JP2006157046A5 - - Google Patents

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Publication number
JP2006157046A5
JP2006157046A5 JP2006038853A JP2006038853A JP2006157046A5 JP 2006157046 A5 JP2006157046 A5 JP 2006157046A5 JP 2006038853 A JP2006038853 A JP 2006038853A JP 2006038853 A JP2006038853 A JP 2006038853A JP 2006157046 A5 JP2006157046 A5 JP 2006157046A5
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JP
Japan
Prior art keywords
pixel
tft
semiconductor device
gate insulating
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006038853A
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English (en)
Japanese (ja)
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JP2006157046A (ja
JP4860293B2 (ja
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Publication date
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Priority to JP2006038853A priority Critical patent/JP4860293B2/ja
Priority claimed from JP2006038853A external-priority patent/JP4860293B2/ja
Publication of JP2006157046A publication Critical patent/JP2006157046A/ja
Publication of JP2006157046A5 publication Critical patent/JP2006157046A5/ja
Application granted granted Critical
Publication of JP4860293B2 publication Critical patent/JP4860293B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2006038853A 1999-02-12 2006-02-16 半導体装置の作製方法 Expired - Fee Related JP4860293B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006038853A JP4860293B2 (ja) 1999-02-12 2006-02-16 半導体装置の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP3366799 1999-02-12
JP1999033667 1999-02-12
JP2006038853A JP4860293B2 (ja) 1999-02-12 2006-02-16 半導体装置の作製方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2000032888A Division JP4372939B2 (ja) 1999-02-12 2000-02-10 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JP2006157046A JP2006157046A (ja) 2006-06-15
JP2006157046A5 true JP2006157046A5 (https=) 2009-10-22
JP4860293B2 JP4860293B2 (ja) 2012-01-25

Family

ID=36634857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006038853A Expired - Fee Related JP4860293B2 (ja) 1999-02-12 2006-02-16 半導体装置の作製方法

Country Status (1)

Country Link
JP (1) JP4860293B2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4993292B2 (ja) * 2007-07-18 2012-08-08 カシオ計算機株式会社 表示パネル及びその製造方法
US7977678B2 (en) * 2007-12-21 2011-07-12 Semiconductor Energy Laboratory Co., Ltd. Semiconductor display device
TWI611567B (zh) 2013-02-27 2018-01-11 半導體能源研究所股份有限公司 半導體裝置、驅動電路及顯示裝置
KR102703645B1 (ko) * 2018-10-22 2024-09-06 엘지디스플레이 주식회사 중첩된 박막 트랜지스터들을 포함하는 표시장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2800956B2 (ja) * 1992-03-10 1998-09-21 シャープ株式会社 アクティブマトリクス基板
JP2924506B2 (ja) * 1992-10-27 1999-07-26 日本電気株式会社 アクティブマトリックス型液晶表示装置の画素構造
JP3212060B2 (ja) * 1993-09-20 2001-09-25 株式会社半導体エネルギー研究所 半導体装置およびその作製方法
JP3267011B2 (ja) * 1993-11-04 2002-03-18 セイコーエプソン株式会社 液晶表示装置
JPH09171196A (ja) * 1995-10-16 1997-06-30 Sharp Corp 液晶表示装置
JPH1056184A (ja) * 1996-06-04 1998-02-24 Semiconductor Energy Lab Co Ltd 半導体集積回路およびその作製方法
JP4401448B2 (ja) * 1997-02-24 2010-01-20 株式会社半導体エネルギー研究所 半導体装置の作製方法

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