat, and the coil pitch is deformed densely at the upper part and roughly at the lower part. As a result, there arises a new problem that the discharge is non-uniform and the desired illuminance distribution cannot be obtained.

Such a problem occurs when the inner electrode has a coil shape. Therefore, it is considered that the inner electrode can be avoided relatively easily by changing the inner electrode to a shape other than the coil, for example, a plate shape or a tubular shape.
However, in the excimer lamp device, as the glass substrate for liquid crystal to be cleaned becomes larger, the length of the excimer lamp is also increased, and the inner electrode is also longer. For this reason, when a plate-like or tubular electrode is used, the weight of the inner electrode becomes a problem, and it becomes very difficult to support it stably in the discharge vessel.
In addition, when a wire is used instead of a coil or a plate, if the inner electrode is not properly arranged at the time of processing, deflection occurs, and the discharge is biased, making it very difficult to obtain the desired illuminance distribution.
Under such circumstances, it is very advantageous to use a coil in which deflection is easily absorbed as compared with electrodes having other shapes.

  The present invention has been made in view of the above circumstances, and in an excimer lamp in which an inner electrode is configured by a coil, an intended illuminance distribution in the length direction of the excimer lamp can be stably obtained over a long period of time. An object of the present invention is to provide an excimer lamp that can be used.

The excimer lamp according to the present invention includes a tubular discharge vessel, at least part of which is made of a light-transmitting dielectric, in which a discharge gas is sealed, and extends in the longitudinal direction on the outer peripheral surface of the discharge vessel. An outer electrode arranged and a coil formed by winding a metal wire, the inner electrode arranged to extend substantially the same as the axis of the discharge vessel and facing the outer electrode, An excimer lamp having a discharge formed between at least one dielectric between the outer electrode and the inner electrode, wherein the inner electrode is positioned relative to the axial movement of the coil. It has the means, It is characterized by the above-mentioned.
In addition, a rod-like auxiliary body extending in the same direction as the coil is provided, and the auxiliary body is inserted into the coil, and the coil is fixed to the auxiliary body, whereby the coil position is regulated. It is characterized by being.
In addition, an auxiliary body comprising a rod-shaped main body extending in the same direction as the coil and an engaging portion protruding in a branch shape from the main body, the auxiliary body is inserted into the coil, The coil is locked to the engaging portion of the auxiliary body, and the coil position is regulated.
In addition, a rod-shaped or pipe-shaped auxiliary body extending coaxially with the inner electrode is provided, and the coil constituting the inner electrode is wound tightly around the auxiliary body to regulate the coil position. It is characterized by.
The discharge vessel has a cylindrical inner tube disposed on the center side of the tube axis and an outer tube having a larger diameter coaxially with the inner tube and closed at both ends thereof. The excimer lamp is formed on the outer peripheral surface of the outer tube and the inner electrode is disposed on the inner peripheral surface of the inner tube. And a coil position is regulated by the projecting portion.
The outer electrode is an excimer lamp disposed on the outer peripheral surface of the discharge vessel, and the inner electrode is suspended in the discharge vessel, and substantially the entire inner electrode is inserted into a tubular dielectric. In addition, a protruding portion that protrudes radially inward is formed on the inner peripheral surface of the dielectric, and the coil position is regulated by the protruding portion.

  In the present invention, since the position of the coil constituting the inner electrode is regulated by the regulating means, the coil density can be prevented from being biased even when the inner electrode is heated to a high temperature, and the length direction of the lamp Thus, it is possible to provide an excimer lamp that can uniformly generate a discharge and stably obtain an intended illuminance distribution.

  Further, by fixing the rod-shaped auxiliary body to the coil, the expansion and contraction of the coil can be suppressed, and the coil pitch equivalent to the initial stage of the lamp lighting can be maintained. Even in this case, it is possible to provide an excimer lamp capable of obtaining an intended illuminance distribution.

  In addition, by inserting an auxiliary body composed of a rod-shaped main body portion and a branch-like engagement portion into the coil, and adjusting the coil position by the engagement portion, the coil density can be suppressed from being biased, It is possible to provide an excimer lamp that can stably obtain the illuminance distribution.

  In addition, when the coil is tightly wound around the rod-shaped auxiliary body, the coil position can be regulated with a relatively simple configuration, the bias of the coil density can be suppressed, and the desired illuminance distribution can be obtained stably. Become.

  In addition, if a protrusion is formed on the inner peripheral surface of a tubular dielectric covering the inner tube or inner electrode constituting the discharge vessel and the coil is locked, the number of parts can be increased because no auxiliary body is used. Therefore, it is possible to suppress the bias of the coil density, and the desired illuminance distribution can be obtained stably.

Hereinafter, the best mode for carrying out the present invention will be described.
First, FIG. 1 is a cross-sectional view of a lamp for explaining a first embodiment of the present invention, (a) a cross-sectional view in the tube axis direction, and (b) a cross-sectional view along AA.
The discharge vessel 10 is made of a dielectric material, specifically, synthetic quartz glass that is transmissive to ultraviolet rays. The inner tube 11 is disposed on the tube axis center side, and the outer tube 12 is disposed coaxially with the outer tube 12. Thus, the double pipe is roughly configured, and at both ends 10a and 10b of the double pipe, a part of the inner pipe or the outer pipe is heated and closed, thereby forming a sealed space. Inside the discharge vessel 10, an excimer molecule generating gas, for example, xenon gas, is sealed at about 20 kPa (25 ° C.) to form a cylindrical discharge space S. The discharge vessel 10 has a total length of 1500 mm, an inner tube 11 has an inner diameter of 14 mm, an outer diameter of 16 mm, an outer tube 12 has an inner diameter of 24 mm, and an outer diameter of 26 mm.

Inside the inner tube 11, a coil made of metal is arranged so as to be inscribed in the inner tube 11, thereby forming an inner electrode 13. The coil has a wire diameter of 0.5 mm and is formed by coiling at a turn of 5 mm so that the outer diameter matches the inner diameter of the inner tube 11. The material is made of, for example, stainless steel or molybdenum. .
Further, a net-like outer electrode 14 is disposed outside the outer tube 12.

In the coil constituting the inner electrode 13, a rod-like auxiliary body 15 made of tungsten having a diameter of, for example, φ1 mm is inserted in the inside thereof over substantially the entire length of the inner electrode 13. The auxiliary body 15 is fixed to the inner electrode 13 at the fixing portion F by fixing means such as spot welding or caulking. Thereby, even if the coil is in a high temperature state, the coil 15 is fixed to the auxiliary body 15, so that the expansion and contraction of the coil is restricted by the auxiliary body 15, and it is avoided that the discharge forming portion is significantly biased in the lamp length direction. The coil pitch is maintained in the initial state. Therefore, the desired illuminance distribution can be obtained stably even if the lamp is lit for a long time. Here, the fixing portion F is preferably formed every one to several turns, and particularly preferably formed every turn of the coil as shown in FIG.
Further, with respect to the position of the auxiliary body 15, the inner tube 11 and the inner electrode 13 are in close contact with each other over the entire circumference when the auxiliary body 15 is inserted inside the coil as in this embodiment, rather than being arranged outside the coil. For this reason, the discharge occurs evenly over the entire circumference of the discharge vessel.

  As described above, according to the excimer lamp according to the present embodiment, since the coil constituting the inner electrode 13 is fixed to the auxiliary body 15 and cannot be expanded and contracted, even when the inner electrode 13 is heated to a high temperature. The coil pitch can be prevented from changing, the discharge can be uniformly generated in the length direction of the lamp, and the desired illuminance distribution can be stably obtained over a long period of time.

In this embodiment, the discharge vessel 10 has been described as a so-called double-tube excimer lamp, but such an auxiliary body 15 can also be applied to the excimer lamp of the form described in the previous figure and FIG.
Further, even when the excimer lamp is used with the lamp tube axis tilted or stood in a direction other than horizontal, the coil of the inner electrode 13 is preferably suppressed from shifting downward due to its own weight. It becomes like this.

2A and 2B are diagrams for explaining a second embodiment of the present invention, in which FIG. 2A is a sectional view in the axial direction of the pipe, and FIG.
This excimer lamp is the same as the excimer lamp described in FIG. 10 and FIG. 10, but is provided with means for regulating the movement and regulating the position of the coil constituting the inner electrode. In the figure, reference numeral 20 denotes a discharge vessel, which comprises a so-called single tube similar to the previous figure and FIG. The material is composed of synthetic quartz glass, and metal foils 21a and 21b are embedded and pinch sealed at both ends to form sealing portions 20a and 20b. The inner electrode 22 and the outer electrode 23 are made of the same material as in the first embodiment described above. Further, in the figure, reference numeral 24 denotes a tubular dielectric disposed on the outer periphery of the discharge vessel 20 over the entire length of the inner electrode 22 in order to maintain discharge stability, and here is composed of a glass tube. Such a dielectric 24 is not an essential component in this excimer lamp, but it is desirable to arrange it. The tubular dielectric 24 has an inner diameter slightly larger than the outer diameter of the coil, is slidable, and does not regulate the movement of the coil. Reference numerals 26a and 26b denote external leads, which are electrically connected to the inner electrode 22 via the metal foils 21a and 21b, respectively.

In the excimer lamp according to this embodiment, the auxiliary body 25 includes, for example, a rod-shaped main body portion 25a made of tungsten having a diameter of 1.0 mm and a plurality of branches that extend in a branch shape radially outward of the main body portion. , And is supported by, for example, a support portion (not shown) formed on the dielectric 24. The engaging portions 25b, 25b,... Are provided in a row at predetermined intervals in the length direction of the main body portion 25a. The auxiliary body 25 is inserted into the coil of the inner electrode 22, and the movement of the coil in the axial direction is regulated by the engagement portions 25b, 25b..
Accordingly, the coil is prevented from moving or deforming beyond the engaging portions 25b, 25b,..., And the coil density is not biased over substantially the entire length of the inner electrode 22. It is particularly preferable that the engaging portions 25b, 25b,... Are arranged in the inner electrode 22 so as to be positioned for each turn of the coil, but the present invention is not limited to this.

  Since the engaging portions 25b, 25b,... Are arranged over the entire length of the inner electrode 22, the engaging portion 25b can be obtained even when the inner electrode 22 is heated to a high temperature and the coil is thermally expanded. , 25b,..., 25b..., The coil density is not greatly varied over the entire length of the lamp, and the desired illuminance distribution can be stably maintained.

In this embodiment, the discharge vessel is described as an excimer lamp having a single tube structure, but such an auxiliary body can also be applied to the so-called double tube type excimer lamp described in FIG.
Further, even when the excimer lamp is used with the tube axis held in a direction other than vertical, it is possible to suitably suppress the movement of the inner electrode.

FIG. 3 is a sectional view in the tube axis direction for explaining a third embodiment of the present invention.
The excimer lamp according to this embodiment has the same basic lamp structure as that described with reference to FIG. 2 and FIG.
In the figure, the coil constituting the inner electrode 22 is configured by being tightly wound around a rod-shaped or pipe-shaped auxiliary body 30.

The auxiliary body 30 is preferably made of a soft metal and rich in spreadability as compared with the metal constituting the coil wire. In such a case, the auxiliary body 30 and the inner electrode 22 are arranged so that a recess 31 is formed on the surface of the auxiliary body 30 as shown in the enlarged view of the inner electrode in FIG. Is tightly wound and molded integrally.
When the material of the auxiliary body 30 is made of a relatively hard material, the recess 31 may be formed in advance so as to conform to the coil pitch of the inner electrode 22 and wound around this to be molded.
In any case, the auxiliary body 30 is an embodiment in which the outer diameter is larger than the coil inner diameter of the inner electrode 22 in the portion excluding the recess 31, and the recess 31 is formed in the auxiliary body 30 in a particularly preferable embodiment. is there. In such a case, since the coil engages with the recess and the free expansion and contraction and movement of the coil are reliably restricted, the coil density is effectively suppressed from being displaced in the length direction of the lamp. .

  In this embodiment, as a combination of the coil wire and the auxiliary body 30, when the coil is made of tungsten, the auxiliary body 30 is preferably selected from a metal / alloy such as aluminum, copper, platinum, nickel, brass, Also, when the coil is made of molybdenum, it is preferable that the coil is selected from metals, alloys such as aluminum, copper, platinum, nickel, and brass.

  Also in the excimer lamp according to the third embodiment, since the coil constituting the inner electrode 22 is restricted from moving, the coil density is locally increased even when the inner electrode 22 is heated to a high temperature. Can be generated uniformly in the length direction of the lamp, and the illuminance distribution of the lamp does not fluctuate from the initial lighting stage. Can be maintained. Moreover, since the position of the coil can be regulated only by winding the coil around the auxiliary body, it can be easily produced with good workability.

FIGS. 4A and 4B are (a) a cross-sectional view in the tube axis direction and (b) a cross-sectional view taken along line AA, for explaining a fourth embodiment of the present invention.
The excimer lamp according to this embodiment has the same basic lamp structure as the previous figure and FIG. 1, and the components described above are denoted by the same reference numerals and description thereof is omitted.
In this embodiment, projecting portions 40, 40,... Projecting in the center direction of the tube 11 are formed on the inner peripheral surface of the inner tube 11 at a predetermined interval, and the projecting portions 40, 40,. Is interposed between the coils constituting the inner electrode 22 to restrict the axial movement of the coil.

  For example, in a stage before manufacturing the discharge vessel 10, the protruding portion 40 is pressed in the center direction from the outer peripheral surface side or a negative pressure is applied to the inside of the inner tube 11 while heating a predetermined portion of the inner tube 11. It can be easily formed by indenting. Of course, other means are possible.

  According to the fourth embodiment, since the movement of the coil is restricted by the protrusion 40 of the inner tube 11 from the coil 40, even when the coil expands and contracts, the coil moves or deforms beyond the protrusion 40. Therefore, the intended illuminance distribution can be maintained for a long time without causing a bias in the coil density. In addition, according to the present embodiment, since the inner surface of the inner tube 11 of the discharge vessel 10 is processed, there is no increase in the number of components and the lamp configuration is not complicated.

In this embodiment, the discharge vessel has been described as a so-called double tube structure excimer lamp. However, the structure related to such a protrusion is the same as that of the excimer lamp in the form described in the previous figure, FIG. 2, and FIG. Is also applicable. In such a case, a protrusion may be formed in advance on the inner peripheral surface of the tubular dielectric, and the inner electrode may be inserted.
Further, even when the excimer lamp is used while being tilted in a direction other than horizontal, it goes without saying that the inner electrode can be suitably prevented from shifting vertically downward.

As described above, according to the excimer lamp according to the present invention, the coil-shaped inner electrode is provided with the position adjusting means for adjusting the position with respect to the axial movement of the coil. Even when heated to a high temperature, the coil density can be prevented from being biased, discharge can be generated uniformly in the length direction of the lamp, and the desired illuminance distribution can be stably obtained.
Needless to say, the present invention is not limited to the above-described embodiment, and can be modified as appropriate. For example, in the invention according to the above-described first to third embodiments regarding the position regulating means, the material of the auxiliary body has been described as a metal. It may be a thing. For example, heat-resistant and non-conductive materials such as ceramics, alumina, and glass can be used.

Hereinafter, specific examples of the present invention will be described, but the present invention is not limited thereto.
<Example 1>
Excimer lamp A1 having the configuration shown in FIG. 1 was manufactured according to the following conditions.
Discharge vessel (10): total length of about 1500 mm, inner tube (11): material: synthetic quartz glass, inner diameter: about 14 mm, outer diameter: about 16 mm (thickness 1 mm), outer tube (12): material: synthetic quartz glass, Outer diameter: 26 mm, inner diameter: 24 mm (wall thickness: 1 mm), inner electrode (13): material stainless steel, strand diameter: 0.5 mm, coil diameter: 14 mm, pitch in the axial direction: 5 mm, total length 1300 mm (260 turns), Outer electrode (14): material: stainless steel, discharge gas: xenon gas (enclosed pressure 20 kPa), auxiliary body (15): material: tungsten, diameter 1 mm, total length of about 1400 mm.
The coil and the auxiliary body constituting the inner electrode were fixed by spot welding every turn.

<Comparative example 1>
A comparative excimer lamp B1 was produced under the same conditions as the excimer lamp A1, except that the position regulating means was not provided.

The excimer lamps A1 and B1 according to Example 1 and Comparative Example 1 are supported so that the tube axis of the lamp is horizontal, and the lamp is turned on for 1000 hours by an AC wave with an applied voltage of 5 kV and a frequency of about 50 kHz by a power source. The illuminance was measured at intervals of 100 mm in the axial direction, and the change in illuminance distribution in the axial direction of the lamp was examined.
FIG. 5 is a diagram showing the results, in which the horizontal axis indicates the distance in the axial direction of the discharge vessel, and the vertical axis indicates the ultraviolet illuminance (relative value). The solid line indicates the illuminance distribution of the excimer lamp A1 (Example 1), the broken line indicates the illuminance distribution of the excimer lamp B1 (Comparative Example 1), and the shape of the marker indicates the lighting time. When the marker is a square, the initial illumination (lighting time 0 hour), the circle indicates the ultraviolet illuminance after 500 hours have elapsed from lighting, and the triangle represents the ultraviolet illuminance after 1000 hours have elapsed since lighting.
As can be seen from the figure, the illuminance distribution of the excimer lamps A1 and B1 was almost equally uniform at the beginning of lighting. However, after 500 hours have elapsed after lighting, the excimer lamp B1 is located at the center of the lamp. The illuminance decreased. This is presumably because, as a result of the coil constituting the inner electrode being shifted to the end side, the discharge formed at the center of the lamp became thin, and the amount of radiated ultraviolet rays decreased at the site. And when lighting time passed 1000 hours, the shift | offset | difference of this coil became more remarkable, and it came to the state which cannot obtain desired illuminance distribution.
On the other hand, in the excimer lamp A1, since the axial displacement of the coil does not occur even after 500 hours and 1000 hours have elapsed, the illuminance distribution at the beginning of lighting is maintained.

<Example 2>
Excimer lamp A2 having the configuration shown in FIG. 2 was manufactured according to the following conditions.
Discharge vessel (20): total length of about 1500 mm, material: synthetic quartz glass, inner diameter: about 24 mm, outer diameter: about 26 mm (thickness 1 mm), inner electrode (22): material tungsten, strand diameter: 0.5 mm, coil Diameter: 14 mm, pitch in the axial direction: 5 mm, total length 1300 mm (260 turns), outer electrode (23): material: stainless steel, discharge gas: xenon gas (enclosed pressure 20 kPa), auxiliary body (25): main part (25a ) Material: Tungsten, diameter: 1 mm, total length 1400 mm, engaging part (25b) material: Tungsten, diameter: 0.5 mm, length: 3 mm, pitch in the axial direction: 5 mm (constant).

<Comparative example 2>
A comparative excimer lamp B2 was produced under the same conditions as the excimer lamp A2, except that the position regulating means was not provided.

These excimer lamps A2 and B2 were supported by tilting the lamp tube axis by 20 degrees with respect to the horizontal direction, and were lit by an AC wave having an applied voltage of 5 kV and a frequency of about 50 kHz by a power source for 1000 hours.
FIG. 6 is a diagram showing the results, in which the horizontal axis represents the distance in the axial direction of the discharge vessel, and the vertical axis represents the ultraviolet illuminance (relative value). The solid line indicates the illuminance distribution of the excimer lamp A2 (Example 2), and the broken line indicates the illuminance distribution of the excimer lamp B2 (Comparative Example 2). After 500 hours have elapsed, the triangles indicate the ultraviolet illuminance after 1000 hours have elapsed since lighting.
As a result, in the excimer lamp A2, it was confirmed that a desired illuminance distribution could be obtained over a long period of time without causing a shift because the coil constituting the inner electrode is locked. On the other hand, in the excimer lamp B2, the inner electrode shifted downward (to the left in FIG. 6) due to its own weight and became dense, resulting in a significant difference in illuminance.

<Example 3>
Excimer lamp A3 having the configuration shown in FIG. 3 was manufactured under the same conditions as in Example 2 except that the auxiliary body was provided according to the following conditions.
When forming the coil constituting the inner electrode, the coil was firmly wound around the auxiliary body so as to be unable to move in the axial direction.
The auxiliary body (30) was in the form of a pipe and was made of a material: aluminum, an outer diameter of 13 mm, a wall thickness of 2 mm, and a total length of about 1400 mm.

The excimer lamp A3 was supported so that the tube axis of the lamp was horizontal, and was lit by an AC wave with an applied voltage of 5 kV and a frequency of about 50 kHz for 1000 hours by a power source.
FIG. 7 is a diagram showing a change in illuminance distribution when the excimer lamp A3 is turned on. In the figure, the horizontal axis and the vertical axis are the distance in the axial direction of the discharge vessel, and the vertical axis is the ultraviolet illuminance (relative value), as in the previous figure. As for the shape of the marker, as in the previous figure, the square shape indicates the initial illuminance (lighting time 0 hour), the circle indicates the ultraviolet illuminance after 500 hours have elapsed from lighting, and the triangle indicates the ultraviolet illuminance after 1000 hours have elapsed since lighting. Each is shown.
As a result, it became clear that the original illuminance distribution could be maintained even after 1000 hours of lighting time.

<Example 4>
Excimer lamp A4 having the configuration shown in FIG. 4 is manufactured under the same conditions as in Example 1 except that the protrusions (40) are provided on the inner peripheral surface of the inner tube (11) according to the following conditions without using an auxiliary body. did.
The protrusion (40) of the inner tube (11) has a diameter of about 1 mm and a height of 1 mm on the plan view, and is formed in a row with a pitch of 10 mm. The protrusion is arranged between the coils every two turns. did.

The excimer lamp A4 was supported by tilting the tube axis of the lamp by 20 degrees with respect to the horizontal direction, and was lit by an AC wave with an applied voltage of 5 kV and a frequency of about 50 kHz by a power source for 1000 hours.
FIG. 8 is a diagram showing a change in illuminance distribution when the excimer lamp A4 is turned on. In the figure, the horizontal axis and the vertical axis are the distance in the axial direction of the discharge vessel, and the vertical axis is the ultraviolet illuminance (relative value), as in the previous figure. As for the shape of the marker, as in the previous figure, the square shape indicates the initial illuminance (lighting time 0 hour), the circle indicates the ultraviolet illuminance after 500 hours have elapsed from lighting, and the triangle indicates the ultraviolet illuminance after 1000 hours have elapsed since lighting. Each is shown.
As can be seen from the figure, the illuminance distribution hardly changes even when compared with the illuminance distribution at the beginning of lighting.

  As apparent from the above embodiments, according to the present invention, the coil constituting the inner electrode is restricted in movement by the auxiliary body even when the inner electrode is heated to a high temperature. However, there is no significant change from the initial stage of lamp lighting, and the desired illuminance distribution can be obtained stably.

It is sectional drawing of the lamp | ramp explaining the 1st Example of this invention, (a) Pipe-axis direction sectional drawing, (b) AA sectional drawing. It is sectional drawing of the lamp | ramp explaining the 2nd Example of this invention, (a) Pipe-axis direction sectional drawing, (b) AA sectional drawing. FIG. 6 is a sectional view in the tube axis direction of a lamp for explaining a third embodiment of the present invention. FIG. 7 is a sectional view in the tube axis direction of a lamp for explaining a fourth embodiment of the present invention. It is a figure showing the change of illuminance distribution when each excimer lamp of Example 1 and Comparative Example 1 is turned on. It is a figure showing the change of illuminance distribution when each excimer lamp of Example 2 and Comparative Example 2 is turned on. It is a figure showing the change of illumination distribution when each excimer lamp of Example 3 is made to light. It is a figure showing the change of illumination distribution when each excimer lamp of Example 4 is made to light. (A) The side view which shows the structure of the conventional excimer lamp, (a) The side view which shows the partial cross section of the tube axis direction of a discharge vessel, (b) It is AA sectional drawing. (A) The side view which shows the example of another structure of the conventional excimer lamp in the partial cross section of the tube axis direction of a discharge vessel, (b) It is AA sectional drawing.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Discharge container 11 Inner tube 12 Outer tube 10a, 10b Both ends 13 Inner electrode 14 Outer electrode 15 Auxiliary body 20 Discharge vessel 20a, 20b Sealing part 21a, 21b Metal foil 22 Inner electrode 23 Outer electrode 24 Dielectric 25 Auxiliary body 25a Main part 25b Engaging part 26a, 26b External lead 30 Auxiliary body 31 Recess 40 Protruding part S Discharge space F Fixing part

Claims (6)

A tubular discharge vessel at least partly composed of a light-transmitting dielectric material, in which a discharge gas is enclosed, and an outer electrode disposed on the outer peripheral surface of the discharge vessel so as to extend in the longitudinal direction thereof; An inner electrode is formed of a coil formed by winding a metal wire, and is disposed so as to extend substantially the same as the axis of the discharge vessel, and is opposed to the outer electrode. An excimer lamp in which a discharge is formed with at least one dielectric interposed between electrodes,
The excimer lamp is characterized in that the inner electrode is provided with a position adjusting means for adjusting a position with respect to the axial movement of the coil.   A rod-like auxiliary body extending in the same direction as the coil is provided, the auxiliary body is inserted into the coil, and the coil position is regulated by fixing the coil to the auxiliary body. The excimer lamp according to claim 1.   An auxiliary body comprising a rod-shaped main body extending coaxially with the coil and an engaging portion protruding in a branch shape from the main body; the auxiliary body is inserted into the coil; The excimer lamp according to claim 1, wherein the excimer lamp is locked by an engaging portion of the auxiliary body to regulate a coil position. It comprises a rod-shaped or pipe-shaped auxiliary body extending coaxially with the inner electrode,
2. The excimer lamp according to claim 1, wherein the coil constituting the inner electrode in the previous period is tightly wound around the auxiliary body to regulate the coil position. The discharge vessel is formed by disposing a cylindrical inner tube on the center side of the tube axis and an outer tube having a larger diameter coaxially with the inner tube and closing at both ends thereof. And
The outer electrode is an excimer lamp formed on the outer peripheral surface of the outer tube, and the inner electrode is disposed on the inner peripheral surface of the inner tube;
The excimer lamp according to claim 1, wherein a projecting portion projecting radially inward is formed on an inner peripheral surface of the inner tube, and a coil position is regulated by the projecting portion. An excimer lamp in which the outer electrode is disposed on an outer peripheral surface of the discharge vessel, and the inner electrode is suspended from the discharge vessel;
Substantially the entire inner electrode is inserted into a tubular dielectric,
2. The excimer lamp according to claim 1, wherein a protrusion is formed on the inner peripheral surface of the dielectric so as to protrude radially inward, and the coil position is regulated by the protrusion.

Images