JP2000251845A - Silent discharge lamp, and using method therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce electric power consumption of a silent discharge lamp, having structure arranged with an inner tube inside an outer tube, and to prolong its service life. SOLUTION: This lamp is provided with a discharge container, wherein an outer tube 1 and an inner tube 2 are equiped, the inner tube 2 is arranged inside the outer tube 1, and wherein discharge gas is filled in a space formed surroundedly by an outer tube inner face and an inner tube outer face, outer electrodes 3 provided in an outer face of the outer tube 1, and an inner electrode 4 provided in an inner face of the inner tube 2. Either of the outer electrodes 3 or the inner electrode 4 is disposed over the whole tube circumference and the other is arranged in a portion of the tube circumference to thereby conduct discharge in a portion of the tube circumference. The electrode is moved in the last period of service life to use an undischarged face anew.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a silent discharge lamp used as an ultraviolet light source for dry cleaning or modification using, for example, ultraviolet light.

[0002]

2. Description of the Related Art Silent discharge lamps have a structure in which electrodes are provided on the outer surface of a discharge vessel made of a dielectric material such as quartz filled with a discharge gas such as argon or xenon, and a voltage is applied between the electrodes. It is an excellent light source that emits ultraviolet light of a specific wavelength that is excellent in monochromaticity when applied. In particular, using a discharge vessel in which the inner tube is arranged inside the outer tube and a space for filling a discharge gas with the inner surface of the outer tube and the outer surface of the inner tube is formed,
Silent discharge lamps with a structure in which an outer electrode is provided on the outer surface of the outer tube and an inner electrode is provided on the inner surface of the inner tube have the advantages that the structure is simple and easy to manufacture. These can be manufactured inexpensively using a general-purpose quartz tube or the like, and are excellent in this respect.

FIGS. 4 and 5 are schematic views showing a general structure of a silent discharge lamp using a cylindrical tube. In each of the silent discharge lamps shown in FIGS. 4 and 5, a cylindrical inner tube 2 is coaxially arranged inside a cylindrical outer tube 1, and both ends thereof are closed by covers 5 and filled with a discharge gas. In this structure, an outer electrode 3 is provided on the outer surface of the outer tube 1 over the entire circumference, and an inner electrode 4 is provided on the inner surface of the inner tube 2 over the entire circumference. In the silent discharge lamp shown in FIG. 4, the outer electrode 3 is a metal mesh, and the inner electrode 4 is a cylindrical metal tube, which is in close contact with the outer surface of the outer tube 1 and the inner surface of the inner tube 2, respectively. Is provided. Further, in the silent discharge lamp shown in FIG. 5, the outer electrode 3 is a metal mesh, and the inner electrode 4 is a coil-shaped metal wire so as to be in close contact with the outer surface of the outer tube 1 and the inner surface of the inner tube 2, respectively. Is provided.

As described above, a discharge vessel is used in which the inner tube is disposed inside the outer tube, and a space for filling the discharge gas is formed between the inner surface of the outer tube and the outer surface of the inner tube, and the outer electrode is provided on the outer surface of the outer tube. In a silent discharge lamp having a structure in which an inner electrode is provided on the inner surface of the inner tube, both the outer electrode and the inner electrode are provided over the entire circumference of the tube.

[0005]

When a silent discharge lamp is used, the same applies when other light sources are used, but it is preferable that the power consumption be as small as possible. A first object of the present invention is the same as that described above, and aims to reduce power consumption of a silent discharge lamp having a structure in which an inner tube is disposed inside an outer tube as described above.

[0006] As with other light sources, the intensity of radiated light of a silent discharge lamp decreases as the use of the lamp continues.
When the value drops below a certain value, the silent lamp is replaced with a new one. However, a silent discharge lamp is very expensive compared to other light sources, and it is very important to extend the life as long as possible, for example, in order to reduce the running cost of an apparatus using this discharge lamp. Therefore,
A second object of the present invention is to extend the life of a silent discharge lamp.

[0007]

SUMMARY OF THE INVENTION The present invention has been made by paying attention to the use of a silent discharge lamp, in which a discharge region is formed on a part of a tube side (a part of a tube periphery). ). That is, in the conventional silent discharge lamps, the discharge area extends over the entire circumference of the tube side, and uniform discharge is required over the entire circumference.However, it is not always necessary to perform uniform discharge over the entire circumference. It has been realized that it is sufficient to have a uniform discharge only on a particular side. This is because, in many use conditions, the irradiation surface is located in a direction of a part of the tube side surface. It was to exist and wasted power wasted.

Further, the present invention is a silent discharge lamp which discharges a specific side (a part of the tube circumference) of a tube side from the above viewpoints, and is arranged inside an outer tube and the outer tube. A discharge vessel filled with a discharge gas in a space formed between the inner surface of the outer tube and the outer surface of the inner tube, and an outer electrode provided on the outer surface of the outer tube. A silent discharge lamp comprising an inner electrode provided on the inner surface of the inner tube, wherein at least one of the outer electrode and the inner electrode is provided on a part of the tube circumference, and discharge is performed on a part of the tube circumference. It is characterized by being performed.

Further, the present invention includes an outer tube and an inner tube, wherein the inner tube is disposed inside the outer tube, and is formed in a space surrounded by the inner surface of the outer tube and the outer surface of the inner tube. A discharge vessel filled with a discharge gas, an outer electrode provided on the outer surface of the outer tube, and an inner electrode provided on the inner surface of the inner tube. One of the electrodes is provided on the entire circumference of the tube, and the other is provided on a part of the circumference of the tube, so that discharge is performed on a part of the circumference of the tube. Providing one on the entire circumference of the tube in this manner has an advantage that stable discharge can be easily maintained.

Conventionally, both electrodes are provided over the entire circumference of the tube, but even if they are provided on a part of the circumference of the tube, light emission having a sufficient intensity and a uniform intensity distribution can be obtained. Was found to be possible, and based on this, the radiation direction of light was limited to a part of the circumference of the tube, so that substantial power consumption could be reduced.

Further, one of the causes of a decrease in light intensity due to use is a decrease in light transmittance of the outer tube or the inner tube due to light emitted from the discharge lamp itself. By performing the discharge, the radiated light is also radiated from a part of the circumference of the tube, so that a decrease in the light transmittance can be prevented in the circumference of the tube where no radiated light is emitted. For this reason, when the intensity of light emitted from the discharge lamp is reduced, it is possible to use a portion where the light transmittance is not reduced by shifting the position of the electrode or the like, thereby making it possible to substantially use the silent discharge lamp. The service life can be extended.

[0012] The method of using the silent discharge lamp of the present invention is such a use method that the life can be substantially prolonged, and when the light transmittance of the outer tube falls below a predetermined value, the discharge area is reduced. Is changed so that discharge is performed in the peripheral portion of the tube where discharge has not been performed.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In manufacturing the silent discharge lamp of the present invention, a dielectric material such as glass is used as a material of an outer tube and an inner tube. When the discharge is caused to occur in a part of the tube periphery as in the present invention, it is preferable to take out the radiation light by the dielectric barrier discharge from the outer surface of the outer tube to the outside of the discharge vessel (light emission). The outer tube is preferably made of a material that sufficiently transmits the radiated light. For example, when a xenon gas is used as a discharge gas and ultraviolet light of 172 nm is emitted, synthetic quartz is preferable, and particularly, OH group is 100%.
What consists of synthetic quartz containing at least 200 ppm, preferably at least 200 ppm is preferable.

As the shapes of the outer tube and the inner tube, various shapes such as a circular shape and a polygonal shape in cross section perpendicular to the tube axis direction can be adopted. In order to make the distance uniform and to obtain synchrotron radiation with uniform intensity distribution, it is preferable that the cross-sectional shapes perpendicular to the axial direction of the outer tube and the inner tube are similar to each other, and they are arranged so that they are coaxial. Preferably. In addition, in consideration of the case where the discharge region is changed, the cross-sectional shape is preferably a shape having symmetry, such as a regular polygon, a circle, or an ellipse.

The shape of the outer electrode and the inner electrode is preferably in close contact with the surface of the tube in accordance with the shape of the discharge vessel. There is a need. For example, the electrode is made of a conductive net such as an etching metal or a metal net. In the case of the present invention, in particular, the outer electrode is made light-transmissive (the light emitted by the discharge is easily transmitted), and the inner electrode is made light-impermeable (the part of the discharge vessel that does not emit light from the inner tube inner surface). (To prevent incidence of emitted light). In this case, for example, a conductive mesh electrode can be formed in close contact with the outer surface of the outer tube. It can be formed by a method such as inserting a bent shape.

The outer electrode and the inner electrode may both be provided at a part of the tube circumference, or one of them may be provided at a part of the tube circumference. If the ratio is too large, the entire circumference of the tube will be discharged as a result. Further, considering that the discharge area is changed and used, it is preferable that the diameter be about half or less of the circumference of the tube. In particular, considering that the discharge region is used differently, at least one of the electrodes provided on a part of the tube circumference has a length at the circumference of the tube approximately equal to a positive number of the length of the circumference of the tube. It is preferable to provide them so that This is because the area for the positive number of times can be changed and used evenly.

On the other hand, if the ratio is too small, the discharge area becomes too small with respect to the size of the discharge lamp, and the efficiency becomes worse, and the uniformity of the radiated light intensity becomes difficult to obtain. It is preferable to set it to 1/4 or more.

Further, it is preferable that the electrode provided on a part of the tube circumference is replaceably provided. this is,
This is because when the discharge region is changed and used, the positions of the electrodes need to be changed accordingly. In addition, the electrode provided in a part of the tube periphery is, for example, divided into two electrodes along the tube periphery and arranged with a gap so as not to contact each other, and only one of them is electrically connected to a power supply or a ground. You may do it. In this case, the other electrode does not function as an electrode, so it is considered that the other electrode is not substantially provided, and it is possible to save the trouble of removing and replacing the electrode when changing the discharge region.

The discharge gas filled in the space formed by the inner surface of the outer tube and the outer surface of the inner tube is, for example, a rare gas such as xenon, argon or neon, or a halogen gas such as fluorine or chlorine. Can be used alone or as a mixture.

The space inside the discharge vessel filled with these discharge gases does not need to be partitioned in the circumferential direction of the tube.
It is also effective to provide a partition wall in the discharge vessel that partitions the space inside the discharge vessel in the circumferential direction of the tube. This is because, for example, by separating the gas in the discharge region and the gas outside the discharge region, it is possible to prevent a decrease in the luminous efficiency due to a mixture of the gas in the excited state and the gas in the non-excited state.

Further, it is also effective that the partition wall has a light-shielding function together with the above-mentioned role or has a light-shielding effect separately from the above-mentioned role. This is to prevent the radiation light from traveling in the space inside the discharge vessel and entering the peripheral surface of the tube where discharge is not being performed. By doing so, it is possible to prevent a decrease in light transmittance on the peripheral surface of the tube where discharge is not performed, and it is possible to more effectively prolong the life when the discharge region is used in different discharge regions. is there.

When the partition wall is provided, the material thereof preferably has a coefficient of thermal expansion close to that of the outer tube or the inner tube.
For example, both the outer tube, the inner tube, and the partition wall may be made of quartz, which is a material that does not transmit light of a wavelength radiated from the discharge lamp. When the silent discharge lamp emits 172 nm ultraviolet light, Tube material is synthetic quartz, particularly, the content of OH group is 100 ppm or more, preferably 200 pp.
m or more. When the partition wall is a light-shielding wall, quartz or the like that is opaque to emitted ultraviolet light is preferably used.
In the case of radiating the ultraviolet rays, it is preferable to use quartz such as fused quartz, particularly a quartz plate having an OH group content of less than 100 ppm.

FIG. 3 shows a specific example in which one of the outer electrode and the inner electrode is provided over the entire circumference of the tube and the other is provided on a part of the circumference of the tube. It is sectional drawing by a simple cross section. In the same figure, (A) is a diagram in which an inner electrode is provided on the entire circumference of the tube, and an outer electrode is provided on a part of the circumference of the tube. It is a figure in the case of being provided in a part of.

In the silent discharge lamp shown in FIG. 3A, a cylindrical inner tube 2 is coaxially arranged inside a cylindrical outer tube 1, and an outer electrode 3 of a metal mesh is provided on the outer surface of the outer tube 1. It has a structure in which the inner electrode 4 of the metal deposition film is provided on the inner surface of the inner tube 2 over the entire circumference.
It is used such that the irradiation surface is positioned in the direction of the arrow in the figure.

In the silent discharge lamp shown in FIG. 3B, a cylindrical inner tube 2 is coaxially arranged inside a cylindrical outer tube 1, and an outer electrode 3 of a metal mesh is provided on the outer surface of the outer tube 1. A structure in which a semi-cylindrical metal plate inner electrode 4 provided on the entire inner circumference of the inner tube 2 is tightly fixed by a coiled reinforcing material inserted into the inner tube 2, and the inner electrode is provided over a half circumference thereof. And used so that the irradiation surface is positioned in the direction of the arrow in the figure.

As described above, the electrode provided on the entire circumference of the tube may be either the outer electrode or the inner electrode, but the electrode provided on a part of the circumference of the tube is preferably rotatably fixed to the surface of the tube in a rotatable manner. When the tube is cylindrical, it is particularly preferable to provide it on a half circumference. This is because another tube surface can be used by moving an electrode provided in part, and
This is because by rotating by 0 °, the opposite side can be easily used for discharge, and the life can be substantially extended.

Preferably, the outer electrode is provided on the entire circumference of the tube, and the inner electrode is provided on a part of the circumference of the tube. In this case, the shape of the inner electrode is set on the axis of the inner tube. More preferably, the inner electrode has a shape substantially matching the inner surface shape of the inner tube formed by cutting along the inner tube, and the inner electrode is tightly fixed to the inner tube by a spring-shaped conductive reinforcing member.

Further, as shown in FIG. 3 (B), a cylindrical outer tube and a cylindrical inner tube are coaxially arranged, and a semi-cylindrical inner electrode is inserted into the coil-shaped electrode inserted into the inner tube. More preferably, the inner electrode is rotatably fixed to the inner surface of the inner tube in a rotatable manner. This allows the inner electrode to be rotated 180 degrees when the lamp reaches the end of its life due to tube deterioration.
This is because, by rotating it, the opposite side can be used for discharge, and the life can be substantially extended.

As described above, in the silent discharge lamp of the present invention, the shapes of the outer tube and the inner tube are not particularly limited. For example, it is easy to use a tube made of a quartz glass or the like. It is preferable because it can be manufactured at low cost. In this case, the outer tube and the inner tube are arranged, for example, coaxially.

FIG. 6 is a view showing a specific example in which both the outer electrode and the inner electrode are provided on a part of the circumference of the tube and a light shielding wall is provided. FIG. (B) is a cross-sectional view taken along a cross section parallel to the axial direction, and is a cross-sectional view in the AA direction. In the silent discharge lamp shown in FIG. 6, a cylindrical inner tube 2 is coaxially arranged inside a cylindrical outer tube 1, and an outer electrode 3 of a metal mesh is provided on the outer surface of the outer tube 1 over a half circumference thereof. An inner electrode 4, which is a semi-cylindrical metal plate, is tightly fixed to the inner surface of the tube 2 by a coiled reinforcing member (not shown) inserted into the inner tube 2, and the inner electrode is provided over a half circumference thereof. A stopper 7 is provided, and has a structure in which two light-shielding walls 8 made of a fused quartz plate are inserted inside the discharge vessel so as to be supported by the stopper 7. Further, a rotation stopper 9 is provided so that the position of the inner electrode 4 does not shift due to rotation. In addition, both the light-shielding wall stopper 7 and the rotation stopper 9 are attached by fusing quartz beads to the tube wall.

In the silent discharge lamp of the present embodiment, since the light shielding wall 7 is provided, no radiated light enters the discharge space on the tube peripheral side where no electrode is provided. The deterioration of the pipe is greatly suppressed. In addition, as in this example, by providing a detent around the electrode provided on a part of the tube circumference, it is possible to prevent an accidental displacement of the electrode, and the silent discharge lamp emits light only from a specific surface. In this way, the accuracy of setting the irradiation intensity on the irradiation surface can be ensured, and the rotation stop also plays the role of positioning the electrodes, so that a new radiation surface can be easily and reliably set when the radiation area is changed. become able to.

FIG. 7 is a diagram showing an example of a silent discharge lamp whose cross section perpendicular to the axis is a regular triangle. In the silent discharge lamp shown in FIG. 7, an inner tube 2 also having a regular triangular cross section is coaxially arranged inside an outer tube 1 having a rectangular tubular shape having a triangular cross section. An outer electrode 3 of a metal net is provided on a surface corresponding to one side, and a plate-like inner electrode 4 is provided on a surface corresponding to one side of the inner surface of the inner tube 2 with a spring-like reinforcing material (not shown in the figure).
And three light-shielding walls 8 made of a quartz plate are inserted inside the discharge vessel.

FIG. 8 is a schematic diagram showing a state where five silent discharge lamps shown in FIG. 7 are arranged. As can be seen from this figure, since the cross-sectional shape perpendicular to the axial direction has a triangular shape, it is possible to form a plane radiating surface by arranging them adjacent to each other, and without using a reflector or the like. It is possible to configure a planar light source having an area. Also,
Since the distance from the radiation surface to the sample surface is constant, the irradiation intensity due to light absorption in the middle due to the distance to the sample surface depending on the position of the radiation surface as in the case of using a silent discharge lamp with a circular cross section This eliminates the need for providing an expensive synthetic quartz irradiation window and a lamp house that requires the supply of an inert gas such as N ₂ , thereby making it possible to manufacture a light source device.

As described above, in the silent discharge lamp of the present invention, the discharge vessel is constructed by coaxially arranging the outer tube and the inner tube having a triangular or quadrangular cross section perpendicular to the axis. If used, a large-area planar light source can be easily formed, and an expensive synthetic quartz irradiation window and N ₂
It is also possible to eliminate a lamp house that requires the supply of an inert gas such as the above.

Further, as in the present embodiment, the discharge vessel is constituted by arranging the outer tube and the inner tube in the form of a rectangular tube having a substantially equilateral triangle or a substantially square cross section perpendicular to the axis, coaxially. With the silent discharge lamp of the present invention having a structure,
It is practical because a plurality of discharge surfaces having the same area can be secured, and even if the discharge region is changed, the size of the installation region of the silent discharge lamp does not change. The meaning of the substantially triangular or substantially square shape is, for example, in the case of a silent discharge lamp as shown in FIG. 7 and FIG. In the case where is manufactured by processing quartz glass or the like, the rounded corners are usually rounded, which means that such rounded corners are included.

FIG. 9 is a view showing a specific example in the case where the cross section perpendicular to the axis has a rectangular shape, and both the outer electrode and the inner electrode are provided in a part of the tube circumference. The silent discharge lamp shown in FIG. 9 has a rectangular tubular inner tube 2 having a rectangular cross section perpendicular to the axis, and a similar rectangular tubular inner tube 2 coaxially disposed inside the outer tubular tube. 1 is a spring-like structure in which an outer electrode 3 of a metal mesh is provided on a surface corresponding to the long side of the outer surface, and an inner electrode 4 which is a metal plate is inserted into the inner tube 2 on a surface corresponding to the long side of the inner surface of the inner tube 2. It has a structure in which it is closely fixed by a reinforcing material (not shown).

In the silent discharge lamp of the present embodiment, the outer tube 1 having a rectangular cylindrical shape is used.
And the inner tube 2 are in contact with each other on a surface corresponding to the short side thereof, and this portion serves as a partition wall and a light-shielding wall. It is designed to be used by switching the connection with.

[0038]

FIG. 1 is a schematic sectional view showing the structure of a silent discharge lamp according to a first embodiment of the present invention, in which (A) is a sectional view in a direction perpendicular to the axial direction of the tube, and (B). Is a sectional view along the axis of the tube. The silent discharge lamp of this embodiment has a total length of 300 mm,
Inside a cylindrical outer tube 1 made of synthetic quartz glass having an inner diameter of 26 mm, a cylindrical inner tube 2 made of synthetic quartz glass having a total length of 300 mm and an outer diameter of 16 mm is coaxially arranged, and both ends thereof are closed by covers 5. The outer electrode 3 made of a stainless steel metal mesh is tightly fixed on the outer surface of the outer tube 1 over the entire circumference thereof, and the inner surface of the inner tube 2 has a semi-cylindrical shape having a total length of about 300 mm. The inner electrode 4 made of an aluminum plate is tightly fixed by a coiled stainless steel electrode 6 inserted into the inner tube 2, and the inner electrode is provided over a half circumference thereof. The conductive wire for supplying power to the inner electrode 4 is welded to the end of the coiled stainless steel electrode, and power is supplied to the inner electrode via the coiled stainless steel electrode 6. A conductive wire is directly connected to the outer electrode 3 at its end.

The tube is used so that the irradiation surface is positioned in the direction of the arrow in the figure. If the tube is fogged by use for a long time, the inner electrode 4 is rotated by 180 ° to irradiate the opposite side. It is used so that it faces the surface.
The silent discharge lamp of this embodiment emits 172 nm ultraviolet light.

FIG. 2 is a schematic sectional view showing the structure of a silent discharge lamp according to a second embodiment of the present invention, in which (A) is a sectional view in a direction perpendicular to the axial direction of the tube, and (B) is a sectional view. FIG. 3 is a cross-sectional view along the axis of the tube. The silent discharge lamp of this embodiment has a total length of 1000 m.
m, a cylindrical inner tube 2 made of synthetic quartz glass having a total length of 1000 mm and an outer diameter of 16 mm is coaxially arranged inside a cylindrical outer tube 1 made of synthetic quartz glass having an inner diameter of 26 mm. Is an inner electrode 4 made of three semi-cylindrical aluminum plates of 330 mm, which is tightly fixed by a coiled stainless steel electrode 6 inserted into the inner tube 2, and the other parts are the same as those of the first embodiment. It has the same structure as the one described above, and is used such that the irradiation surface is positioned in the direction of the arrow in the figure.

As described above, a long silent discharge lamp can be easily manufactured by connecting the internal electrodes to a structure in which a plurality of electrode plates are connected in the axial direction of the tube. It is preferable in this respect.

FIG. 10 is a structural view showing the structure of a silent discharge lamp according to a third embodiment of the present invention, wherein (A) is a front view,
(B) is a top view, (C) is an AA sectional view, and (D) is a partial sectional view. The silent discharge lamp of this embodiment has a total length of 650 m.
m, a cylindrical inner tube 2 made of synthetic quartz glass having a total length of 650 mm and an outer diameter of 16 mm is coaxially arranged inside a cylindrical outer tube 1 made of synthetic quartz glass having an inner diameter of 26 mm, and both ends thereof are closed. It has a structure in which xenon gas is filled inside. An outer electrode 3 made of a stainless metal mesh is fixed on the outer surface of the outer tube 1 on the outer surface of the outer tube 1 by clips 10 so that the outer electrode 3 is tightly fixed over the entire outer surface of the outer tube 1. An inner electrode 4 made of a semi-cylindrical aluminum plate having a total length of 550 mm is tightly fixed to the inner surface of the inner tube 2 by a coiled stainless steel electrode 6 inserted into the inner tube 2. The conductive wire 11 for supplying power is welded to the end of the coiled stainless steel electrode 6 so that power is supplied to the inner electrode 4 via the coiled stainless steel electrode 6. The outer electrode 3 is connected to ground via a clip 10. Further, a dot-like depression is formed on the inner tube 2 so as to project toward the inner surface side by applying a heated iron to the inner tube 2, and serves as a detent 9 for the inner electrode 4.

[0043]

According to the silent discharge lamp of the present invention, higher illuminance can be obtained on the irradiation surface in a predetermined direction with the same power as in the past, and the same illuminance can be obtained with less power.
In addition, it is economical because a surface that does not cause discharge can be used again, and furthermore, according to the electrode provided on a part of the tube circumference, which is rotatably tightly fixed to the tube surface, By moving the electrode at the end of its life or replacing it with a new one, the surface on which no discharge is generated can be used again, and the life can be substantially extended.

[Brief description of the drawings]

FIG. 1 is a schematic sectional structural view showing a structure of a silent discharge lamp according to a first embodiment of the present invention.

FIG. 2 is a schematic sectional structural view showing a structure of a silent discharge lamp according to a second embodiment of the present invention.

FIG. 3 is a sectional view showing a specific example of the silent discharge lamp of the present invention.

FIG. 4 is a schematic view showing a general structure of a silent discharge lamp using a cylindrical tube.

FIG. 5 is a schematic view showing a general structure of a silent discharge lamp using a cylindrical tube.

FIG. 6 is a cross-sectional view showing another specific example of the silent discharge lamp of the present invention.

FIG. 7 is a diagram showing an example of a silent discharge lamp having a regular triangular cross section.

8 is a schematic diagram showing a state in which five silent discharge lamps shown in FIG. 7 are arranged.

FIG. 9 is a diagram showing a specific example in which the cross-sectional shape perpendicular to the axis has a square shape.

FIG. 10 is a structural diagram showing a structure of a silent discharge lamp according to a third embodiment of the silent discharge lamp of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Outer tube 2 Inner tube 3 External electrode 4 Internal electrode 8 Light shielding wall 9 Detent

 ──────────────────────────────────────────────────の Continuing on the front page (72) Hiromi Sakamoto, Inventor Hiromi Sakamoto, No. 1, Nishino-sho, Ino Babacho, Kichijo-in, Kyoto, Kyoto, Japan Inside (72) Inventor Masahiro Yoshida, Kichijo-in, Minami-ku, Kyoto, Kyoto No. 1 Ino Babacho, Nohon Battery Japan

Claims (13)

[Claims] 1. An outer tube and an inner tube disposed inside the outer tube, wherein a space defined by an inner surface of the outer tube and an outer surface of the inner tube is filled with a discharge gas. A discharge vessel, an outer electrode provided on the outer surface of the outer tube, and an inner electrode provided on the inner surface of the inner tube, wherein at least one of the outer electrode and the inner electrode has a tube periphery. The silent discharge lamp is provided at a part of the tube and discharge is performed at a part of a tube circumference. 2. The method according to claim 1, wherein at least one of the electrodes provided on a part of the pipe circumference is provided such that a length on the circumference of the pipe is substantially an integral length of the circumference of the pipe. The silent discharge lamp according to claim 1, characterized in that: 3. An electrode provided on a part of the circumference of the pipe is replaceably provided.
Or the silent discharge lamp according to 2. 4. The silent discharge lamp according to claim 1, further comprising a partition wall in the discharge vessel, which partitions a space in the discharge vessel in a tube circumferential direction. 5. The silent discharge lamp according to claim 4, wherein said partition wall is a light shielding wall. 6. The partition wall is made of a quartz plate made of a material that does not transmit light of a radiated wavelength.
Silent discharge lamp as described. 7. A discharge gas is provided in a space which is provided with an outer tube and an inner tube, wherein the inner tube is disposed inside the outer tube, and which is surrounded by the inner surface of the outer tube and the outer surface of the inner tube. , A silent discharge lamp comprising: an outer electrode provided on the outer surface of the outer tube; and an inner electrode provided on the inner surface of the inner tube. A silent discharge lamp characterized in that one part is provided over the entire circumference of a tube and the other part is provided at a part of the circumference of a tube, so that discharge is performed at a part of the circumference of the tube. 8. The silent discharge lamp according to claim 7, wherein the outer electrode is provided on the entire circumference of the tube, and the inner electrode is provided on a part of the circumference of the tube. 9. An inner tube formed by cutting the inner tube along the axis and having an inner electrode shape substantially matching the inner surface of the inner tube, the inner electrode being tightly fixed to the inner tube by a spring-shaped conductive reinforcing member. The silent discharge lamp according to claim 8, wherein the discharge lamp is used. 10. A cylindrical outer tube and a cylindrical inner tube are coaxially arranged, and a semi-cylindrical inner electrode is tightly fixed by a coiled electrode inserted into the inner tube. The silent discharge lamp according to claim 9. 11. The silent discharge lamp according to claim 7, wherein an electrode provided on a part of the tube periphery is rotatably tightly fixed to the tube surface. 12. The discharge vessel is characterized in that a rectangular cylindrical outer tube and an inner tube having a substantially equilateral triangle or substantially square cross section perpendicular to the axis are arranged coaxially. Claim 1, 2, 3, 4, 6, 7, 8 or 9
A silent discharge lamp as described in 1. 13. When the light transmittance of the outer tube is lower than a predetermined value, the discharge area is changed so that discharge is performed in the peripheral portion of the tube where discharge has not been performed. Use of the silent discharge lamp according to claim 1, 2, 3, 4, 5, 6, 7, 8, 9, 10 or 11.