JP2006194899A - ワークピースを光学的に検査するテストヘッド - Google Patents

ワークピースを光学的に検査するテストヘッド Download PDF

Info

Publication number
JP2006194899A
JP2006194899A JP2006033042A JP2006033042A JP2006194899A JP 2006194899 A JP2006194899 A JP 2006194899A JP 2006033042 A JP2006033042 A JP 2006033042A JP 2006033042 A JP2006033042 A JP 2006033042A JP 2006194899 A JP2006194899 A JP 2006194899A
Authority
JP
Japan
Prior art keywords
light
workpiece
platter
optical paths
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006033042A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006194899A5 (enExample
Inventor
David Treves
トリーヴス ディヴィッド
Thomas O'dell
オーデル トーマス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WD Media LLC
Original Assignee
Komag Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komag Inc filed Critical Komag Inc
Publication of JP2006194899A publication Critical patent/JP2006194899A/ja
Publication of JP2006194899A5 publication Critical patent/JP2006194899A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9506—Optical discs
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2006033042A 2005-01-13 2006-01-13 ワークピースを光学的に検査するテストヘッド Pending JP2006194899A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US64374805P 2005-01-13 2005-01-13
US11/112,172 US7302148B2 (en) 2005-01-13 2005-04-22 Test head for optically inspecting workpieces

Publications (2)

Publication Number Publication Date
JP2006194899A true JP2006194899A (ja) 2006-07-27
JP2006194899A5 JP2006194899A5 (enExample) 2009-04-23

Family

ID=36653326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006033042A Pending JP2006194899A (ja) 2005-01-13 2006-01-13 ワークピースを光学的に検査するテストヘッド

Country Status (3)

Country Link
US (1) US7302148B2 (enExample)
JP (1) JP2006194899A (enExample)
MY (1) MY137696A (enExample)

Families Citing this family (81)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007523321A (ja) * 2003-12-31 2007-08-16 ユニヴァーシティー オブ サウスカロライナ 気体及び他の流体のための薄層多孔光センサ
US20070201136A1 (en) * 2004-09-13 2007-08-30 University Of South Carolina Thin Film Interference Filter and Bootstrap Method for Interference Filter Thin Film Deposition Process Control
US20070166245A1 (en) 2005-11-28 2007-07-19 Leonard Mackles Propellant free foamable toothpaste composition
US8208147B2 (en) 2005-11-28 2012-06-26 Halliburton Energy Services, Inc. Method of high-speed monitoring based on the use of multivariate optical elements
WO2007064575A1 (en) 2005-11-28 2007-06-07 Ometric Corporation Optical analysis system and method for real time multivariate optical computing
US8345234B2 (en) 2005-11-28 2013-01-01 Halliburton Energy Services, Inc. Self calibration methods for optical analysis system
EP2033196A2 (en) 2006-06-26 2009-03-11 University of South Carolina Data validation and classification in optical analysis systems
EP2078187A2 (en) * 2006-11-02 2009-07-15 University of South Carolina Multi-analyte optical computing system
US8213006B2 (en) * 2007-03-30 2012-07-03 Halliburton Energy Services, Inc. Multi-analyte optical computing system
WO2008121715A1 (en) 2007-03-30 2008-10-09 Ometric Corporation In-line process measurement systems and methods
US8184295B2 (en) * 2007-03-30 2012-05-22 Halliburton Energy Services, Inc. Tablet analysis and measurement system
US8283633B2 (en) * 2007-11-30 2012-10-09 Halliburton Energy Services, Inc. Tuning D* with modified thermal detectors
JP5117895B2 (ja) 2008-03-17 2013-01-16 ダブリュディ・メディア・シンガポール・プライベートリミテッド 磁気記録媒体及びその製造方法
JP2009238299A (ja) 2008-03-26 2009-10-15 Hoya Corp 垂直磁気記録媒体および垂直磁気記録媒体の製造方法
JP5453666B2 (ja) 2008-03-30 2014-03-26 ダブリュディ・メディア・シンガポール・プライベートリミテッド 磁気ディスク及びその製造方法
US8212213B2 (en) 2008-04-07 2012-07-03 Halliburton Energy Services, Inc. Chemically-selective detector and methods relating thereto
WO2010038773A1 (ja) 2008-09-30 2010-04-08 Hoya株式会社 磁気ディスク及びその製造方法
US8877359B2 (en) 2008-12-05 2014-11-04 Wd Media (Singapore) Pte. Ltd. Magnetic disk and method for manufacturing same
WO2010116908A1 (ja) 2009-03-28 2010-10-14 Hoya株式会社 磁気ディスク用潤滑剤化合物及び磁気ディスク
JP2010257567A (ja) 2009-03-30 2010-11-11 Wd Media Singapore Pte Ltd 垂直磁気記録媒体およびその製造方法
US20100300884A1 (en) 2009-05-26 2010-12-02 Wd Media, Inc. Electro-deposited passivation coatings for patterned media
US9330685B1 (en) 2009-11-06 2016-05-03 WD Media, LLC Press system for nano-imprinting of recording media with a two step pressing method
US8496466B1 (en) 2009-11-06 2013-07-30 WD Media, LLC Press system with interleaved embossing foil holders for nano-imprinting of recording media
JP5643516B2 (ja) 2010-01-08 2014-12-17 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気記録媒体
JP5574414B2 (ja) 2010-03-29 2014-08-20 ダブリュディ・メディア・シンガポール・プライベートリミテッド 磁気ディスクの評価方法及び磁気ディスクの製造方法
JP5645476B2 (ja) 2010-05-21 2014-12-24 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気ディスク
JP5634749B2 (ja) 2010-05-21 2014-12-03 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気ディスク
JP2011248967A (ja) 2010-05-28 2011-12-08 Wd Media (Singapore) Pte. Ltd 垂直磁気ディスクの製造方法
JP2011248969A (ja) 2010-05-28 2011-12-08 Wd Media (Singapore) Pte. Ltd 垂直磁気ディスク
JP2011248968A (ja) 2010-05-28 2011-12-08 Wd Media (Singapore) Pte. Ltd 垂直磁気ディスク
JP2012009086A (ja) 2010-06-22 2012-01-12 Wd Media (Singapore) Pte. Ltd 垂直磁気記録媒体及びその製造方法
US8889275B1 (en) 2010-08-20 2014-11-18 WD Media, LLC Single layer small grain size FePT:C film for heat assisted magnetic recording media
US8743666B1 (en) 2011-03-08 2014-06-03 Western Digital Technologies, Inc. Energy assisted magnetic recording medium capable of suppressing high DC readback noise
US8711499B1 (en) 2011-03-10 2014-04-29 WD Media, LLC Methods for measuring media performance associated with adjacent track interference
US8491800B1 (en) 2011-03-25 2013-07-23 WD Media, LLC Manufacturing of hard masks for patterning magnetic media
US9028985B2 (en) 2011-03-31 2015-05-12 WD Media, LLC Recording media with multiple exchange coupled magnetic layers
US8565050B1 (en) 2011-12-20 2013-10-22 WD Media, LLC Heat assisted magnetic recording media having moment keeper layer
US9029308B1 (en) 2012-03-28 2015-05-12 WD Media, LLC Low foam media cleaning detergent
US9269480B1 (en) 2012-03-30 2016-02-23 WD Media, LLC Systems and methods for forming magnetic recording media with improved grain columnar growth for energy assisted magnetic recording
US8941950B2 (en) 2012-05-23 2015-01-27 WD Media, LLC Underlayers for heat assisted magnetic recording (HAMR) media
US8993134B2 (en) 2012-06-29 2015-03-31 Western Digital Technologies, Inc. Electrically conductive underlayer to grow FePt granular media with (001) texture on glass substrates
US9034492B1 (en) 2013-01-11 2015-05-19 WD Media, LLC Systems and methods for controlling damping of magnetic media for heat assisted magnetic recording
US10115428B1 (en) 2013-02-15 2018-10-30 Wd Media, Inc. HAMR media structure having an anisotropic thermal barrier layer
US9153268B1 (en) 2013-02-19 2015-10-06 WD Media, LLC Lubricants comprising fluorinated graphene nanoribbons for magnetic recording media structure
US9183867B1 (en) 2013-02-21 2015-11-10 WD Media, LLC Systems and methods for forming implanted capping layers in magnetic media for magnetic recording
US9196283B1 (en) 2013-03-13 2015-11-24 Western Digital (Fremont), Llc Method for providing a magnetic recording transducer using a chemical buffer
US9190094B2 (en) 2013-04-04 2015-11-17 Western Digital (Fremont) Perpendicular recording media with grain isolation initiation layer and exchange breaking layer for signal-to-noise ratio enhancement
US9093122B1 (en) 2013-04-05 2015-07-28 WD Media, LLC Systems and methods for improving accuracy of test measurements involving aggressor tracks written to disks of hard disk drives
US8947987B1 (en) 2013-05-03 2015-02-03 WD Media, LLC Systems and methods for providing capping layers for heat assisted magnetic recording media
US8867322B1 (en) 2013-05-07 2014-10-21 WD Media, LLC Systems and methods for providing thermal barrier bilayers for heat assisted magnetic recording media
US9296082B1 (en) 2013-06-11 2016-03-29 WD Media, LLC Disk buffing apparatus with abrasive tape loading pad having a vibration absorbing layer
US9406330B1 (en) 2013-06-19 2016-08-02 WD Media, LLC Method for HDD disk defect source detection
US9607646B2 (en) 2013-07-30 2017-03-28 WD Media, LLC Hard disk double lubrication layer
US9389135B2 (en) 2013-09-26 2016-07-12 WD Media, LLC Systems and methods for calibrating a load cell of a disk burnishing machine
US9177585B1 (en) 2013-10-23 2015-11-03 WD Media, LLC Magnetic media capable of improving magnetic properties and thermal management for heat-assisted magnetic recording
US9581510B1 (en) 2013-12-16 2017-02-28 Western Digital Technologies, Inc. Sputter chamber pressure gauge with vibration absorber
US9382496B1 (en) 2013-12-19 2016-07-05 Western Digital Technologies, Inc. Lubricants with high thermal stability for heat-assisted magnetic recording
US9824711B1 (en) 2014-02-14 2017-11-21 WD Media, LLC Soft underlayer for heat assisted magnetic recording media
US9447368B1 (en) 2014-02-18 2016-09-20 WD Media, LLC Detergent composition with low foam and high nickel solubility
US9431045B1 (en) 2014-04-25 2016-08-30 WD Media, LLC Magnetic seed layer used with an unbalanced soft underlayer
US9042053B1 (en) 2014-06-24 2015-05-26 WD Media, LLC Thermally stabilized perpendicular magnetic recording medium
US9159350B1 (en) 2014-07-02 2015-10-13 WD Media, LLC High damping cap layer for magnetic recording media
US10054363B2 (en) 2014-08-15 2018-08-21 WD Media, LLC Method and apparatus for cryogenic dynamic cooling
US9082447B1 (en) 2014-09-22 2015-07-14 WD Media, LLC Determining storage media substrate material type
US8995078B1 (en) 2014-09-25 2015-03-31 WD Media, LLC Method of testing a head for contamination
US9227324B1 (en) 2014-09-25 2016-01-05 WD Media, LLC Mandrel for substrate transport system with notch
US9685184B1 (en) 2014-09-25 2017-06-20 WD Media, LLC NiFeX-based seed layer for magnetic recording media
US9449633B1 (en) 2014-11-06 2016-09-20 WD Media, LLC Smooth structures for heat-assisted magnetic recording media
US9818442B2 (en) 2014-12-01 2017-11-14 WD Media, LLC Magnetic media having improved magnetic grain size distribution and intergranular segregation
US9401300B1 (en) 2014-12-18 2016-07-26 WD Media, LLC Media substrate gripper including a plurality of snap-fit fingers
US9218850B1 (en) 2014-12-23 2015-12-22 WD Media, LLC Exchange break layer for heat-assisted magnetic recording media
US9257134B1 (en) 2014-12-24 2016-02-09 Western Digital Technologies, Inc. Allowing fast data zone switches on data storage devices
US9990940B1 (en) 2014-12-30 2018-06-05 WD Media, LLC Seed structure for perpendicular magnetic recording media
US9280998B1 (en) 2015-03-30 2016-03-08 WD Media, LLC Acidic post-sputter wash for magnetic recording media
US9822441B2 (en) 2015-03-31 2017-11-21 WD Media, LLC Iridium underlayer for heat assisted magnetic recording media
US9275669B1 (en) 2015-03-31 2016-03-01 WD Media, LLC TbFeCo in PMR media for SNR improvement
US11074934B1 (en) 2015-09-25 2021-07-27 Western Digital Technologies, Inc. Heat assisted magnetic recording (HAMR) media with Curie temperature reduction layer
US10236026B1 (en) 2015-11-06 2019-03-19 WD Media, LLC Thermal barrier layers and seed layers for control of thermal and structural properties of HAMR media
US9406329B1 (en) 2015-11-30 2016-08-02 WD Media, LLC HAMR media structure with intermediate layer underlying a magnetic recording layer having multiple sublayers
US10121506B1 (en) 2015-12-29 2018-11-06 WD Media, LLC Magnetic-recording medium including a carbon overcoat implanted with nitrogen and hydrogen
KR20240091384A (ko) * 2022-12-13 2024-06-21 삼성디스플레이 주식회사 검사 장치 및 검사 방법

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6367549A (ja) * 1986-09-10 1988-03-26 Pioneer Electronic Corp 光ディスク用レジスト原盤の欠陥検査及び膜厚測定装置
JPH07286967A (ja) * 1994-04-15 1995-10-31 Sony Corp 光ディスクの検査方法と検査装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3089484A (en) * 1961-01-26 1963-05-14 American Cystoscope Makers Inc Flexible optical instrument particularly for carrying out surgical procedures
US3335715A (en) * 1964-09-18 1967-08-15 American Optical Corp Fiber optic catheter
US4794265A (en) * 1987-05-08 1988-12-27 Qc Optics, Inc. Surface pit detection system and method
US4794264A (en) * 1987-05-08 1988-12-27 Qc Optics, Inc. Surface defect detection and confirmation system and method
US5637863A (en) * 1994-08-24 1997-06-10 Mdt Corporation Surgical light with touchless switch
US5649897A (en) * 1994-11-02 1997-07-22 Terumo Kabushiki Kaisha Endoscope apparatus for compensating for change in polarization state during image transmission
US5677769A (en) * 1995-05-30 1997-10-14 Imra America Optical sensor utilizing rare-earth-doped integrated-optic lasers
WO1997026529A1 (en) * 1996-01-19 1997-07-24 Phase Metrics Surface inspection apparatus and method
US5943130A (en) * 1996-10-21 1999-08-24 Insitec, Inc. In situ sensor for near wafer particle monitoring in semiconductor device manufacturing equipment
US5719840A (en) * 1996-12-30 1998-02-17 Phase Metrics Optical sensor with an elliptical illumination spot
CA2303885A1 (en) * 1997-09-22 1999-04-01 Infineon Technologies Ag Optical system for injecting laser radiation into an optical conductor, and a method for its production
US6548821B1 (en) * 1999-06-21 2003-04-15 Komag, Inc. Method and apparatus for inspecting substrates
US6566674B1 (en) * 1999-06-21 2003-05-20 Komag, Inc. Method and apparatus for inspecting substrates
US7079472B2 (en) * 1999-06-23 2006-07-18 Dphi Acquisitions, Inc. Beamshaper for optical head
US7227817B1 (en) * 1999-12-07 2007-06-05 Dphi Acquisitions, Inc. Low profile optical head
GB0201969D0 (en) * 2002-01-29 2002-03-13 Qinetiq Ltd Integrated optics devices
US6888988B2 (en) * 2003-03-14 2005-05-03 Agilent Technologies, Inc. Small form factor all-polymer optical device with integrated dual beam path based on total internal reflection optical turn
US20050088748A1 (en) * 2003-10-28 2005-04-28 Leupold & Stevens, Inc. Molded baffles for controlling stray light in an optical system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6367549A (ja) * 1986-09-10 1988-03-26 Pioneer Electronic Corp 光ディスク用レジスト原盤の欠陥検査及び膜厚測定装置
JPH07286967A (ja) * 1994-04-15 1995-10-31 Sony Corp 光ディスクの検査方法と検査装置

Also Published As

Publication number Publication date
US20060153492A1 (en) 2006-07-13
US7302148B2 (en) 2007-11-27
MY137696A (en) 2009-02-27

Similar Documents

Publication Publication Date Title
JP2006194899A (ja) ワークピースを光学的に検査するテストヘッド
US7375362B2 (en) Method and apparatus for reducing or eliminating stray light in an optical test head
JP2006215040A (ja) ワークピースを光学的に検査するための円偏光
JP2006220656A (ja) ワークピースを光学的に検査するテストヘッド
JP2006227006A (ja) ワークピース上のレーザスポットを延長するためのレンズを備えた光学的ワークピース検査用テストヘッド
JP2007147583A (ja) ワークピースを光学的に検査するテストヘッド
JP2006194900A (ja) テストヘッドからプロセッサへデータを選択的に供給する方法及び装置
JP2006221790A (ja) ワークピースを光学的に検査するためのロボットシステム
JP3801635B2 (ja) 製品表面の検査システムおよび方法
US5914495A (en) Inspection apparatus for inspecting a defect of an optical disc
US5625451A (en) Methods and apparatus for characterizing a surface
US5159412A (en) Optical measurement device with enhanced sensitivity
US7656519B2 (en) Wafer edge inspection
CN101171506A (zh) 晶片边缘检测
US11988615B2 (en) Region prober optical inspector
JP5263783B2 (ja) 光学特性測定装置及び測定方法
JPH05232035A (ja) 空間フィルタと面構造をモニタするシステム
US12405209B2 (en) Apparatus and method for grazing angle measurement
US6688743B1 (en) Method and apparatus to determine fly height of a recording head
US10648928B1 (en) Scattered radiation optical scanner
KR20010041003A (ko) 레코딩 헤드의 부양 높이를 결정하는 방법 및 장치
JP5282009B2 (ja) 光学式磁気ディスク両面欠陥検査装置及びその方法
JP2845041B2 (ja) パーティクル計数装置
US20070242267A1 (en) Optical Focusing Devices
JPS5870109A (ja) 組立精度測定装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090113

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090113

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090310

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110112

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110117

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20110808