1269344 (1) 玖、發明說明 【發明所屬之技術領域】 本發明乃爲例如利用作爲光化學反應用的紫外線光源 的放電燈之一種，特別是有關於外側管和內側管被配置在 同軸上，並具有雙管構造的受激準分子燈。 【先前技術】 受激準分子燈乃具有強力放射單一波長之真空紫外光 的特長，針對放電用氣體採用例如氙氣的受激準分子燈， 據知爲放射波長1 72nm的真空紫外光。另外，氪和氯的 混合氣體場合，會放射波長2 2 2 n m的紫外光。改變放電 容器內的放電用氣體，就能放射出各種波長的光。例如搭 載氙受激準分子燈的光照射裝置，主要用於分解除去附著 在液晶面板顯示元件之面板基板表面的有機物、面板基板 的表面改質等。 第9圖是表示在管軸方向切斷習知受激準分子燈9〇 的斷面圖。 受激準分子燈9 0是構成外側管9 1和內側管9 2被配 置在同軸方向的雙管構造的放電容器9 3，外側管9 1的端 部和內側管92的端部是利用焊接形成側壁部94。在該放 電容器9 3內的空間9 5封入放電用氣體例如氙氣。在外側 管9 1的外側設置第一電極96，在內側管92的內側設置 第二電極97。在第一電極96和第二電極97之間施加高 頻電壓，藉此在放電空間9 8內（發光部）形成受激準分 1269344 (2) 子，該受激準分子會解離，並放射出氙 隨著近年液晶面板顯示元件之基板 全長爲例如超過8〇〇mm的長形受激準分 但是如第9圖所不的構造的受激準 的話，亮燈時，如第10圖所示，會產 9 1和內側管9 2的側壁部9 4破損的問題 針對該理由於以下做具體說明。如 的受激準分子燈乃揭示於例如日本特許 許2 5 2 8 2 4 4號，根據放電氣體或是放電 情形，爲了防止發光效率降低，故設有 是放電容器的手段。因此，在外側管和 的溫度差，外側管和內側管的各個管會 所延伸的長度會不相同，認爲會在側壁 側管的溫度比外側管還高的時候，認爲 長度在內側管這側會變長，會在側壁部 的力和拉伸至外側管的力，就會產生使' 在此，長時間亮燈之際，認爲在側 因有兩項。第一原因乃如前述起因於外 度差，第二原因爲與亮燈時間正比而蓄 而且，認爲因兩項原因所產生的應力之 話，受激準分子燈的側壁部就會破損。 因而，具有日本特許第2783712號 號所記載的冷卻手段的燈，點亮時的外 度差比沒有冷却手段的燈還大的緣故， 受激準分子光。 的大面積化，要求 子燈。 分子燈，燈長形化 生所謂焊接外側管 〇 第9圖所示的構造 第2783712號、特 容器的溫度上昇的 欲冷卻放電氣體或 內側管會產生相當 產生熱膨脹，因此 部發生應力。即內 因熱膨脹而延伸的 產生施壓在內側管 測壁部變形的力。 壁部發生應力的原 側管和內側管的溫 積的紫外線應變。 和達到某一定値的 或特許第2528244 側管和內側管的溫 因第一原因所產生 -5 - 1269344 (3) 的應力增大。因此，該燈點亮例如7 Ο 0〜9 Ο 0小時間左右 的話，因兩項原因所產生的應力之和達到一定値’燈的側 壁部破損的緣故，即有所謂無法獲得所希望的使用壽命的 問題，特別是像全長超過8 0 0mm的長形燈，此類問題會 很頻繁的發生。 爲了解決此種問題，認爲只固定內側管之單邊端部的 構造的受激準分子燈很有效。針對具體構造表示在以下的 第1 1圖。 第11圖是表示在管軸方向切斷具有其它構造的習知 受激準分子燈〗1 0的斷面圖。 受激準分子燈110是構成一*端爲封閉、另一另一端爲 開口的構造的外側管1 1 1以及內側管1 1 2被配置在同軸方 向的雙管構造的放電容器1 1 3，利用焊接外側管1 1 1之開 口側的端部和內側管1 1 2之開口側的端部而形成側壁部 1 1 4。在該放電容器1 ] 3內的空間1 1 5封入放電用氣體例 如氙氣。在外側管1 1 1的外側設置第一電極1 1 6，在內側 管1 1 2的內側設置第二電極1 1 7。在第一電極1 1 6和第二 電極1 17之間施加高頻電壓，藉此在放電空間1 18內（發 光部）形成受激準分子，該受激準分子爲解離，並放射出 氙受激準分子光。 第1 1圖所示的受激準分子燈]1 0是種只固定內側管 1 1 2之開口側的端部的構造。若根據此種構造，認爲在如 前述的外側管和內側管會產生溫度差，且起因於外側管和 內側管因熱膨脹延伸之量相異的情形，而不會產生所謂側 -6 - 1269344 (4) 壁部提前破損的問題。 但是’若根據此種構造的受激準分子燈，使纟咨長％ & 的話，會產生所謂照度不勻或放電間隙變窄的部分的_ _ 特性惡化的問題。 具體說明的話，若使燈長形化，內側管會因自重弓丨起 很大的撓曲，藉此即無法保持適當的放電間隙。f κ Η _ 管的撓曲量達到放電間隙之Ο · 5倍以上的話，只會在放電 間隙變窄的部分產生放電，就會產生照度不勻。而且，對 該部分投入過剩的電力，照度維持率會提前下降，得不到 所希望的使用壽命。 而且，因在燈輸送時、處理時所產生的振動、衝撃， 也會產生內側管的根源部分即側壁部破損的問題。 若具體說明，因爲內側管只固定單一端，受到振動、 衝撃的時候，未被固定這側的內側管的前端會產生很大的 撓曲。內側管的撓曲量，比兩端被固定的還要大，在固定 內側管的側壁部會產生很大的應力。因而，即使只受到稍 微的振動、衝撃，均認爲側壁部會破損。 [特許文獻1 ] 曰本特許第2783712號 [特許文獻2] 曰本特許第2 5 2 8244號 【發明內容】 [發明欲解決的課題] 1269344 (5) 本發明之目的乃針對在同軸上配置外側管和內側管’ 並具有在一端形成側壁部的雙管構造的長形受激準分子 燈，提供一種側壁部在短時間亮燈不會破損，進而防止內 側管產生較大撓曲的情形’藉此照度分佈就會很均勻’照 度維持率高，側壁部不會因燈輸送時、處理時所產生的振 動、衝撃產生破損的受激準分子燈。 [用以解決課題的手段] 爲解決前述課題，申請專利範圍第1項之發明的受激 準分子燈，其特徵爲：由在同軸一配置一端爲封閉、另一 端爲開口的外側管及內側管’並具有形成在外側管及內側 管之開口側的端部的側壁部的放電容器；和塡充於形成在 該放電容器內的放電空間內的放電用氣體；和至少一方隔 著往放電空間外所配置的前述放電空間而相對的一對電極 所形成，其特徵爲：前述放電容器係具有欲支撐前述內側 管的至少一個以上的支撐手段，該支撐手段是被固定在前 述外側管或是前述內側管的任一方，在該支撐手段和另一 管之間具有空隙。 而且，申請專利範圍第2項之發明的受激準分子燈， 其特徵爲：由··在同軸上配置一端爲封閉、另一端爲開口 的外側管及內側管，並具有形成在外側管及內側管之開口 側的端部的側壁部的放電容器；和塡充於形成在該放電容 器內的放電空間內的放電用氣體；和至少一方隔著往放電 空間外所配置的前述放電空間而相對的一對電極所形成， -8- 1269344 (6) 前述放電容器係具有欲支撐前述內側管的至少一個以上的 支撐手段，且該支撐手段是藉由使前述外側管或前述內側 管的任一方變形所形成，在該支撐手段和另一管之間具有 空隙。 而且，申請專利範圍第3項之發明的受激準分子燈， 其特徵爲：前述側壁部的壁厚比內側管的壁厚還厚。 [作用] 若根據有關本發明的受激準分子燈，其放電容器是種 焊接外側管和內側管的側壁部僅形成在單側端部的構造。 因而，像是具有在第9圖所示的兩端形成側壁部的放電容 器的受激準分子燈，於燈點亮時，在內側管和外側管之間 會產生溫度差，不會在側壁部產生起因於因各個熱膨脹所 延伸之量不同的應力。而且，在放電容器設置支撐手段， 內側管不會因自重產生很大的撓曲，放電間隙不會過窄， 能得到均勻的照度分佈，照度維持率不會下降。而且，即 使受到振動、衝撃，內側管不會產生很大的撓曲，就不會 在側壁部產生很大的應力。 藉此，就連長形的燈，也製作出使用壽命長的燈。而 且，能防止燈因燈輸送時、處理時所產生的振動、衝撃而 破損。 【實施方式】 [發明的實施形態] -9 - 1269344 (7) 第1圖是說明本發明之第一實施例的受激準分子燈 10的圖。第1圖（a)是表示在管軸方向切斷受激準分子燈 10的斷面圖。第1圖（b)是第1圖（a)的A—A’斷面圖。 受激準分子燈1 0是構成在同軸方向配置一端爲封 閉、另一端爲開口的構造的外側管1 1及內側管1 2的雙管 構造的放電容器1 3，藉由焊接外側管1 1之開口側的端部 和內側管1 2之開口側的端部，而形成側壁部1 4。在該放 電容器1 3內的空間1 5封入放電用氣體例如氙氣。在外側 管U的外側設置第一電極1 6，在內側管1 2的內側設置 第二電極I 7。在第一電極1 6和第二電極1 7之間施加高 頻電壓，藉此在放電空間1 8內（發光部）形成受激準分 子，受激準分子會解離並射出氙受激準分子光。支撐手段 1 〇〇是利用焊接被安裝在外側管1 1。 就受激準分子燈1 〇來看，內側管12會因自重而撓 曲，藉此抵接於設置在外側管1 1的支撐手段1 〇〇被支撐。 在此，在支撐手段1 〇〇和內側管1 2之間具有空隙是表示 可以抵接支撐手段1 〇〇和內側管1 2，且在支撐手段1 00 和內側管1 2之間的至少一部分存在空隙G的狀態。 參考第1圖，針對受激準分子燈1 0的具體數値例於 以下做說明。 <受激準分子燈1 0 > 外側管1 1的全長、外徑、壁厚：8 0 0 m ηι、4 0 m m、2 m m 內側管1 2的全長、外徑、壁厚：7 8 0 m m、1 6 m m、1 m ηι -10- 1269344 (8) 側壁部14的壁厚：1mm 放電空間1 8的軸向長度：720mni 第2圖是針對前述支撐手段1 〇〇做說明的圖。第2圖 (a)所示的支撐手段1〇〇是採用設有可通內側管12的貫通 孔1 〇 1的甜甜圈狀的圓板。藉此，於受激準分子燈1 0之 輸送時、處理時，燈無論配置在所有的方向都可支撐內側 管12。 尙且，光的射出方向被限定，且以固定在一定方向的 狀態進行輸送、操作的時候，僅在內側管撓曲的方向設置 支撐手段亦可，也可採用半圓板。 於第2圖（a)中，設置在圓板的貫通孔之直徑是因內 側管1 2的尺寸而異，不過內側管1 2會因自重而撓曲，需 要確定欲抵接於設置在圓板的貫通孔1 〇 1的邊緣。 而且，設置在圓板的貫通孔1 〇 1的直徑，在內側管 1 2爲長形且因自重往管徑方向的撓曲很大的時候，往管 徑方向的撓曲量需要放電間隙一半以內的大小。此情形於 以下的第3圖做詳細說明。 第3圖是放大以第1圖的虛線所圍住的部分B的圖。 實線部分是表示因自重引起撓曲的內側管1 2，斜線部分 是表示以外側管1 1的中心軸X爲中心而配置的內側管1 2。 於第3圖中，內側管1 2的外表面和外側管1 1的內表 面的距離G是放電間隙G。內側管1 2的外表面和相當於 內側管1 2的第二電極1 7的最端部的位置a的距離T是往 -11 - (9) 1269344 管徑方向的撓曲量T。因而，可成爲支撐 在圓板的貫通孔的直徑，需要確定內側管 爲 T< 0.5G 〇 於上述數値例的受激準分子燈1 〇中 支撐手段1 00的圓板的貫通孔的直徑大槪 右，希望爲1 7〜2 1 m ηι左右。 可成爲支撐手段100的圓板的厚度， 佳。一旦小於1 mm，在機械性強度方面會 可成爲支撐手段100的圓板材質，並 據容易焊接固定的理由，與所固定的放電 爲佳，此時以石英玻璃爲佳。 可成爲支撐手段1 0 0的圓板，僅支撐 的緣故，只有設置在所放電的部分和設置 放電，會使照度下降的關係，故於第1圖 電空間1 8的外側爲佳。 若根據此種受徼準分子燈1 0，由於 內側管12是事先利用支撐手段100而支 管1 2就沒有很大的撓曲。藉此，因爲； 窄，所以可得到均勻的照度分佈的同時， 的部分供給過剩的電力就不會讓照度維持 能防止因在燈輸送時、處理時所產生的振 壁部1 4的破損。 另外，由於本發明的受激準分子燈1 益1 3的單側端部形成側壁部1 4的構造， 手段1 0 0之設置 12的撓曲量τ ，設置在可成爲 爲1 7〜2 7 m m左 以 1 m m以上爲 有問題。 未特別限定，根 容器相同的材質 內側管之前端部 圓板的部分不會 中，以設置在放 因自重而撓曲的 撐的構造，內側 玫電間隙不會過 對放電間隙很窄 率下降。而且， 動、衝撃引起側 〇是僅在放電容 故於燈點亮時會 -12- 1269344 (10) 在外側管11和內側管1 2之間產生溫度差，藉此即使因各 個熱膨脹引起延伸的量有差異，也不會在側壁部1 4產生 應力。藉此就能製作使用壽命長的燈。 第4圖是說明屬於本發明之第一實施例的其它形態的 受激準分子燈40的圖。第4圖（a)是表示在管軸方向切斷 受激準分子燈40的斷面圖。第4圖（b)是第4圖（a)的A— A’斷面圖。與第1圖相同的符號是表示相同的部分，說明 予以省略。 於受激準分子燈40中，支撐手段400是利用焊接安 裝在內側管1 2。設置在內側管1 2的支撐手段400是利用 內側管1 2撓曲，與外側管1 1抵接。在此，在支撐手段 4 0 0和外側管1 1之間具有空隙，是表示可以抵接支撐手 段4 00和外側管U，並在支撐手段400和外側管1 2之間 的至少一部分存在空隙G的狀態。可成爲支撐手段400 的圓板外徑，乃如前述，需要確定內側管1 2的撓曲量Τ 滿足則述Τ < 0.5 G。 在此，參考第2圖，針對支撐手段的其它形態做說明。 如第2圖（b)、（c)所示，藉由改變內側管12，形成略 波狀狀的大徑部1 02、略柱狀的大徑部1 03，藉此可成爲 支撐手段。尙且，圖未表示，不過藉由使外側管1 1縮 徑，就可製成如第2圖（b)、（c)所示的支撐手段。 尙且，於第1圖、第4圖中，採用如第2圖（a)、（b)、 (c)所示之構造的支撐手段，由於內側管的撓曲變小，支 撐手段和內側管或者外側管之間的間隙變小的話，氣體通 -13- 1269344 (11) 過間隙時的阻力變大的緣故，在對放電容器內2 工程中，一次真空放電容器內之際，在達到所希 度之前，需要很長的時間。 此時，利用第2圖（d )、（ e )來說明有效的支 其它形態。第2圖（d)、（e)所示的支撐手段1〇〇 104、切口 105° 藉由採用此種支撐手段，就能以短時間完$ 作業。 第5圖是說明屬於本發明之第一實施例的其 受激準分子燈5 0的圖。第5圖（a)是表示在管軸 受激準分子燈50的斷面圖。第5圖（b)是表示第 A — A ’斷面圖。 與第1圖相同的符號是表示相同的部分，說 略。 於受激準分子燈5 0中，利用焊接安裝在外f| 支撐手段5 00，通常就算內側管1 2因自重而撓 會與內側管1 2抵接。在支撐手段5 0 0和內側管1 在空隙G。而且，內側管1 2在因燈輸送時、處 生的振動、衝撃更加撓曲之際，可利用支撐手段 在此，設置在可成爲支撐手段5 00的圓板的 直徑，在因燈輸送時、處理時加諸在燈的振動、 內側管1 2更加撓曲的時候，內側管1 2的撓曲量 確定滿足前述T<0.5G。 尙且，支撐手段5 00參考第4圖而設置在[ 氣體封入 望的真空 撐手段的 係設有孔 氣體封入 它形態的 方向切斷 5圖（a)的 明予以省 J管1 1的 曲，也不 2之間存 理時所產 5 00支撐。 貫通孔的 衝撃，而 T亦需要 3側管1 2 -14- 1269344 (12) 亦可。 受激準分子燈更加長形化，例如全長超過1 ο ο ο ni m的 時候，如第】圖、第4圖、第5圖所示’以支撐手段僅支 撐內側管之前端部附近的f冓造’有無法充分防止內側管撓 曲的可能性。若具體的說明’內側管就有可能會在側壁部 固定的部分和利用支撐手段支撐的部分之間撓曲°對此種 受激準分子燈特別有效的實施例表示在以下的第6圖。 第6圖是表示在管軸方向切斷屬於本發明之第二實施 例的受激準分子燈6 〇的斷面圖。 受激準分子燈 60是構成在同軸方向配置一端爲封 閉、另一端爲開口的構造的外側管6 1及內側管62的雙管 構造的放電容器63 ’外側管6 1的開口側的端部和內側管 62的開口側的端部是利用焊接而形成側壁部64。在該放 電容器63內的空間65封入放電用氣體例如氙氣。在外側 管6 1的外側設置第一電極6 6，在內側管6 2的內側設置 第二電極67。藉由在第一電極66和第二電極67之間施 加高頻電壓，在放電空間6 8內（發光部）形成受激準分 子，受激準分子就會解離而放射出氙受激準分子光。 於受激準分子燈60中，因自重而撓曲的內側管62是 與焊接安裝在外側管61的兩個支撐手段600a、600b抵接。 支撐手段600a是設置用來支撐內側管62之前端部附近， 支撐手段600b是設置用來支撐內側管62的中央部附近。 設置在可成爲支撐手段600 a、600b的圓板的貫通孔 的直徑，乃如前述，需要確定內側管62的撓曲量T滿足 ^ 15- 1269344 (13) 前述 T < 0.5G。 中央部附近是指不一定要以側壁部爲起點之相當於內 側管之全長的1 / 2的位置。其中一方的端部被固定支撐， 另一方的端部被自由支撐的理想性的樑的撓曲，據知在以 固定支撐端爲基準而相當於樑之全長的5/8的位置撓曲最 大。認爲內側管6 2是靠近在此的支撐狀態，在以側壁部 64爲基準而相當於內側管62之全長的5/8的位置最撓曲。 因而，支撐手段600b配置在以側壁部64爲基準而相當於 內側管62之全長的5/8的位置最有效果，不過配置在以 側壁部64爲基準而相當於內側管62之全長的3/8〜7/8 的位置也很有效果。 參考第6圖，針對受激準分子燈60的具體數値做說 明。 <受激準分子燈60 > 外側管 6 1 的全長、外徑、壁厚：1 〇 〇 〇 m m、4 0 m m、 2mm 內側管 6 2的全長、外徑、壁厚：9 8 0 m m、1 6 m m、 1mm 側壁部64的壁厚：1mm 放電空間68的軸向長度：92 0mm 自各個支撐手段的側壁部起的距離：5 0 0 m m ' 9 6 0 m m 若根據此種受激準分子燈60 ’即使像是全長超過 -16- 1269344 (14) 1 000mm的燈，因利用支撐手段600b來支撐內側管62的 中央部，所以內側管6 2就不會有很大的撓曲。藉此如受 激準分子燈1 〇所述，可得到均勻之照度分佈的同時，照 射維持率提昇。更於燈輸送時、處理時，可防止側壁部 64破損。 另外，於燈點亮時，即使在外側管6 1和內側管62之 間產生溫度差’因各個熱膨脹引起延伸的量有差異’也不 會在側壁部1 4產生應力的緣故，就能製作使用壽命長的 燈。 尙且，於第二實施例中，參考第4圖，也可將兩個支 撐手段設置在內側管。 另外，參考第5圖，第6圖所示的支撐手段600a、 6 0 0b的這兩方也可採用事先不與內側管62抵接的構造。 而且，第6圖所示的支撐手段600a、600b之中，也 可成爲任何單一方與內側管62抵接的構造。 受激準分子燈更加長形化，例如全長超過1 8 00mm的 時候，如第6圖所示，以支撐手段僅支撐內側管之前端部 和內管側之中央部附近的構造，有無法充分防止內側管撓 曲的可能性。對此種受激準分子燈特別有效的實施例表示 在以下的第7圖。 第7圖是表示在管軸方向切斷屬於本發明之第三實施 例的受激準分子燈7 〇的斷面圖。 受激準分子燈7 0是構成在同軸方向配置一端爲封 閉、另一端爲開口的構造的外側管7 1及內側管7 2的雙管 -17- 1269344 (15) 構造的放電容器7 3，外側管7 1的開口側的端部和內側管 72的開口側的端部是利用焊接而形成側壁部74。在該放 電容器7 3內的空間7 5封入放電用氣體例如氙氣。在外側 管7 1的外側設置第一電極76，在內側管72的內側設置 第二電極77。藉由在第一電極76和第二電極77之間施 加高頻電壓，在放電空間7 8內（發光部）形成受激準分 子，受激準分子就會解離而放射出氙受激準分子光。 於受激準分子燈7 0中，因自重而撓曲的內側管7 2是 與焊接安裝在外側管 71的四個支撐手段 700a、700b、 7 0 0 c、7 0 0 d抵接。支撐手段7 〇 〇 a是設置用來支撐內側管 72之前端部附近，支撐手段6 0 0b、700c、700d是設置成 各個間隔成爲8 00mm以內。 設置在可成爲支撐手段 7〇〇a、700b、700c、700d的 圓板的貫通孔的直徑，乃如前述，需要確定內側管7 2的 撓曲量T滿足前述T<〇.5G。 支撐手段 7〇〇a、700b、700c、700d不一定要以均等 間隔而配置，內側管72在支撐手段間不會產生撓曲，可 以配置成各個間隔成爲800mm以內。 尙且，於第7圖中，支撐手段是設四個，不過對應內 側管的長度，數量可適當決定。 參考第7圖，針對受激準分子燈70的具體數値做說 明。 <受激準分子燈70 > -18- 1269344 (16) 外側管 7 1的全長、外徑、壁厚：]8 00mm、50mm、 2 5mm 內側管72的全長、外徑、壁厚：1 7 8 0mm、20mm、 15mm 側壁部7 4的壁厚：1 5 m m 放電空間7 8的軸向長度：1 7 2 0 m m 各個支撐手段的軸方向間隔：440mm 若根據此種受激準分子燈70，即使像是全長超過 2 00 0mm的燈，因自重而撓曲的內側管72是利用設置在 外側管71的四個支撐手段700a、700b、700c、700d來支 撐，內側管72就沒有很大的撓曲。 藉此如受激準分子燈1 0所述，可得到均勻之照度分 佈的同時，照射維持率提昇。更於燈輸送時、處理時，可 防止側壁部74破損。 另外，於燈點亮時，即使在外側管7 ]和內側管72之 間產生溫度差，因各個熱膨脹引起延伸的量有差異，也不 會在側壁部74產生應力的緣故，就能製作使用壽命長的 燈。 尙且，於第三實施例中，參考第4圖，也可將四個支 撐手段700a、700b、700c、700d設置在內側管72。 另外，參考第5圖，第7圖所示的支撐手段700a、 7 00b、7 00c、7 00d也可採用事先不與內側管62抵接的構 造。 -19- 1269344 (17) 而且，第7圖所示的支撐手段7 00a、700b、700c、 7 0 0d之中，也可成爲僅任意一個與內側管62抵接的構造。 理所當然也可以成爲位意兩個或任意三個與內側管62抵 接的構成。 若根據第7圖所示的受激準分子燈70，由於內側管 72非常的長，認爲會在側壁部74產生相當的應力。以下 第8圖所示的實施例，乃如受激準分子燈70，對於全長 非常很長的受激準分子燈特別有效。 第8圖是表示在管軸方向切斷屬於本發明之第四實施 例的受激準分子燈8 0的斷面圖。 於第8圖中，放電容器83係具有同軸方向配置一端 爲封閉、另一端爲開口的構造的外側管8 1及內側管8 2的 雙管構造，外側管8 1及內側管8 2的各個開口側的端部是 接合於形成在正交於管軸方向之面上的閉塞構件84，於 放電容器8 3的單側端部形成圓環狀的側壁部。外側管8 1 係設有用來支撐內側管8 2的支撐手段8 0 0 a、8 0 0 b、8 0 0 c、 8 0 Od。於閉塞構件84的管軸方向的壁厚hi比內側管82 的壁厚h2還大。閉塞構件84是由例如圓板所構成，外徑 大致與外側管8 1的外徑一致，內徑大致與內側管8 2的內 徑一致。 參考第8圖，針對受激準分子燈8 0的具體數値做說 明。 〈受激準分子燈8 0 > -20- 1269344 (18) 外側管 8 1 的全長、外徑、壁厚：2 Ο Ο 0 m m、5 0 m ηι、 2 5 m m 內側管 8 2的全長、外徑、壁厚·· 1 9 8 0 m m、2 0 m m、 15mm 閉塞構件84的壁厚：3mm 放電空間88的軸向長度：490mm 若根據此種受激準分子燈8 0，因爲側壁部8 4的壁厚 比內側管82還厚，所以屬於機械性強度高的構造。若根 據此種構造，即使在燈輸送時、處理時，對燈加諸更強的 振動、衝撃，還是可防止側壁部破損。 尙且，有關第四實施例的構造並不限於受激準分子燈 80，也適用於受激準分子燈10、40、50、60、70。 另外，本發明之第四實施例的其它形態，可利用在內 側管的開口側的端部接合可成爲側壁部的厚玻璃管，然後 焊接該厚玻璃管和外側管，形成放電容器。或是，使內側 管增厚，而開口側的端部附近的壁厚就會變厚，且焊接外 側管和內側管，藉此就可以形成放電容器。 尙且，若根據前述受激準分子燈10、40、50、60、 70，放電容器係具有焊接外側管的開口側的端部和內側管 的開口側的端部而形成的側壁部，不過並不限於此，可藉 由在外側管的開口側的端部和內側管的開口側的端部，焊 接可成爲側壁部的圓環狀構件而形成側壁部。 另外，本發明的構造係採用全長爲8 0 0mm以上的長 -21 - 1269344 (19) 形受激準分子燈爲佳，不過全長未滿800mm的 採用本發明的構造。認爲全長很短的燈即使不採 的構造也不易發生如前述的問題。但是使用壽命 粗糙的時候，例如燈點亮中，一邊移動燈一邊使 等等，抑制內管撓曲是很有效。 在有關本明細書中的第一實施例〜第四實施 準分子燈的圖面，是表示第一電極和第二電極的 配置在放電空間外的構造，不過在外側管的外i 空間外）配置第一電極，在內側管的外表面（放1 配置在第二電極的構造亦可。另外，在外側管 (放電空間內）配置第一電極，在內側管的內表3 間外）配置第二電極的構造亦可。 另外，電極不必一定要密著的配置在外側管 管，在電極和外側管或者內側管之間存在間隙間 亦可。 而且，取代內側管使用圓柱狀玻璃棒而形成 亦可，此時，在玻璃棒的表面設置第二電極亦可 尙且，如前述，受激準分子燈的內側管是在 爲基準而相當於內側管之全長的5/8的位置，或 側壁部和支撐構件之間的5/8的位置撓曲最大， 關本明細書中的第一實施例〜第四實施例的受激 的圖面，爲了方便，只表示從側壁部向著內側管 的前端傾斜。 燈不排除 用本發明 更長，或 用的時候 例的受激 這兩方被 I面（放電 I空間內） 的內表面 δ (放電空 或者內側 加以配置 放電容器 〇 以側壁部 是相當於 不過於有 準分子燈 封閉這側 -22- 1269344 (20) [發明效果] 根據本發明的受激準分子燈，是種即使內側管因自重 或是在燈輸送時、處理時加諸在燈的振動、衝撃而撓曲 下，還是能利用設置在外側管或內側管的支撐手段而支撐 的構造。藉此，就可防止放電間隙過窄、於側壁部產生過 剩的應力。因而，能提供一在輸送時、處理時不會破損， 照度很均勻，使用壽命長的長形受激準分子燈。 【圖式簡單說明】 第1圖是本發明之第一實施例的受激準分子燈的斷面 圖。 第2圖是說明支撐手段的圖。 第3圖是放大以第1圖的虛線圍住的部分的圖。 第4圖是本發明之第一實施例的其它形態的受激準分 子燈的斷面圖。 第5圖是本發明之第一實施例的其它形態的受激準分 子燈的斷面圖。 第6圖的本發明之第二實施例的受激準分子燈的斷面 圖。 第7圖是本發明之第三實施例的受激準分子燈的斷面 圖。 第8圖是本發明之第四實施例的受激準分子燈的斷面 圖。 第9圖是習知受徼準分子燈的斷面圖。 -23- 1269344 (21) 第1 0圖是說明側壁部的破損狀態圖。 第1 1圖是習知其它構造的受激準分子燈的斷面圖。 [圖號說明] 1 0受激準分子燈 ~ 1 1外側管 1 2內側管 1 3放電容器 _ 1 4側壁部 1 5空間 1 6第一電極 1 7第二電極 1 8放電空間（發光部） 4 0受激準分子燈 * 5 0受激準分子燈 6 0受激準分子燈 _ 6 1外側管 6 2內側管 63放電容器 64側壁部 6 5空間 6 6第一電極 6 7第二電極 6 8放電空間（發光部） -24- 1269344 (22) 7 〇受激準 7 1外側管 72內側管 7 3放電容 74側壁部 7 5空間 76第一電 77第二電 7 8放電空 8 0受激準 8 1外側管 8 2內側管 8 3放電容 8 4閉塞構 8 5空間 86第一電 87第二電 8 8放電空 9 0受激準 9 1外側管 9 2內側管 9 3放電容 94側壁部 9 5空間 分子燈 器1269344 (1) Field of the Invention [Technical Field] The present invention is, for example, one of discharge lamps using an ultraviolet light source for photochemical reaction, and in particular, the outer tube and the inner tube are disposed coaxially. And an excimer lamp with a double tube structure. [Prior Art] The excimer lamp has a characteristic of strongly emitting a single wavelength of vacuum ultraviolet light, and an excimer lamp such as xenon is used for the discharge gas, which is known to be a vacuum ultraviolet light having a wavelength of 1 72 nm. In addition, in the case of a mixed gas of cerium and chlorine, ultraviolet light having a wavelength of 2 2 2 n m is emitted. By changing the discharge gas in the discharge vessel, light of various wavelengths can be emitted. For example, a light irradiation device for carrying an excimer lamp is mainly used for decomposing and removing organic substances adhering to the surface of a panel substrate of a liquid crystal panel display element, and surface modification of a panel substrate. Fig. 9 is a cross-sectional view showing the cutting of the conventional excimer lamp 9A in the tube axis direction. The excimer lamp 90 is a discharge vessel 9 3 having a double tube structure in which the outer tube 9 1 and the inner tube 9 2 are arranged in the coaxial direction, and the end portion of the outer tube 9 1 and the end portion of the inner tube 92 are welded. The side wall portion 94 is formed. A space 9 5 in the discharge vessel 9 3 is sealed with a discharge gas such as helium. A first electrode 96 is provided outside the outer tube 9 1 and a second electrode 97 is provided inside the inner tube 92. A high-frequency voltage is applied between the first electrode 96 and the second electrode 97, whereby an excited component 1269344(2) is formed in the discharge space 98 (light-emitting portion), and the excimer is dissociated and emitted. In the past, when the total length of the substrate of the liquid crystal panel display element is, for example, an elongated excimer of more than 8 mm, but the structure of the structure shown in Fig. 9 is excited, when lighting, as shown in Fig. 10 The problem that the side wall portion 94 of the inner tube 9 2 and the inner tube 9 2 is broken is shown in the following for the reason. For example, an excimer lamp is disclosed in, for example, Japanese Patent No. 2 2 2 2 2 4 4, and a discharge capacitor is provided in order to prevent a decrease in luminous efficiency depending on a discharge gas or a discharge. Therefore, in the temperature difference between the outer tube and the inner tube, the length of each tube of the outer tube and the inner tube will be different, and it is considered that the length of the side tube is higher than the outer tube, and the length is considered to be the inner tube. The side will become longer, and the force in the side wall and the force of stretching to the outer tube will result in 'here, when there is two lights on the side. The first reason is that the above-mentioned cause is caused by the external difference, and the second reason is that it is stored in proportion to the lighting time. It is considered that the stress generated by the two causes, the side wall portion of the excimer lamp is broken. Therefore, the lamp having the cooling means described in Japanese Patent No. 2783712 is excimer light because the external difference at the time of lighting is larger than that of the lamp without the cooling means. The large area requires a sub-light. Molecular lamp, lamp lengthening The so-called welding outer tube 〇 Structure shown in Fig. 9 No. 2783712, the temperature of the special container rises, and the discharge of the discharge gas or the inner tube causes considerable thermal expansion, so that stress occurs in the part. That is, the force which is extended by the thermal expansion and which exerts a pressure on the inner tube to measure the wall portion. The UV strain of the temperature of the original side tube and the inner tube where the wall is stressed. The stress of the -5 - 1269344 (3) is increased by the first cause of the temperature of the side tube and the inner tube of the 2528244 side tube and the inner tube. Therefore, when the lamp is turned on, for example, 7 Ο 0 to 9 Ο 0 hours or so, the sum of the stresses generated by the two causes is constant, and the side wall portion of the lamp is broken, that is, the desired use cannot be obtained. The problem of longevity, especially for long lamps with a total length of more than 800 mm, can occur frequently. In order to solve such a problem, it is considered that an excimer lamp having a structure in which only one end portion of the inner tube is fixed is effective. The first configuration is shown below in the specific configuration. Fig. 11 is a cross-sectional view showing a conventional excimer lamp 10 10 having another structure cut in the tube axis direction. The excimer lamp 110 is a discharge vessel 1 1 3 having a double tube structure in which the outer tube 1 1 1 and the inner tube 1 1 2 having a structure in which one end is closed and the other end is open, and the inner tube 1 1 2 is disposed in a coaxial direction. The side wall portion 1 1 4 is formed by welding the end portion on the opening side of the outer tube 1 1 1 and the end portion on the opening side of the inner tube 1 12 . A discharge gas such as helium is sealed in the space 1 15 in the discharge vessel 1 ] 3 . A first electrode 1 1 6 is disposed outside the outer tube 1 1 1 , and a second electrode 1 17 is disposed inside the inner tube 1 1 2 . A high-frequency voltage is applied between the first electrode 161 and the second electrode 117, whereby an excimer is formed in the discharge space 18 (light-emitting portion), and the excimer is dissociated and emitted 氙Excimer light. The excimer lamp 1010 shown in Fig. 1 is a structure in which only the end portion on the opening side of the inner tube 1 12 is fixed. According to this configuration, it is considered that a temperature difference occurs between the outer tube and the inner tube as described above, and the amount of extension of the outer tube and the inner tube due to thermal expansion does not occur, so that the so-called side -6 - 1269344 does not occur. (4) The problem of damage to the wall in advance. However, if the excimer lamp of such a configuration is used, the problem of deterioration of the __ characteristic of the portion where the illuminance is uneven or the discharge gap is narrowed may occur. Specifically, if the lamp is elongated, the inner tube will be greatly deflected by the self-retracting bow, whereby the appropriate discharge gap cannot be maintained. f κ Η _ The amount of deflection of the tube reaches the discharge gap. • If it is 5 times or more, the discharge will only occur in the portion where the discharge gap is narrowed, resulting in uneven illumination. Moreover, if excessive power is input to this part, the illuminance maintenance rate will decrease in advance and the desired service life will not be obtained. Further, there is a problem that the side wall portion, which is the root portion of the inner tube, is broken due to vibration and squeaking generated during the transportation of the lamp and during the processing. Specifically, since the inner tube is only fixed at a single end and is subjected to vibration and smashing, the front end of the inner tube which is not fixed on this side is greatly deflected. The amount of deflection of the inner tube is larger than that fixed at both ends, and a large stress is generated in the side wall portion of the fixed inner tube. Therefore, even if it is only slightly vibrated and washed, it is considered that the side wall portion is broken. [Patent Document 1] 特许本lication No. 2783712 [Private Document 2] 特许本licon No. 2 5 2 8244 [Summary of the Invention] [Problems to be Solved by the Invention] 1269344 (5) The object of the present invention is to configure on a coaxial line The outer tube and the inner tube 'have a long excimer lamp having a double tube structure forming a side wall portion at one end, providing a case where the side wall portion is illuminated in a short time without being broken, thereby preventing the inner tube from being greatly deflected. 'This illuminance distribution will be very uniform' The illuminance maintenance rate is high, and the side wall portion does not cause damage to the excimer lamp due to vibration or smashing during the processing of the lamp. [Means for Solving the Problems] In order to solve the above-mentioned problems, an excimer lamp of the invention of claim 1 is characterized in that the outer tube and the inner side are closed at one end and the other end is open at the one end of the coaxial one. a tube having a side wall portion formed at an end portion on the opening side of the outer tube and the inner tube; and a discharge gas filled in a discharge space formed in the discharge tube; and at least one of the discharge electrodes Forming a pair of electrodes facing the discharge space disposed outside the space, wherein the discharge vessel has at least one support means for supporting the inner tube, and the support means is fixed to the outer tube or It is one of the aforementioned inner tubes, and has a gap between the supporting means and the other tube. Further, an excimer lamp of the invention of claim 2 is characterized in that: an outer tube and an inner tube which are closed at one end and open at the other end are disposed coaxially, and have an outer tube formed therein and a discharge vessel at a side wall portion of an end portion on the opening side of the inner tube; and a discharge gas filled in a discharge space formed in the discharge vessel; and at least one of the discharge spaces disposed outside the discharge space Formed by a pair of opposing electrodes, -8- 1269344 (6) The discharge vessel has at least one or more supporting means for supporting the inner tube, and the supporting means is by using the outer tube or the inner tube One of the deformations is formed, and there is a gap between the supporting means and the other tube. Further, in the excimer lamp of the invention of claim 3, the wall thickness of the side wall portion is thicker than the thickness of the inner tube. [Action] According to the excimer lamp according to the present invention, the discharge vessel is a structure in which the side wall portions of the welded outer tube and the inner tube are formed only at one end portion. Therefore, an excimer lamp such as a discharge vessel having a side wall portion formed at both ends shown in Fig. 9 generates a temperature difference between the inner tube and the outer tube when the lamp is turned on, and does not exist on the side wall. The portion is caused by stresses that vary depending on the amount of expansion of each thermal expansion. Further, in the discharge vessel providing the supporting means, the inner tube does not cause a large deflection due to its own weight, the discharge gap is not too narrow, and a uniform illuminance distribution can be obtained, and the illuminance maintenance rate does not decrease. Moreover, even if it is subjected to vibration and smashing, the inner tube does not cause a large deflection, and no large stress is generated in the side wall portion. In this way, even a long lamp can produce a lamp with a long service life. Moreover, it is possible to prevent the lamp from being damaged due to vibration and rushing generated during the transportation of the lamp and during the processing. [Embodiment] [Embodiment of the Invention] -9 - 1269344 (7) Fig. 1 is a view for explaining an excimer lamp 10 according to a first embodiment of the present invention. Fig. 1(a) is a cross-sectional view showing the excimer lamp 10 cut in the tube axis direction. Fig. 1(b) is a cross-sectional view taken along line A-A' of Fig. 1(a). The excimer lamp 10 is a discharge tube 13 having a double tube structure in which an outer tube 1 1 and an inner tube 1 2 having a closed end and an open end are disposed in the coaxial direction, and the outer tube 1 1 is welded by the outer tube 1 1 . The end portion on the opening side and the end portion on the opening side of the inner tube 12 are formed to form the side wall portion 14. A space 15 in the discharge vessel 13 is sealed with a discharge gas such as helium. A first electrode 16 is disposed outside the outer tube U 6, and a second electrode I7 is disposed inside the inner tube 12. A high-frequency voltage is applied between the first electrode 16 and the second electrode 17 to thereby form an excimer in the discharge space 18 (light-emitting portion), and the excimer dissociates and emits the erbium excimer Light. Support means 1 〇〇 is attached to the outer tube 1 1 by welding. As for the excimer lamp 1 〇, the inner tube 12 is deflected by its own weight, thereby being abutted against the supporting means 1 设置 provided on the outer tube 1 1 . Here, the presence of a gap between the support means 1 〇〇 and the inner tube 1 2 means that the support means 1 〇〇 and the inner tube 1 2 can be abutted, and at least a part between the support means 100 and the inner tube 12 is abutted. There is a state of the gap G. Referring to Fig. 1, a specific example of the excimer lamp 10 will be described below. <Excimer light 1 0 > Overall length, outer diameter, and wall thickness of the outer tube 1 1 : 8000 m ηι, 40 mm, 2 mm Overall length, outer diameter, and wall thickness of the inner tube 1 2 : 7 8 0 mm, 1 6 mm, 1 m ηι -10- 1269344 (8) Wall thickness of the side wall portion 14: 1 mm The axial length of the discharge space 18: 720 mni Fig. 2 is a description of the aforementioned supporting means 1 Figure. The supporting means 1A shown in Fig. 2(a) is a donut-shaped circular plate provided with a through hole 1 〇 1 through which the inner tube 12 can pass. Thereby, the inner tube 12 can be supported in all directions when the excimer lamp 10 is transported and processed. Further, when the light emission direction is limited and the conveyance and operation are performed in a state of being fixed in a certain direction, the support means may be provided only in the direction in which the inner tube is deflected, and a semicircular plate may be employed. In Fig. 2(a), the diameter of the through hole provided in the circular plate varies depending on the size of the inner tube 12, but the inner tube 12 is deflected by its own weight, and it is necessary to determine that it is to be placed in the circle. The through hole of the plate 1 is the edge of 〇1. Further, the diameter of the through hole 1 〇1 provided in the circular plate is such that when the inner tube 12 is elongated and the deflection due to its own weight in the pipe diameter direction is large, the amount of deflection in the pipe diameter direction needs to be half of the discharge gap. Within the size. This situation is explained in detail in Figure 3 below. Fig. 3 is a view enlarging a portion B surrounded by a broken line in Fig. 1. The solid line portion is the inner tube 1 2 indicating the deflection due to its own weight, and the oblique line portion is the inner tube 1 2 disposed around the central axis X of the outer tube 1 1 . In Fig. 3, the distance G between the outer surface of the inner tube 12 and the inner surface of the outer tube 11 is the discharge gap G. The distance T between the outer surface of the inner tube 12 and the position a of the most end portion of the second electrode 17 corresponding to the inner tube 12 is the amount of deflection T in the diameter direction of -11 - (9) 1269344. Therefore, the diameter of the through hole supported in the circular plate can be determined, and it is necessary to determine the diameter of the through hole of the circular plate of the support means 100 in the excimer lamp 1 〇 of the above-mentioned number of the inner tube. Big 槪 right, hope for 1 7~2 1 m ηι or so. It is preferable that the thickness of the circular plate which can be the supporting means 100 is good. When it is less than 1 mm, it can be used as the material of the disc of the supporting means 100 in terms of mechanical strength, and it is preferable to fix the discharge according to the reason of easy soldering and fixing, and quartz glass is preferable at this time. The disk which can be used as the support means 100 is supported only by the portion to be discharged and the discharge is provided, so that the illuminance is lowered. Therefore, the outer side of the electric space 18 is preferably the outer side of Fig. 1. According to this type of excimer lamp 10, since the inner tube 12 is branched by the support means 100 in advance, there is no large deflection. By this means, since the uniform illuminance distribution is obtained, the excess electric power is supplied, and the illuminance is not maintained. The damage of the vibrating wall portion 14 due to the processing during the lamp transportation and the processing can be prevented. Further, since the one-side end portion of the excimer lamp 1 of the present invention forms the side wall portion 14, the deflection amount τ of the setting 12 of the means 1 0 0 can be set to be 1 7 to 2 There is a problem with 7 mm left and 1 mm or more. It is not particularly limited, and the inner material of the same material of the root container is not in the front end of the inner circular plate, and is disposed in a structure in which the brace is deflected by its own weight, and the inner side electric gap does not pass the narrow gap of the discharge gap. . Moreover, the movement and the smashing cause the side sill to be a temperature difference only between the outer tube 11 and the inner tube 12 when the lamp is turned on, and the temperature difference is generated between the outer tube 11 and the inner tube 12, thereby causing the extension even due to the respective thermal expansion. There is a difference in the amount and no stress is generated in the side wall portion 14. This makes it possible to produce a lamp with a long service life. Fig. 4 is a view for explaining an excimer lamp 40 according to another embodiment of the first embodiment of the present invention. Fig. 4(a) is a cross-sectional view showing the excimer lamp 40 cut in the tube axis direction. Fig. 4(b) is a cross-sectional view taken along line A-A' of Fig. 4(a). The same reference numerals as in Fig. 1 denote the same parts, and the description will be omitted. In the excimer lamp 40, the supporting means 400 is mounted on the inner tube 12 by welding. The supporting means 400 provided in the inner tube 1 2 is bent by the inner tube 12 and abuts against the outer tube 11. Here, there is a gap between the supporting means 400 and the outer tube 1 1 to indicate that the supporting means 400 and the outer tube U can be abutted, and at least a portion between the supporting means 400 and the outer tube 1 2 has a gap. The state of G. The outer diameter of the disk which can be the supporting means 400 is as described above, and it is necessary to determine that the amount of deflection 内侧 of the inner tube 1 2 is satisfied, < 0.5 G. Here, other aspects of the supporting means will be described with reference to Fig. 2 . As shown in Fig. 2 (b) and (c), by changing the inner tube 12, a large-diameter portion 102 having a slight wave shape and a large-diameter portion 103 having a columnar shape are formed, whereby the support means can be used. Further, although not shown in the drawings, the support means shown in Figs. 2(b) and (c) can be produced by reducing the diameter of the outer tube 1 1. Further, in the first and fourth figures, the support means having the structure shown in Figs. 2(a), (b), and (c) is used, since the deflection of the inner tube becomes small, the support means and the inner side When the gap between the tube or the outer tube becomes small, the resistance of the gas passage-13-1269344 (11) becomes large, and in the case of the discharge capacitor 2, when the vacuum discharge vessel is inside, it is reached. It takes a long time before it happens. In this case, other forms of effective support will be described using Figs. 2(d) and (e). The supporting means 1 〇〇 104 and the slit 105 shown in Fig. 2 (d) and (e) can be used for a short period of time by using such a supporting means. Fig. 5 is a view for explaining the excimer lamp 50 of the first embodiment of the present invention. Fig. 5(a) is a cross-sectional view showing the excimer lamp 50 in the tube axis. Fig. 5(b) is a cross-sectional view showing the A-A'. The same reference numerals as in Fig. 1 denote the same parts, and the description is omitted. In the excimer lamp 50, the outer f| support means 5 00 is attached by welding, and usually the inner tube 1 2 is abutted against the inner tube 12 due to its own weight. The support means 500 and the inner tube 1 are in the gap G. Further, when the inner tube 12 is deflected by the lamp, the vibration and the squeezing are more flexed, the support means can be used here to set the diameter of the disk which can be the supporting means 500, and when the lamp is conveyed. When the vibration of the lamp is applied during the treatment and the inner tube 12 is more flexed, the amount of deflection of the inner tube 12 is determined to satisfy the aforementioned T < 0.5G. Moreover, the supporting means 500 is provided with reference to Fig. 4 and is provided in the direction of the vacuum-supporting means of the gas-sealing means, and the hole is sealed in the direction of the shape of the figure 5 (a). It does not support the 500 support that is produced between the two. The through hole is punched, and T also requires 3 side tubes 1 2 -14-1269344 (12). The excimer lamp is more elongated. For example, when the total length exceeds 1 ο ο ο ni m, as shown in Fig. 4, Fig. 4, and Fig. 5, the support device supports only the vicinity of the end portion of the inner tube.冓 'There is a possibility that the inner tube cannot be fully prevented from flexing. Specifically, the inner tube may be deflected between the portion where the side wall portion is fixed and the portion supported by the supporting means. A particularly effective embodiment of the excimer lamp is shown in Fig. 6 below. Fig. 6 is a cross-sectional view showing the excimer lamp 6 属于 according to the second embodiment of the present invention cut in the tube axis direction. The excimer lamp 60 is an end portion on the opening side of the outer tube 6 1 of the double tube structure in which the outer tube 6 1 and the inner tube 62 having the closed end and the other end are open in the coaxial direction. The end portion on the opening side of the inner tube 62 is formed by welding to form the side wall portion 64. A discharge gas such as helium is sealed in the space 65 in the discharge capacitor 63. A first electrode 66 is disposed outside the outer tube 6-1, and a second electrode 67 is disposed inside the inner tube 6.2. By applying a high-frequency voltage between the first electrode 66 and the second electrode 67, an excimer is formed in the discharge space 68 (light-emitting portion), and the excimer is dissociated to emit the excimer. Light. In the excimer lamp 60, the inner tube 62 which is deflected by its own weight abuts against the two supporting means 600a, 600b which are welded to the outer tube 61. The support means 600a is provided near the end portion for supporting the inner tube 62, and the support means 600b is provided near the center portion for supporting the inner tube 62. The diameter of the through hole provided in the circular plate which can serve as the supporting means 600a, 600b is as described above, and it is necessary to determine that the amount of deflection T of the inner tube 62 satisfies the above-mentioned T < 0.5G. The vicinity of the center portion means a position corresponding to the 1/2 of the entire length of the inner tube which does not necessarily start from the side wall portion. The deflection of the ideal beam of the one end is fixedly supported and the other end is freely supported. It is known that the deflection is 5/8 of the total length of the beam based on the fixed support end. . It is considered that the inner tube 6 2 is in a supporting state close thereto, and is most flexed at a position corresponding to 5/8 of the entire length of the inner tube 62 with respect to the side wall portion 64. Therefore, the support means 600b is disposed at a position corresponding to 5/8 of the total length of the inner tube 62 with respect to the side wall portion 64, but is disposed at the position corresponding to the entire length of the inner tube 62 with respect to the side wall portion 64. The position of /8~7/8 is also very effective. Referring to Fig. 6, a specific number of excimer lamps 60 will be described. <Excimer lamp 60 > Overall length, outer diameter, and wall thickness of the outer tube 6 1 : 1 〇〇〇 mm, 40 mm, 2 mm Overall length, outer diameter, and wall thickness of the inner tube 6.2: 9 8 0 Mm, 16 mm, 1 mm Wall thickness of the side wall portion 64: 1 mm The axial length of the discharge space 68: 92 0 mm Distance from the side wall portion of each supporting means: 5000 mm '9 6 0 mm The excimer lamp 60' does not have a large scratch on the inner tube 6 2 even if it is a lamp having a total length exceeding -16 - 1269344 (14) 1 000 mm, because the support portion 600b supports the central portion of the inner tube 62. song. Thereby, as described by the excimer lamp 1 ,, a uniform illuminance distribution can be obtained, and the irradiation maintenance rate is improved. Further, it is possible to prevent the side wall portion 64 from being damaged during the transportation of the lamp and during the treatment. Further, when the lamp is turned on, even if a temperature difference "difference in the amount of extension due to each thermal expansion" occurs between the outer tube 6 1 and the inner tube 62, stress can be generated in the side wall portion 14 and can be produced. Long life lamp. Further, in the second embodiment, referring to Fig. 4, two supporting means may be provided in the inner tube. Further, with reference to Fig. 5, both of the supporting means 600a and 600b shown in Fig. 6 may be configured such that they do not abut against the inner tube 62 in advance. Further, among the support means 600a and 600b shown in Fig. 6, any one of the support means 600a and 600b may be in contact with the inner tube 62. When the excimer lamp is more elongated, for example, when the total length exceeds 1 800 mm, as shown in Fig. 6, the structure near the center portion of the front end portion and the inner tube side of the inner tube is supported by the support means, and the structure is insufficient. Prevents the possibility of flexing of the inner tube. An embodiment which is particularly effective for such an excimer lamp is shown in Fig. 7 below. Fig. 7 is a cross-sectional view showing the excimer lamp 7 属于 according to the third embodiment of the present invention cut in the tube axis direction. The excimer lamp 70 is a discharge vessel 7 3 having a double tube -17- 1269344 (15) structure in which an outer tube 7 1 and an inner tube 7 2 having a closed end and a closed end are disposed in the coaxial direction. The end portion on the opening side of the outer tube 7 1 and the end portion on the opening side of the inner tube 72 are formed by welding to form the side wall portion 74. A space 7 5 in the discharge vessel 7 3 is sealed with a discharge gas such as helium. A first electrode 76 is provided outside the outer tube 71, and a second electrode 77 is provided inside the inner tube 72. By applying a high-frequency voltage between the first electrode 76 and the second electrode 77, an excimer is formed in the discharge space 78 (light-emitting portion), and the excimer is dissociated to emit the excimer. Light. In the excimer lamp 70, the inner tube 7 2 which is deflected by its own weight abuts against the four supporting means 700a, 700b, 700c, and 700d which are welded to the outer tube 71. The supporting means 7 〇 〇 a is provided in the vicinity of the end portion for supporting the inner tube 72, and the supporting means 600b, 700c, 700d are set so that the respective intervals become within 800 mm. The diameter of the through hole provided in the circular plate which can serve as the supporting means 7a, 700b, 700c, and 700d is as described above, and it is necessary to determine that the amount of deflection T of the inner tube 724 satisfies the above T < 〇.5G. The supporting means 7a, 700b, 700c, 700d do not have to be arranged at equal intervals, and the inner tube 72 does not become deflected between the supporting means, and can be arranged so that the respective intervals become 800 mm or less. Further, in Fig. 7, the supporting means is four, but the number of the inner tube can be appropriately determined depending on the length of the inner tube. Referring to Fig. 7, a specific number of excimer lamps 70 will be described. <Excimer light 70 > -18-1269344 (16) Overall length, outer diameter, and wall thickness of the outer tube 7 1 : 8 00 mm, 50 mm, 2 5 mm Overall length, outer diameter, and wall thickness of the inner tube 72: 1 7 8 0mm, 20mm, 15mm Wall thickness of the side wall portion 7 4 : 1 5 mm The axial length of the discharge space 7 8 : 1 7 2 0 mm The axial direction of each supporting means: 440 mm According to this excimer The lamp 70, even if it is a lamp having a total length of more than 200 mm, the inner tube 72 which is deflected by its own weight is supported by the four supporting means 700a, 700b, 700c, 700d provided on the outer tube 71, and the inner tube 72 is not provided. Great deflection. Thereby, as described by the excimer lamp 10, a uniform illuminance distribution can be obtained, and the irradiation maintenance rate is improved. It is possible to prevent the side wall portion 74 from being damaged even when the lamp is being conveyed or processed. Further, when the lamp is turned on, even if a temperature difference occurs between the outer tube 7' and the inner tube 72, the amount of extension due to each thermal expansion is different, and the stress is not generated in the side wall portion 74, so that it can be used. Long life lamp. Further, in the third embodiment, referring to Fig. 4, four supporting means 700a, 700b, 700c, 700d may be provided in the inner tube 72. Further, referring to Fig. 5, the supporting means 700a, 7 00b, 7 00c, and 7 00d shown in Fig. 7 may be configured such that they do not abut against the inner tube 62 in advance. -19- 1269344 (17) Further, among the supporting means 7 00a, 700b, 700c, and 70d shown in Fig. 7, any one of the support means 7 00a, 700b, 700c, and 70d may be in contact with the inner tube 62. Of course, it is also possible to have two or any three configurations that are in contact with the inner tube 62. According to the excimer lamp 70 shown in Fig. 7, since the inner tube 72 is extremely long, it is considered that a considerable stress is generated in the side wall portion 74. The embodiment shown in Fig. 8 below, such as the excimer lamp 70, is particularly effective for an excimer lamp having a very long length. Fig. 8 is a cross-sectional view showing the excimer lamp 80 according to the fourth embodiment of the present invention cut in the tube axis direction. In the eighth embodiment, the discharge vessel 83 has a double pipe structure in which the outer pipe 8 1 and the inner pipe 8 2 have a structure in which one end is closed and the other end is open, and the outer pipe 8 1 and the inner pipe 8 2 are each arranged in the coaxial direction. The end portion on the opening side is joined to the closing member 84 formed on the surface orthogonal to the tube axis direction, and an annular side wall portion is formed at one end portion of the discharge vessel 8.3. The outer tube 8 1 is provided with supporting means 8 0 0 a, 8 0 0 b, 8 0 0 c, 8 0 Od for supporting the inner tube 8 2 . The wall thickness hi in the tube axis direction of the closing member 84 is larger than the wall thickness h2 of the inner tube 82. The closing member 84 is formed, for example, by a circular plate, and has an outer diameter substantially equal to the outer diameter of the outer tube 181, and the inner diameter substantially coincides with the inner diameter of the inner tube 822. Referring to Fig. 8, a specific number of excimer lamps 80 will be described. <Excimer light 8 0 > -20- 1269344 (18) Overall length, outer diameter, and wall thickness of the outer tube 8 1 : 2 Ο Ο 0 mm, 50 m ηι, 2 5 mm Overall length of the inner tube 8 2 , outer diameter, wall thickness · 1 9 8 0 mm, 20 mm, 15 mm wall thickness of the occluding member 84: 3 mm axial length of the discharge space 88: 490 mm according to such an excimer lamp 80, because the side wall Since the wall thickness of the portion 84 is thicker than that of the inner tube 82, it has a structure with high mechanical strength. According to this configuration, it is possible to prevent the side wall portion from being damaged even if the lamp is more strongly vibrated and washed during the transportation and processing of the lamp. Moreover, the configuration relating to the fourth embodiment is not limited to the excimer lamp 80, but is also applicable to the excimer lamp 10, 40, 50, 60, 70. Further, in another aspect of the fourth embodiment of the present invention, a thick glass tube which can be a side wall portion can be joined by an end portion on the opening side of the inner side tube, and the thick glass tube and the outer tube can be welded to form a discharge vessel. Alternatively, the inner tube is thickened, and the wall thickness near the end portion on the opening side is thickened, and the outer tube and the inner tube are welded, whereby the discharge vessel can be formed. In addition, according to the excimer lamp 10, 40, 50, 60, and 70, the discharge vessel has a side wall portion formed by welding the end portion on the opening side of the outer tube and the end portion on the opening side of the inner tube, but The present invention is not limited thereto, and the side wall portion may be formed by welding an annular member that can be a side wall portion at an end portion on the opening side of the outer tube and an end portion on the opening side of the inner tube. Further, the structure of the present invention is preferably a long -21 - 1269344 (19)-shaped excimer lamp having a total length of 800 mm or more, but the structure of the present invention having a total length of less than 800 mm. It is considered that the lamp having a short overall length does not easily cause the above problem even if it is not taken. However, when the service life is rough, for example, when the lamp is lit, while the lamp is being moved, etc., it is effective to suppress the deflection of the inner tube. The drawings of the first to fourth embodiments of the excimer lamp in the present specification are those in which the first electrode and the second electrode are disposed outside the discharge space, but outside the outer space of the outer tube) The first electrode is disposed on the outer surface of the inner tube (the configuration in which the first electrode is disposed on the second electrode. The first electrode is disposed in the outer tube (in the discharge space), and the inner surface of the inner tube is disposed outside the inner tube 3) The configuration of the second electrode is also possible. Further, the electrode does not have to be disposed in close contact with the outer tube, and there may be a gap between the electrode and the outer tube or the inner tube. Further, instead of the inner tube, a cylindrical glass rod may be used. In this case, the second electrode may be provided on the surface of the glass rod. As described above, the inner tube of the excimer lamp is equivalent to the reference. The position of 5/8 of the entire length of the inner tube, or the position of 5/8 between the side wall portion and the support member is the largest, and the stimulated drawings of the first to fourth embodiments in the booklet For the sake of convenience, only the front end portion is inclined toward the front end of the inner tube. The lamp does not preclude the use of the present invention for a longer period of time, or the use of the excited side of the case is the inner surface δ of the I plane (in the discharge I space) (discharge or inner side of the discharge vessel is configured such that the side wall portion is equivalent to Excessively, the excimer lamp closes this side -22- 1269344 (20) [Effect of the invention] The excimer lamp according to the present invention is a type of lamp that is applied to the lamp even if the inner tube is self-weight or is transported at the time of processing. It can be supported by a support means provided on the outer tube or the inner tube by vibration, punching, and bending, thereby preventing the discharge gap from being too narrow and causing excessive stress in the side wall portion. An elongated excimer lamp that does not break during transportation, is not uniformly damaged, has uniform illumination, and has a long service life. [Schematic Description] FIG. 1 is an excimer lamp of the first embodiment of the present invention. Fig. 2 is a view for explaining a supporting means. Fig. 3 is an enlarged view of a portion enclosed by a broken line in Fig. 1. Fig. 4 is an exaggerated view of another embodiment of the first embodiment of the present invention. Sectional view of the molecular lamp. Figure 5 is a cross-sectional view showing an excimer lamp of another embodiment of the first embodiment of the present invention. Fig. 7 is a cross-sectional view of the excimer lamp of the second embodiment of the present invention. A cross-sectional view of an excimer lamp according to a third embodiment of the present invention. Fig. 8 is a cross-sectional view showing an excimer lamp according to a fourth embodiment of the present invention. Fig. 9 is a conventional excimer Sectional view of the lamp -23- 1269344 (21) Figure 10 is a diagram showing the damage state of the side wall portion. Fig. 1 is a cross-sectional view of an excimer lamp of another conventional structure. ] 1 0 excimer lamp ~ 1 1 outer tube 1 2 inner tube 1 3 discharge capacitor _ 1 4 side wall portion 1 5 space 1 6 first electrode 1 7 second electrode 1 8 discharge space (light emitting portion) 4 0 subject Excimer lamp * 5 0 excimer lamp 60 excimer lamp _ 6 1 outer tube 6 2 inner tube 63 discharge capacitor 64 side wall portion 6 5 space 6 6 first electrode 6 7 second electrode 6 8 discharge Space (lighting part) -24- 1269344 (22) 7 〇Accepted 7 1 Outer tube 72 Inside tube 7 3 Discharge capacitor 74 Side wall 7 5 Space 76 First electric 77 Second electric 7 8 Discharge empty 8 0 Stimulated Quasi 8 1 outer tube 8 2 inner tube 8 3 discharge capacitor 8 4 occlusion structure 8 5 space 86 first electric 87 second electric 8 8 discharge empty 9 0 excited 9 1 outer tube 9 2 inner tube 9 3 discharge capacitor 94 Side wall portion 9 5 space molecular light fixture
間（發光部） 分子燈 器 件 極 # 極 間（發光部） 分子燈 器 -25- 1269344 (23) 9 6第一電極 9 7第二電極 98放電空間（發光部） 1 1 〇受激準分子燈 1 1 1外側管 1 1 2內側管 1 1 3放電容器 1 1 4側壁部 1 1 5空間 1 1 6第一電極 1 1 7第二電極 1 1 8放電空間（發光部） G放電間隙 T撓曲量(light-emitting part) molecular lamp device pole # pole (light-emitting part) molecular lamp -25- 1269344 (23) 9 6 first electrode 9 7 second electrode 98 discharge space (light-emitting part) 1 1 〇 excimer Lamp 1 1 1 Outer tube 1 1 2 Inner tube 1 1 3 Discharge capacitor 1 1 4 Side wall portion 1 1 5 Space 1 1 6 First electrode 1 1 7 Second electrode 1 1 8 Discharge space (light emitting portion) G Discharge gap T Deflection
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