JP2006138802A - Pressure detector and package thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To a package for a pressure detector that is miniaturized while the detection precision of pressure is improved. <P>SOLUTION: The package for the pressure detector comprises: an insulating substrate 1 that has a mounting section 1a for mounting a semiconductor element 3 and allows a first electrode 7 to be formed on the surface; a diaphragm 2 that has a second electrode 9 that opposes the first one 7 and is arranged at a position opposite to the surface of the insulating substrate 1; a spacer formed between the surface of the insulating substrate 1 and the diaphragm 2; and a projection 12 that is formed around the first electrode 7 on the surface of the insulating substrate 1 and prescribes a region in which the diaphragm 2 is arranged. The first electrode 7 and the second electrode 9 are metallized layers or thin-film metal layers whose surfaces have been polished. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a pressure detection device package and a pressure detection device used in a pressure detection device for detecting pressure.

  Conventionally, a capacitance type pressure detection device is known as a pressure detection device for detecting pressure. As described in Patent Document 1 below, a package used in this capacitance type pressure detection device includes an insulating base having a mounting portion on which a semiconductor element is mounted, and a static electricity formed on the surface of the insulating base. A first electrode for forming a capacitance, a diaphragm joined in a flexible state to the surface of an insulating substrate, and a capacitor for forming a capacitance deposited on the surface of the diaphragm so as to face the first electrode The second electrode. In order to form a capacitance by the first electrode and the second electrode, it is necessary to provide a predetermined interval between these electrodes, and a spacer is provided between the diaphragm and the insulating base.

The first electrode of this pressure detection device package is made of metal powder metallization such as tungsten, molybdenum, copper, silver, etc., and an appropriate organic binder, solvent, plasticizer, and dispersant are added to and mixed with metal powder such as tungsten. The metallized paste obtained in this way was printed on a ceramic green sheet for an insulating substrate by screen printing and baked to form on the surface of the insulating substrate. Similarly, the second electrode is made of metal powder metallization such as tungsten, molybdenum, copper, and silver, and is obtained by adding and mixing an appropriate organic binder, solvent, plasticizer, and dispersant to metal powder such as tungsten. The metallized paste was formed on the surface of the diaphragm by printing and applying to a ceramic green sheet for the diaphragm by screen printing and firing.
JP 2001-356064 A

  In order to improve the pressure detection sensitivity while reducing the area of the first electrode and the second electrode in order to reduce the size of the package for the pressure detection device, the interval between the first electrode and the second electrode is set to be small. It needs to be narrowed. In order to reduce the gap between the first electrode and the second electrode and reduce variations in pressure detection accuracy, it is necessary to increase the flatness of the surfaces of these electrodes. However, in the conventional package for a pressure detection device, since the first electrode and the second electrode are formed by the screen printing method, the flatness of the surface is made high, and the first electrode and the second electrode It is difficult to make the distance between the first electrode and the second electrode uniform over the entire surface, and the capacitance generated between the first electrode and the second electrode varies, and the detection accuracy tends to decrease. Had.

  In addition, when the diaphragm is subjected to the action of centrifugal force, the diaphragm is easily displaced by the mass of the second electrode and the diaphragm, and the distance between the first electrode and the second electrode changes to change the first electrode. There is a problem in that the detection accuracy of the external pressure may be reduced by affecting the capacitance generated between the electrode and the second electrode.

  The capacitance detected by the first electrode and the second electrode is the size of the region where the first electrode and the second electrode are formed, along with the distance between the first electrode and the second electrode. When the pressure is applied to this package, the central part of the diaphragm changes greatly, but the change of the outer peripheral part is extremely small. Therefore, one of the first electrode and the second electrode is made to be less than the other. It is conceivable that the pressure detection sensitivity is increased by forming a small pressure. However, such a package greatly affects the positional accuracy of the first electrode and the second electrode. If a positional shift occurs between the insulating base and the diaphragm, the pressure detection sensitivity decreases and varies. It had the problem of end. In particular, when the package for the pressure detection device is reduced in size, the formation region of the first electrode and the second electrode is reduced, and the first electrode and the second electrode are caused by a misalignment between the insulating base and the diaphragm. This has the problem that the influence on the positional accuracy tends to be large, and the pressure detection sensitivity decreases and varies.

  The present invention has been devised in view of such conventional problems, and an object of the present invention is to provide a package for a pressure detection device that is miniaturized while improving pressure detection accuracy.

  The package for a pressure detection device of the present invention has a mounting portion on which a semiconductor element is mounted, and has an insulating base having a first electrode formed on the surface, and a second electrode facing the first electrode. A diaphragm disposed at a position facing the surface of the insulating substrate; a spacer formed between the surface of the insulating substrate and the diaphragm; and a first electrode on the surface of the insulating substrate. And the first electrode and the second electrode are metallized layers or thin film metal layers whose surfaces are polished.

  The package for a pressure detection device according to the present invention is preferably characterized in that the tip of the protrusion is formed so as to protrude upward from the diaphragm.

  The package for a pressure detection device of the present invention is preferably characterized in that the protrusion is formed in a frame shape.

  The package for a pressure detection device of the present invention is preferably characterized in that the protrusion has a straight portion in plan view.

  The package for a pressure detection device of the present invention is preferably characterized in that the diaphragm and the protrusion are made of ceramics.

  In the pressure sensing device package according to the present invention, preferably, the spacer is formed of a first metallized layer formed on the insulating base, a second metallized layer formed on the diaphragm, the first metallized layer, and the second metallized layer. And a plating layer formed between the metallized layers.

  The pressure detection device of the present invention includes the pressure detection device package of the present invention and a semiconductor element that is mounted on the mounting portion of the insulating base and detects the pressure applied to the diaphragm.

  A package for a pressure detection device according to the present invention includes a protrusion that is formed around a first electrode on a surface of an insulating base and defines a region in which a diaphragm is disposed. The first electrode and the second electrode are The metallized layer or the thin film metal layer whose surface is polished can reduce the size while improving the pressure detection accuracy.

  That is, in the package for a pressure detection device according to the present invention, the first electrode and the second electrode are the metallized layer whose surface is polished or the metal layer deposited by the thin film forming method. The thickness variation of each of the second electrode and the second electrode can be reduced, the distance between the first electrode and the second electrode can be made uniform over the entire surface, and the detection accuracy of the external pressure can be improved. .

  Further, by forming the second electrode thinly on the diaphragm, the mass of the second electrode applied to the diaphragm is reduced, and the displacement of the diaphragm due to the mass of the second electrode is suppressed to be small when subjected to the action of centrifugal force. It is possible to improve the pressure detection accuracy.

  Further, by forming the second electrode thinly on the diaphragm, the mass of the second electrode applied to the diaphragm can be reduced, and the influence of the second electrode on the deformation of the diaphragm can be reduced. It becomes easy to form a diaphragm as a thin and flat thing. Therefore, by making the diaphragm more flexible when an external pressure is applied, the external pressure can be detected with high sensitivity, and the area of the diaphragm and the second electrode for obtaining a required capacity can be reduced. It is possible to reduce the influence of centrifugal acceleration by further reducing the mass of the diaphragm and the second electrode.

  In addition, by providing a protrusion that is formed around the first electrode on the surface of the insulating base and defines a region in which the diaphragm is disposed, the protrusion is provided when the diaphragm is disposed at a position facing the surface of the insulating base. The position of the diaphragm can be suppressed by using the portion for positioning the diaphragm and the insulating base, and the diaphragm can be accurately placed at a predetermined position on the surface of the insulating base. The first electrode and the second electrode The positional accuracy can be made high. Therefore, the detection accuracy of the external pressure can be improved and the variation in detection accuracy can be reduced.

  In addition, the pressure detection device package of the present invention is preferably formed such that the tip of the protruding portion protrudes upward from the diaphragm, thereby preventing an impact from being applied to the diaphragm during handling of the package. Can do. In other words, the pressure detection device package of the present invention is arranged such that the upper surface of the diaphragm is lower than the protruding portion, and the device contacts the outer periphery or corner of the diaphragm when handling the pressure detection device package. It is possible to prevent the diaphragm from cracking due to contact.

  In the pressure detection device package of the present invention, preferably, the protrusion is formed in a frame shape, so that the diaphragm can be protected over the entire circumference. When the pressure detection device package is handled, the diaphragm It is possible to prevent the device from coming into contact with the outer edge or corner of the diaphragm, and to prevent the diaphragm from cracking due to the contact.

  In the pressure detection device package according to the present invention, preferably, since the projection has a straight portion in plan view, when the diaphragm is disposed at a position facing the surface of the insulating base, an image camera or the like Can be used to accurately recognize the position of the protrusion at the straight line portion, and the diaphragm can be accurately arranged at a predetermined position on the surface of the insulating base. Therefore, the external pressure can be detected with high accuracy.

  In the pressure detection device package of the present invention, it is preferable that the diaphragm and the protrusion are made of ceramics, and the diaphragm and the protrusion are rubbed when the diaphragm is disposed at a position facing the surface of the insulating base. It is possible to reduce the possibility that the diaphragm and the protrusions are chipped or scraps are generated when rubbed and the scraps are interposed between the insulating base and the diaphragm. Therefore, it can be set as the package for pressure detectors which can detect an external pressure accurately.

  In the pressure detection device package of the present invention, preferably, the spacer includes a first metallization layer formed on the insulating base, a second metallization layer formed on the diaphragm, the first metallization layer, and the first metallization layer. By forming the plating layer between the two metallized layers, the spacer can be formed thin, and the distance between the first electrode and the second electrode forming the capacitance can be made small. it can. By reducing the distance between the first electrode and the second electrode, the facing area between the first electrode and the second electrode forming a desired capacitance can be reduced, and the diaphragm can be made smaller. In addition, the package for the pressure detection device of the present invention can be further reduced in size, the mass of the diaphragm and the second electrode can be further reduced, and the influence of centrifugal force can be further reduced.

  The pressure detection device of the present invention includes a package for the pressure detection device of the present invention, and a semiconductor element that is mounted on the mounting portion of the insulating base and detects the pressure applied to the diaphragm. It is possible to provide a package for a pressure detection device that is not easily affected and has high sensitivity for detecting external pressure.

  A package for a pressure detection device according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a plan view showing a structure of a first example of an embodiment of a pressure detecting device package according to the present invention, and FIG. 2 is an XX ′ line of the pressure detecting device package shown in FIG. FIG. The package for a pressure detection device according to the present invention is formed between an insulating base 1 having a first electrode 7 formed on the surface, a diaphragm 2 having a second electrode 9, and the insulating base 1 and the diaphragm 2. A spacer 11 and a protrusion 12 formed around the first electrode 7 on the surface of the insulating substrate 1 are provided.

  The insulating substrate 1 is a laminated layer made of an electrically insulating material such as an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, a silicon carbide sintered body, a silicon nitride sintered body, or a glass-ceramic. Is the body. If the insulating base 1 is made of, for example, an aluminum oxide sintered body, it is manufactured as follows. First, a ceramic raw material powder such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide is mixed with an appropriate organic binder, solvent, plasticizer, and dispersant to form a slurry, which is then used by the doctor blade method. Are formed into a sheet shape to obtain a plurality of ceramic green sheets. Thereafter, a green ceramic molded body for the insulating substrate 1 is obtained by subjecting these ceramic green sheets to appropriate punching, laminating, and cutting. Then, the green ceramic body is fired at a temperature of about 1600 ° C., whereby the insulating substrate 1 is manufactured.

  The insulating base 1 has a concave portion 1a for accommodating the semiconductor element 3 formed on one surface (the lower surface in FIG. 2), and functions as a container for accommodating the semiconductor element 3. And the mounting part 1b in which the semiconductor element 3 is mounted is formed in the center part of the bottom face of this recessed part 1a. The semiconductor element 3 is mounted on the mounting portion 1b, and the semiconductor element 3 is covered with a resin sealing material 4 such as an epoxy resin in the recess 1a, whereby the semiconductor element 3 is sealed.

  In this example, the semiconductor element 3 is sealed by being covered with the resin sealing material 4, but a lid made of metal or ceramic is closed on one surface of the insulating base 1 so as to close the recess 1 a. It may be sealed by bonding.

  A plurality of wiring conductors 5 electrically connected to the respective electrodes of the semiconductor element 3 are led out to the mounting portion 1b. The wiring conductor 5 and the respective electrodes of the semiconductor element 3 are connected to a conductive material such as a solder bump. By bonding through the conductive bonding material 6 made of, each electrode of the semiconductor element 3 and each wiring conductor 5 are electrically connected, and the semiconductor element 3 is fixed to the mounting portion 1b. In the example shown in FIG. 1, the electrode of the semiconductor element 3 and the wiring conductor 5 are connected via solder bumps. However, the electrode of the semiconductor element 3 and the wiring conductor 5 are other than bonding wires or the like. The electrical connection means may be used.

  The wiring conductor 5 functions as a conductive path for electrically connecting each electrode of the semiconductor element 3 to the external electric circuit and the first electrode 7 and the second electrode 9, and a part of the wiring conductor 5 is one side of the insulating substrate 1. The other part is electrically connected to the first electrode 7 and the second electrode 9. The other part is electrically connected to the first electrode 7 and the second electrode 9. Then, after each electrode of the semiconductor element 3 is electrically connected to the wiring conductor 5 via a conductive bonding material 6 such as a solder bump and the semiconductor element 3 is sealed with the resin sealing material 4, A portion led to the outer peripheral portion of one surface (the lower surface in FIG. 1) of the insulating base 1 of the wiring conductor 5 is bonded to the wiring conductor (not shown) of the external electric circuit board via a conductive bonding material such as solder. As a result, the semiconductor element 3 housed therein is electrically connected to the external electric circuit.

  Such a wiring conductor 5 is made of metal powder metallization such as tungsten, molybdenum, copper, silver, etc., and is obtained by adding and mixing an appropriate organic binder, solvent, plasticizer, dispersant, etc. to metal powder such as tungsten. The paste is applied in a predetermined pattern to a ceramic green sheet for the insulating substrate 1 by using a conventionally known screen printing method, and this is fired together with a green ceramic molded body for the insulating substrate 1 to synthesize the inside of the insulating substrate 1. In addition, a predetermined pattern is formed on the surface. The exposed surface of the wiring conductor 5 has a thickness so as to prevent the wiring conductor 5 from being oxidatively corroded and to improve the bonding between the wiring conductor 5 and the conductive bonding material 6 such as solder. It is preferable that a nickel plating layer having a thickness of about 1 to 10 μm and a gold plating layer having a thickness of about 0.1 to 3 μm are sequentially deposited.

  The diaphragm 2 is disposed at a position facing the surface of the insulating substrate 1 (in FIG. 1, the upper surface of the insulating substrate 1). The diaphragm 2 is attached so as to form a sealed space with the insulating substrate 1. The diaphragm 2 has a thickness of 0 made of an electrically insulating material such as an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, a silicon nitride sintered body, a silicon carbide sintered body, or a glass ceramic. .01-5 mm flat plate and bends toward the insulating substrate 1 according to external pressure.

  The capacitance type pressure detection device is generally used under a pressure of 80 kPa (pressure detection device for low pressure) to 2000 kPa (pressure detection device for high pressure), and the diaphragm 2 has a thickness thereof. If it is less than 0.01 mm, its mechanical strength becomes small, and when it is applied with a large external pressure of, for example, about 80 kPa, it tends to be damaged. It tends to be unsuitable as a pressure detection diaphragm. Therefore, the thickness of the diaphragm 2 is preferably in the range of 0.01 to 5 mm.

  If such a diaphragm 2 is made of, for example, an aluminum oxide sintered body, it is manufactured as follows. First, a ceramic raw material powder such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide is mixed with a suitable organic binder, solvent, plasticizer, and dispersant to form a slurry, and this is made using a doctor blade method. A ceramic green sheet is obtained by forming into a sheet. Thereafter, the ceramic green sheet is appropriately punched or cut to obtain a green ceramic molded body for the diaphragm 2. And this diaphragm 2 is manufactured by baking this raw ceramic molded object at the temperature of about 1600 degreeC.

  In addition, a second electrode 9 for forming a capacitance is attached to the center of the surface (the lower surface in FIG. 1) which is the inside of the sealed space of the diaphragm 2. The second electrode 9 functions as an electrode for forming a capacitance for the pressure-sensitive element by being disposed so as to face the first electrode 7.

  The first electrode 7 is formed at the center of the other surface (the upper surface in FIG. 1) of the insulating substrate 1. The first electrode 7 is for forming a capacitance for a pressure sensitive element together with a second electrode 9 described later, and is formed in, for example, a circular pattern. Then, the wiring conductor 5a is electrically connected to the first electrode 7, and the electrode of the semiconductor element 3 is connected to the wiring conductor 5a via a conductive bonding material 6 such as a solder bump. The electrode of the semiconductor element 3 and the first electrode 7 are electrically connected.

  Such a first electrode 7 is made of a polished metallized layer or a metal layer deposited by a thin film forming method. If the first electrode 7 is made of, for example, a polished metallized layer, the first electrode 7 is made of metal powder metallization such as tungsten, molybdenum, copper, or silver, and an organic binder, solvent, or plasticizer suitable for metal powder such as tungsten. The metallized paste obtained by adding and mixing the dispersant is printed and applied to the ceramic green sheet for the insulating substrate 1 using a conventionally known screen printing method, and is fired to the center of the upper surface of the insulating substrate 1. A predetermined pattern is formed. And it forms by grind | polishing the surface of the 1st electrode 7 with a surface grinder etc. so that the surface of a metallization layer may become flat. Note that a nickel plating layer having a thickness of about 1 to 10 μm is preferably deposited on the exposed surface of the first electrode 7 in order to prevent the first electrode 7 from being oxidatively corroded.

  If the first electrode 7 is made of a metal layer deposited by a thin film forming method, for example, the surface of the insulating substrate 1 is flattened by a surface grinding machine or the like, and then a metal such as nickel chrome is used. By using a thin film forming method such as a vapor deposition method, a predetermined pattern can be deposited on the center of the upper surface of the insulating substrate 1. A metal film such as gold having a thickness of about 0.01 to 2.0 μm is formed on the exposed surface of the first electrode 7 in order to prevent the first electrode 7 from being oxidized and corroded. May be.

  The second electrode 9 is formed on the surface of the diaphragm 2 facing the insulating substrate 1 (the lower surface in FIG. 1). The second electrode 9 is made of a polished metallized layer or a metal layer deposited by a thin film forming method. If the second electrode 9 is made of, for example, a polished metallized layer, the second electrode 9 is made of metal powder metallization such as tungsten, molybdenum, copper, silver, etc., and an appropriate organic binder, solvent, plasticizer is used for the metal powder such as tungsten. A metallized paste obtained by adding and mixing an agent and a dispersant is applied to a ceramic green sheet for the diaphragm 2 using a conventionally known screen printing method, and is fired to a predetermined central portion on the lower surface of the diaphragm 2 The pattern is formed. Then, the surface of the second electrode 9 is polished by a surface grinding machine or the like so that the surface of the metallization becomes flat. In order to prevent the second electrode 9 from being oxidized and corroded, a nickel plating layer having a thickness of about 1 to 10 μm is preferably applied to the exposed surface of the second electrode 9.

  Further, if the second electrode 9 is made of a metal layer deposited by a thin film forming method, for example, the center of the lower surface of the diaphragm 2 can be obtained by using a thin film forming method such as vapor deposition of a metal such as nickel chrome. A predetermined pattern can be deposited on the portion. Note that a metal film such as gold having a thickness of about 0.01 to 2.0 μm is formed on the exposed surface of the second electrode 9 in order to prevent the second electrode 9 from being oxidatively corroded. May be.

If the diaphragm 2 is made of ceramics, it is preferable to deposit the metal layer by a thin film forming method after the surface of the diaphragm 2 is flattened by a surface grinding machine or the like. Thereby, the space | interval of the 1st electrode 7 and the 2nd electrode 9 can be made uniform over the whole surface of an electrode.

  The protrusion 12 is formed around the first electrode 7 on the surface of the insulating substrate 1 (upper surface in FIG. 1). The protrusion 12 defines a region where the diaphragm 2 is disposed. That is, the protrusion 12 is used for alignment when the diaphragm 2 is disposed at a position opposed to the surface of the insulating base 1, so that the diaphragm 2 can be accurately disposed at a predetermined position on the surface of the insulating base 1. It is possible to increase the positional accuracy between the first electrode and the second electrode.

  If the outer side of the diaphragm has a quadrangular shape, the protruding portion may be formed so that the protruding portion is positioned on the outer periphery of at least three sides of the diaphragm. For example, as shown in FIG. 1 and FIG. 3, the three protrusions 12 are formed on the outer periphery of the three sides of the diaphragm, and as shown in FIG. The protrusion 12 may be formed on the side.

  The protrusion 12 is preferably formed within a range of 150 μm from the outer periphery of the insulating plate 2. If it exceeds 150 μm, the effect of suppressing the displacement of the diaphragm 2 from the insulating substrate 1 becomes small.

  The spacer 11 defines an interval between the insulating base 1 and the diaphragm 2. The spacer 11 includes a first metallized layer 8, a second metallized layer 10, and a brazing material 14.

  The first metallized layer 8 is deposited around the first electrode 7 on the other surface (the lower surface in FIG. 1) of the insulating substrate 1. The first metallized layer 8 is electrically bonded to the second electrode 9 of the diaphragm 2 by being bonded to the second metallized layer 10. A wiring conductor 5b, which is one of the wiring conductors 5, is electrically connected to the first metallized layer 8, and an electrode of the semiconductor element 3 is connected to the wiring conductor 5b with a conductive bonding material 6 such as a solder bump. As a result, the second electrode 9 electrically connected to the first metallized layer 8 and the electrode of the semiconductor element 3 are electrically connected.

  Such a first metallized layer 8 is made of a metal layer deposited by a thick film forming method or a thin film forming method. For example, if the first metallized layer 8 is composed of a metal layer deposited by a thick film forming method, it is composed of metal powder metallized such as tungsten, molybdenum, copper, silver, etc., and is suitable for metal powder such as tungsten. A metallized paste obtained by adding and mixing an organic binder, a solvent, a plasticizer, and a dispersant is printed on a ceramic green sheet for the insulating substrate 1 by a screen printing method and baked, whereby the other of the insulating substrate 1 is baked. A predetermined frame-like pattern is formed around the first electrode 7 on the surface.

  It should be noted that the exposed surface of the first metallized layer 8 has a thickness to prevent the first metallized layer 8 from being oxidatively corroded and to strengthen the bonding with the second metallized layer 10 described later. Is preferably applied with a nickel plating layer 8a of about 1 to 10 μm.

  If the first metallized layer 8 is made of a metal layer deposited by a thin film forming method, for example, a metal such as nickel chrome is used to form the insulating substrate 1 by using a thin film forming method such as a vapor deposition method. A predetermined pattern can be deposited on the center of the upper surface. The exposed surface of the first metallized layer 8 has a thickness in order to prevent the first metallized layer 8 from being oxidized and corroded and to strengthen the bonding with the second metallized layer 10 described later. A metal film of gold or the like having a thickness of about 0.01 to 2.0 μm may be formed.

  The second metallized layer 10 is formed around the second electrode 9 of the diaphragm 2 (the lower surface of the diaphragm 2 in FIG. 1). The second metallized layer 10 is bonded to the second electrode 9 and the first metallized layer 8, and the electrode of the semiconductor element 3 is connected to the wiring conductor 5b through a conductive bonding material 6 such as a solder bump. As a result, the electrode of the semiconductor element 3 and the second electrode 9 are electrically connected.

  The second metallized layer 10 is made of a metal layer deposited by a thick film forming method or a thin film forming method. For example, if the second metallized layer 10 is composed of a metal layer deposited by a thick film forming method, it is composed of metal powder metallized such as tungsten, molybdenum, copper, silver, etc., and is suitable for metal powder such as tungsten. The second electrode 9 of the diaphragm 2 is obtained by printing and applying a metallized paste obtained by adding and mixing an organic binder, a solvent, a plasticizer, and a dispersant onto a ceramic green sheet for the diaphragm 2 by screen printing and baking. A frame-like pattern is formed around The exposed surface of the second metallized layer 10 has a thickness of 1 in order to prevent the second metallized layer 10 from being oxidized and corroded and to strengthen the bonding with the first metallized layer 8. A nickel plating layer of about 10 μm is applied.

  If the second metallized layer 8 is made of a metal layer deposited by a thin film forming method, for example, a metal such as nickel chrome is used to form the insulating substrate 1 by using a thin film forming method such as a vapor deposition method. A predetermined pattern can be deposited on the center of the upper surface. The exposed surface of the second metallized layer 10 has a thickness of 0 in order to prevent the second metallized layer 10 from being oxidatively corroded and to strengthen the bonding with the first metallized layer 8. A metal film such as gold having a thickness of about 0.01 to 2.0 μm may be formed.

  The second electrode 9 may be deposited on almost the entire surface of the diaphragm 2 facing the insulating base 1 (the lower surface in FIG. 1), and the outer periphery of the second electrode 9 may be the second metallized layer 10. . Further, the second electrode 9 is deposited on the central portion of the surface (the lower surface in FIG. 1) of the diaphragm 2 facing the insulating base 1, and the second electrode 9 is applied to the main surface of the diaphragm 2 around the second electrode 9. The second metallized layer 10 electrically connected to the electrode 9 may be formed separately.

  The first electrode 7 and the second electrode 9 are joined together so that a space is formed therebetween, whereby the opposing area of the first electrode 7 and the second electrode 9 and the first electrode 7 A predetermined capacitance corresponding to the distance between the second electrodes 9 is formed. When an external pressure is applied to the upper surface of the diaphragm 2, the diaphragm 2 is bent toward the insulating base 1 in accordance with the pressure, and the distance between the first electrode 7 and the second electrode 9 is changed. Since the capacitance between the first electrode 7 and the second electrode 9 changes, it functions as a pressure-sensitive element that senses a change in external pressure as a change in capacitance. The change in capacitance is transmitted to the semiconductor element 3 accommodated in the recess 1a via the wiring conductors 5a and 5b, and the semiconductor element 3 performs arithmetic processing to reduce the magnitude of the external pressure. Can be detected. That is, the semiconductor element 3 detects the pressure applied to the diaphragm 2 based on the change in capacitance between the first electrode 7 and the second electrode 9.

  The package for a pressure detection device of the present invention includes a protrusion 12 that is formed around the first electrode 7 on the surface of the insulating substrate 1 and that defines a region in which the diaphragm is disposed, and includes the first electrode 7 and the second electrode 7. Since the electrode 9 is a metallized layer whose surface is polished or a metal layer deposited by a thin film formation method, it is possible to reduce the size while improving the pressure detection accuracy.

  That is, the package for a pressure detection device according to the present invention includes a projection 12 that is formed around the first electrode 7 on the surface of the insulating base 1 and defines a region where the diaphragm 2 is disposed. When the insulating base 1 is disposed at a position facing the surface of the insulating base 1, the protrusion 12 is used for alignment between the diaphragm 2 and the insulating base 1 to suppress the positional deviation of the diaphragm 2, and the diaphragm 2 is fixed to the insulating base 1. It can arrange | position with a predetermined position on the surface with high precision, and can make the positional accuracy of a 1st electrode and a 2nd electrode high. Therefore, it is possible to improve the detection accuracy of the external pressure and reduce the variation in pressure detection.

  The first electrode 7 and the second electrode 9 are a metallized layer whose surface is polished or a metal layer deposited by a thin film formation method, so that the first electrode 7 and the second electrode 9 Each thickness variation can be reduced, the distance between the first electrode 7 and the second electrode 9 can be made uniform over the entire surface, and the external pressure can be detected with high accuracy.

  Further, since the second electrode can be formed thinly on the lower surface of the diaphragm 2, the mass of the second electrode 9 applied to the diaphragm 2 is reduced, and when the second electrode 9 is subjected to centrifugal force, The displacement of the diaphragm 2 due to the mass can be kept small. Further, by forming the second electrode 9 thinly on the diaphragm 2, the mass of the second electrode 9 applied to the diaphragm 2 can be reduced, and the influence of the second electrode 9 on the deformation of the diaphragm 2 is reduced. Therefore, it becomes easy to form the diaphragm 2 as a thin and flat one. Therefore, by making the diaphragm 2 when the external pressure is applied easier to bend, the external pressure can be detected with high sensitivity, and the diaphragm 2 and the second electrode 9 for obtaining a required capacity can be obtained. The area can be reduced, and the mass of the diaphragm 2 and the second electrode 9 can be further reduced to reduce the influence of centrifugal acceleration.

  Further, as shown in FIG. 5, in the pressure detection device package of the present invention, it is preferable that the protruding portion 12 is formed so as to protrude from the diaphragm 2. With such a configuration, when handling the pressure detection device package, the possibility that the device or the like contacts the outer side or corner of the diaphragm 2 can be reduced, and the diaphragm 2 can be prevented from cracking.

  Moreover, as shown in FIG. 6, in the package for pressure detection apparatuses of this invention, it is preferable that the protrusion part 12 is formed in frame shape. With this configuration, when the package for the pressure detection device is handled, the possibility that the device or the like comes into contact with the outer side or corner of the diaphragm 2 can be further reduced, and the diaphragm 2 can be prevented from cracking. In the pressure detection device shown in FIG. 6, the protrusion 12 is formed on the entire surface around the area where the diaphragm 2 is disposed on the upper surface of the package.

  Moreover, in the package for pressure detection apparatuses of this invention, it is preferable that the projection part 12 has a linear part in planar view. When the diaphragm 2 is disposed at a position facing the surface of the insulating base 1, the position of the protrusion 12 can be accurately recognized by a straight line portion using an image camera or the like. It is possible to accurately arrange at a predetermined position. Therefore, the external pressure can be detected with high accuracy.

  Moreover, it is preferable that the diaphragm 2 and the protrusion part 12 consist of ceramics. With this configuration, when the diaphragm 2 is disposed at a position facing the surface of the insulating substrate 1, the diaphragm 2 and the protrusion 12 are rubbed and the diaphragm 2 and the protrusion 12 are chipped or scraped when rubbed. It is possible to reduce the generation of waste and the interposition between the insulating base 1 and the diaphragm 2. Therefore, it can be set as the package for pressure detectors which can detect an external pressure accurately.

  In order to make the mechanical strength of the diaphragm 2 and the protrusion 12 close to each other, for example, when the diaphragm is made of an aluminum oxide sintered body, the protrusion 12 is also preferably made of an aluminum oxide sintered body. That is, it is preferable that the diaphragm and the protrusion are made of the same material.

  Further, as shown in FIG. 7, in the package for a pressure detection device of the present invention, the spacer 11 includes a first metallized layer 8 formed on the insulating substrate 1 and a second metallized layer 10 formed on the diaphragm. It is preferable to have a plating layer 13 formed between the first metallized layer 8 and the second metallized layer 10. With this configuration, the spacer 11 can be easily formed thin, and the distance between the first electrode 7 and the second electrode 9 forming the electrostatic capacity can be reduced.

  In addition, since the distance between the first electrode 7 and the second electrode 9 can be reduced, the facing area between the first electrode 7 and the second electrode 9 forming a required capacitance can be reduced to reduce the diaphragm 2. The pressure detecting device package of the present invention can be made smaller, the mass of the diaphragm 2 and the second electrode 9 can be further reduced, and the influence of centrifugal force can be further reduced. Will be able to.

  The first metallized layer 8 is preferably formed in the same manner as the first electrode 7 and has the same thickness. For example, if the first electrode 7 is made of a polished metallized layer, the first metallized layer 8 is a polished metallized layer, and the first electrode 7 is deposited by a thin film forming method. The first metallized layer 8 is preferably a metal layer deposited by a thin film forming method. The second metallized layer 10 is preferably formed in the same manner as the second electrode 9 and has the same thickness. For example, if the second electrode 9 is made of a polished metallized layer, the second metallized layer 10 is a polished metallized layer and the second electrode 9 is deposited by a thin film forming method. The second metallized layer 10 is preferably a metal layer deposited by a thin film forming method. As a result, the thickness of the plating layer 13 and the brazing material 14 can be set as an interval for forming a capacitance between the first electrode 7 and the second electrode 9. It is easy to adjust the distance between the two electrodes 9 and the distance between the insulating base 1 and the diaphragm 2.

  Further, since the first metallized layer 8 and the second metallized layer 10 are firmly joined by the brazing material 14 via the plating layer 13, the insulating base 1 and the diaphragm 2 are joined with high airtightness. The pressure in the sealed space can be kept constant and the external pressure can be detected with high sensitivity.

  In addition, since the distance between the first electrode 7 and the second electrode 9 can be reduced, the opposing area between the first electrode 7 and the second electrode 9 forming a required capacitance can be reduced to reduce the diaphragm. 2 can be reduced, the pressure detection device package of the present invention can be reduced in size, the mass of the diaphragm 2 and the second electrode 9 can be further reduced, and the influence of centrifugal force can be further reduced. it can.

  Further, the brazing material 14 is made of gold-tin alloy solder or the like, and if it is thinly deposited by a thin film forming method or the like, the space between the first electrode 7 and the second electrode 9 is smaller. High sensitivity and small size can be achieved.

  The plated layer 13 surrounds the first electrode 7 by depositing a metal such as gold of about 0.3 to 10 μm in a frame shape on the second metallized layer by an electroless plating method or the like. And forming a sealed space between the insulating base 1 and the diaphragm 2 by joining the first metallized layer 8 with a brazing filler metal 14 such as gold-tin alloy solder. The first metallized layer 8 and the second metallized layer 10 are electrically connected to electrically connect the second electrode 9 to the semiconductor element.

  The plated layer 13 may be a metal plate such as a gold foil having a thickness of about 0.3 to 10 μm that is attached to the outer peripheral portion of the diaphragm 2 in a frame shape. Further, although the example in which the plating layer 13 is formed on the surface of the second metallized layer 10 has been shown, it is formed on the surface of the first metallized layer 8, and this plating layer 11 is formed on the second outer peripheral portion of the diaphragm 2. The metallized layer 10 may be joined by a brazing material 14. Alternatively, the plated layer 13 may be formed on the surface of each of the first metallized layer 8 and the second metallized layer 10, and these plated layers 13 may be joined to each other by the brazing material 14.

  Further, as shown in FIG. 8, a plating layer 13 is formed on at least one surface of the first metallization layer 8 and the second metallization layer 10, and the first metallization layer 8 and the second metallization layer 8 are interposed via the plating layer 13. The metallized layer 10 may be joined by thermocompression bonding. Accordingly, the first metallized layer 8 and the second metallized layer 10 can be joined without depending on the brazing material 14, so that the thickness of the plating layer 13 is set to the first electrode 7 and the second electrode 9. Therefore, the plating layer 13 can be formed thinner than the conventional frame-shaped protrusions formed on the outer peripheral portion of the insulating base 1 or the diaphragm 2, so that the first electrode for forming the capacitance is formed. The distance between 7 and the second electrode 9 can be made small.

  Further, since the first metallized layer 8 and the second metallized layer 10 are thermocompression bonded via the plating layer 13, the insulating base 1 and the diaphragm 2 are bonded without using a bonding material such as the brazing material 14 or the like. In addition, it is possible to effectively prevent the thickness of the bonding material from being biased at the time of bonding, and to make the insulating substrate 1 and the diaphragm 2 extremely parallel. As a result, the external pressure can be detected with higher accuracy.

  Further, since the distance between the first electrode 7 and the second electrode 9 can be reduced, the facing area between the first electrode 7 and the second electrode 9 forming a required capacitance can be reduced. Therefore, the diaphragm 2 can be made smaller, the pressure detecting device package of the present invention can be reduced in size, the mass of the diaphragm 2 and the second electrode 9 can be further reduced, and the influence of centrifugal force can be further reduced. Can be reduced.

  The first metallized layer 8 is preferably formed in the same manner as the first electrode 7 and has the same thickness. For example, if the first electrode 7 is made of a polished metallized layer, the first metallized layer 8 is a polished metallized layer, and the first electrode 7 is deposited by a thin film forming method. The first metallized layer 8 is preferably a metal layer deposited by a thin film forming method. The second metallized layer 10 is preferably formed in the same manner as the second electrode 9 and has the same thickness. For example, if the second electrode 9 is made of a polished metallized layer, the second metallized layer 10 is a polished metallized layer and the second electrode 9 is deposited by a thin film forming method. The second metallized layer 10 is preferably a metal layer deposited by a thin film forming method. Thereby, the thickness of the plating layer 13 can be set as an interval for forming a capacitance between the first electrode 7 and the second electrode 9, and the first electrode 7 and the second electrode 9 can be formed. And the distance between the insulating substrate 1 and the diaphragm 2 can be easily adjusted.

  The plating layer 13 is formed by, for example, depositing a metal such as gold having a thickness of about 0.3 to 10 μm on the outer peripheral portion of the second metallized layer 10 in a frame shape by an electroless plating method or the like. The first metallization layer 8 and the plating layer 13 are thermocompression-bonded to form a sealed space between the insulating base 1 and the diaphragm 2 and the first metallization. The second electrode 9 is electrically connected to the semiconductor element 3 by electrically connecting the layer 8 and the second metallized layer 10.

  Note that the plating layer 13 may be a metal plate such as a gold foil having a thickness of about 0.3 to 10 μm attached to the outer peripheral portion of the diaphragm 2 in a frame shape by thermocompression bonding or the like. Further, although the example in which the plating layer 13 is deposited on the surface of the second metallized layer 10 has been shown, the plating layer 13 is deposited on the surface of the first metallized layer 8, and this plated layer 13 is deposited on the outer peripheral portion of the diaphragm 2. The metallized layer 10 may be bonded to the second metallized layer 10 by thermocompression bonding. Alternatively, the plated layer 13 may be formed on the surface of each of the first metallized layer 8 and the second metallized layer 10, and the plated layers 13 may be bonded to each other by thermocompression bonding.

  Further, after the plated layer 13 is thermocompression bonded and the first metallized layer 8 and the second metallized layer 10 are joined, the outer periphery of the plated layer 13 is covered with a brazing material 14 such as gold-tin alloy solder. It doesn't matter. Thereby, by further sealing the sealed space between the insulating base 1 and the insulating plate 2 joined by thermocompression bonding with the brazing filler metal 14 at the outer peripheral portion, it is possible to further increase the airtightness. Therefore, since the pressure in the sealed space can be kept constant, it is possible to provide a small pressure detection device package that can accurately detect the external pressure when the external pressure changes.

  The pressure device according to the present invention is mounted on the mounting portion of the pressure detection device package according to the present invention and the insulating base, and is based on a change in capacitance between the first electrode and the second electrode. And a semiconductor element for detecting pressure applied to the diaphragm. With such a configuration, it is possible to improve the pressure detection accuracy while reducing the size.

  Thus, according to the package for a pressure detection device of the present invention, the first electrode 7 for forming a capacitance is attached to the other main surface of the insulating substrate 1 on which the semiconductor element 3 is mounted on one main surface. In addition, the inner surface of the diaphragm 2 joined to the insulating base 1 in a flexible state so as to form a sealed space with the insulating base 1 is covered with the first electrode 7 so as to face the first electrode 7. Since the attached second electrode 9 for forming capacitance is provided, the container for housing the semiconductor element 3 and the pressure sensitive element are integrated, and as a result, the pressure detection device can be miniaturized. .

  In addition, the first electrode 7 and the second electrode 9 for forming capacitance are connected to the respective electrodes of the semiconductor element 3 through the wiring conductors 5a and 5b disposed on the surface of the insulating substrate 1 and inside thereof. Therefore, the first electrode 7 and the second electrode 9 can be connected to the semiconductor element 3 at a short distance, and as a result, the unnecessary capacitance generated between the wiring conductors 5a and 5b is reduced to a small sensitivity. It is possible to provide a high pressure detection device package.

  Note that the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the present invention. For example, the plating layer 13 may not be formed up to the outer peripheral portion of the first metallized layer 8 or the second metallized layer 10, and after the insulating substrate 1 and the diaphragm 2 are bonded via the plating layer 13, The brazing material 14 may cover the outer peripheral portion of the plating layer 13 and may cover the outer peripheral portion of the first metallized layer 8 or the second metallized layer 10. Further, an insulating film may be deposited on at least one surface of the first electrode 7 and the second electrode 9. By attaching an insulating film to at least one of the first electrode 7 and the second electrode 9, the first electrode 7 and the second electrode 9 are short-circuited when the diaphragm 2 is bent. Can be prevented.

It is a top view which shows the structure of the 1st example of embodiment of the package for pressure detection apparatuses of this invention. It is sectional drawing in the X-X 'line | wire of the package for pressure detection apparatuses shown in FIG. It is a top view which shows the structure of the 2nd example of embodiment of the package for pressure detection apparatuses of this invention. It is a top view which shows the structure of the 3rd example of embodiment of the package for pressure detection apparatuses of this invention. It is sectional drawing which shows the structure of the 4th example of embodiment of the package for pressure detection apparatuses of this invention. It is a top view which shows the structure of the 5th example of embodiment of the package for pressure detection apparatuses of this invention. It is sectional drawing which shows the structure of the 6th example of embodiment of the package for pressure detection apparatuses of this invention. It is sectional drawing which shows the structure of the 7th example of embodiment of the package for pressure detection apparatuses of this invention.

Explanation of symbols

1 ········ Insulating base 1a ···················································・ Diaphragm 3 ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ Semiconductor element 4 ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ Resin encapsulant 5, 5a, 5b ・ ・ ・ ・ ・ Wiring conductor 6 ...・ ・ ・ ・ ・ ・ ・ Conductive bonding material 7 ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ First electrode 8 ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ First metallized layer 9 ・ ・ ・2nd electrode 10 2nd metallization layer 12 Projection 13 Plating layer 14 .... brazing material

Claims (7)

An insulating substrate having a mounting portion on which a semiconductor element is mounted and having a first electrode formed on a surface thereof; a second electrode facing the first electrode; and facing the surface of the insulating substrate A diaphragm disposed at a position where the diaphragm is disposed, a spacer formed between the surface of the insulating base and the diaphragm, and the first electrode on the surface of the insulating base, the diaphragm being disposed A package for a pressure detecting device, wherein the first electrode and the second electrode are metallized layers or thin film metal layers whose surfaces are polished. The package for a pressure detection device according to claim 1, wherein a tip of the protruding portion is formed to protrude upward from the diaphragm. The pressure detection device package according to claim 1, wherein the protrusion is formed in a frame shape. The pressure detection device package according to any one of claims 1 to 3, wherein the protrusion has a linear portion in plan view. The package for a pressure detection device according to claim 1, wherein the diaphragm and the protrusion are made of ceramics. The spacer is formed between the first metallized layer formed on the insulating substrate, the second metallized layer formed on the diaphragm, and the first metallized layer and the second metallized layer. The package for a pressure detection device according to any one of claims 1 to 5, comprising a plating layer. A package for a pressure detection device according to any one of claims 1 to 6, and a semiconductor element mounted on the mounting portion of the insulating base and detecting pressure applied to the diaphragm. A pressure detection device.

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