JP2006106227A - レーザ加工方法および装置 - Google Patents
レーザ加工方法および装置 Download PDFInfo
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- JP2006106227A JP2006106227A JP2004290842A JP2004290842A JP2006106227A JP 2006106227 A JP2006106227 A JP 2006106227A JP 2004290842 A JP2004290842 A JP 2004290842A JP 2004290842 A JP2004290842 A JP 2004290842A JP 2006106227 A JP2006106227 A JP 2006106227A
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Abstract
【解決手段】 光造形用の材料として、液状の光硬化性樹脂ではなく、固体である光架橋反応性のポジ型レジスト材料を用い、これにパルスレーザ光を走査しながら集光照射し、集光位置に多光子吸収による光架橋反応を生起させることにより、異方的な形状を有する物体から成る複雑で微細な構造物を作製する。このとき、光架橋反応が十分に生起するように、パルスレーザ光の強度および走査速度をそれぞれ最適値に設定する。
【選択図】 図1
Description
・対物レンズ116:倍率=100倍、開口数(NA値)=1.35
・レーザ:フェムト秒パルス発振のチタンサファイアレーザ、パルス幅=130フェムト秒、波長=800nm、発振繰り返し周波数=100Hz
・3次元駆動ステージ110:走査速度=秒速5μm
従って、この場合、発振繰り返し周波数が100Hzであるため、書き込みにおいて隣接するボクセル間の距離は50nmとなる。
102 試料
104 レーザ装置
106 照射光学系
108 観察用光学系
110 3次元駆動ステージ
112 ステージコントローラ
114 制御用コンピュータ
116 対物レンズ
118 照射条件用メモリ
120 走査形態用メモリ
Claims (4)
- 光架橋反応性のレジスト固体材料にパルスレーザ光を走査しながら集光照射し、多光子吸収による光架橋反応を集光位置に生起させて、微小立体構造物を作製するレーザ加工方法において、
前記光架橋反応が十分に生起するように、前記パルスレーザ光の強度および走査速度を設定することを特徴とするレーザ加工方法。 - 前記パルスレーザ光の強度は、前記集光位置において1パルス当たり1nJ以下であり、前記パルスレーザ光の走査速度は、隣接する加工位置スポット間の距離が100nm以下になるように設定されることを特徴とする請求項1記載のレーザ加工方法。
- 前記微小立体構造物の長軸方向に対して前記パルスレーザ光の光軸方向および走査方向は共に平行であることを特徴とする請求項1記載のレーザ加工方法。
- パルスレーザ光を発生するレーザ光発生手段と、
前記パルスレーザ光を光架橋反応性のレジスト固体材料に集光照射する光学系と、
前記パルスレーザ光を走査する走査手段と、を有し、
前記パルスレーザ光の集光位置において生起される多光子吸収による光架橋反応が十分に生起するように、前記パルスレーザ光の強度および走査速度を設定する、
ことを特徴とするレーザ加工装置。
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JP4599553B2 JP4599553B2 (ja) | 2010-12-15 |
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KR101064352B1 (ko) | 2008-11-27 | 2011-09-14 | 한국표준과학연구원 | 광유발 과도흡수 현상을 이용한 초고속레이저 공정 속도와 공정단면 제어방법 및 제어장치 |
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JP2015179293A (ja) * | 2008-02-26 | 2015-10-08 | スリーエム イノベイティブ プロパティズ カンパニー | 多光子露光システム |
US9537042B2 (en) | 2013-02-21 | 2017-01-03 | Nlight, Inc. | Non-ablative laser patterning |
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US10074960B2 (en) | 2015-11-23 | 2018-09-11 | Nlight, Inc. | Predictive modification of laser diode drive current waveform in order to optimize optical output waveform in high power laser systems |
US10100393B2 (en) | 2013-02-21 | 2018-10-16 | Nlight, Inc. | Laser patterning of multi-layer structures |
KR20180119395A (ko) * | 2017-04-25 | 2018-11-02 | 한남대학교 산학협력단 | 이광자 스테레오리소그라피에 의한 3차원 메쉬형 미세구조체 제조방법 |
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