JP2006210726A - プラズマ処理方法およびプラズマ処理装置 - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
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- A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
- A47J37/00—Baking; Roasting; Grilling; Frying
- A47J37/04—Roasting apparatus with movably-mounted food supports or with movable heating implements; Spits
- A47J37/041—Roasting apparatus with movably-mounted food supports or with movable heating implements; Spits with food supports rotating about a horizontal axis
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
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- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
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- A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
- A47J37/00—Baking; Roasting; Grilling; Frying
- A47J37/06—Roasters; Grills; Sandwich grills
- A47J37/07—Roasting devices for outdoor use; Barbecues
- A47J37/0786—Accessories
- A47J2037/0795—Adjustable food supports, e.g. for height adjustment
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- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
- A47J37/00—Baking; Roasting; Grilling; Frying
- A47J37/06—Roasters; Grills; Sandwich grills
- A47J37/07—Roasting devices for outdoor use; Barbecues
- A47J37/0704—Roasting devices for outdoor use; Barbecues with horizontal fire box
- A47J37/0713—Roasting devices for outdoor use; Barbecues with horizontal fire box with gas burners
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- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
- A47J37/00—Baking; Roasting; Grilling; Frying
- A47J37/06—Roasters; Grills; Sandwich grills
- A47J37/07—Roasting devices for outdoor use; Barbecues
- A47J37/0745—Roasting devices for outdoor use; Barbecues with motor-driven food supports
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- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47J—KITCHEN EQUIPMENT; COFFEE MILLS; SPICE MILLS; APPARATUS FOR MAKING BEVERAGES
- A47J37/00—Baking; Roasting; Grilling; Frying
- A47J37/06—Roasters; Grills; Sandwich grills
- A47J37/07—Roasting devices for outdoor use; Barbecues
- A47J37/0786—Accessories
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Abstract
【解決手段】 真空室110内にプラズマ106を発生させる高周波源101と、試料107に高周波バイアス電力を印加する高周波源115と、静電吸着電極114を有する試料台108と、静電吸着電圧を前記電極に印加する直流電源113とを有するプラズマ処理装置において、プラズマ電位の上昇を抑制するために、静電吸着電圧を高周波バイアス電力のピークトゥーピーク電圧の4分の1から2分の1の電位分負側に移行する制御する制御手段を備える。
【選択図】 図1
Description
Claims (14)
- 真空室内にプラズマを発生させる第1の高周波源と、試料に高周波バイアス電力を印加する第2の高周波源と、前記試料を静電吸着させる静電吸着電極を有する試料台と、静電吸着電圧を前記電極に印加する直流電源とを有するプラズマ処理装置のプラズマ処理方法において、
前記プラズマのプラズマ電位の上昇を抑制するために、前記静電吸着電圧を負側に変化させることを特徴とするプラズマ処理方法。 - 請求項1記載のプラズマ処理方法において、
静電吸着電圧を前記高周波バイアス電力のピークトゥーピーク電圧(peak to peak)の4分の1から2分の1の電位分負側に移行することを特徴とするプラズマ処理方法。 - 請求項2記載のプラズマ処理方法において、
前記静電吸着電圧の移行を、前記高周波バイアス電力のピークトゥーピーク電圧のモニタによる結果、または移行電圧のレシピ設定により行うことを特徴するプラズマ処理方法。 - 請求項1ないし請求項3のいずれか1項記載のプラズマ処理方法において、
試料台に配置した静電吸着電極は、モノポール方式またはダイポール方式のいずれかであることを特徴とするプラズマ処理方法。 - 請求項4項記載のプラズマ処理方法において、
静電吸着電極がダイポール方式であるときに、静電吸着電圧を双極ともにマイナス側に50〜500Vずらすことを特徴とするプラズマ処理方法。 - 請求項1記載のプラズマ処理方法において、
プラズマ処理装置内のプラズマを取り囲む面を絶縁性部材で取り囲んだことを特徴とするプラズマ処理方法。 - 請求項6記載のプラズマ処理方法において、
プラズマ処理装置内のプラズマを取り囲む面を絶縁性部材と一部導電性部材で取り囲んだことを特徴とするプラズマ処理方法。 - 真空室内にプラズマを発生させる第1の高周波源と、試料に高周波バイアス電力を印加する第2の高周波源と、前記試料を静電吸着させる静電吸着電極を有する試料台と、静電吸着電圧を前記電極に印加する直流電源とを有するプラズマ処理装置において、
前記プラズマのプラズマ電位の上昇を抑制するために、前記静電吸着電圧を負側に変化させる制御手段を備えることを特徴とするプラズマ処理装置。 - 請求項8記載のプラズマ処理装置において、
前記制御手段が、静電吸着電圧を前記高周波バイアス電力のピークトゥーピーク電圧(peak to peak)の4分の1から2分の1の電位分負側に移行するよう制御する手段であることを特徴とするプラズマ処理装置。 - 請求項9記載のプラズマ処理装置において、
前記制御手段が、前記静電吸着電圧の移行を、前記高周波バイアス電力のピークトゥーピーク電圧のモニタによる結果、または移行電圧のレシピ設定により行う手段であることを特徴するプラズマ処理装置。 - 請求項8ないし請求項10のいずれか1項記載のプラズマ処理装置において、
前記静電吸着電極は、モノポール方式またはダイポール方式のいずれかであることを特徴とするプラズマ処理装置。 - 請求項11項記載のプラズマ処理装置において、
前記制御手段が、静電吸着電極がダイポール方式であるときに、静電吸着電圧を双極ともにマイナス側に50〜500Vずらすように制御する手段であることを特徴とするプラズマ処理装置。 - 請求項8記載のプラズマ処理装置において、
プラズマ処理装置内のプラズマを取り囲む面を絶縁性部材で取り囲んだことを特徴とするプラズマ処理装置。 - 請求項13記載のプラズマ処理装置において、
プラズマ処理装置内のプラズマを取り囲む面を絶縁性部材と一部導電性部材で取り囲んだことを特徴とするプラズマ処理装置。
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JP2005022112A JP4468194B2 (ja) | 2005-01-28 | 2005-01-28 | プラズマ処理方法およびプラズマ処理装置 |
TW094105872A TWI290345B (en) | 2005-01-28 | 2005-02-25 | Plasma processing method and plasma processing apparatus |
KR1020050016720A KR100757528B1 (ko) | 2005-01-28 | 2005-02-28 | 플라즈마처리방법 및 플라즈마처리장치 |
US11/069,551 US7224568B2 (en) | 2005-01-28 | 2005-03-02 | Plasma processing method and plasma processing apparatus |
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Cited By (9)
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JP2007073309A (ja) * | 2005-09-06 | 2007-03-22 | Nec Electronics Corp | プラズマ処理装置およびその異常放電抑止方法 |
JP2010010236A (ja) * | 2008-06-25 | 2010-01-14 | Hitachi High-Technologies Corp | プラズマ処理装置及びプラズマ処理方法 |
JP2011187881A (ja) * | 2010-03-11 | 2011-09-22 | Hitachi High-Technologies Corp | プラズマ処理装置および方法 |
JP2011530148A (ja) * | 2008-08-07 | 2011-12-15 | ハークー−ディエレクトリック ゲーエムベーハー | マイクロ波プラズマ中で誘電体層を製造する装置および方法 |
US9063356B2 (en) | 2008-09-05 | 2015-06-23 | Japan Display Inc. | Method for repairing display device and apparatus for same |
KR20160086270A (ko) | 2015-01-09 | 2016-07-19 | 가부시키가이샤 히다치 하이테크놀로지즈 | 플라즈마 처리 장치 및 플라즈마 처리 방법 |
JP2016152252A (ja) * | 2015-02-16 | 2016-08-22 | 東京エレクトロン株式会社 | プラズマ処理装置のサセプタの電位を制御する方法 |
US9779919B2 (en) | 2015-01-09 | 2017-10-03 | Hitachi High-Technologies Corporation | Plasma processing apparatus and plasma processing method |
US11049754B2 (en) | 2017-12-26 | 2021-06-29 | Samsung Electronics Co., Ltd. | Method for controlling semiconductor process |
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US9767988B2 (en) | 2010-08-29 | 2017-09-19 | Advanced Energy Industries, Inc. | Method of controlling the switched mode ion energy distribution system |
US11615941B2 (en) | 2009-05-01 | 2023-03-28 | Advanced Energy Industries, Inc. | System, method, and apparatus for controlling ion energy distribution in plasma processing systems |
US9685297B2 (en) | 2012-08-28 | 2017-06-20 | Advanced Energy Industries, Inc. | Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system |
US9875881B2 (en) * | 2013-02-20 | 2018-01-23 | Tokyo Electron Limited | Plasma processing apparatus and plasma processing method |
JP6357436B2 (ja) | 2014-07-25 | 2018-07-11 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
KR101677748B1 (ko) | 2014-10-29 | 2016-11-29 | 삼성전자 주식회사 | 펄스 플라즈마 장치 및 펄스 플라즈마 장치 구동 방법 |
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JP7235761B2 (ja) | 2017-11-17 | 2023-03-08 | エーイーエス グローバル ホールディングス, プライベート リミテッド | プラズマ処理源および基板バイアスの同期パルス化 |
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US5557215A (en) | 1993-05-12 | 1996-09-17 | Tokyo Electron Limited | Self-bias measuring method, apparatus thereof and electrostatic chucking apparatus |
US5737177A (en) * | 1996-10-17 | 1998-04-07 | Applied Materials, Inc. | Apparatus and method for actively controlling the DC potential of a cathode pedestal |
US6367413B1 (en) * | 1999-06-15 | 2002-04-09 | Tokyo Electron Limited | Apparatus for monitoring substrate biasing during plasma processing of a substrate |
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- 2005-01-28 JP JP2005022112A patent/JP4468194B2/ja active Active
- 2005-02-25 TW TW094105872A patent/TWI290345B/zh active
- 2005-02-28 KR KR1020050016720A patent/KR100757528B1/ko active IP Right Grant
- 2005-03-02 US US11/069,551 patent/US7224568B2/en active Active
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2007073309A (ja) * | 2005-09-06 | 2007-03-22 | Nec Electronics Corp | プラズマ処理装置およびその異常放電抑止方法 |
US7974067B2 (en) | 2005-09-06 | 2011-07-05 | Renesas Electronics Corporation | Plasma processing apparatus and method of suppressing abnormal discharge therein |
JP2010010236A (ja) * | 2008-06-25 | 2010-01-14 | Hitachi High-Technologies Corp | プラズマ処理装置及びプラズマ処理方法 |
US9566821B2 (en) | 2008-06-25 | 2017-02-14 | Hitachi High-Technologies Corporation | Plasma processing apparatus and plasma processing method |
US8329054B2 (en) | 2008-06-25 | 2012-12-11 | Hitachi High-Technologies Corporation | Plasma processing apparatus and plasma processing method |
JP2011530148A (ja) * | 2008-08-07 | 2011-12-15 | ハークー−ディエレクトリック ゲーエムベーハー | マイクロ波プラズマ中で誘電体層を製造する装置および方法 |
US9063356B2 (en) | 2008-09-05 | 2015-06-23 | Japan Display Inc. | Method for repairing display device and apparatus for same |
JP2011187881A (ja) * | 2010-03-11 | 2011-09-22 | Hitachi High-Technologies Corp | プラズマ処理装置および方法 |
KR20160086270A (ko) | 2015-01-09 | 2016-07-19 | 가부시키가이샤 히다치 하이테크놀로지즈 | 플라즈마 처리 장치 및 플라즈마 처리 방법 |
US9779919B2 (en) | 2015-01-09 | 2017-10-03 | Hitachi High-Technologies Corporation | Plasma processing apparatus and plasma processing method |
US9887070B2 (en) | 2015-01-09 | 2018-02-06 | Hitachi High-Technologies Corporation | Plasma processing apparatus and plasma processing method |
JP2016152252A (ja) * | 2015-02-16 | 2016-08-22 | 東京エレクトロン株式会社 | プラズマ処理装置のサセプタの電位を制御する方法 |
US11049754B2 (en) | 2017-12-26 | 2021-06-29 | Samsung Electronics Co., Ltd. | Method for controlling semiconductor process |
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US20060171093A1 (en) | 2006-08-03 |
TWI290345B (en) | 2007-11-21 |
JP4468194B2 (ja) | 2010-05-26 |
TW200627540A (en) | 2006-08-01 |
KR100757528B1 (ko) | 2007-09-11 |
US7224568B2 (en) | 2007-05-29 |
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