JP3888298B2 - Excimer lamp device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an excimer lamp device, and more particularly to an excimer lamp device that improves the illuminance distribution of a plurality of excimer lamps arranged on a tube axis.
[0002]
[Prior art]
Conventionally, excimer lamps that emit light of a single wavelength with high efficiency using light emission of excimer molecules are used for ultraviolet treatment such as optical cleaning of a liquid crystal substrate.
[0003]
11A is a front sectional view showing an example of an excimer lamp, and FIGS. 11B and 11C are side sectional views showing examples of inner electrodes provided on the inner tube of the excimer lamp shown in FIG. 11A. FIG.
As shown in FIG. 11A, the excimer lamp is composed of a double cylindrical tube in which an inner tube and an outer tube are coaxially arranged, and both ends thereof are closed to form a discharge space by the inner tube and the outer tube. Has been. The discharge space is filled with a discharge gas composed of a rare gas such as xenon gas for emitting excimer light by discharge, a mixed gas of a rare gas, a mixed gas containing a rare gas and a halogen gas or mercury, or the like.
[0004]
An outer electrode (mesh electrode) is provided on the outer surface of the outer tube, and an inner electrode serving as the other electrode is provided inside the inner tube. The outer electrode (mesh electrode) is seamlessly configured and has elasticity to improve adhesion to the outer tube. The inner electrode has two semicircular shapes as shown in FIG. 11 (b), or a cutout part and a substantially C-shaped cross section as shown in FIG. 11 (c). It is comprised so that it may closely_contact | adhere.
[0005]
By the way, in recent years, with the enlargement of the liquid crystal substrate panel, it is desired to increase the length of the excimer lamp used for the ultraviolet treatment of the liquid crystal substrate. It has come to be used.
[0006]
However, when such an excimer lamp that is long in the tube axis direction is packed roughly horizontally in a packaging container such as cardboard and transported by a truck or the like, there is a problem that the discharge container breaks due to a large impact or vibration applied to the lamp. May occur.
[0007]
Therefore, in order to solve such a problem, it is considered that a plurality of excimer lamps are arranged on the shaft and configured as a single pseudo lamp.
[0008]
FIG. 12A shows an excimer lamp in which two excimer lamps are arranged on the shaft, and the outer electrode and the inner electrode are connected by a connecting member between the two lamps so that power is supplied from one place. It is a figure which shows the structure of an apparatus, and FIG.12 (b) is a figure which shows the temperature distribution of the inner side electrode in the tube-axis direction at the time of lamp | ramp lighting in the excimer lamp apparatus shown to Fig.12 (a).
[0009]
As shown in FIG. 12A, when two excimer lamps are arranged on the shaft, there arises a problem that the illuminance on the lamp shaft at the joint portion of both lamps is lowered. Therefore, in order to prevent a decrease in illuminance at this junction, the lamp interval is narrowed, and further, the inner electrode and outer electrode near the junction are arranged to the end of the discharge vessel, For example, it is 10 mm or less, and in extreme cases, it is arranged to 1 mm or less to prevent a decrease in illuminance at the joint.
[0010]
[Patent Document 1]
Japanese Patent Application No. 2002-105706
[0011]
[Problems to be solved by the invention]
However, in the excimer lamp device as shown in FIG. 12 (a), in order to prevent a decrease in illuminance at the junction of the two excimer lamps, if the lamp interval is reduced and the lamp is turned on and off repeatedly, The inner electrode expands as the temperature rises when the lamp is turned on, and conversely, the inner electrode contracts when the lamp is extinguished, so that the inner electrodes of both excimer lamps gradually move toward each other. Colliding phenomenon occurs. This phenomenon occurs in all excimer lamp devices in which a plurality of excimer lamps are arranged on the tube axis.
[0012]
As described above, when the lamps are repeatedly turned on and off, the inner electrodes of both lamps repeatedly expand and contract. As a result, the inner electrodes collide with each other, and when this phenomenon progresses, the discharge vessel (lamp) at the junction is finally reached. The interval between them starts to widen, and the illuminance decreases at the joint. In this phenomenon, the interval between the discharge vessels (lamps) gradually increases as the lighting time increases, so that the illuminance distribution of the entire excimer lamp is extremely deteriorated at the end of the life of the excimer lamp.
[0013]
Hereinafter, in such an excimer lamp device, the reason why the inner electrodes of both lamps move in the direction of the joint along the tube axis by repeatedly turning on and off the lamp will be described.
[0014]
FIG. 13A is a diagram showing a configuration of an excimer lamp device incorporating two excimer lamps, FIG. 13B is a cross-sectional view taken along line XX in FIG. 13A, and FIG. FIG. 14 is a cross-sectional view taken along line YY in FIG.
[0015]
As shown in these drawings, both excimer lamps are held by hook members at the base portion and the discharge vessel portion so as to intersect the tube axis. That is, since the friction between the hook member and the base and between the hook member and the discharge vessel is small, the lamp is structured to be easily moved in the tube axis direction.
[0016]
Further, as shown in FIGS. 11B and 11C, the inner electrodes of both excimer lamps are composed of a combination of two semicircular members or a substantially C-shaped cross section. While the lamp is lit, the inner electrode expands in the radial direction, but the movement of the inner electrode in the tube axis direction is not hindered.
[0017]
Therefore, in general, the inner tube is made of a quartz glass tube, and the inner electrode is made of a metal material such as stainless steel or aluminum. Therefore, when the lamp is turned on and the temperature of the inner tube and the inner electrode rises, Since the coefficient of thermal expansion of the electrode is higher than that of the inner tube, the inner electrode extends relatively larger than the inner tube.
[0018]
As shown in FIG. 12B, the temperature distribution of the inner electrode during lamp operation is such that the end of the excimer lamp that is not adjacent to the end of the other excimer lamp (hereinafter referred to as both ends) easily escapes heat. However, at the end portion of the excimer lamp adjacent to the end portion of the other excimer lamp (hereinafter referred to as the junction portion), the heat is difficult to escape, and the temperature becomes high.
[0019]
For this reason, in the process of gradually increasing the temperature after the lamp is turned on, the inner electrode extends toward the bonding portion because the temperature of the bonding portion where heat does not easily escape increases quickly. More specifically, when the vicinity of the joint portion of the inner electrode is thermally expanded, the inner electrode tends to extend toward both the joint portion side and the both end portions side. Therefore, the friction between the inner electrode and the inner tube is large, and the friction is greatly extended to the joint portion having a relatively high temperature.
[0020]
Further, in the process of gradually decreasing the temperature after the lamp is turned off, the temperature at both ends where heat can easily escape decreases quickly, so that the inner electrodes on both ends shrink toward the junction.
[0021]
That is, by repeatedly turning on and off the lamp, the inner electrode expands and contracts each time, but as a whole, gradually moves toward the joint portion.
[0022]
That is, by repeatedly turning on and off the lamp, both inner electrodes move toward the joint, and finally they collide at the joint. Since the lamp is repeatedly turned on and off after the collision, the relative inner electrode does not stop moving to the joint side with respect to the inner tube, and both inner electrodes cannot move to the joint side after the collision. On the contrary, the discharge vessel begins to separate at the joint, and the interval between the two discharge vessels is widened.
[0023]
As described above, since the excimer lamp is held only by the force in the direction intersecting the tube axis, the frictional force in the same direction as the tube axis is weak, so that both discharge containers can be easily expanded. To work.
If the interval between the two discharge vessels is widened, the illuminance at the junction between the two discharge vessels is reduced, and further the illuminance distribution on the entire lamp axis is deteriorated.
[0024]
In view of the above problems, the object of the present invention is to prevent the illuminance at the junction between the excimer lamps from decreasing even if a plurality of excimer lamps are arranged on the same lamp axis. An object of the present invention is to provide an excimer lamp device that eliminates a change in illuminance distribution.
[0025]
[Means for Solving the Problems]
The present invention employs the following means in order to solve the above problems.
The first means generates an excimer molecule in a hollow cylindrical discharge vessel in which an outer tube and an inner tube having a substantially cylindrical shape are coaxially arranged, and both ends of the outer tube and the inner tube are sealed. In the excimer lamp device, a plurality of excimer lamps are disposed on a tube axis, the discharge gas for enclosing the gas is discharged, and an outer electrode is provided on the outer surface of the outer tube and an inner electrode is provided on the inner surface of the inner tube. Adjacent Excimer lamp To keep the discharge vessel spacing constant An excimer lamp device provided with a regulating means.
[0026]
The second means is the first means, wherein the restricting means comprises an engaging portion provided in the discharge vessel of each excimer lamp and a connecting member for connecting the engaging portions. It is characterized by.
[0027]
A third means is the first means, wherein the restricting means comprises: a lamp base attached to an end of an excimer lamp not adjacent to an end of another excimer lamp; and a connecting member for connecting the lamp base. It is configured.
[0028]
The fourth means is the first means, wherein the regulating means is: A fixing member provided at the end of the excimer lamp not adjacent to the end of the other excimer lamp; Penetrates the inside of the inner tube of each excimer lamp. To the fixing member Fixed connecting member And from An excimer lamp device characterized in that it is configured.
[0029]
A fifth means is the first means, wherein the regulating means is formed between an engaging portion provided in the outer tube of each excimer lamp and the outer tube of each excimer lamp, It is comprised from the outer side electrode which connects an engaging part.
[0030]
DETAILED DESCRIPTION OF THE INVENTION
A first embodiment of the present invention will be described with reference to FIG.
FIG. 1A is a diagram showing a configuration of an excimer lamp device in which two excimer lamps according to the invention of the present embodiment are arranged on the same axis, and FIG. 1B is an excimer lamp shown in FIG. It is sectional drawing seen from the cross section A-A.
[0031]
In the figure, 1 is an excimer lamp, 2 is an outer tube made of a quartz glass tube, 3 is an inner tube made of a quartz glass tube, 4 is made of a seamless mesh electrode, and has a stretchability. The outer electrode 5 is arranged on the outer surface of the tube 2 with good adhesion, 5 is made of a metal material such as stainless steel and aluminum, the inner electrode is arranged on the inner surface of the inner tube 3 with good adhesion, and 6 is an excimer lamp 1. A joint 7 between them constitutes a part of a restricting means for restricting the movement of both excimer lamps 1 in the tube axis direction, and is an engaging portion formed by utilizing the remaining portion of the exhaust pipe of the outer tube 2 and the like. , 8 is a plate-like connecting member that constitutes a part of the restricting means and is made of a material such as aluminum or stainless steel that is engaged with the protrusion 7.
[0032]
The inner electrode 5 is disposed on the inner surface of the inner tube 3 with good adhesion. However, the inner electrode 5 is not necessarily disposed with good adhesion. May be partially separated and a slight gap may be left. Even if it comprises in this way, when applying a high frequency voltage and lighting it, an electrical loss hardly arises. Therefore, the inner electrode 5 may be formed such that a metal plate is bent into an arbitrary shape and a part thereof is in contact with the inner tube 3, or a wire mesh is bent into a C-shaped cross section to enter the inner space of the inner tube 3. It may be inserted.
[0033]
Further, the outer tube 2 and the inner tube 3 may be a dielectric such as sapphire or alumina other than quartz glass, and may have a thermal expansion coefficient different from that of the inner electrode 5.
[0034]
Both excimer lamps 1 are composed of a double cylindrical tube in which an outer tube 2 and an inner tube 3 are arranged coaxially, and both ends thereof are closed, and a discharge space is formed by the outer tube 2 and the inner tube 3. . The discharge space is filled with a discharge gas composed of a rare gas such as xenon gas for emitting excimer light by discharge, a mixed gas of rare gas, a mixed gas containing a rare gas and a halogen gas or mercury, or the like. .
[0035]
The connecting member 8 is engaged by inserting the protrusion 7 into the hole formed in the connecting member 8, but in this state, the excimer lamp 1 is easily detached when moved in the direction perpendicular to the axis. In addition, it is fixed to the outer surface of the outer tube 2 with a thin wire or the like.
[0036]
As each excimer lamp 1, for example, the total length of the lamp is 800 mm, the outer diameter of the outer tube 2 is 35 mm, the outer diameter of the inner tube 3 is 16 mm, and the thicknesses of the outer tube 2 and the inner tube 3 are 1.5 mm and 1 mm, respectively. A thing was used.
[0037]
As shown in the figure, according to the invention of this embodiment, since the projection 7 is engaged with the hole of the connecting member 8, both the inner electrodes 5 are connected to the joint 6 side by repeatedly turning on and off the lamp. As a result, both discharge containers collide, and as a result, even if both discharge containers try to expand from the joint 6 toward both ends of the lamp, the distance between the discharge containers is restricted, and the distance is constant. Will be held. Therefore, both excimer lamps can keep the same illuminance distribution until the end of their lifetime.
[0038]
A second embodiment of the present invention will be described with reference to FIG.
FIG. 2A is a diagram showing a configuration of an excimer lamp device in which two excimer lamps according to the present invention are arranged on the same axis, and FIG. 2B is an excimer lamp shown in FIG. FIG. 2C is an enlarged view of the restricting means shown in FIG. 2A, and FIG. 2D is a different form from the restricting means shown in FIG. 2C. It is an enlarged view of the control means which has.
[0039]
In these drawings, reference numeral 9 denotes a part of a restricting means for restricting movement of both excimer lamps 1 in the tube axis direction, and FIG. 2 (c) as an engaging portion formed outside the outer tube 2. 2 or a substantially L-shaped hook 10 shown in FIG. 2 (d) constitutes a part of the regulating means, and is passed through the ring-shaped hook 9 or engaged with the substantially L-shaped hook 9. It is a wire as a connecting member made of a material such as nickel, stainless steel, gold, or platinum. Here, the hook 9 may have any shape other than the substantially L-shaped shape as long as it has a hook function.
Other configurations correspond to the configurations of the same symbols shown in FIG.
[0040]
As shown in the figure, according to the invention of the present embodiment, the wire 10 is fixed through the ring-shaped hook 9 or engaged with the substantially L-shaped hook 9 and fixed. By repeating the above, both inner electrodes 5 move toward the joint 6 and both collide. As a result, even if both discharge vessels try to spread from the joint 6 toward both ends of the lamp, The container is restricted from expanding its interval, and the interval is kept constant. Therefore, both excimer lamps can keep the same illuminance distribution until the end of their lifetime.
[0041]
A third embodiment of the present invention will be described with reference to FIG.
FIG. 3 is a diagram showing a configuration of an excimer lamp device in which two excimer lamps according to the invention of the present embodiment are arranged on the same axis.
[0042]
In the same figure, 11 constitutes a part of restricting means for restricting the movement of both excimer lamps 1 in the tube axis direction, a recess as an engaging portion provided on the inner surface of the inner tube 3, and 12 is the restriction A substantially U-shaped member having a heat resistance made of a material such as rigid and thick stainless steel or steel material or Inconel or SUS631, which constitutes a part of the means, and 13 is a substantially U-shaped member 12. Is a pressing member provided between the substantially U-shaped member 12 and the inner electrode 5 so as not to be removed from the recess 11.
Other configurations correspond to the configurations of the same symbols shown in FIG.
[0043]
As shown in the figure, according to the invention of the present embodiment, the locking portions at both ends of the substantially U-shaped member 12 are engaged with the recess 11, and the presser member 13 so that the locking portion does not come out of the recess 11. Since the lamps are repeatedly turned on and off, both the inner electrodes 5 move toward the joint 6 and collide with each other. As a result, both discharge containers are discharged from the joint 6 to the lamp. Even if it is going to expand toward both ends, the interval between the two discharge vessels is restricted from expanding, and the interval is kept constant. Therefore, both excimer lamps can keep the same illuminance distribution until the end of their lifetime.
[0044]
A fourth embodiment of the present invention will be described with reference to FIGS.
4 and 5 are diagrams showing the configuration of an excimer lamp device in which two excimer lamps according to the invention of the present embodiment are arranged on the same axis.
[0045]
In these drawings, 14 constitutes a part of a restricting means for restricting movement of both excimer lamps 1 in the tube axis direction, a shaft as a connecting member penetrating the inner electrode 5 of both excimer lamps, and 15 a metal A telescopic member made of a spring or the like, or a spacer made of Teflon (registered trademark) resistant to light and heat, 16 constitutes a part of the restricting means, and the shaft 14 is connected to both excimer lamps 1 via the spacer 15. A fixing member 17 is fixed at both ends, and 17 is a spacer.
[0046]
Here, the shaft 14 is preferably made of a material having a small coefficient of thermal expansion, such as 31Ni-5Co-Fe alloy (trade name: Super Invar) or 36Ni-Fe alloy (trade name: Invar), which is a ceramic or low expansion alloy such as alumina. Etc. are desirable. In addition, when the shaft 14 is made of a material having a high coefficient of thermal expansion, the temperature of the shaft 14 itself is lowered by flowing a refrigerant such as gas or water inside the shaft 14 or by the shaft 14 also serving as a heat pipe. It is possible to suppress the expansion of the lamp interval and to cool the lamp itself.
Other configurations correspond to the configurations of the same symbols shown in FIG.
[0047]
As shown in FIGS. 4 and 5, according to the invention of this embodiment, both ends of the excimer lamps 1 are fixed by the fixing members 16 at both ends of the shaft 14 via the spacers 15. By repeating the above, both inner electrodes 5 move toward the joint 6 and both collide. As a result, even if both discharge vessels try to spread from the joint 6 toward both ends of the lamp, The container is restricted from expanding its interval, and the interval is kept constant. Therefore, both excimer lamps can keep the same illuminance distribution until the end of their lifetime.
[0048]
In addition, since the shaft 14 is placed inside the inner tube 3 having a high temperature, there is a problem that the shaft 14 itself is extended. However, the insertion of the spacer 15 can suppress the increase in the lamp interval.
[0049]
Further, as shown in FIG. 4, it is not necessary to provide the spacer 17 between the excimer lamps 1. However, when the spacer 17 is provided as shown in FIG. There is no change in distribution, which is desirable.
[0050]
A fifth embodiment of the present invention will be described with reference to FIG.
FIG. 6A is a diagram showing a configuration of an excimer lamp device in which two excimer lamps according to the invention of the present embodiment are arranged on the same axis, and FIG. 6B is an excimer shown in FIG. It is sectional drawing seen from the cross section CC of the lamp | ramp.
[0051]
In the figure, reference numeral 18 denotes an outer electrode formed between the outer tubes 2 of both excimer lamps, serving as a connecting member as a restricting means for restricting movement of both excimer lamps 1 in the tube axis direction. It consists of one mesh electrode knitted into a cylindrical shape. Other configurations correspond to the configurations of the same symbols shown in FIG.
[0052]
As shown in the figure, according to the invention of the present embodiment, the diameter of the outer electrode 18 is reduced by inserting the mesh outer electrode 18 into the two outer tubes 2 and pulling in the axial direction. Close contact with the outer tube 2. At that time, since the lamp interval was determined and the mesh-like outer electrode 18 was pulled and the protrusions 7 were inserted into the mesh, both the inner electrodes 5 moved toward the joint 6 by repeatedly turning on and off the lamp. As a result, even if both discharge containers collide and both discharge containers try to expand from the joint 6 toward both ends of the lamp, the distance between the discharge containers is restricted and the distance is kept constant. Will be. Therefore, both excimer lamps can keep the same illuminance distribution until the end of their lifetime.
[0053]
Further, according to the invention of this embodiment, the outer electrode 18 is also used as a connecting member of the restricting means, so there is no need to provide a separate member as the connecting member, and there is an advantage that the apparatus can be manufactured at low cost.
[0054]
In this embodiment, the outer electrode is a mesh electrode. However, the outer electrode is not necessarily limited to the mesh electrode, and a thin metal punching metal or the like may be used. In short, two excimer lamps are used. What is necessary is just to fix with one outer side electrode.
[0055]
A sixth embodiment of the present invention will be described with reference to FIG.
FIG. 7A is a diagram showing a configuration of an excimer lamp device in which two excimer lamps according to the invention of the present embodiment are arranged on the same axis, and FIG. 7B is an excimer lamp shown in FIG. 7A. It is sectional drawing seen from the cross section DD.
[0056]
In the figure, reference numeral 19 also serves as a connecting member as a restricting means for restricting the movement of both excimer lamps 1 in the tube axis direction, and is provided for taking out the light coming out on the side opposite to the radiation surface to the radiation surface side. Reflector.
[0057]
Here, the reflecting plate 19 is composed of one aluminum reflecting plate provided in two excimer lamps, and the reflecting plate 19 is provided with holes at predetermined intervals, and the projections 7 are formed in the holes. It is configured to be engaged.
Other configurations correspond to the configurations of the same symbols shown in FIG.
[0058]
As shown in the figure, according to the invention of the present embodiment, since the projection 7 is inserted into the hole of the reflection plate 19 that also serves as a connecting member, both the inner electrodes are turned on by repeatedly turning on and off the lamp. 5 moves toward the joint 6 and collides with each other. As a result, even if both discharge vessels try to spread from the joint 6 toward both ends of the lamp, it is restricted that the distance between the two discharge vessels increases. The interval is kept constant. Therefore, both excimer lamps can keep the same illuminance distribution until the end of their lifetime. The reflector plate 19 may be divided into three or four parts. In short, one of the divided reflectors must always straddle two excimer lamps and be connected to the engaging portions of the respective excimer lamps. It only has to be.
[0059]
A seventh embodiment of the present invention will be described with reference to FIGS.
FIG. 8 and FIG. 9 are diagrams each showing a configuration of an excimer lamp device in which two excimer lamps according to the invention of this embodiment are arranged on the same axis.
[0060]
In these drawings, reference numeral 20 denotes a cooling block that also serves as a connecting member as a restricting means for restricting movement of both excimer lamps 1 in the tube axis direction. The cooling block 20 is provided with holes 201 at predetermined intervals. The projection 201 using the remaining part of the exhaust pipe as the restricting means is engaged with the hole 201. Reference numeral 21 denotes a passage through which cooling water is provided in the cooling block 20. Reference numeral 22 denotes a cooling block that also serves as a connecting member of a restricting means that restricts the movement of both excimer lamps 1 in the tube axis direction. The cooling block 22 is provided with a recess 24 as a restricting means for fitting the lamp base 23. The lamp base 23 is fitted into the recess 24. Reference numeral 23 denotes a lamp base provided at both ends of the two excimer lamps 1, and reference numeral 24 denotes a recess provided in the cooling block 22.
Other configurations correspond to the configurations of the same symbols shown in FIG.
[0061]
According to the invention of the present embodiment, as shown in FIG. 8, the protrusion 7 is inserted into the hole 201 of the cooling block 20 which also serves as the connecting member, and the engaging member is engaged as shown in FIG. Since the lamp base 23 is fitted in the concave portion 24 of the cooling block 22 that also serves as the lamp, by repeatedly turning on and off the lamp, both the inner electrodes 5 move toward the joint 6 side, and the two collide. As a result, even if both the discharge containers are to expand from the joint portion 6 toward both ends of the lamp, the distance between the discharge containers is restricted, and the distance is kept constant. Therefore, both excimer lamps can keep the same illuminance distribution until the end of their lifetime.
[0062]
An eighth embodiment of the present invention will be described with reference to FIG.
FIG. 10 is a diagram showing a configuration of an excimer lamp device in which three excimer lamps according to the invention of the present embodiment are arranged on an axis.
[0063]
As shown in the figure, the excimer lamp device according to the present embodiment is different from the excimer lamp device according to the first embodiment in that two excimer lamps are arranged on the same axis. The difference is that 1 is arranged on the same axis.
[0064]
In the invention of this embodiment as well, the projection 7 is engaged with the hole of the connecting member 8 constituting the restricting means, as in the first embodiment. Even if the inner electrode 5 of the excimer lamp 1 moves toward the joint portion 6 and collides with the inner electrode 5 of the central excimer lamp 1, The discharge vessel is restricted from expanding its interval, and the interval is kept constant. Therefore, each excimer lamp can keep the same illuminance distribution until the end of its life.
[0065]
When three excimer lamps 1 are arranged, the inner electrodes 5 of the excimer lamps 1 on both sides move in the center lamp direction, but the inner electrode 5 of the center excimer lamp 1 moves in which lamp direction. It depends on the installation state of the device.
[0066]
【The invention's effect】
According to the first aspect of the present invention, a hollow cylindrical discharge vessel in which the outer tube and the inner tube having a substantially cylindrical outer shape are coaxially arranged, and both ends of the outer tube and the inner tube are sealed. An excimer lamp device in which a discharge gas for generating excimer molecules is sealed and a plurality of excimer lamps having an outer electrode on the outer surface of the outer tube and an inner electrode on the inner surface of the inner tube are arranged on the tube axis. In the above Adjacent Excimer lamp To keep the discharge vessel spacing constant Since the regulating means is provided, by repeatedly turning on and off the lamp, the inner electrode moves between the excimer lamps and collides with each other. As a result, both discharge vessels expand from both to the both ends of the lamp. Even if it is going to happen, both discharge containers are restricted from expanding the interval, and the interval is kept constant. Therefore, both excimer lamps can keep the same illuminance distribution until the end of their lifetime.
[0067]
According to the second aspect of the present invention, since the restricting means is constituted by the engaging portion provided in the discharge vessel of each excimer lamp and the connecting member for connecting the engaging portion, the restricting means is restricted with a simple configuration. Means can be realized.
[0068]
According to the third aspect of the present invention, the restricting means includes a lamp base attached to an end of an excimer lamp that is not adjacent to an end of another excimer lamp, and a connecting member that connects the lamp base. Therefore, it is possible to easily realize the regulation means using the lamp base.
[0069]
According to the invention of claim 4, the regulating means is A fixing member provided at the end of the excimer lamp not adjacent to the end of the other excimer lamp; Penetrates the inside of the inner tube of each excimer lamp. To the fixing member Fixed connecting member And from Since it comprised, the control means can be implement | achieved using the internal space of the inner side pipe | tube of an excimer lamp.
[0070]
According to the invention described in claim 5, the restricting means is formed between the engaging portion provided in the outer tube of each excimer lamp and the outer tube of each of the excimer lamps, and the engaging portion is Since it comprised from the outer electrode to connect, an outer electrode can be used as a control means.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of an excimer lamp device in which two excimer lamps according to the invention of the first embodiment are arranged on the same axis, and a cross-sectional view taken along a section AA of the excimer lamp.
FIG. 2 is a configuration diagram of an excimer lamp device in which two excimer lamps according to the invention of the second embodiment are arranged on the same axis, a cross-sectional view of a cross section BB of the excimer lamp, and an enlarged view of a regulating means. is there.
FIG. 3 is a configuration diagram of an excimer lamp device in which two excimer lamps according to the invention of the third embodiment are arranged on the same axis.
FIG. 4 is a configuration diagram of an excimer lamp device in which two excimer lamps according to the invention of the fourth embodiment are arranged on the same axis.
FIG. 5 is a configuration diagram of an excimer lamp device in which two excimer lamps according to the invention of the fourth embodiment are arranged on the same axis.
FIG. 6 is a configuration diagram of an excimer lamp device in which two excimer lamps according to the invention of the fifth embodiment are arranged on the same axis, and a sectional view taken along a section CC of the excimer lamp.
FIG. 7 is a configuration diagram of an excimer lamp device in which two excimer lamps according to the invention of the sixth embodiment are arranged on the same axis, and a cross-sectional view taken along a section DD of the excimer lamp.
FIG. 8 is a configuration diagram of an excimer lamp device in which two excimer lamps according to the invention of the seventh embodiment are arranged on the same axis.
FIG. 9 is a configuration diagram of an excimer lamp device in which two excimer lamps according to the invention of the seventh embodiment are arranged on the same axis.
FIG. 10 is a configuration diagram of an excimer lamp device in which three excimer lamps according to the invention of the eighth embodiment are arranged on the same axis.
FIG. 11 is a front sectional view showing an example of an excimer lamp according to the prior art and a side sectional view showing an example of an inner electrode provided on an inner tube of the excimer lamp.
FIG. 12 is a configuration diagram of an excimer lamp device in which an outer electrode and an inner electrode are connected by a connecting member between two excimer lamps, and power is supplied from one place, and in the tube axis direction when the lamp is lit It is a figure which shows the temperature distribution of an inner side electrode.
FIG. 13 is a configuration diagram of an excimer lamp device incorporating two excimer lamps, and a cross-sectional view of the excimer lamp at a section XX and a section YY.
[Explanation of symbols]
1 Excimer lamp
2 outer tube
3 Inner pipe
4 outer electrode
5 Inner electrode
6 joints
7 Protrusions
8 connecting members
9 Hook
10 wires
11 depression
12 Substantially U-shaped member
13 Presser member
14 Shaft
15 Spacer
16 Fixing member
17 Spacer
18 outer electrode
19 Reflector
20 Cooling block
21 passage
22 Cooling block
23 Lamp base
24 recess

Claims (5)

A discharge gas for generating excimer molecules in a hollow cylindrical discharge vessel in which an outer tube and an inner tube having a substantially cylindrical outer shape are coaxially arranged and both ends of the outer tube and the inner tube are sealed. In an excimer lamp device in which a plurality of excimer lamps are disposed on a tube axis, and are provided with an outer electrode on the outer surface of the outer tube and an inner electrode on the inner surface of the inner tube.
An excimer lamp device comprising a regulating means for maintaining a constant interval between discharge vessels of adjacent excimer lamps.   2. The excimer lamp according to claim 1, wherein the restricting unit includes an engaging portion provided in the discharge vessel of each of the excimer lamps, and a connecting member that connects the engaging portions. apparatus.   2. The restricting means comprises a lamp base attached to an end of an excimer lamp not adjacent to an end of another excimer lamp, and a connecting member for connecting the lamp base. The excimer lamp device described in 1. The restricting means includes a fixing member provided at an end of an excimer lamp that is not adjacent to an end of another excimer lamp, and a connecting member that penetrates the inside of the inner tube of each excimer lamp and is fixed to the fixing member. by being composed of an excimer lamp apparatus according to claim 1, wherein the.   The restricting means includes an engaging portion provided on the outer tube of each excimer lamp, and an outer electrode formed between the outer tubes of each excimer lamp and connecting the engaging portions. The excimer lamp device according to claim 1, wherein the excimer lamp device is provided.

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